JPH07277708A - Ozone generator - Google Patents

Ozone generator

Info

Publication number
JPH07277708A
JPH07277708A JP7674994A JP7674994A JPH07277708A JP H07277708 A JPH07277708 A JP H07277708A JP 7674994 A JP7674994 A JP 7674994A JP 7674994 A JP7674994 A JP 7674994A JP H07277708 A JPH07277708 A JP H07277708A
Authority
JP
Japan
Prior art keywords
ozone
oxygen
concentration
raw material
oxygen concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7674994A
Other languages
Japanese (ja)
Inventor
Masayuki Toda
雅之 戸田
Yoshinori Nakano
義則 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Corp
Priority to JP7674994A priority Critical patent/JPH07277708A/en
Publication of JPH07277708A publication Critical patent/JPH07277708A/en
Pending legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To obtain an ozone generator designed to enable cost reduction through obviating oxygen waste even in generating high-concentration ozone by combining an oxygen-enriching device, a means to guide a mixed gas, an oxygen analyzer, an ozone analyzer, and a control means so as to make a specification. CONSTITUTION:This ozone generator is so designed as to be equipped with a compressor 1, an oxygen-enriching device 2, an ozone generation vessel 3, an oxygen analyzer 4, a control box 6, an ozone analyzer 5, etc. The high- concentration oxygen produced by the oxygen-enriching device is mixed with a compressed air from the compressor 1 and introduced into the ozone generation vessel 3. The control box 6, when ozone concentration is given as a command value, determines respective optimal oxygen concentration, gas flow, and input electric power, based on the respective detection values from the oxygen analyzer 4 and the ozone analyzer 5, controlling these parameters. Thereby, a feedstock gas with a desired oxygen concentration can be introduced into the ozone generation vessel 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、水処理等に使用される
オゾンを工業的規模で生成する為のオゾン発生装置の効
率向上に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improving the efficiency of an ozone generator for producing ozone used in water treatment or the like on an industrial scale.

【0002】[0002]

【従来の技術】非常に強力なオゾンの酸化力は従来より
浄水処理をはじめ多くの分野で利用されている。また、
近年では下水処理に利用されるなど、より大容量のオゾ
ン発生装置が要求されつつある。そのため、装置の小型
化等の必要性から原料に空気ではなく酸素を用いる事が
望まれている。また、産業排水の処理、食品等の製造工
程における殺菌などにオゾンを使用する際には高濃度の
オゾンを必要とすることもあり、この点においても酸素
を原料とする必要性が生じている。
2. Description of the Related Art The very strong oxidizing power of ozone has been used in many fields including water purification treatment. Also,
In recent years, a larger capacity ozone generator has been demanded such as being used for sewage treatment. Therefore, it is desired to use oxygen instead of air as a raw material because of the necessity of downsizing the device. Further, when ozone is used for treatment of industrial wastewater, sterilization in the manufacturing process of foods, etc., high concentration of ozone may be required, and in this respect also the necessity of using oxygen as a raw material has arisen. .

【0003】酸素を原料とするオゾン発生装置では、酸
素富化装置等を設け、90%以上の酸素をオゾン発生容
器に供給する。空気中より酸素を濃縮するために多大な
エネルギーを消費するため、オゾン生成の原料とするた
めにはこれをリサイクルなどして効率よく使用すること
が必要である。この方法は様々に検討され、実用化され
ているものもある。
In an ozone generator using oxygen as a raw material, an oxygen enrichment device or the like is provided and 90% or more of oxygen is supplied to an ozone generating container. Since a large amount of energy is consumed for concentrating oxygen from the air, it is necessary to recycle it and use it efficiently as a raw material for ozone generation. This method has been variously studied and some have been put to practical use.

【0004】[0004]

【発明が解決しようとする課題】産業用等で、高濃度の
オゾンが必要になる場合には、原料として酸素を使用し
たり、効率を無視して電力密度を大きくする等の方法が
考えられる。酸素を原料とすれば、その酸素を作る手間
を惜しまなければ容易に高濃度のオゾンを得ることがで
き、有用である。ところがオゾン化されたガスは、当然
酸素リッチであり、場合によってはこれを嫌うこともあ
る。
When a high concentration of ozone is required for industrial use, it is conceivable to use oxygen as a raw material or to ignore the efficiency and increase the power density. . If oxygen is used as a raw material, high-concentration ozone can be easily obtained unless the time and effort for producing the oxygen is spared, which is useful. However, the ozonized gas is naturally rich in oxygen, which may be disliked in some cases.

【0005】空気を原料として、電力密度を極端に高く
する場合には、効率が低下することはもちろん、オゾン
発生容器内のガラス管の温度上昇が大きくなり、冷却方
法の再検討が必要となる。
When air is used as a raw material and the power density is extremely increased, not only the efficiency is lowered, but also the temperature rise of the glass tube in the ozone generating container is increased, and it is necessary to reexamine the cooling method. .

【0006】酸素濃度とオゾンの発生効率の関係は直線
的であり、酸素濃度が高くなればなるほど効率は良くな
る。一方、酸素濃度を高くするほど必要となる圧縮空気
量は多くなり、従ってコンプレッサーのロスが増え、シ
ステムの効率が悪化する。
The relationship between the oxygen concentration and the ozone generation efficiency is linear, and the higher the oxygen concentration, the better the efficiency. On the other hand, the higher the oxygen concentration, the larger the amount of compressed air required, thus increasing the compressor loss and degrading the system efficiency.

【0007】本発明は上記の点に鑑みてなされたもので
その目的は、高濃度のオゾンを発生する際においても、
酸素の無駄を省いて低コスト化が実現できるとともに、
オゾン濃度指令値に応じた効率の良い運転ができるオゾ
ン発生装置を提供することにある。
The present invention has been made in view of the above points, and an object thereof is to generate high-concentration ozone.
While reducing waste of oxygen and realizing cost reduction,
An object of the present invention is to provide an ozone generator capable of operating efficiently according to an ozone concentration command value.

【0008】[0008]

【課題を解決するための手段】本発明は、一方の面に高
電圧電極が設けられた誘電体と、該誘電体の他方の面に
空隙部を介して並設された接地電極とが収納されたオゾ
ン発生容器を備え、前記高電圧電極と接地電極間に電圧
を印加して前記空隙部内に流通させた原料ガス中にオゾ
ンを発生させるオゾン発生装置において、(1)圧縮空
気中の酸素を富化して高濃度酸素を得る酸素富化装置
と、前記酸素富化装置で得られた高濃度酸素と前記圧縮
空気を混合して前記オゾン発生容器へ導く手段と、前記
オゾン発生容器へ導かれる原料ガスの酸素濃度を検出す
る酸素濃度計と、前記オゾン発生容器で発生したオゾン
の濃度を検出するオゾン濃度計と、前記酸素濃度計およ
びオゾン濃度計の各検出値に基づいて、前記オゾン発生
容器内へ導かれる原料ガスの酸素濃度、ガス流量および
投入電力量を制御する制御手段とを備えたことを特徴と
し、(2)圧縮空気中の窒素を濃縮して除去する窒素富
化装置と、前記窒素富化装置で除去された後の残りのガ
スと前記圧縮空気を混合して前記オゾン発生容器へ導く
手段と、前記オゾン発生容器へ導かれる原料ガスの酸素
濃度を検出する酸素濃度計と、前記オゾン発生容器で発
生したオゾンの濃度を検出するオゾン濃度計と、前記酸
素濃度計およびオゾン濃度計の各検出値に基づいて、前
記オゾン発生容器内へ導かれる原料ガスの酸素濃度、ガ
ス流量および投入電力量を制御する制御手段とを備えた
ことを特徴としている。
SUMMARY OF THE INVENTION According to the present invention, a dielectric having a high voltage electrode provided on one surface and a ground electrode provided on the other surface of the dielectric side by side with a gap therebetween are housed. (1) Oxygen in compressed air, comprising an ozone generating container configured to generate ozone in the raw material gas flowing in the gap by applying a voltage between the high-voltage electrode and the ground electrode. An oxygen enrichment device for enriching the oxygen to obtain high concentration oxygen, a means for mixing the high concentration oxygen obtained by the oxygen enrichment device and the compressed air to lead to the ozone generating container, and introducing to the ozone generating container. An oxygen densitometer for detecting the oxygen concentration of the source gas to be blown, an ozone densitometer for detecting the concentration of ozone generated in the ozone generating container, and the ozone based on the respective detected values of the oxygen densitometer and the ozone densitometer. Raw material guided into the generating container Control means for controlling the oxygen concentration of the gas, the gas flow rate and the input electric energy, and (2) a nitrogen enriching device for concentrating and removing nitrogen in compressed air, and the nitrogen enriching device. Means for mixing the remaining gas after being removed with the compressed air with the compressed air, an oxygen concentration meter for detecting the oxygen concentration of the raw material gas introduced into the ozone generation container, and the ozone generation container Ozone concentration meter to detect the concentration of ozone generated in, the oxygen concentration of the raw material gas introduced into the ozone generation container, the gas flow rate and the input power amount, based on the detection values of the oxygen concentration meter and the ozone concentration meter And a control means for controlling the.

【0009】[0009]

【作用】[Action]

(1)請求項1に記載の発明において、制御手段は各濃
度計の検出値に基づいて制御を行うので、オゾン濃度が
指令値として与えられたとき、最適な酸素濃度、ガス流
量、投入電力量に制御される。
(1) In the invention according to claim 1, since the control means controls based on the detection value of each densitometer, when the ozone concentration is given as the command value, the optimum oxygen concentration, gas flow rate, and input power are obtained. Controlled by quantity.

【0010】圧縮空気の一部を酸素富化装置によって富
化するので、圧縮空気量を増やすことなく所望の高濃度
の酸素が得られる。このためコンプレッサーのロスは低
減する。
Since a part of the compressed air is enriched by the oxygen enriching device, a desired high concentration of oxygen can be obtained without increasing the amount of compressed air. Therefore, compressor loss is reduced.

【0011】(2)請求項2に記載の発明において、窒
素富化装置は濃縮された窒素を放出し除去するので、残
りのガス中には酸素が多く含まれる。制御手段は各濃度
計の検出値に基づいて制御を行うので、オゾン濃度が指
令値として与えられたとき、最適な酸素濃度、ガス流
量、投入電力量に制御される。
(2) In the invention described in claim 2, since the nitrogen enriching device releases and removes the concentrated nitrogen, the remaining gas contains a large amount of oxygen. Since the control means performs control based on the detected value of each densitometer, when the ozone concentration is given as a command value, it is controlled to the optimum oxygen concentration, gas flow rate, and input power amount.

【0012】この装置は酸素リッチなガスでは問題があ
り、空気原料よりも少しオゾン濃度を高くしたい場合に
最適な装置となる。これによって酸素の無駄を省き、低
コストで、且つ運転効率の良いオゾン発生装置が構成さ
れる。
This device has a problem with an oxygen-rich gas, and it is an optimum device when it is desired to raise the ozone concentration to a little higher than that of the air raw material. As a result, a waste ozone is eliminated, and an ozone generator with low cost and high operating efficiency is constructed.

【0013】圧縮空気の一部を窒素富化装置によって富
化するので、圧縮空気量を増やすことなく所望の高濃度
の酸素が得られる。このためコンプレッサーのロスは低
減する。
Since a part of the compressed air is enriched by the nitrogen enriching device, a desired high concentration of oxygen can be obtained without increasing the amount of compressed air. Therefore, compressor loss is reduced.

【0014】また高価な酸素富化装置を用いないので、
システムのイニシャルコストを大幅に低減することがで
きる。
Further, since an expensive oxygen enrichment device is not used,
The initial cost of the system can be significantly reduced.

【0015】[0015]

【実施例】以下、図面を参照しながら本発明の一実施例
を説明する。図1において、1は空気を圧縮するコンプ
レッサー、2はコンプレッサー1の圧縮空気の一部を富
化して高濃度の酸素、例えば90%酸素を得る酸素富化
装置である。前記コンプレッサー1の圧縮空気と酸素富
化装置2で得られた高濃度酸素は混合されてオゾン発生
容器3に導かれる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is a compressor that compresses air, and 2 is an oxygen enrichment device that enriches a part of the compressed air of the compressor 1 to obtain high concentration oxygen, for example, 90% oxygen. The compressed air of the compressor 1 and the high-concentration oxygen obtained in the oxygen enrichment device 2 are mixed and guided to the ozone generation container 3.

【0016】前記オゾン発生容器3には、例えば一方の
面に高電圧電極が設けられたガラス誘電体管と、該誘電
体管の他方の面に放電ギャップを介して並設された接地
電極管とが収納され(図示省略)、前記高電圧電極に高
周波電圧を印加し、前記放電ギャップ内に導かれる原料
ガス中にオゾンを発生させるようになっている。
In the ozone generation container 3, for example, a glass dielectric tube having a high voltage electrode provided on one surface thereof and a ground electrode tube provided on the other surface of the dielectric tube at a discharge gap side by side. Are housed (not shown), and a high frequency voltage is applied to the high voltage electrode to generate ozone in the raw material gas introduced into the discharge gap.

【0017】4は前記オゾン発生容器3へ導かれる原料
ガスの酸素濃度を検出する酸素濃度計であり、5は前記
オゾン発生容器3で発生したオゾンの濃度を検出するオ
ゾン濃度計である。6は前記酸素濃度計4およびオゾン
濃度計5の各検出値に基づいて、前記オゾン発生容器3
内へ導かれる原料ガスの酸素濃度、ガス流量および投入
電力量を制御するコントロールボックスである。
Reference numeral 4 is an oxygen concentration meter for detecting the oxygen concentration of the raw material gas introduced into the ozone generation container 3, and reference numeral 5 is an ozone concentration meter for detecting the concentration of ozone generated in the ozone generation container 3. Reference numeral 6 denotes the ozone generation container 3 based on the detection values of the oxygen concentration meter 4 and the ozone concentration meter 5.
It is a control box for controlling the oxygen concentration of the raw material gas introduced into the chamber, the gas flow rate, and the input power amount.

【0018】7,8は、コンプレッサー1、酸素富化装
置2とオゾン発生容器3を結ぶ各流路に各々挿入され、
コントロールボックス6の指令によりその開度が制御さ
れる弁である。
Reference numerals 7 and 8 are respectively inserted into respective flow paths connecting the compressor 1, the oxygen enrichment device 2 and the ozone generating container 3,
It is a valve whose opening is controlled by a command from the control box 6.

【0019】上記のように構成されたオゾン発生装置に
おいて、酸素富化装置2で得られた高濃度の酸素はコン
プレッサー1の圧縮空気と混合されてオゾン発生容器3
に導かれる。コントロールボックス6は、オゾン濃度が
指令値として与えられたとき、酸素濃度計4およびオゾ
ン濃度計5の検出値に基づいて、最適な酸素濃度、ガス
流量、投入電力量を求め、これらを制御する。このコン
トロールボックス6の制御により、オゾン発生容器3に
は所望の酸素濃度の原料ガスが導かれる。
In the ozone generator constructed as described above, the high-concentration oxygen obtained in the oxygen enrichment device 2 is mixed with the compressed air of the compressor 1 to form the ozone generator container 3.
Be led to. When the ozone concentration is given as a command value, the control box 6 obtains the optimum oxygen concentration, gas flow rate, and input power amount based on the detection values of the oxygen concentration meter 4 and the ozone concentration meter 5, and controls them. . By the control of the control box 6, the raw material gas having a desired oxygen concentration is introduced into the ozone generating container 3.

【0020】上記のように、オゾン濃度を指令値として
制御するので、高濃度のオゾンを発生する際においても
効率の良い運転が行える。また酸素の無駄を省き低コス
トのオゾン発生装置を構成することができる。特に図1
の装置は、高濃度のオゾンを必要とし酸素リッチなガス
で問題が無い場合に最適な装置となる。
Since the ozone concentration is controlled as the command value as described above, efficient operation can be performed even when a high concentration ozone is generated. Further, it is possible to construct a low-cost ozone generator by eliminating waste of oxygen. Especially Figure 1
This device is the most suitable device when high concentration ozone is required and there is no problem with oxygen-rich gas.

【0021】次に空気原料よりも少しだけオゾン濃度を
高くしたい場合、すなわち酸素リッチでは困る場合に適
した実施例を図2とともに説明する。図2において図1
と同一部分は同一符号をもって示している。
Next, an embodiment suitable for the case where it is desired to raise the ozone concentration to a level slightly higher than that of the air raw material, that is, when oxygen rich is a problem, will be described with reference to FIG. In FIG. 2, FIG.
The same parts as are indicated by the same reference numerals.

【0022】図2において図1と異なる点は酸素富化装
置2の替わりに窒素富化装置12を用いたことにあり、
その他の部分は図1と同一に構成されている。この窒素
富化装置12は、例えば膜分離方式の窒素発生装置で構
成され、コンプレッサー1で圧縮された空気中の窒素を
濃縮して(90%窒素ガス)放出し、残りの酸素を多く
含んだガス、例えば40%酸素を得る。
2 is different from FIG. 1 in that a nitrogen enriching device 12 is used instead of the oxygen enriching device 2.
Other parts are configured the same as in FIG. The nitrogen enriching device 12 is composed of, for example, a membrane-separation type nitrogen generating device, concentrates nitrogen in the air compressed by the compressor 1 (90% nitrogen gas) and releases it, and contains a large amount of residual oxygen. A gas, for example 40% oxygen, is obtained.

【0023】上記のように構成した場合も図1の場合と
同様にオゾン発生容器3に導かれる原料ガス中の酸素濃
度を調整することができる。すなわち、窒素富化装置1
2で得られた酸素を多く含むガスはコンプレッサー1の
圧縮空気と混合されてオゾン発生容器3に導かれる。コ
ントロールボックス6は、オゾン濃度が指令値として与
えられたとき、酸素濃度計4およびオゾン濃度計5の検
出値に基づいて、最適な酸素濃度、ガス流量、投入電力
量を求め、これらを制御する。このコントロールボック
ス6の制御により、オゾン発生容器3には所望の酸素濃
度の原料ガスが導かれる。
Also in the case of the above configuration, the oxygen concentration in the raw material gas introduced into the ozone generating container 3 can be adjusted as in the case of FIG. That is, the nitrogen enrichment device 1
The oxygen-rich gas obtained in 2 is mixed with the compressed air of the compressor 1 and introduced into the ozone generating container 3. When the ozone concentration is given as a command value, the control box 6 obtains the optimum oxygen concentration, gas flow rate, and input power amount based on the detection values of the oxygen concentration meter 4 and the ozone concentration meter 5, and controls them. . By the control of the control box 6, the raw material gas having a desired oxygen concentration is introduced into the ozone generating container 3.

【0024】上記のように、オゾン濃度を指令値として
制御するので、高濃度のオゾンを発生する際においても
効率の良い運転が行える。また酸素の無駄を省き低コス
トのオゾン発生装置を構成することができる。
Since the ozone concentration is controlled as the command value as described above, efficient operation can be performed even when a high concentration ozone is generated. Further, it is possible to construct a low-cost ozone generator by eliminating waste of oxygen.

【0025】[0025]

【発明の効果】以上のように請求項1、2に記載の発明
によれば、 (1)高濃度の酸素を必要とする場合に、酸素の無駄を
省き低コストのオゾン発生装置を構成することができ
る。
As described above, according to the inventions described in claims 1 and 2, (1) when a high concentration of oxygen is required, a waste of oxygen is omitted and a low-cost ozone generator is constructed. be able to.

【0026】(2)オゾン濃度を指令値として制御する
ので、高濃度のオゾンを発生する際においても効率の良
い運転が行える。
(2) Since the ozone concentration is controlled as the command value, efficient operation can be performed even when a high concentration ozone is generated.

【0027】(3)窒素富化装置によって原料中の窒素
を除去しているので、窒素酸化物の発生を抑制すること
ができる。また酸素富化装置を用いた場合でも、酸素を
富化するということは原料中の窒素を除去することと同
義であり、窒素酸化物の発生を抑制することができる。
(3) Since nitrogen in the raw material is removed by the nitrogen enriching device, generation of nitrogen oxides can be suppressed. Even when an oxygen enrichment device is used, enriching oxygen is synonymous with removing nitrogen in the raw material and can suppress the generation of nitrogen oxides.

【0028】また請求項2に記載の発明によれば、 (4)特に高度のオゾンを必要としない場合に最適であ
り、この場合には高価な酸素富化装置を使用しないの
で、システムのイニシャルコストを大幅に低減すること
ができる。
Further, according to the invention described in claim 2, (4) it is most suitable when particularly high ozone is not required, and in this case, an expensive oxygen enrichment device is not used, so the system initial The cost can be reduced significantly.

【図面の簡単な説明】[Brief description of drawings]

【図1】請求項1に記載の発明の一実施例を示す構成
図。
FIG. 1 is a configuration diagram showing an embodiment of the invention described in claim 1.

【図2】請求項2に記載の発明の一実施例を示す構成
図。
FIG. 2 is a configuration diagram showing an embodiment of the invention described in claim 2.

【符号の説明】[Explanation of symbols]

1…コンプレッサー 2…酸素富化装置 3…オゾン発生容器 4…酸素濃度計 5…オゾン濃度計 6…コントロールボックス 7,8…弁 12…窒素富化装置 1 ... Compressor 2 ... Oxygen enriching device 3 ... Ozone generating container 4 ... Oxygen concentration meter 5 ... Ozone concentration meter 6 ... Control box 7, 8 ... Valve 12 ... Nitrogen enriching device

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 一方の面に高電圧電極が設けられた誘電
体と、該誘電体の他方の面に空隙部を介して並設された
接地電極とが収納されたオゾン発生容器を備え、前記高
電圧電極と接地電極間に電圧を印加して前記空隙部内に
流通させた原料ガス中にオゾンを発生させるオゾン発生
装置において、 圧縮空気中の酸素を富化して高濃度酸素を得る酸素富化
装置と、前記酸素富化装置で得られた高濃度酸素と前記
圧縮空気を混合して前記オゾン発生容器へ導く手段と、
前記オゾン発生容器へ導かれる原料ガスの酸素濃度を検
出する酸素濃度計と、前記オゾン発生容器で発生したオ
ゾンの濃度を検出するオゾン濃度計と、前記酸素濃度計
およびオゾン濃度計の各検出値に基づいて、前記オゾン
発生容器内へ導かれる原料ガスの酸素濃度、ガス流量お
よび投入電力量を制御する制御手段とを備えたことを特
徴とするオゾン発生装置。
1. An ozone generation container comprising a dielectric having a high-voltage electrode provided on one surface thereof and a ground electrode arranged in parallel on the other surface of the dielectric with a gap therebetween, An ozone generator for generating ozone in a raw material gas circulated in the void by applying a voltage between the high voltage electrode and a ground electrode, wherein oxygen in the compressed air is enriched to obtain high concentration oxygen. And a means for mixing the high-concentration oxygen obtained by the oxygen enriching device and the compressed air to the ozone generating container,
An oxygen concentration meter for detecting the oxygen concentration of the raw material gas introduced to the ozone generation container, an ozone concentration meter for detecting the concentration of ozone generated in the ozone generation container, and the respective detected values of the oxygen concentration meter and the ozone concentration meter. Based on the above, an ozone generating apparatus comprising: a control means for controlling the oxygen concentration of the raw material gas introduced into the ozone generating container, the gas flow rate, and the input power amount.
【請求項2】 一方の面に高電圧電極が設けられた誘電
体と、該誘電体の他方の面に空隙部を介して並設された
接地電極とが収納されたオゾン発生容器を備え、前記高
電圧電極と接地電極間に電圧を印加して前記空隙部内に
流通させた原料ガス中にオゾンを発生させるオゾン発生
装置において、 圧縮空気中の窒素を濃縮して除去する窒素富化装置と、
前記窒素富化装置で除去された後の残りのガスと前記圧
縮空気を混合して前記オゾン発生容器へ導く手段と、前
記オゾン発生容器へ導かれる原料ガスの酸素濃度を検出
する酸素濃度計と、前記オゾン発生容器で発生したオゾ
ンの濃度を検出するオゾン濃度計と、前記酸素濃度計お
よびオゾン濃度計の各検出値に基づいて、前記オゾン発
生容器内へ導かれる原料ガスの酸素濃度、ガス流量およ
び投入電力量を制御する制御手段とを備えたことを特徴
とするオゾン発生装置。
2. An ozone generating container having a dielectric having a high-voltage electrode provided on one surface thereof and a ground electrode arranged in parallel on the other surface of the dielectric with a gap therebetween, In an ozone generator for applying a voltage between the high-voltage electrode and a ground electrode to generate ozone in the raw material gas that has been circulated in the void, a nitrogen enricher for concentrating and removing nitrogen in compressed air, ,
A means for mixing the remaining gas after being removed by the nitrogen enriching device and the compressed air and guiding the mixture to the ozone generation container, and an oxygen concentration meter for detecting the oxygen concentration of the raw material gas introduced to the ozone generation container. The ozone concentration meter for detecting the concentration of ozone generated in the ozone generation container, and the oxygen concentration of the raw material gas introduced into the ozone generation container based on the detected values of the oxygen concentration meter and the ozone concentration meter, gas An ozone generator comprising: a control unit that controls a flow rate and an input power amount.
JP7674994A 1994-04-15 1994-04-15 Ozone generator Pending JPH07277708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7674994A JPH07277708A (en) 1994-04-15 1994-04-15 Ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7674994A JPH07277708A (en) 1994-04-15 1994-04-15 Ozone generator

Publications (1)

Publication Number Publication Date
JPH07277708A true JPH07277708A (en) 1995-10-24

Family

ID=13614255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7674994A Pending JPH07277708A (en) 1994-04-15 1994-04-15 Ozone generator

Country Status (1)

Country Link
JP (1) JPH07277708A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10167703A (en) * 1996-12-10 1998-06-23 Meidensha Corp Controlling device of ozone yield in ozonizer
JPH11278810A (en) * 1998-03-30 1999-10-12 Koganei Corp Ozone and ion generator
JP2001180915A (en) * 1999-12-20 2001-07-03 Sumitomo Precision Prod Co Ltd Ozone generating facilities and its operating method
JP2009234797A (en) * 2008-03-25 2009-10-15 Sanyo Electric Industries Co Ltd Oxygen gas generating device and discharge type ozone gas generating system
JP4950362B1 (en) * 2011-04-13 2012-06-13 三菱電機株式会社 Ozone generation system and operation method of ozone generation system
WO2013042644A1 (en) 2011-09-21 2013-03-28 日野自動車株式会社 Exhaust gas purifier
CN107416773A (en) * 2017-07-25 2017-12-01 苏州宏瑞净化科技有限公司 Hybrid ozone generating-device
JP2020195965A (en) * 2019-06-03 2020-12-10 Wef技術開発株式会社 Active oxygen generation device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10167703A (en) * 1996-12-10 1998-06-23 Meidensha Corp Controlling device of ozone yield in ozonizer
JPH11278810A (en) * 1998-03-30 1999-10-12 Koganei Corp Ozone and ion generator
JP2001180915A (en) * 1999-12-20 2001-07-03 Sumitomo Precision Prod Co Ltd Ozone generating facilities and its operating method
JP2009234797A (en) * 2008-03-25 2009-10-15 Sanyo Electric Industries Co Ltd Oxygen gas generating device and discharge type ozone gas generating system
JP4950362B1 (en) * 2011-04-13 2012-06-13 三菱電機株式会社 Ozone generation system and operation method of ozone generation system
US9233848B2 (en) 2011-04-13 2016-01-12 Mitsubishi Electric Corporation Ozone generation system and method for operating ozone generation system
WO2013042644A1 (en) 2011-09-21 2013-03-28 日野自動車株式会社 Exhaust gas purifier
US9156000B2 (en) 2011-09-21 2015-10-13 Hino Motors, Ltd. Exhaust gas purifier
CN107416773A (en) * 2017-07-25 2017-12-01 苏州宏瑞净化科技有限公司 Hybrid ozone generating-device
JP2020195965A (en) * 2019-06-03 2020-12-10 Wef技術開発株式会社 Active oxygen generation device

Similar Documents

Publication Publication Date Title
EP0719159B1 (en) Method and means for generating nitric oxide
JPH1017305A (en) Ozone producing equipment and its operation
JPH07277708A (en) Ozone generator
US9233848B2 (en) Ozone generation system and method for operating ozone generation system
JPS5561984A (en) Microorganism remover
CN112203974B (en) Ozone supply device and ozone supply method
JP2002219345A (en) Ozone water converter
JP2015167903A (en) Gas treatment equipment
JPH0631286A (en) Ozone water concentration control device for ozone water preparation device
JPH044090A (en) Apparatus for producing water containing dissolved gas
JP2000014753A (en) Method and machine for producing ozone water and method and machine for generating gas for production of ozone water used therefor
JP3087572B2 (en) Ozone generation and supply device
JP2010076971A (en) Circulation type ozone generating method and apparatus
EP0965560B1 (en) Procee for efficient ozone generation
KR102557265B1 (en) Plasma Medical Device to Generating of Ozone Free Anion
CN201557490U (en) High concentration ozone water generator
JP2004075466A (en) Ozone treatment system
CN102049056A (en) High concentration ozone water production machine
JP2001172005A (en) Ozone generation facility and method for operating the same
JP2003089507A (en) Apparatus for generating ozone
RU2078028C1 (en) Ozonation plant
JPH1192118A (en) High-concentration ozone generator
RU2162060C2 (en) Method of water quality provision by automatic regulation of minimum needed ozone dose
JP2005089248A (en) Ozonizer,and ozonized gas production method
JP2001180915A (en) Ozone generating facilities and its operating method