JP2001156131A - Environment test device for electronic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To always realize stable and sure connections and further enhance reliability by accurately positioning the suction port of a suction system in the X-direction, the Y-direction and the Z-direction to the suction port of a cassette. SOLUTION: When a cassette 2 is inserted to a cassette support part 4 in a test device body 3, an automatic suction system connection part 9 is fit to the inserted cassette 2, and a position in an X-direction and a Y-direction of a suction port 7, etc., in a suction system in positioned automatically to a suction port 5, etc., provided to the cassette 2, and after the cassette 2 is inserted to the cassette support part 4, it is fit to the cassette 2 as a fixing part (first fixing part) 8 which is integral to the suction opening 7, etc., lowers, the position of the suction opening 7, etc., in a Z-direction is positioned automatically to the sucked port 5, etc., and the port 5, etc., and the port 7, etc., are connected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an environmental test apparatus for an electronic component for performing an environmental test of an electronic component such as a semiconductor wafer held in a cassette.

[0002]

2. Description of the Related Art Conventionally, there has been known an environmental test apparatus for an electronic component which performs a durability test or a pass / fail judgment test by applying a temperature load to a semiconductor wafer (electronic component) held in a cassette. This type of environmental test apparatus includes a drive circuit for applying a test signal to a semiconductor wafer. Usually, this drive circuit is disposed outside the test tank to avoid high temperatures and housed inside the test tank. The cassette thus connected was connected to the drive circuit via a connector provided inside the test tank.

On the other hand, the present applicant has already provided a heater portion in direct contact with the cassette inside the test tank, thereby locally heating only the cassette and avoiding an increase in the temperature inside the entire test tank. We proposed an environmental test device for electronic components (Japanese Patent Application No. 10-314615). According to this apparatus, when a cassette is loaded in the cassette support provided in the test apparatus main body, the cassette support is lowered to connect the one connector of the cassette to the other connector of the connection plate located below. Thus, the semiconductor wafer held by the cassette is connected to the drive circuit in the connection plate portion, and furthermore, the heater portion is lowered so that the heater portion is brought into contact with the cassette to locally heat the cassette. Therefore, the drive circuit for applying the test signal to the semiconductor wafer can be disposed inside the test chamber where the temperature is relatively low, so that the wiring connecting the cassette and the drive circuit can be shortened, and the individual semiconductor chips in the cassette can be reduced. Variations in the wiring length between the part (electronic component) and the drive circuit can be eliminated.

[0004]

In such an environmental test apparatus for electronic parts, a cassette having a contactor and a disk-shaped wafer tray is used, and a semiconductor wafer is held between the contactor and the wafer tray. Is done. In this case, the wafer tray has a suction port having a built-in check valve, and the suction state of the wafer tray and the contactor is maintained by vacuum suction from the suction port. On the other hand, when the cassette is loaded in the cassette support, the suction port connected to the suction device is connected to the suction port of the cassette, and the wafer tray is lowered to the normal negative pressure to ensure the optimal suction state are doing.

[0005] However, even if the cassette is loaded in the normal loading position, the cassette position in the X direction and the Y direction actually shifts by about ± 2 mm, and particularly, the cassette angle shifts. When this occurs, even if the angle deviation (for example, about ± 5 °) is slight, the deviation of the tip position of the intake port that protrudes in the radial direction (for example, 15 [m
m]) is a size that cannot be ignored. In addition, even in the Z direction, there is an error in the vertical position of the intake port due to the variation in the thickness of each part in the cassette, and eventually, the connection of the intake port to the intake port can be performed stably and reliably. There was also a point that could not be improved.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and by accurately aligning the intake port of the intake system in the X, Y, and Z directions with respect to the intake port of the cassette, It is an object of the present invention to provide an environmental test apparatus for electronic components that can always be connected stably and surely and can further enhance reliability.

[0007]

According to the present invention, a cassette 2 for holding electronic components (semiconductor wafers W) and a test apparatus main body 3 for performing an environmental test on the electronic components held in the cassette 2 are provided. When the cassette 2 is inserted into the cassette support section 4 of the test apparatus main body 3 in the electronic component environmental test apparatus 1 provided, the inserted cassette 2
To automatically position the intake port 7 in the X direction and the Y direction in the intake system with respect to the intake port 5 provided in the cassette 2, and
After being inserted into the suction port 7, the locking portion (first locking portion) 8 integral with the suction port 7 is lowered to engage with the cassette 2, and the position of the suction port 7 in the Z direction with respect to the suction target port 5. Is automatically positioned, and an automatic intake system connecting portion 9 for connecting the intake port 5 and the intake port 7 is provided.

In this case, according to a preferred embodiment, the automatic intake system connection portion 9 is locked to the cassette 2 inserted into the cassette support portion 4 so that the cassette 2 is in the normal loading position Sr. The movable part 1 having the engaging part 11 for positioning the intake port 7 on the same straight line Lo with respect to the intake port 5
2 and a linear drive unit 14 for moving the intake port 7 and the intake port 7 forward and backward with respect to the intake port 5 via a hinge 13 provided on the movable unit 12 so as to be vertically movable. In addition to supporting the movable portion 12 and the movable portion 12 having the locking portion 8 integrally, the movable portion 12 can be displaced in the direction in which the cassette 2 enters and exits.
An arc-shaped guide portion 1 for guiding the intake port 7 so as to always face the center of the cassette 2 loaded at the regular loading position Sr.
6, a spring 17 for urging the movable section 12 in the direction of taking out the cassette 2, and an elevating mechanism 1 for elevating the elevating section 15.
8 can be provided. In addition, the first locking portion 8 has a restricting piece portion 20 that locks in a recess 19 provided in the cassette 2 to restrict the suction port 7 in the retreating direction, and the lifting mechanism portion 18 includes a lifting portion. 15 is provided integrally with the second locking portion 21, and the second locking portion 21 is attached to the cassette 2.
After being loaded, the heater unit 22 is lowered and locked on the upper surface of the heater support unit 23 which makes contact with the upper surface of the cassette 2.

As a result, the cassette 2 is connected to the test apparatus main body 3
When the cassette 2 is inserted into the cassette support section 4, the automatic suction system connecting section 9 is engaged with the cassette 2 being inserted, and the cassette 2 is inserted.
After the position of the intake port 7 in the intake system in the X direction and the Y direction in the intake system is automatically positioned with respect to the intake port 5 provided at The first locking portion 8 integrated with the intake port 7 is lowered and engaged with the cassette 2, whereby the position of the intake port 7 in the Z direction is automatically positioned with respect to the intake port 5. That is, if the cassette 2 being inserted is locked by the engaging portion 11 provided on the movable portion 12, the movable portion 12 is displaced together with the cassette 2 against the bias of the spring 17. At this time, the movable portion 12 is guided by the arc-shaped guide portion 16, and if the cassette 2 is loaded at the regular loading position Sr, the intake port 7 becomes the intake port 5.
Are positioned on the same straight line Lo, and accurate positioning in the X and Y directions is performed. In this case, even if the angle of the cassette 2 at the loading position Sr is displaced, the position of the intake port 7 is also displaced in accordance with the displacement.
Is always on the same straight line Lo with respect to the intake port 5.
On the other hand, when the cassette 2 is inserted, the elevating unit 15 is at the ascending position by the elevating mechanism 18. That is, the heater support 2
As a result of the rise of 3, the elevating part 15 is raised together with the second locking part 21 locked to the heater support part 23. Therefore, after the cassette 2 is inserted, if the heater supporting portion 23 is lowered and the heater portion 22 comes into contact with the cassette 2, the elevating portion 1
5 also descends, and the first locking portion 8 locks on the upper surface of the cassette 2. Therefore, even if there is an error in the vertical position of the intake port 5 due to a variation in the thickness of each part in the cassette 2, accurate positioning in the Z direction between the intake port 7 and the intake port 5 is performed. Thereafter, if the straight drive unit 14 is drive-controlled, the intake port 7 moves forward and is connected to the intake port 5.

[0010]

Next, preferred embodiments according to the present invention will be described in detail with reference to the drawings.

First, the configuration of an electronic component environmental test apparatus 1 according to this embodiment will be described with reference to FIGS.

FIG. 7 shows an external view of the test apparatus main body 3 in the environmental test apparatus 1. The test apparatus main body 3 is a front panel 3
A test tank 32 having a plurality of entrances and exits 31 provided at 0 is provided. An equipment box 33 is provided on the right side of the test tank 32. A display 35 and a pull-out keyboard (operation unit) 36 are arranged on a front panel 34 of the equipment box 33, and a housing 37 for a computer or the like is provided at a lower part. Is provided. Reference numeral 38a denotes a touch panel display, 38b denotes a two-handed safety lock switch, and 38c denotes an emergency stop switch.

FIG. 8 shows a cassette 2 for holding one semiconductor wafer (electronic component) W. This cassette 2
Is housed in a test tank 32 (test apparatus main body 3) and a target environmental test is performed. The cassette 2 has a square-shaped cassette base 91 at the lowermost portion.
A reinforcing frame 92 is fixed to the peripheral edge of the lower surface of the cassette 1, and a locking frame 93 is fixed to the peripheral edge of the upper surface of the cassette base 91. A positioning pin 46 projecting upward from a connection base 44 described later is provided on the cassette base 91.
Are provided with positioning holes for insertion and positioning with respect to the connection base 44. On the left and right sides of the cassette base 91 and the reinforcing frame 92, slit rails 4ps, 4 on the side of the cassette support 4 described later.
The engagement sides 2p and 2q to be loaded in qs are formed. Further, a plurality of one-side connectors (for example, inlets) 95 are provided at predetermined positions on the lower surface of the cassette base 91 serving as the rear surface of the cassette 2. In addition, one side connector 95 ...
Usually, ten to twenty connectors with sixty terminals are arranged.
A disc-shaped contactor 96 having a sub-heater is mounted on the upper surface of the cassette base 91, and the semiconductor wafer W is held between the contactor 96 and the disc-shaped wafer tray 97 with the semiconductor wafer W interposed therebetween.

In this case, as shown in FIGS. 1 and 11, an intake port mounting portion 98 protruding in the radial direction is provided on the outer peripheral edge of the disc-shaped wafer tray 97. At the tip, a pair of intake ports 5, which have a built-in check valve,
Install 5. The direction of the intake ports 5 and 5 is a radial direction with respect to the center of the cassette 2. In the cassette 2, the suction state of the wafer tray 97 and the contactor 96 is maintained by vacuum suction from the intake ports 5 in advance. Also, on both sides of the intake port mounting portion 98, the regulating piece 2 of the first locking portion 8 in the automatic intake system connecting portion 9 described later.
A pair of recesses 19, 19, which are locked by 0, 20 and regulate the intake port 7 in the forward and backward directions, are provided. The contactor 96 is a glass substrate having a large number of contacts that come into contact with the circuit of the semiconductor wafer W.
5 are connected.

9 to 11 show the internal structure of the test apparatus main body 3. FIG. Reference numerals 41 and 42 denote fixed frames arranged inside the test tank 32 so as to be separated from each other on the left and right. A plurality of horizontal support plates 43 are provided at fixed intervals in the vertical direction between the fixed frames 41 and 42. Then, a connection base 44 is fixedly installed on the upper surface of an arbitrary horizontal support plate 43. The connection base 44 has a built-in circuit board section including a drive circuit for supplying a test signal to the semiconductor wafer W, and has on its upper surface a plurality of other connectors (for example, outlets) connected to one connector 95 of the cassette 2. 45 are arranged. Numerals 46 are positioning pins protruding upward from the connection base 44. The positioning pins 46 are inserted into positioning holes 94 provided on the cassette 2 side (see FIG. 8) to accurately position the connection base 44 and the cassette 2. Having. In addition, the positioning pins 46... Are erected on the horizontal support plate 43.
Projecting upward from the upper end face through the connection base 44.
Therefore, the columns 46s support the connection base 44.
43c are lower limit stoppers, which come into contact with the cassette support 4 when the one-side connector 95 and the other-side connector 45 are completely connected.

On the other hand, on the upper surface of the horizontal support plate 43, four guide shafts 47 are erected.
7 support the cassette support portion 4 and the heater support portion 23 in a vertically movable manner. In this case, a linear bearing 48 is attached to the cassette support 4 at a position corresponding to the guide shaft 47 so that the guide shaft 47 can be inserted through the linear bearing 48 and the heater support 2.
3 are also provided with linear bearings 49 at positions corresponding to the guide shafts 47.
Through the guide shafts 47. Thus, the vertically movable cassette support 4 is disposed above the connection base 44 whose position is fixed, and the vertically movable heater support 23 is disposed above the cassette support 4.

On the upper surface of the horizontal support plate 32, a pair of left and right drive cylinders 50 for raising and lowering the heater support portion 23 is provided.
p, 50q are arranged on the left and right front guide shafts 47
It is fixedly installed on the upper surface of the horizontal support plate 32 located in the middle between the guide shaft 47 on the rear side, and the tip of the drive rod is fixed on the left and right sides of the heater support 23, respectively. On the other hand, as shown in FIGS. 9 to 11, the cassette support portion 4 is formed in a U-shape by a left support plate portion 4p, a right support plate portion 4q, and a rear support plate portion 4r. At the inner edge of the support plate 4q, the engagement side 2 of the cassette 2 described above is provided.
4 ps slit rail section where p and 2q are loaded (inserted)
And 4qs.

When the cassette 2 is inserted into the cassette support portion 4, the cassette support portion 4 engages with the inserted cassette 2, and the suction port 5, which is provided in the cassette 2, engages with the intake system 5. An automatic intake system connecting portion 9 for automatically positioning and connecting the intake ports 7 is provided.

Next, the configuration of the automatic intake system connection section 9 will be described with reference to FIGS. As shown in FIG. 11, the automatic intake system connection section 9 is provided on the upper surface of the right support plate section 4q of the cassette support section 4. Automatic intake system connection 9
Is locked in the cassette 2 inserted into the cassette support portion 4 so that the cassette 2 is in the normal loading position Sr (FIG. 3).
), The movable portion 12 has an engaging portion 11 that positions the intake ports 7 on the same straight line Lo with respect to the intake ports 5. In this case, the movable portion 12 is configured by a rectangular movable base portion 51 integrally formed with the engagement portion 11. As a result, if the engaging portion 11 is locked to the cassette 2 and the cassette 2 is at the proper loading position Sr, even if the cassette 2 is displaced in angle, the operation of the guide portion 16 described later allows the intake port 7 to be operated. .. With respect to the intake ports 5.
It has the function of being positioned above.

Further, via a hinge portion 13 provided on the movable portion 12 (movable base portion 51), a suction port 7 and a rectilinear drive section 14 for moving the suction port 7 forward and backward with respect to the intake port 5 are provided. An elevating part 15 is provided, which is supported so as to be able to ascend and descend and has the first locking part 8 integrally. The elevating section 15 has an elevating base section 52 having one end attached to a movable base section 51 via a hinge section 13.
4 is provided with a drive cylinder 14c. In this case, the drive cylinder 14c is supported by the pair of guide members 53 so as to be capable of moving forward and backward within a constant stroke range Zs in the direction of movement of the intake ports 7. The first locking portion 8 is fixed to the driving cylinder 14c, and the driving rod 14r of the driving cylinder 14c has a pair of intake ports 7, 7 corresponding to the intake ports 5, 5, respectively. Install 54. The first locking portion 8 can be placed on the upper surface of the inserted cassette 2 by descending, and has a restriction piece bent downward at a right angle as shown in FIGS. It has a part 20,20.
The restriction pieces 20, 20 can be engaged with the recesses 19, 19 described above. A pair of springs 55, 55 is provided between the intake block 54 and the elevating base 52.
And urges the intake ports 7 backward in the forward and backward directions.

On the other hand, on the upper surface of the right support plate portion 4q, as shown in FIG. 1, the movable portion 12 (movable base portion 51) is supported so as to be displaceable in the direction in which the cassette 2 enters and exits. An arc-shaped guide portion 16 for guiding the cassette 2 always to the center of the cassette 2 loaded at the regular loading position Sr is provided. The guide portion 16 is formed of a single plate curved in an arc shape, and is supported by a support column 57 erected on the upper surface of the right support plate portion 4q. In this case, four idle rollers 58 provided on the lower surface of the movable base 51 are loaded into the guide 16 and
The movable base 51 is movably supported by the guide 16. That is, since the outer edge and the inner edge of the guide portion 16 become guide rails, the two idling rollers 5 disposed inside are
8 are engaged with the outer edge of the guide portion 16, and the two idling rollers 58 arranged outside are engaged with the inner edge of the guide portion 16.

Further, an elevating mechanism 18 for elevating the elevating unit 15 is provided. The lifting mechanism 18 includes a second locking portion 21 provided integrally with the lifting portion 15, and the second locking portion 21 is
After the cassette 2 is loaded, the cassette 2 is lowered to lock the heater 22 on the upper surface of the heater support 23 which makes contact with the upper surface of the cassette 2. In this case, as shown in FIG.
3, an opening 23o is formed in the second locking portion 2
1 can be locked. Further, the movable base 5
A spring 17 is provided between the first support plate 4 and the right support plate portion 4q to urge the movable base portion 51 in the cassette 2 removal direction. Each intake port 7 is connected to an intake device such as a vacuum pump via a pipe (not shown) constituting an intake system. As described above, the automatic intake system connection unit 9 is configured. When the cassette 2 is inserted to the middle position, the hook is locked to the cassette 2 to automatically retract the cassette 2 to the proper loading position Sr. An automatic loading unit (not shown) that automatically pushes the cassette 2 to an intermediate position is provided.

On the other hand, the cassette 2
The heater unit (main heater) 22 is heated by a heater support unit 23 so as to be displaceable upward. In this case, an opening 61 is formed in the heater support portion 23, the heater portion 22 is accommodated inside the opening portion 61, and locking plates 62 i and 62 j provided to protrude outward from the heater portion 22. Is placed on the stepped recesses 63i and 63j formed on the upper surface of the heater support 23. Guide pins 64 shown in FIG. 4 are raised in the stepped recesses 63i, 63j, and guide holes 65 provided in the locking plates 62i, 62j are slidably engaged with the guide pins 64. In addition, the bottom surface of the heater section 22 matches the upper surface of the wafer tray 97 described above.

Further, between the cassette support section 4 and the heater support section 23, four link sections 69 for connecting the cassette support section 4 and the heater support section 23 are provided. In this case, the link portions 69 are arranged near the front, rear, left and right corners of the heater support portion 23, respectively. One link portion 69 (the same applies to other portions) is formed in a round bar shape and has a relatively large diameter main body portion 69b.
And a mounting portion 69c formed with a relatively small diameter from the upper end of the main body portion 69b, and a guide shaft portion 69s formed with a relatively small diameter from the lower end of the main body portion 69b. And the mounting part 6
9c, the main body 69b is fixed to the heater support 23, and the guide shaft 69s is
The stopper 71 is attached to the lower end of the guide shaft portion 69s. As a result, the cassette support 4 can be moved up and down within a certain stroke range S with respect to the heater support 23.

The configuration of one stage on any horizontal support plate 32 has been described above, but the configuration on a plurality of horizontal support plates 32...

Next, a method of using the environmental test apparatus 1 according to the present embodiment and the operation of each unit will be described with reference to FIGS. Note that only the operation of one stage will be described, but the other stages operate similarly.

First, when not in use, the cassette support 4 and the heater support 23 are stopped at the raised position. This state is shown in FIG. On the other hand, during use, the cassette 2 prepared in advance is inserted into the test tank 3 from the entrance 31 of the test apparatus main body 3.
The cassette 2 is inserted into the slit rails 4ps and 4qs of the cassette support 4 with the engaging sides 2p and 2q of the cassette 2 inserted. At this time, if the cassette 2 is inserted to a predetermined position and a touch operation is performed on the touch panel of the touch panel display unit 38a, the cassette 2 is automatically pulled in and loaded into a regular position by an automatic loading unit (not shown).

At this time, the automatic intake system connecting section 9 automatically positions the intake ports 7, 7 in the intake system and the intake ports 5, 5 of the cassette 2 and automatically connects them. That is, as shown in FIG. 1, the cassette 2 is inserted into the cassette support portion 4, and the cassette 2 being inserted is moved to the movable portion 12.
The movable portion 12 is displaced together with the cassette 2 against the bias of the spring 17.
At this time, the movable portion 12 is guided by the arc-shaped guide portion 16, and if the cassette 2 is loaded at the regular loading position Sr,
As shown in FIG. 3, the intake ports 7 are located on the same straight line Lo with respect to the intake ports 5 and accurate positioning in the X direction and the Y direction is performed. In this case, even if the angle of the cassette 2 at the loading position Sr is displaced, the position of the intake ports 7 is also displaced in accordance with the deviation, so that the intake ports 7 are always positioned with respect to the intake ports 5. They are located on the same straight line Lo.

Next, when the start switch is turned on, the driving of the driving cylinders 50p and 50q is controlled, and the connection of the cassette 2 and the setting of the heater section 22 are performed. First, by controlling the driving of the drive cylinders 50p and 50q, the entirety including the heater support portion 23 (heater portion 22) and the cassette support portion 4 (cassette 2) is lowered together. When the one-side connectors 95 provided on the cassette 2 held by the cassette support 4 abut against the other connectors 45 provided on the connection base 44, the lowering of the cassette support 4 stops. At this time, the cassette support 4 is connected to the link 69
Are connected to the heater supporting portion 23 so as to be able to move up and down within a certain stroke range S, so that even if the cassette supporting portion 4 stops lowering, the heater supporting portion 23 further lowers. When the heater section 22 comes into contact with the upper surface of the cassette 2, the lowering of the heater section 22 stops. At this time, since the heater section 22 is supported by the heater supporting section 23 so as to be displaceable upward, even if the lowering of the heater section 22 is stopped, the heater supporting section 23 is further lowered.

When the heater support 23 descends, the heater support 23 moves with respect to the cassette support 4 in the stroke range S.
Is relatively lowered, the main body 69 of the link 69.
The lower ends of b contact the upper surface of the cassette support portion 4. In this state, the heater support section 23 is lowered by a predetermined height from the highest position, and the heater section 22 is raised (separated) by a predetermined height from a position supported by the heater support section 23. Therefore, the length (stroke range S) of the main body 69b and the length of the guide shaft 69s in the link 69 is set so that such a positional relationship is obtained at this time.

Thereafter, when the heater supporting portion 23 is further lowered, the cassette supporting portion 4 is pressed by the lower end of the main body portion 69b of the link portion 69, and the cassette supporting portion 4 is forcibly lowered. As a result, the one-side connectors 95 provided on the cassette 2 and the other-side connectors 45 provided on the connection base 44 are completely connected. On the other hand, connector 95
... and 45 are completely connected to each other, the drive cylinder 5
The drive control of 0p, 50q stops. The drive strokes of the drive cylinders 50p and 50q in the above operation are set in advance.

When the cassette 2 shown in FIG. 1 is inserted, the elevating unit 15 (elevating base unit 52) is at the ascending position by the elevating mechanism 18, as shown in FIG. That is,
As the heater support 23 rises, the heater support 23
The raising / lowering base portion 52 is also raised together with the second locking portion 21 which locks the base. Therefore, after the cassette 2 is inserted (after loading), if the heater supporting portion 23 is lowered and the heater portion 22 comes into contact with the cassette 2, the elevating base portion 52 is also lowered, and as shown in FIG. The first locking portion 8 locks on the upper surface of the cassette 2 (the upper surface of the wafer tray 97). Therefore, even if there is an error in the vertical position of the intake ports 5 due to the variation in the thickness of each part in the cassette 2, accurate positioning in the Z direction between the intake ports 7 and the intake ports 5 is performed. .

Then, by controlling the drive of the drive cylinder 14c in the linear drive unit 14 and projecting the drive rods 14r, first, as shown in FIG.
c is retracted by the stroke range Zs in a state where the intake ports 7 are stopped by the pressing action of the springs 55 (FIG. 1), so that the regulating pieces 20 of the first locking portion 8 fixed to the drive cylinder 14c are also moved. With the retreat by the stroke range Zs, the intake ports 7 are positioned with respect to the cassette 2 in the reciprocating direction. Further, after the drive cylinder 14c has retreated by the stroke range Zs, the position is regulated by the guide members 53. Therefore, the suction ports 7 advance as the drive rods 14r project, and as shown in FIG. Are connected to the air inlets 5. In this case, since the intake ports 7 start the intake at the timing of controlling the driving of the drive cylinder 14c, the intake ports 5 are suction-connected at a position close to the intake ports 7. In this embodiment, since a configuration is adopted in which the intake ports 7 are supported so as to be able to move up and down freely via a hinge portion 13 provided on the movable section 12, as shown in FIG. Although a slight inclination R in the Z direction may occur between the intake ports 7, airtightness is secured because the rubber O-rings 73 provided on the inner peripheral surface of the intake ports 5 are interposed. Is done.

As a result, the cassette 2 is
The semiconductor wafer W is heated to 125 ° C. by the heater section (main heater) 22 and a sub-heater built in the contactor 96. Further, the inside of the test tank 32 is maintained at a relatively low temperature of 45 ° C. by a ventilation fan and a ventilation duct (not shown). On the other hand, a test signal is applied to the semiconductor wafer W from the drive circuit of the connection base 44 via the connectors 45... And 95, and a target environmental test is performed for a preset test time.

When the environmental test is completed, the drive cylinder 50
The drive of p and 50q is controlled, the heater support section 23 rises to release the contact between the heater section 22 and the cassettes 2, and the cassette support section 4 raises the cassette 2
And the connection of the connection base 44 is released. Further, the connection between the intake ports 7 and the intake ports 5 is released by the automatic intake system connection unit 9. Then, the cassette 2 is automatically pushed out to a predetermined position by an automatic loading unit (not shown), so that the operator can take out the cassette 2 from the entrance 31 of the test apparatus main body 3 by hand.

Therefore, according to the electronic component environmental test apparatus 1 according to the present embodiment, the drive circuit (the connection base 44) for applying the test signal to the semiconductor wafer W (electronic component) is arranged inside the test tank 32. Therefore, the wiring for connecting the cassette 2 and the connection base 44 can be shortened, and the wiring length between the individual semiconductor wafers W and the connection base 44 in the cassette 2 can be eliminated. With respect to the ports 5, the intake ports 7 of the intake system are arranged in the X direction,
Since accurate positioning can be performed in the Y direction and the Z direction, stable and reliable connection can always be achieved, and reliability can be further improved.

The embodiment has been described in detail above.
The present invention is not limited to such an embodiment,
The configuration, shape, material, quantity, numerical value, and the like of the details can be arbitrarily changed, added, or deleted without departing from the gist of the present invention.

For example, the configuration of each section in the automatic intake system connection section 9 does not prevent the adoption of another configuration having the same function. Further, although the semiconductor component W is exemplified as the electronic component, any electronic component such as a commercialized semiconductor chip, circuit board, or capacitor may be used. On the other hand, since the heater unit 22 has a function of locally heating the cassette 2, the concept that the heater unit 22 comes into contact with the cassette 2 includes a case where the heater unit 22 comes close to the cassette 2. In addition, intake port 7 ...
Employs a structure in which the movable part 12 is supported so as to be vertically movable via a hinge part 13 provided in the movable part 12, but may be a structure which is supported in a vertically movable manner by a guide shaft or the like and moves in parallel.

[0039]

As described above, the electronic component environmental test apparatus according to the present invention engages with the inserted cassette when the cassette is inserted into the cassette support portion of the test apparatus main body, and receives the cassette provided on the cassette. The position of the air inlet in the X direction and the Y direction in the air intake system is automatically positioned with respect to the air inlet, and after the cassette is inserted into the cassette support, the first locking portion integrated with the air inlet is lowered. To automatically position the Z-direction position of the intake port with respect to the intake port and connect the intake port and the intake port. Effect.

Since a circuit (for example, a drive circuit) for applying a test signal to an electronic component (semiconductor wafer) can be disposed inside the test tank, the wiring for connecting the cassette and the circuit can be shortened, and individual electronic components in the cassette can be reduced. It is possible to enjoy the basic effect that the variation in the wiring length between the component and the circuit can be eliminated.

Since the intake port of the intake system can be accurately positioned in the X direction, the Y direction, and the Z direction with respect to the intake port of the cassette, the connection can always be performed stably and reliably, and the reliability is further improved. be able to.

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of an automatic intake system connection part in an environmental test apparatus according to a preferred embodiment of the present invention;

FIG. 2 is a front configuration diagram of the automatic intake system connection unit,

FIG. 3 is a schematic plan view illustrating the operation of the automatic intake system connection unit;

FIG. 4 is a front configuration diagram of an automatic intake system connection portion in the state of FIG. 3;

FIG. 5 is a schematic plan configuration diagram for explaining the operation of the automatic intake system connection unit;

FIG. 6 is a cross-sectional front view showing a state in which the intake port and the intake port in the automatic intake system connection unit are connected.

FIG. 7 is an external front view of the environmental test apparatus,

FIG. 8 is a partial cross-sectional front view of a cassette in the environmental test apparatus;

FIG. 9 is a partial cross-sectional front view showing the internal structure of the environmental test apparatus (including the cross section taken along line AA in FIG. 11);

FIG. 10 is a partial cross-sectional side view showing a part of the internal structure of the environmental test apparatus;

FIG. 11 is a partial cross-sectional plan view showing the internal structure of the environmental test apparatus;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Environmental test apparatus for electronic components 2 Cassette 3 Test apparatus main body 4 Cassette support part 5 Intake port 7 Intake port 8 First locking part 9 Automatic intake system connection part 11 Engagement part 12 Movable part 13 Hinge part 14 Straight drive part Reference Signs List 15 Elevating part 16 Guide part 17 Spring 18 Elevating mechanism part 19 Concave part 20 Restriction piece part 21 Second locking part 22 Heater part 23 Heater support part W Semiconductor wafer (electronic component) Sr Regular loading position

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yumio Nakamura 246 Koyuki, Oaza, Suzaka, Nagano Orion Machinery Co., Ltd. (72) Inventor Katsukazu Ezawa 4-3-1 Tsunashimahigashi, Kohoku-ku, Yokohama-shi, Kanagawa F-term (reference) 2G003 AA10 AC00 AC03 AD01 AG00 AH05 4M106 AA01 BA14 CA59 CA60 DG02 DH01 DH60 DJ02 DJ23

Claims (5)

[Claims] 1. An electronic component environmental test apparatus comprising: a cassette for holding electronic components; and a test device main body for performing an environmental test of the electronic components held in the cassette, wherein the cassette is mounted on a cassette support portion of the test device main body. When the cassette is inserted, it engages with the inserted cassette, automatically positions the X- and Y-directions of the intake port in the intake system with respect to the intake port provided in the cassette, and the cassette supports the cassette. After being inserted into the portion, the locking portion (first locking portion) integrated with the suction port is lowered to engage with the cassette, and the Z of the suction port with respect to the suctioned port.
An environmental test apparatus for an electronic component, comprising: an automatic intake system connecting portion for automatically positioning a position in a direction and connecting the intake port and the intake port. 2. The automatic intake system connection section locks a cassette inserted into the cassette support section to move the intake port relative to the intake port when the cassette is in a regular loading position. A movable portion having an engaging portion positioned on the same straight line, and a linear driving portion for moving the intake port and the intake port forward and backward with respect to the intake port via a hinge portion provided on the movable portion, to raise and lower the movable portion. A cassette which is freely supported, and which integrally supports the first locking portion, and which supports the movable portion so as to be displaceable in a cassette insertion / removal direction, and wherein the suction port is always loaded at a regular loading position. 2. An arc-shaped guide section for guiding the movable section toward the center of the cassette, a spring for urging the movable section in a cassette removal direction, and an elevating mechanism section for elevating the elevating section. Electronic Environmental test equipment for parts. 3. The device according to claim 1, wherein the first locking portion has a restricting piece that restricts the direction of movement of the air inlet by locking the concave portion provided in the cassette. Environmental testing device for electronic components as described. 4. The lifting mechanism includes a second locking portion provided integrally with the lifting portion, and the second locking portion is lowered after the cassette is loaded so that the heater portion contacts the upper surface of the cassette. 3. The environmental test apparatus for an electronic component according to claim 2, wherein the apparatus is locked on an upper surface of a heater supporting portion to be brought into contact. 5. The environmental test apparatus for an electronic component according to claim 1, wherein said electronic component is a semiconductor wafer.