JP2001135707A - Turning stopper, method of supplying pressure fluid to the stopper and profiling apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the profiling accuracy of an oscillating element, in a profiling apparatus composed of the oscillating element having a convex hemispherical surface supported turnably on a base having a concave hemispherical surface. SOLUTION: While the state of static pressure generated between a fixed casing 26 and a movable casing 27 keep air feed holes 36 and air entrance holes 29 which makes no contact is maintained, an air passage 30 is fed continuously with compressed air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detent device and a copying device.

[0002]

2. Description of the Related Art For example, there is a copying apparatus used for a chip mounter for transferring a diced semiconductor chip onto a lead frame of a die bonding apparatus. In this copying apparatus, an oscillator having a convex hemisphere is rotatably supported on a base having a concave hemisphere. Then, when the work contact surface (copying surface) of the oscillator at the center of curvature of the convex and concave hemispheres is brought into contact with the specific surface of the semiconductor chip, the oscillator is perpendicular to the X axis and the Y axis on the same plane. Rotate around an axis. By this rotation, the work contact surface of the oscillator is tilted in accordance with the specific surface of the semiconductor chip.
Thereby, the work contact surface of the oscillator becomes parallel to the specific surface of the semiconductor chip.

In such a copying apparatus, since the frictional resistance between the base and the oscillating body is extremely low, the oscillating body is not only about the X-axis and the Y-axis but also perpendicular to the plane including the X-axis and the Y-axis. It turns around the axis. As a result, the copying accuracy is adversely affected.

Therefore, as a means for preventing the rocking body from rotating around the Z axis, a device generally called a gonio stage is known. This goniometer stage is configured by connecting a plurality of swing blocks in series. Arc surfaces extending in the X-axis direction and the Y-axis direction, which are orthogonal to each other in the horizontal direction, are formed at the interfaces of the swing blocks. When performing copying, each swing block is tilted along each arc surface, so that it does not rotate around the Z axis. In such a detent device, it is necessary to minimize the frictional resistance between the oscillating blocks in order to keep the tracing accuracy of the oscillating body from deteriorating. Therefore, it is conceivable that a static pressure is generated between each block by blowing compressed air or the like.

[0005]

However, in the conventional detent device, an air tube or the like for supplying pressurized air is directly connected to the rocking block in order to generate a static pressure between the rocking blocks. ing. Therefore, when the tension of the air tube is applied to the swing block, the swing body is adversely affected, and as a result, the copying accuracy may be reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide a detent device capable of improving the copying accuracy of a swing member, a method of supplying a pressurized fluid to the device, and An object of the present invention is to provide a copying apparatus.

[0007]

In order to solve the above-mentioned problems, according to the first aspect of the present invention, the rotation of the swing member that abuts on a specific surface of an object and follows the same in parallel with the specific surface is performed. In the detent device that regulates, the first movable body that can move only the Y axis and the Z axis out of the X axis and the Y axis that are orthogonal to each other on the same plane and the Z axis that is orthogonal to a plane that includes both axes is fixed. A second movable body provided on the base material and movable only in the X-axis and the Z-axis is provided on the first movable body, and a static pressure is applied between the fixed base material and the first movable body in the X-axis direction. A first pressurized fluid supply means for supplying a pressurized fluid is provided, and a second pressurized fluid for supplying a pressurized fluid for providing a static pressure between the first movable body and the second movable body in the Y-axis direction is provided. A pressurized fluid supply means, and at least a second pressurized fluid supply means of the two pressurized fluid supply means. A fluid passage for allowing the pressurized fluid to pass through the means is provided in the first movable body, and a third pressurized fluid supply means for supplying the pressurized fluid in a non-contact state to the fluid inlet communicating with the fluid passage is provided. That is the gist.

According to the second aspect of the present invention, the X-axis and the Y-axis, which are orthogonal to each other on the same plane, and the Z-axis, which is orthogonal to a plane including both axes, can move only the Y-axis and the Z-axis. 1 movable body, and a second movable body that is movable only in the X-axis and the Z-axis, wherein the first movable body is between the fixed base and the first movable body in the X-axis direction and in the Y-axis direction. A detent device for generating a static pressure by supplying a pressurized fluid through a fluid passage between the fluid passage and the second movable body, wherein the detent device does not contact a fluid introduction port communicating with the fluid passage. The gist is that the pressurized fluid is supplied in the state.

According to a third aspect of the present invention, in the detent device according to the first or second aspect, the first movable body is
The gist of the invention is that it is supported by the second movable body via a supporting means having a weak elastic force.

According to the fourth aspect of the present invention, the fixing member having one of a concave hemispherical surface and a convex hemispherical surface includes:
A swinging member having the other is provided, and the swinging member is brought into contact with a specific surface of the object so that the contact surface is parallel to the specific surface of the object. In the copying apparatus, the fixed member and the swinging member are brought into non-contact with each other by ejecting a pressurized fluid between the fixed member and the swinging member, and the swinging member is moved with respect to the contact surface. A copying apparatus comprising the rotation preventing device according to claim 1, which restricts rotation about an orthogonal axis.

According to a fifth aspect of the present invention, in the copying apparatus according to the fourth aspect, there is provided a position deviation preventing means for holding the movable member at a predetermined position in a state where the movable member is in contact with an object. That is the gist.

The "action" of the present invention will be described below. According to the present invention, between the fixed base in the X-axis direction and the first movable body, and in the Y-axis direction,
A pressurized fluid is supplied between the movable body and the second movable body via a fluid passage, so that a static pressure is generated. The pressurized fluid is supplied to the fluid introduction port communicating with the fluid passage in a non-contact state. Therefore, compared with a case where a tube or the like is connected to the movable body and the pressurized fluid is supplied, for example, the tension of the tube is not applied to the movable body. Therefore, since there is no influence on the oscillating body, the copying accuracy can be improved.

According to the third aspect of the present invention, the first movable body is supported by the second movable body by the supporting means having a weak elastic force. Therefore, despite the simple configuration, each movable body can be relatively moved with a small load.

According to the fifth aspect of the present invention, the movable member that is in contact with the object can be held at a predetermined position by the displacement prevention means. for that reason,
Even when the movable member operates with a very small load, the movable member can be surely held in a state in which the movable member follows the object.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. In the present embodiment, the vertical (vertical) direction of the copying apparatus 10 is defined as a Z-axis direction, and directions orthogonal to the Z-axis direction and orthogonal to each other on the same horizontal plane are defined as an X-axis direction and a Y-axis direction. I do.

1 to 3, an annular porous material 12 having a concave hemispherical surface 12a is provided on the lower surface of a metal base 11. As shown in FIG. As a material for forming the annular porous material 12 as the fixing member, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, and the like, sintered carbon, sintered ceramics, and the like can be used.

A port 13 is formed on one side (left side in FIG. 1) of the base 11, and this port 13 is connected to a pressure supply source (not shown). The port 13 communicates with an annular groove 14 formed in the base 11 via an air passage 13a. The annular groove 14 is opened on the back surface of the annular porous material 12. Then, pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown) to
And, it is ejected from the entire surface of the annular porous material 12 through the annular groove 14.

An annular groove 17 for suction is formed in the concave semi-spherical surface 12a formed on the lower surface of the annular porous material 12. An evacuation port 18 is formed on the other side (the right side in FIG. 1) of the base 11, and a suction pump (not shown) is connected to the evacuation port 18. The evacuation port 18 communicates with the suction annular groove 17 via an air passage 18a. Then, air is sucked from the suction pump through the vacuum port 18 and the air passage 18a, and a suction force by the air acts along the suction annular groove 17.

A metal oscillator 20 is provided on the concave hemispheric surface 12a of the annular porous material 12. Oscillator 20
A convex hemispherical surface 20a is formed on the upper surface of the substrate, and the radius of curvature of the convex hemispherical surface 20a is the same as the radius of curvature of the concave hemispherical surface 12a. Therefore, the convex hemispherical surface 20 a of the oscillator 20 is engaged with the concave hemispherical surface 12 a of the annular porous material 12.

A suction holder 21 for sucking a work W as an object is protruded from a lower surface of a central portion of the oscillating body 20. The oscillating body 20 and the suction holder 21 are integrally movable. Therefore, in the present embodiment, a swing member is constituted by the swing body 20 and the suction holder 21. In addition, the code | symbol R shown in FIG. 1 shows the curvature radius of the convex hemisphere 20a and the concave hemisphere 12a. The tip end surface of the suction holder 21 is a work contact surface, a so-called copying surface, on which the center of rotation C of the oscillating body 20 is located. Incidentally, the angle at which the rocking body 20 is rotatable around the X axis and the Y axis (scanning angle) is set to ± 0.5 ° assuming that the normal state of the balance is 0 °.

A screw 21 a is formed at the base end of the suction holder 21, and the screw 21 a is detachably screwed to the rocking body 20. Therefore, a plurality of types of suction holders 21 having different lengths can be freely replaced. A port 22 is provided on the outer peripheral surface of the suction holder 21. The port 22 is formed with an air passage 23 whose outer end is opened at a tip end surface (hereinafter, referred to as a work contact surface) 21b of the suction holder 21. This air passage 23
Is connected to a suction pump (not shown). Then, air is sucked from the suction pump through the port 22 and the air passage 23.

A detent device 25 is provided above the base 11.
Is provided. The detent device 25 includes a fixed casing 26 as a fixed base member having a rectangular box shape (rectangular shape) having an open lower surface. This fixed casing 2
A movable casing (first movable body) 27 in the shape of a rectangular box having an open lower surface is accommodated in 6.

On the outer surface of the movable casing 27 in the X-axis direction, a first porous material 28 as first pressurized fluid supply means is provided. Almost no gap is formed between the surface of the first porous material 28 and the inner surface of the fixed casing 26. Therefore, the movable casing 27 is allowed to move only in the Y-axis and Z-axis directions with respect to the fixed casing 26. The first porous material 28 is formed in a plate shape, and is made of the same material as the annular porous material 12. In the present embodiment, the distance between the surface of the first porous material 28 and the inner surface of the fixed casing 26 is 5 to 10
It is set to μm.

A movable block 37 is accommodated in the movable casing 27 as a second movable body. On the inner surface of the movable casing 27 in the Y-axis direction, a second porous material 38 is provided as second pressurized fluid supply means. A concave portion 39 communicating with the air passage 30 is formed on the inner surface of the movable casing 27 on the back side of the second porous material 38.

There is hardly any gap between the surface of the second porous material 38 and the outer surface of the movable block 37. Therefore, the movable block 37 is
7 is allowed to move only in the X-axis and Z-axis directions. In the present embodiment, the distance between the surface of the second porous material 38 and the outer surface of the movable block 37 is 5 to 10 μm.
Is set to

An air inlet 29 as a fluid inlet is formed at a location on the air passage 30 at the center of each first porous member 28. Each air inlet 29 communicates with the air passage 30 via a concave portion 31 formed on the back surface of the first porous material 28. On both sides of the fixed casing 26, air supply ports 36 are formed at locations facing the air introduction ports 29 and communicate with the air introduction ports 29 and have a diameter larger than the introduction ports 29. The two air supply ports 36 communicate with each other via a flow path 35 formed in the fixed casing 26. One of the two air supply ports 36 (the left air supply port shown in FIG. 1) is opened to the outside of the fixed casing 26,
An air supply tube 36a connected to a pressure supply source (not shown) is connected to the opening.

The pressurized air sent from the pressure supply source is supplied from each air supply port 36 to the air passage 30 through the air introduction port 29 and each recess 31 in a non-contact state. Then, static pressure is applied to the interface between the fixed casing 26 and the movable casing 27 in the X-axis direction by blowing the pressurized air from the entire surface of the first porous material 28. Therefore, it is possible to supply the pressurized air in the air passage 30 in a state where the air supply port 36 and the air introduction port 29 are not in contact with each other. Therefore, in the present embodiment, the first porous material 28 having the air inlet 29 constitutes a third pressurized fluid supply unit. In short, the first porous material 28 doubles as the first pressurized fluid supply unit and the third pressurized fluid supply unit. In addition, since the pressurized air is ejected from the entire surface of the second porous material 38, a static pressure is generated at the interface between the movable casing 27 and the movable block 37 in the Y-axis direction.

A third porous material 46 is provided on the inner surface of the movable casing 27 in the Z-axis direction. A certain gap is formed between the surface of the third porous material 46 and the upper surface of the movable block 37. Third porous material 4
A recess 47 communicating with the air passage 30 is formed in the movable casing 27 on the back side of the casing 6. And
Pressurized air is supplied from the air supply tube 36 a to the air supply port 3.
6, the third porous material 46 via the air passage 30 and the recess 47
It is squirted from the entire surface. Thereby, a static pressure is applied to the interface between the movable casing 27 and the movable block 37 in the Z-axis direction.

The movable block 37 is formed integrally with the oscillating body 20 via a connecting block 44 projecting from the lower surface thereof. The connection block 44 is loosely inserted into a communication hole 45 formed in the center of the base 11. Thereby, the movable block 37 and the rocking body 20 can move integrally.

Next, the copying apparatus 1 configured as described above
In order to transport a work as an object using 0, the following is performed. Before sucking the work W, the port 13
The pressurized air is supplied through the air passage 13a from above, and the pressurized air is ejected from the entire surface of the annular porous material 12 toward the upper surface of the oscillator 20. Thereby, the oscillator 20 is separated from the annular porous material 12. At the same time, air is sucked from the evacuation port 18 through the air passage 18a,
The inside of the annular groove 17 becomes a negative pressure. As a result, the suction force to the concave hemispheric surface 12a acts near the center of the rocking body 20, and the rocking body 20 is drawn to the base 11. Therefore, the force with which the oscillator 20 separates from the annular porous material 12 and the oscillator 20
The oscillator 20 is rotatably supported in a non-contact state with respect to the annular porous material 12 by balancing the force attracted to the annular porous material 12 side.

The pressurized air sent by each air supply tube 36a flows directly from one air supply port 36 (left side in FIG. 1) to one air introduction port 29 and the flow path 3
5 and the other air supply port (right side in FIG. 1) 36 to the other air introduction port 29. And each air supply port 3
Air is supplied from 6 to the air passage 30. At this time, not all of the supplied pressurized air is introduced into the air introduction port 29, but leaks slightly from between each first porous member 28 and the inner surface of the fixed casing 26. The leaked pressurized air is discharged to the outside via an exhaust port (not shown) formed in the fixed casing 26.

When the pressurized air is supplied from each air supply port 36 through the air passage 30, the pressurized air is supplied from the entire surface of each first porous member 28 toward the inner surface in the X-axis direction of the fixed casing 26. Is squirted. Thereby, a static pressure is generated between the fixed casing 26 and the movable casing 27 in the X-axis direction. Then, the movable casing 27 can move smoothly along the Y-axis and Z-axis directions with respect to the fixed casing 26. Further, the static casing generated between the fixed casing 26 and the movable casing 27 in the X-axis direction makes the fixed casing 26 and the movable casing 27 non-contact. In this state, pressurized air is continuously supplied from each air supply port 36 to each air introduction port 29.

At the same time, pressurized air is blown from the entire surface of the second porous material 38 toward the inner surface of the movable block 37 in the Y-axis direction. Thereby, a static pressure is generated between the movable casing 27 and the movable block 37 in the Y-axis direction. Then, the movable block 37 can smoothly move along the X-axis and Z-axis directions with respect to the movable casing 27.

When the entire copying apparatus 10 descends and approaches the work W, the work contact surface 21b of the suction holder 21 contacts the work W. Then, if the upper surface (specific surface) of the workpiece W is inclined along the Y-axis direction, the oscillator 20 rotates around the X-axis so as to follow the inclination angle. This is because the movable casing 27 is allowed to move only in the Y-axis and Z-axis directions with respect to the fixed casing 26.

On the other hand, if the upper surface of the work W is inclined along the X-axis direction, the oscillator 20 rotates around the Y-axis so as to follow the inclination angle. This is because the movable block 37 is allowed to move only in the X-axis and Z-axis directions with respect to the movable casing 27. As described above, the rocking body 20 follows the work W so that the work contact surface 21b of the suction holder 21 is parallel to the work W without rotating about the Z axis.

After the copying operation is completed, the supply of the pressurized air to the port 13 is stopped, and the ejection of the pressurized air from the surface of the annular porous material 12 is stopped. On the other hand, the evacuation of the air from the evacuation port 18 is continued. Therefore, the force for separating the oscillator 20 from the annular porous material 12 becomes zero, and only the force for attracting the oscillator 20 to the annular porous material 12 acts. This allows
The oscillating body 20 is pressed toward the annular porous material 12. Therefore, since the rocking body 20 is fixed so as not to rotate, the suction holder 21 is held in a state of following.

In this state, when air is evacuated from the port 22 provided in the suction holder 21 through the air passage 23, the work W is sucked on the work contact surface 21b of the suction holder 21. Then, when the entire copying apparatus 10 is raised and the work W is transported to a predetermined position, the copying apparatus 10 is lowered. Thereafter, the evacuation of the air from the port 22 is stopped, and the work W is separated from the suction holder 21.

The center of rotation C of the oscillating body 20, ie, the center of curvature of the convex hemispherical surface 20a, coincides with the workpiece contact surface (copying surface) 21b of the suction holder 21 for highly accurate copying. It is desirable in doing. However, the rotation center C of the oscillating body 20 may not coincide with the workpiece contact surface 21b of the suction holder 21 due to an error in the processing accuracy. In this case, as described above, the swing holder 20 is replaced with the suction holder 21 having an appropriate length.

Therefore, according to the present embodiment, the following effects can be obtained. (1) At the interface between the fixed casing 26 and the movable casing 27 in the X-axis direction, a first porous material 28 for supplying pressurized air for generating a static pressure is provided. The first porous material 28 has an air introduction port 29 for introducing pressurized air ejected from the air supply port 36 into the air passage 30.
Is provided. Therefore, by the static pressure generated between the fixed casing 26 and the movable casing 27 in the X-axis direction, the compressed air is supplied to the air passage 30 while the air supply ports 36 and the air introduction ports 29 are in a non-contact state. Can be supplied. Therefore, compared to the case where the air supply tube 36a is attached to the movable casing 27 to supply compressed air to the air passage 30, the air supply tube 36a
The movable casing 27 is not affected by the tension due to the tension. As a result, the copying accuracy can be improved.

(2) Since the air supply ports 36 are formed on both sides of the fixed casing 26, the movable casing 27
Pressurized air is supplied to the air passage 30 from both sides. Therefore, the air pressure ejected from each first porous material 28 can be made uniform.

(3) The pressurized air is supplied to the air passage 30 with the air supply port 36 and the air introduction port 29 in a non-contact state by the first porous material 28, and the movable casing is generated by generating a static pressure. It also serves to smooth the movement of 27. Therefore, since the number of parts can be reduced, the structure of the detent device 25 can be simplified, and the manufacturing cost can be further reduced.

(4) Suction holder 2 with respect to oscillating body 20
1 is detachable. Therefore, a plurality of types of suction holders 21 having different lengths are prepared, and a suction holder 21 having an appropriate length can be selected from these and attached. Thereby, the posture balance of the oscillator 20 can be adjusted. In addition, since the length of the suction holder 21 can be changed, the rotation center C can be moved to the work contact surface 21b.
Can be matched. As a result, accurate copying can be performed.

(Second Embodiment) As shown in FIGS. 4 and 5, two compression springs 48 are used as support means instead of the third porous material 46 described in the first embodiment. . A part of the compression spring 48 is inserted into a spring accommodating portion 49 formed on the upper surface of the movable block 37, and a distal end portion thereof is in contact with the movable casing 27. Accordingly, the movable casing 27 is moved by the movable block 37 via the compression spring 48.
, And a small gap is formed between the movable casing 27 and the movable block 37. In the present embodiment, the compression spring 48 has extremely low spring pressure, and the spring constant is set to 1 to 10 gf / mm.

As the supporting means, in addition to the compression spring 48, the third porous material 46 shown in the first embodiment is used, and the movable casing 27 is elastically pressed against the upper surface of the movable block 37 by air pressure. It is also possible to support it. Therefore, the support means also includes the third porous material 46 shown in the first embodiment in addition to the compression spring.

Therefore, in the second embodiment, substantially the same effects as in the first embodiment can be exerted. (1) In particular, in the second embodiment, since the third porous material 46 shown in the first embodiment is omitted, it is not necessary to supply air to the third porous material 46. The total length of the air passage 30 can be shortened. Therefore, the structure of the detent device 25 can be simplified,
Manufacturing costs can be reduced.

(2) Since the movable casing 27 is supported on the upper surface of the movable block 37 by the compression spring 48, the movable casing 27 and the movable block 37 can be moved by a slight contact pressure when the tool 21 contacts the work W. And can be relatively moved. Therefore, the copying accuracy of the oscillator 20 can be improved.

(Third Embodiment) Next, a third embodiment of the present invention will be described. As shown in FIGS. 7 to 11, the vertical direction of the copying apparatus 10 is opposite to that of the copying apparatus 10 according to the first embodiment. A shaft 50 that extends downward projects from the center of the rocking body 20, and the shaft 50 is connected to the rocking body 20 by a screw 50 a. The lower end of the shaft 50 is inserted into the fixed casing 26, and the movable block 37 is screwed thereto.

At the center of the base 11, a metal oscillator 2
A magnet 51 is provided as a misalignment preventing means for attracting the shaft 0 and the shaft 50, and the communication hole 45 is formed at the center thereof. The oscillating body 20 is prevented from being slightly displaced by the magnetic force of the magnet 51 and the suction force of the air sucked from the evacuation port 18.

The annular porous material 12 is larger than the annular porous material 12 shown in the first embodiment, and
1 occupies the entire upper surface. Therefore, the annular porous material 1
The pressurized air ejected from the entire surface of the oscillating body 2 can be ejected to almost the entire convex hemispherical surface 20a of the oscillator 20.

An annular groove 17 for suction is formed in the annular porous material 12. In other words, unlike the first embodiment, the annular groove for suction 17 is not formed on the metal base 11. In addition, the suction annular groove 17 is provided along the outer peripheral edge of the annular porous material 12. Therefore, the first
The suction area of the suction annular groove 17 is larger than in the case where the suction annular groove 17 is provided on the inner peripheral edge as in the embodiment.

As shown in FIGS. 9 to 11, in this embodiment, a movable frame (first movable body) 52 surrounding the outer periphery of the movable block 37 is provided in place of the movable casing 27. The movable frame 52 is made of a non-magnetic material such as aluminum, and includes a constituent member 52a arranged in parallel along the X-axis direction and a constituent member 52b arranged in parallel along the Y-axis direction. . And each member 52
a and 52b are connected to each other by screws 53 to form a movable frame 52 having a square shape as a whole.

As shown in FIGS. 9 and 11, the first porous member 28 having the air inlet 29 at the center is provided not on the movable frame 52 but on the inner surface of the fixed casing 26.
The air supply ports 36 are formed on both sides of the bottom of the fixed casing 26, and communicate with the recess 31 formed on the back side of the first porous material 28 via the air passage 30. In the present embodiment, two air supply ports 36 are provided, one of which is closed by a hermetic plug 54. The two air supply ports 36 are provided so that either one can be selected according to the installation status of the copying apparatus 10.

Then, pressurized air supplied from the air supply tube 36 a connected to the air supply port 36 is blown out from the entire surface of the first porous material 28 through the recess 31. Thereby, a static pressure is applied to the interface between the fixed casing 26 and the movable frame 52. Air supply tube 3
A portion of the pressurized air supplied from the air inlet 2a
9, is ejected from the entire surface of the second porous material 38 through the air passage 30. As a result, a static pressure is applied to the interface between the movable block 37 and the movable frame 52. The air leaked without being introduced into the air passage 30 is discharged outside through an exhaust port 56 shown in FIG.

In the second embodiment, the compression spring 48 is interposed between the movable casing 27 and the movable block 37. In the present embodiment, the compression spring 48
It is interposed between the fixed casing 26 and the movable frame 52. More specifically, a part of the compression spring 48 is inserted into a spring accommodating portion 49 formed at the bottom of the fixed casing 26, and the distal end portion is in contact with the lower surface of the movable frame 52.
A spring pressure adjusting screw 55 is screwed into the spring accommodating portion 49 so as to advance and retreat.

The spring pressure adjusting screw 55 can adjust the posture balance of the oscillating body 20 in order to further reduce the eccentric load mg applied to the work W. Specifically, when the compression spring 48 is screwed (moved upward), the spring load of the compression spring 48 increases,
When the screw retreats (moves downward), the spring load of the compression spring 48 decreases.

Therefore, also in the third embodiment, basically the same effects as in the first embodiment can be exerted. (1) Particularly in the third embodiment, the movable frame 52 is formed in a rectangular frame shape, and the movable block 37 is disposed inside the movable frame 52. In short, the movable block 37 is provided by the movable frame 52.
Is surrounded only by Therefore, the detent device 2
5 can be shortened in the vertical direction,
The structure can be simplified. Therefore, the copying apparatus 10
The whole can be reduced in size and the manufacturing cost can be reduced.

(2) At the center of the base 11, the oscillator 2
A magnet 51 for attracting 0 is provided. Therefore, the rocking body 2 is caused by the magnetic force of the magnet 51 and the suction force of the air generated in the suction annular groove 17.
0 can be prevented from being slightly displaced. Therefore, even if the oscillating body 20 operates with an extremely small load, the oscillating body 20 can be reliably maintained in a state of being copied. In addition, the copying apparatus 1
Even when the power supply 0 is suddenly cut off and the suction of air from the evacuation port 18 is stopped, the oscillator 20 can be maintained in a state of being imitated only by the magnetic force of the magnet 51.

(3) Since the movable frame 52 is made of a non-magnetic material, it is possible to prevent the attraction force of the magnet 51 from acting. Therefore, it is possible to prevent the copying operation from being affected.

(4) The annular porous material 12 occupies the entire lower surface of the base 11. Accordingly, the entire convex hemispherical surface 20a of the oscillator 20 can be covered with the annular porous material 12, so that pressurized air can be applied to the entire convex hemispherical surface 20a. Therefore, since the oscillating body 20 can be smoothly oscillated with a smaller load (low friction), a high-precision copying operation can be realized.

(5) An annular groove 17 for suction is formed in the annular porous material 12. When the suction holder 21 is imitated or the rocking body 20 is sucked, even if the convex hemispherical surface 20 a of the rocking body 20 hits near the opening of the suction annular groove 17,
Since the metal oscillator 20 is obviously harder than the suction annular groove 17 made of synthetic resin, damage to the convex hemispherical surface 20a can be prevented.

(6) The suction annular groove 17 is provided along the outer peripheral edge of the annular porous material 12. Therefore, the suction area can be increased as compared with the case where it is located on the inner peripheral edge, and the suction force of the oscillator 20 can be improved. At the same time, since the outer edge of the convex hemispherical surface 20a of the oscillating body 20 is sucked, the oscillating body 20 can be suction-held in a stable state.

(7) Fixed casing 26 and movable frame 52
The spring load of the compression springs 48 provided between them can be adjusted by moving them forward and backward. Therefore, the posture balance of the oscillating body 20 can be finely adjusted according to the work W.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described. As shown in FIGS. 12 and 13, the air supply port 36 communicates with an air passage 58 formed in the base 11, and the air passage 58 is connected to a flexible tube 60 having joints 59 at both ends. Connected to the upstream end. The downstream end of the tube 60 is connected to a movable body (first movable body) A.

The movable body A is made of a non-magnetic material such as aluminum, and has two lower blocks 6 arranged side by side from the bottom.
1, one intermediate block 62, and two upper blocks 63. Both lower blocks 61 are arranged at a predetermined distance, and a locking groove 61a is formed between them. The upper blocks 63 are arranged at a predetermined distance from each other, and a locking groove 63a is formed between them. The locking grooves 61a and 63a extend along directions orthogonal to each other. Specifically, the locking groove 61a formed between the lower blocks 61 extends along the X-axis direction, and the locking groove 63a formed between the upper blocks 63 extends along the Y-axis direction. I have.

The movable block 37 is engaged with the locking groove 61a of the lower block 61. By this engagement, the movable block 37 moves the movable body A with respect to the X axis and the Z axis.
Movement only in the axial direction is allowed. Further, the fixed casing 26 is provided in the locking groove 63a of the upper block 63.
A fixing block 65 as a fixing base material attached by screws 64 is engaged with the inner top surface of the fixing member. Due to this engagement, the movable body A is allowed to move with respect to the fixed block 65 only in the Y-axis and Z-axis directions.

The first porous material 28 is provided on both sides of the locking groove 63a, and the second porous material 38 is provided on both sides of the locking groove 61a. The concave portions 31 and 39 formed on the back side of the porous materials 28 and 38 are connected to the tube 60 via the air passages 30 formed in the blocks 61 to 63.

Then, pressurized air sent from the pressure supply source is ejected from the first porous material 28 through the air supply port 36, the air passage 58, the tube 60, the air passage 30, and the recess 31. As a result, a static pressure is applied to the interface between the fixed block 65 and the upper block 63 of the movable body A in the X-axis direction. Also, pressurized air is ejected from the second porous material 38 through the air supply port 36, the air passage 58, the tube 60, the air passage 30, and the recess 39. Thereby, a static pressure is applied to the interface between the movable block 37 and the lower block 61 of the movable body A in the Y-axis direction.

As shown in FIG. 13, the copying apparatus 10
A stopper 66 for preventing the movement of the rocking body 20 is detachably provided on the side of. This stopper 66
Is attached when transporting the copying apparatus 10 or when exchanging the tool 69 attached to the rocking body 20. The tool 69 is a substrate K as an object
A semiconductor chip is pressure-bonded to the substrate.

The stopper 66 has a stopper plate 67 which can be attached by a screw (not shown). A pin 68 extending in the horizontal direction protrudes from the lower end of the stopper plate 67.
The tip of the pin 68 can be engaged with a locking hole 69 formed in the rocking body 20. By this engagement, rotation of the rocking body 20 is prevented.

Next, the effect of the fourth embodiment will be described. (1) In the present embodiment, the movable body A is the lower block 61,
The upper and lower blocks 61 and 63 are formed with an intermediate block 62 and an upper block 63, and have locking grooves 61a and 63a extending in directions orthogonal to each other in the horizontal direction. Therefore, the outer periphery of the movable block 37 is not surrounded by the movable body A. Therefore, the length of the movable block 37 in the X-axis direction can be set long without increasing the width of the movable body A. As a result, even if the movable body A, the movable block 37, and the fixed block 65 are processed with the same dimensional tolerance, it is possible to reduce the play around the Z axis. Therefore, each of the parts A, 3
Processing accuracy of 7, 65, etc. can be reduced, and manufacturing can be facilitated.

(2) The outer periphery of the movable block 37 is the movable body A
, The length of the rotation preventing device 25 in the horizontal direction (X-axis direction and Y-axis direction) can be shortened.

(3) Since the entire anti-rotation device 25 is surrounded by the fixed casing 26, no external load is applied to the movable body A, the movable block 37, and the like. Therefore, it is possible to prevent the detent device 25 from being adversely affected.

(Fifth Embodiment) Next, a fifth embodiment will be described focusing on differences from the first and fourth embodiments.

As shown in FIG. 14 to FIG.
Are two lower blocks 71 and one upper block 7
And 2. That is, in this embodiment, the intermediate block 62 shown in the fourth embodiment is omitted. A locking groove 71a extending along the X-axis direction is formed between the two lower blocks 71, and the movable block 37 is engaged with the locking groove 71a. By this engagement,
The movable block 37 is allowed to move only in the X-axis and Z-axis directions with respect to the movable body A.

A screw 7 is provided on the inner top surface of the fixed casing 26.
3, two fixing blocks 74 as a fixing base material are attached. Incidentally, in the fourth embodiment, the number of the fixed blocks 65 is one. A locking groove 74a extending along the Y-axis direction and orthogonal to the locking groove 71a is formed between the two fixed blocks 74. The upper block 7 constituting the movable body A is provided in the locking groove 74a.
2 are engaged. By this engagement, the movable body A is allowed to move with respect to the fixed block 74 only in the Y-axis and Z-axis directions.

As shown in FIGS. 14 and 15, an air supply port 36 formed on one side of the fixed casing 26 is communicated with an air supply passage 75 formed inside the fixed casing 26. Two air discharge ports 76 are formed in the middle of the air supply path 75 directly above the fixed blocks 74, and each of the air discharge ports 76 is formed on the back side of the first porous material 28 through the communication path 77. Into the recess 31 formed.

Then, the pressurized air sent from the pressure supply source is supplied to the air supply port 36, the air supply path 75, and the air discharge port 7.
6. It is ejected from the first porous material 28 through the communication passage 77 and the recess 31. Thereby, a static pressure is applied to the interface between the fixed block 74 and the upper block 72 of the movable body A in the X-axis direction. Further, the pressurized air is ejected from the second porous material 38 through the air inlet 29, the air passage 30, and the recess 39 formed in the first porous material 28. This allows
A static pressure is applied to the interface between the movable block 37 and the lower block 71 of the movable body A in the Y-axis direction.

Therefore, according to this embodiment, substantially the same effects as those of the first and fourth embodiments can be obtained. In particular,
Since the fixed block 74 and the upper block 72 of the movable body A are arranged on the same plane, the detent device 25
Can be reduced in the vertical direction.

Note that the embodiment of the present invention may be modified as follows. In the first and second embodiments, the oscillating body 20 is formed with the convex hemisphere 20a, and the annular porous material 12 is formed with the concave hemisphere 12a. Alternatively, the relationship between the convex hemisphere 20a and the concave hemisphere 12a may be reversed.
That is, a concave hemisphere may be formed on the oscillating body 20, a convex hemisphere may be formed on the annular porous material 12, and the oscillating body 20 and the annular porous material 12 may be engaged.

As another example of the fourth embodiment, an air supply port 36 is formed at a position directly above the fixed block 65 in the fixed casing 26, and a tube 60 is connected to the air supply port 36 to perform non-contact. May supply air to the air passage 30. However, in this case, instead of disposing the first porous material 28 on the upper block 63 of the movable body A,
It is preferable to arrange on the fixed block 65.

In the first to fifth embodiments, in order to make the rocking body 20 unable to rotate firmly, even after the rocking body 20 is moved, the air is evacuated from the pressurizing port 13. Good.

Next, in addition to the technical ideas described in the claims, technical ideas grasped by the above-described embodiments will be listed below. (1) The detent device according to claim 1, wherein the first pressurized fluid supply means also serves as a third pressurized fluid supply means.
With this configuration, the number of parts can be reduced,
The size of the rotation preventing device can be reduced.

(2) In claim 1 or (1), an elastic member is provided between the first movable body and the second movable body, and the elastic force of the elastic member allows the two movable bodies to be interposed. Is a detent device in which a predetermined gap is formed.

(3) The detent device according to claim 1, wherein the first movable body (52) is formed in a rectangular frame shape, and the second movable body (37) is disposed inside the first movable body (52). With this configuration, the detent device can be made compact.
With this configuration, it is possible to reduce the size of the detent device.

(4) In claim 1, the first movable body (A) comprises two lower blocks (61) and one intermediate block (62) which are spaced apart from each other by a predetermined distance.
Upper block (63) spaced apart by a predetermined distance
The lower block (61) and the upper block (63) extend in a direction orthogonal to each other, a second movable body (37) is disposed between the lower blocks 61, and both upper blocks (63) are provided. ), Wherein a fixed base material (65) is arranged. With this configuration, it is possible to reduce the size of the detent device.

(5) In the first aspect, the first movable body (A) includes two lower blocks (71) and one upper block (72) arranged at a predetermined distance from each other. Between the lower blocks (71), the second movable body (3
7) are arranged, the two fixed base materials (74) are provided and spaced apart from each other by a predetermined distance, and the first movable body (A) is arranged between the two fixed base materials (74). A detent device characterized by the fact that: With this configuration, it is possible to reduce the size of the detent device.

[0087]

As described in detail above, according to the present invention,
The copying accuracy by the swing member can be improved.

[Brief description of the drawings]

FIG. 1 is a sectional view of a copying apparatus according to a first embodiment.

FIG. 2 is a sectional view taken along line 2-2 of FIG.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 1;

FIG. 4 is a sectional view of a copying apparatus according to a second embodiment.

FIG. 5 is a sectional view taken along line 5-5 in FIG. 4;

6A is an explanatory diagram of the copying apparatus in a balanced state, and FIG. 6B is an explanatory diagram of the copying apparatus in a copied state.

FIG. 7 is a plan view of a copying apparatus according to a third embodiment.

FIG. 8 is a side view of the copying apparatus.

FIG. 9 is a sectional view taken along line 9-9 in FIG. 8;

FIG. 10 is a sectional view taken along line 10A-10A in FIG. 9;

FIG. 11 is a sectional view taken along line 11A-11A in FIG. 9;

FIG. 12 is a sectional view of a copying apparatus according to a fourth embodiment.

FIG. 13 is a sectional view taken along line 13A-13A of FIG. 12;

FIG. 14 is a side view of the copying apparatus according to the fifth embodiment.

FIG. 15 is a plan view of the copying apparatus.

FIG. 16 is a sectional view taken along 16A-16A in FIG. 14;

FIG. 17 is a sectional view taken along the line 17A-17A in FIG. 15;

18 is a sectional view taken along line 18A-18A in FIG.

[Explanation of symbols]

10: copying apparatus, 12: annular porous material (fixing member), 1
2a: concave hemispherical surface, 20: oscillating body (oscillating member), 20a
... convex hemispherical surface, 21 ... suction holder (oscillating member), 21b
... work contact surface, 25 ... rotation prevention device, 26 ... fixed casing (fixed base material), 27 ... movable casing (first movable body), 28 ... first porous material (first pressurized fluid supply means, 3 pressurized fluid supply means), 29 ... air inlet (fluid inlet), 37 ... movable block (second movable body), 38 ... second
Porous material (second pressurized fluid supply means), 48 ... compression spring (support means), 51 ... magnet (position displacement prevention means), 52 ... movable frame (first movable body), 65 ... fixed block (fixed base) Material) 74: fixed block (fixed base material), A:
A movable body (first movable body), W: work (object), K: substrate (object).

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Seiji Nakamura 2-250 Otonoki 2-chome, Komaki-shi, Aichi Prefecture Inside (72) Inventor Tatsuro Shimoyama 250-250 Oodoki 2-chome, Komaki-city, Aichi Prefecture Inside, Inc.

Claims (5)

[Claims] An anti-rotation device that abuts on a specific surface of an object to restrict the rotation of a swing member that follows the surface in parallel with the specific surface. Of the Z axes orthogonal to the plane including
A first movable body movable only in the axis is provided on the fixed base, a second movable body movable only in the X-axis and the Z-axis is provided in the first movable body, and the fixed base and the first movable body in the X-axis direction are provided. A first pressurized fluid supply unit for supplying a pressurized fluid for providing a static pressure between the movable body and the movable body is provided, and a static pressure is applied between the first movable body and the second movable body in the Y-axis direction. A second pressurized fluid supply means for supplying a pressurized fluid to be provided, and a fluid passage for passing the pressurized fluid through at least the second pressurized fluid supply means of the two pressurized fluid supply means; A rotation preventing device provided on a movable body and provided with third pressurized fluid supply means for supplying a pressurized fluid in a non-contact state to a fluid introduction port communicating with the fluid passage. 2. A first movable body that can move only the Y-axis and the Z-axis among an X-axis and a Y-axis orthogonal to each other on the same plane, and a Z-axis orthogonal to a plane including both the axes, and an X-axis. And a second movable body movable only in the Z-axis, between the fixed base and the first movable body in the X-axis direction, and between the first movable body and the second movable body in the Y-axis direction. A pressurized fluid supplied through a fluid passage to provide a static pressure, wherein the pressurized fluid is supplied in a non-contact state to a fluid inlet communicating with the fluid passage. A method for supplying a pressurized fluid to a detent device, characterized in that: 3. The detent device according to claim 1, wherein the first movable body is supported by the second movable body via a support having a weak elastic force. 4. A fixed member having one of a concave hemispherical surface and a convex hemispherical surface, a swinging member having the other is provided, and the swinging member is brought into contact with a specific surface of an object, A copying apparatus configured to copy the contact surface so as to be parallel to a specific surface of the object, by ejecting a pressurized fluid between the fixed member and the swinging member, The detent device according to claim 1, wherein the fixing member and the swinging member are not in contact with each other, and the swinging member is controlled to rotate around an axis perpendicular to the contact surface. Copying device. 5. The copying apparatus according to claim 4, further comprising a displacement prevention unit that holds the movable member at a predetermined position in a state where the movable member is in contact with an object.