JP2001142212A5 - - Google Patents
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- Publication number
- JP2001142212A5 JP2001142212A5 JP1999321347A JP32134799A JP2001142212A5 JP 2001142212 A5 JP2001142212 A5 JP 2001142212A5 JP 1999321347 A JP1999321347 A JP 1999321347A JP 32134799 A JP32134799 A JP 32134799A JP 2001142212 A5 JP2001142212 A5 JP 2001142212A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- positive photoresist
- alicyclic hydrocarbon
- photoresist composition
- composition according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920002120 photoresistant polymer Polymers 0.000 claims 11
- 125000002723 alicyclic group Chemical group 0.000 claims 7
- 125000000217 alkyl group Chemical group 0.000 claims 7
- 125000004432 carbon atoms Chemical group C* 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 4
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 4
- 239000002904 solvent Substances 0.000 claims 4
- 239000002253 acid Substances 0.000 claims 3
- 125000000753 cycloalkyl group Chemical group 0.000 claims 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 125000003342 alkenyl group Chemical group 0.000 claims 2
- 125000005843 halogen group Chemical group 0.000 claims 2
- -1 iodonium sulfonate compound Chemical class 0.000 claims 2
- 125000001424 substituent group Chemical group 0.000 claims 2
- DOVZUKKPYKRVIK-UHFFFAOYSA-N 1-methoxypropan-2-yl propanoate Chemical compound CCC(=O)OC(C)COC DOVZUKKPYKRVIK-UHFFFAOYSA-N 0.000 claims 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N Propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims 1
- 125000002252 acyl group Chemical group 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 125000003545 alkoxy group Chemical group 0.000 claims 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims 1
- 235000014113 dietary fatty acids Nutrition 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 claims 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 claims 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
- 239000000194 fatty acid Substances 0.000 claims 1
- 150000004665 fatty acids Chemical class 0.000 claims 1
- 239000003112 inhibitor Substances 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 claims 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
- 241000894007 species Species 0.000 claims 1
- 125000000547 substituted alkyl group Chemical group 0.000 claims 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32134799A JP3948506B2 (ja) | 1999-11-11 | 1999-11-11 | ポジ型フォトレジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32134799A JP3948506B2 (ja) | 1999-11-11 | 1999-11-11 | ポジ型フォトレジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001142212A JP2001142212A (ja) | 2001-05-25 |
| JP2001142212A5 true JP2001142212A5 (zh) | 2005-07-14 |
| JP3948506B2 JP3948506B2 (ja) | 2007-07-25 |
Family
ID=18131578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32134799A Expired - Lifetime JP3948506B2 (ja) | 1999-11-11 | 1999-11-11 | ポジ型フォトレジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3948506B2 (zh) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4358940B2 (ja) * | 1999-08-26 | 2009-11-04 | 丸善石油化学株式会社 | シクロヘキサンラクトン構造を有する重合性化合物及び重合体 |
| TW581941B (en) * | 2001-06-21 | 2004-04-01 | Fuji Photo Film Co Ltd | Positive resist composition |
| JP4727092B2 (ja) * | 2001-09-10 | 2011-07-20 | 東京応化工業株式会社 | 化学増幅型レジスト組成物 |
| JP4149154B2 (ja) * | 2001-09-28 | 2008-09-10 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| JP3827290B2 (ja) * | 2001-10-03 | 2006-09-27 | 富士写真フイルム株式会社 | ポジ型感光性組成物 |
| JP3836359B2 (ja) | 2001-12-03 | 2006-10-25 | 東京応化工業株式会社 | ポジ型レジスト組成物及びレジストパターン形成方法 |
| KR100979871B1 (ko) | 2002-04-01 | 2010-09-02 | 다이셀 가가꾸 고교 가부시끼가이샤 | ＡｒＦ 엑시머 레이저 레지스트용 중합체 용액의 제조 방법 |
| US7338740B2 (en) | 2003-03-27 | 2008-03-04 | Fujifilm Corporation | Positive resist composition |
| US7279265B2 (en) | 2003-03-27 | 2007-10-09 | Fujifilm Corporation | Positive resist composition and pattern formation method using the same |
| JP4347110B2 (ja) | 2003-10-22 | 2009-10-21 | 東京応化工業株式会社 | 電子線又はｅｕｖ用ポジ型レジスト組成物 |
| JP2006030532A (ja) * | 2004-07-15 | 2006-02-02 | Tokyo Ohka Kogyo Co Ltd | レジスト組成物およびレジストパターン形成方法 |
| JP5148882B2 (ja) * | 2007-01-18 | 2013-02-20 | 株式会社ダイセル | レジスト組成物 |
-
1999
- 1999-11-11 JP JP32134799A patent/JP3948506B2/ja not_active Expired - Lifetime
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