JP2001170574A - Cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning device capable of efficiently removing sediments from the inside of a devices. SOLUTION: This cleaning device 1 is a device for cleaning a work as an object intended for cleaning using a cleaning liquid. The cleaning device 1 comprises a cleaning tank 3 to which a second pressure adjusting means 35 is connected a sedimentation tank 4 to which a first pressure adjusting means 45 is connected, a circulation line L10 consisting of a buffer tank 5, a regenerator 6 a storage tank 7, a rinsing tank 8 and piping, a waste liquid line L40 connected to the sedimentation tank 4, a drying line L90 having a drying tank 9, a line L60 for connecting the regenerator 6 to the sedimentation tank 4, a second waste liquor line L100 having a waste liquor device 10, a line L80 for connecting the rinsing tank 8 to the buffer tank 5 and a second connecting pipe 49 for connecting the cleaning tank 3 to the sedimentation tank 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device.

[0002]

2. Description of the Related Art For example, in the manufacture of a wristwatch, it is necessary to manufacture various wristwatch parts before assembling the wristwatch. Some of such wristwatch components require a polishing step during manufacture. And, when polishing is performed on watch parts,
The abrasive will adhere. Of course, such abrasives
It is removed by washing.

[0003] For a long time, triethane was used as a cleaning liquid for such cleaning. However, triethane is no longer used due to concerns about destruction of the ozone layer.

[0004] Instead of triethane, trichloroethylene has come to be used as a cleaning solution. However, trichloroethylene is not an environmentally friendly cleaning solution, and it is preferable not to use it if possible.

However, experiments conducted by the present inventors have revealed that many of the alternative cleaning solutions for trichlorethylene cannot dissolve a large amount of abrasive components in the cleaning solution.
Therefore, when the cleaning is performed using the alternative cleaning liquid, a large amount of the abrasive component that cannot be dissolved in the cleaning liquid precipitates and deposits in the cleaning tank. In order to perform subsequent washing smoothly, it is necessary to remove such precipitates from the tank.

As a method of removing such a precipitate, for example, a method of removing the precipitate using a filter is considered. However, from the experiment of the present inventors, it was found that the filter was clogged in a short time when trying to remove the precipitate by passing an alternative washing solution through the filter. Therefore, a washing apparatus that removes a precipitate using a filter is not practical when a large amount of the precipitate is generated.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning apparatus capable of efficiently removing sediment in the apparatus.

[0008]

This and other objects are achieved by the present invention which is defined below as (1) to (16).

(1) A cleaning tank for cleaning a workpiece with a cleaning liquid, and a sedimentation tank connected to the cleaning tank so as to be able to flow and sedimenting a precipitation component contained in the cleaning liquid used for cleaning. Cleaning equipment.

(2) The cleaning apparatus according to the above (1), further comprising a rinsing tank connected to the cleaning tank so as to be able to pass the liquid and rinsing the work cleaned in the cleaning tank.

(3) The cleaning apparatus according to (2), wherein a portion near the bottom of the rinsing tank is connected to an upper side of the cleaning tank by a pipe.

(4) The cleaning apparatus according to any one of (1) to (3), further including a regenerator connected to the settling tank so as to be able to pass the liquid and regenerating the cleaning liquid.

(5) The cleaning apparatus according to the above (4), wherein the regenerator is connected to the vicinity of the bottom of the settling tank by a pipe.

(6) The cleaning apparatus according to any one of (1) to (5), further including a buffer tank that is connected to the sedimentation tank so as to be able to flow and temporarily stores the cleaning liquid.

(7) A washing tank for washing a workpiece with a washing liquid, a sedimentation tank for sedimenting a sediment component contained in the washing liquid used for washing, a buffer tank for temporarily storing the washing liquid, and a regeneration of the washing liquid. A cleaning apparatus, comprising: a circulating line having a regenerator for cleaning, a rinsing tank for rinsing the work cleaned in the cleaning tank, and a line connecting the regenerator and the sedimentation tank.

(8) A washing tank for washing a workpiece with a washing liquid, a sedimentation tank for sedimenting a sediment component contained in the washing liquid used for washing, a buffer tank for temporarily storing the washing liquid, and regenerating the washing liquid Connecting the regenerator and the settling tank with a circulation line having a regenerator, a storage tank for storing the cleaning liquid regenerated by the regenerator, and a rinsing tank for rinsing the work cleaned in the cleaning tank. A cleaning line, comprising:

(9) The cleaning device according to the above (7) or (8), wherein the vicinity of the bottom of the rinsing tank is connected to the upper side of the cleaning tank by a pipe.

(10) The washing apparatus according to any one of (7) to (9), wherein a line connecting the regenerator and the sedimentation tank is connected near a bottom of the sedimentation tank.

(11) The cleaning apparatus according to any one of the above (7) to (10), wherein at the time of cleaning the work, the cleaning liquid flows in the order of the rinsing tank, the cleaning tank, and the sedimentation tank.

(12) The cleaning apparatus according to any one of (7) to (11), wherein at the time of cleaning the work, the work moves in the order of the cleaning tank and the rinsing tank.

(13) The buffer tank is connected to the upper part of the sedimentation tank by a pipe.
The cleaning device according to any one of 2).

(14) The cleaning apparatus according to any one of (1) to (13), wherein the vicinity of the bottom of the settling tank is connected to the vicinity of the bottom of the washing tank by a pipe.

(15) The cleaning apparatus according to any one of the above (1) to (14), further comprising pressure adjusting means for adjusting the pressure in the settling tank and / or the cleaning tank.

(16) The at least one of the sedimentation tank, the washing tank, and the rinsing tank has a bottom portion inclined with respect to a horizontal direction, according to any one of the above (1) to (15). Cleaning equipment.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings. FIG. 1 is a circuit diagram showing an embodiment of the cleaning apparatus of the present invention.

The cleaning device 1 is a device for cleaning a workpiece to be cleaned using a cleaning liquid. As shown in the figure, the cleaning apparatus 1 comprises a cleaning tank 3 to which a second pressure adjusting means 35 is connected and a sedimentation tank 4 to which a first pressure adjusting means 45 is connected.
A circulation line L10 having a buffer tank 5, a regenerator 6, a storage tank 7, a rinsing tank 8, and a pipe, a waste liquid line L40 connected to the sedimentation tank 4, and a drying line L having a drying tank 9.
90, a regenerator sedimentation tank connection line L60, and a waste liquid container 10
Rinsing tank buffer tank connection line L80, and washing tank sedimentation tank second connection pipe 49. Hereinafter, these will be described for each component.

First, the circulation line L10 will be mainly described. The circulation line L10 is a main line through which the cleaning liquid flows and circulates. The circulation line L10 includes, as described above, the washing tank 3 to which the second pressure adjusting means 35 is connected, the settling tank 4 to which the first pressure adjusting means 45 is connected, the buffer tank 5, and the regenerator 6. , Storage tank 7, rinsing tank 8, pipes (washing tank settling tank connecting pipe 39, settling tank buffer tank connecting pipe 4)
7, a buffer tank regenerator connection pipe 59, a regenerator storage tank connection pipe 69, a storage tank rinse tank connection pipe 79, and a rinse tank cleaning tank connection pipe 89).

The cleaning tank (first cleaning tank) 3 is a tank for cleaning the work with the cleaning liquid contained (supplied) in the cleaning tank 3. On the upper side of the cleaning tank 3, a second pressure adjusting means 35 configured by, for example, a pump or the like and adjusting the pressure in the cleaning tank 3 is connected via a pipe 36 having a valve 361. The inside of the washing tank 3 can be sealed, for example. Therefore, the inside of the washing tank 3 is closed,
By operating the pressure adjusting means 35, the pressure in the cleaning tank 3 can be changed.

The bottom 31 of the washing tank 3 is inclined with respect to the horizontal direction. That is, the bottom 31 of the cleaning tank 3 is provided with an inclination such that the depth gradually increases. A valve 391 is provided in the vicinity of the deepest portion of the bottom 31, and one end (washing tank connection port) of a washing tank sedimentation tank connection pipe (pipe) 39 connecting the washing tank 3 and the sedimentation tank 4 is connected.

The other end (connection port of the sedimentation tank) of this washing tank sedimentation tank connection pipe (the first connection pipe of the cleaning tank sedimentation tank) 39 is connected to the vicinity of the bottom 41 of the sedimentation tank 4. That is, the sedimentation tank 4 is connected to the washing tank 3 through the washing tank sedimentation tank connection pipe 39 so as to be able to flow. In such a washing tank settling tank connection pipe 39, the settling tank connection port is located lower than the washing tank connection port.

The sedimentation tank 4 is used for, for example, precipitating and depositing a sediment component contained in the cleaning liquid or the like provided for the cleaning. On the upper side of the sedimentation tank 4, for example, a pressure adjusting means 45 configured by a pump or the like to adjust the pressure in the sedimentation tank 4.
Are connected via a pipe 46 provided with a valve 461. The inside of the sedimentation tank 4 can be sealed, for example. Therefore, the pressure in the sedimentation tank 4 can be changed by closing the sedimentation tank 4 and operating the pressure adjusting means 45.

The bottom 41 of the settling tank 4 is inclined with respect to the horizontal direction. That is, the bottom 41 of the sedimentation tank 4 is provided with an inclination such that the depth gradually increases. For example, in the vicinity of the bottommost portion of the bottom portion 41, the above-described washing tank settling tank connection pipe 39 is connected. In the vicinity of the deepest portion of the bottom portion 41, a waste liquid line L40 for discharging sediment deposited and deposited on the bottom portion 41 of the settling tank 4 is connected. In addition,
A valve 481 is provided in the waste liquid line L40.

An upper end of the sedimentation tank 4 is connected to one end (sedimentation tank connection port) of a washing tank sedimentation tank second connection pipe 49 having a valve 491. This washing tank sedimentation tank second connection pipe 4
The other end 9 (the cleaning tank connection port) is connected to the upper side of the cleaning tank 3. In addition, the "upper side" of the tank in this specification means a place higher than the bottom, for example.

Further, a valve 47 is provided above the sedimentation tank 4.
1 and one end (sedimentation tank connection port) of a sedimentation tank buffer tank connection pipe (pipe) 47 for connecting the sedimentation tank 4 and the buffer tank 5
Is connected.

The other end (buffer tank connection port) of the settling tank buffer tank connection pipe 47 is connected to the upper side of the buffer tank 5. That is, the buffer tank 5 is connected to the sedimentation tank 4 via the sedimentation tank buffer tank connection pipe 47 so that the liquid can pass therethrough. The cleaning liquid is temporarily stored in the buffer tank 5. Thereby, the supply amount and the circulation amount of the liquid into the circulation line L10 can be easily adjusted, and the overflow of the cleaning liquid in each tank or the like of the cleaning device 1 can be suitably prevented. A valve 591 is provided near the bottom 51 of the buffer tank 5, and one end (buffer tank connection port) of a buffer tank regenerator connection pipe (pipe) 59 connecting the buffer tank 5 and the regenerator 6 is connected. .

The other end (regenerator connection port) of the buffer tank regenerator connection pipe 59 is connected to the upper side of the regenerator 6. That is, through the buffer tank regenerator connection pipe 59,
A regenerator 6 is connected to the buffer tank 5 so that the liquid can pass through. In the regenerator 6, a process of distilling and regenerating the cleaning liquid can be performed. A valve 691 is provided on the upper side of the regenerator 6, and one end (regenerator connection port) of a regenerator storage tank connection pipe (pipe) 69 for connecting the regenerator 6 and the storage tank 7 is connected.

The other end (reservoir connection port) of the regenerator storage tank connection pipe 69 is connected to the upper side of the storage tank 7. That is, the storage tank 7 is connected to the regenerator 6 via the regenerator storage tank connection pipe 69 so as to allow ventilation and liquid flow. In the storage tank 7, a cleaning liquid that has been subjected to distillation and regeneration processing by the regenerator 6 is stored. On the upper side of the storage tank 7, a valve 791 is provided, and one end (storage tank connection port) of a storage tank rinsing tank connection pipe (pipe) 79 for connecting the storage tank 7 and the rinsing tank 8 is connected.

The other end (rinse tank connection port) of the storage tank rinse tank connection pipe 79 is connected to the upper side of the rinse tank 8. That is, the rinsing tank (second cleaning tank) 8 is connected to the storage tank 7 via the storage tank rinsing tank connection pipe 79 so that the liquid can pass therethrough. In the rinsing tank 8, the work is rinsed using the cleaning liquid supplied from the storage tank 7.
Alternatively, in the rinsing bath 8, the final cleaning of the work cleaned in the cleaning bath 3 is performed. The bottom 81 of this rinsing tank 8
Are inclined with respect to the horizontal direction. That is, the bottom 81 of the rinsing tank 8 is provided with a slope such that the depth gradually increases. Near the deepest portion of the bottom portion 81,
One end (rinse tank connection port) of a rinse tank cleaning tank connection pipe (pipe) 89 that is provided with 91 and connects the rinse tank 8 and the cleaning tank 3
Is connected.

The other end of the rinse tank connecting pipe 89 (the connecting port of the cleaning tank) is connected to the upper side of the cleaning tank 3.
That is, the rinsing tank 8 is connected to the cleaning tank 3 through the rinsing tank cleaning tank connection pipe 89 so as to allow the liquid to pass therethrough.

The rinsing tank 8 is connected to the buffer tank 5 through a rinsing tank buffer tank connection line L80 so as to allow the liquid to pass therethrough. This rinse tank buffer tank connection line L
80 has a rinse tank buffer tank connection pipe 88 provided with a valve 881;
One end of the rinsing tank 8 (rinse tank connection port)
The other end (buffer tank connection port) is on the upper side of the buffer tank 5,
Each is connected. The rinse tank buffer tank connection line L80 functions as, for example, a bypass for the cleaning liquid. For example, when the valve 891 is closed, the cleaning liquid in the rinsing tank 8 overflows and flows into the buffer tank 5 through the rinsing tank buffer tank connection line L80. Thus, overflow of the cleaning liquid in the rinsing tank 8 is suitably prevented.

In such a circulation line L10, for example, the storage tank connection port of the storage tank rinse tank connection pipe 79 is connected to the settling tank connection port of the settling tank buffer tank connection pipe 47 (or the cleaning of the rinse tank cleaning tank connection pipe 89). (Tank connection port). Further, for example, in the buffer tank regenerator connection pipe 59, the buffer tank connection port is positioned higher than the regenerator connection port.

Hereinafter, the drying line L connected to the regenerator 6
90, the regenerator sedimentation tank connection line L60, and the second waste liquid line L100 will be described.

The regenerator 6 is connected to a drying line L90. This drying line L90 is also connected to the storage tank 7. The drying line L90 includes a drying tank 9 and a valve 991, and includes a regenerator drying tank connecting pipe 99 that connects the regenerator 6 and the drying tank 9 in a permeable manner, and a valve 981, and the drying tank 9 and the storage tank. 7 and a drying tank storage tank connecting pipe 98 for connecting the gas to the drying tank 7 in a ventilating (or liquid passing) manner. One end (regenerator connection port) of the regenerator drying tank connection pipe 99 is connected to the upper side of the regenerator 6, and the other end (drying tank connection port).
Is connected to the upper side of the drying tank 9. One end (drying tank connection port) of the drying tank storage tank connection pipe 98 is connected to the bottom side of the drying tank 9, and the other end (storage tank connection port) is connected to the upper side of the storage tank 7. .

The drying tank 9 includes, for example, means for adjusting the internal pressure (pump or the like (not shown)) or means for adjusting the internal temperature (heater or the like (not shown)). Thereby, the work can be dried.
Further, in the drying tank 9, the vapor of the cleaning liquid supplied from the regenerator 6 can be brought into contact with the work. Thereby, finish rinsing can also be performed on the workpiece.

The regenerator 6 is connected to a regenerator sedimentation tank connection line L60 for connecting the regenerator 6 and the sedimentation tank 4. The regenerator sedimentation tank connection line L60 is connected to a valve 68
1 is provided with a regenerator sedimentation tank connection pipe (pipe) 68. One end (regenerator connection port) of the regenerator sedimentation tank connection pipe 68 is connected near the bottom 61 of the regenerator 6, and the other end (sedimentation tank connection port) is connected near the bottom 41 of the sedimentation tank 4. Have been.

The second waste liquid line L100 is connected to the regenerator 6. The waste liquid accumulated in the regenerator 6 can also be discharged by the second waste liquid line L100. The second waste liquid line L100 includes a waste liquid device 10 for storing a waste liquid, a regenerator waste liquid device connection pipe 109 connecting the regenerator 6 and the waste liquid device 10, and an inflow side of the waste liquid device 10 (a regenerator waste liquid device connection pipe). 109 provided in the flow path 109)
And a valve 107 provided on the outflow side of the waste liquid container 10.

In the cleaning apparatus 1, by opening and closing valves provided in each of the pipes (lines) and setting the amount of opening as appropriate, the respective channels are opened and closed, and the flow rate and flow rate are adjusted. be able to. For example, the supply amount and flow rate of the cleaning liquid from the buffer tank 5 to the regenerator 6 can be adjusted by a valve 591 provided in the buffer tank regenerator connection pipe 59.

Hereinafter, the operation (use method) of the cleaning device 1 will be described. I. Work Cleaning First, the operation when the cleaning apparatus 1 cleans a work will be described. First, as shown in FIG. 1, a predetermined amount of the cleaning liquid W is put in the storage tank 7, the rinsing tank 8, the cleaning tank 3, the sedimentation tank 4, the buffer tank 5, and the regenerator 6.

Then, the valves 691, 591, 471,
391, 891, and 791 are opened by a predetermined amount, and the regenerator 6
Activate The valves 461, 481, 491,
681, 108, 107, 991, 981, 881 and 361 are closed.

As a result, in the storage tank 7, the cleaning liquid W located at a position higher than the storage tank connection port of the storage tank rinse tank connection pipe 79 overflows, passes through the storage tank rinse tank connection pipe 79, and enters the rinse tank 8. Flows into. A part of the cleaning liquid W flowing into the rinsing tank 8 overflows and flows into the cleaning tank 3 through the rinsing tank cleaning tank connection pipe 89. Part of the cleaning liquid W flowing into the cleaning tank 3 overflows,
It flows into the sedimentation tank 4 through the washing tank sedimentation tank connection pipe 39. In the sedimentation tank 4, the cleaning liquid W located at a position higher than the storage tank connection port of the sedimentation tank buffer tank connection pipe 47 overflows, flows through the sedimentation tank buffer tank connection pipe 47, and flows into the buffer tank 5. The cleaning liquid W in the buffer tank 5 is
Due to the height difference, the gas flows into the buffer tank regenerator connection pipe 59 at a predetermined flow rate (flow rate), passes through the buffer tank regenerator connection pipe 59, and flows into the regenerator 6. In the regenerator 6, the cleaning liquid W is heated, and thereby a part of the cleaning liquid W is vaporized. The vaporized cleaning liquid W is supplied to the regenerator storage tank connection pipe 69.
And enters the storage tank 7 through the regenerator storage tank connection pipe 69. At this time, the vaporized cleaning liquid W is cooled in the regenerator storage tank connection pipe 69 and the storage tank 7 and liquefied again. As a result, the cleaning liquid W that has been distilled and regenerated is supplied into the storage tank 7.

As described above, the cleaning liquid W is supplied to the circulation line L10.
During the circulation, the water flows from the storage tank 7 to the rinsing tank 8, the washing tank 3, the sedimentation tank 4, and the buffer tank 5 by overflow. Therefore, when the cleaning liquid W is circulated, the level of the cleaning liquid W in the sedimentation tank 4 is set to the settling tank connection port (or the buffer tank connection port) of the settling tank buffer tank connection pipe 47.
Almost correspond and match. Further, the liquid level of the cleaning liquid W in the cleaning tank 3 substantially corresponds to and coincides with the liquid level of the cleaning liquid W in the precipitation tank 4. The level of the cleaning liquid W in the rinsing tank 8 is equal to the level of the cleaning liquid W in the precipitation tank 3 (or the level of the rinsing tank cleaning tank connection pipe 8).
9 cleaning tank connection port). Moreover,
The level of the cleaning liquid W in the storage tank 7 substantially corresponds to or coincides with the storage tank connection port (or the rinse tank connection port) of the storage tank rinse tank connection pipe 79.

Next, the movement of the work (not shown) when the cleaning liquid W is circulating will be described. The work to be cleaned is first placed in the cleaning tank 3. In the cleaning tank 3, the work is cleaned with the cleaning liquid W to remove dirt attached to the work.

The work that has been cleaned in the cleaning tank 3 is lifted from the cleaning tank 3 and moves into the rinsing tank 8. In the rinsing tank 8, the work is rinsed with the cleaning liquid W. Further, at this time, even if dirt that has not been completely removed in the cleaning tank 3 adheres to the work, such dirt is removed by the cleaning liquid W in the rinsing tank 8. That is, the work may be finally cleaned in the rinsing tank 8.

The work whose rinsing has been completed in the rinsing tank 8 is placed in the drying tank 9. After the work is put into the drying tank 9, for example, by opening the valves 991 and 981, the cleaning liquid W in a vapor state can be supplied from the regenerator 6 into the drying tank 9. Thus, the work rinse can be performed by bringing the vapor-like cleaning liquid W into contact with the work. Thereafter, the work is dried by reducing the pressure and heating the inside of the drying tank 9.

Thereafter, the work is taken out of the drying tank 9 to obtain a work which has been washed, rinsed and dried.

When the cleaning apparatus 1 is operated as described above, the clean cleaning liquid W distilled and regenerated by the regenerator 6 flows from the storage tank 7 to the rinsing tank 8 to the cleaning tank 3 to the sedimentation tank 4. On the other hand, the work moves from the washing tank 3 to the rinsing tank 8. Therefore, after the work is washed in the washing tank 3, the work comes into contact with the cleaner liquid W in the rinse tank 8. For this reason, the work is further cleaned in the rinsing tank 8 after being cleaned in the cleaning tank 3.

In such a rinsing tank 8, the storage tank rinsing tank connecting pipe 79 is connected to the upper side of the rinsing tank 8, and the rinsing tank cleaning tank connecting pipe 89 is connected near the bottom 81 of the rinsing tank 8. The cleaning liquid W flows in from the upper side of the rinsing tank 8 and flows out from the bottom 81 side. That is,
In the rinsing tank 8, the cleaning liquid W basically flows from the upper side to the bottom 81 side. Therefore, sediment components and the like generated by rinsing the work are relatively quickly formed on the bottom 81.
Will precipitate. For this reason, the precipitation component hardly adheres to the work, and the work is preferably kept in a clean state.

In the washing tank 3, a washing tank connecting pipe 89 is provided above the washing tank 3, and a washing tank settling tank connecting pipe 39 is provided above the washing tank 3.
Are connected to the vicinity of the bottom 31 of the cleaning tank 3, so that the cleaning liquid W flows from the upper side of the cleaning tank 3 and flows into the bottom 31.
Will flow out from the side. That is, the cleaning liquid W basically flows from the upper side of the cleaning tank 3 to the bottom 31 side. Therefore, the sediment components and the like generated by washing the work are settled on the bottom 31 relatively quickly. For this reason, the precipitation component hardly adheres to the work, and the work is preferably kept in a clean state.

Further, the sedimentation tank connection port of the washing tank sedimentation tank connection pipe 39 is located lower than the cleaning tank connection port. Therefore, part of the precipitate P deposited on the bottom 31 of the cleaning tank 3 moves smoothly into the precipitation tank 4 by multiplying by the flow of the cleaning liquid W. Therefore, it is possible to prevent a large amount of the sediment P from collecting at the bottom of the cleaning tank 3 when the cleaning device 1 is operating. Thereby, in the cleaning tank 3, it is possible to prevent the cleaning liquid W from being significantly contaminated.

The settling tank connection port of the settling tank buffer tank connection pipe 471 is provided on the upper side of the settling tank 4,
The washing liquid W flowing into the sedimentation tank 4 from the vicinity of the
Will flow out from the upper side of the That is, the sedimentation tank 4
Inside, the cleaning liquid W basically moves from the bottom 41 side to the upper side. During this time, the precipitation component contained in the cleaning liquid W is:
Preferably, it will settle and deposit on the bottom 41. And
From the sedimentation tank 4, the supernatant of the cleaning liquid W flows out. For this reason, the cleaning liquid W from which the precipitate has been suitably removed flows into the buffer tank 5.

In such a washing apparatus 1, the buffer tank connection port of the sedimentation tank buffer tank connection pipe 47 is located on the upper side of the buffer tank 5, especially the liquid level of the cleaning liquid W in the buffer tank 5 (normal time).
Buffer tank 5
The backflow of the cleaning liquid W from inside into the sedimentation tank 4 is suitably prevented.

When the cleaning device 1 is operated as described above, the precipitate P is deposited in the cleaning tank 3 and the sedimentation tank 4. Further, a small amount of the precipitate P is also deposited in the rinsing tank 8. Further, during the operation of the cleaning device 1, the precipitate P
Occurs. The sediment P in the buffer tank 5 is located such that the buffer tank regenerator connection pipe 59 is connected to the bottom 51 and the buffer tank connection port of the buffer tank regenerator connection pipe 59 is higher than the regenerator connection port. Therefore, the vehicle rides on the flow of the circulation line L10 at the time of operation (or at the time of starting), flows into the buffer tank regenerator connection pipe 59, moves in the buffer tank regenerator connection pipe 59, and flows into the regenerator 6. I do. The precipitate P can also be generated by performing a regeneration process of the cleaning liquid W in the regenerator 6. For this reason, a small amount,
A precipitate P is deposited.

Therefore, in order to maintain the cleaning device 1 in a suitable state and to operate it smoothly, the sediment P is stored in each of the tanks (the cleaning tank 3, the rinsing tank 8, the regenerator 6, and the sedimentation tank 4). Need to be removed from The precipitate P can be removed in the cleaning device 1 as follows.

II. Hereinafter, a method of removing the precipitate P deposited and deposited in each tank (the cleaning tank 3, the sedimentation tank 4, the rinsing tank 8, and the regenerator 6) of the cleaning device 1 will be described.

In general, the sediment P deposited in the cleaning tank 3 and the regenerator 6 is collected in the sedimentation tank 4, and the collected sediment P is discharged from the waste liquid line L40, whereby each of the cleaning devices 1 The sediment P deposited in the tank is discharged. Further, the sediment P deposited in the rinsing tank 8 is moved into the cleaning tank 3. The precipitate P is removed from the inside of the cleaning device 1 in the next precipitate removal operation (next batch). Such transfer of the sediment P between the tanks is performed by creating (providing) a pressure difference between the transfer source tank and the transfer destination tank.

(1) Removal of the sediment P in the washing tank 3 First, all valves (valves 471, 481, 491 and 681) of piping connected to the sedimentation tank 4 other than the valves 391 and 461 are closed. Further, the cleaning tank 3 is kept open (not closed).

Next, the valve 461 (and 391) is opened, the first pressure adjusting means 45 is operated, and the air above the sedimentation tank 4 is exhausted from the pipe 46 to reduce the pressure in the sedimentation tank 4 (decompression). Do).

When the pressure in the sedimentation tank 4 (the pressure in the upper space in the sedimentation tank 4) decreases, the level of the cleaning liquid W in the sedimentation tank 4 rises. As the liquid level rises, the cleaning liquid W in the cleaning tank 3 flows into the sedimentation tank 4 through the cleaning tank sedimentation tank connection pipe 39. At this time, with the movement of the cleaning liquid W, the sediment P deposited on the bottom 31 of the cleaning tank 3 also moves into the sedimentation tank 4.

As a result, as shown in FIG.
The sediment P therein is transferred into the sedimentation tank 4, and the sediment P is removed from the washing tank 3. Further, the cleaning liquid W in the cleaning tank 3
Liquid level drops. Finally, the valve 391 is closed.

When the sediment P in the washing tank 3 is removed as described above, for example, 30% or more of the washing liquid W in the washing tank 3 is moved into the sediment tank 4 depending on the amount of the sediment P. Then, the precipitate P in the cleaning tank 3 can be more effectively removed.

When the bottom 31 is inclined with respect to the horizontal direction as in the washing tank 3 and the connecting pipe 39 for the washing tank settling tank is connected near the deepest portion of the bottom 31, Is more efficiently removed. This is because the sediment P suitably moves to the vicinity of the deepest part of the cleaning tank 3 due to gravity, and the sediment P suitably flows into the cleaning tank sedimentation tank connecting pipe 39 from the vicinity of the deepest part. That's why. Furthermore, if the settling tank connection port of the washing tank settling tank connection pipe 39 is located lower than the washing tank connection port, the transfer efficiency of the sediment P increases.

The cleaning liquid W and the sediment P in the cleaning tank 3
May be moved into the settling tank 4 by pressurizing the inside of the washing tank 3 with the second pressure adjusting means 35, for example.

(2) Removal of the sediment P in the rinsing tank 8 First, all valves (valves 391 and 491) of piping connected to the cleaning tank 3 other than the valves 891 and 361 are closed. Further, the rinsing tank 8 is kept open (not closed).

Next, the valve 361 (and 891) is opened, the second pressure adjusting means 35 is operated, and the air on the upper side of the cleaning tank 3 is exhausted from the pipe 36 to reduce the pressure in the cleaning tank 3 (decompression). Do).

When the pressure in the cleaning tank 3 (the pressure in the upper space in the cleaning tank 3) decreases, the cleaning liquid W in the rinsing tank cleaning tank connecting pipe 89 flows into the rinsing tank 8. With this inflow, the cleaning liquid W in the rinsing tank 8 flows into the rinsing tank cleaning tank connection pipe 89, and flows into the cleaning tank 3 through the rinsing tank cleaning tank connection pipe 89. At this time, with the movement of the cleaning liquid W, the sediment P deposited on the bottom 81 of the rinsing tank 8 also moves into the cleaning tank 3.

As a result, as shown in FIG. 3, the sediment P in the rinsing tank 8 is transferred into the washing tank 3 and
Removes the precipitate P. Further, the level of the cleaning liquid W in the rinsing tank 8 decreases. The level of the cleaning liquid W in the cleaning tank 3 rises. Finally, the valve 891 is closed.

When the sediment P in the rinsing tank 8 is removed as described above, for example, 10% or more of the cleaning liquid W in the rinsing tank 8 is moved into the cleaning tank 3 although it differs slightly depending on the amount of the sediment P. Then, the precipitate P in the rinsing tank 8 can be more effectively removed. When the bottom 81 of the rinsing bath 8 is inclined with respect to the horizontal direction, and the rinsing bath cleaning bath connecting pipe 89 is connected near the deepest portion of the bottom 81, the same effect as described above can be obtained.

The cleaning liquid W and the sediment P in the rinsing tank 8
For example, the rinsing tank 8 may be provided with a means for adjusting the pressure in the rinsing tank 8, and the rinsing tank 8 may be moved into the cleaning tank 3 by pressurizing the rinsing tank 8 with this means.

(3) Removal of the sediment P in the regenerator 6 First, all valves (valves 471, 481, 491 and 391) connected to the sedimentation tank 4 other than the valves 681 and 461 are closed. In addition, the regenerator 6 is kept in an open state (a state not being a closed state).

Next, the valve 461 (and 681) is opened, the first pressure adjusting means 45 is operated, and the air above the sedimentation tank 4 is exhausted from the pipe 46 to reduce the pressure in the sedimentation tank 4 (decompression). Do).

When the pressure in the sedimentation tank 4 (the pressure in the upper space in the sedimentation tank 4) decreases, the level of the cleaning liquid W in the sedimentation tank 4 rises. As the liquid level rises, the cleaning liquid W in the regenerator 6 flows into the sedimentation tank 4 through the regenerator sedimentation tank connection pipe 68. At this time, the sediment P deposited on the bottom 61 of the regenerator 6 also moves into the sedimentation tank 4 with the movement of the cleaning liquid W.

As a result, as shown in FIG.
The sediment P is transferred into the sedimentation tank 4, and the sediment P is removed from the regenerator 3. Further, the cleaning liquid W in the regenerator 6
Is lowered (in the example shown, all the cleaning liquid W in the regenerator 6 flows out of the regenerator 6). Finally,
The valve 681 is closed.

When the sediment P in the regenerator 6 is removed in this way, although it differs slightly depending on the amount of the sediment P, for example, 50% or more of the cleaning liquid W in the regenerator 6 is moved into the sedimentation tank 4. Then, the precipitate P in the regenerator 6 can be more effectively removed. When the regenerator sedimentation tank connection pipe 68 is connected near the bottom 61 of the regenerator 6, the same effect as described above can be obtained. Further, when the regenerator 6 is disposed below the sedimentation tank 4, the regenerator sedimentation tank connection pipe 68 is connected to the sedimentation tank 4.
Connected to the bottom 41 of the sedimentation tank 4
Since the height difference between the two tanks can be reduced as compared with the state where the cleaning liquid is connected to a position higher than 1, the flow of the cleaning liquid from the regenerator 6 to the sedimentation tank 4 by the first pressure adjusting means 45 can be performed efficiently. Can be.

(4) Removal of the sediment P in the sedimentation tank 4 When the sediment P is collected in the sedimentation tank 4, as shown in FIG.
The valve 481 provided in the waste liquid line L40 is opened. Thereby, the cleaning liquid W near the bottom 41 of the settling tank 4 flows out to the waste liquid line L40. At this time, with the outflow of the cleaning liquid W, the sediment deposited on the bottom 41 is also changed to the waste liquid line L4.
Outflow to zero. Thereby, the sediment P is discharged from the inside of the cleaning device 1.

At this time, after the operation of collecting the sediment P in the sedimentation tank 4 is performed, it is preferable that the sediment P in the sedimentation tank 4 be removed after one hour or more, more preferably eight hours or more. Is preferred. As a result, a larger amount of the sediment component in the cleaning liquid W settles and accumulates on the bottom portion 41, so that a larger amount of the sediment P can be discharged. Correspondingly, impurities in the cleaning liquid W also decrease. When the waste liquid line L40 is connected near the deepest portion of the bottom 41, the sediment P can be discharged more efficiently.

The transfer of the precipitate P in each layer does not have to be performed in the order (1), (2), or (3) described above. However, when the cleaning liquid W in the cleaning tank 3 is transferred to the cleaning tank 3 after the cleaning liquid W in the cleaning tank 3 is transferred to the precipitation tank 4, the cleaning liquid W in the rinsing tank 8 is transferred to the cleaning tank 3. A sufficient amount can be easily moved. Accordingly, there is obtained an advantage that the sediment P in the rinsing tank 8 can be preferably transferred to the cleaning tank 3.

III. Others After performing the precipitate removal operation, for example, when the valve 491 is opened, the cleaning liquid W on the upper side of the precipitation tank 4 moves into the cleaning tank 3. Thereby, the cleaning liquid W can be supplied into the cleaning tank 3. The cleaning liquid W is a supernatant in which the precipitated components in the cleaning liquid W have settled, and has few impurities. Therefore, when the cleaning liquid W is supplied to the cleaning tank 3, the work can be suitably cleaned.

For example, when the regenerator 6 is operated for a long period of time, impurities (non-volatile or high-boiling impurities) are concentrated in the regenerator 6, and the cleaning liquid W may contain a large amount of impurities. is there. In this case, for example, the cleaning liquid W can be boiled down in the regenerator 6 to condense impurities, and then the valve 108 is opened, and the cleaning liquid W in the regenerator 6 can be discharged into the waste liquid container 10.

In such a washing apparatus 1, there is no need to provide a filter for removing the precipitate in the middle of the pipe. Therefore, it is possible to preferably prevent the operation of the apparatus from being hindered by clogging of the filter. Further, in such a cleaning device 1, there is no need to provide a pump in the middle of the circulation line L10. Therefore, when the sediment moves in the pipe, there is no possibility that the sediment damages the pump in the middle of the pipe.

Since the cleaning apparatus 1 of the present invention has such advantages, it operates smoothly even when a work, a cleaning liquid, cleaning conditions, and the like that generate a large amount of sediment by cleaning or the like are selected. be able to.

Therefore, the cleaning apparatus 1 can be operated smoothly even when a cleaning liquid that easily generates a precipitate, such as a hydrocarbon cleaning liquid such as a naphtha-based, isoparaffin-based, pyrrolidone-based, and terpene-based cleaning liquid, is used. it can. In addition, this allows a large number of workpieces to be cleaned appropriately and continuously.

When such a hydrocarbon-based cleaning solution is used, unlike a water-based cleaning solution, there is no need to provide a wastewater treatment facility. Therefore, the equipment of the cleaning device can be simplified. Further, the hydrocarbon-based cleaning liquid can be easily recycled by distillation regeneration or the like (the regenerator 6 described above). For this reason, the cleaning liquid can be used repeatedly, and effective use of the cleaning liquid can be achieved. Moreover, hydrocarbon-based cleaning liquids are more
Relatively hard to adversely affect the natural environment. Since the hydrocarbon-based cleaning liquid has such properties, if the hydrocarbon-based cleaning liquid is used as the cleaning liquid used in the present invention, the work can be cleaned while preventing the natural environment from being contaminated by the waste liquid. it can.

Further, by using the cleaning apparatus 1 of the present invention, it is possible to suitably clean a work (for example, a watch part or the like) to which a large amount of dirt (for example, an abrasive) that is difficult to dissolve in the cleaning liquid adheres. be able to.

The cleaning liquid used in the present invention may be, in addition to the above-mentioned hydrocarbon cleaning liquids, other solvent-based cleaning liquids such as chlorine-based, alternative fluorocarbon-based, alcohol-based, terpene-based, and silicone-based cleaning liquids. Can be used. Further, the present invention includes, for example, higher alcohols, semi-aqueous washings such as hydrocarbons + surfactants + ethers, pure water,
Any cleaning liquid other than the solvent-based cleaning liquid, such as an aqueous cleaning liquid such as an aqueous alkaline solution or an aqueous surfactant solution, may be used.

Although the present invention has been described based on the preferred embodiments, the present invention is not limited to these embodiments. For example, the bottoms of the washing tank 3, the sedimentation tank 4, and the rinsing tank 8 need not be inclined. Further, for example, the washing tank settling tank connecting pipe 39, the regenerator settling tank connecting pipe 68, and the like do not need to be connected near the bottom 41 of the settling tank 4. Also, for example,
The cleaning liquid may be passed and circulated in the circulation line L10 by a method other than the overflow.

[0096]

EXAMPLE A cleaning apparatus as shown in FIG. 1 was manufactured. The capacity of the rinsing tank was 80 L, the capacity of the washing tank was 80 L,
The capacity of the settling tank is 120L, the capacity of the buffer tank is 50L,
The capacity of the regenerator was 80 L, and the capacity of the storage tank was 40 L.
Then, using this cleaning device, a watch component (work) to which a large amount of abrasive has adhered is
Washing, rinsing and drying were performed.

First, the cleaning liquid was circulated in the circulation line (see above). Solvent naphtha-based (hydrocarbon-based) cleaning solution (Showa Denko “Solfine ™”)
Was used.

Then, as described above, the watch parts were washed, rinsed and dried. At this time, 60 watch parts were processed in one batch. That is, washing, rinsing, and drying operations were performed on the wristwatch components, respectively, with 60 wristwatch components as one unit (unit).

Further, such a batch was performed 500 times by continuously operating the cleaning apparatus. That is, 100 units of wristwatch parts were washed, rinsed, and dried. When the cleaning apparatus was operated in this manner, a large amount of sediment was deposited in the cleaning tank and the sedimentation tank. In addition, a small amount of sediment was deposited in the rinsing tank and the regenerator.

Thus, the precipitate was removed as described in the above (1) to (4). First, the inside of the settling tank was depressurized, and the washing liquid in the washing tank was moved into the settling tank by about ４. Next, the pressure in the cleaning tank was reduced, and the cleaning liquid in the rinsing tank was moved about half into the cleaning tank. Next, the pressure in the precipitation tank was reduced, and almost all the liquid in the regenerator (distillation regenerator) was moved into the precipitation tank. Next, in this state, the washing device was stopped for 8 hours, and a sediment was deposited in the sedimentation tank. Thereafter, the sediment deposited in the sedimentation tank was discharged from the waste liquid line.

As a result, the precipitate was properly discharged from the waste liquid line, and as much as 5 kg of the precipitate was recovered. Furthermore, when the bottom of each tank was visually confirmed, the sediment was almost completely removed in the rinsing tank, the settling tank, and the regenerator. Also, in the washing tank, only a small amount of the precipitate transferred from the rinsing tank was settled, and it was confirmed that the sediment deposited and deposited in the washing tank by washing was almost completely removed.

[0102]

As described above, according to the present invention, it is possible to provide a cleaning apparatus capable of efficiently removing the sediment in the apparatus. Therefore, the range of selection of the cleaning liquid at the time of cleaning is expanded, and a cleaning liquid that does not easily pollute the natural environment, a cleaning liquid that is less toxic to the human body, and the like can be easily selected.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing an embodiment of a cleaning device of the present invention.

FIG. 2 is a circuit diagram showing an embodiment of the cleaning device of the present invention.

FIG. 3 is a circuit diagram showing an embodiment of the cleaning apparatus of the present invention.

FIG. 4 is a circuit diagram showing an embodiment of the cleaning device of the present invention.

FIG. 5 is a circuit diagram showing an embodiment of the cleaning device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning apparatus L10 Circulation line 3 Cleaning tank 31 Bottom 35 Second pressure adjusting means 36 Piping 361 Valve 39 Cleaning tank sedimentation tank connection pipe 391 Valve 4 Sedimentation tank 41 Bottom 45 First pressure adjusting means 46 Piping 461 Valve 47 Sedimentation tank buffer tank Connection pipe 471 Valve 481 Valve 49 Washing tank settling tank Second connection pipe 491 Valve L40 Waste liquid line 5 Buffer tank 59 Buffer tank regenerator connection pipe 591 Valve 6 Regenerator 61 Bottom 69 Regenerator storage tank connection pipe 691 Valve L60 Regenerator precipitation Tank connection line 68 Regenerator sedimentation tank connection pipe 681 Valve 7 Storage tank 79 Storage tank rinse tank connection pipe 791 Valve 8 Rinse tank 81 Bottom 89 Rinse tank cleaning tank connection pipe 891 valve L80 Rinse tank buffer tank connection line 88 Rinse tank buffer tank Connection pipe 881 Valve L 0 drying line 9 drying chamber 98 drying chamber reservoir connection pipe 981 the valve 99 regenerator drying chamber connecting tube 991 valve L100 second waste line 10 waste 109 regenerator effluent vessel connecting tube 107, 108 valve P precipitates W washing liquid

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[Procedure amendment]

[Submission date] March 19, 2001 (2001.3.1.
9)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

[0008]

This and other objects are achieved by the present invention which is defined below as (1) to (16).

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

(1) A cleaning apparatus according to the present invention includes a cleaning tank for cleaning a workpiece with a cleaning liquid, and a sedimentation tank connected to the cleaning tank so as to be able to pass therethrough and for precipitating a sediment component contained in the cleaning liquid used for cleaning. And first pressure adjusting means for adjusting the pressure in the sedimentation tank, wherein the pressure in the sedimentation tank is reduced by the first pressure adjustment means, and the inside of the sedimentation tank and the inside of the washing tank are reduced. A pressure difference occurs between the cleaning tank and the cleaning liquid in the cleaning tank flows into the sedimentation tank, and with the movement of the cleaning liquid, the sediment in the cleaning tank also moves into the sedimentation tank. It is characterized by.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

(2) Further, the cleaning apparatus of the present invention has a rinsing tank connected to the cleaning tank so as to be able to pass the liquid, and rinsing the work cleaned in the cleaning tank. A second pressure adjusting means for adjusting, the pressure inside the cleaning tank is reduced by the second pressure adjusting means, and a pressure difference is generated between the inside of the cleaning tank and the inside of the rinsing tank, The cleaning liquid in the rinsing tank flows into the cleaning tank, and as the cleaning liquid moves, the sediment at the bottom of the rinsing tank also moves into the cleaning tank.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction contents]

(3) Further, the cleaning apparatus of the present invention is characterized in that the vicinity of the bottom of the rinsing tank is connected to the upper side of the cleaning tank by a pipe.

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0012

[Correction method] Change

[Correction contents]

(4) Further, the cleaning apparatus of the present invention is characterized in that it has a regenerator connected to the settling tank so as to be able to pass the liquid and regenerating the cleaning liquid.

[Procedure amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Change

[Correction contents]

(5) The cleaning apparatus according to the present invention is characterized in that the regenerator is connected to the vicinity of the bottom of the settling tank by a pipe.

[Procedure amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction contents]

(6) The washing apparatus of the present invention is characterized in that it has a buffer tank which is connected to the settling tank so as to be able to pass through and temporarily stores the washing liquid.

[Procedure amendment 9]

[Document name to be amended] Statement

[Correction target item name] 0015

[Correction method] Change

[Correction contents]

(7) The cleaning apparatus of the present invention comprises a cleaning tank for cleaning a workpiece with a cleaning liquid, a precipitation tank for precipitating a sediment component contained in the cleaning liquid used for cleaning, and a buffer for temporarily storing the cleaning liquid. A circulating line having a tank, a regenerator for regenerating the cleaning liquid, a rinsing tank for rinsing the work cleaned in the cleaning tank, and a line connecting the regenerator and the sedimentation tank. And

[Procedure amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Change

[Correction contents]

(8) The cleaning apparatus of the present invention includes a cleaning tank for cleaning a workpiece with a cleaning liquid, a precipitation tank for precipitating a precipitation component contained in the cleaning liquid used for cleaning, and a buffer for temporarily storing the cleaning liquid. A circulation line having a tank, a regenerator for regenerating the cleaning liquid, a storage tank for storing the cleaning liquid regenerated by the regenerator, and a rinse tank for rinsing the work cleaned in the cleaning tank; and the regenerator. And a line connecting the sedimentation tank.

[Procedure amendment 11]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction contents]

(9) The cleaning apparatus according to the present invention is characterized in that a portion near the bottom of the rinsing tank is connected to an upper side of the cleaning tank by a pipe.

[Procedure amendment 12]

[Document name to be amended] Statement

[Correction target item name] 0018

[Correction method] Change

[Correction contents]

(10) The cleaning apparatus according to the present invention is characterized in that a line connecting the regenerator and the settling tank is connected near a bottom of the settling tank.

[Procedure amendment 13]

[Document name to be amended] Statement

[Correction target item name] 0019

[Correction method] Change

[Correction contents]

(11) The cleaning apparatus of the present invention is characterized in that, when cleaning the work, the cleaning liquid flows in the order of the rinsing tank, the cleaning tank, and the sedimentation tank.

[Procedure amendment 14]

[Document name to be amended] Statement

[Correction target item name] 0020

[Correction method] Change

[Correction contents]

(12) The cleaning apparatus according to the present invention is characterized in that when cleaning the work, the work moves in the order of the cleaning tank and the rinsing tank.

[Procedure amendment 15]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction contents]

(13) The cleaning apparatus according to the present invention is characterized in that when cleaning the work, the work moves in the order of the cleaning tank and the rinsing tank.

[Procedure amendment 16]

[Document name to be amended] Statement

[Correction target item name] 0022

[Correction method] Change

[Correction contents]

(14) The cleaning apparatus according to the present invention is characterized in that the vicinity of the bottom of the settling tank is connected to the vicinity of the bottom of the washing tank by piping.

[Procedure amendment 17]

[Document name to be amended] Statement

[Correction target item name] 0023

[Correction method] Change

[Correction contents]

(15) The cleaning apparatus according to the present invention is characterized in that the cleaning liquid is of a hydrocarbon type.

[Procedure amendment 18]

[Document name to be amended] Statement

[Correction target item name] 0024

[Correction method] Change

[Correction contents]

(16) The cleaning apparatus according to the present invention is characterized in that at least one of the sedimentation tank, the cleaning tank, and the rinsing tank has a bottom inclined with respect to a horizontal direction.

Claims (16)

[Claims] 1. A cleaning tank for cleaning a workpiece with a cleaning liquid, and a sedimentation tank connected to the cleaning tank so as to be able to pass therethrough and for precipitating a precipitation component contained in the cleaning liquid used for cleaning. Cleaning equipment. 2. The cleaning apparatus according to claim 1, further comprising a rinsing tank connected to the cleaning tank so as to be able to pass the liquid, and rinsing the work cleaned in the cleaning tank. 3. The cleaning apparatus according to claim 2, wherein a portion near the bottom of the rinsing tank is connected to an upper side of the cleaning tank by a pipe. 4. The cleaning apparatus according to claim 1, further comprising a regenerator connected to the sedimentation tank so as to be able to pass the liquid and regenerating the cleaning liquid. 5. The cleaning apparatus according to claim 4, wherein the regenerator is connected to a vicinity of a bottom of the settling tank by a pipe. 6. A buffer tank, which is connected to the settling tank so as to be able to pass therethrough and temporarily stores the washing liquid.
The cleaning apparatus according to any one of claims 1 to 5, wherein 7. A cleaning tank for cleaning a workpiece with a cleaning liquid, a precipitation tank for precipitating a precipitation component contained in the cleaning liquid used for cleaning, a buffer tank for temporarily storing the cleaning liquid, and regenerating the cleaning liquid. A cleaning apparatus, comprising: a recycler; a circulation line having a rinse tank for rinsing the work cleaned in the cleaning tank; and a line connecting the regenerator and the sedimentation tank. 8. A cleaning tank for cleaning a workpiece with a cleaning liquid, a precipitation tank for precipitating a sediment component contained in the cleaning liquid used for cleaning, a buffer tank for temporarily storing the cleaning liquid, and regenerating the cleaning liquid. Connecting a regenerator, a storage tank for storing the cleaning liquid regenerated by the regenerator, a rinsing tank for rinsing the work cleaned in the cleaning tank, and the regenerator and the sedimentation tank A cleaning device comprising a line. 9. The cleaning apparatus according to claim 7, wherein a portion near the bottom of the rinsing tank is connected to an upper side of the cleaning tank by a pipe. 10. The cleaning apparatus according to claim 7, wherein a line connecting the regenerator and the settling tank is connected near a bottom of the settling tank. 11. The cleaning apparatus according to claim 7, wherein at the time of cleaning the work, the cleaning liquid flows in the order of the rinsing tank, the cleaning tank, and the sedimentation tank. 12. The cleaning apparatus according to claim 7, wherein at the time of cleaning the work, the work moves in the order of the cleaning tank and the rinsing tank. 13. The cleaning apparatus according to claim 6, wherein the buffer tank is connected to an upper side of the settling tank by a pipe. 14. The washing tank according to claim 1, wherein the vicinity of the bottom of said settling tank is connected to the vicinity of the bottom of said washing tank by piping.
The cleaning device according to any one of the above. 15. The cleaning apparatus according to claim 1, further comprising pressure adjusting means for adjusting the pressure in the settling tank and / or the cleaning tank. 16. The cleaning apparatus according to claim 1, wherein at least one of the settling tank, the cleaning tank, and the rinsing tank has a bottom inclined with respect to a horizontal direction.