JP2001126655A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JP2001126655A
JP2001126655A JP30199999A JP30199999A JP2001126655A JP 2001126655 A JP2001126655 A JP 2001126655A JP 30199999 A JP30199999 A JP 30199999A JP 30199999 A JP30199999 A JP 30199999A JP 2001126655 A JP2001126655 A JP 2001126655A
Authority
JP
Japan
Prior art keywords
vacuum
sample
secondary electron
image
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30199999A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001126655A5 (enExample
Inventor
Junichi Katane
純一 片根
Masuhiro Ito
祐博 伊東
Hiromasa Suzuki
宏征 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Science Systems Ltd
Original Assignee
Hitachi Ltd
Hitachi Science Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Science Systems Ltd filed Critical Hitachi Ltd
Priority to JP30199999A priority Critical patent/JP2001126655A/ja
Publication of JP2001126655A publication Critical patent/JP2001126655A/ja
Publication of JP2001126655A5 publication Critical patent/JP2001126655A5/ja
Pending legal-status Critical Current

Links

JP30199999A 1999-10-25 1999-10-25 走査電子顕微鏡 Pending JP2001126655A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30199999A JP2001126655A (ja) 1999-10-25 1999-10-25 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30199999A JP2001126655A (ja) 1999-10-25 1999-10-25 走査電子顕微鏡

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005263171A Division JP4292176B2 (ja) 2005-09-12 2005-09-12 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JP2001126655A true JP2001126655A (ja) 2001-05-11
JP2001126655A5 JP2001126655A5 (enExample) 2005-01-06

Family

ID=17903674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30199999A Pending JP2001126655A (ja) 1999-10-25 1999-10-25 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JP2001126655A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1693879A2 (en) 2005-02-18 2006-08-23 Hitachi Science Systems, Ltd. Scanning electron microscope
JP2006313651A (ja) * 2005-05-06 2006-11-16 Shimadzu Corp 粒子線顕微鏡、及び真空分析装置用部材移動機構
EP1367630A3 (en) * 2002-05-31 2009-06-03 Leo Electron Microscopy Limited Improvements in or relating to particle detectors
US7755045B2 (en) 2006-08-11 2010-07-13 Hitachi High-Technologies Corporation Scanning electron microscope
JP2010182550A (ja) * 2009-02-06 2010-08-19 Hitachi High-Technologies Corp 荷電粒子線装置
US8097848B2 (en) 2008-03-13 2012-01-17 Hitachi High-Technologies Corporation Scanning electron microscope
JP2012156026A (ja) * 2011-01-27 2012-08-16 Hitachi High-Technologies Corp 半導体検査装置、及び荷電粒子線の画像、或いは光学条件の選択装置
JP2013225530A (ja) * 2013-08-08 2013-10-31 Hitachi High-Technologies Corp 荷電粒子線装置
WO2020016988A1 (ja) * 2018-07-19 2020-01-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1367630A3 (en) * 2002-05-31 2009-06-03 Leo Electron Microscopy Limited Improvements in or relating to particle detectors
US7511271B2 (en) 2005-02-18 2009-03-31 Hitachi Science Systems, Ltd. Scanning electron microscope
EP1693879A2 (en) 2005-02-18 2006-08-23 Hitachi Science Systems, Ltd. Scanning electron microscope
JP2006313651A (ja) * 2005-05-06 2006-11-16 Shimadzu Corp 粒子線顕微鏡、及び真空分析装置用部材移動機構
US7755045B2 (en) 2006-08-11 2010-07-13 Hitachi High-Technologies Corporation Scanning electron microscope
US8097848B2 (en) 2008-03-13 2012-01-17 Hitachi High-Technologies Corporation Scanning electron microscope
US8294097B2 (en) 2009-02-06 2012-10-23 Hitachi High-Technologies Corporation Charged particle radiation device
JP2010182550A (ja) * 2009-02-06 2010-08-19 Hitachi High-Technologies Corp 荷電粒子線装置
DE112010000743T5 (de) 2009-02-06 2013-08-14 Hitachi High-Technologies Corporation Vorrichtung für einen Strahl geladener Teilchen
US8692195B2 (en) 2009-02-06 2014-04-08 Hitachi High-Technologies Corporation Charged particle radiation device
KR101396676B1 (ko) 2009-02-06 2014-05-16 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치
DE112010000743B4 (de) 2009-02-06 2018-10-18 Hitachi High-Technologies Corporation Detektor und Vorrichtung für einen Strahl geladener Teilchen mit einem solchen Detektor
JP2012156026A (ja) * 2011-01-27 2012-08-16 Hitachi High-Technologies Corp 半導体検査装置、及び荷電粒子線の画像、或いは光学条件の選択装置
JP2013225530A (ja) * 2013-08-08 2013-10-31 Hitachi High-Technologies Corp 荷電粒子線装置
WO2020016988A1 (ja) * 2018-07-19 2020-01-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JPWO2020016988A1 (ja) * 2018-07-19 2021-08-02 株式会社日立ハイテク 荷電粒子線装置
JP7013581B2 (ja) 2018-07-19 2022-01-31 株式会社日立ハイテク 荷電粒子線装置
US11348757B2 (en) 2018-07-19 2022-05-31 Hitachi High-Tech Corporation Charged particle beam device

Similar Documents

Publication Publication Date Title
US7601953B2 (en) Systems and methods for a gas field ion microscope
JP5053359B2 (ja) 荷電粒子ビーム器具用の改善された検出器
US7511271B2 (en) Scanning electron microscope
US20050178966A1 (en) Light weight portable scanning electron microscope
JPH09171791A (ja) 走査形電子顕微鏡
JPH10223574A (ja) 加工観察装置
US4740698A (en) Hybrid charged particle apparatus
US6686590B2 (en) Low-vacuum scanning electron microscope
JP2001126655A (ja) 走査電子顕微鏡
US6657193B2 (en) Scanning electron microscope
JP2003151484A (ja) 走査型荷電粒子ビーム装置
KR101554594B1 (ko) 하전입자 빔 프로브 형성 장치 및 이의 이용방법
JP2006093161A (ja) 走査形電子顕微鏡
JP2002075264A (ja) 低真空走査電子顕微鏡
US6362486B1 (en) Magnetic lens for focusing a charged particle beam
US9245709B1 (en) Charged particle beam specimen inspection system and method for operation thereof
US7161149B2 (en) Scanning electron microscope and method of controlling same
JPH09274883A (ja) Ｆｉｂ／ｓｅｍ複合装置
JP4292176B2 (ja) 走査電子顕微鏡
JP2005149733A (ja) 走査電子顕微鏡
JPH05135725A (ja) 荷電粒子ビーム装置における有機ガス分子の除去方法
JP2009272288A (ja) 走査電子顕微鏡
JP4179390B2 (ja) 走査形電子顕微鏡
JP3494152B2 (ja) 走査形電子顕微鏡
JP3992021B2 (ja) 走査形電子顕微鏡

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040212

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040212

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050216

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050322

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050523

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050712

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20051206