JP2001150182A - Gold-tin alloy brazing filler metal having excellent wettability - Google Patents
Gold-tin alloy brazing filler metal having excellent wettabilityInfo
- Publication number
- JP2001150182A JP2001150182A JP33092999A JP33092999A JP2001150182A JP 2001150182 A JP2001150182 A JP 2001150182A JP 33092999 A JP33092999 A JP 33092999A JP 33092999 A JP33092999 A JP 33092999A JP 2001150182 A JP2001150182 A JP 2001150182A
- Authority
- JP
- Japan
- Prior art keywords
- gold
- tin alloy
- brazing material
- alloy brazing
- surface roughness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、濡れ性に優れ、常に
信頼性の高いロウ付けが可能な金錫合金ロウ材に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gold-tin alloy brazing material which has excellent wettability and can always be brazed with high reliability.
【0002】[0002]
【従来の技術】一般に、シリコン、GaAsなどの半導
体素子を金めっきしたリードフレーム、メタライズされ
たセラミックスなどの基板にロウ付けする方法として、
金錫合金ロウ材を基板の上に載せて溶融させた後、シリ
コン、GaAsなどの半導体素子を溶融ロウ材の上に載
せて接合する方法が知られている。この時使用される金
錫合金ロウ材はSn:10〜30重量%を含有し、残り
がAuおよび不可避不純物からなる組成を有し、線状、
細帯状またはチップ状に加工された形状の金錫合金ロウ
材が使用される。2. Description of the Related Art In general, as a method of brazing a semiconductor element such as silicon or GaAs to a lead frame plated with gold or a substrate such as metallized ceramics,
A method is known in which a gold-tin alloy brazing material is placed on a substrate and melted, and then a semiconductor element such as silicon or GaAs is placed on the molten brazing material and joined. The gold-tin alloy brazing material used at this time contains Sn: 10 to 30% by weight, and the balance has a composition consisting of Au and unavoidable impurities.
A gold-tin alloy brazing material processed into a narrow band or chip shape is used.
【0003】[0003]
【発明が解決しようとする課題】しかし、従来の金錫合
金ロウ材は、濡れ性が悪いために加熱し溶融させても溶
融ロウ材が基板の上に広がる面積が少なく、そのためシ
リコン、GaAsなどの半導体の下面および周囲に溶融
ロウ材がまわらない部分が生じ、かかる部分が生じると
シリコン、GaAsなどの半導体の下面に溶融ロウ材が
付着しない部分が生じ、半導体素子の信頼性のあるロウ
付けはできない。However, since the conventional gold-tin alloy brazing material has poor wettability, the molten brazing material has a small area spread over the substrate even when heated and melted, so that silicon, GaAs, etc. A portion where the molten brazing material does not flow around the lower surface of the semiconductor and the periphery thereof, and if such a portion occurs, a portion where the molten brazing material does not adhere to the lower surface of the semiconductor such as silicon or GaAs occurs, and the semiconductor device is reliably brazed. Can not.
【0004】[0004]
【課題を解決するための手段】そこで、本発明者らは、
金錫合金ロウ材を用いて常に信頼性の高いロウ付けを行
うことができる金錫合金ロウ材を開発すべく研究を行っ
た結果、(a)金錫合金ロウ材の表面粗さは溶融ロウ材
の基板に対する濡れ性に大きく影響を及ぼし、金錫合金
ロウ材の表面粗さが小さいほど溶融ロウ材の基板に対す
る濡れ性が向上し、溶融ロウ材が基板の表面に広く広が
って半導体の下面に溶融ロウ材が付着しない部分が生じ
ることがなく、常に信頼性の高いハンダ付けを行うこと
ができる、(b)前記信頼性の高いハンダ付けを行うこ
とができる濡れ性に優れた金錫合金ロウ材の表面粗さ
は、JISB0601で規定される表面粗さRaが0.
01〜5μmの範囲内にある、という研究結果が得られ
たのである。Means for Solving the Problems Accordingly, the present inventors have:
As a result of research to develop a gold-tin alloy brazing material that can always be reliably brazed using a gold-tin alloy brazing material, (a) the surface roughness of the gold-tin alloy brazing material is This greatly affects the wettability of the material to the substrate, and the smaller the surface roughness of the gold-tin alloy brazing material, the better the wettability of the molten brazing material to the substrate. (B) a gold-tin alloy excellent in wettability capable of performing highly reliable soldering without causing a portion to which the molten brazing material does not adhere to; The surface roughness of the brazing material is such that the surface roughness Ra specified in JIS B0601 is 0.
The research result obtained that it was within the range of 01 to 5 μm.
【0005】この発明は、かかる研究結果に基づいてな
されたものであって、(1)JISB0601で規定さ
れる表面粗さRaが0.01〜5μmの範囲内にある濡
れ性に優れた金錫合金ロウ材、に特徴を有するものであ
る。The present invention has been made on the basis of the above research results, and (1) gold tin having excellent wettability having a surface roughness Ra specified in JIS B0601 in the range of 0.01 to 5 μm. Alloy brazing material.
【0006】この発明の金錫合金ロウ材は、一般に知ら
れているSn:10〜30重量%を含有し、残りがAu
および不可避不純物からなる組成のロウ材を使用するこ
とができる。したがって、この発明は、(2)Sn:1
0〜30重量%を含有し、残りがAuおよび不可避不純
物からなる組成を有し、JISB0601で規定される
表面粗さRaが0.01〜5μmの範囲内にある濡れ性
に優れた金錫合金ロウ材、に特徴を有するものである。The gold-tin alloy brazing material of the present invention contains generally known Sn: 10 to 30% by weight, and the balance is Au.
Further, a brazing material having a composition composed of unavoidable impurities can be used. Therefore, the present invention provides (2) Sn: 1
A gold-tin alloy containing 0 to 30% by weight, the balance being Au and unavoidable impurities, and having excellent wettability having a surface roughness Ra defined by JIS B0601 in the range of 0.01 to 5 μm. Brazing material.
【0007】この発明の金錫合金ロウ材は、高純度Au
および高純度Snを原料とし、高純度Auに対して高純
度Snを10〜30重量%を添加し、真空溶解したのち
鋳造してインゴットを作製し、このインゴットを温度:
170〜220℃で温間圧延することにより厚さ:10
〜50μmの帯状に成形し、さらにこの帯状の金錫合金
ロウ材をJISB0601で規定される表面粗さRaが
5μm以下となるように表面研磨したのち、長さ方向に
平行に切断して線状または細帯状に成形し、また必要に
応じて線状または細帯状の金錫合金ロウ材を長さ方向に
直角に切断してチップ状とすることにより作られる。[0007] The gold-tin alloy brazing material of the present invention is high-purity Au.
And high-purity Sn as a raw material, 10 to 30% by weight of high-purity Sn is added to high-purity Au, and the mixture is melted in vacuum and cast to produce an ingot.
The thickness is 10 by warm rolling at 170 to 220 ° C.
5050 μm, and the surface of the band-shaped gold-tin alloy brazing material is polished so that the surface roughness Ra specified in JIS B0601 is 5 μm or less, and then cut in parallel in the length direction to obtain a linear shape. Alternatively, it is formed by shaping into a strip shape and, if necessary, cutting a linear or strip-shaped gold-tin alloy brazing material at right angles in the length direction to form a chip shape.
【0008】JISB0601で規定される表面粗さR
a:5μm以下のこの発明の金錫合金ロウ材が濡れ性に
優れる理由は、前記帯状の金錫合金ロウ材の表面をJI
SB0601で規定される表面粗さRaが5μm以下と
なるように滑らかに研磨することにより、金錫合金ロウ
材の表面に形成される酸化膜の量が極めて少なくなり、
溶融ロウ材の湯流れ性を阻害する要因が減ったことによ
るものと考えられるが明らかではない。[0008] Surface roughness R defined by JIS B0601
a: The reason why the gold-tin alloy brazing material of the present invention having a size of 5 μm or less is excellent in wettability is that the surface of the band-shaped gold-tin alloy brazing material is formed by JI.
By smooth polishing so that the surface roughness Ra defined by SB0601 is 5 μm or less, the amount of the oxide film formed on the surface of the gold-tin alloy brazing material is extremely reduced,
It is thought that this was due to a decrease in the factor that hinders the molten metal flowability, but it is not clear.
【0009】この発明の金錫合金ロウ材の表面粗さは、
滑らかであるほど溶融したロウ材の基板に対する濡れ性
は大きくなり、したがってロウ付けに対する信頼性が高
くなるが、金錫合金ロウ材のJISB0601で規定さ
れる表面粗さRaが5μmを越えると、基板に対する濡
れ性が悪くなるので好ましくなく、一方、金錫合金ロウ
材のJISB0601で規定される表面粗さRaを0.
01μm未満にするには処理工程が煩雑となってコスト
がかかりすぎるので好ましくない。したがって、金錫合
金ロウ材のJISB0601で規定される表面粗さRa
は0.01〜5μmに定めた。金錫合金ロウ材のJIS
B0601で規定される表面粗さRaの一層好ましい範
囲は0.03〜1μmである。The surface roughness of the gold-tin alloy brazing material of the present invention is as follows:
The smoother the solder, the greater the wettability of the molten brazing material to the substrate, and therefore the higher the reliability for brazing. However, if the surface roughness Ra of the gold-tin alloy brazing material specified by JIS B0601 exceeds 5 μm, On the other hand, the surface roughness Ra of the gold-tin alloy brazing material specified in JIS B0601 is set to 0.
If the thickness is less than 01 μm, the processing steps become complicated and cost becomes too high, which is not preferable. Accordingly, the surface roughness Ra of the gold-tin alloy brazing material specified in JIS B0601
Was set to 0.01 to 5 μm. JIS for gold-tin alloy brazing material
A more preferable range of the surface roughness Ra defined by B0601 is 0.03 to 1 μm.
【0010】[0010]
【発明の実施の形態】純度:99.99重量%以上の高
純度Auおよび純度:99.99重量%以上の高純度S
nを用意し、これらを真空溶解し、得られた溶湯を高純
度カーボンモールドに鋳造して厚さ:12mm、長さ:
200mmの寸法を有し、表1に示される成分組成のイ
ンゴットを製造した。これらインゴットを温度:200
℃で温間圧延して幅:50mm、厚さ:30μmのリボ
ンを作製し、このリボンの表面を脱脂した後、表1に示
されるJISB0601で規定される表面粗さRaにな
るまで研磨し、この研磨したリボンを長さ方向に平行に
スリッター切断して幅w:0.4mmの細リボンに加工
することにより本発明金錫合金ロウ材1〜8および比較
金錫合金ロウ材を作製した。さらに、表1に示される成
分組成を有する市販の幅w:0.4mm、厚さ:30μ
mの細リボン状の従来金錫合金ロウ材を用意した。BEST MODE FOR CARRYING OUT THE INVENTION High purity Au having a purity of 99.99% by weight or more and high purity S having a purity of 99.99% by weight or more
n were prepared and melted in vacuum, and the resulting molten metal was cast into a high-purity carbon mold to have a thickness of 12 mm and a length of 12 mm.
An ingot having a size of 200 mm and the component composition shown in Table 1 was produced. These ingots were heated at a temperature of 200
A ribbon having a width of 50 mm and a thickness of 30 μm was prepared by warm rolling at 50 ° C., the surface of the ribbon was degreased, and then polished to a surface roughness Ra specified in JIS B0601 shown in Table 1. The polished ribbon was slit and cut in parallel with the length direction to form a thin ribbon having a width w: 0.4 mm, thereby producing gold-tin alloy brazing materials 1 to 8 of the present invention and comparative gold-tin alloy brazing materials. Further, a commercially available product having the component composition shown in Table 1 has a width w of 0.4 mm and a thickness of 30 μm.
The conventional gold-tin alloy brazing material in the form of a thin ribbon of m was prepared.
【0011】本発明金錫合金ロウ材1〜8、比較金錫合
金ロウ材および従来金錫合金ロウ材を長さ:0.4mm
に定寸カットして0.4mm×0.4mm×30μmの
寸法を有するロウ材チップを作製し、このロウ材チップ
を図1に示されるように純金メッキした基板3の上に載
せ、300℃に加熱し、3分間保持することにより本発
明金錫合金ロウ材1〜8、比較金錫合金ロウ材および従
来金錫合金ロウ材のそれぞれのロウ材チップ1を溶解
し、溶解したロウ材チップ1が純金メッキした基板3の
表面に広がった溶融ロウ材2の最大広がり幅(以下、最
大湯流れ幅という)Wを求め、最大湯流れ幅Wに対する
ロウ材チップ1のリボン幅wの比(W/w×100%)
を求め、その結果を表1に示すことにより本発明金錫合
金ロウ材1〜8、比較金錫合金ロウ材および従来金錫合
金ロウ材の濡れ性を評価した。Each of the gold-tin alloy brazing materials 1 to 8, the comparative gold-tin alloy brazing material and the conventional gold-tin alloy brazing material has a length of 0.4 mm.
A brazing material chip having a size of 0.4 mm × 0.4 mm × 30 μm is produced by cutting the brazing material chip on a pure gold plated substrate 3 as shown in FIG. And then held for 3 minutes to melt the brazing material chips 1 of the gold-tin alloy brazing materials of the present invention, the comparative gold-tin alloy brazing material and the conventional gold-tin alloy brazing material, and melted brazing material chips 1 is a maximum spread width (hereinafter, referred to as a maximum molten metal flow width) W of the molten brazing material 2 spread on the surface of the pure gold plated substrate 3, and a ratio of the ribbon width w of the brazing material chip 1 to the maximum molten metal flow width W ( (W / w x 100%)
Table 1 shows the results, and the wettability of the gold-tin alloy brazing materials of the present invention, the comparative gold-tin alloy brazing material and the conventional gold-tin alloy brazing material was evaluated.
【0012】[0012]
【表1】 [Table 1]
【0013】表1に示される結果から、本発明金錫合金
ロウ材1〜8は比較金錫合金ロウ材および従来金錫合金
ロウ材に比べてW/w×100%の値が大きいところか
ら本発明金錫合金ロウ材1〜8は比較金錫合金ロウ材お
よび従来金錫合金ロウ材に比べて濡れ性に優れ、したが
ってシリコン、GaAsなどの半導体の下面全面に溶融
ロウ材が接着し、信頼性の高いロウ付けを常に行なうこ
とができることがわかる。From the results shown in Table 1, the gold-tin alloy brazing materials 1 to 8 of the present invention have a value of W / w × 100% larger than that of the comparative gold-tin alloy brazing material and the conventional gold-tin alloy brazing material. The gold-tin alloy brazing materials 1 to 8 of the present invention have better wettability than the comparative gold-tin alloy brazing material and the conventional gold-tin alloy brazing material. Therefore, the molten brazing material adheres to the entire lower surface of the semiconductor such as silicon and GaAs. It can be seen that reliable brazing can always be performed.
【0014】[0014]
【発明の効果】上述のように、この発明の金錫合金ロウ
材は、従来の金錫合金ロウ材に比べて濡れ性に優れた特
性を有しており、半導体装置の不良品発生率も減少して
コストを低減することができ、産業上優れた効果をもた
らすものである。As described above, the gold-tin alloy brazing material of the present invention has characteristics that are more excellent in wettability than the conventional gold-tin alloy brazing material, and the defective rate of the semiconductor device is also reduced. It is possible to reduce the cost and reduce the cost, and bring about an industrially superior effect.
【図1】濡れ性を評価するための説明図である。FIG. 1 is an explanatory diagram for evaluating wettability.
1 ロウ材チップ 2 溶融ロウ材 3 基板 DESCRIPTION OF SYMBOLS 1 Brazing material chip 2 Molten brazing material 3 Substrate
Claims (3)
aが0.01〜5μmの範囲内にあることを特徴とする
濡れ性に優れた金錫合金ロウ材。1. A surface roughness R defined by JIS B0601
A gold-tin alloy brazing material having excellent wettability, wherein a is in the range of 0.01 to 5 μm.
Auおよび不可避不純物からなる組成を有し、JISB
0601で規定される表面粗さRaが0.01〜5μm
の範囲内にあることを特徴とする濡れ性に優れた金錫合
金ロウ材。2. A composition containing Sn: 10 to 30% by weight, the balance being composed of Au and unavoidable impurities.
Surface roughness Ra defined by 0601 is 0.01 to 5 μm
A gold-tin alloy brazing material having excellent wettability, characterized by being within the range described above.
ることを特徴とする請求項1または2記載の濡れ性に優
れた金錫合金ロウ材。3. The gold-tin alloy brazing material having excellent wettability according to claim 1, wherein the brazing material has a linear, narrow band or chip shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33092999A JP3915112B2 (en) | 1999-11-22 | 1999-11-22 | Gold-tin alloy brazing material with excellent wettability |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33092999A JP3915112B2 (en) | 1999-11-22 | 1999-11-22 | Gold-tin alloy brazing material with excellent wettability |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001150182A true JP2001150182A (en) | 2001-06-05 |
JP3915112B2 JP3915112B2 (en) | 2007-05-16 |
Family
ID=18238031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP33092999A Expired - Lifetime JP3915112B2 (en) | 1999-11-22 | 1999-11-22 | Gold-tin alloy brazing material with excellent wettability |
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JP (1) | JP3915112B2 (en) |
Cited By (6)
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---|---|---|---|---|
JP2006332415A (en) * | 2005-05-27 | 2006-12-07 | Sharp Corp | Semiconductor device |
JPWO2005020315A1 (en) * | 2003-08-26 | 2007-11-01 | 株式会社トクヤマ | Element bonding substrate, element bonding substrate and manufacturing method thereof |
WO2010010833A1 (en) | 2008-07-24 | 2010-01-28 | 田中貴金属工業株式会社 | Au-Ga-In BRAZING FILLER METAL |
CN102267022A (en) * | 2011-07-27 | 2011-12-07 | 重庆群崴电子材料有限公司 | Lead-free tin-gold alloy solder for photoelectric packaging and method for manufacturing lead-free tin-gold alloy solder |
JP2012228729A (en) * | 2011-04-27 | 2012-11-22 | Sumitomo Metal Mining Co Ltd | Pb FREE SOLDER ALLOY MAKING Zn PRINCIPAL INGREDIENT AND METHOD OF MANUFACTURING THE SAME |
WO2014017568A1 (en) * | 2012-07-26 | 2014-01-30 | 住友金属鉱山株式会社 | Solder alloy |
-
1999
- 1999-11-22 JP JP33092999A patent/JP3915112B2/en not_active Expired - Lifetime
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2005020315A1 (en) * | 2003-08-26 | 2007-11-01 | 株式会社トクヤマ | Element bonding substrate, element bonding substrate and manufacturing method thereof |
JP4979944B2 (en) * | 2003-08-26 | 2012-07-18 | 株式会社トクヤマ | Element bonding substrate, element bonding substrate and manufacturing method thereof |
JP2006332415A (en) * | 2005-05-27 | 2006-12-07 | Sharp Corp | Semiconductor device |
WO2010010833A1 (en) | 2008-07-24 | 2010-01-28 | 田中貴金属工業株式会社 | Au-Ga-In BRAZING FILLER METAL |
US9604317B2 (en) | 2008-07-24 | 2017-03-28 | Tanaka Kikinzoku Kogyo K.K. | Au—Ga—In brazing material |
JP2012228729A (en) * | 2011-04-27 | 2012-11-22 | Sumitomo Metal Mining Co Ltd | Pb FREE SOLDER ALLOY MAKING Zn PRINCIPAL INGREDIENT AND METHOD OF MANUFACTURING THE SAME |
CN102267022A (en) * | 2011-07-27 | 2011-12-07 | 重庆群崴电子材料有限公司 | Lead-free tin-gold alloy solder for photoelectric packaging and method for manufacturing lead-free tin-gold alloy solder |
WO2014017568A1 (en) * | 2012-07-26 | 2014-01-30 | 住友金属鉱山株式会社 | Solder alloy |
GB2519276A (en) * | 2012-07-26 | 2015-04-15 | Sumitomo Metal Mining Co | Solder alloy |
Also Published As
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