JP2001185975A - 表面弾性波素子 - Google Patents

表面弾性波素子

Info

Publication number
JP2001185975A
JP2001185975A JP36495499A JP36495499A JP2001185975A JP 2001185975 A JP2001185975 A JP 2001185975A JP 36495499 A JP36495499 A JP 36495499A JP 36495499 A JP36495499 A JP 36495499A JP 2001185975 A JP2001185975 A JP 2001185975A
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric material
substrate
acoustic wave
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP36495499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001185975A5 (cg-RX-API-DMAC7.html
Inventor
Setsuya Iwashita
節也 岩下
Amamitsu Higuchi
天光 樋口
Hiroshi Miyazawa
弘 宮澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP36495499A priority Critical patent/JP2001185975A/ja
Publication of JP2001185975A publication Critical patent/JP2001185975A/ja
Publication of JP2001185975A5 publication Critical patent/JP2001185975A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP36495499A 1999-12-22 1999-12-22 表面弾性波素子 Withdrawn JP2001185975A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36495499A JP2001185975A (ja) 1999-12-22 1999-12-22 表面弾性波素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36495499A JP2001185975A (ja) 1999-12-22 1999-12-22 表面弾性波素子

Publications (2)

Publication Number Publication Date
JP2001185975A true JP2001185975A (ja) 2001-07-06
JP2001185975A5 JP2001185975A5 (cg-RX-API-DMAC7.html) 2004-10-14

Family

ID=18483077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36495499A Withdrawn JP2001185975A (ja) 1999-12-22 1999-12-22 表面弾性波素子

Country Status (1)

Country Link
JP (1) JP2001185975A (cg-RX-API-DMAC7.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6995634B2 (en) 2003-01-29 2006-02-07 Seiko Epson Corporation Surface-acoustic-wave component adapted to electronic circuit and device, and manufacturing method therefor
JPWO2005050836A1 (ja) * 2003-11-19 2007-06-14 株式会社村田製作所 端面反射型弾性表面波装置及びその製造方法
WO2016185772A1 (ja) * 2015-05-15 2016-11-24 株式会社村田製作所 弾性表面波装置及びその製造方法
JP2023060058A (ja) * 2019-01-30 2023-04-27 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
CN117318661A (zh) * 2023-10-24 2023-12-29 浙江星曜半导体有限公司 一种薄膜声表面波谐振器及滤波器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6995634B2 (en) 2003-01-29 2006-02-07 Seiko Epson Corporation Surface-acoustic-wave component adapted to electronic circuit and device, and manufacturing method therefor
JPWO2005050836A1 (ja) * 2003-11-19 2007-06-14 株式会社村田製作所 端面反射型弾性表面波装置及びその製造方法
WO2016185772A1 (ja) * 2015-05-15 2016-11-24 株式会社村田製作所 弾性表面波装置及びその製造方法
US10910546B2 (en) 2015-05-15 2021-02-02 Murata Manufacturing Co., Ltd. Surface acoustic wave device and method of manufacturing the same
JP2023060058A (ja) * 2019-01-30 2023-04-27 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
JP7553622B2 (ja) 2019-01-30 2024-09-18 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ
CN117318661A (zh) * 2023-10-24 2023-12-29 浙江星曜半导体有限公司 一种薄膜声表面波谐振器及滤波器

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