JP2001155306A - Method for machining magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a magnetic head in which a high precision track width regulating groove is efficiently cut and in which high reliability and improved input/output characteristics are realized. SOLUTION: This method is applied to a magnetic head 1 where metallic magnetic films 5, 6 are formed on the gap-constituting faces of core halves 2, 3 and track width regulating grooves 9, 10 constituting, a projected magnetic tape working face 11 corresponding to a recording track width are prepared by cutting/machining on a magnetic tape sliding face 8 by means of a grinding stone 50. In the cutting/machining of the track width regulating grooves 9, 10, the grinding stone 50 is used for which a shaping process is performed on the side face 52 after another shaping process is performed on the outer circumferential face by supplying an abrasive grain liquid 55 in which powder abrasive grain is dissolved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head processing method, and more particularly, to a metal head used for recording and reproducing information signals and the like on a high coercive magnetic recording medium.
The present invention relates to a magnetic head processing method suitable for an in-gap type magnetic head and the like.

[0002]

2. Description of the Related Art In a magnetic recording / reproducing apparatus, high-density recording and short-wavelength recording of information signals and the like have been achieved. A high-precision magnetic head is used to record and reproduce information signals and the like on a magnetic tape with a narrow track specification. Such a magnetic recording / reproducing apparatus includes, for example, a so-called metal tape in which a ferromagnetic powder is used as a magnetic powder in a magnetic layer formed on a nonmagnetic support, or a ferromagnetic metal material formed on a nonmagnetic support by a vapor deposition method or the like. A so-called evaporation tape or the like directly formed on the substrate is used. Further, the magnetic recording / reproducing apparatus has a so-called metal-in-metal structure in which a main core is formed of, for example, a magnetic oxide material, and a metal magnetic thin film made of a soft magnetic metal magnetic material is formed on a constituent surface of a magnetic gap.
A gap type magnetic head (hereinafter, abbreviated as MIG head) 100 is used.

That is, the MIG head 100 is configured as shown in FIG.
As shown in (1), a pair of core halves 101 and 102 are integrally joined by a glass 103, and a magnetic gap 104 is formed by a magnetic gap forming surface butted against each other. The MIG head 100 has a configuration in which the magnetic gap 104 is substantially equal to the recording track width t of the recording medium by performing a grinding step of the track width regulating grooves 105 and 106 on the sliding surface of the magnetic tape. Also, MI
The G head 100 includes the pair of magnetic core halves 10.
The metal magnetic thin film 10
7 and 108 are each formed as a film.

[0004]

Incidentally, in the MIG head 100, the track width regulating grooves 105, 106 are provided.
In this case, there is a limit in the processing accuracy, and as shown in FIG. 19, both side surfaces 105a and 106a form inclined surfaces facing each other with the magnetic gap 104 therebetween. Therefore, in the MIG head 100, these side surfaces 10
Leakage magnetic fluxes are generated in the magnetic recording media 5a and 106a, so that recording and reproduction of information signals and the like are performed on the magnetic recording medium beyond a specified recording track width t, thereby deteriorating accuracy.

Therefore, in the MIG head 100, in order to make the magnetic gap 104 a predetermined width corresponding to the width of the recording track, the core halves 101, 10
In the state in which the magnetic tape 2 is integrated, a grinding process for forming the track width regulating grooves 105 and 106 is performed on the sliding surface of the magnetic tape by using a blade grindstone so that the contact surface of the magnetic tape becomes convex. In the grinding of such track width regulating grooves, it is required to form the track width regulating grooves constituting the contact surface of the magnetic tape of a minute width with high precision, and many tracks are maintained while maintaining the machining precision. A width regulating groove must be formed. In the conventional grinding method, the track width regulating grooves 105 and 106 are ground using a processing grindstone whose grinding surface is finished by, for example, an electrodeposition dresser of SD400.

However, in the conventional grinding method, it is difficult to finish the side surface of the processing whetstone as a ground surface having a sufficient surface accuracy by the finishing using the electrodeposition dresser, so that the track forming the surface to contact the magnetic tape is difficult. There is a problem that the shape change of the width regulating grooves 105 and 106 becomes large. For this reason, in the conventional magnetic head processing method, since the track width regulating groove cannot be formed with high precision due to the conditions of the grinding step, the width of the contact surface of the magnetic tape and the recording track width t vary, and the MIG head There was a problem that the yield of 100 was poor.

Therefore, the present invention solves the above-mentioned conventional problems and efficiently manufactures a highly accurate track width regulating groove to manufacture a magnetic head having high reliability and improved input / output characteristics. It has been proposed for the purpose of providing a magnetic head processing method that has become possible.

[0008]

According to the present invention, there is provided a magnetic head processing method according to the present invention, wherein a metal magnetic film is formed and formed on a gap forming surface of at least one of the core halves by a processing grindstone. The present invention is applied to a magnetic head in which a track width regulating groove which forms a convex magnetic tape contact surface corresponding to the width of a recording track is ground on a magnetic tape sliding surface. The processing method of the magnetic head uses a processing grindstone in which the grinding process of the track width regulating groove is performed after the finishing process of the outer peripheral surface is performed, and then the abrasive solution in which the powder abrasive is dissolved is supplied and the side surface is shaped. Grinding process.

According to the magnetic head processing method of the present invention configured as described above, the side surface of the processing grindstone for grinding the track width regulating groove constituting the surface of the magnetic tape can be finished with high precision. High precision track width regulating grooves with little variation are continuously formed. Therefore, according to the magnetic head processing method, the magnetic gap corresponding to the width dimension of the recording track is formed through the convex magnetic tape contact surface, so that a recording medium having a narrow recording pitch and a narrow track specification can be obtained. On the other hand, a magnetic head having high reliability for recording and reproducing information signals and the like with high accuracy and improved input / output characteristics is efficiently manufactured.

[0010]

Embodiments of the present invention will be described below in detail with reference to the drawings. The magnetic head processing method according to the embodiment is provided in a magnetic recording / reproducing apparatus using a metal tape with a narrow recording pitch and a narrow track specification, and records and reproduces information signals and the like shown in FIG.
The method is applied to the processing method of the head 1. Of course, the present invention is not limited to the MIG head 1 and is suitably applied to other high-density recording-compatible magnetic heads, particularly to a relatively large magnetic head such as a bulk type magnetic head.

The MIG head 1 has a basic configuration similar to that of a conventional MIG head, and a pair of core halves 2, 3 manufactured through a predetermined process using a single crystal ferrite or a polycrystal ferrite as a material are joined together. The intermediate body 20 integrated with the non-magnetic material 4 such as a molten glass is subjected to an appropriate processing including a grinding step which will be described in detail later. The processing steps of the MIG head 1 are basically the same as the conventional processing steps, and do not require significant changes in the steps and equipment.

In the MIG head 1, the core halves 2 and 3 are made of a soft magnetic oxide, for example, Mn-Zn ferrite or Ni-Zn.
It is formed in a predetermined shape by a single crystal ferrite such as a system ferrite or a polycrystal ferrite. In the MIG head 1, soft magnetic metal film layers 5 and 6 are formed on butted end faces of the core halves 2 and 3. MIG head 1
As described above, by joining the core halves 2 and 3 integrally with the nonmagnetic material 4 as described above, the magnetic gap 7 is formed at the butted ends by the soft magnetic metal film layers 5 and 6 via the nonmagnetic material 4. Is composed.

The soft magnetic metal film layers 5 and 6 are made of, for example, Fe--Al--Si or Fe--Ni--Al--S
Au, Co, Ti, Cr, Nb, Mo, Ta, i, Fe-Ga-Si, Fe-Al-Ge
A crystalline material to which one or more kinds of Ru, Pd, N, C, O and the like are added is used. Further, the soft magnetic metal film layers 5 and 6 include:
Its material is mainly Zr, Ta, Ti, H
f, Mo, Nb, and other amorphous materials, or Co, Fe, mainly Zr, Ta, Ti, Hf,
Mo, Nb, Si, Al, B, etc., at least one type and N, C,
A microcrystalline material to which one or more kinds of O and the like are added is used.
The soft magnetic metal film layers 5 and 6 are formed on the opposite end faces of the core halves 2 and 3 by using these materials as a thin film forming method such as a vapor deposition method or a sputtering method. In addition,
Of course, the soft magnetic metal film layers 5 and 6 may be formed on one of the magnetic gap forming surfaces of the core halves 2 and 3.

The MIG head 1 has a pair of track width regulating grooves 9 and 10 which are parallel to each other over the entire area in the longitudinal direction along both side edges of the magnetic tape sliding surface 8 where the magnetic gap 7 is formed. Formed by the following grinding process. MIG
In the head 1, a convex magnetic tape contact surface 11 is formed in the central region of the magnetic tape sliding surface 8 left uncut by the track width regulating grooves 9, 10 over the entire region in the length direction. The MIG head 1 has track width regulating grooves 9, 10.
Are formed substantially equal to the recording track width t, so that the width of the magnetic tape contact surface 11 is equal to the recording track width t. In the MIG head 1, the track width regulating grooves 9, 10 are filled with reinforcing glasses 12a, 12b in order to reinforce the surface 11 for contacting the magnetic tape.

The MIG head 1 has concave portions 13a, 13b formed in opposing abutting surfaces of the core halves 2, 3, respectively.
By the joint, the magnetic gap 7
Is defined. The MIG head 1 has winding guide grooves 14 on the side surfaces of the core halves 2 and 3 facing the depth regulating grooves 13 respectively.
a and 14b are formed. In the MIG head 1, coils (not shown) are wound around the core halves 2 and 3, respectively, using the recess 13a and the winding guide groove 14a and the recess 13b and the winding guide groove 14b as guides.

In the MIG head 1, the core halves 2, 3 and the soft magnetic metal film layers 5, 6 cooperate to form a closed magnetic circuit.
In the MIG head 1, the core halves 2 and 3 constitute an auxiliary core portion, and the soft magnetic metal film layers 5 and 6 constitute a main core portion. The MIG head 1 uses a magnetic tape sliding surface 8 by a magnetic flux leaking from a magnetic gap 7 based on an information signal or the like.
The information signal and the like are recorded on the metal tape which rubs and travels, and the information signal and the like are reproduced by a magnetic flux change based on the information signal and the like recorded on the metal tape.

In the MIG head 1, as shown in FIG.
0 is the bottom surface 9a, 10a and the side surface 9b, 10
Since b is formed with high dimensional accuracy, its width is formed substantially equal to the width t of the fine recording track of the metal tape. For this reason, the MIG head 1 has a processing grindstone 50 whose grinding surface has been finished with high precision with respect to the intermediate body 20 in which the base materials 21 constituting the core halves 2 and 3 are integrated as described in detail later. Are used to form the track width regulating grooves 9 and 10 by grinding.

That is, the MIG head 1 is formed by sequentially performing predetermined processes using the base material 21 for forming the core halves 2 and 3 shown in FIG. The base material 21 is made of an oxide soft magnetic material such as a Mn-Zn ferrite material or a Ni-Zn ferrite material as described above, and has a length of about 34.5 mm, a width of about 2.5 mm, It has an outer dimension of about 1 mm in thickness. As shown in FIG. 4, the base material 21 extends over the entire area of the main surface 21 a in the length direction.
The gap from one end face 21b is made substantially equal to the depth g of the magnetic gap 7, and a substantially trapezoidal concave groove 22 constituting the depth regulating groove 13 is processed.

Further, a plurality of glass filling grooves 23 are formed on the substrate 21 at right angles to the concave grooves 22. Glass filling groove 2
Numerals 3 are respectively formed corresponding to regions where the MIG heads 1 are cut out from the base material 21, and are melted to form a bonding material when the pair of base materials 21 are bonded to form the intermediate body 20 as described later. A non-magnetic glass rod is filled. The glass filling groove 23 may not be particularly formed. On the other main surface of the base material 21, a concave groove 24 corresponding to the concave groove 22 and constituting the winding guide groove 14 is formed.

The base material 21 is polished so that the center line surface roughness of the main surface 21a is 0.2 μm to 1.0 μm. As shown in FIG. 5, a soft magnetic metal film layer 25 of the above-described soft magnetic metal material is formed on the entire surface of the main surface 21a of the base 21 where the concave groove 22 is formed. On the base material 21, for example, Au for forming the gap film 26 may be formed on the soft magnetic metal film layer 25 as shown in FIG. Au gap film 26
Are bonded by the heat diffusion effect of Au when the base material 21 is bonded, for example, by applying a pressure treatment and a heat treatment. The soft magnetic metal film layer 25 may be formed on the main surface 21a in a step before the step of forming the grooves 22 and 23 on the main surface 21a.

As shown in FIG. 7, the base material 21 is formed by melting the glass rod filled in the glass filling groove 23 after the above-described steps, and using the main surface 21a as a bonding surface as a pair (21A, 21B). Are joined to form an intermediate body 20. The intermediate body 20 has a magnetic gap 7 as shown in FIG.
Is formed on one end face 21a on which the track width regulating grooves 9 and 10 are formed using a processing grindstone 50. The track width regulating grooves 9 and 10 are formed parallel to each other at a predetermined interval, and
Is formed as an inclined groove having a predetermined angle with respect to the width direction in which an azimuth angle is provided. Intermediate 20 includes
A plurality of convex portions 28 are formed by being left uncut by the adjacent track width regulating grooves 9 and 10. These convex portions 2
Reference numeral 8 denotes a surface 11 for contacting the magnetic tape. It is needless to say that each of the track width regulating grooves 9 and 10 may be a linear groove having an azimuth angle of 0 °. In addition, although the bottom surface of each of the track width regulating grooves 9 and 10 has a planar shape, it may have, for example, a V-shape.

The track width regulating grooves 9 and 10 are
The width dimension of the magnetic gap 7 formed on the surface 11 of the magnetic tape, specifically, the width dimension of the magnetic recording tape 7 is formed with high dimensional accuracy so as to substantially coincide with the width dimension t of the fine recording track as described above. You. Therefore, for the grinding of the track width regulating grooves 9 and 10, a processing grindstone 50 having a ground surface subjected to a high-precision finishing process is used as described later in detail, and the side surface is finished to a high-precision vertical surface. The magnetic tape contact surface 11 is formed. The intermediate body 20 is filled with molten glass 29 in each of the track width regulating grooves 9 and 10.
The molten glass 29 is a part constituting the above-mentioned reinforcing glass portion 12 and prevents the occurrence of chipping of the outer peripheral edge of the contact surface 11 of the magnetic tape and keeps the contact width of the magnetic tape.

As shown in FIG. 9, the intermediate body 20 is subjected to cylindrical grinding in which one end surface 20a on which the magnetic tape sliding surface 8 is formed is formed into an arc shape. The intermediate body 20 is subjected to slicing from the center of each of the track width regulating grooves 9 and 10 sandwiching the surface 11 of the magnetic tape, so that a large number of head chips 30 are formed as shown in FIG.
To form a MIG head chip.

The grinding wheel 50 has a grinding stone particle size of 0.5.
μm to 8 μm and a thickness of 20 μm to 500 μm. Specifically, a product name SD2 /
4BZ057 (Φ99-TO.2-X2) was used. The processing grindstone 50 is subjected to a shaving process of the outer peripheral surface 51 and a shaping process of a side surface 52 for grinding the side surface of the track width regulating grooves 9 and 10. That is, the processing whetstone 50
As shown in FIG. 11, the abutment plate 53 is abutted against the side surface 52 while being rotated and the abrasive solution 55 is continuously supplied from the supply pipe 54 to perform the shaping process. Is done. The processing grindstone 50 is driven to rotate at 100 to 300 revolutions per minute by a drive mechanism (not shown), and at a speed of 8 min.
It is slid at a speed of 0 mm.

As the abutment plate 53, a brass plate having a width of 10 mm and a thickness of 1 mm is used, and a driving mechanism (not shown) is provided in a direction parallel to the side surface 52 of the processing grindstone 50 (in the direction of the arrow x in FIG. 11) and the side surface 52. (In the direction of arrow y in FIG. 11)
Is slid. A material plate having chemical resistance to the abrasive solution 55, for example, a glass plate or the like may be used as the butting plate 53, but the Vickers hardness is 300.
A material formed with a high surface accuracy from about 1000 to about 1000 hard materials is used. The butting plate 53 is formed by
And a shaping process of the side surface 52 is performed.

As the abrasive solution 55, a solution in which powder abrasives such as green carbon (GC), white alumina (WA) or diamond are dissolved in a solvent is used.
As the abrasive powder, one having an abrasive particle diameter substantially equal to or about three times (0.5 μm to 24 μm) the abrasive particle diameter of the processing whetstone 50 is used. As the abrasive solution 55, specifically, GC # 3000 made by Asahi Diamond is used, and this abrasive powder is mixed with a solvent mainly composed of pure water at a weight ratio of 0.5 to 5 times, and It is prepared by adding a lubricant containing a surfactant at a ratio of 1/10 to 1/30.
Tap water may be used as the solvent, but since the influence of impurities such as chlorine may affect the dispersion ratio of the abrasive powder, it is preferable to use the pure water described above.

An abutment plate 53 is pressed against the side surface 52 under the above-described rotating operation conditions, and an abrasive solution 55 is constantly supplied between the abutment plate 53 and the working grindstone 50 to perform a shaping process. . The working grindstone 50 is moved by 0.2 μm for each reciprocation in the y direction and cumulatively 30 μm to 40 μm in the y direction while the abutment plate 53 is slid in the x direction under the above-described operating conditions. By performing such a finishing process, the processing grindstone 50 is finished with the side surface 52 having a center line surface roughness of 0.5 μm to 2 μm with a surface accuracy of 0.5 μm to 2 μm.

The working grindstone 50 is used to grind the track width regulating grooves 9 and 10 in the intermediate body 20 as shown in FIG. After grinding the polycrystalline ferrite substrate by 300 mm, the processing grindstone 50 is subjected to break-in grinding in which the single crystal ferrite block is ground by 100 mm. The processing whetstone 50 is 8000 revolutions per minute, and the moving speed of the processing table is 30 mm per minute.
The track width regulating grooves 9 and 1 are formed in the end face 20a of the m-width intermediate body 20.
Grind 0.

As shown in FIG. 13, a laser grindstone 60 is used for a case where the above-described shaping process is performed on the side surface 52 of the processing grindstone 50 and a case where the shaping process is performed using a conventional electrodeposition dresser. Each surface roughness was measured. As the laser displacement meter 60, a laser displacement meter (LS2420 & LS2400) manufactured by KEYENCE CORPORATION is used.
Laser was applied to the side surface 52 of the processing grindstone 50, and the surface roughness was measured by the displacement of the reflected laser. Each measurement result was as shown in FIG. 14 and FIG. In these figures, the vertical axis indicates the amount of shake (μm) of the side surface 52, and the horizontal axis indicates the detection position.

As is apparent from FIG. 14, the processing grindstone 50 is provided with the above-described finishing treatment on the side surface 52 so that the side surface 52 has a center line surface roughness of 2 μm or less and a range of the amount of runout. The irregularities of 1.6 μm are formed with extremely small surface accuracy. On the other hand, as is apparent from FIG. 15, the conventional processing grindstone had a slightly large surface roughness with a range of side runout of 4.2 μm.

The intermediate body 20 is subjected to grinding of the track width regulating grooves 9 and 10 by using the processing grindstone 50 on which the above-described side surface 52 has been shaped. FIG. 16 shows the result of measuring the width dimension of the convex portion 28 serving as the surface 11 of the magnetic tape. Also, the track width regulating grooves 9, 10 are formed in the intermediate body 20 by using a processing grindstone whose side surface has been shaped by a conventional method.
FIG. 17 shows the result of measurement of the width dimension of the convex portion 28 which is cut off by the track width regulating grooves 9 and 10 and becomes the surface 11 for contacting the magnetic tape. The measurement of the width dimension of each convex portion 28 was sequentially performed for 80 convex portions 28 from the processing start side to the processing end side of the grinding of the track width regulating grooves 9 and 10 shown by arrows in FIG. .
In FIGS. 16 and 17, the vertical axis represents each convex portion 28.
The abscissa indicates each convex portion 28.

As shown in FIG. 16, each of the convex portions 28 is formed by grinding the track width regulating grooves 9 and 10 using the processing grindstone 50 having the side surface 52 subjected to the above-described shaping process. Although some variation occurs at the start of processing, the variation range is within 1.7 μm as a whole, and the variation is small and high precision is formed. On the other hand, each convex portion 28
Are formed using conventional processing whetstones.
As shown in FIG. 17, the variation range is 3.5 μm from the processing start side to the processing end side of the grinding process with a large variation.

Therefore, by performing the above-described shaping process on the side surface 52, the processing grindstone 50 efficiently forms the track width regulating grooves 9, 10 with little variation and high accuracy. As a result, the MIG head 1 can be manufactured with a high yield, and the surface 11 for contacting the magnetic tape is formed with extremely small accuracy corresponding to the width t of the fine recording track. Therefore, MIG
The head 1 records and reproduces information signals and the like with high accuracy on a metal tape having a narrow recording pitch and a narrow track specification.

By the way, in the processing whetstone 50, FIG.
As shown in FIG. 8A, the above-described shaping process of the side surface 52 is performed by using the abrasive solution 55 in which powder abrasives having a large particle size, in other words, a powder particle having a small particle size are mixed. The grooves 9 and 10 are formed with higher precision to reduce the amount of change in the recording track width. In this case, since the grinding efficiency of the processing whetstone 50 is deteriorated by the abrasive solution 55, the time required for the finish processing of the side surface 52 becomes longer.

On the other hand, as shown in the figure, the processing grindstone 50 is formed by shaping the side surface 52 using an abrasive solution 55 mixed with powder abrasive grains having a small particle size, so that the track width regulating grooves 9, 10 are formed. As the dimensional accuracy of the recording medium deteriorates, the amount of change in the recording track width also increases. In this case, the processing grindstone 50 has a high grinding efficiency with the abrasive solution 55, so that the time required for the shaping process of the side surface 52 can be reduced.

That is, as shown in FIG. 18 (b), for the processing whetstone 50a which has been subjected to the above-mentioned shaping treatment of the side surface 52 using the abrasive solution 55 mixed with the # 400 powder abrasive, the recording track width is as shown in FIG. Was 3.5 μm, and the processing time was 11 minutes. With this processing grindstone 50a, no significant difference was obtained with respect to the variation amount of the recording track width from the conventional processing whetstone. Further, with respect to the processing grindstone 50b which has been subjected to the above-mentioned shaping processing of the side surface 52 using the abrasive solution 55 mixed with # 2000 powder abrasive, the fluctuation amount of the recording track width is 2.6 μm, and the processing time is 32 μm. Minutes. The processing grindstone 50b forms the track width regulating grooves 9, 10 in which the shaping process of the side surface 52 took a little time, but the amount of fluctuation of the recording track width was suppressed.

With respect to the processing grindstone 50c which has been subjected to the above-described shaping process of the side surface 52 using the abrasive solution 55 mixed with the # 3000 powder abrasive, the fluctuation amount of the recording track width is 1.
7 μm, and the processing time was 45 minutes. Processing whetstone 50
c forms the track width regulating grooves 9 and 10 in which the time required for the shaping process of the side surface 52 is longer, but the fluctuation amount of the recording track width is largely suppressed. For the processing grindstone 50d obtained by performing the shaping process on the side surface 52 using the abrasive solution 55 mixed with the 4000th powder abrasive, the fluctuation amount of the recording track width is 1.4 μm, and the processing time is 59 minutes. there were. The processing grindstone 50d forms the high-precision track width regulating grooves 9 and 10 in which the time required for the shaping process of the side surface 52 is longer, but the fluctuation amount of the recording track width is largely suppressed.

FIG. 18C is a table showing the correspondence between the grain size of the abrasive grains or the grindstone and the grain size with respect to the count.
The powder abrasive of No. 4 has a particle size of 40 μm to 60 μm,
No. 000 powder abrasive grains have a particle size of 3 μm to 8 μm, 300
No. 0 powder abrasive has a particle size of 2 μm to 6 μm, and No. 4000 powder abrasive has a particle size of 2 μm to 4 μm.

Therefore, the MIG head 1 is used for grinding the track width regulating grooves 9 and 10 as described above.
A working grindstone 50 having a specification of No. 0 to No. 5000 and a particle size of 0.5 μm to 8 μm is used. MIG head 1
After shaping the outer peripheral surface 51, supply the abrasive solution 55 mixed with powder abrasives of No. 600 to No. 5000 and having a particle size of 0.5 μm to 24 μm to perform shaping of the side surface 52. Accordingly, the track width regulating grooves 9 and 10 are ground by the processing grindstone 50 in which the side surface 52 has a center line surface roughness of 0.5 μm to 2 μm.

[0040]

As described above in detail, according to the magnetic head processing method of the present invention, a metal magnetic film is formed on at least one of the core halves at the gap-constituting surface, and the processing whetstone is used. The track width regulating groove is applied to a magnetic head that is ground, and the grinding of the track width regulating groove is performed after the outer peripheral surface is shaped, and then an abrasive solution in which powder abrasive is dissolved is supplied to form the side surface. Grinding is performed using the processed grinding wheel. Therefore, according to the magnetic head processing method of the present invention, a high-precision track width regulating groove is continuously formed by a processing grindstone whose grinding surface is finished with high precision, thereby achieving a narrow recording pitch and a narrow track. It is possible to efficiently manufacture a magnetic head that has high reliability for recording and reproducing information signals and the like with high accuracy on a recording medium of a general specification and has improved input / output characteristics.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view illustrating a MIG head and a processing grindstone for grinding a track width regulating groove.

FIG. 2 is a plan view of a main part of the MIG head.

FIG. 3 is an explanatory view of a manufacturing process of the MIG head, and is a perspective view of a base material.

FIG. 4 is an explanatory view of the manufacturing process, showing a state in which a concave groove that forms a depth regulating groove is formed.

FIG. 5 is an explanatory view of the manufacturing process, showing a state in which a soft magnetic metal film layer is formed.

FIG. 6 is an explanatory diagram of the manufacturing process, showing a state in which Au forming a gap film is formed.

FIG. 7 is an explanatory view of the manufacturing process, and is a view showing a state in which a base material is joined to form an intermediate.

FIG. 8 is an explanatory view of the manufacturing process, showing a state where a track width regulating groove is formed on one end surface of the intermediate body.

FIG. 9 is an explanatory view of the manufacturing process, showing a state where one end face of the intermediate body is formed in an arc shape.

FIG. 10 is an explanatory diagram of the manufacturing process, showing a cut head chip.

FIG. 11 is a diagram illustrating a shaping process of a side surface of a processing grindstone.

FIG. 12 is an explanatory diagram of a grinding process of a track width regulating groove using a processing grindstone.

FIG. 13 is an explanatory diagram for measuring the surface roughness of a side surface of a processing whetstone.

FIG. 14 is a view showing a result of measuring a surface roughness of a side surface of a processing whetstone subjected to a shaping process.

FIG. 15 is a view showing the result of measuring the surface roughness of the side surface of a conventional processing whetstone.

FIG. 16 is a dimensional characteristic diagram of a contact surface of a magnetic tape formed by a track width regulating groove ground by a processing grindstone having a side surface shaping process.

FIG. 17 is a dimensional characteristic diagram of a magnetic tape contact surface formed by a track width regulating groove ground by a conventional processing grindstone.

FIG. 18 is a diagram illustrating characteristics of a particle size of powder abrasive grains mixed with an abrasive solution used for performing a shaping process on a side surface of a processing whetstone, a finishing time, and a variation amount of a formed recording track width. (A) is a characteristic diagram, (b) is a list of typical examples, and (c) is a correspondence table of particle size (count) and particle size.

FIG. 19 is a plan view of a main part of a conventional MIG head.

[Explanation of symbols]

1 MIG head (magnetic head), 2-3 core halves,
4 Non-magnetic material, 5,6 soft magnetic metal film layer, 7 Magnetic gap, 8 Magnetic tape sliding surface, 9,10 Track width regulating groove, 11 Magnetic tape contact surface, 12 Reinforced glass part, 1
3 depth regulating groove, 14 winding guide groove, 20 intermediate, 21 base material, 28 convex portion, 50 processing whetstone, 5
1 outer peripheral surface, 52 side surface, 53 butting plate, 54 supply pipe, 55 abrasive solution

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G11B 5/127 G11B 5/127 S (72) Inventor Masayuki Sasaki Takae, Nakata-cho, Tome-gun, Miyagi Prefecture No. 30 Sony Precision Magne Co., Ltd. (72) Inventor Masahiro Konno No. 30 Kagono Border, Takae Niida, Nakata-cho, Tome-gun, Miyagi Prefecture No. 30 Sony Precision Magne Co., Ltd. F-term (reference) AC04 CA05 5D093 AA01 BB05 FA16 FA18 FA26 5D111 AA22 BB17 GG14 GG16 HH16 JJ24 KK01

Claims (5)

[Claims] A metal magnetic film is formed on at least one of the core halves of a gap forming surface, and a convex grind surface corresponding to the width of a recording track is formed on a magnetic tape sliding surface by a working grindstone. In the magnetic head processing method for grinding the track width regulating groove to be formed, the grinding of the track width regulating groove is performed by supplying an abrasive solution in which powder abrasive is dissolved after finishing the outer peripheral surface. A method for processing a magnetic head, comprising using the above-mentioned processing whetstone subjected to a shaping process on a side surface. 2. The magnetic head processing method according to claim 1, wherein the finishing abrasive solution is prepared by mixing a powder abrasive such as green carbon, white alumina or diamond with a solvent. . 3. A grinding wheel having a thickness of 20 μm to 500 μm and a grain size of abrasive grains of 0.5 μm to 8 μm is used for the grinding wheel, and the grain diameter is 0.5 μm to the grinding wheel. 2. The magnetic head processing method according to claim 1, wherein the finishing abrasive grain solution obtained by mixing powder abrasive grains having a diameter of about 24 [mu] m with a solvent is supplied to perform side shaping processing. 4. The above-mentioned finishing abrasive solution contains a surfactant in a mixed solution obtained by mixing powder abrasives with a solvent mainly composed of a water body at a weight ratio of 0.5 to 5 times. 2. The magnetic head processing method according to claim 1, wherein the lubricant is prepared by adding 1/10 to 1/30 times the lubricant. 5. An abutting plate made of glass material or brass having a Vickers hardness of 300 to 1000 is abutted against the side surface of the processing whetstone, and the abrasive grains are held by the abutting plate. 2. The magnetic head processing method according to claim 1, wherein the finishing abrasive solution is supplied and shaping is performed.