JP2001180915A - Ozone generating facilities and its operating method - Google Patents
Ozone generating facilities and its operating methodInfo
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- JP2001180915A JP2001180915A JP36099199A JP36099199A JP2001180915A JP 2001180915 A JP2001180915 A JP 2001180915A JP 36099199 A JP36099199 A JP 36099199A JP 36099199 A JP36099199 A JP 36099199A JP 2001180915 A JP2001180915 A JP 2001180915A
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- gas
- concentration
- ozone
- oxygen
- generator
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧力変動吸着法
（以下、ＰＳＡ法という）による酸素発生装置で発生さ
せた酸素ガスを原料ガスとして放電式のオゾン発生装置
に送給してオゾンガスを発生させるオゾン発生設備に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for generating ozone gas by supplying oxygen gas generated by an oxygen generator using a pressure fluctuation adsorption method (hereinafter referred to as PSA method) to a discharge type ozone generator as a raw material gas. The present invention relates to an ozone generation facility to be used.
【０００２】水処理を始めとする各種の酸化化学処理に
オゾンが使用されている。このオゾンは工業的には放電
式のオゾン発生装置で発生させたものが使用されてい
る。放電式のオゾン発生装置では、原料ガスとして空気
又は酸素ガスが使用されるが、処理効率に優れる高濃度
のオゾンガスが必要な場合は酸素ガスが使用され、その
酸素ガスの供給源としては、我が国ではＰＳＡ法による
酸素発生装置が多用されている。これは、今一つの供給
源である液体酸素の価格が諸外国に比べて高いこと、地
方では液体酸素の供給拠点が少ないこと、酸素発生装置
が比較的安価なことなどが理由とされている。[0002] Ozone is used in various oxidation chemical treatments including water treatment. This ozone is industrially generated by a discharge-type ozone generator. In a discharge-type ozone generator, air or oxygen gas is used as a raw material gas, but when high-concentration ozone gas with excellent processing efficiency is required, oxygen gas is used. In such a case, an oxygen generator based on the PSA method is frequently used. This is because the price of liquid oxygen, another source, is higher than in other countries, the number of liquid oxygen supply bases is small in rural areas, and the oxygen generator is relatively inexpensive.
【０００３】ＰＳＡ法による酸素発生装置は、合成ゼオ
ライトの酸素と窒素に対する吸着特性の差を利用して空
気から酸素ガスを製造するものである。即ち、窒素の吸
着量が多いことから、加圧により窒素を吸着させる工程
と、減圧・酸素パージにより窒素を離脱させる工程とを
繰り返す操作により、空気から酸素ガスを製造する。連
続的な製造を行うために、複数の吸着塔が切り換え使用
される。製造される酸素ガスの濃度は９６％以下であ
る。An oxygen generator using the PSA method produces oxygen gas from air by utilizing the difference in the adsorption characteristics of synthetic zeolite for oxygen and nitrogen. That is, since the amount of adsorbed nitrogen is large, oxygen gas is produced from air by repeating the operation of adsorbing nitrogen by pressurization and the process of desorbing nitrogen by depressurization and oxygen purging. In order to carry out continuous production, a plurality of adsorption towers are used alternately. The concentration of the produced oxygen gas is 96% or less.
【０００４】ＰＳＡ法による酸素発生装置に固有の特性
の一つとして、製造される酸素ガスの濃度が流量の影響
を受けることがある。ＰＳＡ法による酸素発生装置での
酸素流量と酸素濃度の関係を図１（ａ）に示すが、流量
の小さい領域で最大の酸素濃度（約９５％）が安定的に
得られる。流量を増大していくと、或る点を境にして酸
素濃度が低下し始め、以後、流量が大きくなるほど酸素
濃度が低下する。[0004] As one of the characteristics peculiar to the oxygen generator by the PSA method, the concentration of the produced oxygen gas may be affected by the flow rate. FIG. 1A shows the relationship between the oxygen flow rate and the oxygen concentration in the oxygen generator using the PSA method. The maximum oxygen concentration (about 95%) can be stably obtained in the low flow rate region. As the flow rate increases, the oxygen concentration starts to decrease at a certain point, and thereafter, as the flow rate increases, the oxygen concentration decreases.
【０００５】オゾン発生装置に供給される酸素ガスの濃
度は高いにこしたことはないが、そのガス流量の低下は
生産性に重大な影響を与える。一方、後で詳しく説明す
るが、従来のオゾン発生装置では、９５％を超えるよう
な高い酸素濃度は必ずしも必要ではなく、酸素濃度が９
０％程度でも問題のない運転が行われる。これらのた
め、オゾン発生装置に組み合わされる酸素発生装置は、
これまでは９０〜９３％程度の酸素濃度が得られる比較
的大流量の領域で運転されている。[0005] The concentration of oxygen gas supplied to the ozone generator has never been higher, but a decrease in the gas flow rate has a significant effect on productivity. On the other hand, as will be described in detail later, in the conventional ozone generator, a high oxygen concentration exceeding 95% is not necessarily required, and the oxygen concentration is 9%.
Even at about 0%, operation without problems is performed. For these reasons, the oxygen generator combined with the ozone generator is
Until now, it has been operated in a relatively large flow rate region where an oxygen concentration of about 90 to 93% can be obtained.
【０００６】[0006]
【発明が解決しようとする課題】ところで、放電式のオ
ゾン発生装置で発生されるオゾンガスのオゾン濃度は、
これまでは１５０ｇ／Ｎｍ3 未満で、１２０ｇ／Ｎｍ3
程度が最高であったが、最近になって本出願人は、オゾ
ン発生装置の放電セル等に様々な改良を加えることによ
り、１５０ｇ／Ｎｍ3 以上の高濃度オゾンガス、更には
２００ｇ／Ｎｍ3以上の超高濃度のオゾンガスをも安定
的に発生させることが可能な高性能オゾン発生装置の開
発に成功した（特願平１０−３４６０４９号）。By the way, the ozone concentration of the ozone gas generated by the discharge type ozone generator is as follows.
Until now, it was less than 150 g / Nm 3 and 120 g / Nm 3
Although the degree was the highest, recently, the present applicant has made various improvements to the discharge cell and the like of the ozone generator to obtain high-concentration ozone gas of 150 g / Nm 3 or more, and furthermore 200 g / Nm 3 or more. (Japanese Patent Application No. 10-346049) succeeded in developing a high-performance ozone generator capable of stably generating an ultra-high concentration ozone gas.
【０００７】１５０ｇ／Ｎｍ3 以上の高濃度オゾンガ
ス、とりわけ２００ｇ／Ｎｍ3 以上の超高濃度オゾンガ
スは、例えば水処理に適用して処理効率を飛躍的に向上
させ、水処理以外にも有望な用途は数多く考えられる。
ところが、その適用にあたって、この高性能オゾン発生
装置をＰＳＡ法による酸素発生装置と組み合わせ、運転
試験を行ったところ、安定な性能が得られないことが判
明した。High-concentration ozone gas of 150 g / Nm 3 or more, particularly ultra-high-concentration ozone gas of 200 g / Nm 3 or more, is applied to, for example, water treatment to dramatically improve treatment efficiency, and is a promising application other than water treatment. There are many possibilities.
However, in applying the same, this high performance ozone generator was combined with an oxygen generator based on the PSA method and an operation test was performed. As a result, it was found that stable performance could not be obtained.
【０００８】本発明の目的は、ＰＳＡ法による酸素発生
装置で発生させた酸素ガスを放電式のオゾン発生装置に
送給してオゾンガスを発生させる場合の、オゾン濃度の
不安定を解消できるオゾン発生設備及びその運転方法を
提供することにある。An object of the present invention is to provide an ozone generator capable of eliminating the instability of the ozone concentration when the oxygen gas generated by the oxygen generator by the PSA method is supplied to the discharge type ozone generator to generate the ozone gas. An object of the present invention is to provide equipment and an operation method thereof.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に、本発明者らは高性能オゾン発生装置をＰＳＡ法によ
る酸素発生装置と組み合わせて運転したときの性能低下
について調査した。その結果、以下の事実が判明した。Means for Solving the Problems In order to achieve the above object, the present inventors investigated the performance degradation when a high performance ozone generator was operated in combination with an oxygen generator based on the PSA method. As a result, the following facts became clear.
【００１０】ＰＳＡ法による酸素発生装置で９０％の酸
素ガスを発生させた場合、酸素以外の成分は約６％のＮ
2 ガスと約４％のＡｒからなる。また、最大濃度である
９６％の酸素ガスを発生させた場合の酸素以外の成分は
実質的に約４％のＡｒのみとなる。つまり、ＰＳＡ法に
よる酸素発生装置で発生させる酸素ガス中のＮ2 濃度
は、酸素濃度によって変化し、酸素濃度の低下に伴って
上昇する。従来は、９０〜９３％という比較的低い酸素
濃度で運転されていたため、６％近い量のＮ2 ガスが含
まれていた。When 90% oxygen gas is generated by an oxygen generator using the PSA method, components other than oxygen contain about 6% N2.
It consists of two gases and about 4% Ar. In addition, when the oxygen gas having a maximum concentration of 96% is generated, the component other than oxygen is substantially only about 4% of Ar. That is, the N 2 concentration in the oxygen gas generated by the oxygen generator using the PSA method changes depending on the oxygen concentration, and increases as the oxygen concentration decreases. Conventionally, because it was operated at a relatively low oxygen concentration of 90 to 93%, it contained 6% near the amount of N 2 gas.
【００１１】一方、放電式のオゾン発生装置で発生させ
るオゾンガスのオゾン濃度は、高濃度領域では、原料ガ
スである酸素ガス中のＮ2 濃度の影響を受ける。オゾン
発生装置での発生オゾン濃度（安定濃度）と原料ガス中
のＮ2 濃度の関係を図１（ｂ）に示す。On the other hand, the ozone concentration of the ozone gas generated by the discharge type ozone generator is affected by the N 2 concentration in the oxygen gas as a raw material gas in a high concentration region. FIG. 1B shows the relationship between the ozone concentration (stable concentration) generated by the ozone generator and the N 2 concentration in the source gas.
【００１２】同図から分かるように、１００ｇ／Ｎｍ3
程度のオゾンガスを発生させる従来のオゾン発生装置の
場合は、酸素ガス中にＮ2 が含まれることにより、酸素
濃度が顕著に向上し、酸素ガス中のＮ2 濃度が０又は０
に近い極低濃度でなければ、Ｎ2 濃度に関係なくほぼ最
大のオゾン濃度が得られ、この安定な関係はＮ2 濃度が
約１０％まで維持される。このため、従来のオゾン発生
装置の場合は、酸素発生装置を９０〜９３％の酸素濃度
で運転しても何ら問題はなかった。むしろ、この運転に
よって酸素ガス中に６％近い量のＮ2 が含有されること
により、オゾン濃度が効果的に向上するのである。As can be seen from the figure, 100 g / Nm 3
In the case of a conventional ozone generator which generates about the same amount of ozone gas, the oxygen concentration is significantly improved by containing N 2 in the oxygen gas, and the N 2 concentration in the oxygen gas is reduced to 0 or 0.
If a very low concentration near, obtained near maximum ozone concentration regardless N 2 concentration, the stable relationship N 2 concentration is maintained up to about 10%. For this reason, in the case of the conventional ozone generator, there was no problem even if the oxygen generator was operated at an oxygen concentration of 90 to 93%. Rather, the ozone concentration is effectively improved by this operation containing nearly 6% of N 2 in the oxygen gas.
【００１３】ところが、１５０ｇ／Ｎｍ3 程度の高濃度
オゾンガスを発生させる高性能オゾン発生装置の場合
は、そのオゾン濃度はＮ2 濃度が約１〜３％でピークを
生じ、以後Ｎ2 濃度が増大するに連れて低下する。つま
り、酸素ガス中のＮ2 はオゾンの発生促進に依然有効で
はあるが、その促進効果はＮ2 濃度に敏感に反応し、約
１〜３％をピークとする狭い濃度範囲でしか得られな
い。２００ｇ／Ｎｍ3 以上の超高濃度オゾンガスを発生
させる高性能オゾン発生装置の場合は、この傾向が更に
顕著となる。このため、酸素発生装置を従来と同じ９０
〜９３％の酸素濃度で運転した場合は、酸素ガス中に６
％近い多量のＮ2 ガスが含まれることにより、オゾン発
生装置ではオゾン濃度が低下し、Ｎ2 濃度の高い領域で
特に顕著な低下が生じる。However, in the case of a high-performance ozone generator that generates a high-concentration ozone gas of about 150 g / Nm 3 , the ozone concentration peaks when the N 2 concentration is about 1 to 3%, and thereafter the N 2 concentration increases. It decreases as you do. In other words, N 2 in oxygen gas is still effective in promoting the generation of ozone, but the promoting effect is sensitive to the N 2 concentration and can be obtained only in a narrow concentration range having a peak of about 1 to 3%. . In the case of a high-performance ozone generator that generates an ultra-high concentration ozone gas of 200 g / Nm 3 or more, this tendency becomes more remarkable. For this reason, the oxygen generating device is set to 90
When operating at an oxygen concentration of ~ 93%, 6%
When a large amount of N 2 gas is contained, the ozone concentration is reduced in the ozone generator, and a particularly remarkable decrease occurs in a region where the N 2 concentration is high.
【００１４】これが、高性能オゾン発生装置をＰＳＡ法
による酸素発生装置と組み合わせて運転したときに安定
な性能が得られないことの理由であり、所定の高性能を
安定に得るためには、原料ガスである酸素ガス中のＮ2
濃度をオゾン発生装置の性能に応じた適正濃度に厳密に
管理することが必要となる。This is the reason that stable performance cannot be obtained when the high performance ozone generator is operated in combination with the oxygen generator based on the PSA method. N 2 in oxygen gas
It is necessary to strictly control the concentration to an appropriate concentration according to the performance of the ozone generator.
【００１５】しかし、高性能オゾン発生装置の場合、Ｎ
2 ガスの適正濃度が非常に狭い低濃度領域に限定され
る。このため、酸素発生装置での酸素濃度管理だけで
は、そのＮ2 濃度を高性能オゾン発生装置の性能に応じ
た適正濃度に管理することは困難である。酸素ガス中の
Ｎ2 濃度を高性能オゾン発生装置の性能に応じた適正濃
度に厳密に管理するためには、酸素発生装置を９５％以
上の酸素濃度で運転して、酸素ガス中からＮ2 ガスを実
質に排除し、その上で、その酸素ガスに、厳密に濃度制
御されたＮ2 ガスを別途添加して高性能オゾン発生装置
に供給することが有効である。However, in the case of a high performance ozone generator, N
2 The appropriate concentration of gas is limited to a very narrow low concentration region. For this reason, it is difficult to manage the N 2 concentration to an appropriate concentration according to the performance of the high performance ozone generator only by controlling the oxygen concentration in the oxygen generator. In order to strictly control the N 2 concentration in the oxygen gas to an appropriate concentration corresponding to the performance of the high performance ozone generator, the oxygen generator is operated at an oxygen concentration of 95% or more, and the N 2 concentration in the oxygen gas is reduced. It is effective to substantially eliminate the gas, and then separately add strictly controlled N 2 gas to the oxygen gas and supply it to the high performance ozone generator.
【００１６】通常濃度のオゾンガスを発生する従来のオ
ゾン発生装置を使用する場合にあっても、下流側での負
荷変動等により酸素発生装置でのガス流量が一時的に低
下し、酸素ガス中の酸素濃度が９５％を超えることによ
り、そのガス中のＮ2 濃度が０又はその近くまで激減す
ることがある。そうなると、従来のオゾン発生装置とい
えどもオゾン濃度が大きく低下する。酸素発生装置で発
生させた酸素ガスに別途Ｎ2 ガスを添加してオゾン発生
装置に供給する方法は、このようなオゾン濃度の不安定
を解消するにも有効である。Even in the case of using a conventional ozone generator that generates ozone gas of a normal concentration, the gas flow rate in the oxygen generator temporarily decreases due to load fluctuation on the downstream side and the like. When the oxygen concentration exceeds 95%, the N 2 concentration in the gas may be drastically reduced to or near zero. Then, even in the conventional ozone generator, the ozone concentration is greatly reduced. The method of separately adding N 2 gas to the oxygen gas generated by the oxygen generator and supplying it to the ozone generator is also effective in eliminating such instability of the ozone concentration.
【００１７】本発明のオゾン発生設備は、かかる知見に
基づいて開発されたものであり、ＰＳＡ法により空気か
ら窒素を吸着分離して濃縮した酸素ガスを原料ガスとし
て放電式のオゾン発生装置に送給してオゾンガスを発生
させるオゾン発生設備本体と、酸素発生装置からオゾン
発生装置に送給される酸素ガスにオゾン発生促進効果の
ある促進ガスを定常的及び／又は限定的に添加するガス
添加装置とを具備することにより、酸素供給源としてＰ
ＳＡ法による酸素発生装置を使用するにもかかわらず、
オゾン発生装置で発生させるオゾンガスのオゾン濃度を
安定化させるものである。The ozone generation equipment of the present invention has been developed based on such knowledge, and sends oxygen gas, which is obtained by adsorbing and separating nitrogen from air by the PSA method and condensing it, as a source gas to a discharge type ozone generator. An ozone generation equipment main body that supplies ozone gas to supply the gas, and a gas addition device that constantly and / or limitedly adds a promoting gas having an ozone generation promoting effect to the oxygen gas sent from the oxygen generator to the ozone generator. By providing P as an oxygen supply source.
Despite using the oxygen generator by the SA method,
This is to stabilize the ozone concentration of the ozone gas generated by the ozone generator.
【００１８】また、本発明のオゾン発生設備の運転方法
は、上記オゾン発生設備の運転方法であって、オゾン発
生装置に供給される酸素ガス中の促進ガス濃度が、オゾ
ン発生装置で発生させるオゾンガスのオゾン濃度に応じ
た適正濃度となるように、酸素発生装置では促進ガス濃
度が０又は適正濃度より低い高濃度の酸素ガスを発生さ
せ、且つ、ガス添加装置ではその高濃度の酸素ガスに促
進ガスを定常的に添加して促進ガス濃度の調整を行う、
促進ガス濃度調整による運転方法を第１の方法とする。The method for operating an ozone generation facility according to the present invention is the method for operating an ozone generation facility described above, wherein the concentration of the accelerating gas in the oxygen gas supplied to the ozone generation apparatus is such that the ozone gas generated by the ozone generation apparatus is The oxygen generator generates a high-concentration oxygen gas with a promoting gas concentration of 0 or lower than the proper concentration so that the concentration becomes an appropriate concentration according to the ozone concentration of the gas, and the gas adding device promotes the high-concentration oxygen gas. Adjust the concentration of the accelerating gas by constantly adding the gas,
The operation method based on the acceleration gas concentration adjustment is a first method.
【００１９】また、第２の運転方法は、オゾン発生装置
に供給される酸素ガス中の促進ガス濃度が、オゾン発生
装置で発生させるオゾンガスのオゾン濃度に応じた適正
濃度に定常的に管理されるように、酸素発生装置では促
進ガス濃度が適正濃度の酸素ガスを発生させ、且つ、ガ
ス添加装置ではその酸素ガス中の促進ガス濃度が適正濃
度から低下したときに限定的に促進ガスを添加して促進
ガス濃度の修正を行う、促進ガス濃度修正による運転方
法である。In the second operating method, the concentration of the accelerating gas in the oxygen gas supplied to the ozone generator is constantly controlled to an appropriate concentration corresponding to the ozone concentration of the ozone gas generated by the ozone generator. As described above, the oxygen generating device generates the oxygen gas having the appropriate concentration of the promoting gas, and the gas adding device adds the promoting gas only when the promoting gas concentration in the oxygen gas falls from the appropriate concentration. This is an operation method based on the correction of the concentration of the promotion gas.
【００２０】オゾン発生促進効果のある促進ガスは、酸
素発生装置で発生させた酸素ガス中ではＮ2 ガスとなる
が、その酸素ガスに添加する促進ガスとしてはＮ2 ガス
に限らず、乾燥空気、ＣＯ2 ガス等の使用も可能であ
り、これらの混合使用も可能である。これらの添加ガス
のなかではＮ2 ガスが、オゾン発生促進効果が最も高い
ことから特に好ましい。The promoting gas having the ozone generation promoting effect is N 2 gas in the oxygen gas generated by the oxygen generator, but the promoting gas to be added to the oxygen gas is not limited to N 2 gas, but may be dry air. , CO 2 gas or the like can be used, and a mixture of these can be used. Among these additional gases, N 2 gas is particularly preferred because it has the highest ozone generation promoting effect.
【００２１】オゾン発生装置で発生させるオゾンガスの
オゾン濃度に応じた適正な促進ガス濃度は、具体的に
は、オゾンガスのオゾン濃度が１５０ｇ／Ｎｍ3 未満の
通常濃度の場合で０．１〜１０％であり、特に好ましく
は０．５〜８％である。また、オゾンガスのオゾン濃度
が１５０ｇ／Ｎｍ3 以上の高濃度の場合で０．５〜５％
であり、特に好ましくは１〜３％である。The appropriate accelerating gas concentration corresponding to the ozone concentration of the ozone gas generated by the ozone generator is, specifically, 0.1 to 10% when the ozone concentration of the ozone gas is less than 150 g / Nm 3. And particularly preferably 0.5 to 8%. When the ozone concentration of the ozone gas is as high as 150 g / Nm 3 or more, 0.5 to 5%
And particularly preferably 1 to 3%.
【００２２】促進ガスの定常的な濃度調整を行う第１の
運転方法は、高濃度乃至超高濃度のオゾンガスを発生さ
せる高性能オゾン発生装置の運転に特に有効である。The first operation method for constantly adjusting the concentration of the accelerating gas is particularly effective for the operation of a high-performance ozone generator for generating ozone gas having a high concentration or an ultra-high concentration.
【００２３】具体的には、オゾン発生装置で発生させる
オゾンガスのオゾン濃度が１５０ｇ／Ｎｍ3 以上の高濃
度である場合は、酸素発生装置では９５％以上の酸素ガ
スを発生させることにより、酸素ガス中から促進ガスを
殆ど排除し、ガス添加装置では定常的に促進ガスを添加
することにより、オゾン発生装置に供給される酸素ガス
中の促進ガス濃度を適正濃度である０．１〜５％に調整
するのが好ましい。Specifically, when the ozone concentration of the ozone gas generated by the ozone generator is as high as 150 g / Nm 3 or more, the oxygen generator generates 95% or more of the oxygen gas, The accelerating gas concentration in the oxygen gas supplied to the ozone generator is reduced to an appropriate concentration of 0.1 to 5% by constantly removing the accelerating gas from the inside and constantly adding the accelerating gas in the gas addition device. Adjustment is preferred.
【００２４】また、促進ガスの限定的な濃度修正を行う
第２の運転方法は、通常濃度のオゾンガスを発生させる
オゾン発生装置の運転に特に有効である。Further, the second operation method for performing a limited concentration correction of the accelerating gas is particularly effective for the operation of an ozone generator that generates ozone gas having a normal concentration.
【００２５】具体的には、オゾン発生装置で発生させる
オゾンガスのオゾン濃度が１５０ｇ／Ｎｍ3 未満の通常
濃度である場合は、酸素発生装置では８８％以上の酸素
ガスを発生させるたことにより、酸素ガス中の促進ガス
濃度を適正濃度に管理し、ガス添加装置では促進ガス中
の促進ガス濃度が適正濃度より低下したときに限定的に
促進ガスを添加することにより、オゾン発生装置に供給
される酸素ガス中の促進ガス濃度を適正濃度である０．
１％以上に定常的に管理するのが好ましい。Specifically, when the ozone concentration of the ozone gas generated by the ozone generator is less than 150 g / Nm 3 , the oxygen gas is generated by the oxygen generator at 88% or more. The promoting gas concentration in the gas is controlled to an appropriate concentration, and the gas is supplied to the ozone generator by adding the promoting gas only when the promoting gas concentration in the promoting gas falls below the appropriate concentration in the gas adding device. The concentration of the accelerating gas in the oxygen gas is set to an appropriate concentration of 0.
It is preferable to constantly control the amount to 1% or more.
【００２６】いずれの具体的方法も、酸素発生装置での
ガス流量を最大限に確保しつつ、オゾン発生装置に供給
される酸素ガス中の促進ガス濃度を適正濃度に正確に管
理することにより、オゾン濃度の安定化を図る。In any of the specific methods, while maximizing the gas flow rate in the oxygen generator, the concentration of the accelerating gas in the oxygen gas supplied to the ozone generator is controlled accurately and accurately. Stabilize ozone concentration.
【００２７】酸素ガス中の促進ガスがオゾン濃度の増大
に有効なのは、促進ガスの放電光により放電形態がオゾ
ン発生に好ましい微小放電になるためと言われている。
また、過剰な促進ガスがオゾン濃度の増大に逆効果とな
るのは、オゾンガスの原料となる酸素自体の濃度低下に
よりオゾン濃度低下を引き起こしたり、或いは放電によ
り生成されたＮＯｘによりオゾンの分解が促進されるか
らである。It is said that the accelerating gas in the oxygen gas is effective for increasing the ozone concentration because the discharge form of the accelerating gas results in a micro discharge which is preferable for ozone generation.
In addition, the excessive promotion gas has an adverse effect on the increase in the ozone concentration because the concentration of oxygen itself as a raw material of the ozone gas causes a decrease in the ozone concentration, or the decomposition of ozone is promoted by NOx generated by the discharge. Because it is done.
【００２８】そして、促進ガスの適正濃度が高性能オゾ
ン発生装置で狭い範囲となるのは、促進ガス量が少ない
とオゾン発生の低下を引き起し、また促進ガスが多すぎ
ると酸素の濃度低下以上にオゾン濃度低下を引き起こし
たり、或いは放電により生成されたＮＯｘの増大により
オゾンの分解が急速に促進するからである。特にオゾン
濃度が高くなるほど低下が著しくなる傾向があり、促進
ガスの適正濃度がより狭くなる。The reason why the appropriate concentration of the promoting gas is narrow in the high-performance ozone generator is that if the amount of the promoting gas is small, the generation of ozone is reduced, and if the amount of the promoting gas is too large, the concentration of oxygen decreases. This is because the ozone concentration is reduced as described above, or the decomposition of ozone is rapidly promoted due to an increase in NOx generated by the discharge. Particularly, as the ozone concentration increases, the decrease tends to be remarkable, and the appropriate concentration of the accelerating gas becomes narrower.
【００２９】なお、ＰＳＡ法による酸素発生装置は、狭
い意味では主に加圧と常圧の間でスイング操作を行うも
のであるが、常圧と減圧の間でスイング操作を行うＶＳ
Ａ法も広い意味では圧力変動吸着法であり、本発明での
ＰＳＡ法はＶＳＡ法を含むものである。In the oxygen generator using the PSA method, a swing operation is mainly performed between pressurization and normal pressure in a narrow sense, but a VS that performs a swing operation between normal pressure and reduced pressure is used.
The method A is also a pressure fluctuation adsorption method in a broad sense, and the PSA method in the present invention includes the VSA method.
【００３０】[0030]
【発明の実施の形態】以下に本発明の実施形態を図面に
基づいて説明する。図２は本発明の好ましい実施形態を
示すオゾン発生設備のガス系統図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a gas system diagram of an ozone generation facility showing a preferred embodiment of the present invention.
【００３１】本実施形態では、ＰＳＡ法による酸素発生
装置１で発生させた酸素ガスがガス配管２を通して放電
式のオゾン発生装置３に送給される。In this embodiment, the oxygen gas generated by the oxygen generator 1 by the PSA method is supplied to the discharge type ozone generator 3 through the gas pipe 2.
【００３２】オゾン発生装置３は、オゾン濃度が２００
ｇ／Ｎｍ3 以上の超高濃度オゾンガスを発生させること
が可能な板型の高性能オゾナイザーである。この超高濃
度オゾンガスを発生させるために、オゾン発生装置３で
は、放電セル内の放電ギャップを０．１３ｍｍ程度に縮
小するなどの工夫が講じられている。The ozone generator 3 has an ozone concentration of 200.
This is a plate-type high performance ozonizer capable of generating an ultra-high concentration ozone gas of g / Nm 3 or more. In order to generate the ultra-high concentration ozone gas, the ozone generator 3 is designed to reduce the discharge gap in the discharge cell to about 0.13 mm.
【００３３】一方、酸素発生装置１では、従来よりガス
流量を若干低下させることにより、９５％以上の高濃度
の酸素ガスを発生させる。ここにおけるガス絞り量は、
９５％以上の高濃度の酸素ガスが得られる範囲内で出来
るだけ少なくするのが酸素製造コスト低減の点から好ま
しい。On the other hand, the oxygen generator 1 generates a high-concentration oxygen gas of 95% or more by slightly lowering the gas flow rate than before. The gas throttle amount here is
It is preferable to reduce as much as possible within a range where a high concentration of oxygen gas of 95% or more can be obtained from the viewpoint of reducing oxygen production cost.
【００３４】この酸素ガス中の酸素以外のガス成分は実
質的にＡｒのみであり、Ｎ2 は殆ど含まれない。そし
て、この酸素ガスは、ガス配管２の途中に接続されたガ
ス添加装置４で促進ガスとしてのＮ2 ガスを添加され
て、オゾン発生装置３に原料ガスとして供給される。The gas component other than oxygen in the oxygen gas is substantially only Ar, and hardly contains N 2 . Then, this oxygen gas is supplied with a N 2 gas as a promoting gas by a gas addition device 4 connected in the middle of the gas pipe 2 and supplied to the ozone generator 3 as a raw material gas.
【００３５】ガス添加装置４は、Ｎ2 ガスタンク４ａ及
び流量制御弁４ｂなどからなり、酸素ガスへのＮ2 ガス
の添加量は、酸素ガス中に微量のＮ2 ガスが含まれるこ
とを考慮して、適正濃度より若干少なめの例えば０．３
〜４．８％とされる。これにより、オゾン発生装置３に
供給される酸素ガス中のＮ2 濃度は、適正濃度である
０．５〜５％に調整される。The gas addition device 4 comprises an N 2 gas tank 4a, a flow control valve 4b, and the like. The amount of N 2 gas added to oxygen gas is determined in consideration of a small amount of N 2 gas contained in oxygen gas. And slightly lower than the appropriate concentration, for example, 0.3
To 4.8%. Thereby, the N 2 concentration in the oxygen gas supplied to the ozone generator 3 is adjusted to an appropriate concentration of 0.5 to 5%.
【００３６】このような運転を行うことにより、酸素供
給源としてＰＳＡ方式の酸素発生装置１を使用するにも
かかわらず、２００ｇ／Ｎｍ3 以上の超高濃度オゾンガ
スが安定して得られる。ちなみに、従来の運転法、即
ち、酸素発生装置１で９０〜９３％の酸素ガスを発生さ
せてオゾン発生装置３に直接供給した場合は、酸素ガス
中に過剰に含まれるＮ2 ガスによりオゾンガスの濃度が
低下が生じる。By performing such an operation, an ultra-high concentration ozone gas of 200 g / Nm 3 or more can be stably obtained despite the use of the PSA type oxygen generator 1 as an oxygen supply source. Incidentally, the conventional driving method, i.e., if the oxygen generator 1 to generate 90-93% of the oxygen gas is supplied directly to the ozone generator 3, the ozone gas with N 2 gas contained in excess in the oxygen gas Concentration drops.
【００３７】オゾン発生装置３として、オゾン濃度が１
５０ｇ／Ｎｍ3 未満のオゾンガスを発生させることが可
能な板型のオゾナイザーを使用する場合は、酸素発生装
置１で８８％以上、例えば９０〜９３％の酸素ガスを発
生させる。これにより、酸素ガス中のＮ2 濃度は適正濃
度範囲内である６％近くになる。従って、通常時はガス
添加装置４でＮ2 ガスを添加する必要はない。The ozone generator 3 has an ozone concentration of 1
When a plate-type ozonizer capable of generating ozone gas of less than 50 g / Nm 3 is used, the oxygen generator 1 generates 88% or more, for example, 90 to 93% of oxygen gas. Thereby, the N 2 concentration in the oxygen gas becomes close to 6% which is within the appropriate concentration range. Therefore, it is not necessary to add the N 2 gas by the gas addition device 4 at normal times.
【００３８】しかし、下流側の負荷変動等により酸素発
生装置１でのガス流量が一時的に低下し、酸素ガス中の
酸素濃度が９５％を超えることにより、そのガス中のＮ
2 濃度が０乃至その近くまで激減することがある。この
ようなとき、ガス添加装置４でＮ2 ガスを添加すること
により、オゾン発生装置３に供給される酸素ガス中のＮ
2 濃度が適正濃度である０．１％以上に維持される。However, when the gas flow rate in the oxygen generator 1 temporarily decreases due to a load fluctuation on the downstream side or the like, and the oxygen concentration in the oxygen gas exceeds 95%, the N
(2) The concentration may decrease sharply from 0 to near. In such a case, by adding N 2 gas with the gas addition device 4, the N 2 gas in the oxygen gas supplied to the ozone generator 3 is added.
(2) The concentration is maintained at 0.1% or more which is an appropriate concentration.
【００３９】オゾン発生装置３での放電セルの放電ギャ
ップは０．３ｍｍ程度である。The discharge gap of the discharge cells in the ozone generator 3 is about 0.3 mm.
【００４０】[0040]
【発明の効果】以上に説明した通り、本発明のオゾン発
生設備及びその運転方法は、酸素発生源として我が国に
適したＰＳＡ法による酸素発生装置を使用する場合に問
題となるオゾン濃度の不安定を解消し、水処理等のへの
オゾンの安定供給を可能にする。特に、１５０ｇ／Ｎｍ
3 以上の高濃度オゾンガス、更には２００ｇ／Ｎｍ3 以
上の超高濃度のオゾンガスを発生させる高性能オゾン発
生装置を使用する場合に大きな問題となる著しい性能低
下を阻止し、ＰＳＡ法による酸素発生装置との組み合わ
せで高濃度乃至超高濃度オゾンガスをオゾン処理設備へ
安定的に供給することにより、オゾン処理設備での処理
効率の向上、経済性の向上に大きな効果を発揮する。As described above, the ozone generation equipment and the operation method thereof according to the present invention provide an unstable ozone concentration which is a problem when an oxygen generator using a PSA method suitable for Japan is used as an oxygen generation source. And enables stable supply of ozone to water treatment and the like. In particular, 150 g / Nm
Oxygen generator by PSA method that prevents a significant decrease in performance, which is a major problem when using a high-performance ozone generator that generates high-concentration ozone gas of 3 or more, and furthermore, ultra-high concentration ozone gas of 200 g / Nm 3 or more. By stably supplying high-concentration or ultra-high-concentration ozone gas to the ozone treatment facility in combination with the above, it is possible to greatly improve the treatment efficiency and the economic efficiency of the ozone treatment facility.
【図１】（ａ）は酸素発生装置での酸素流量と酸素濃度
との関係を示すグラフ、（ｂ）はオゾン発生装置での酸
素ガス中のＮ2 濃度とオゾン濃度との関係を示すグラフ
である。1A is a graph showing a relationship between an oxygen flow rate and an oxygen concentration in an oxygen generator, and FIG. 1B is a graph showing a relationship between an N 2 concentration in an oxygen gas and an ozone concentration in an ozone generator. It is.
【図２】本発明の好ましい実施形態を示すオゾン発生設
備のガス系統図である。FIG. 2 is a gas system diagram of an ozone generation facility showing a preferred embodiment of the present invention.
１ 酸素発生装置 ２ ガス配管 ３ オゾン発生装置 ４ ガス添加装置 DESCRIPTION OF SYMBOLS 1 Oxygen generator 2 Gas piping 3 Ozone generator 4 Gas addition device
───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉村 昌也 兵庫県尼崎市扶桑町１番10号 住友精密工 業株式会社内 Ｆターム(参考） 4D012 CA05 CB16 CD07 CE01 CF05 CG01 CH10 4G042 CA01 CB01 CB03 CB23 CC11 CE04 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Masaya Yoshimura 1-10 Fuso-cho, Amagasaki-shi, Hyogo F-term in Sumitomo Precision Industries, Ltd. (Reference) 4D012 CA05 CB16 CD07 CE01 CF05 CG01 CH10 4G042 CA01 CB01 CB03 CB23 CC11 CE04
Claims (6)
着分離して濃縮した酸素ガスを原料ガスとして放電式の
オゾン発生装置に送給してオゾンガスを発生させるオゾ
ン発生設備本体と、酸素発生装置からオゾン発生装置に
送給される酸素ガスにオゾン発生促進効果のある促進ガ
スを定常的及び／又は限定的に添加するガス添加装置と
を具備することを特徴とするオゾン発生設備。1. An ozone generation apparatus main body that generates an ozone gas by feeding an oxygen gas, which is obtained by adsorbing and separating nitrogen from air and concentrating it by a pressure fluctuation adsorption method, to a discharge type ozone generator as a raw material gas, and an oxygen generator A gas addition device for constantly and / or limitedly adding an accelerating gas having an ozone generation accelerating effect to oxygen gas supplied to an ozone generation device from an ozone generator.
2 ガス又は乾燥空気である請求項１に記載のオゾン発生
設備。2. An accelerating gas having an ozone generation accelerating effect is N
The ozone generation equipment according to claim 1, wherein the ozone generation equipment is two gases or dry air.
の運転方法であって、オゾン発生装置に供給される酸素
ガス中の促進ガス濃度が、オゾン発生装置で発生させる
オゾンガスのオゾン濃度に応じた適正濃度となるよう
に、酸素発生装置では、促進ガス濃度が０又は適正濃度
より低い高濃度の酸素ガスを発生させ、且つ、ガス添加
装置ではその高濃度の酸素ガスに促進ガスを定常的に添
加して促進ガス濃度の調整を行うことを特徴とするオゾ
ン発生設備の運転方法。3. The method for operating an ozone generation facility according to claim 1, wherein the concentration of the promoting gas in the oxygen gas supplied to the ozone generator is equal to the concentration of the ozone gas generated by the ozone generator. The oxygen generator generates a high-concentration oxygen gas with a promoting gas concentration of 0 or lower than the appropriate concentration so that the appropriate concentration is obtained in accordance with the concentration. A method for operating an ozone generation facility, characterized in that the concentration of an accelerating gas is adjusted by selective addition.
のオゾン濃度が１５０ｇ／Ｎｍ3 以上である場合に、酸
素発生装置では９５％以上の酸素ガスを発生させ、ガス
添加装置では定常的に促進ガスを添加することにより、
オゾン発生装置に供給される酸素ガス中の促進ガス濃度
を０．５〜５％に調整することを特徴とする請求項３に
記載のオゾン発生設備の運転方法。4. When the ozone concentration of the ozone gas generated by the ozone generator is 150 g / Nm 3 or more, the oxygen generator generates 95% or more of the oxygen gas, and the gas addition device constantly supplies the promoting gas. By adding
The method according to claim 3, wherein the concentration of the promoting gas in the oxygen gas supplied to the ozone generator is adjusted to 0.5 to 5%.
の運転方法であって、オゾン発生装置に供給される酸素
ガス中の促進ガス濃度が、オゾン発生装置で発生させる
オゾンガスのオゾン濃度に応じた適正濃度に定常的に管
理されるように、酸素発生装置では促進ガス濃度が適正
濃度の酸素ガスを発生させ、且つ、ガス添加装置ではそ
の酸素ガス中の促進ガス濃度が適正濃度から低下したと
きに限定的に促進ガスを添加して促進ガス濃度の修正を
行うことを特徴とするオゾン発生設備の運転方法。5. The method for operating an ozone generation facility according to claim 1, wherein the concentration of the promoting gas in the oxygen gas supplied to the ozone generator is equal to the concentration of the ozone gas generated by the ozone generator. In the oxygen generator, the concentration of the promoting gas in the oxygen gas is reduced from the appropriate concentration in the oxygen generator so that the concentration of the promoting gas in the oxygen gas is reduced in the oxygen generator so that the concentration of the promoting gas is appropriately controlled. A method for operating an ozone generation facility, wherein the concentration of a promotion gas is corrected by adding a promotion gas only when the operation is performed.
のオゾン濃度が１５０ｇ／Ｎｍ3 未満である場合に、酸
素発生装置では８８％以上の酸素ガスを発生させ、ガス
添加装置では限定的に促進ガスを添加することにより、
オゾン発生装置に供給される酸素ガス中の促進ガス濃度
を０．１％以上に定常的に管理することを特徴とする請
求項５に記載のオゾン発生設備の運転方法。6. When the ozone concentration of the ozone gas generated by the ozone generator is less than 150 g / Nm 3 , the oxygen generator generates 88% or more of the oxygen gas, and the gas addition device generates a limited amount of the accelerating gas. By adding
The method according to claim 5, wherein the concentration of the promoting gas in the oxygen gas supplied to the ozone generator is constantly controlled to 0.1% or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36099199A JP4276759B2 (en) | 1999-12-20 | 1999-12-20 | Operation method of ozone generation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP36099199A JP4276759B2 (en) | 1999-12-20 | 1999-12-20 | Operation method of ozone generation equipment |
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| Publication Number | Publication Date |
|---|---|
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| JP4276759B2 JP4276759B2 (en) | 2009-06-10 |
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ID=18471739
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|---|---|---|---|
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| Country | Link |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009069774A1 (en) | 2007-11-30 | 2009-06-04 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas |
| JP2009234797A (en) * | 2008-03-25 | 2009-10-15 | Sanyo Electric Industries Co Ltd | Oxygen gas generating device and discharge type ozone gas generating system |
| JP2016180617A (en) * | 2015-03-23 | 2016-10-13 | 新コスモス電機株式会社 | Chemoluminescent gas detection device and chemoluminescent gas detection method |
| WO2021250745A1 (en) * | 2020-06-08 | 2021-12-16 | 三菱電機株式会社 | Ozone water production apparatus, water treatment apparatus, and ozone water production method |
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| JPH01282104A (en) * | 1988-05-06 | 1989-11-14 | Sumitomo Precision Prod Co Ltd | Concentrated ozone generator |
| JPH03218905A (en) * | 1989-11-15 | 1991-09-26 | Mitsubishi Electric Corp | Ozonizer and insulating film forming device using the ozonizer |
| JPH06127906A (en) * | 1992-10-15 | 1994-05-10 | Mitsubishi Electric Corp | Ozonizer and oxygen/nitrogen mixed gas for ozonizer |
| JPH07277708A (en) * | 1994-04-15 | 1995-10-24 | Meidensha Corp | Ozone generator |
| JPH0919695A (en) * | 1995-07-07 | 1997-01-21 | Hitachi Ltd | Ozone treatment facility for purification treatment |
| JPH09328302A (en) * | 1996-06-05 | 1997-12-22 | Nippon Sanso Kk | Method for supplying highly concentrated ozone and apparatus therefor |
| JP2001172005A (en) * | 1999-12-14 | 2001-06-26 | Fuji Electric Co Ltd | Ozone generation facility and method for operating the same |
-
1999
- 1999-12-20 JP JP36099199A patent/JP4276759B2/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282104A (en) * | 1988-05-06 | 1989-11-14 | Sumitomo Precision Prod Co Ltd | Concentrated ozone generator |
| JPH03218905A (en) * | 1989-11-15 | 1991-09-26 | Mitsubishi Electric Corp | Ozonizer and insulating film forming device using the ozonizer |
| JPH06127906A (en) * | 1992-10-15 | 1994-05-10 | Mitsubishi Electric Corp | Ozonizer and oxygen/nitrogen mixed gas for ozonizer |
| JPH07277708A (en) * | 1994-04-15 | 1995-10-24 | Meidensha Corp | Ozone generator |
| JPH0919695A (en) * | 1995-07-07 | 1997-01-21 | Hitachi Ltd | Ozone treatment facility for purification treatment |
| JPH09328302A (en) * | 1996-06-05 | 1997-12-22 | Nippon Sanso Kk | Method for supplying highly concentrated ozone and apparatus therefor |
| JP2001172005A (en) * | 1999-12-14 | 2001-06-26 | Fuji Electric Co Ltd | Ozone generation facility and method for operating the same |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009069774A1 (en) | 2007-11-30 | 2009-06-04 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas |
| JP2009234797A (en) * | 2008-03-25 | 2009-10-15 | Sanyo Electric Industries Co Ltd | Oxygen gas generating device and discharge type ozone gas generating system |
| JP2016180617A (en) * | 2015-03-23 | 2016-10-13 | 新コスモス電機株式会社 | Chemoluminescent gas detection device and chemoluminescent gas detection method |
| WO2021250745A1 (en) * | 2020-06-08 | 2021-12-16 | 三菱電機株式会社 | Ozone water production apparatus, water treatment apparatus, and ozone water production method |
| JPWO2021250745A1 (en) * | 2020-06-08 | 2021-12-16 | ||
| JP7262673B2 (en) | 2020-06-08 | 2023-04-21 | 三菱電機株式会社 | Ozonated water production device, water treatment device, and ozone water production method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4276759B2 (en) | 2009-06-10 |
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