JP3825237B2 - Non-rotating device and copying device using the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a detent device and a copying device.
[0002]
[Prior art]
For example, there is a copying apparatus used for a chip mounter that transports a diced semiconductor chip onto a lead frame of a die bonding apparatus. In this copying apparatus, a swinging body having a convex hemispherical surface is rotatably supported on a base having a concave hemispherical surface. Then, when the workpiece contact surface (copying surface) of the oscillating body at the center of curvature of the convex and concave hemispherical surfaces is brought into contact with the specific surface of the semiconductor chip, the oscillating bodies are orthogonal to each other in the same plane. Rotate around an axis. By this rotation, the workpiece contact surface of the oscillator is tilted in accordance with the specific surface of the semiconductor chip. Thereby, the work contact surface of the oscillator becomes parallel to the specific surface of the semiconductor chip.
[0003]
In such a copying apparatus, since the frictional resistance between the base and the rocking body is extremely low, the rocking body is not only around the X axis and the Y axis, but around the Z axis perpendicular to the plane including the X axis and the Y axis. Will also rotate. As a result, the copying accuracy is adversely affected.
[0004]
Therefore, as a means for preventing the oscillating body from rotating around the Z axis, an apparatus called a gonio stage is generally known. The gonio stage is configured by connecting a plurality of swing blocks. Arc surfaces extending in the X-axis direction and the Y-axis direction perpendicular to each other in the horizontal direction are formed at the interfaces of the swing blocks. When copying, each rocking block tilts along each arc surface, so that it does not rotate around the Z axis.
[0005]
[Problems to be solved by the invention]
However, in the conventional anti-rotation device, in order to assemble the swing blocks, many connecting members for connecting them are required, and the number of parts is large. In addition, since many screws are used to assemble each block and the support member, it takes time to assemble. Therefore, there is a problem that the structure becomes complicated and the manufacturing cost increases.
[0006]
The present invention has been made in view of the above problems, and an object of the present invention is to provide an anti-rotation device capable of reducing the manufacturing cost by simplifying processing and assembly and a copying device using the same. It is to provide.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, in the invention according to claim 1, in the detent device for restricting the rotation of the movable member that contacts the specific surface of the object and follows the specific surface in parallel, A straight line that includes a member, a second member, and a third member, and extends along one of the first and second members along the X-axis direction among the X axis, the Y axis, and the Z axis that are orthogonal to each other. A first protrusion that engages with the first groove, and abuts both side surfaces of the first groove and the first protrusion so that they can slide. The first and second members are engaged and provided with a linear second groove extending along the Y-axis direction on one of the second and third members, and the other is disposed opposite to the second groove. Two protrusions are provided, both side surfaces of the second groove and the second protrusion are brought into contact with each other and slidably engaged with each other. The door has as its gist.
[0008]
According to a second aspect of the present invention, in the anti-rotation device according to the first aspect, at least the second member of the first to third members is formed of a low friction material. It is said.
[0009]
In invention of Claim 3, in the detent | locking apparatus of Claim 1 or 2, the boundary part of the said 1st member and a 2nd member, the boundary part of a 2nd member and a 3rd member The gist is that the elastic members for urging the members in the direction of separating each member along the Z-axis direction are arranged.
[0010]
In a fourth aspect of the present invention, a fixed member having one of a concave hemispherical surface and a convex hemispherical surface is rotatably provided with a movable member having the other, and the movable member is provided on a specific surface of an object. A copying apparatus configured to cause the contact surface to be parallel to a specific surface of the object by contacting, and ejecting pressurized fluid between the two members Accordingly, the anti-rotation device according to any one of claims 1 to 3 is provided in order to make the two members non-contact with each other and restrict the rotation of the movable member around an axis orthogonal to the contact surface. Is the gist.
[0011]
According to a fifth aspect of the present invention, in the copying apparatus according to the fourth aspect, there is provided a misalignment preventing means for holding the movable member in a predetermined position in a state where the movable member is in contact with the object. And
[0012]
The “action” of the present invention will be described below.
According to the first aspect of the present invention, the first member and the second member are assembled by engagement between the first groove and the first protrusion. Moreover, the 2nd member and the 3rd member are assembled | attached by engagement with the 2nd groove part and the 2nd protrusion. Therefore, there is no need to use a connecting member, many screws, or the like for connecting the members in order to assemble them. Therefore, the processing and assembly of the first to third members are simplified, and the manufacturing cost can be reduced.
[0013]
According to the second aspect of the present invention, since at least the second member of the first to third members is formed of a low friction material, the sliding resistance between each groove and each projection is reduced. can do. Accordingly, since the first to third members can be moved smoothly, the copying accuracy can be improved.
[0014]
According to the third aspect of the present invention, the elastic member is disposed at the boundary between the first member and the second member and at the boundary between the second member and the third member. And each member can be smoothly moved with the elastic force of this elastic member.
[0015]
According to the invention described in claim 4, since the pressurized fluid is ejected between the fixed member and the movable member, the static pressure caused by the pressurized fluid acts between the two members. Thereby, since both members become non-contact, sliding resistance hardly acts between both members. Therefore, it becomes possible to rotate either one of the two members so that the contact surface is parallel to the specific surface of the object. At this time, the rotation preventing device described above restricts the rotation of the rotating member around the axis perpendicular to the contact surface. Therefore, the manufacturing cost can be reduced even in the copying apparatus by using a rotation prevention device that is extremely simple in structure and low in cost.
[0016]
According to the fifth aspect of the invention, the movable member that is in contact with the object can be held at a predetermined position by the misalignment prevention means. Therefore, even when the movable member operates with a very small load, it can be reliably held in a state in which the movable member is made to follow the object.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
Hereinafter, a first embodiment embodying the present invention will be described in detail with reference to the drawings. In the present embodiment, the vertical (vertical) direction of the copying apparatus 10 is the Z-axis direction, and the directions orthogonal to the Z-axis direction and orthogonal to each other on the same horizontal plane are the X-axis direction and the Y-axis direction. To do.
[0018]
As shown in FIGS. 1 and 2, an annular porous material 12 as a fixing member is provided on the lower surface of the base 11, and a concave hemispherical surface 12 a is formed on the lower surface thereof. As a material for forming the annular porous material 12, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, sintered carbon, sintered ceramics, and the like can be used.
[0019]
A port 13 is formed on one side surface of the base 11, and this port 13 is connected to a pressure supply source (not shown). The port 13 communicates with an annular groove 14 formed in the base 11 through an air passage (not shown). The annular groove 14 is opened on the back surface of the annular porous material 12. Then, pressurized air as a pressurized fluid is ejected from the surface of the annular porous material 12 through the port 13, the air passage and the annular groove 14 from a pressure supply source (not shown).
[0020]
An annular groove for suction 17 is formed in the annular porous material 12. A vacuum port 18 is formed on the side surface of the base 11, and a suction pump (not shown) is connected to the vacuum port 18. The evacuation port 18 communicates with the suction annular groove 17 through an air passage (not shown). Then, air is sucked from the suction pump through the vacuuming port 18 and an air passage (not shown).
[0021]
A rocking body 20 as a movable member is provided on the concave hemispherical surface 12 a of the annular porous material 12. A convex hemispherical surface 20a is formed on the upper surface of the oscillator 20, and the radius of curvature of the convex hemispherical surface 20a is the same as the radius of curvature of the concave hemispherical surface 12a. Accordingly, the convex hemispherical surface 20 a of the rocking body 20 is engaged with the concave hemispherical surface 12 a of the annular porous material 12.
[0022]
A tool 21 for crimping a semiconductor chip to the upper surface (specific surface) of the substrate K as an object is projected from the lower surface of the center portion of the oscillator 20. 1 indicates the radius of curvature of the convex hemispherical surface 20a and the concave hemispherical surface 12a, and the center of curvature is on the tip surface of the tool 21 (the surface of the substrate K). Therefore, in the present embodiment, a movable member is constituted by the rocking body 20 and the tool 21, and the tip surface of the tool 21 is a workpiece contact surface 21a, a so-called copying surface, on which the rocking body 20 rotates. A center C exists. Incidentally, the pivotable angle around the X axis and the Y axis (the scanning angle) by the rocking body 20 is set to ± 0.5 °, assuming that the normal balance state is 0 °.
[0023]
At the center of the base 11, a magnet 23 serving as a displacement prevention means is attached with a screw 25 via a magnet holder 24. A shaft 26 extending in the vertical direction is fixed to the center of the rocking body 20 by a plurality of screws 27. The tip of the shaft 26 protrudes from the upper surface of the holder 24 through the insertion holes 23 a and 24 a formed in the magnet 23 and the magnet holder 24, respectively.
[0024]
The magnet 23 plays a role of preventing the oscillator 20 from being slightly displaced by the magnetic force. Therefore, even the oscillating body 20 that operates with an extremely small load can be reliably held in a copied state. Further, for example, even when the power supply of the copying apparatus 10 is suddenly cut off and the suction of air to the vacuuming port 18 is stopped, the oscillator 20 can be held in a state of being copied only by the magnetic force of the magnet 23.
[0025]
Next, the main part of this embodiment will be described.
As shown in FIGS. 1 to 3, a detent device 31 is provided on the base 11. The anti-rotation device 31 includes a fixed casing 32 having both upper and lower end surfaces opened. The fixed casing 32 is attached to the base 11 by a plurality of screws 33. As a result, the lower opening of the fixed casing 32 is blocked by the base 11. A support lid 34 having a mounting projection 34 a on the lower surface is attached to the upper portion of the fixed casing 32 by a plurality of screws 35. An accommodation space 36 is formed in the fixed casing 32 by closing the upper opening of the fixed casing 32 by the support lid 34.
[0026]
As shown in FIGS. 3 and 4, an Oldham coupling 37 is provided in the accommodation space 36 of the fixed casing 32. The rocking body 20 is suspended and supported by the support lid 34 via the shaft 26 and the coupling 37.
[0027]
The Oldham coupling 37 includes a lower block 41 as a first member, an intermediate block 42 as a second member, and an upper block 43 as a third member. The blocks 41, 42, and 43 are arranged in that order from the lower side, and are continuously provided on the Z axis.
[0028]
In the lower block 41, the tip end portion of the shaft 26 is fitted and fixed from the lower surface of the center portion. On the upper surface of the lower block 41, a linear first protrusion 41a is formed that extends through the center and along the X-axis direction.
[0029]
A linear first groove 42a that extends through the center and along the X-axis direction is formed on the lower surface of the intermediate block 42 at a location facing the first protrusion 41a. A first protrusion 41a provided on the lower block 41 is slidably engaged with the first groove 42a. Both side surfaces of the first protrusion 41a and both side surfaces of the first groove 42a are in contact with each other. Then, when the rocking body 20 rotates around the X axis, both blocks 41 and 42 rotate integrally with the rocking body 20.
[0030]
In the Z-axis direction, a gap S1 is formed between the front end surface of the first protrusion 41a and the inner back surface of the first groove portion 42a. In the present embodiment, each gap S1 is set to 1 to 2 mm. The reason for forming the gap S1 is to allow the lower block 41 to allow movement in the Z-axis direction. In short, when the oscillating body 20 rotates around the Y axis, the presence of the gap S1 plays a role of “escape” so that the blocks 41 and 42 do not hit each other.
[0031]
The upper block 43 has a mounting projection 34a formed on the support lid 34 fitted and fixed to the lower surface of the central portion thereof. On the lower surface of the upper block 43, a linear second protrusion 43a that extends through the center and along the Y-axis direction is formed.
[0032]
On the upper surface of the intermediate block 42 at a location facing the second protrusion 43a, a linear second groove portion 42b is formed that extends through the center and along the Y-axis direction. A second protrusion 43a provided on the upper block 43 is slidably engaged with the second groove 42b. Both side surfaces of the second protrusion 43a and both side surfaces of the second groove portion 42b are in contact with each other. Then, the lower block 41 rotates integrally with the rocking body 20 as the rocking body 20 rotates around the Y axis.
[0033]
In the Z-axis direction, a gap S2 is formed between the distal end surface of the second protrusion 43a and the inner back surface of the second groove portion 42b. In the present embodiment, each gap S2 is set to 1 to 2 mm. The reason for forming the gap S2 is to allow the intermediate block 42 to allow movement in the Z-axis direction. In short, when the oscillating body 20 rotates about the X axis, the presence of the gap S2 plays a role of “escape” so that the blocks 42 and 43 do not hit each other.
[0034]
The lower block 41 and the upper block 43 are made of metal, and the intermediate block 42 is made of synthetic resin impregnated with carbon. That is, the intermediate block 42 is a material that is lightweight and has a small friction coefficient. Therefore, the frictional resistance that works when the blocks 41 to 43 slide is reduced. Therefore, extremely smooth movement is realized by the blocks 41 to 43.
[0035]
Next, the semiconductor chip is pressure-bonded to the substrate K using the copying apparatus 10 configured as described above.
Pressurized air is supplied from the port 13, and the pressurized air is jetted from the entire concave hemispherical surface 12 a of the annular porous material 12 toward the convex hemispherical surface 20 a of the oscillator 20. As a result, a static pressure is applied to the interface between the rocking body 20 and the annular porous material 12, and the rocking body 20 is separated from the annular porous material 12. At the same time, air is sucked from the vacuum suction port 18, the inside of the annular groove 17 becomes negative pressure, a suction force to the concave hemispherical surface 12 a works, and the rocking body 20 is attracted to the annular porous material 12. Therefore, when the force that separates the oscillating body 20 from the annular porous material 12 and the force that the oscillating body 20 is attracted toward the annular porous material 12 balance, the oscillating body 20 does not contact the annular porous material 12. In such a state, it is supported so as to be rotatable.
[0036]
When the entire copying apparatus 10 is lowered and approaches the substrate K in this state, the tip surface of the tool 21 comes into contact with the substrate K. Here, if the upper surface of the substrate K is inclined along the Y-axis direction, the oscillator 20 rotates around the X-axis so as to follow the inclination angle. At this time, the lower block 41 and the intermediate block 42 rotate around the X axis integrally with the rocking body 20. This is because the movement of the intermediate block 42 is allowed by the gap S <b> 2 formed between the intermediate block 42 and the upper block 43. As described above, even when the substrate K is inclined in the Y-axis direction, the workpiece contact surface 21a of the tool 21 follows the surface of the substrate K in parallel.
[0037]
On the other hand, if the upper surface of the substrate K is inclined along the X-axis direction, the oscillating body 20 rotates around the Y-axis so as to follow the inclination angle. At this time, the lower block 41 rotates around the Y axis integrally with the rocking body 20. This is because the movement of the lower block 41 is allowed by the gap S <b> 1 formed between the intermediate block 42 and the lower block 41. As described above, even when the substrate K is inclined in the X-axis direction, the workpiece contact surface 21a of the tool 21 follows the surface of the substrate K in parallel.
[0038]
When the tool 21 is brought into contact with the substrate K, the oscillator 20 and the tool 21 do not rotate around the Z axis, and the workpiece contact surface 21a of the tool 21 is parallel to the surface of the substrate K. Imitate so. In the Y-axis direction, both side surfaces of the first protrusion 41a are in contact with both side surfaces of the first groove part 42a. Further, in the X-axis direction, both side surfaces of the second protrusion 43a and the second groove part are in contact with each other. This is because both side surfaces of 42b are in contact with each other.
[0039]
After the copying operation is completed, the supply of pressurized air to the port 13 is stopped, and the ejection of pressurized air from the surface of the annular porous material 12 is stopped. In contrast, the evacuation of air from the evacuation port 18 is continued. Therefore, the force for separating the oscillating body 20 from the annular porous material 12 becomes zero, and only the force for attracting the oscillating body 20 to the annular porous material 12 works. Thereby, the rocking body 20 is pressed to the annular porous material 12 side. Therefore, since the rocking body 20 is fixed so as not to rotate, the tool 21 is held in a copied state.
[0040]
In this state, the copying apparatus 10 is lifted and separated from the substrate K, and after a semiconductor chip (not shown) is attached to the tip surface of the tool 21, the copying apparatus 10 is lowered again. Then, the tool 21 is pressed against the substrate K, and the semiconductor chip attached to the tip portion of the tool 21 is pressed onto the substrate K.
[0041]
Therefore, according to the present embodiment, the following effects can be obtained.
(1) In the copying apparatus 10 according to the present embodiment, the blocks 41 to 43 are connected to the Z axis immediately above the rocking body 20. A first protrusion 41a formed on the lower block 41 is slidably engaged with the first groove 42a formed on the intermediate block 42. A second protrusion 43a formed on the upper block 43 is slidably engaged with the second groove 42b formed on the intermediate block 42. Therefore, since the shape of each of the blocks 41 to 43 can be simplified in order to restrict the swinging body 20 from rotating about the axis orthogonal to the workpiece contact surface 21a, it does not take time for processing. . Moreover, since it is not necessary to use the member which connects them, and many screws to assemble each block 41-43, an assembly operation man-hour can be reduced. Therefore, the manufacturing cost of the rotation stop device 31 can be reduced, and the cost of the copying apparatus 10 as a whole can be reduced.
[0042]
(2) Of the blocks 41 to 43 constituting the Oldham coupling 37, the upper and lower blocks 43 and 41 located at the upper and lower ends are made of metal, and the intermediate block 42 is made of synthetic resin. . Therefore, the sliding frictional resistance acting on the place where the blocks 41 to 43 are in contact with each other can be reduced, and the blocks 41 to 43 can be moved smoothly. As a result, high-precision copying can be performed. Moreover, since a lubricant such as oil is not used to reduce the frictional resistance, it can be used in a sanitary place.
[0043]
(3) The forming material of the intermediate block 42 is impregnated with carbon. Therefore, the wear resistance of the contact surfaces of the blocks 41 to 43 can be improved. Therefore, durability of each block 41-43 can be made high, and it can be made maintenance-free.
[0044]
(4) A magnet 23 for attracting the shaft 26 attached to the rocking body 20 is provided at the center of the base 11. Therefore, it is possible to prevent the rocking body 20 from being slightly displaced due to the magnetic force generated by the magnet 23 and the air suction force generated in the suction annular groove 17. Therefore, even the oscillating body 20 that operates with an extremely small load can be reliably held in a copied state. Even when the power supply of the copying apparatus 10 is suddenly cut off and the suction of air from the vacuuming port 18 is stopped, the oscillating body 20 can be held in a state of being copied only by the magnetic force of the magnet 23.
[0045]
(5) The annular porous material 12 occupies the entire lower surface of the base 11. Thereby, since the whole convex hemispherical surface 20a of the rocking body 20 can be covered with the annular porous material 12, pressurized air can be applied to the entire convex hemispherical surface 20a. Therefore, even if the tip end surface of the oscillating body 20 is brought into contact with the upper surface of the substrate K with a larger load, the oscillating body 20 can be smoothly oscillated, so that a highly accurate copying operation can be realized.
[0046]
(6) An annular groove 17 for suction is formed in the annular porous material 12. Even if the convex hemispherical surface 20a of the oscillating body 20 hits the vicinity of the opening of the suction annular groove 17 when the tool 21 is copied or the oscillating body 20 is sucked, the metal oscillating body 20 is made of synthetic resin. Since it is apparently harder than the suction annular groove 17, damage to the convex hemispherical surface 20a can be prevented.
[0047]
(7) The suction annular groove 17 is provided along the outer peripheral edge of the annular porous material 12. Therefore, the suction area can be increased as compared with the case of the inner periphery, and the suction force of the rocking body 20 can be improved. At the same time, since the outer edge portion of the convex hemispherical surface 20a of the rocking body 20 is sucked, the rocking body 20 can be adsorbed and held in a stable state.
[0048]
(Second Embodiment)
Next, a second embodiment of the present invention will be described with a focus on differences from the first embodiment.
[0049]
In the second embodiment, as shown in FIGS. 6, 7, 9, and 10, a support member 51 as a first member having a rectangular parallelepiped shape is provided on the lower surface of the oscillating body 20 with a screw 52. It is fixed by mounting. The support member 51 extends through the center of the rocking body 20 and along the X-axis direction. In the present embodiment, the front end portion of the support member 51 is a first protrusion 51 a, and the first protrusion 51 a protrudes outward from the peripheral edge of the lower end of the oscillator 20.
[0050]
The lower peripheral edge of the rocking body 20 is notched, and a ring-shaped member 53 as a second member is provided in the notched portion 20b. The ring-shaped member 53 is formed with a first groove 53a that passes through the center of the rocking body 20 and extends along the X-axis direction. In this first groove 53a, a first protrusion 51a at the tip of the support member 51 is slidably engaged. Both side surfaces of the first protrusion 51a and both side surfaces of the first groove 53a are in contact with each other. Then, when the rocking body 20 rotates around the X axis, both members 51 and 53 rotate integrally with the rocking body 20.
[0051]
In the Z-axis direction, a gap S1 is formed between the first protrusion 51a and the first groove 53a. Further, a gap S <b> 3 is formed between the rocking body 20 and the ring-shaped member 53. The gaps S1 and S3 serve as “escape” when the rocking body 20 rotates around the Y axis so that the members 51 and 53 and the members 20 and 53 do not contact each other due to the presence of the gaps S1 and S3. It is to fulfill. In particular, in the present embodiment, a spring accommodating hole 54 is formed in a surface where the first protrusion 51a and the first groove 53a face each other, and a first compression spring 55 is accommodated therein. Due to the presence of the first compression spring 55, the gaps S1 and S3 are held at appropriate intervals. The spring constant of the first compression spring 55 is set in the range of 1 to 10 gf / mm.
[0052]
As shown in FIGS. 6, 7, 8, and 10, L-shaped support members 60 as third members are attached and fixed to both sides of the base 11 by screws 61. The distal end portion of the L-shaped support member 60 extends through the center of the rocking body 20 and along the Y-axis direction. In the present embodiment, the distal end portion of the L-shaped support member 60 is the second protrusion 60 a, and the second protrusion 60 a is disposed in the notch portion 20 b of the rocking body 20.
[0053]
The ring-shaped member 53 is formed with a second groove 53b that passes through the center of the rocking body 20 and extends along the Y-axis direction. In this second groove 53b, a second protrusion 60a at the tip of the L-shaped support member 60 is slidably engaged. Both side surfaces of the second protrusion 60a and both side surfaces of the second groove 53b are in contact with each other. The support member 51 rotates integrally with the rocking body 20 as the rocking body 20 rotates around the Y axis.
[0054]
In the Z-axis direction, a gap S2 is formed between the second protrusion 60a and the second groove 53b. This gap is because when the rocking body 20 rotates around the X-axis, the gap 53 plays a role of “escape” so that the members 53 and 60 do not hit each other. In particular, in the present embodiment, a spring accommodating hole 62 is formed in a surface where the second protrusion 60a and the second groove 53b face each other, and a second compression spring 63 is accommodated therein. The presence of the second compression spring 63 keeps the gap S2 at an appropriate interval. In short, the ring-shaped member 53 is supported by the support member 51 and the L-shaped support member 60 via both compression springs 55 and 63. The spring constant of the second compression spring 63 is set in the same range of 1 to 10 gf / mm as that of the first compression spring 55.
[0055]
The support member 51 and the L-shaped support member 60 are made of metal, and the ring-shaped member 53 is made of synthetic resin impregnated with carbon. That is, the ring-shaped member 53 is a material that is lightweight and has a small friction coefficient. Therefore, the frictional resistance that acts when the members 51, 53, 60 move relative to each other is reduced.
[0056]
Next, the operation of the copying apparatus 10 in the second embodiment will be described.
As already described in the first embodiment, the oscillating body 20 is rotatably supported in a non-contact state with respect to the annular porous material 12, and the entire copying apparatus 10 is lowered to approach the substrate K. Then, the tip surface of the tool 21 comes into contact with the substrate K. Here, if the upper surface of the substrate K is inclined along the Y-axis direction, the oscillator 20 rotates around the X-axis so as to follow the inclination angle.
[0057]
At this time, the support member 51 and the ring-shaped member 53 rotate around the X axis integrally with the rocking body 20. This is because the movement of the ring-shaped member 53 is allowed by the gap S <b> 2 formed between the ring-shaped member 53 and the L-shaped support member 60. As described above, even when the substrate K is inclined in the Y-axis direction, the workpiece contact surface 21a of the tool 21 follows the surface of the substrate K in parallel.
[0058]
On the other hand, if the upper surface of the substrate K is inclined along the X-axis direction, the oscillating body 20 rotates around the Y-axis so as to follow the inclination angle. At this time, the support member 51 rotates around the Y axis integrally with the rocking body 20. This is because the support member 51 and the rocking body 20 are moved by the gap S1 formed between the ring-shaped member 53 and the support member 51 and the gap S3 formed between the ring-shaped member 53 and the rocking body 20. This is because it is allowed. As described above, even when the substrate K is inclined in the X-axis direction, the workpiece contact surface 21a of the tool 21 follows the surface of the substrate K in parallel.
[0059]
When the tool 21 is brought into contact with the substrate K, the oscillator 20 and the tool 21 do not rotate around the Z axis, and the workpiece contact surface 21a of the tool 21 is parallel to the surface of the substrate K. Imitate so. This is because both side surfaces of the first protrusion 51a and both side surfaces of the first groove 53a are in contact with each other in the Y-axis direction, and both side surfaces of the second protrusion 60a and the second groove in the X-axis direction. This is because both side surfaces of 53b are in contact with each other.
[0060]
After the copying operation is finished, the tool 21 is held in the copied state by the operation described in the first embodiment. Then, the tool 21 is pressed against the substrate K, and the semiconductor chip attached to the tip portion of the tool 21 is pressed onto the substrate K.
[0061]
Therefore, also in the second embodiment, substantially the same effect as that of the first embodiment described above can be exhibited.
(1) In particular, in the second embodiment, the diameter of the ring-shaped member 53 can be made larger than the blocks 41 to 43 shown in the first embodiment. Therefore, even if each member 51, 53, 60 is machined with the same dimension crossing, rattling around the Z axis can be reduced. Accordingly, the processing accuracy of the members 51, 53, 60, etc. can be lowered while maintaining high scanning accuracy, and manufacturing can be facilitated.
[0062]
(2) A ring-shaped member 53 is disposed along the outer periphery of the oscillator 20, and the ring-shaped member 53 is supported by the support member 51 and the L-shaped support member 60. Therefore, since the fixed casing 32 shown in the first embodiment can be omitted, the length of the copying apparatus 10 in the vertical direction can be shortened, and further downsizing can be achieved. Further, since the ring-shaped member 53 is disposed in the notch portion 20b formed in the rocking body 20, the ring-shaped member 53 can be positioned inside the range where the rocking body 20 is projected. Therefore, it is possible to prevent the copying apparatus 10 from increasing in size in the horizontal direction.
[0063]
(3) The ring-shaped member 53 is supported by the support member 51 and the L-shaped support member 60 via the respective compression springs 55 and 63. Therefore, each member 51, 53, 60 can be moved with a slight contact pressure when the tool 21 contacts the substrate K. Therefore, the scanning accuracy of the oscillator 20 can be increased.
[0064]
(4) With the elastic force of the first compression spring 55, the gap S1 formed between the first protrusion 51a and the first groove 53a can be reliably ensured. In addition, the clearance S2 formed between the second protrusion 60a and the second groove 53b can be reliably ensured by the elastic force of the second compression spring 63. Therefore, each member 51, 53, 60 can be smoothly moved along the Z-axis direction.
[0065]
(5) In order to form the gaps S1 and S2, for example, a porous material is provided in each of the groove portions 53a and 53b, and air piping is not necessary, so that the structure can be simplified. it can. Therefore, an increase in the manufacturing cost of the copying apparatus 10 can be suppressed. In addition, since air is not used to form the gaps S1 and S2, an unpleasant air supply sound is not generated, so that the working environment can be improved.
[0066]
In addition, you may change embodiment of this invention as follows.
In the first and second embodiments, the oscillating body 20 has a convex hemispherical surface 20a, and the annular porous material 12 has a concave hemispherical surface 12a. In addition, the relationship between the convex hemispherical surface 20a and the concave hemispherical surface 12a may be reversed. That is, the oscillating body 20 may be formed with a concave hemispherical surface, the annular porous material 12 may be formed with a convex hemispherical surface, and the oscillating body 20 and the annular porous material 12 may be engaged.
[0067]
As another example of the first embodiment, a compression spring may be interposed between the blocks 41 to 43, and the gaps S1 and S2 may be formed between the blocks 41 to 43.
-As another example of 1st Embodiment, you may reverse the relationship of the unevenness | corrugation of protrusion 41a, 42a and groove part 42a, 42b formed in each block 41-43. That is, the first groove portion is formed on the upper surface of the lower block 41, and the first protrusion is formed on the lower surface of the intermediate block 42. A second groove is formed on the lower surface of the upper block 43, and a second protrusion is formed on the upper surface of the intermediate block 42.
[0068]
As another example of the first embodiment, the lower block 41 and the upper block 43 may be formed from a synthetic resin material containing carbon, and the intermediate block 42 may be formed from a metal. Or you may form all the blocks 41-43 from a synthetic resin material. With these configurations, it is possible to further contribute to reducing the weight of the rotation stop device 31. Or all the blocks 41-43 may be formed from a metal, and each protrusion 41a, 43a and each groove part 42a, 42b may be surface-treated. With these configurations, the rigidity of the detent device 31 can be increased.
[0069]
-As another example of 1st Embodiment, you may reverse the directional relationship which the protrusion and groove part formed in each block 41-43 extend. The first protrusion 41a and the first groove part 42a extend along the Y-axis direction, and the second protrusion 43a and the second groove part 42b extend along the X-axis direction so as to be orthogonal to them. May be.
[0070]
As another example of the second embodiment, the support member 51 and the L-shaped support member 60 may be formed from a synthetic resin material containing carbon, and the ring-shaped member 53 may be formed from a metal. Alternatively, all the members 51, 53, 60 may be formed from a synthetic resin material. With these configurations, it is possible to further contribute to reducing the weight of the detent device. Alternatively, all the members 51, 63, and 60 may be formed of metal, and surface treatment may be performed on the protrusions 51a and 60a and the grooves 53a and 53b. With these configurations, the rigidity of the detent device 31 can be increased.
[0071]
-In 1st and 2nd embodiment, in order to make the rocking | swiveling body 20 hard to rotate firmly, after making the rocking | swiveling body 20 imitate, you may evacuate air also from the port 13 for pressurization.
[0072]
As another example of the second embodiment, instead of forming a part of the lower surface of the ring-shaped member 53 to form the grooves 53a and 53b, the upper surface is notched to form the grooves 53a and 53b. Good. Alternatively, one of the groove portions 53a and 53b may be formed by cutting out the lower surface of the ring-shaped member 53 and the other may be formed by cutting out the upper surface.
[0073]
-As another example of 2nd Embodiment, you may reverse the directional relationship which the protrusion part and groove part formed in each member 51,53,60 extend. The first protrusion 51a and the first groove 53a are extended along the Y-axis direction, and the second protrusion 60a and the second groove 53b are extended along the X-axis direction so as to be orthogonal to them. May be.
[0074]
Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the embodiment described above are listed below.
(1) The anti-rotation device according to any one of claims 1 to 3, wherein the first member, the second member, and the third member are continuously provided on the Z-axis in that order. With this configuration, the detent device can be easily assembled.
[0075]
(2) In Claim 1 or 2, the low friction material is a synthetic resin material impregnated with carbon. With this configuration, the frictional force acting between the members can be reduced, so that the first to third members can be smoothly moved relative to each other.
[0076]
(3) In Claim 3, the second member is formed in a ring shape and disposed along the outer peripheral edge of the movable member, and the second member is a first member attached to the movable member. It is supported by the member and the 3rd member attached to the base which supports the said fixing member. With this configuration, the copying apparatus can be reduced in size.
[0077]
(4) By providing a movable member provided with the other to a fixed member provided with either one of a concave hemisphere and a convex hemisphere, and bringing the movable member into contact with a specific surface of an object, A copying apparatus in which the abutting surface is made to be parallel to a specific surface of the object, and by ejecting pressurized fluid between the two members, Is provided with a non-contact and a rotation preventing device for restricting the rotation of the movable member about an axis orthogonal to the contact surface, and the rotation preventing device includes a fixed casing and an Oldham type provided in the casing. A copying apparatus comprising: a coupling, wherein the movable member is connected to the fixed casing via an Oldham coupling.
[0078]
【The invention's effect】
As described above in detail, according to the present invention, since processing and assembly can be simplified, it is possible to reduce the manufacturing cost.
[Brief description of the drawings]
FIG. 1 is a front view of a copying apparatus according to a first embodiment.
FIG. 2 is a plan view of the copying apparatus.
3 is a cross-sectional view taken along line 3-3 in FIG.
FIG. 4 is an exploded perspective view of a main part.
FIG. 5 is a front view of a copying apparatus according to a second embodiment.
FIG. 6 is a side view of the copying apparatus.
FIG. 7 is a bottom view of the copying apparatus.
8 is a cross-sectional view taken along 8-8 in FIG. 6;
9 is a cross-sectional view taken along line 9-9 in FIG.
FIG. 10 is an exploded perspective view of main parts.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 ... Base, 12 ... Cyclic porous material (fixed member), 12a ... Concave hemisphere, 20 ... Oscillator (movable member), 20a ... Convex hemisphere, 21 ... Tool (movable member), 23 ... Magnet ( (Position displacement prevention means), 31 ... anti-rotation device, 41 ... lower block (first member), 41a ... first projection, 42 ... intermediate block (second member), 42a ... first groove, 42b ... first 2 grooves, 43 ... upper block (third member), 43a ... second protrusion, 51 ... support member (first member), 51a ... first protrusion, 53 ... ring-shaped member (second member) 53a ... 1st groove part,
60 ... L-shaped support member (third member), 60a ... second protrusion, K ... substrate (object).

Claims (5)

In the anti-rotation device that restricts the rotation of the movable member that contacts the specific surface of the object and follows the specific surface in parallel,
A first member, a second member, a third member;
One of the first and second members is provided with a linear first groove extending along the X-axis direction among the X-axis, the Y-axis, and the Z-axis orthogonal to each other, and the other is provided with the first Providing a first protrusion to be engaged with the groove, abutting both side surfaces of the first groove and the first protrusion, and slidably engaging them;
One of the second and third members is provided with a linear second groove extending along the Y-axis direction, and a second protrusion disposed opposite to the second groove is provided on the other. An anti-rotation device characterized in that both side surfaces of the second groove portion and the second protrusion are brought into contact with each other and slidably engaged with each other. 2. The detent device according to claim 1, wherein at least a second member of the first to third members is made of a low friction material. At the boundary between the first member and the second member, and at the boundary between the second member and the third member, there is an elastic member that urges each member in the direction of separating along the Z-axis direction. The detent device according to claim 1 or 2, wherein each of the detent devices is disposed. A fixed member having one of a concave hemispherical surface and a convex hemispherical surface is rotatably provided with a movable member having the other, and the movable member is brought into contact with a specific surface of the object, thereby contacting the fixed member. A copying apparatus configured to cause a surface to be parallel to a specific surface of the object,
The first and second members are brought into non-contact with each other by ejecting a pressurized fluid between the two members, and the movable member is restricted from rotating around an axis perpendicular to the contact surface. A copying apparatus comprising the anti-rotation device according to claim 3. The copying apparatus according to claim 4, further comprising: a misregistration prevention unit that holds the movable member in a predetermined position in contact with the object.

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