JP2001160534A - Safety system and aligner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a safety system capable of securing safety and workability of a worker to work inside a sealed device having a drive system. SOLUTION: Safety plug devices 21, 22 and 23 are installed on device doors 11, 12 and 13, and hardware is constituted so as to immediately turn off the power source of the drive system inside the device, when a safety plug is pulled out of the holder of the safety plug device. Without returning the safety plug to the holder, power feeding to the driving system inside the device cannot be recovered. It is of a constitution, where without pulling the safety plug out of the holder of the safety plug device, the device door cannot be opened. Since the worker, who enters the device, carries the safety plug with him, the other worker can be prevented from closing the device door and restarting the device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a safety system for ensuring the safety of an operator working inside an apparatus such as an exposure apparatus sealed with a door, and an apparatus such as an exposure apparatus having the safety system. .

[0002]

2. Description of the Related Art An apparatus used for manufacturing a semiconductor device or a liquid crystal display panel, for example, an exposure apparatus used in a photolithography process is provided with an external chamber in order to prevent particulate contaminants and gaseous impurities from entering the apparatus. It has a closed structure that separates from the space, and the air outside the device is purified and circulated through the device by an air purification system incorporating a HEPA filter, ULPA filter or chemical filter. Further, in an apparatus used for manufacturing a semiconductor device or a liquid crystal display panel, for example, an exposure apparatus, a semiconductor wafer or a glass substrate (hereinafter, referred to as a substrate) coated with a photosensitive material such as a photoresist is placed below an exposure optical system. A substrate stage that moves and holds a substrate, a substrate transport system for automatically transporting a substrate between a substrate carrier accommodating a large number of substrates and the substrate stage, and various types of photomasks or reticles (hereinafter referred to as reticles). There is a movable part such as a reticle transport system for automatically transporting a reticle between a reticle library storing a reticle and a reticle stage.

[0003] By the way, even in the above apparatus,
For example, for adjustment or maintenance of a transport system or an optical system, it is sometimes necessary for an operator to enter the inside of the apparatus and work. Generally, various members are intricately arranged inside the apparatus, and the work space is small and the worker is not in a state where they can move freely. However, it is very dangerous if movable parts such as a substrate transport system and a reticle transport system start to move. Therefore, conventionally, an interlock mechanism for detecting a door open state by a door open / close switch provided on the apparatus door and stopping a drive system that interferes with an operator is provided, or a drive system temporary stop switch and A switch for releasing the suspension is provided, and the device door is locked except when the drive system is temporarily stopped, so that the device door is not opened carelessly.

[0004]

A method of providing an interlock mechanism for stopping a drive system that interferes with a worker in conjunction with opening and closing of an apparatus door has a drive system that is not an object of interlock. In such a case, an accident occurs when a part of the body of the worker working in the apparatus inadvertently interferes with the drive system. In order to avoid such an accident, it is necessary to completely separate a drive system which is not an object of the interlock from other parts in the apparatus by a shielding plate or the like.

A method of providing a switch for temporarily stopping the drive system and a switch for canceling the suspension in the apparatus is based on a method in which the drive system is temporarily stopped and another worker erroneously enters the apparatus door while the worker enters the apparatus. Is closed and locked, and the drive train is restarted,
Danger to workers in the equipment. At that time, since the device door is locked, it becomes difficult for an operator in the device to go out of the device in an emergency.

Software-based processing is necessary for temporarily stopping and releasing the drive system in conjunction with opening and closing of the apparatus door. Therefore, even if there is no other worker, the door is closed when the worker enters the apparatus, and then the door is locked due to noise or a malfunction of the apparatus control software, and the drive system automatically restarts. It is also possible.

[0007] The present invention has been made in view of such problems of the prior art, and has a safety system capable of ensuring the safety and operability of a worker who operates in a sealed device having a drive system. And an apparatus such as an exposure apparatus having the safety system.

[0008]

In order to solve the above-mentioned problems, in the present invention, all the drive systems in the apparatus are interlocked with the opening and closing of the apparatus door. Here, the drive system refers to an actuator such as a motor corresponding to an industrial robot. The drive system to be interlocked is stopped by shutting off the power to the motor, that is, the power supply.

A safety plug (safety key) device is installed on each device door, and hardware is configured to immediately shut off the power of the drive system in the device when the safety plug is pulled out from the holder of the safety plug device. Unless the safety plug is returned to the holder, power supply to the drive system in the device will not be restored. The power cutoff function by the hardware is a function that operates with the highest priority in any state regardless of the operation state of the apparatus.
The state where the safety plug is pulled out from the holder and the state where the device door is open are synonymous. The device door cannot be opened unless the safety plug is pulled out from the holder of the safety plug device, and the operator is required to carry the pulled out safety plug when entering the device. When the worker carries the safety plug, it is possible to prevent another worker from accidentally closing the device door and restarting.

[0010] The safety plug is preferably constructed by combining a main safety plug and a sub safety plug so that the safety of all workers can be ensured when a plurality of workers enter the apparatus at the same time and work. The main safety plug is mechanically engaged with the device door when mounted on the holder to prevent the device door from being opened. The sub safety plug does not mechanically interfere with the opening and closing operation of the device door, and
The main safety plug must be pulled out of the holder before it can be pulled out of the holder. The sub-safety plug has the same function as the main safety plug in terms of the function of immediately shutting off the power to the drive system in the device when it is pulled out from the holder of the safety plug device. Also,
When returning the safety plug to the holder of the safety plug device, if all the sub-safety plugs are not returned to the predetermined positions of the holder, install the main safety plug into the specified position of the holder and mechanically close the device door. So that it cannot be fixed to The device door is not provided with any electrical or electromagnetic locking means other than mechanical locking of the safety plug device to the closed position by the main safety plug.

In addition to disconnecting the main or sub safety plug from the safety plug device (opening the device door), a switch for shutting off the power supply to the drive system inside the device is separately provided to duplicate the interlock. I do. The drive system power cutoff function by this switch is a function that has the highest priority in any state regardless of the operation state of the device, like the function of the drive system power supply cutoff in the device by the safety plug. Is immediately shut off.
By installing this switch, further safety of the worker working in the apparatus is ensured. Also, an emergency stop switch (emergency switch) is installed inside the apparatus, and even if an unexpected situation occurs during the work of the operator, the power of the entire apparatus can be turned off from inside the apparatus.

In addition, a cycle stop switch / restart (restart) switch is provided, and a drive system in the apparatus is preferably separated before turning off a switch for powering off the drive system in the apparatus or opening a door of the apparatus. And then stop. Since the stop of the drive system in the apparatus by the cycle stop switch is performed gently according to a predetermined procedure, when the cycle stop / restart switch is pressed after the work is completed, the drive system in the apparatus restarts the operation smoothly from the stop position. be able to. In addition, since the device door does not have a locking / unlocking mechanism other than fixing the door at the closed position by the safety plug, the device door can be opened at any time regardless of these switches.

Further, when the apparatus door is open, a sound such as a chime is kept sounding in the apparatus. When another worker closes the device door, the sound stops and the worker inside the device notices that the device has been trapped. Therefore, even if another worker can pick up the safety plug dropped by the worker in the device and try to restart the device, the worker in the device can detect the danger in advance, so it is installed in the device. The device can be stopped by using the emergency stop switch.

It is preferable that the current position of each drive system can be accurately grasped at the time of restart by an absolute encoder or the like so that time for device initialization or the like does not occur at the time of restart after the power supply of the motor is cut off. . As described above, according to the present invention, the safety of the worker working in the apparatus can be doubled or tripled without lowering the workability.

That is, the safety system according to the present invention comprises:
It has a safety plug holder installed near the device door, a safety plug that can be attached to and detached from the safety plug holder, and a switch that operates in conjunction with the attachment and detachment of the safety plug to and from the safety plug holder. When the safety plug is removed, the device door cannot be opened and the safety plug can be removed from the safety plug holder to open the device door.When the safety plug is removed from the safety plug holder, a switch is installed in the device. It is characterized in that it acts so as to stop the operation of the specified actuator.

Further, the safety system according to the present invention operates in conjunction with a plurality of safety plug holders, a plurality of safety plugs detachably attachable to the plurality of safety plug holders, and the attachment / detachment of the safety plug to / from each safety plug holder. Switch, which stops the operation of the actuator provided in the device when any safety plug is removed from the safety plug holder, and thereafter, after all the safety plugs are mounted on the safety plug holder. The operation of the actuator can be restarted.

The plurality of safety plugs include a main safety plug which disables the opening operation of the device door when mounted on the safety plug holder, and which can open the device door by removing the safety plug from the safety plug holder. And a sub-safety plug that can be removed from the safety plug holder only after the main safety plug is removed from the safety plug holder. A switch that operates in conjunction with the attachment / detachment of the safety plug to / from the safety plug holder shuts off power to the actuator when the safety plug is removed from the safety plug holder.

The safety system according to the present invention also includes an in-apparatus work registration means for registering the start of work by an operator when the in-apparatus work is started by the operator and registering the end of the work by the worker when the in-apparatus work is completed, Means for interrupting power supply to an actuator provided in the apparatus from when the start of the in-apparatus work is registered in the internal work registration means to when the end of the in-apparatus work is registered. The in-apparatus work registration means has a function of reading an ID card carried by the worker, and can register work start and work end by the worker ID.

An exposure apparatus according to the present invention includes the above-described safety system, a substrate transport unit that includes an actuator and transports a substrate to a substrate stage, and an exposure unit that exposes the substrate transported to the substrate stage by the substrate transport unit. An exposure apparatus, comprising: a transport control unit connected to the substrate transport unit, configured to control the execution of the substrate transport process in a plurality of cycles, and connected to the transport control unit, and after a predetermined cycle of the plurality of cycles. A stop switch for stopping execution.

An exposure apparatus according to the present invention includes a substrate moving mechanism for moving a substrate, a control unit connected to the substrate moving mechanism for controlling the movement of the substrate in a plurality of cycles, and an exposure unit for exposing the substrate. An exposure apparatus comprising: a stop unit that stops control of the control unit after a predetermined cycle in a plurality of cycles is completed.

Further, a storage device for storing the position of the substrate moving mechanism when the operation is stopped after the end of the predetermined cycle is provided. The control unit controls the substrate moving mechanism based on the stored position information when the stop by the stop unit is released.

Further, a safety plug having a lock mechanism is provided on a door provided in the exposure apparatus of the present invention, and when the safety plug is removed, a drive command to the substrate moving mechanism is shut off. It is characterized by. In addition, a chamber surrounding the substrate moving mechanism and the exposure unit is provided, the chamber is provided with a door for communicating between the inside and the outside of the chamber, and the door is provided with a safety plug for restricting opening of the door. .

[0023] Further, the present invention is characterized in that there is provided work registration means for registering the start of work by the worker when the work in the chamber is started by the worker, and registering the end of work by the worker when the work in the chamber ends. In addition, there is provided a notifying means for notifying that the worker is working according to the registration status of the work registering means.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. Hereinafter, an exposure apparatus used in a photolithography process as a manufacturing process of a semiconductor device or a liquid crystal display panel will be described as an example. FIG. 1 is a schematic front view of an embodiment of an exposure apparatus chamber according to the present invention, and FIG. 2 is a schematic rear view of the chamber. FIG. 3 is a schematic diagram showing the arrangement of the in-chamber apparatus when the exposure apparatus is viewed from above.

As shown schematically in FIGS. 1 and 2, the exposure apparatus has a chamber 10 for isolating the inside of the apparatus from the outside.
A control panel 30 disposed in front of the chamber 10 is provided with an operation ON / OFF switch 31, a cycle stop / restart switch 32, a cycle stop indicator light 33, and the like. Also, a stage maintenance device door 11 and a substrate carrier replacement device door 1 are provided on a wall in front of the chamber.
2. A reticle replacement device door 13 is provided, and a substrate carrier replacement device door 14 is provided on a wall on the back surface of the chamber. The device doors 11 to 14 are provided with safety plug devices 21 to 24, respectively. Emergency stop switches 41 and 42 outside the apparatus are further provided on the wall in front of the chamber.

As schematically shown in FIG. 3, an exposure optical system 50 for exposing and transferring a pattern provided on a reticle onto a substrate is provided in a chamber 10 of the exposure apparatus. Stage 51, substrate carriers 53 and 54 accommodating a large number of substrates 52, a reticle library 56 accommodating a plurality of types of reticles 55, and an unexposed substrate in the substrate carrier are transferred to the substrate stage 51 and subjected to pattern exposure. Substrate carriers 53 and 54
Reticle 55 between reticle library 56 and reticle stage of exposure optical system 50
A reticle transport system 59 that transports the reticle is provided. In the chamber 10, an emergency stop wire strip switch 43 and a device door opening notification chime 44 are provided as facilities for the safety of workers working inside. The wire strip switch 43 is turned off by pulling the wire with a wire-like switch.

FIGS. 4 and 5 are schematic diagrams for explaining an example of the safety plug device. Here, the safety plug device 21 provided on the stage maintenance device door 11 will be described as an example, but the safety plug devices 22 to 24 provided on the other device doors 12 to 14 have the same structure and function.

As shown in the perspective view of FIG. 4, the safety plug device 21 includes a safety plug holder (hereinafter, simply referred to as a holder) 70, a main safety plug 71 which is detachably attached to the holder 70, and a sub safety plug 71. Plug 72,
It consists of 73. The holder 70 of the safety plug device 21
The device door 11 is fixed to a chamber wall near the door so as not to obstruct the opening and closing of the device door 11. Although the number of the main safety plug 71 combined with the holder 70 is one, the number of the sub safety plugs may be one or more. The number of sub-safety plugs is the sum of the main safety plugs and sub-safety plugs,
The number is determined to be the maximum number of workers who can enter the apparatus from 1. For example, when the maximum number of workers who can enter the apparatus from the stage maintenance device door 11 in front of the chamber is three, the safety plug device 21 provided on the stage maintenance device door 11
The total sum of the main safety plug and the sub safety plug is three. That is, one main safety plug and two sub safety plugs are prepared.

FIG. 5 is an explanatory view showing a specific example of the shape of the main and sub safety plugs, and a state before and after the sub safety plug is mounted on the holder. FIG. 5A shows an example of the shape of the sub safety plugs 72 and 73, and FIG. 5B shows an example of the shape of the main safety plug 71. The illustrated sub-safety plugs 72 and 73 have a plate-like key portion 74 provided with a through hole 75. The main safety plug 71 is provided with a through hole 7 provided in the key portion 74 of the sub safety plugs 72 and 73.
5 has a bar-shaped key portion 76 having a thickness passing therethrough.

As shown in FIG. 4, the main safety plug 71
Is mounted on the holder 70, the bar-shaped key portion 76 of the main safety plug 71 pushes the switch 81 sideways to turn it on. When the main safety plug 71 is pulled out of the holder 70, the switch 81 is turned off. 4 and 5
As shown in (d), the sub safety plug 72 is
When the sub-safety plug 72 is mounted at 0, the sub-safety plug 72 is turned on by pressing the switch 82 at the tip. Similarly, when the sub-safety plug 73 is attached to the holder 70, the sub-safety plug 73 is turned on by pressing the switch 83 at the tip. After the main safety plug 71 is pulled out of the holder 70 and then the sub safety plugs 72 and 73 are pulled out of the holder 70, the switches 82 and 83 are turned off.

As shown in FIGS. 5C and 5D,
In the holder 70 of the safety plug device, as many shutters 77 as the number of sub-safety plugs that can be displaced by the action of a spring 78 are provided. Here, the sub safety plug 72
And the corresponding shutter 77 will be described.
The shutter 77 is moved from the holder 70 to the sub safety plug 7.
When the members 2 and 73 are pulled out, as shown in FIG. 5C, they are pushed by a spring 78 to close the path of the bar-shaped key portion 76 of the main safety plug 71. Therefore, if at least one sub safety plug is pulled out from the holder 70 of the safety plug device, the main safety plug 71 cannot be mounted on the holder 70 to mechanically lock the device door.
When all of the sub-safety plugs 72 and 73 are returned to the holder 70, as shown in FIG. 5D, a rod-shaped key portion 76 of the main safety plug 71 is formed by a through hole 75 provided in the key portion 74 of the sub-safety plug. The main safety plug 71 is mounted on the holder 70 and the device door 1
1 can be mechanically fixed in the closed position.

It is desirable that each of the safety plugs provided in the safety plug devices 21 to 24 be unique to the safety plug device by, for example, changing the cross-sectional shape or the like of each key portion. For example, the safety plugs 71 to 73 provided in the safety plug device 21 are different from the other safety plug devices 22 to 2.
4 so that it cannot be inserted into the holder. As a result, the safety plug borrowed from the safety plug device such as another exposure device that is not in operation is inserted into the holder where the safety plug has been pulled out for the operation in the device, and the operation of the device is restarted. Therefore, the safety of the operation in the apparatus can be further improved.

FIG. 6 is a diagram schematically showing a power supply system of a drive system of the exposure apparatus. The substrate transport system 58, reticle transport system 59, and substrate stage drive system 60 of the exposure apparatus are supplied with power from a power supply 90 via switches 91, 92, 93, 94, 95, 96,. Switches 91, 92,
93 is a switch 8 in the safety plug device 21 respectively.
1, 82 and 83 are connected when ON, and switches 81 and
It is controlled so that it is shut off when 82 and 83 are OFF. Similarly, the switches 94, 95, and 96 are respectively connected to the safety plug 2 attached to the substrate carrier replacement device door 12.
2. Safety plug 2 attached to reticle replacement device door 13
3. Connected when the switch provided in the safety plug 24 attached to the substrate carrier replacement device door 14 is ON,
It is controlled to be shut off when it is OFF. The switch 97 is connected by an operation ON / OFF switch 31 of the control panel 30, the switches 98 and 99 are connected by emergency stop switches 41 and 42 outside the device, the switch 100 is connected by a wire strip switch 43, and each switch is connected when the switch is ON. It is controlled to be shut off when it is OFF.

Accordingly, when at least one of the main or sub safety plugs attached to the safety plugs 21 to 24 provided in association with the respective device doors 11 to 14 is pulled out, all the drive systems 58 and 59 in the device are pulled out. , 60 are stopped, and all moving parts in the apparatus stop moving. Driving O
When the N / OFF switch 31 is turned off, when the emergency stop switches 41, 42 outside the device or the wire strip switch 43 inside the device are operated, the power supply to the drive systems 58, 59, 60 in the device is stopped. , All moving parts in the device stop moving. FIG. 6 shows the safety plug device 21.
The main safety plug 71 and the sub safety plug 72 are pulled out from the holder of
The state when the / OFF switch 31 is also turned off is shown.

FIG. 7 shows a chime 45 provided in the apparatus.
FIG. 3 is a schematic diagram of a power supply circuit to the power supply. Power supply 90 to chime 4
The switch circuit 105 is provided in the middle of the power supply line for supplying power to the power supply line 5. The switch circuit 105 is connected to the device doors 11-1.
4 operates in conjunction with ON / OFF of the switches in the safety plug devices 21 to 24 provided in association with 4. By pulling out the main safety plug or sub-safety plug inserted into the safety plug devices 21 to 24 from the holder, even one of the switches 81, 82, 83,. When the switch 105 is turned off, the switch 105 is turned on to supply power to the chime 45. Therefore, the device doors 11 to 1
When any one of the safety plugs is pulled out from the safety plug devices 21 to 24 attached to the device 4, the chime 45 is set in the device.
Starts to sound and the chime 45 continues to sound until all the safety plugs are returned to the predetermined positions of the holders of the corresponding safety plug devices. FIG. 7 shows a state in which the main safety plug 71 and the sub safety plug 72 are pulled out of the holder of the safety plug device 21.

FIG. 8 is a flowchart for explaining a procedure when an operator enters the apparatus and performs work, and a corresponding operation on the apparatus side. Here, a case where two workers A and B enter the apparatus chamber 10 from the apparatus door 11 and work will be described as an example. The number of workers who can enter the device is limited to the number of safety plugs provided in the device. The arrow indicated by a broken line from the worker side toward the device side in the drawing indicates that the operation is performed on the device side by the operation of the worker.

Worker A. When B enters the apparatus chamber 10 and performs an operation, first, the cycle stop switch 32 of the control panel 30 is pressed (S11). When the apparatus detects that the cycle stop switch 32 is pressed, the substrate transport system 58, the reticle transport system 59, and the substrate stage drive system 60 stop when the operation being performed has progressed to a well-defined point. (S51). At this time, since each drive system does not stop immediately but decelerates to a stop, even if the substrate transport system 58 is transporting the substrate or the reticle transport system 59 is transporting the reticle, the substrate remains on the transport arm. And the position of the reticle does not shift. When all drive systems have stopped, the cycle stop indicator light 33 is turned on (S
52).

After confirming that the cycle stop indicator lamp 33 is lit, the operator sets the operation ON / OFF switch 31 to the operation OF.
Switch to F side (S12). As a result, the switch 97 of the drive system power supply system shown in FIG. 6 is opened, and the drive system power supply in the stopped device is turned off by operating the cycle stop switch (S53). The worker A pulls out the main safety plug 71 of the safety plug device 21 installed on the device door 11 (S13). When the main safety plug 71 is pulled out, on the device side, the switch 91 of the drive system power supply system is opened, and the operation switch O
The power supply to all the drive systems in the apparatus whose power is turned off by the FF operation is further cut off (S5).
4). At the same time, the switch 105 of the chime power supply shown in FIG. 7 is turned on, and the chime 45 starts sounding in the apparatus (S55). Next, the worker B pulls out the sub safety plug 72 of the same safety plug device 21 (S14). By pulling out the sub safety plug 71, on the device side,
The switch 92 of the drive system power supply system is opened, and the power supply of the drive system in the apparatus is further cut off (S56).

In this way, even if the power is not turned off by the operation of the operation ON / OFF switch 31 due to a wiring error or equipment failure, the power of the drive system is reliably turned off. Conversely, for the same reason, even if the drive system power supply does not turn off when the safety plug is pulled out, the operation ON / OFF switch 31
Since the power is turned off in advance, safety is ensured. As described above, the system interlock is duplicated by the two power supply cutoff circuits, and the safety is improved. In addition,
Each drive system keeps track of its current position using an absolute encoder or the like. This is the same even when the power of the entire apparatus is interrupted. When the drive system power is turned off, the value of the absolute encoder of each drive system is stored in the storage device.

Next, the workers A and B connect to the safety plug device 21.
Then, the device door 11 opened by pulling out the main safety plug 71 is opened (S15), and the safety plugs 71, 72 thus pulled out are carried into the device chamber 10 with the respective safety plugs 71, 72 carried therein (S16). At this time, since all the drive systems in the apparatus are stopped, the arms of the substrate transport system 58 enter the substrate stage 51 side while the substrate stage 51 is being maintained, and the workers A and B There is no such thing as interference. Reticle transport system 5
9, the safety of the workers A and B is ensured even if a part of the body of the workers A and B enters the place where there is a possibility of interfering with the reticle transport system 59 because of the stop state. You.

When the work in the apparatus is completed, the workers A and B go out of the apparatus and close the apparatus door 11 (S17). The worker B who has gone out of the device inserts the sub safety plug 72 into the holder of the safety plug device 21 (S18). As a result, on the device side, the switch 92 of the drive system power supply system is turned ON (S57). Subsequently, the worker A operates the main safety plug 7
1 into the holder of the safety plug device 21 (S1
9). As a result, on the device side, the switch 91 of the drive system power supply system is turned ON (S58). In addition, safety plug 7
The switch 105 connected to the power supply of the chime 45 is turned off at the time when 2, 71 is inserted into the holder,
The chime 45 stops ringing (S59).

Next, the operator turns on the operation ON / OFF switch 31 (S20). At this time, on the device side, the switch 97 of the drive system power supply system is turned ON, and at this time, the power supply from the power supply 90 to the drive systems 58, 59, 60 in the device is restarted (S60). Further, the operator performs an operation of restarting the cycle by using the cycle stop / restart switch 32 (S21). Then, on the device side, the current value of the absolute encoder is compared with the stored value stored when the cycle is stopped, and if the two values are different, the drive systems 58, 59, 6 in the device are so set that the current value matches the stored value.
After finely moving 0 (S61), the driving systems 58, 59, 60
Is returned to the normal operation (S62). Then, the cycle stop indicator light 33 is turned off (S63).

Here, if the worker A or B forgets to have the pulled out safety plug 71 or 72, the worker A or B enters the apparatus chamber 10 while leaving it outside the apparatus chamber 10 (on a floor or the like). Is assumed to be performed. When the workers A and B enter the inside of the apparatus and are difficult to recognize from the outside of the apparatus, if another worker picks up the safety plug 71 or 72 and inserts it into the predetermined position of the holder of the safety plug apparatus 21, At that time, the chime 45 stops sounding, so that the workers A and B in the apparatus notice that they are trapped and pull the emergency stop wire strip switch 43 in the apparatus to shut off the power of the entire apparatus. The safety of workers A and B is ensured.

When the cycle stop switch 32 in S51 of the procedure shown in FIG. 8 is detected to be pressed, the substrate transport system 58, the reticle transport system 59, and the substrate stage drive system 60 perform the operation being executed. As the step of stopping at the point where a break is good, the step of stopping is when the exposure of the substrate in progress is completed and stopped when the substrate is stored in the substrate carrier, or when the exposure processing of the substrate lot is completed. For example. In addition, when the cycle stop switch is pressed, the state in which the cycle stop switch is stopped may be set in advance, or a plurality of cycle stop switches may be provided to allow selection.

In the above, an example has been described in which the safety of the worker working in the device is ensured by using the safety plug device. Next, an example will be described in which the safety of the operation in the apparatus is secured using means other than the safety plug. In the drawings described below, the same functional portions as in FIGS. 1 to 8 in the above-described embodiment are denoted by the same reference numerals as in FIGS. 1 to 8, and redundant description will be omitted.

An example using an ID card will be described.
FIG. 9 is a schematic front view of the exposure apparatus chamber according to the present embodiment. Compared with the exposure apparatus chamber shown in FIG. 1, there is no safety plug device for each apparatus door, and an ID card reader 110 is provided instead. . The arrangement of the apparatus in the exposure apparatus chamber is as described with reference to FIG.

Each worker has an ID card,
When the lock of the device door is opened, the ID card is read by the ID card reading device 110, and the work of the device is registered, and then the lock of the device door is released. The device door may be unlocked only by the ID card. When the work is completed, insert the ID card again
The card reader 110 is made to read and the work end is registered.

FIG. 10 is a diagram schematically showing a power supply system of a drive system of the exposure apparatus. A substrate transport system 58 of the exposure apparatus,
The reticle transport system 59 and the substrate stage drive system 60 are supplied with power from a power supply 90 via switches 121, 97, 98, 99, and 100. The switch 121 is turned off by the switching unit 111 when the ID card reader 110 registers the worker in the apparatus. The switch 97 is an operation ON / OFF switch 3 of the control panel 30.
In accordance with 1, the switches 98 and 99 are controlled by the external emergency stop switches 41 and 42, and the switch 100 is controlled by the wirestrip switch 43 so that each switch is connected when the switch is ON and cut off when the switch is OFF.

FIG. 11 shows a chime 4 provided in the apparatus.
It is a schematic diagram of a power supply circuit to 5. A switch 112 is provided in the middle of a power supply line for supplying power from the power supply 90 to the chime 45. This switch 112 is turned off by the switching means 112 when the ID card reader 110 registers the worker in the apparatus.

FIG. 12 is a flowchart for explaining a procedure when an operator enters the apparatus and performs work, and a corresponding operation on the apparatus side. Here, the device doors 11 to 2
An example in which human workers A and B enter the apparatus chamber 10 to perform work will be described. The arrow indicated by a broken line from the worker side toward the device side in the drawing indicates that the operation is performed on the device side by the operation of the worker.

Worker A. When B enters the apparatus chamber 10 and performs an operation, first, the cycle stop switch 32 of the control panel 30 is pressed (S111). When the apparatus detects that the cycle stop switch 32 is pressed, the substrate transport system 58, the reticle transport system 59, and the substrate stage drive system 60 stop when the operation being performed has progressed to a well-defined point. (S151). At this time, since each drive system does not stop immediately but decelerates and stops, the substrate transport system 58
Is not transferring the substrate or the reticle transfer system 59 is transferring the reticle, the position of the substrate or the reticle does not shift on the transfer arm. When all drive systems have stopped, the cycle stop indicator light 33 is turned on (S152).

After confirming that the cycle stop indicating lamp 33 is lit, the operator sets the operation ON / OFF switch 31 to the operation OF.
Switch to F side (S112). As a result, the switch 97 of the drive system power supply system shown in FIG. 10 is opened, and the drive system power supply in the stopped device is turned off by operating the cycle stop switch (S153).
The worker A writes his / her own ID to the ID card reader 110.
Read the D card and register the in-apparatus work (S11)
3). When the work in the apparatus by the worker A is registered in the ID card reading apparatus 110, the apparatus opens the switch 121 of the drive system power supply system by the switching means 111, and the power is originally turned off by the operation switch OFF operation. The power supplies of all the drive systems in the apparatus in the state of being turned on are further cut off (S154). At the same time, FIG.
Switch 1 provided on the feed line of chime 45 shown in FIG.
22 is closed by the switching means 12, and the chime 45 starts sounding in the device (S155). next,
The worker B working in the apparatus together with the worker A causes the ID card reader 110 to read his / her ID card and registers the work in the apparatus (S114).

In this way, even if the power is not turned off by the operation of the operation ON / OFF switch 31 due to a wiring error or equipment failure, the power of the drive system is reliably turned off. Conversely, for similar reasons, I
Even if the drive system power does not turn off when the in-apparatus work is registered with the D card, the operation is ON / O
Since the power is turned off in advance by the FF switch 31,
Safety is ensured. As described above, the system interlock is duplicated by the two power supply cutoff circuits, and the safety is improved. Each drive system keeps track of its own current position using an absolute encoder or the like. This is the same even when the power of the entire apparatus is interrupted. When the drive system power is turned off, the value of the absolute encoder of each drive system is stored in the storage device.

Next, the workers A and B open the unlocked apparatus door 11 (S115), enter the apparatus chamber 10, and perform operations (S116). At this time, since all the driving systems in the apparatus are stopped, the substrate transport system 58 is maintained while the substrate stage 51 is being maintained.
Arm enters the substrate stage 51 side, and the workers A and B
There is no such thing as interference. Since the reticle transport system 59 is also in a stopped state, even if a part of the body of the workers A and B enters a place where there is a possibility of interfering with the reticle transport system 59, the safety of the workers A and B is ensured. Is secured.

When the work in the apparatus is completed, the workers A and B go out of the apparatus and close the apparatus door 11 (S117). The worker A who has gone out of the apparatus makes the ID card reader 110 read his / her ID card and registers the end of the in-apparatus work (S118). At this stage, since the end of the work of another worker B is not registered at this stage, the apparatus does not yet turn on the switch 121 of the power supply system in the apparatus.
Subsequently, the worker B who has gone out of the apparatus causes the ID card reader 110 to read his / her own ID card and registers the end of the work in the apparatus (S119). At this time, the device confirms the end of all the registered workers in the device, and instructs the switching means 111 and 112 to switch. As a result, the switch 121 of the drive system power supply system is turned on (S156), and the switch 122 connected to the power supply of the chime 45 is turned off,
The chime 45 stops ringing (S157).

Next, the operator turns on the operation ON / OFF switch 31 (S120). At this time, on the device side,
The switch 97 of the drive system power supply system is turned ON, and power supply from the power supply 90 to the drive systems 58, 59, 60 in the apparatus is restarted at this time (S158). Further, the operator performs an operation of restarting the cycle by using the cycle stop / restart switch 32 (S121). Then, on the device side,
The current value of the absolute encoder is compared with the stored value stored when the cycle is stopped, and if the two values are different, the drive systems 58, 5 in the device are so set that the current value matches the stored value.
After finely moving 9, 60 (S159), the driving systems 58, 5
9, 60 are returned to the normal operation (S160). Then, the cycle stop indicator light 33 is turned off (S161).

It is also possible to combine the use of an ID card with the above-described embodiment using a safety plug device attached to each device door. By using the ID card, it is possible to confirm who is currently working in the apparatus and manage the working state. Further, an operator working in the apparatus enters the apparatus chamber 10 with a transmitter for transmitting radio waves to a local area, and as shown in FIG. 13, a receiver 130 provided in the apparatus. 131, 132
It is also possible to allow the device to directly recognize the presence of the worker from the signal received by the device.

The safety plug of the embodiment using the above-described safety plug device may have the function of a transmitter. In this case, the safety of the operation in the device can be ensured by carrying the safety plug, and the safety can be further enhanced by the transmitter. Alternatively, in the above embodiment using an ID card, a system using a transmitter instead of the ID card is also possible. In this case, a work registration receiver is installed near the device door outside the device in place of the ID card reading device, and information including the ID number of the worker is transmitted from the transmitter carried by the worker. . The work registration receiver receives radio waves from a receiver carried by an operator and registers work in the apparatus. Further, the worker who comes out of the apparatus chamber after finishing the work in the apparatus registers the end of the work in the apparatus in the work registration receiver. In this way,
It is possible to recognize the presence of a worker in the device and manage the work state.

In place of the cycle stop / restart switch 32, an ID card reader for registering the ID of the worker may have a cycle stop / restart registration function. That is, when the worker ID is registered, the cycle stop function is automatically activated, and the cycle is stopped after the currently processed processing command is completed. At this time, the position of the manipulator and the stop positions of the stage and the substrate transfer arm are recorded. Recording the stop position of the movable part such as the stage and the transfer arm in this way considers the case where the movable part is moved by the worker when the worker's work is completed and the worker ID is deleted. Then, the entire apparatus is returned to a state before the worker starts the work. With this operation, preparation for the next substrate processing can be set. Further, when the cycle stop function is activated, the exposure operation of the exposure apparatus is automatically prohibited. In the case of an exposure apparatus which is operated online, online operation is not accepted and the exposure apparatus becomes offline. As a result, even for an online device, the safety of the worker can be ensured.

Next, after completion of the maintenance work or error recovery work of the worker, the end of the work is registered by the ID of the worker, so that the cycle stop function is automatically released, contrary to the previous operation. Then, the exposure apparatus enters a standby state, and waits for a processing command of the substrate.

When a plurality of workers work, each worker inputs the start of the work by his / her ID. At this time, the cycle stop function is activated by the first worker registering the ID, and at the end of the work, the cycle stop function is released when the end of the work is input using the ID of the last worker. become.

At this time, the cycle stop function may be activated, and the door of the chamber of the exposure apparatus may be locked under program control until the cycle is stopped. Further, the door of the chamber may be locked under the control of the program when executing the command.

When the cycle stop function is activated,
By providing a display device for displaying that the cycle has been stopped, it is displayed that the processing operation of the exposure apparatus has been stopped. The display may be displayed on a display unit, which is an indicator light attached to the exposure apparatus main body, or may be displayed on a main console screen near an operation unit of the exposure apparatus. May be. Further, a cycle stop switch may be provided in the main console or the main console screen.

When a maintenance operation is being performed, the fact that an operator is present in the exposure apparatus may be displayed on the main console screen. This makes it possible to confirm at a glance that the worker is working. In addition, if a detection sensor that monitors a plug that locks a door is provided, an operator enters from any door,
It is also possible to recognize whether work is being performed. Thus, it is possible to prohibit the operation of the movable part also by a program.

As another operation, by monitoring the cycle stop function, it is possible to recognize that the maintenance work is performed while the cycle stop function is operating. The time can be managed, and in the operation rate management, the actual maintenance time can be managed in addition to the operation rate of the apparatus.

[0066]

According to the present invention, it is possible to ensure the safety of a worker who works in a closed apparatus having a drive system inside such as an exposure apparatus.

[Brief description of the drawings]

FIG. 1 is a schematic front view of an example of an exposure apparatus chamber.

FIG. 2 is a schematic rear view of an exposure apparatus chamber.

FIG. 3 is a schematic view showing an arrangement of apparatuses in a chamber when the exposure apparatus is viewed from above.

FIG. 4 is a perspective view showing an example of a safety plug device.

FIG. 5 is a view for explaining the specific shape of the safety plug and the function of the sub-safety plug.

FIG. 6 is a diagram schematically showing a power supply system of a drive system of the exposure apparatus.

FIG. 7 is a schematic diagram of a power supply circuit for a chime provided in the device.

FIG. 8 is a flowchart illustrating a procedure when a worker enters the apparatus and performs a work, and a corresponding operation on the apparatus side.

FIG. 9 is a schematic front view of another example of the exposure apparatus chamber.

FIG. 10 is a diagram schematically showing a power supply system of a drive system of the exposure apparatus.

FIG. 11 is a schematic diagram of a power supply circuit for a chime provided in the device.

FIG. 12 is a flowchart illustrating a procedure when an operator enters the apparatus and performs an operation, and a corresponding operation on the apparatus side.

FIG. 13 is a schematic diagram showing an arrangement of apparatuses in a chamber when the exposure apparatus is viewed from above.

[Explanation of symbols]

Reference numerals 10: chamber, 11: stage maintenance device door, 12: substrate carrier replacement device door, 13: reticle replacement device door, 14: substrate carrier replacement device door, 21
-24: Safety plug device, 30: Control panel, 31: Operation ON / OFF switch, 32: Cycle stop / restart switch, 33: Cycle stop indicator light, 41, 42: External emergency stop switch, 43: Wire strip switch 45, chime, 50, exposure optical system, 51, substrate stage, 52, substrate, 53, 54, substrate carrier, 55
... reticle, 56 ... reticle library, 58 ... substrate transfer system, 59 ... reticle transfer system, 60 ... substrate stage drive system, 70 ... safety plug holder, 71 ... main safety plug, 72, 73 ... sub safety plug, 74 ... board Key part, 75 ... through-hole, 76 ... rod-shaped key part, 77 ... shutter, 78 ... spring, 81-83 ... switch, 90 ... power supply,
91 to 100: switch, 105: switch circuit, 11
0: ID card reader, 111, 112: Switching means, 121, 122: Switch, 130 to 13
2 ... Receiver

Claims (14)

[Claims] 1. A safety plug holder provided near an apparatus door, a safety plug detachable from the safety plug holder, and a switch that operates in conjunction with attachment and detachment of the safety plug to and from the safety plug holder. When the safety plug is attached to the safety plug holder, the device door cannot be opened, and the safety door can be opened by removing the safety plug from the safety plug holder. A safety system wherein the switch, when removed from the safety plug holder, acts to stop operation of an actuator provided in the device. 2. A vehicle comprising: a plurality of safety plug holders; a plurality of safety plugs respectively detachable from the plurality of safety plug holders; and a switch that operates in conjunction with attachment and detachment of the safety plugs to and from each safety plug holder. The switch stops the operation of the actuator provided in the device when any safety plug is removed from the safety plug holder, and thereafter, after all the safety plugs are attached to the safety plug holder, the operation of the actuator is stopped. A safety system capable of restarting operation. 3. The safety system according to claim 2, wherein
The plurality of safety plugs, a main safety plug that disables the opening operation of the device door when attached to the safety plug holder, and allows the device door to be opened by removing the safety plug from the safety plug holder; and A safety system comprising a sub-safety plug that can be removed from the safety plug holder only after the main safety plug is removed from the safety plug holder. 4. The safety system according to claim 1, wherein the switch shuts off the power of the actuator when the safety plug is removed from the safety plug holder. . 5. An in-apparatus work registration means for registering the start of work by the worker when the in-apparatus work is started by the worker, and registering the end of the work by the worker when the in-apparatus work is completed; Means for interrupting power supply to an actuator provided in the device from when the start of internal work is registered until the end of internal work is registered. 6. The in-apparatus work registration means, wherein the worker's I
6. The safety system according to claim 5, wherein registration of work start and registration of work end are performed by D. 7. A substrate transport unit that includes the safety system according to claim 1 and the actuator, and transports a substrate to a substrate stage, and is transported to the substrate stage by the substrate transport unit. An exposure apparatus comprising: an exposure unit that exposes a substrate, wherein the exposure control unit is connected to the substrate transport unit, and the transport control unit controls execution of the substrate transport process in a plurality of cycles. An exposure apparatus, further comprising: a stop switch connected to the stop switch for stopping execution after a predetermined cycle of the plurality of cycles. 8. A substrate moving mechanism for moving a substrate, a control unit connected to the substrate moving mechanism for controlling the movement of the substrate in a plurality of cycles, and an exposure unit for exposing the substrate. An exposure apparatus, comprising: a stop unit that stops control of the control unit after a predetermined cycle in the plurality of cycles is completed. 9. The exposure apparatus according to claim 8, further comprising: a storage device that stores a position of the substrate moving mechanism when the operation is stopped after the predetermined cycle is completed. 10. The control unit, upon canceling the stop by the stop unit, based on the stored position information,
10. The device according to claim 9, wherein the substrate moving mechanism is controlled.
Exposure apparatus according to the above. 11. A door provided on the exposure apparatus is provided with a safety plug having a lock mechanism, and when the safety plug is removed, a drive command to the substrate moving mechanism is shut off. The exposure apparatus according to claim 8, wherein: 12. A chamber for surrounding the substrate moving mechanism and the exposure unit, wherein the chamber includes a door for communicating between the inside and the outside of the chamber, and the door includes a safety member for restricting opening of the door. The exposure apparatus according to claim 8, further comprising a plug. 13. A work registering means for registering the start of work by the worker when the work in the chamber is started by the worker and registering the end of work by the worker when the work in the chamber ends. 13. The exposure apparatus according to 12. 14. An exposure apparatus according to claim 13, further comprising a notifying means for notifying that said worker is working according to the registration status of said work registering means.