JP2001137756A - Method for applying liquid and device for applying liquid - Google Patents

Method for applying liquid and device for applying liquid

Info

Publication number
JP2001137756A
JP2001137756A JP32035599A JP32035599A JP2001137756A JP 2001137756 A JP2001137756 A JP 2001137756A JP 32035599 A JP32035599 A JP 32035599A JP 32035599 A JP32035599 A JP 32035599A JP 2001137756 A JP2001137756 A JP 2001137756A
Authority
JP
Japan
Prior art keywords
shape
liquid material
coating
syringe
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32035599A
Other languages
Japanese (ja)
Other versions
JP3877038B2 (en
Inventor
Kazumasa Ikushima
和正 生島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Musashi Engineering Co Ltd
Original Assignee
Musashi Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashi Engineering Co Ltd filed Critical Musashi Engineering Co Ltd
Priority to JP32035599A priority Critical patent/JP3877038B2/en
Publication of JP2001137756A publication Critical patent/JP2001137756A/en
Application granted granted Critical
Publication of JP3877038B2 publication Critical patent/JP3877038B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body

Abstract

PROBLEM TO BE SOLVED: To simply and rapidly realize the quantitative discharge of a liquid material. SOLUTION: In a method for pressurizing a liquid material in a syringe and applying a specified amount of the liquid material from a nozzle communicating with the syringe to draw an image, parameters relative to the shape of a drawn image of the applied liquid material, preferably dots or lines, preferably one parameter selected from a group of a section area, an application width, an application height and an application diameter, are measured. Further, the measurements are adjusted so as to allow them to fall within the acceptable value range of the parameters relative to a desired shape of a specified drawn image, and preferably the pressurizing force is adjusted. Thus the method for drawing an image by applying the liquid is performed. The liquid applying device comprises a syringe for storing the liquid material, a pressure regulating means which pressurizes or reduces the pressure of the liquid material in the syringe, a nozzle which communicates with the syringe and has a discharge aperture at the tip, a moving means for moving the nozzle relatively with a work, a measuring means which measures the parameters relative to the shape of the applied liquid material, an arithmetic means which calculates an appropriate pressure upon a signal from the measuring means and preferably a shift pressure input means for inputting a shift pressure value.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業の属する技術分野】本発明は、被着体であるワー
クの表面に液体材料、たとえば、接着剤、ペースト状も
しくはクリーム状の電子材料等を、ワークとノズルとを
相対的に移動させて、所望する均一な幅のパターン形状
に塗布する方法およびその装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method in which a liquid material, for example, an adhesive, a paste-like or cream-like electronic material, and the like are moved on the surface of a work to be adhered by moving the work and a nozzle relatively. The present invention relates to a method and an apparatus for applying a pattern having a desired uniform width.

【0002】[0002]

【従来の技術】液体材料を被着体であるワークの表面
に、所望形状の描画パターンに形成させるには一般に、
液体を吐出する吐出口を先端に具えたノズルを、被着体
であるワークに対向させて配設し、前記ノズルに連通し
液体を貯留するシリンジに適用する加圧力により、前記
ノズルから液体を吐出させながら、点形状については前
記ノズルおよび前記ワークを停止させて、点形状以外の
形状については前記ノズルおよび前記ワークの少なくと
も一方を相対的に移動させることにより行われている。
また、均一な形状に塗布するためには、塗布描画中の液
体加圧力を一定に保つことおよびノズルとワークの相対
移動速度を一定にすることが必要であり、安定して塗布
描画を繰り返すには、ノズル先端の吐出口から吐出され
る液体の流速を、ひいては単位時間当たりの液体材料の
吐出量を描画毎に一定にする必要があるとしている。
2. Description of the Related Art In order to form a drawing pattern of a desired shape on a surface of a work as an adherend, a liquid material is generally formed by:
A nozzle having a discharge port for discharging a liquid at a tip thereof is disposed so as to face a work as an adherend, and the liquid is discharged from the nozzle by a pressure applied to a syringe that communicates with the nozzle and stores the liquid. While discharging, the nozzle and the work are stopped for a point shape, and at least one of the nozzle and the work is relatively moved for a shape other than the point shape.
In addition, in order to apply a uniform shape, it is necessary to maintain a constant liquid pressure during coating and drawing and a constant relative movement speed between the nozzle and the work. States that it is necessary to make the flow rate of the liquid discharged from the discharge port at the tip of the nozzle, and hence the discharge amount of the liquid material per unit time, constant every drawing.

【0003】[0003]

【発明が解決しようとする課題】ところで、液体材料、
特に複合材料で構成された工業用液体材料は、液体材料
それ自身の特性、たとえば粘弾性、流動性、および粘着
性等が経時的に変化するために、液体に適用する圧力を
一定となるよう制御しても、前記特性の経時変化に応じ
てノズル先端から吐出される液体の流速も変化すること
から、安定して塗布描画を繰り返すために、現実的に
は、一定した時間毎に設備を停止させて、描画形状の変
化を測定しこれに応じて液体に適応する圧力を調整する
試行錯誤的なテストを行って、塗布描画されたパターン
形状を維持ないしは向上させることが必要であった。
By the way, a liquid material,
Industrial liquid materials, especially composed of composite materials, have a constant pressure applied to the liquid because the properties of the liquid material itself, such as viscoelasticity, flowability, and tackiness, change over time. Even if the control is performed, the flow rate of the liquid discharged from the nozzle tip also changes in accordance with the temporal change of the characteristics, so that in order to stably repeat the coating and drawing, it is actually necessary to install the equipment at regular intervals. It was necessary to maintain or improve the pattern shape applied and drawn by stopping and performing a trial-and-error test in which a change in the drawing shape was measured and the pressure applied to the liquid was adjusted accordingly, thereby performing a trial and error test.

【0004】さらには、液体材料自身が置かれた環境条
件の履歴が異なると、前記特性にかかる経時変化の度合
いも異なることもあり、同一の製造ロットで生産された
液体材料においてもなお数十%のバラツキを有するた
め、品種毎の塗布パターンにかかる条件を画一的に定義
付けることは不可能であり、液体材料の納入シリンジ毎
の同様のテストもまた不可避であった。
Further, if the history of the environmental conditions in which the liquid material itself is placed is different, the degree of the change over time in the above characteristics may be different, and even a liquid material produced in the same production lot still has several tens of tens. %, It is impossible to uniformly define the conditions for the application pattern for each product type, and the same test for each syringe for delivery of the liquid material has also been inevitable.

【0005】このような設備の停止は、生産能力および
作業能率を低下させる原因となり問題となっており、さ
らに、多品種少量生産におけるように段取り替えを頻繁
に行う場合や、液体特性の変化が急峻な液体材料のよう
に短時間毎に調整を必要とする場合には、特に深刻な問
題となっていた。
[0005] Such a stoppage of the equipment causes a problem of lowering the production capacity and the work efficiency, and is a problem. Further, when the setup is frequently changed as in the case of multi-product small-quantity production, or when the liquid characteristic changes. This is a particularly serious problem when adjustment is required every short time, such as in a steep liquid material.

【0006】本発明は、従来技術が抱えるこのような問
題点に鑑みてなされたものであり、それの目的とすると
ころは、シリンジ毎におよび定期的に、所望する塗布形
状を形成させるための試行錯誤的なテストを繰り返す必
要無しに、前記テストにかかる装置の停止を不用ならし
め、液体材料の定量吐出を簡易迅速に実現して、作業能
率を大きく向上させることができる液体材料の吐出方法
と、前記方法を具えた装置を提案することにある。
The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to form a desired coating shape for each syringe and periodically. Dispensing method of liquid material capable of eliminating the need to repeat the trial and error test, eliminating the need to stop the apparatus for the test, realizing simple and quick quantitative discharge of the liquid material, and greatly improving work efficiency. And to propose an apparatus comprising said method.

【0007】[0007]

【課題を解決するための手段】本発明は、シリンジ内の
液体材料を加圧してシリンジに連通するノズルから所定
量の液体材料を塗布描画する方法において、塗布した液
体材料の描画形状に関するパラメータを計測し、当該計
測値が所望とする規定描画形状に関するパラメータの許
容する範囲の値に入るように調整する、好ましくは加圧
力を調整することにより行う液体の塗布描画方法を要旨
としている。上記の所望とする規定描画形状が、点また
は線であり、その場合、本発明は、シリンジ内の液体材
料を加圧してシリンジに連通するノズルから所定量の液
体材料を塗布描画する方法において、塗布した液体材料
の点または線の形状に関するパラメータを計測し、当該
計測値が所望とする点または線の形状に関する当該パラ
メータの許容する範囲の値に入るように調整する、好ま
しくは加圧力を調整する液体の塗布描画方法である。
According to the present invention, there is provided a method of applying a predetermined amount of liquid material from a nozzle communicating with a syringe by pressurizing a liquid material in a syringe. The gist of the invention is a liquid coating / drawing method in which measurement is performed and the measured value is adjusted so as to fall within a value within a range of a parameter relating to a desired prescribed drawing shape, preferably by adjusting a pressing force. In the method of applying and drawing a predetermined amount of liquid material from a nozzle communicating with the syringe by pressurizing the liquid material in the syringe, in the case where the desired prescribed drawing shape is a point or a line, Measure the parameters related to the shape of the point or line of the applied liquid material, and adjust the measured value to be within the range of the parameter permissible for the desired point or line shape, preferably adjust the pressing force This is a liquid application drawing method.

【0008】上記の所望とする規定描画形状に関するパ
ラメータが、断面積、塗布幅、塗布高および塗布径から
なる群から選ばれる一のパラメータであり、その場合、
本発明は、シリンジ内の液体材料を加圧してシリンジに
連通するノズルから所定量の液体材料を塗布描画する方
法において、塗布した液体材料の描画形状に関する、好
ましくは点または線の形状に関する断面積、塗布幅、塗
布高および塗布径からなる群から選ばれる一のパラメー
タを計測し、当該計測値が所望とする規定描画形状、好
ましくは点または線の形状に関する当該パラメータの許
容する範囲の値に入るように調整する、好ましくは加圧
力を調整する液体の塗布描画方法である。
The parameter relating to the desired prescribed drawing shape is one parameter selected from the group consisting of a cross-sectional area, a coating width, a coating height, and a coating diameter.
The present invention relates to a method for applying and drawing a predetermined amount of liquid material from a nozzle communicating with the syringe by pressurizing the liquid material in the syringe, wherein the cross-sectional area relates to the drawing shape of the applied liquid material, preferably to the shape of a point or a line. Measure one parameter selected from the group consisting of a coating width, a coating height and a coating diameter, and set the measured value to a desired defined drawing shape, preferably a value within a permissible range of the parameter with respect to a point or line shape. This is a method for applying and drawing a liquid in which the pressure is adjusted so as to enter, preferably the pressure is adjusted.

【0009】所望とする規定描画形状に関するパラメー
タの値に許容する範囲を設け、当該計測値が、その許容
する範囲より大きい場合または小さい場合に、当該許容
する範囲に入るように調整するものであり、その場合、
本発明は、シリンジ内の液体材料を加圧してシリンジに
連通するノズルから所定量の液体材料を塗布描画する方
法において、塗布した液体材料の描画形状に関する、好
ましくは点または線の形状に関するパラメータ、好まし
くは断面積、塗布幅、塗布高および塗布径からなる群か
ら選ばれる一のパラメータを計測し、その許容する範囲
より大きい場合または小さい場合に、当該計測値が所望
とする規定描画形状、好ましくは点または線の形状に関
する当該パラメータの許容する範囲の値に入るように調
整する、好ましくは加圧力を調整する液体の塗布描画方
法である。
An allowable range is provided for a parameter value relating to a desired prescribed drawing shape, and if the measured value is larger or smaller than the allowable range, the parameter is adjusted so as to fall within the allowable range. ,In that case,
The present invention is directed to a method of applying and drawing a predetermined amount of liquid material from a nozzle communicating with the syringe by pressurizing the liquid material in the syringe, the drawing shape of the applied liquid material, preferably a parameter relating to the shape of a point or a line, Preferably measures one parameter selected from the group consisting of cross-sectional area, application width, application height and application diameter, and if it is larger or smaller than its allowable range, the measured value is a desired prescribed drawing shape, preferably Is a liquid application / drawing method for adjusting the parameters so as to fall within a range allowed by the parameter relating to the shape of a point or a line, preferably adjusting the pressing force.

【0010】上記の調整は一定の幅ずつ行い、さらに改
めて塗布した描画形状に関するパラメータの計測を行
い、当該計測値が当該許容する範囲に入るまで繰り返し
て調整するものであり、その場合、本発明は、シリンジ
内の液体材料を加圧してシリンジに連通するノズルから
所定量の液体材料を塗布描画する方法において、塗布し
た液体材料の描画形状に関する、好ましくは点または線
の形状に関するパラメータ、好ましくは断面積、塗布
幅、塗布高および塗布径からなる群から選ばれる一のパ
ラメータを計測し、その許容する範囲より大きい場合ま
たは小さい場合に、当該計測値が所望とする規定描画形
状、好ましくは点または線の形状に関する当該パラメー
タの許容する範囲の値に入るように調整し、その調整は
一定の幅ずつ行い、さらに改めて塗布した描画形状に関
するパラメータの計測を行い、当該計測値が当該許容す
る範囲に入るまで繰り返して調整する、好ましくは加圧
力を調整する液体の塗布描画方法である。
[0010] The above adjustment is performed by a predetermined width, and the parameters relating to the applied drawing shape are measured again, and the adjustment is repeatedly performed until the measured value falls within the permissible range. In a method of applying and drawing a predetermined amount of liquid material from a nozzle communicating with the syringe by pressurizing the liquid material in the syringe, a parameter relating to a drawing shape of the applied liquid material, preferably a point or line shape, preferably Measure one parameter selected from the group consisting of cross-sectional area, coating width, coating height and coating diameter, and if it is larger or smaller than the allowable range, the measured value is a desired prescribed drawing shape, preferably a point Alternatively, adjust the line shape so that it falls within the allowable range of the parameter, and make the adjustment in fixed width steps. Perform the measurement of parameters relating to newly coated drawn shape, the measured value is adjusted repeatedly until it enters the range of the allowable, preferably applied drawing method of the liquid for adjusting the pressure.

【0011】また、本発明は、液体材料を貯留するシリ
ンジと、前記シリンジ内の液体材料を加圧または減圧す
る調圧手段と、前記シリンジに連通し先端に吐出口を具
えるノズルと、前記ノズルと前記ワークとを相対的に移
動する移動手段と、塗布された液体材料の形状に関する
パラメータを計測する計測手段と、計測手段からの信号
から適正圧力を算出する演算部とを具える液体塗布装置
を要旨としている。
[0011] The present invention also provides a syringe for storing a liquid material, pressure regulating means for pressurizing or depressurizing the liquid material in the syringe, a nozzle communicating with the syringe and having a discharge port at a distal end, and A liquid application device comprising: a moving unit that relatively moves a nozzle and the work; a measuring unit that measures a parameter related to a shape of the applied liquid material; and a calculation unit that calculates an appropriate pressure from a signal from the measuring unit. The device is the gist.

【0012】上記の形状に関するパラメータを計測する
計測手段が、線幅、断面積、塗布高および/または塗布
径の塗布形状を計測する計測手段であり、その場合、本
発明は、液体材料を貯留するシリンジと、前記シリンジ
内の液体材料を加圧または減圧する調圧手段と、前記シ
リンジに連通し先端に吐出口を具えるノズルと、前記ノ
ズルと前記ワークとを相対的に移動する移動手段と、塗
布された液体材料の線幅、断面積、塗布高および/また
は塗布径の塗布形状を計測する計測手段と、計測手段か
らの信号から適正圧力を算出する演算部とを具える液体
塗布装置である。
The measuring means for measuring the parameters relating to the shape is a measuring means for measuring a coating shape of a line width, a cross-sectional area, a coating height and / or a coating diameter. A syringe, a pressure regulating unit for pressurizing or depressurizing the liquid material in the syringe, a nozzle communicating with the syringe and having a discharge port at a tip thereof, and a moving unit for relatively moving the nozzle and the work. And a measuring unit for measuring a line width, a cross-sectional area, a coating height and / or a coating diameter of the applied liquid material, and a calculating unit for calculating an appropriate pressure from a signal from the measuring unit. Device.

【0013】シフト圧力値を入力するシフト圧力入力手
段を具えてなり、その場合、本発明は、その場合、本発
明は、液体材料を貯留するシリンジと、前記シリンジ内
の液体材料を加圧または減圧する調圧手段と、前記シリ
ンジに連通し先端に吐出口を具えるノズルと、前記ノズ
ルと前記ワークとを相対的に移動する移動手段と、塗布
された液体材料の形状に関するパラメータを計測する計
測手段、好ましくは線幅、断面積、塗布高および/また
は塗布径の塗布形状を計測する計測手段と、計測手段か
らの信号から適正圧力を算出する演算部と、シフト圧力
値を入力するシフト圧力入力手段とを具える液体塗布装
置である。
[0013] The present invention further comprises a shift pressure input means for inputting a shift pressure value. In this case, the present invention provides a syringe for storing a liquid material and a pressurizing or pressurizing liquid material in the syringe. Pressure regulating means for reducing pressure, a nozzle communicating with the syringe and having a discharge port at the tip, a moving means for relatively moving the nozzle and the work, and measuring parameters relating to the shape of the applied liquid material. Measuring means, preferably measuring means for measuring a coating shape of a line width, a cross-sectional area, a coating height and / or a coating diameter, an arithmetic unit for calculating an appropriate pressure from a signal from the measuring means, and a shift for inputting a shift pressure value This is a liquid application device including a pressure input unit.

【0014】[0014]

【発明の実施の形態】本発明の方法の好ましい態様は、
所望とする規定塗布形状値に対し、規定塗布形状値を含
む規定塗布形状範囲を設け、前記規定塗布形状範囲の上
限を上限塗布形状値、前記規定塗布形状範囲の下限を下
限塗布形状値として、規定塗布形状値に許容する幅を定
め、塗布した描画形状を計測した塗布形状計測値が、上
限塗布値より大きいまたは下限塗布値より小さい場合
に、予め定めたシフト圧力値の値分を、上限塗布値より
多い場合は低く、下限塗布値より少ない場合は高く任意
の加圧力をシフトさせて、さらに改めて塗布した描画形
状の計測を行い、塗布形状計測値が規定塗布形状範囲に
入るまで繰り返して加圧力を調整する液体の塗布描画方
法である。より具体的には、シリンジ内の液体材料を加
圧してシリンジに連通するノズルから所定量の液体材料
を塗布するに当たって、任意の加圧力により液体材料を
塗布した点または線の断面積または塗布幅または塗布高
または塗布径を計測し、加圧力と断面積または塗布幅ま
たは塗布高または塗布径との比例関係に基づき、単位時
間当たりの所要吐出量に対する加圧力を求める液体の塗
布描画方法である。
DETAILED DESCRIPTION OF THE INVENTION Preferred embodiments of the method of the present invention
For the desired prescribed application shape value, a prescribed application shape range including the prescribed application shape value is provided, the upper limit of the prescribed application shape range is the upper limit application shape value, and the lower limit of the prescribed application shape range is the lower limit application shape value, Define the allowable width for the prescribed application shape value, and when the application shape measurement value that measures the applied drawing shape is larger than the upper limit application value or smaller than the lower limit application value, the value of the predetermined shift pressure value is set to the upper limit If the applied value is larger than the lower applied value, lower the applied value, shift the applied pressure higher, measure the applied drawing shape again, and repeat until the applied shape measured value falls within the specified applied shape range. This is a liquid application / drawing method for adjusting the pressing force. More specifically, in applying a predetermined amount of the liquid material from a nozzle communicating with the syringe by pressurizing the liquid material in the syringe, a cross-sectional area or a coating width of a point or a line where the liquid material is applied by an arbitrary pressing force Or, a liquid application drawing method in which a coating height or a coating diameter is measured and a pressing force with respect to a required discharge amount per unit time is obtained based on a proportional relationship between a pressing force and a sectional area or a coating width or a coating height or a coating diameter. .

【0015】本発明の装置の好ましい態様は、液体材料
を貯留するシリンジと、前記シリンジ内の液体材料を加
圧または減圧する調整手段と、前記シリンジに連通し先
端に吐出口を具えるノズルと、前記ノズルと前記ワーク
とを相対的に移動する移動手段と、塗布された液体材料
の線幅および断面積および塗布高および塗布径等の塗布
形状を計測する計測手段と、計測手段からの信号から適
正圧力を算出する演算部と、を具える液体塗布装置であ
る。
A preferred embodiment of the apparatus according to the present invention includes a syringe for storing a liquid material, an adjusting means for pressurizing or depressurizing the liquid material in the syringe, and a nozzle which communicates with the syringe and has a discharge port at a tip. Moving means for relatively moving the nozzle and the work, measuring means for measuring a coating shape such as a line width and a cross-sectional area of the applied liquid material and a coating height and a coating diameter, and a signal from the measuring means. And a calculation unit for calculating an appropriate pressure from the liquid application device.

【0016】描画形状は特に制限は無く、代表的な描画
形状は、複数の線分で構成される図形である。ここで線
分とは、描画線で構成する描画形状の線状体の部分を指
している。描画形状が例えば図2の四角形である場合、
4つの線分で構成される図形である。液体材料(ペース
ト)の描画線で描画形状を形成する手段は、ノズル、ペ
ースト、ペーストを貯留する容器およびペースト供給手
段からなり、ペーストを貯留する容器からのペーストを
ノズルから定量吐出する装置であって、本発明の方法を
実現できるものであれば特に制限がない。
The drawing shape is not particularly limited, and a typical drawing shape is a figure composed of a plurality of line segments. Here, the line segment refers to a linear portion of a drawing shape composed of drawing lines. If the drawing shape is, for example, a square in FIG. 2,
This is a figure composed of four line segments. The means for forming the drawing shape with the drawing lines of the liquid material (paste) includes a nozzle, a paste, a container for storing the paste, and a paste supply means, and is an apparatus for discharging a fixed amount of the paste from the container for storing the paste from the nozzle. There is no particular limitation as long as the method of the present invention can be realized.

【0017】[0017]

【作用】本発明をその作用の観点から説明する(図4、
5のフローチャート参照)。塗布描画作業を開始する場
合、またはシリンジ内の液体を使い果たし、液体材料が
充填されたシリンジに交換する場合、所望する描画パタ
ーンを構成する描画線または点の規定塗布形状値、たと
えば、塗布断面積、塗布径、塗布高、塗布幅に対し、実
際にワーク表面上に液体材料を塗布したときの塗布形状
値が前記規定塗布形状値となるよう調整する作業が必要
となる。
The present invention will be described in terms of its operation (FIG. 4,
5). When starting a coating drawing operation, or when replacing the syringe with a liquid filled with liquid material in the syringe, a prescribed coating shape value of a drawing line or a point constituting a desired drawing pattern, for example, a coating cross-sectional area In addition, it is necessary to adjust the application shape value when the liquid material is actually applied onto the work surface with respect to the application diameter, the application height, and the application width so as to be the specified application shape value.

【0018】この作業は、予め定めた任意の加圧力を液
体に適用し、ノズル先端の吐出口とワーク表面との相対
移動速度を、実際に所望形状を塗布描画する速度と等し
くして、簡易な形状、具体的には線または点を描画す
る。いかなる塗布パターンでも、これは点と線の組み合
わせにより構成することができるから、所望する塗布パ
ターンが複雑な形状でも、簡易な形状に置換して調整す
ることが可能であり、ひいては簡易かつ迅速な調整が可
能である。
In this operation, a predetermined arbitrary pressure is applied to the liquid, the relative movement speed between the discharge port at the tip of the nozzle and the work surface is made equal to the speed at which the desired shape is actually applied and drawn, and the operation is simplified. Draw a simple shape, specifically a line or a point. Since any coating pattern can be constituted by a combination of dots and lines, even if the desired coating pattern has a complicated shape, it can be replaced with a simple shape and adjusted, and thus simple and quick. Adjustments are possible.

【0019】この描画した線または点の任意の部分の塗
布形状値を計測し、この塗布形状計測値が所望とする前
記規定塗布形状値であるか比較し、前記塗布形状計測値
と前記規定塗布形状値との関係から好適な加圧力を算出
する。また、塗布形状の計測は、好ましくは複数個所行
い統計処理を施して好適な加圧力を算出することが望ま
しい。
The coating shape value of an arbitrary portion of the drawn line or point is measured, and it is compared whether the measured coating shape value is the desired specified coating shape value. A suitable pressing force is calculated from the relationship with the shape value. In addition, it is preferable that the measurement of the application shape is performed at a plurality of places, and that a statistical processing is performed to calculate a suitable pressing force.

【0020】塗布形状値と加圧力とは概ね比例関係にあ
るが、使用する液体の種類、塗布条件および環境条件に
よっては、微調整が必要である。
Although the coating shape value and the pressing force are roughly proportional, fine adjustment is required depending on the type of liquid used, coating conditions and environmental conditions.

【0021】また、規定塗布形状値に対し、規定塗布形
状値を中央として規定塗布形状範囲を設け、前記規定塗
布形状範囲の上限を上限塗布形状値、前記規定塗布形状
範囲の下限を下限塗布形状値として、規定塗布形状値に
許容する幅を定め、前記と同様な簡易な形状の塗布を行
ってこれを計測した塗布形状計測値が、上限塗布値より
大きいまたは下限塗布値より小さい場合に、予め定めた
シフト圧力値の値分を、上限塗布値より多い場合は低
く、下限塗布値より少ない場合は高く任意の加圧力をシ
フトさせて、さらに描画を行い計測し、塗布形状計測値
が規定塗布形状範囲に入るまで繰り返して好適な加圧力
に調整する方法もある。この方法は、前記微調整が不用
であるため、前記塗布形状値と前記加圧力との関係が未
知である場合には極めて有効である。この方法において
もまた、塗布形状の計測は、好ましくは複数個所行い統
計処理を施して塗布形状計測値が規定塗布形状範囲にあ
るか否かの判断を行うことが望ましい。
In addition, a prescribed coating shape range is set with respect to the prescribed coating shape value with the prescribed coating shape value as the center, and the upper limit of the prescribed coating shape range is the upper limit coating shape value, and the lower limit of the prescribed coating shape range is the lower limit coating shape. As a value, the width allowed in the prescribed application shape value is determined, and the application shape measurement value obtained by performing application of the same simple shape as described above and measuring this is larger than the upper limit application value or smaller than the lower limit application value, A predetermined shift pressure value is shifted by an arbitrary pressing force lower than the upper limit application value when the value is larger than the upper limit application value, and higher when the shift pressure value is lower than the lower limit application value, and further measured by drawing. There is also a method of repeatedly adjusting the pressure to a suitable pressure until the pressure falls within the coating shape range. This method is extremely effective when the relationship between the coating shape value and the pressing force is unknown because the fine adjustment is unnecessary. Also in this method, it is preferable that measurement of the application shape is performed at a plurality of locations and statistical processing is performed to determine whether or not the measured value of the application shape is within a specified application shape range.

【0022】このようにして好適な加圧力を調整するこ
とで、塗布描画を行うまでの調整時間を短縮し、かつそ
の作業を容易にすることができ、所望する形状を迅速に
形成させることができる。
By adjusting the suitable pressing force in this way, the adjustment time until coating and drawing is performed can be shortened, and the work can be facilitated, so that a desired shape can be formed quickly. it can.

【0023】塗布描画作用を開始してからある時間を経
過すると、前記液体材料自身の特性が変化するため描画
形状に歪みまたは乱れが生じてくるから、一般的には、
一のワークまたは規定枚数のワークを塗布描画した後
に、塗布形状計測値を測定して良・不良判定が行われて
いる。本発明においては、この良・不良判定で測定した
塗布形状計測値を利用して、好適な加圧力に調整するこ
とができるため、良・不良判定毎に調整が行えるから、
描画形状の調整にかかる不要な装置の停止を不要ならし
め、継続かつ連続して良好な形状の塗布パターンを形成
させることができる。
When a certain period of time has elapsed since the start of the coating / drawing operation, the characteristics of the liquid material itself change, causing distortion or disturbance in the drawing shape.
After one workpiece or a specified number of workpieces are applied and drawn, the measurement of the applied shape is measured to determine good or bad. In the present invention, since the applied pressure can be adjusted to a suitable pressing force by using the application shape measurement value measured in the good / bad determination, since adjustment can be performed for each good / bad determination,
Unnecessary stoppage of the apparatus for adjusting the drawing shape is unnecessary, and a coating pattern having a good shape can be continuously and continuously formed.

【0024】[0024]

【実施例】以下、図面にもとづいて本発明の1実施例を
説明するが、本発明の細部の構成は同実施例によって限
定されるものではない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings, but the detailed structure of the present invention is not limited to the embodiment.

【0025】実施例1 以下、図面にもとづいて本発明の一実施例を説明する
が、本発明の細部の構成は同実施例によって限定される
ものではない。図1は、本発明の概観図であり、塗布装
置の基台は、水平枠部20と垂直枠部21とを備えてお
り、水平枠部20にはワークテーブル2がX軸及びY軸
方向に移動可能に載置され、垂直枠部21にはシリンジ
12等を保持する保持部22が、高さ調節可能に支持さ
れている。
Embodiment 1 Hereinafter, an embodiment of the present invention will be described with reference to the drawings, but the detailed configuration of the present invention is not limited to the embodiment. FIG. 1 is a schematic view of the present invention. The base of the coating apparatus includes a horizontal frame 20 and a vertical frame 21, and the work table 2 is mounted on the horizontal frame 20 in the X-axis and Y-axis directions. The holding portion 22 for holding the syringe 12 and the like is supported on the vertical frame portion 21 so as to be adjustable in height.

【0026】図中2は被着体であるワーク1を載置する
ワークテーブル2であり、X軸モータ4の回転に連動し
て回転するX軸ボールネジ5を移動するX軸ナット3と
接続され、このX軸ナット3はX軸モータ4の回転に比
例してX軸方向に移動する。さらにX軸ナット3及びX
軸ボールネジ5及びX軸モータ4で構成されたX軸ユニ
ットが、Y軸モータ8の回転に連動して回転するY軸ボ
ールネジ9をY軸モータ8の回転に比例してY軸方向に
移動するY軸ナット7に接続されている。このような機
構により、ワークテーブル2はX軸方向及びY軸方向に
自由に移動が可能である。
In the drawing, reference numeral 2 denotes a work table 2 on which a work 1 to be adhered is placed, which is connected to an X-axis nut 3 which moves an X-axis ball screw 5 which rotates in conjunction with the rotation of an X-axis motor 4. The X-axis nut 3 moves in the X-axis direction in proportion to the rotation of the X-axis motor 4. X-axis nut 3 and X
An X-axis unit including an axis ball screw 5 and an X-axis motor 4 moves a Y-axis ball screw 9 that rotates in conjunction with the rotation of the Y-axis motor 8 in the Y-axis direction in proportion to the rotation of the Y-axis motor 8. It is connected to a Y-axis nut 7. With such a mechanism, the work table 2 can freely move in the X-axis direction and the Y-axis direction.

【0027】図中22は先端に塗布ノズル23を備え、
密封可能なシリンジ12を保持する保持部であり、シリ
ンジ12の側方部位には、ワーク1上に塗布した液体材
料の状態を監視するカメラ18及び該カメラで撮影した
画像を処理する画像処理部19が設けられており、画像
処理部19で処理された画像情報は制御部15に送られ
る。
In the drawing, 22 is provided with a coating nozzle 23 at the tip,
A holding part for holding the sealable syringe 12, a camera 18 for monitoring the state of the liquid material applied on the work 1, and an image processing part for processing an image taken by the camera, at a side portion of the syringe 12. The image information processed by the image processing unit 19 is sent to the control unit 15.

【0028】上記例では、塗布ノズル23をシリンジ1
2に一体的に設けた例を説明したが、塗布ノズル23と
シリンジ12を別体にし、両者を継ぎ手を用いて接続分
離可能にするとシリンジ12を交換するだけで液体材料
の補給ができ、また、保持部22を上下方向(Z軸方
向)の位置調節可能に構成すると、塗布ノズル23とワ
ーク1の塗布面との間隔を調整でき、液体材料のより正
確な塗布を行うことができ、さらに、画像処理部19を
カメラ18と別体にして、垂直枠体21外に設けカメラ
18から送られて来る画像信号を処理するように構成す
ると、それらの保守点検が容易になる。
In the above example, the application nozzle 23 is connected to the syringe 1
Although the example in which the coating nozzle 23 and the syringe 12 are integrally provided has been described, if the coating nozzle 23 and the syringe 12 are separated and the connection and disconnection thereof can be performed using a joint, the liquid material can be replenished only by replacing the syringe 12, and When the holding unit 22 is configured to be adjustable in the vertical direction (Z-axis direction), the distance between the application nozzle 23 and the application surface of the work 1 can be adjusted, and more accurate application of the liquid material can be performed. If the image processing section 19 is provided separately from the camera 18 and is provided outside the vertical frame 21 so as to process the image signal sent from the camera 18, maintenance and inspection thereof can be facilitated.

【0029】本実施例においては、エア源10から供給
される高圧空気をディスペンサ13で所望圧力に調圧
し、エアチューブ11を介して密閉型のシリンジ12内
に供給し、シリンジ12内の液体材料の上面に作用させ
るべく構成されており、塗布描画時には、前記調圧され
加圧空気が所望時間だけエアチューブ11を介してシリ
ンジ12内の液体材料に作用して塗布ノズル23より液
体材料を吐出させる。
In this embodiment, the high-pressure air supplied from the air source 10 is adjusted to a desired pressure by the dispenser 13, supplied to the closed type syringe 12 through the air tube 11, and the liquid material in the syringe 12 is supplied. During application and drawing, the pressure-regulated and pressurized air acts on the liquid material in the syringe 12 via the air tube 11 for a desired time to discharge the liquid material from the application nozzle 23. Let it.

【0030】また、本発明の液体材料の塗布装置は、制
御部15、及び、規定塗布形状値入力手段14、規定圧
力入力手段16及びシフト圧力入力手段17からなる操
作部を備えており、制御部15は、後述の入力手段から
の入力情報と画像処理部19によって処理された画像情
報とにもとづいて、シリンジ12内に供給するエアの圧
力を調整すべくディスペンサ13を制御すると共に、所
望の塗布形状を得るためにX軸モータ4及びY軸モータ
8を制御するものであり、操作部を構成する、規定塗布
形状値入力手段14は所望とする塗布形状にかかる規定
塗布形状値を入力し、規定圧力入力手段16は規定塗布
幅とするに好適な圧力値を入力し、シフト圧力入力手段
17はシフト圧力値を入力するものである。
The liquid material coating apparatus of the present invention includes a control unit 15 and an operation unit including a specified coating shape value input unit 14, a specified pressure input unit 16, and a shift pressure input unit 17. The unit 15 controls the dispenser 13 to adjust the pressure of the air supplied into the syringe 12 based on input information from an input unit described later and image information processed by the image processing unit 19, The X-axis motor 4 and the Y-axis motor 8 are controlled in order to obtain a coating shape, and a specified coating shape value input means 14 constituting an operation unit inputs a specified coating shape value relating to a desired coating shape. The specified pressure input means 16 inputs a pressure value suitable for a specified application width, and the shifted pressure input means 17 inputs a shift pressure value.

【0031】次ぎに、上記のとおり構成された液体の塗
布装置を用いた塗布方法について説明する。液体材料を
塗布描画する作業を始める場合、描画が設計されたまた
は所望する形状とするために塗布形状調整作業を行う。
これは、技術者が試行錯誤的なテストを繰り返して、塗
布描画を所望とする形状に調整していたが、本発明にお
いては予め所望とする塗布形状にかかるパラメータを入
力しておくことにより、自動的に行うことができる。
Next, a coating method using the liquid coating apparatus configured as described above will be described. When the operation of applying and drawing a liquid material is started, an application shape adjustment operation is performed to make the drawing a designed or desired shape.
In this, the technician repeated trial and error tests to adjust the coating and drawing to the desired shape, but in the present invention, by inputting parameters relating to the desired coating shape in advance, Can be done automatically.

【0032】実施例2 塗布作業前の塗布形状(描画形状)の調整に関する作業
の流れは、図4のフローチャート図に示すとおりであ
る。
Example 2 The flow of the operation for adjusting the coating shape (drawing shape) before the coating operation is as shown in the flowchart of FIG.

【0033】実施例3 塗布描画作業中の塗布形状(描画形状)の調整は、下記
(1)または(2)の方法で行う(図5参照)。 (1)所望形状の塗布描画を行い、その後に形状計測を
行う方法。この計測を行っている間は描画は行わない。 (2)所望形状の塗布描画を行いながら、形状計測を同
時に行う方法。ノズルを中心として回転する回転機構に
取り付けられた計測手段が、塗布描画作業を行っている
間は、常にノズルの進行方向の直後に位置するように配
置し、塗布直後の描画形状を計測する。この計測値を基
に、次のワークの表面に塗布する描画作業に、この測定
結果を反映させる。
Embodiment 3 The coating shape (drawing shape) during the coating / drawing operation is adjusted by the following method (1) or (2) (see FIG. 5). (1) A method of performing coating drawing of a desired shape, and thereafter measuring the shape. No drawing is performed during this measurement. (2) A method of simultaneously performing shape measurement while performing application drawing of a desired shape. The measuring unit attached to the rotating mechanism that rotates about the nozzle is arranged so as to always be located immediately after the nozzle in the advancing direction during the coating / drawing operation, and measures the drawing shape immediately after the coating. Based on this measured value, the result of this measurement is reflected in a drawing operation to be applied to the surface of the next work.

【0034】[0034]

【発明の効果】以上のように本発明によると、所望する
描画パターンの形状にかかる好適な液体加圧力を迅速か
つ容易に調整することができ、さらには、連続したまた
は長時間の塗布作業において、液体材料の性質の変化、
特には粘度の変化が発生したところで、塗布形状を計測
した値から好適な加圧力に常に補正可能であることか
ら、塗布形状の調整にかかる装置の停止を不用ならし
め、さらには、調整作業が自動で行えることから技術者
の調整が不要となり、技術者の技術力にかかるバラツキ
が排除され調整が安定して行うことができるうえ、安全
に調整がおこなうことができる。
As described above, according to the present invention, it is possible to quickly and easily adjust a suitable liquid pressure applied to a desired drawing pattern shape. Changes in the properties of liquid materials,
Especially, when the viscosity changes, the applied pressure can always be corrected to a suitable pressing force from the measured value of the applied shape, so it is not necessary to stop the apparatus for adjusting the applied shape, and furthermore, the adjustment work is not required. Since the adjustment can be performed automatically, the adjustment by the technician is not required, the variation in the technical ability of the technician is eliminated, the adjustment can be performed stably, and the adjustment can be performed safely.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の概観図である。FIG. 1 is a schematic view of the present invention.

【図2】塗布した液体材料の描画形状の一態様を示す図
面である。
FIG. 2 is a drawing showing one embodiment of a drawing shape of a liquid material applied.

【図3】塗布した液体材料の描画形状の別の一態様を示
す図面である。
FIG. 3 is a drawing showing another embodiment of the drawing shape of the applied liquid material.

【図4】塗布作業前の描画形状の調整に関する作業の流
れを示すフローチャート図である。
FIG. 4 is a flowchart showing a flow of work related to adjustment of a drawing shape before a coating work.

【図5】塗布描画作業中の描画形状の調整に関する作業
の流れを示すフローチャート図である。
FIG. 5 is a flowchart showing a work flow relating to adjustment of a drawing shape during a coating drawing operation.

【符号の説明】[Explanation of symbols]

1 ワーク 2 ワークテーブル 10 エア源 11 エアチューブ 12 シリンジ 13 ディスペンサ 14 規定塗布形状値入力手段 15 制御部 16 規定圧力入力手段 17 シフト圧力入力手段 18 カメラ 19 画像処理部 23 塗布ノズル REFERENCE SIGNS LIST 1 work 2 work table 10 air source 11 air tube 12 syringe 13 dispenser 14 prescribed coating shape value input means 15 control unit 16 prescribed pressure input means 17 shift pressure input means 18 camera 19 image processing unit 23 coating nozzle

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01L 21/52 H01L 21/52 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01L 21/52 H01L 21/52

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 シリンジ内の液体材料を加圧してシリン
ジに連通するノズルから所定量の液体材料を塗布描画す
る方法において、塗布した液体材料の描画形状に関する
パラメータを計測し、当該計測値が所望とする規定描画
形状に関する当該パラメータの許容する範囲の値に入る
ように調整する液体の塗布描画方法。
In a method for applying and drawing a predetermined amount of a liquid material from a nozzle communicating with a syringe by pressurizing a liquid material in a syringe, a parameter relating to a drawing shape of the applied liquid material is measured, and the measured value is a desired value. A liquid application / drawing method for adjusting the value so as to fall within a range of an allowable range of the parameter regarding the prescribed drawing shape.
【請求項2】 上記の所望とする規定描画形状が、点ま
たは線である請求項1の液体の塗布描画方法。
2. The method according to claim 1, wherein the desired prescribed drawing shape is a point or a line.
【請求項3】 上記の所望とする規定描画形状に関する
パラメータが、断面積、塗布幅、塗布高および塗布径か
らなる群から選ばれる一のパラメータである請求項1ま
たは2の液体の塗布描画方法。
3. The method according to claim 1, wherein the parameter relating to the desired prescribed drawing shape is one parameter selected from the group consisting of a cross-sectional area, a coating width, a coating height, and a coating diameter. .
【請求項4】 所望とする規定描画形状に関するパラメ
ータの値に許容する範囲を設け、当該計測値が、その許
容する範囲より大きい場合または小さい場合に、当該許
容する範囲に入るように調整する請求項1、2または3
の液体の塗布描画方法。
4. An allowable range for a parameter value relating to a desired prescribed drawing shape, and if the measured value is larger or smaller than the allowable range, adjustment is made so that the measured value falls within the allowable range. Item 1, 2 or 3
Liquid drawing method.
【請求項5】 上記の調整は一定の幅ずつ行い、さらに
改めて塗布した描画形状に関するパラメータの計測を行
い、当該計測値が当該許容する範囲に入るまで繰り返し
て調整する請求項4の液体の塗布描画方法。
5. The liquid application according to claim 4, wherein the adjustment is performed by a fixed width at a time, parameters of the applied drawing shape are measured again, and the measurement is repeated until the measured value falls within the allowable range. Drawing method.
【請求項6】 上記の調整は加圧力を調整することによ
り行う請求項1ないし5のいずれかの液体の塗布描画方
法。
6. The method according to claim 1, wherein the adjustment is performed by adjusting a pressing force.
【請求項7】 液体材料を貯留するシリンジと、前記シ
リンジ内の液体材料を加圧または減圧する調圧手段と、
前記シリンジに連通し先端に吐出口を具えるノズルと、
前記ノズルと前記ワークとを相対的に移動する移動手段
と、塗布された液体材料の形状に関するパラメータを計
測する計測手段と、計測手段からの信号から適正圧力を
算出する演算部とを具える液体塗布装置。
7. A syringe for storing a liquid material, pressure regulating means for pressurizing or depressurizing the liquid material in the syringe,
A nozzle that communicates with the syringe and has a discharge port at the tip,
A liquid comprising: a moving unit that relatively moves the nozzle and the workpiece; a measuring unit that measures a parameter related to a shape of the applied liquid material; and a calculation unit that calculates an appropriate pressure from a signal from the measuring unit. Coating device.
【請求項8】 上記の形状に関するパラメータを計測す
る計測手段が、線幅、断面積、塗布高および/または塗
布径の塗布形状を計測する計測手段である請求項7の液
体塗布装置。
8. The liquid coating apparatus according to claim 7, wherein the measuring means for measuring the parameters relating to the shape is a measuring means for measuring a coating shape of a line width, a sectional area, a coating height and / or a coating diameter.
【請求項9】 シフト圧力値を入力するシフト圧力入力
手段を具えてなる請求項7または8の液体塗布装置。
9. The liquid application apparatus according to claim 7, further comprising a shift pressure input means for inputting a shift pressure value.
JP32035599A 1999-11-10 1999-11-10 Liquid application method and apparatus Expired - Lifetime JP3877038B2 (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
JP32035599A JP3877038B2 (en) 1999-11-10 1999-11-10 Liquid application method and apparatus

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JP2001137756A true JP2001137756A (en) 2001-05-22
JP3877038B2 JP3877038B2 (en) 2007-02-07

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ID=18120562

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