JP3147601B2 - Pb alloy solder for semiconductor device assembly with excellent high temperature strength - Google Patents

Pb alloy solder for semiconductor device assembly with excellent high temperature strength

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Publication number
JP3147601B2
JP3147601B2 JP20643193A JP20643193A JP3147601B2 JP 3147601 B2 JP3147601 B2 JP 3147601B2 JP 20643193 A JP20643193 A JP 20643193A JP 20643193 A JP20643193 A JP 20643193A JP 3147601 B2 JP3147601 B2 JP 3147601B2
Authority
JP
Japan
Prior art keywords
alloy solder
temperature strength
semiconductor device
excellent high
device assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP20643193A
Other languages
Japanese (ja)
Other versions
JPH0751884A (en
Inventor
豪政 大村
秀昭 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP20643193A priority Critical patent/JP3147601B2/en
Publication of JPH0751884A publication Critical patent/JPH0751884A/en
Application granted granted Critical
Publication of JP3147601B2 publication Critical patent/JP3147601B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Die Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、半導体装置組立用に使
用される高融点(260〜400℃)を有する高温強度に優れ
たPb合金はんだ材に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Pb alloy solder having a high melting point (260-400.degree. C.) and excellent high-temperature strength used for assembling semiconductor devices.

【0002】[0002]

【従来の技術】従来、半導体素子のダイボンディング、
フリップチップボンディング、およびICパッケージの
封止等半導体装置組立用に使用される高融点(260〜400
℃)のはんだ材としては、Sn、In、Sb、Bi内1
種または2種以上:1〜10%、を含有し、残りがPb
と不可避不純物からなる組成のPb合金が知られてい
た。
2. Description of the Related Art Conventionally, die bonding of semiconductor devices,
High melting point (260-400) used for semiconductor device assembly such as flip chip bonding and IC package sealing
° C) solder material, Sn, In, Sb, Bi
One or more species: 1 to 10%, with the balance being Pb
And a Pb alloy having a composition composed of unavoidable impurities.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の半導体装
置の高集積化は著しく、これに伴い半導体装置の発熱も
高くなり、これを構成するはんだ付け部も、高温環境下
に置かれる状況にあるが、上記の従来Pb合金はんだ材
は、その使用環境温度が100℃程度にもなると、高温強
度が十分でないため、ろう付け部が破断し易くなるなど
の問題点がある。
On the other hand, high integration of semiconductor devices in recent years is remarkable, and accordingly, heat generation of the semiconductor devices is also increased, and the soldering portions constituting the semiconductor devices are also placed in a high temperature environment. However, the above-mentioned conventional Pb alloy solder material has a problem that, when its use environment temperature is about 100 ° C., the high-temperature strength is not sufficient, so that the brazed portion is easily broken.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者は、上
述のような観点から、高温強度を向上させるべく、上記
の従来Pb合金はんだ材に、着目し、研究した結果、上
記の従来Pb合金はんだ材に合金成分としてPd:3〜
12重量%を合金させると、この結果のPb合金はんだ
材は、優れた高温強度を有し、これを高い発熱を伴う高
集積半導体装置の組立に用いた場合、その実用に際して
もはんだ付け部は優れた高温強度を示し、破断の発生が
見られないという研究結果を得たのである。
Therefore, the present inventor focused on the above-mentioned conventional Pb alloy solder material in order to improve the high-temperature strength from the above-mentioned viewpoints, and as a result, as a result, the above-mentioned conventional Pb alloy solder material was obtained. Pd: 3 ~ as alloying component in alloy solder
When 12% by weight is alloyed, the resulting Pb alloy solder material has excellent high-temperature strength, and when this is used for assembling a highly integrated semiconductor device with high heat generation, the soldered portion is not affected even in practical use. The research results showed that it exhibited excellent high-temperature strength and no breakage was observed.

【0005】この発明は、上記の研究結果をもとになさ
れたものであって、重量%で(以下%は重量%を示
す)、Pd:3〜12%、Sn、In、Sb、Biの内
1種又は2種以上:1〜10%、を含有し、残りがPb
と不可避不純物からなる組成を有するPb合金で構成し
てなる半導体装置組立用Pb合金はんだ材に特徴を有す
るものである。
The present invention has been made on the basis of the above-mentioned research results, and in terms of weight% (hereinafter,% indicates weight%), Pd: 3 to 12%, Sn, In, Sb, Bi One or two or more thereof: 1 to 10%;
And a Pb alloy solder material for assembling a semiconductor device, which is composed of a Pb alloy having a composition comprising unavoidable impurities.

【0006】次に、この発明のPb合金はんだ材におい
て、これを構成するPb合金の成分組成を上記の通り限
定した理由を説明する。 a)Sn、In、Sb、およびBi これら成分には、融点を下げて、はんだ付け性を向上さ
せる作用があるが、その含有量が1%未満では、前記作
用に所望の効果が得られず、その含有量が10%を越え
ると、高温強度が低下するようになることから、その含
有量を1〜10%と定めた。 b)Pd Pd成分には、上記の通り高温強度を向上させる作用が
あるが、その含有量が3%未満では、所望の優れた高温
強度を確保することができず、一方その含有量が12%
を越えると、融点が上昇し、はんだ付けが困難になるこ
とから、その含有量を3〜12%と定めた。
Next, the reason why the component composition of the Pb alloy constituting the Pb alloy solder material of the present invention is limited as described above will be described. a) Sn, In, Sb, and Bi These components have the effect of lowering the melting point and improving the solderability, but if the content is less than 1%, the desired effects cannot be obtained in the above-mentioned effects. If the content exceeds 10%, the high-temperature strength decreases, so the content is set to 1 to 10%. b) Pd The Pd component has the effect of improving the high-temperature strength as described above, but if its content is less than 3%, the desired excellent high-temperature strength cannot be secured, while its content is 12%. %
If the temperature exceeds the limit, the melting point rises and soldering becomes difficult. Therefore, the content is set to 3 to 12%.

【0007】[0007]

【実施例】つぎに、この発明のPb合金はんだ材を実施
例により具体的に説明する。 通常の高周波溶解炉に
て、それぞれ表1に示される成分組成をもったPb合金
溶湯を調製し、直径50mm×長さ:150mmのインゴットを
鋳造し、このインゴットを幅:30mm×厚さ:3mmに冷間
で押し出し、これを冷間圧延にして、厚さ:70μmを有
する本発明Pb合金はんだ材1〜10及び従来Pb合金は
んだ材1〜10をそれぞれ製造した。 つぎに、この結果
得られた各種のPb合金はんだ材について、高温強度を
評価するために、以下の条件で高温剪断試験を行なっ
た。すなわち、上記Pbはんだ材より、20mm×20mmの寸
法をもって試験片を切り出し、幅:20mm×厚さ:10mm×
長さ:100mmの寸法をもった2枚のNi板材のそれぞれ
の端部を前記試験片を間にして20mmの重ね代で重ね合わ
せ、0.2MPaの荷重をかけながら、窒素雰囲気のリフ
ロー炉で、各はんだ材の融点+80℃で3分間加熱しては
んだ付けを行なった。このはんだ付け体について、150
℃で、引っ張り速度10mm/minで剪断試験を行ない、剪
断強度を測定した。この試験結果を5個の平均値とし
た。
Next, the Pb alloy solder material of the present invention will be specifically described with reference to examples. In a normal high-frequency melting furnace, a Pb alloy melt having the component composition shown in Table 1 was prepared, and an ingot having a diameter of 50 mm × length: 150 mm was cast, and the ingot was width: 30 mm × thickness: 3 mm. The Pb alloy solder materials 1 to 10 of the present invention and the conventional Pb alloy solder materials 1 to 10 having a thickness of 70 μm were produced, respectively. Next, in order to evaluate the high-temperature strength of the various Pb alloy solder materials obtained as a result, a high-temperature shear test was performed under the following conditions. That is, a test piece having a size of 20 mm × 20 mm was cut out from the above Pb solder material, and the width: 20 mm × thickness: 10 mm ×
Length: Each end of two Ni plates having a dimension of 100 mm is overlapped with a 20 mm overlap margin with the test piece in between, and a load of 0.2 MPa is applied thereto in a reflow furnace in a nitrogen atmosphere. Soldering was performed by heating at the melting point of each solder material + 80 ° C for 3 minutes. For this soldered body, 150
A shear test was conducted at 10 ° C. at a tensile speed of 10 mm / min, and the shear strength was measured. The test results were taken as the average value of the five samples.

【0008】[0008]

【表1】 [Table 1]

【0009】[0009]

【発明の効果】表1に示される結果から、本発明はんだ
材1〜10はこれを用いて形成されたはんだ付け部が、従
来はんだ材1〜10を用いて形成されたはんだ付け部に比
して、優れた高温強度をもつことが明らかである。上述
のように、この発明のPb合金はんだ材は、優れた高温
強度を有するので、これを特に高温発熱を伴う高集積半
導体装置の組立に用いた場合にも、実用に際して、ろう
付け部が破断することがなく、長期に亘って高い信頼性
を確保することができるのである。
According to the results shown in Table 1, the soldering parts 1 to 10 of the present invention have a soldering part formed by using the same as the soldering parts formed by using the conventional soldering materials 1 to 10. Thus, it is clear that it has excellent high-temperature strength. As described above, the Pb alloy solder material of the present invention has excellent high-temperature strength. Therefore, even when the Pb alloy solder material is used for assembling a highly integrated semiconductor device which generates heat at a high temperature, the brazed portion is broken in practical use. Therefore, high reliability can be secured for a long period of time.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】重量%で、Pd:3〜12%、Sn、I
n、Sb、Biの内1種または2種以上:1〜10%、
を含有し、残りがPbと不可避不純物からなる組成を有
することを特徴とする高温強度に優れた半導体装置組立
用Pb合金はんだ材。
1. Pd: 3 to 12% by weight, Sn, I
one or more of n, Sb and Bi: 1 to 10%,
A Pb alloy solder material for semiconductor device assembly excellent in high-temperature strength, characterized by having a composition comprising Pb and inevitable impurities.
JP20643193A 1993-08-20 1993-08-20 Pb alloy solder for semiconductor device assembly with excellent high temperature strength Expired - Fee Related JP3147601B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20643193A JP3147601B2 (en) 1993-08-20 1993-08-20 Pb alloy solder for semiconductor device assembly with excellent high temperature strength

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20643193A JP3147601B2 (en) 1993-08-20 1993-08-20 Pb alloy solder for semiconductor device assembly with excellent high temperature strength

Publications (2)

Publication Number Publication Date
JPH0751884A JPH0751884A (en) 1995-02-28
JP3147601B2 true JP3147601B2 (en) 2001-03-19

Family

ID=16523268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20643193A Expired - Fee Related JP3147601B2 (en) 1993-08-20 1993-08-20 Pb alloy solder for semiconductor device assembly with excellent high temperature strength

Country Status (1)

Country Link
JP (1) JP3147601B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015192765A (en) * 2014-03-31 2015-11-05 アトムメディカル株式会社 Bed structure for baby

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015192765A (en) * 2014-03-31 2015-11-05 アトムメディカル株式会社 Bed structure for baby

Also Published As

Publication number Publication date
JPH0751884A (en) 1995-02-28

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