JP3539670B2 - Environmental testing equipment for electronic components - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an electronic component environmental test apparatus for performing an environmental test of an electronic component such as a semiconductor wafer held in a cassette.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, there has been known an environmental test apparatus for an electronic component that performs a durability test and a pass / fail test by applying a temperature load to a semiconductor wafer (electronic component) held in a cassette. This type of environmental test apparatus includes a drive circuit for applying a test signal to a semiconductor wafer, but this drive circuit is usually disposed outside the test tank to avoid high temperatures and housed inside the test tank. The obtained cassette was connected to the drive circuit via a connector provided inside the test tank.
[0003]
On the other hand, the present applicant has already provided a heater portion for directly contacting the cassette inside the test tank, thereby locally heating only the cassette and avoiding a high temperature inside the test tank for electronic components. An environmental test apparatus (Japanese Patent Application No. 10-314615, etc.) was proposed. According to this apparatus, when a cassette is loaded in the cassette support provided in the test apparatus main body, the cassette support is lowered to connect one connector of the cassette to the other connector of the connection plate located below. Thus, the semiconductor wafer held by the cassette is connected to the drive circuit in the connection plate portion, and furthermore, the heater portion is lowered so that the heater portion comes into contact with the cassette to locally heat the cassette. Therefore, the drive circuit for applying the test signal to the semiconductor wafer can be disposed inside the test chamber where the temperature is relatively low, so that the wiring for connecting the drive circuit with the cassette can be shortened, and the individual semiconductor chips in the cassette can be reduced. Variations in the wiring length between the unit (electronic component) and the drive circuit can be eliminated.
[0004]
[Problems to be solved by the invention]
However, the proposed environmental test apparatus for electronic parts has the following points to be improved.
[0005]
First, since the cassette is manually inserted into the cassette supporting portion, there is a possibility that the cassette cannot be accurately and reliably loaded into the regular loading position. (10 to 20 connectors), which is liable to cause poor connection or damage, resulting in poor reliability.
[0006]
Secondly, since the insertion of the cassette into the cassette support portion needs to be performed by inserting a hand from a relatively narrow entrance / exit in the test apparatus main body, workability and safety are difficult, and easy to fully automate. Can not respond to
[0007]
SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and it is possible to improve reliability by accurately and reliably loading a cassette into a regular loading position and preventing connection failure or damage of a connector. It is another object of the present invention to provide an electronic component environmental test apparatus which facilitates insertion and removal of a cassette, improves workability and safety, and can easily cope with full automation.
[0008]
Means and Embodiments for Solving the Problems
The present invention constitutes an electronic component environmental test apparatus 1 including a cassette 2 for holding electronic components (semiconductor wafers W) and a test apparatus main body 3 for performing an environmental test on the electronic components held in the cassettes 2. At this time, if the cassette 2 is inserted to the middle position Xm of the cassette support portion 4 in the test apparatus main body 3, the hooks 5 are locked to the cassette 2 and automatically pulled to the normal loading position Xs, and the loading is performed. An automatic loading mechanism 7 for automatically pushing the cassette 2 at the position Xs to the halfway position Xm by the engaging portions 6... Is provided.
[0009]
【Example】
Next, preferred embodiments according to the present invention will be described in detail with reference to the drawings.
[0010]
First, a configuration of an electronic component environmental test apparatus 1 according to the present embodiment will be described with reference to FIGS.
[0011]
FIG. 7 shows the appearance of the test apparatus main body 3 in the environmental test apparatus 1. The test apparatus main body 3 includes a test tank 22 having a plurality of entrances 21 provided on a front panel 20. An equipment box 23 is provided on the right side of the test tank 22, and a display 25 and an operation panel 26 are arranged on a front panel 24 of the equipment box 23, and a housing 27 for a computer or the like is provided at a lower part. Numerals 28 indicate setting display sections arranged beside the entrances 21.
[0012]
On the other hand, FIG. 8 shows a cassette 2 that holds one semiconductor wafer (electronic component) W. The cassette 2 is accommodated in a test tank 22 (test apparatus main body 3) and a target environmental test is performed. The cassette 2 has a square-shaped cassette base 91 at the lowermost portion. A reinforcing frame 92 is fixed to the lower peripheral edge of the cassette base 91, and a locking frame 93 is fixed to the upper peripheral edge of the cassette base 91. Stick. The rear portion of the locking frame 93 becomes the locked portion 14 to which the hook portion 5 described later is locked. The cassette base 91 is provided with positioning holes 94 for inserting positioning pins 47 projecting upward from the connector board section 45 to be described later to perform positioning with respect to the connector board section 45. On the left and right, engagement sides 2p and 2q to be loaded on slit rails 4ps and 4qs on the cassette support 4 described later are formed. Further, a plurality of one-side connectors (for example, inlets) 95 are provided at predetermined positions on the lower surface of the cassette base 91 serving as the rear surface of the cassette 2. The one-side connectors 95 are usually provided with ten to twenty connectors of sixty terminals. A disk-shaped contactor 96 having a sub-heater is mounted on the upper surface of the cassette base 91, and the semiconductor wafer W is held between the contactor 96 and the disk-shaped wafer tray 97.
[0013]
In this case, as shown in FIG. 9, an intake port mounting portion 98 protruding in the radial direction is provided on the outer peripheral edge of the disc-shaped wafer tray 97, and a check valve is provided at the tip of the intake port mounting portion 98. Are mounted. The directions of the intake ports 99 are radial with respect to the center 2o of the cassette 2. In the cassette 2, the suction state of the wafer tray 97 and the contactor 96 is maintained in advance by vacuum suction from the intake ports 99. Further, on both sides of the intake port mounting portion 98, a pair of locking notches 100, 100 for locking the hook portions 78 of the automatic positioning mechanism 71 described later are provided. The contactor 96 is a glass substrate having a large number of contacts that come into contact with the circuit of the semiconductor wafer W, and each contact is connected to one connector 95.
[0014]
On the other hand, FIG. 1 to FIG. 6 and FIG. 9 to FIG. Reference numerals 31 and 32 denote fixed frames arranged inside the test tank 22 so as to be separated from each other on the left and right. A plurality of horizontal support plates 33 are provided between the fixed frames 31 and 32 at regular intervals in the vertical direction. Then, a connection plate portion 41 is mounted on the upper surface of any horizontal support plate 33. The connection plate portion 41 includes a circuit board portion 43 having support legs provided on the upper surface of the horizontal support plate 33 via 42... And a connector board portion 45 provided on the circuit board portion 43 via a reinforcing frame 44. Having. In this case, the circuit board unit 43 includes a drive circuit for supplying a test signal to the semiconductor wafer W, and the upper surface of the connector board unit 45 includes a plurality of other connectors connected to one connector 95 of the cassette 2. (For example, outlets) 46... 47 are positioning pins projecting upward from the connector board 45, and are inserted into positioning holes 94 (see FIG. 8) provided on the cassette 2 side to accurately position the connector board 45 and the cassette 2. It has a function to do.
[0015]
On the other hand, four guide shafts 34 are erected on the upper surface of the horizontal support plate 33, and the cassette support 4 and the heater 61 are supported by the guide shafts 34 so as to be able to move up and down. In this case, a linear bearing 35 is attached to the cassette supporting portion 4 at a position corresponding to the guide shaft 34. The guide shaft 34 is inserted through the linear bearing 35. The linear bearings 36 are attached at the corresponding positions, and the guide shafts 34 are inserted through the linear bearings 36. As a result, the vertically movable cassette support 4 is disposed above the connection plate 41 whose position is fixed, and the vertically movable heater 61 is disposed above the cassette support 4. On the upper surface of the horizontal support plate 33, a pair of left and right drive cylinders 37 for raising and lowering the cassette support unit 4 and a pair of left and right drive cylinders 38 for raising and lowering the heater unit 61 are mounted.
[0016]
As shown in FIG. 2, the cassette support portion 4 is formed in a U-shape by a left support plate portion 4p, a right support plate portion 4q, and a rear support plate portion 4r, and the cassette support portion 4 includes a left support plate portion 4p and a right support plate portion 4q. At the inner edge, there are provided slit rail portions 4ps and 4qs into which the engaging sides 2p and 2q of the cassette 2 are loaded (inserted).
[0017]
When the cassette 2 is inserted into the cassette support portion 4 to the halfway position Xm, the hook portions 5 are locked to the cassette 2 and automatically retracted to the normal loading position Xs, and the loading position Xs An automatic loading mechanism 7 for automatically pushing out the cassette 2 to the halfway position Xm by the engaging portions 6.
[0018]
Next, the configuration of the automatic loading mechanism 7 will be specifically described. First, as shown in FIGS. 2 and 4, a pair of left and right hook restricting portions 11, 11 are fixedly provided near the inner edges of the upper surfaces of the left supporting plate portion 4p and the right supporting plate portion 4q of the cassette supporting portion 4. . The hook restricting portions 11 are arranged near the middle position Xm of the cassette 2 inserted into the cassette supporting portion 4. Each hook restricting portion 11 includes an L-shaped base portion 51 standing upright and a restricting piece portion 52 horizontally protruding inward in the left-right direction from the tip of the base portion 51.
[0019]
On the other hand, reference numeral 12 denotes a hook mechanism, which has a hook support plate 53 which is long on the left and right. The hook support plate 53 includes a guide rail 54p (see FIG. 5) provided on the upper surface of the left support plate 4p on both left and right sides and a guide rail 54q (see FIG. 6) provided on the upper surface of the right support plate 4q. It is supported so as to be able to move back and forth in parallel. On the lower surface of the hook support plate 53, a shaft 56 rotatably supported by three brackets 55 is provided, and a pair of left and right hook portions 5, 5 is attached to the shaft 56. In this case, the brackets 55 can contact the rear portion of the cassette 2 and also serve as the engaging portions 6 for pushing the cassette 2 loaded at the loading position Xs toward the halfway position Xm. As shown in FIG. 4, the hook portions 5 are composed of a cam portion 5c located behind the shaft 56 and a hook body portion 5m located in front, and in a natural state, the weight of the hook body portion 5m and the hook support plate. By the locking of the cam portions 5c to 53, the cam portions 5c are displaced to a locking position Xc shown in FIG. In this locking position Xc, the tip of the hook body 5m can be locked to the locked portion 14 (the rear portion of the locking frame 93) of the cassette 2. 3, the hook mechanism 12 is moved from the loading position Xs to the halfway position Xm to move the cassette 2 to the halfway position Xm. When moved, the cams 5c of the hooks 5 come into contact with the regulating pieces 52, the cams 5c are pushed downward, and the tips of the hook main bodies 5m are displaced upward, that is, the hooks 5a. .. Are displaced to an unlocking position Xr for unlocking the cassette 2.
[0020]
Further, as shown in FIG. 5, a drive cylinder 13c constituting the straight drive unit 13 is installed on the upper surface of the left support plate 4p. As shown in FIG. 2, the tip of the drive rod 13r in the drive cylinder 13c is It is connected to the hook support plate 53 via the rotating part. Accordingly, if the drive of the drive cylinder 13c is controlled, the hook mechanism 12 moves back and forth, and the cassette 2 inserted into the cassette support 4 can be moved to the loading position Xs or the intermediate position Xm.
[0021]
Further, when the cassette 2 is inserted into the cassette supporting portion 4, the cassette engaging portion 4 engages with the inserted cassette 2 and is connected to the suction device 72 with respect to the intake ports 99 provided in the cassette 2. An automatic positioning mechanism 71 for automatically positioning and connecting the intake ports 73 is provided.
[0022]
Next, the configuration of the automatic positioning mechanism 71 will be described with reference to FIGS. The automatic positioning mechanism 71 is disposed on the upper surface of the right support plate 4q in the cassette support 4, as shown in FIG. As shown in FIG. 9, the automatic positioning mechanism 71 includes a movable section 75 having a linear drive section 74 for moving the intake ports 73 forward and backward with respect to the intake ports 99. That is, the movable portion 75 has a rectangular base portion 76, and a drive cylinder 74 c that constitutes the linear drive portion 74 is provided on the base portion 76. In this case, the drive cylinder 74c is supported by the pair of guide members 77, 77 so as to be able to move forward and backward within a certain stroke range Zs in the direction of movement of the intake ports 73. The hook portion 78 is fixed to the drive cylinder 74c, and the pair of drive rods 74r, 74r of the drive cylinder 74c have a pair of intake ports 73, 73 corresponding to the intake ports 99, 99, respectively. Block 79 is installed. The hook portion 78 protrudes forward from the base portion 76 in an L-shape, and is locked in the locking notch 100 provided in the cassette 2 when the cassette 2 is inserted into the cassette support portion 4. In this case, if the hook portion 78 is locked to the cassette 2 and the cassette 2 is at the regular loading position Xs, even if the cassette 2 is displaced in angle, the operation of the guide portion 82 described later causes the intake ports 73. Are positioned on the same straight line Lo with respect to the intake ports 99. Further, a pair of springs 80, 80 are provided between the intake port block 79 and the base portion 76 to urge the intake ports 73. The parts 81, 81 regulate the position in the backward and forward directions. In the embodiment, the tip portions of the guide members 77 also serve as the position regulating portions 81. As a result, if the drive rods 74r are retracted, the intake block 79 is locked to the position restricting portions 81, and the drive cylinder 74c is located at the front end of the stroke range Zs.
[0023]
On the other hand, as shown in FIG. 9, the movable portion 75 is supported on the upper surface of the right support plate portion 4q so as to be displaceable in the direction of insertion and exit of the cassette 2, and the intake ports 73 are always loaded at the regular loading position Xs. An arcuate guide portion 82 for guiding the cassette 2 toward the center 2o of the cassette 2 is provided. The guide portion 82 is formed of a single plate material curved in an arc shape, and both ends are supported by a pair of columns 83, 83 raised on the upper surface of the right support plate portion 4q. The four idle rollers 84 provided on the upper surface of the base portion 76 are loaded in the guide portion 82, and the movable portion 75 is movably supported by the guide portion 82. That is, since the outer edge and the inner edge of the guide portion 82 become guide rails, the two idling rollers 84 arranged on the inner side are engaged with the outer edge of the guide portion 82, and the two idling rollers 84 arranged on the outer side. Is engaged with the inner edge of the guide portion 82.
[0024]
A spring 85 is provided between the movable portion 75 and the right support plate portion 4q to urge the movable portion 75 in the cassette 2 removal direction. Further, each of the intake ports 73 is connected via a pipe 86 to an intake device 72 such as a vacuum pump. Thus, the automatic positioning mechanism 71 is configured.
[0025]
On the other hand, an arbitrary heater section (main heater) 61 includes a heater support plate section 62 to which the linear bearings 36 are attached, a temperature adjustment plate 63 supported by the heater support plate section 62 and positioned on the upper side, and a lower side. The adapter 64 is located at The adapter 64 is formed in a disk shape and is attached to the lower surface of the temperature control plate 63 so that the heating surface matches the heat receiving surface of the contactor 96 described above.
[0026]
The configuration on any horizontal support plate 33 has been described above, but the configuration on the other horizontal support plates 33 is the same.
[0027]
Next, a method of using the environmental test apparatus 1 according to the present embodiment and the operation of each unit will be described with reference to FIGS.
[0028]
First, when not in use, the cassette support portions 4 and the heater portions 61 are stopped at the raised position.
[0029]
On the other hand, in use, the cassettes 2 prepared in advance are accommodated in the test tank 22 through the entrances 21 of the test apparatus main body 3 and the engagement sides 2p, 2q of the cassettes 2 are slit rails of the cassette support 4. Inserted in sections 4ps and 4qs. In this case, as shown in FIG. 3, since the hook mechanism 12 is at the position where the cassette 2 tested last time has been moved to the intermediate position Xm, the hooks 5 are displaced to the unlocking position Xr. . Therefore, if the cassette 2 is inserted to the halfway position Xm shown by the virtual line 2s in FIG. 3, the cassette 2 is detected by the detection switch SW shown by the virtual line. As a result, the drive of the drive cylinder 13c is controlled, and the hook mechanism 12 is moved from the halfway position Xm to the loading position Xs.
[0030]
At this time, since the hook portions 5 are separated from the hook regulating portions 11, the tips of the hook main portions 5 m are displaced downward, that is, displaced to the locking position Xc, and the tips of the hook main portions 5 m are set in the cassette 2. Is locked to the locked portion 14. Therefore, as shown in FIG. 4, the cassette 2 at the intermediate position Xm is retracted by the hook mechanism 12, automatically loaded into the regular loading position Xs, and loaded reliably and accurately. The cassette 2 at the loading position Xs is detected by a detection switch (not shown), and the driving of the driving cylinder 13c is stopped.
[0031]
Before the cassette 2 reaches the regular loading position Xs, the hook portion 78 of the automatic positioning mechanism 71 is locked in the locking notch 100 provided in the cassette 2, and the movable portion 75 is provided with a spring 85. It is displaced together with the cassette 2 against the force. At this time, the movable portion 75 is guided by the arc-shaped guide portion 82, and if the cassette 2 is loaded at the regular loading position Xs, as shown in FIG. Are positioned on the same straight line Lo and are accurately positioned. In this case, even if the angle of the cassette 2 at the loading position Xs is deviated, the position of the intake ports 73 is also displaced in accordance with the deviation, so that the intake ports 73 always move with respect to the intake ports 99. They are located on the same straight line and are accurately positioned.
[0032]
When the drive cylinder 74c is driven and the drive rods 74r are projected, first, as shown in FIG. 10, the drive cylinder 74c is brought into a state where the suction ports 73 are stopped by the pressing action of the springs 80. , The hook 78 fixed to the drive cylinder 74c also moves backward by the stroke range Zs and moves to the position indicated by the imaginary line 78s, so that the positioning of the cassette 2 in the forward and backward directions of the hook 78 can be performed. Done. After the drive cylinder 74c is retracted by the stroke range Zs, the position of the drive cylinder 74c is regulated by the movable portion 75. Therefore, as the drive rod 74r projects, the intake ports 73 move forward, and as shown in FIG. 99... In this case, the intake ports 73 start suction at the timing of controlling the driving of the drive cylinder 74c, so that the intake ports 99 are suction-connected at a position close to the intake ports 73.
[0033]
Next, when the start switch is turned on, the drive of the drive cylinder 37 is controlled, and as shown in FIG. 12, the cassette support 4 descends from the position 4s indicated by the virtual line to the position indicated by the solid line. As a result, the cassette 2 supported by the cassette support portion 4 comes into contact with the connection plate portion 41, and the positioning pins 47 of the connector substrate portion 45 are inserted into the positioning holes 94 provided on the cassette 2 side, and The connector board part 45 is accurately positioned, and the one connector 95 of the cassette 2 is connected to the other connector 46 of the connector board part 45.
[0034]
Further, the drive of the drive cylinder 38 is controlled, and as shown in FIG. 13, the heater 61 descends from the position of 61s indicated by the imaginary line to the position indicated by the solid line. As a result, the heater 61 comes into contact with the upper surface of the cassette 2 supported by the cassette support 4. In this case, since the heater 61 is allowed to be displaced upward with respect to the drive cylinder 38, the heater 61 contacts the cassettes 2 only by its own weight.
[0035]
By the above operation, each cassette 2 is set in the test apparatus main body 3, and the semiconductor wafer W is heated to 125 ° C. by the heater unit (main heater) 61 and the sub-heater built in the contactor 96. Further, the inside of the test tank 22 is maintained at a relatively low temperature of 45 ° C. by a ventilation fan and a ventilation duct (not shown). On the other hand, a test signal is applied from the drive circuit of the circuit board unit 43 to the semiconductor wafer W via the connectors 46... And 95, and a target environmental test is performed for a preset test time.
[0036]
When the environmental test is completed, the drive of the drive cylinder 38 is controlled, and the heater 61 is lifted to release the contact between the heater 61 and the cassette 2..., And the drive of the drive cylinder 37 is controlled. The connection between the cassette 2 and the connection plate portion 41 is released by raising the position of the cassette 4. Further, the drive of the drive cylinder 74c is controlled and the drive rods 74r are retracted, whereby the connection between the intake ports 73 and the intake ports 99 is released.
[0037]
Then, the drive of the drive cylinder 13c is controlled, and the hook mechanism 12 is moved to the halfway position Xm side. At this time, since the engaging portions 6 integrally provided in the hook mechanism portion 12 abut on the rear portion of the cassette 2, the cassette 2 at the loading position Xs is pushed out by the engaging portions 6. When the cassette 2 is moved to the halfway position Xm, the hooks 5 contact the hook regulating parts 11 and the hooks 5 are displaced to the unlocking position Xr. That is, the cassette 2 is automatically unloaded and can be taken out from the halfway position Xm.
[0038]
As described above, according to the environmental test apparatus 1 according to the present embodiment, if the cassette 2 is inserted to the middle position Xm of the cassette support section 4 in the test apparatus main body 3 by providing the automatic loading mechanism section 7, Since the hook portion 5 is locked to the cassette 2 and automatically retracted to the normal loading position Xs, and the cassette 2 at the loading position Xs is automatically pushed out to the intermediate position Xm by the engaging portion 6, the cassette 2 is It can be accurately and reliably inserted into the proper loading position Xs of the support portion 4. As a result, the connectors 95 of the cassette 2 and the connectors 46 of the connection plate portion 41 can be reliably connected, the damage can be avoided, and the reliability can be further improved. Further, the insertion or removal of the cassettes 2 becomes easy, workability and safety can be further improved, and full automation can be easily realized.
[0039]
Further, by providing the automatic positioning mechanism 71, when the cassette 2 is inserted into the cassette support portion 4 of the test apparatus main body 3, the cassette 2 engages with the inserted cassette 2 and the intake port provided in the cassette 2. The suction ports 73 connected to the suction device 72 are automatically connected to the suction ports 73 with respect to the suction ports 99. , And the reliability can be further improved.
[0040]
Although the embodiment has been described in detail above, the present invention is not limited to such an embodiment, and the detailed configuration, shape, material, quantity, numerical value, etc., do not depart from the gist of the present invention. Can be changed, added or deleted arbitrarily.
[0041]
For example, in the automatic loading mechanism 7, the straight drive unit 13 is exemplified by the drive cylinder 13c provided on one side, but may be provided on both left and right sides. Although the drive cylinder 13c is driven by the detection switch SW, the drive cylinder 13c may be driven by a manual operation switch. Furthermore, the configuration of each unit in the automatic loading mechanism unit 7 does not prevent adoption of another configuration that exhibits the same function. Although the electronic component is exemplified by the semiconductor wafer W, it may be a commercialized semiconductor chip, a circuit board, or any circuit element such as a capacitor. On the other hand, since the heater 61 has a function of locally heating the cassette 2, the concept that the heater 61 comes into contact with the cassette 2 includes a case where the heater 2 comes close to the cassette 2. The operation of raising and lowering the cassette support portion 4 and the heater portion 61 with respect to the connection plate portion 41 is relative. For example, the cassette support portion 4 is fixed, and the connection plate portion 41 is raised to perform connection. This concept includes cases.
[0042]
【The invention's effect】
As described above, the electronic component environmental test device according to the present invention automatically locks the hook portion on the cassette and automatically reaches the proper loading position when the cassette is inserted to the middle position of the cassette support portion in the test device main body. The following remarkable effects can be obtained because the automatic loading mechanism is provided for automatically retracting the cassette at the loading position to the intermediate position by the engagement portion while pulling in the cassette.
[0043]
(1) Since a drive circuit for applying a test signal to an electronic component (semiconductor wafer) can be disposed inside the test tank, the wiring connecting the cassette and the drive circuit can be shortened, and each electronic component and the drive circuit in the cassette can be shortened. In addition to enjoying the basic effect of eliminating variations in the wiring length between them, the reliability is further improved by accurately and securely loading the cassette in the correct loading position to prevent poor connection and damage to the connector. Can be enhanced.
[0044]
(2) In addition, the cassette can be easily inserted and removed, the workability and safety can be further improved, and it is possible to easily cope with full automation.
[Brief description of the drawings]
FIG. 1 is a partially sectional side view showing a part of an internal structure of an environmental test apparatus according to a preferred embodiment of the present invention;
FIG. 2 is a partially sectional plan view showing the internal structure of the environmental test apparatus;
FIG. 3 is a partial cross-sectional side view showing a state where a cassette is being loaded in an automatic loading mechanism in the environmental test apparatus;
FIG. 4 is a partial cross-sectional side view showing a state after a cassette is loaded in an automatic loading mechanism in the environmental test apparatus;
FIG. 5 is a front view showing a part of the internal structure of the environmental test apparatus,
FIG. 6 is a side view showing a part of the internal structure of the environmental test apparatus;
FIG. 7 is an external front view of the environmental test apparatus,
FIG. 8 is a partial cross-sectional front view of a cassette in the environmental test apparatus,
FIG. 9 is a plan view of an automatic positioning mechanism in the environmental test apparatus;
FIG. 10 is an explanatory diagram of an operation of an automatic positioning mechanism in the environmental test apparatus;
FIG. 11 is an operation explanatory view of an automatic positioning mechanism in the environmental test apparatus;
FIG. 12 is an operation explanatory diagram of the environmental test apparatus,
FIG. 13 is a diagram illustrating the operation of the environmental test apparatus,
[Explanation of symbols]
1 Environmental test equipment for electronic components
2. Cassette
3 Test equipment
4 cassette support
5 Hook section
6 Engagement part
7 Automatic loading mechanism
W Semiconductor wafer W (electronic parts)
Xm Midway position
Xs loading position

Claims (2)

In an electronic component environmental test device including a cassette for holding electronic components and a test device main body for performing an environmental test on the electronic components held in the cassette, the cassette is inserted to an intermediate position of a cassette support portion in the test device main body. If the hook portion is locked to the cassette, the cassette is automatically retracted to a regular loading position, and the cassette at the loading position is automatically pushed out to the halfway position by the engaging portion. Environmental testing equipment for electronic components. The environmental test apparatus for an electronic component according to claim 1, wherein the electronic component is a semiconductor wafer.

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