JP2001114568A - Method for production of ceramic green sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably produce a ceramic green sheet having excellent surface smoothness and little pinhole defects, etc., even in the case of producing a sheet having thin thickness. SOLUTION: The surface smoothness of a ceramic green sheet is improved independent of the particle diameter and dispersibility of the ceramic raw material by forming a ceramic slurry in the form of a sheet on a carrier film, drying the sheet to obtain a dried sheet (a ceramic green sheet free from smoothing treatment) and smoothing the green sheet by pressing together with the carrier film using a flat plate press, a hydrostatic press or a calender roll under prescribed temperature and pressure conditions.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing ceramic green sheets used for manufacturing multilayer ceramic electronic components such as multilayer ceramic capacitors and multilayer varistors.

[0002]

2. Description of the Related Art For example, multilayer ceramic capacitors, which are one of the representative multilayer ceramic electronic components, are widely used for various purposes. As you progress,
The demand for larger capacity is increasing.

This multilayer ceramic capacitor has, for example, a structure as shown in FIG. 3, in which a plurality of internal electrodes 2a and 2b face each other via a ceramic layer 1 which is a dielectric layer, and One end of each of the internal electrodes 2a and 2b is connected to both ends of the ceramic element 3 having a structure in which the end faces are on the different sides.
It is formed by arranging a pair of external electrodes 4a and 4b that are electrically connected to the external electrodes.

[0004] Ceramic green sheets used for manufacturing such a multilayer ceramic capacitor include:
In order to form a ceramic layer, which is a dielectric layer as described above, in order to increase the obtainable capacitance and reduce the size of a product, the thickness thereof has recently been reduced.

[0005] By the way, ceramic green sheets are:
Usually, it is manufactured by forming a ceramic slurry into a sheet and then drying it.As a method of forming the ceramic slurry into a sheet, various methods such as a doctor blade method and a reverse roll coater method are used. Have been.

For example, FIG. 4 shows an example of a conventional method of manufacturing a ceramic green sheet. In this example, a carrier film 52 is supplied from a carrier film supply section (carrier film supply roller) 51 to a predetermined position. At the position, a ceramic slurry applying means (sheet forming means) (in this example, a doctor blade method is used) 5
3, after applying the ceramic slurry 54 on the carrier film 52, the ceramic slurry 54 is transported together with the carrier film 52, and the drying means 55
After drying the ceramic slurry 54 to form the ceramic green sheet 56, the carrier film 52 holding the ceramic green sheet 56 on the surface thereof is wound up by a sheet collecting roller 57, so that the formed ceramic green sheet 56 is removed from the carrier film. 5
2 and is collected.

In the multilayer ceramic capacitor shown in FIG. 3, when the thickness (element thickness) of the ceramic layer 1 interposed between the internal electrodes 2a and 2b becomes 3 μm or less, the thickness of the ceramic green sheet used for the ceramic layer 1 is reduced. It becomes necessary to produce thin ceramic green sheets. However, when a ceramic green sheet having a small thickness is manufactured by the above-described conventional method, the surface roughness of the ceramic green sheet becomes rough or pinhole defects (pores) occur in the ceramic green sheet. There is.

For this reason, there has been disclosed a method of improving the smoothness of a ceramic green sheet forming a ceramic layer and reducing the particle diameter of a ceramic powder material for the purpose of increasing the density of the ceramic green sheet (Japanese Patent Laid-Open No. H10-260,1992). No. 10-223469).

However, in general, when the particle diameter is small, the ceramic powder itself is liable to agglomerate and the dispersibility is lowered.
There is a limit in improving the surface smoothness and increasing the density of ceramic green sheets. Further, in the case of the ceramic dielectric powder, if the particle diameter is simply reduced with the same composition, the dielectric constant decreases, and there is a problem that it is not possible to sufficiently cope with an increase in the capacity of the multilayer ceramic capacitor.

As a method of dispersing the ceramic slurry, there is a method in which the ceramic slurry is rotated at a high speed by a method such as a sand mill or a visco mill and a large shear force is applied to the ceramic slurry to disperse the ceramic slurry. Gives
Although the dispersion proceeds, there is a problem that a part of the ceramic powder is pulverized. That is, when the ceramic powder is pulverized, the surface smoothness of the sheet is improved by the high dispersion, but the pulverization of the ceramic powder causes fluctuations in the characteristics, and the temperature characteristics of the obtained multilayer ceramic capacitor are out of the target range at the time of design. And the dielectric constant of the ceramic dielectric decreases.

The present invention is intended to solve the above-mentioned problems. Even when a ceramic green sheet having a small thickness is manufactured, the ceramic green sheet having good surface smoothness and having few pinhole defects can be stably obtained. It is an object of the present invention to provide a method of manufacturing a ceramic green sheet that can be manufactured by using a method.

[0012]

In order to achieve the above object, a method of manufacturing a ceramic green sheet according to the present invention comprises applying a ceramic slurry in which a ceramic powder is dispersed in a dispersion medium onto a carrier film to form a sheet. Forming step of forming, drying step of drying the ceramic slurry formed into a sheet on the carrier film,
The dried sheet formed on the carrier film by drying the ceramic slurry is subjected to a pressing plate surface temperature of 0 to 150 ° C. and a pressing pressure of 500 to 10,000 using a flat plate press having at least a pair of pressing plates.
a flattening step of flattening the surface by carrying out a flat plate pressing process on the carrier film under the condition of kgf / cm ² .

A dried sheet (a ceramic green sheet not subjected to a smoothing treatment) obtained by forming a ceramic slurry into a sheet on a carrier film and drying the sheet.
Using a flat plate press, press plate surface temperature: 0 to 1
Improving the smoothness of the surface of the ceramic green sheet without depending on the particle size and dispersibility of the ceramic by performing a flat plate pressing process on the carrier film under the conditions of 50 ° C. and a pressing pressure of 500 to 10000 kgf / cm ^2. Therefore, it is possible to reliably produce a ceramic green sheet suitable for use in producing a multilayer ceramic capacitor.

The flat plate pressing machine includes, for example, a pair of parallel flat plates (press plates) having a mirror-polished hard chromium plating layer disposed on the surface thereof, and pressure control means for controlling the pressing pressure by the press plates. A heating means for heating the press plate to a predetermined temperature, sandwiching the ceramic green sheet between a pair of press plates, and pressing the ceramic green sheet from both sides while heating to the predetermined temperature, thereby smoothing the surface of the ceramic green sheet. This is an apparatus configured to perform such operations, and there is no particular limitation on the specific configuration of the flat plate press.

In the case where the smoothing process is performed by the flat plate pressing method, the ceramic green sheets may be pressed one by one, or a plurality of the green sheets may be pressed. However, it is preferable that the surface of the ceramic green sheet is subjected to the press treatment so that the treated surface of the film subjected to the release treatment is aligned so that the ceramic green sheet does not adhere to the press plate. When a plurality of sheets are pressed together, the ceramic green sheet is pressed together with the surface of the ceramic green sheet so as not to adhere to the stacked carrier film. Alternatively, it is desirable to use a carrier film that has been subjected to a release treatment on the back surface.

In the present invention, the range of the press plate surface temperature is set to 0 to 150 ° C. If the temperature is lower than 0 ° C., the sheet surface becomes hard and the effect of reducing the surface roughness (Ra) becomes insufficient. When the temperature exceeds 150 ° C., the sheet softens due to thermoplasticity, peels off from the carrier film and moves to the press plate side. Further, the reason why the pressing pressure was set in the range of 500 to 10,000 kgf / cm ² is that
When the pressing pressure is less than 500 kgf / cm ² , a sufficient surface smoothing effect cannot be obtained, and the pressing pressure is 10,000
If it exceeds kgf / cm ² , the ceramic green sheet may peel off or break from the carrier film and cannot be processed.

The method for producing a ceramic green sheet according to claim 2 of the present invention is characterized in that the press plate surface temperature: 20 to
100 ° C., press pressure: 1000-6000 kgf / cm ²
The flat plate press treatment is performed under the following conditions.

The flatness of the surface of the ceramic green sheet can be further reliably improved by performing a flat plate pressing under the conditions of a press plate surface temperature: 20 to 100 ° C. and a press pressure: 1000 to 6000 kgf / cm ^2. become. In addition, the reason why the press plate surface temperature is limited to 100 ° C. or less is that when the ceramic green sheet is heated to more than 100 ° C. and 150 ° C. or less, the ceramic green sheet may shift to the press plate side due to thermoplasticity. This is because wrinkles occur on the sheet surface and the effect of reducing the surface roughness becomes insufficient.

The press pressure between the press plates is 6000
The reason for limiting the kgf / cm ² or less, when the 10000 kgf / cm ² or less of the press pressure exceeds the 6000kgf / cm ^2,
In some cases, wrinkles are generated on the surface of the ceramic green sheet, and the effect of reducing the surface roughness becomes insufficient.

As described above, by setting the temperature and pressure conditions suitable for the ceramic green sheet and performing flat pressing, the ceramic green sheet does not peel off or break from the carrier film, and the ceramic green sheet does not break. The surface smoothing effect of the sheet can be reliably obtained.

The method for producing a ceramic green sheet according to the present invention (claim 3) includes a forming step of applying a ceramic slurry in which ceramic powder is dispersed in a dispersion medium onto a carrier film and forming the same into a sheet shape; A drying step of drying the ceramic slurry formed into a sheet shape on the carrier film; and a drying sheet formed on the carrier film by drying the ceramic slurry, using a hydrostatic press machine at a pressing temperature of 0.
~ 150 ° C, press pressure: 500 ~ 10000kgf / cm
^And a smoothing step of smoothing the surface by subjecting the carrier film to isostatic pressing under the conditions of ² .

A dried sheet (a ceramic green sheet not subjected to a smoothing treatment) obtained by forming a ceramic slurry into a sheet on a carrier film and drying the sheet.
Using a hydrostatic press, press temperature: 0 to 150
The smoothness of the surface of the ceramic green sheet is improved without depending on the particle size and dispersibility of the ceramic by subjecting the carrier film to the hydrostatic pressure pressing under the conditions of ° C. and a pressing pressure of 500 to 10000 kgf / cm ^2. Thus, a ceramic green sheet suitable for use in a multilayer ceramic capacitor or the like can be reliably manufactured.

The hydrostatic press machine includes, for example, a pressure vessel filled with a liquid such as oil or water, a pressurizing cylinder for pressurizing the liquid, control means for controlling the pressure for pressurizing the liquid, Heating means for heating to a predetermined temperature, for example, vacuum packing with a flexible sheet in a state in which a ceramic green sheet is wound around the surface of a mirror-polished metal roll, and oil or water of a hydrostatic press machine. The ceramic green sheet is pressed against the metal roll surface and the film on the back side of the ceramic green sheet with uniform pressure by immersing in a liquid such as Device, and there are no particular restrictions on its specific configuration. Note that a roll made of a material other than metal can be used instead of the metal roll.

In the case of pressing by a hydrostatic pressing method, when the ceramic green sheets are wound around the metal rolls in a multi-layered manner, the back surface is subjected to a release treatment as a carrier film. It is desirable to use one that has been used. In addition, when the ceramic green sheets are stacked in multiple layers and wound around a metal roll, if the thickness of the ceramic green sheets as a whole increases, the pressure applied from both end faces of the wound ceramic green sheets cannot be ignored, Deformation may occur. In such a case, flange portions (flange portions) are provided at both end portions of the metal roll, and the ceramic green sheet is wound so that both end surfaces thereof are in close contact with the flange portions, thereby being applied from both end surfaces of the ceramic green sheet. An adverse effect can be prevented.

It is also possible to perform isostatic pressing using a flat plate instead of the metal roll described above. When performing hydrostatic pressing in a state where a plurality of ceramic green sheets are stacked, it is desirable to use a carrier film having a back surface subjected to a release treatment.

In the present invention, the range of the pressing temperature is set to 0.
To 150 ° C. and the range of the pressing pressure is 500 to 1000
The reason why the pressure is set to 0 kgf / cm ² is the same as the reason for limiting the case where the smoothing treatment is performed by the flat plate pressing method of the first aspect.

The method for producing a ceramic green sheet according to claim 4 is characterized in that the isostatic pressing is performed under the conditions of a press temperature: 20 to 100 ° C. and a press pressure: 1000 to 6000 kgf / cm ² .

The surface smoothness of the ceramic green sheet can be further reliably improved by performing hydrostatic pressing under the conditions of a pressing temperature: 20 to 100 ° C. and a pressing pressure: 1000 to 6000 kgf / cm ^2. Become. The press temperature is set to 20 to 100 ° C. and the press pressure is limited to 1000 to 6000 kgf / cm ^2.
Set to 00 ° C and press pressure range 1000-6000kg
This is the same as the reason for limitation when f / cm ² is set.

As described above, the temperature and pressure conditions suitable for the ceramic green sheet are set and the hydrostatic pressing is performed, so that the ceramic green sheet does not peel off or break from the carrier film.
The surface smoothing effect of the ceramic green sheet can be reliably obtained.

Further, in the method of manufacturing a ceramic green sheet according to claim 5, a forming step of applying a ceramic slurry in which ceramic powder is dispersed in a dispersion medium to a carrier film and forming the same into a sheet shape; A drying step of drying the ceramic slurry formed into a sheet shape into a sheet, and drying the ceramic slurry by drying the dried sheet formed on the carrier film, using a calender roll machine having at least a pair of nip rolls, the nip roll surface Temperature: 0 to 150
And a smoothing step of smoothing the surface by calender roll treatment under the conditions of 50 ° C. and press pressure (linear pressure): 50 to 1000 kgf / cm.

A dried sheet obtained by forming the ceramic slurry into a sheet on a carrier film and drying (ceramic green sheet not subjected to smoothing treatment)
Using a calender roll machine, nip roll surface temperature: 0 to 150 ° C., press pressure (linear pressure): 50 to 100
By calendering the carrier film together with the carrier film under the condition of 0 kgf / cm, it is possible to improve the smoothness of the surface of the ceramic green sheet without depending on the particle size and dispersibility of the ceramic. This makes it possible to reliably produce a ceramic green sheet suitable for use in a ceramic green sheet.

The calender roll machine is provided with, for example, a preheat roll for preheating the ceramic green sheet (it may not be necessary), at least a pair of nip rolls, and desirably a heating means for heating the nip rolls. Means an apparatus configured to press and smooth the surface of the ceramic green sheet by pressing the ceramic green sheet from both sides with a pair of nip rolls sandwiched between the pair of nip rolls. There are no particular restrictions on the general configuration, and various types of calendar roll machines such as a single nip roll type calender roll machine having a pair of nip rolls and a multi-stage nip roll type calender roll machine having a plurality of pairs of nip rolls can be used. .

In the present invention, the range of the nip roll surface temperature is set to 0 to 150 ° C. When the temperature is lower than 0 ° C., the sheet surface becomes hard and the effect of reducing the surface roughness (Ra) becomes insufficient, and If the temperature exceeds 150 ° C., the sheet softens due to thermoplasticity, peels off from the carrier film and moves to the press plate side. Further, the reason why the pressing pressure (linear pressure) is set in the range of 50 to 1000 kgf / cm is that when the linear pressure is less than 50 kgf / cm, a sufficient surface smoothing effect cannot be obtained, and when the linear pressure is 1000 kgf / cm. When the ratio exceeds 1, the ceramic green sheet is peeled off or broken from the carrier film and cannot be processed.

In the method for manufacturing a ceramic green sheet according to claim 6, the nip roll surface temperature is 20 to 100.
It is characterized in that calender roll treatment is performed under the conditions of ° C. and press pressure (linear pressure): 100 to 600 kgf / cm.

Nip roll surface temperature: 20 to 100 ° C.
The smoothness of the surface of the ceramic green sheet can be more reliably improved by performing the calender roll treatment under the conditions of a pressing pressure (linear pressure): 100 to 600 kgf / cm. In addition, the nip roll surface temperature is 1
The reason why the temperature is limited to 00 ° C. or less is that when the ceramic green sheet is heated to more than 100 ° C. and 150 ° C. or less, the ceramic green sheet may move to the press side due to thermoplasticity and wrinkles on the surface of the ceramic green sheet. And the effect of reducing the surface roughness becomes insufficient.

The pressing pressure (linear pressure) is set at 600 kgf / c.
m is limited to less than 600 kgf / cm
If the pressing pressure (linear pressure) is not more than kgf / cm, wrinkles may be generated on the surface of the ceramic green sheet, and the effect of reducing the surface roughness may be insufficient.

As described above, the ceramic green sheet is peeled off or torn from the carrier film by performing the calender roll treatment while setting the temperature condition and the pressure (linear pressure) condition range suitable for the ceramic green sheet. Without this, it is possible to reliably obtain the surface smoothing effect of the ceramic green sheet.

The method of manufacturing a ceramic green sheet according to claim 7 is characterized in that the smoothing treatment is performed so that the surface roughness (Ra value) of the ceramic green sheet becomes 100 nm or less.

In a multilayer ceramic electronic component in which the thickness (element thickness) of the ceramic layer interposed between the internal electrodes is 3 μm or less, the surface roughness (Ra value) of the ceramic green sheet used for the production is 100 nm. When the thickness exceeds 300 mm, the life tends to be sharply reduced. However, by applying the present invention, even when the thickness is small, the surface roughness (Ra value) of the ceramic green sheet can be reduced to 100 nm or less. Therefore, the durability of the multilayer ceramic electronic component manufactured using the same can be improved. In the present invention, the surface roughness (Ra)
Values) were determined by measurement (nm) in a 5 μm square area using an atomic force microscope.

In the method for manufacturing a ceramic green sheet according to claim 8, the ceramic green sheet is separated from the carrier film and laminated.
It is used for manufacturing a multilayer ceramic electronic component, and is characterized in that it is detachably held by the carrier film.

The present invention is particularly significant when manufacturing ceramic green sheets for multilayer ceramic electronic parts which are required to have a small thickness and excellent surface smoothness, and form a ceramic slurry into a sheet. In the forming step and the smoothing step of smoothing the surface, the ceramic green sheet is held on a carrier film, and in the step of lamination, for example, by allowing the ceramic green sheet to be peeled off from the carrier film and used, for example, It is possible to efficiently manufacture a multilayer ceramic electronic component such as a multilayer ceramic capacitor of a thin multilayer structure in which a ceramic layer interposed between internal electrodes is thin.

When a multilayer ceramic electronic component is manufactured using the ceramic green sheet manufactured by the method of manufacturing a ceramic green sheet of the present invention, the surface roughness of the interface between the ceramic layer and the internal electrode ( Ra) can be reduced. In addition, since the density of the ceramic green sheet can be increased by performing the smoothing process on the ceramic green sheet, it is possible to reduce the rate of occurrence of pores generated in the dielectric element of the capacitor. Further, since the density of the sheet increases, it becomes possible to suppress the sheet attack phenomenon in which the solvent component of the electrode paste permeates the sheet and the sheet binder is dissolved. As a result, by using the ceramic green sheets manufactured by the manufacturing method of the present invention, it is possible to manufacture a multilayer ceramic electronic component having a long average life and excellent reliability. In the present invention, the thickness (element thickness) of the ceramic layer is 3 μm.
m is particularly significant when producing ceramic green sheets for laminated ceramic electronic components of m or less, the ceramic green sheets produced by the production method of the present invention,
For example, by using it for manufacturing a multilayer ceramic capacitor, it is possible to efficiently manufacture a multilayer ceramic capacitor having a thin film multilayer, excellent electric characteristics, and a small size and a large capacity.

[0043]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described, and features thereof will be described in more detail.
Here, a case where a ceramic green sheet used for forming a dielectric layer of a multilayer ceramic capacitor is manufactured will be described as an example.

First, ceramic powders (barium titanate-based ceramic powders) and additives for the purpose of improving properties are weighed by a predetermined amount as starting materials, and wet-mixed to obtain mixed powders. At this time, each additive is added in the form of an oxide powder or a carbonated powder by a method of mixing with a ceramic powder, and is wet-dispersed in an organic solvent (dispersion medium). As a method of the wet dispersion (primary dispersion), it is desirable to select a dispersion method and a dispersion condition in which pulverization of the ceramic powder does not occur. That is, it is desirable that the dispersion is performed under conditions where a shearing force that does not cause pulverization is applied. In addition, as a wet dispersion method,
Specifically, a ball mill method, a sand mill method, a biscomil method, a high-pressure homogenizer method, a kneader dispersion method, or the like can be used. Next, a ceramic slurry is prepared by adding an organic binder, a plasticizer, and an organic solvent (dispersion medium) to the above-described primary dispersion, and the secondary slurry is prepared in the same manner as the above-described primary dispersion. Dispersed. Then, the ceramic slurry was formed into a sheet on a carrier film. Examples of the method of forming the ceramic slurry into a sheet include a doctor blade method, a reverse roll coater method, a die coater method, and the like.
Various known methods can be used. As described above, the surface roughness (Ra) of the ceramic green sheet manufactured through the above-mentioned dispersion treatment and molding does not necessarily have to be so highly dispersed as to be single particles, and the ceramic powder is crushed. It is more important that there is none. Next, a smoothing process was performed to smooth the surface of the ceramic green sheet. In this embodiment,
A smoothing treatment was performed by a flat plate pressing method, an isostatic pressing method, and a calender roll method to produce ceramic green sheets (samples) having different smoothing treatment methods. In this embodiment, a pair of parallel flat plates (press plates) having a mirror-polished hard chromium plating layer disposed on the surface thereof as a flat plate press, and pressure control means for controlling a press pressure by the press plates are provided. A flat plate press equipped with a heating means configured to heat a pair of press plates to a predetermined temperature and maintain the temperature at the predetermined temperature was used. Further, as a hydrostatic press, a pressure vessel filled with a liquid, a pressurizing cylinder for pressurizing the liquid, a control means for controlling the pressure, and heating the liquid to a predetermined temperature and maintaining the liquid at a predetermined temperature A state in which the ceramic green sheet is wound on the surface of the metal roll using a hydrostatic press equipped with a heating means configured to be capable of being wound, and a metal roll on which the ceramic green sheet is wound and the surface of which is mirror-polished. Was vacuum-packed with a flexible sheet, immersed in the liquid of a hydrostatic press, and subjected to hydrostatic pressing. Further, as a calender roll machine, a pair of nip rolls (metal rolls), heating means having a temperature control mechanism for heating the nip rolls to a predetermined temperature, and pressing the ceramic green sheet with the nip rolls from both sides. A so-called single nip roll type calender roll machine equipped with a pressure control means for controlling the press pressure (linear pressure) of the above was used. However, it is also possible to use a multi-stage nip roll type calender roll machine provided with a plurality of pairs of nip rolls. Then, as described above, the surface roughness of the ceramic green sheet after the smoothing treatment was measured by the flat plate pressing method, the isostatic pressing method, and the calendar roll method.
The surface roughness of the ceramic green sheet was measured with an atomic force microscope and evaluated using the Ra value in a 5 μm square area.

In Table 1, as a comparative example, a ceramic slurry was prepared using barium titanate powders having an average particle diameter of 210 nm (Comparative Example 1), 153 nm (Comparative Example 2), and 98 nm (Comparative Example 3). The surface roughness (Ra) of a ceramic green sheet (ceramic green sheet not subjected to a smoothing treatment) manufactured by forming a sheet into a sheet and drying the sheet on a carrier film is shown.

[0046]

[Table 1]

The surface roughness (R) of the ceramic green sheets of Comparative Examples 1, 2, and 3 not subjected to the surface smoothing treatment
a) are 228 nm, 162 nm and 120 nm, respectively.
Met. FIG. 1 shows an electron micrograph of the surface of the ceramic green sheet of Comparative Example 2.

Tables 2 and 3 show that when a flat plate press machine was used and the press temperature (surface temperature of the press plate) and the press pressure were changed to perform smoothing treatment (plate press treatment),
The surface roughness (Ra) of the ceramic green sheet is shown.

[0049]

[Table 2]

[0050]

[Table 3]

Tables 4 and 5 show that the surface roughness of the ceramic green sheet in the case of performing a smoothing process (isostatic pressing) using a hydrostatic pressing machine while changing the pressing temperature (liquid temperature) and the pressing pressure. (Ra).

[0052]

[Table 4]

[0053]

[Table 5]

Tables 6 and 7 show that a ceramic roll was smoothed (calender roll treatment) using a calender roll machine while changing the press temperature (surface temperature of the nip roll) and the press pressure (linear pressure). The surface roughness (Ra) of the green sheet is shown.

[0055]

[Table 6]

[0056]

[Table 7]

In Tables 2, 3, 4, 5, 6, and 7, those marked with an asterisk to the right of the sample number are out of the scope of the present invention (reference examples). In the column of surface roughness (Ra), a cross indicates that the ceramic green sheet was broken.

[Surface Roughness (Ra) When Smoothing is Performed by Flat Plate Pressing Method] (a) When a ceramic powder having a particle size of 210 nm is used (Table 2)
Reference) Sample Nos. 1 to 20 are cases where a ceramic powder having an average particle size of 210 nm was used. The ceramic green sheet (not smoothed) of Comparative Example 1 (Table 1) using a ceramic powder having an average particle size of 210 nm has an Ra of 22.
It was 8 nm. Among ceramic green sheets using ceramic powder having an average particle size of 210 nm, sample numbers 1 to
3 is a smoothing process at a press temperature of 0 ° C. (flat plate pressing process)
, And even if the pressing pressure was changed, the effect of reducing Ra was small in any case because the pressing temperature was low. Sample Nos. 4 to 10 are cases where a smoothing process (flat plate pressing process) was performed at a pressing temperature of 20 ° C. Sample No. 4 is lower than the range of the present invention the press pressure, a reference example was 200 kgf / cm ^2, a press pressure for less than 500 kgf / cm ^2, Ra reduction effect was not observed. For sample numbers 5 to 9, the pressing pressure was 5
00kgf / cm ² or more, in the case of 10000 kgf / cm ² or less, Ra reducing effect was observed, the lifting, as in Sample No. 6-8, in the case where the pressing pressure and 1000~6000kgf / cm ^2, large Ra A reduction effect was observed. Also,
Sample No. 9 had a high Ra pressure reduction effect because the press pressure was as high as 10000 kgf / cm ² , but some wrinkle-like patterns were generated on the ceramic green sheet. Sample No. 10
In Reference Example, when the pressing pressure exceeded 10,000 kgf / cm ² , the sheet was peeled off from the carrier film, and the sheet was broken. Sample Nos. 11 and 12 have a pressing temperature of 60
It is the case of ° C. Press pressure is 500kgf / cm each
² , 4000 kgf / cm ² , and it can be seen that the latter, in which the pressing pressure is in a more preferable range, has a greater Ra reduction effect. For sample numbers 13 to 16, the press temperature was 100 ° C.
Is the case. Press pressure 1000-6000kgf / cm
^It can be seen that the effect of reducing Ra is greater in the range of ² . Sample No. 16 (Reference Example) has a pressing pressure of 1000
Since it exceeded 0 kgf / cm ² , the ceramic green sheet peeled off from the carrier film and was torn. In sample numbers 17 to 19, the pressing temperature and the pressing pressure were in more preferable ranges, and the effect of reducing Ra was recognized.
In sample No. 20 (Reference Example), the pressing pressure was in a preferable range, but the temperature was higher than 150 ° C., so that the sheet was peeled off from the carrier film and torn.

(B) When ceramic powder having a particle diameter of 153 nm is used (see Table 3) Sample Nos. 21 to 32 have an average particle diameter of 1
This is the case of 53 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 2 (Table 1) using a ceramic powder having an average particle size of 153 nm was 162 nm.
Met. Sample Nos. 21 to 27 have a pressing temperature of 50 ° C.
This is the case where the press pressure was changed. Sample No. 21
(Reference example) is a press pressure lower than the range of the present invention,
The reference example was 200 kgf / cm ^2, and the pressing pressure was 5
Since it was less than 00 kgf / cm ² , no sufficient Ra reduction effect was observed. In Sample Nos. 22 to 26, the pressing pressure was within the condition range of the present invention, and the effect of reducing Ra was recognized. In particular, it was found that the samples of Sample Nos. 23 to 25 had the pressing pressure in the more preferable condition range, and the surface roughness could be reduced to Ra 100 nm or less. FIG. 2 shows an electron micrograph of the surface of the ceramic green sheet of Sample No. 24. Compared with the ceramic green sheet of Comparative Example 2 (see FIG. 1), it can be seen that the structure is dense. In sample No. 27 (Reference Example), the pressing temperature was 50 ° C., which was in a good range, but the pressing pressure exceeded 10,000 kgf / cm ² , and the ceramic green sheet was peeled off from the carrier film to cause breakage. Was. For sample numbers 28 to 32, the press pressure was 3000 kgf.
/ Cm ² and the press temperature was changed. In sample numbers 28 to 31, the pressing temperature was within the range of the condition of the present invention, and the effect of reducing Ra was recognized. In particular, sample number 2
In Nos. 9 and 30, an even better Ra reduction effect was exhibited.
Sample No. 32 (Reference Example) has a pressing pressure of 3000 kgf.
/ Cm ² , which is within a desirable range, but since the temperature exceeds 150 ° C., peeling of the sheet occurred.

(C) When ceramic powder having a particle size of 98 nm is used (see Table 3) Sample Nos. 33 to 36 have an average particle size of 9
This is the case of 8 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 3 (Table 1) using a ceramic powder having an average particle diameter of 98 nm was 120 nm. For sample numbers 33 to 36, the press temperature was 70 ° C,
This was the case when the press pressure was changed. Sample No. 33 ~
In No. 35, both the pressing temperature and the pressing pressure were within the desired ranges, and the effect of reducing the Ra of the ceramic green sheet was recognized. Further, sample numbers 33 and 34 showed even better results. However, in Sample No. 36 (Reference Example), since the pressing pressure exceeded 10,000 kgf / cm ² , peeling of the ceramic green sheet occurred.

From the above results, the press temperature was set to 0 as the condition for the smoothing treatment by the flat plate press method (press condition).
~ 150 ° C and press pressure 500 ~ 10000
The range of kgf / cm ² is preferable, and it has been confirmed that the Ra reduction effect of the ceramic green sheet can be obtained in this range. It was also found that when the press temperature was 20 to 100 ° C. and the press pressure was 1000 to 6000 kgf / cm ² , a greater Ra reduction effect was obtained.

[Surface Roughness (Ra) When Smoothing is Performed by Hydrostatic Pressing Method] (a) When a ceramic powder having a particle size of 210 nm is used (Table 4)
Reference) Sample Nos. 101 to 120 are cases where a ceramic powder having an average particle size of 210 nm was used. The average particle size is 21
Comparative Example 1 described above using a 0 nm ceramic powder (Table 1)
Of ceramic green sheet (without smoothing)
Was 228 nm. Among ceramic green sheets using ceramic powder having an average particle size of 210 nm, sample numbers 101 to 103 are ceramic green sheets subjected to a smoothing treatment (isostatic pressing treatment) at a pressing temperature of 0 ° C. Even if it changed, the effect of Ra reduction was small in any case because the press temperature was low. Sample number 1
Nos. 04 to 110 are cases where a smoothing treatment (isostatic pressing treatment) was performed at a pressing temperature of 20 ° C. Sample number 104
Has a pressing pressure of 200 kgf lower than the range of the present invention.
/ Cm ² and a press pressure of 500 kgf / c
Since it was less than m ² , no Ra reduction effect was observed. For sample numbers 105 to 109, the pressing pressure was 500 kgf / cm
² above, in the case of 10000 kgf / cm ² or less, Ra reducing effect was observed, the lifting, as in Sample No. 106 to 108, when the press pressure and 1000~6000kgf / cm ^2, a large Ra reducing effect Admitted. In sample No. 109, since the press pressure was as high as 10,000 kgf / cm ² , the effect of reducing Ra was large, but a somewhat wrinkled pattern was generated on the ceramic green sheet. Sample number 11
In the case of 0 (reference example), when the pressing pressure exceeded 10,000 kgf / cm ² , the sheet was peeled off from the carrier film, and the sheet was broken. Sample numbers 111 and 112 are obtained when the pressing temperature is 60 ° C. Pressing pressure is 500kg each
f / cm ² , 4000 kgf / cm ² , and it can be seen that the latter, in which the pressing pressure is in a more preferable range, has a greater Ra reduction effect. Sample numbers 113 to 116 are for the case where the pressing temperature is 100 ° C. Press pressure 1000-6000
It can be seen that the effect of reducing Ra is greater in the range of kgf / cm ² . In sample No. 116 (Reference Example), since the pressing pressure exceeded 10,000 kgf / cm ² , the ceramic green sheet was peeled off from the carrier film and was broken. In sample numbers 117 to 119, the pressing temperature and the pressing pressure were in more preferable ranges, and the effect of reducing Ra was recognized. In sample No. 120 (Reference Example), the pressing pressure was in a preferable range, but since the temperature exceeded 150 ° C., the ceramic green sheet was peeled off from the carrier film and was broken.

(B) When a ceramic powder having a particle diameter of 153 nm is used (see Table 5) Sample Nos. 121 to 132 are cases where the average particle diameter of the ceramic powder is 153 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 2 (Table 1) using a ceramic powder having an average particle size of 153 nm is 16
It was 2 nm. Sample numbers 121 to 127 are the case where the pressing pressure was changed at a pressing temperature of 50 ° C. Sample No. 121 (reference example) is lower than the range of the present invention the press pressure, a reference example was 200 kgf / cm ^2, since the press pressure is less than 500 kgf / cm ^2, sufficient Ra decreasing effect was observed Did not. In sample numbers 122 to 126, the pressing pressure was within the condition range of the present invention, and the effect of reducing Ra was recognized. In particular, for the samples of sample numbers 123 to 125, the pressing pressure is in a more preferable condition range, and Ra
It was found that the surface roughness could be reduced to 100 nm or less. In sample No. 127 (Reference Example), the pressing temperature was 50 ° C. and was in a good range, but the pressing pressure was 100 ° C.
It exceeded 00 kgf / cm ² , and the ceramic green sheet peeled off from the carrier film and was torn. For sample numbers 128 to 132, the pressing pressure was 3000 kgf / cm
² , and the press temperature was changed. In sample numbers 128 to 131, the press temperature was within the condition range of the present invention, and the effect of reducing Ra was recognized. In particular, sample number 1
In Nos. 29 and 130, an even better Ra reduction effect was exhibited. Sample No. 132 (Reference Example) has a pressing pressure of 300
0 kgf / cm ^{2 is} in a desirable range, but the temperature is 150 ° C.
, Peeling of the sheet occurred.

(C) When ceramic powder having a particle diameter of 98 nm is used (see Table 5) Sample numbers 133 to 136 are cases where the average particle diameter of the ceramic powder is 98 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 3 (Table 1) using a ceramic powder having an average particle diameter of 98 nm is 120 nm.
Met. Sample numbers 133 to 136 have a press temperature of 7
This is the case where the pressing pressure was changed at 0 ° C. For sample numbers 133 to 135, the press temperature and the press pressure were both within the desired ranges, and the Ra of the ceramic green sheet was
A reduction effect was observed. In addition, sample numbers 133 and 134
Showed even better results. However, sample number 1
In 36 (Reference Example), the press pressure was 10,000 kgf / cm
^Since it exceeded ² , peeling of the sheet occurred.

From the above results, the conditions of the smoothing treatment by the isostatic pressing method (press conditions) are as follows: a press temperature of 0 to 150 ° C. and a press pressure of 500 to 100
It was found that the effect of reducing the Ra of the ceramic green sheet was obtained when the pressure was 00 kgf / cm ² . Further, the pressing temperature (liquid temperature) is 20 to 100 ° C., and the pressing pressure is 1000
It was found that a larger Ra reduction effect was obtained when the pressure was ６6000 kgf / cm ² .

[Surface Roughness (Ra) When Smoothing is Performed by Calender Roll Method] (a) When a ceramic powder having a particle size of 210 nm is used (Table 6)
Reference) Sample Nos. 201 to 220 are cases in which a ceramic powder having an average particle size of 210 nm is used. The average particle size is 21
Comparative Example 1 described above using a 0 nm ceramic powder (Table 1)
Of ceramic green sheet (without smoothing)
Was 228 nm. Among ceramic green sheets using a ceramic powder having an average particle size of 210 nm, sample numbers 201 to 203 are ceramic green sheets subjected to a smoothing treatment (calender roll treatment) at a pressing temperature (surface temperature of a nip roll) of 0 ° C. Yes, even if the pressing pressure (linear pressure) is changed, Ra
The effect of the reduction was slight. Sample No. 204-210
Is a case where a smoothing treatment (calender roll treatment) was performed at a press temperature of 20 ° C. Sample No. 204 has a pressing pressure (linear pressure) of 20 kgf / cm, which is lower than the range of the present invention.
Since the pressing pressure was less than 50 kgf / cm, no Ra reduction effect was observed. Sample No. 20
5 to 209, when the press pressure (linear pressure) is 50 kgf / cm or more and 1000 kgf / cm or less, the effect of reducing Ra is observed. As shown in sample numbers 206 to 208, the press pressure (linear pressure) Was set to 100 to 600 kgf / cm, a large Ra reduction effect was observed. Sample number 209
In Example 1, the press pressure (linear pressure) was as high as 1000 kgf / cm, so that the effect of reducing Ra was large, but a somewhat wrinkled pattern was generated on the ceramic green sheet. Sample number 210
(Reference example): Press pressure (linear pressure) is 1000 kgf / cm
In the case of exceeding, the sheet peeled off from the carrier film, and tearing occurred. Sample numbers 211 and 212 are obtained when the pressing temperature is 60 ° C. The pressing pressures (linear pressures) were 50 kgf / cm and 400 kgf / cm, respectively, and it can be seen that the latter having a more preferable range of the pressing pressures (linear pressures) has a greater Ra reduction effect. Sample numbers 213 to 216
Shows the case where the pressing temperature is 100 ° C. It can be seen that the Ra reduction effect is greater when the pressing pressure (linear pressure) is in the range of 100 to 600 kgf / cm. In sample No. 216 (Reference Example), since the pressing pressure (linear pressure) exceeded 1000 kgf / cm, the ceramic green sheet was peeled off from the carrier film and was broken. Sample No. 217-21
In No. 9, the press temperature and the press pressure (linear pressure) were in more preferable ranges, and the effect of reducing Ra was recognized. In sample No. 220 (Reference Example), the pressing pressure (linear pressure) was in a preferable range, but since the temperature exceeded 150 ° C., the sheet was peeled off from the carrier film and was torn.

(B) When a ceramic powder having a particle diameter of 153 nm is used (see Table 7) Sample Nos. 221 to 232 are cases where the average particle diameter of the ceramic powder is 153 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 2 (Table 1) using a ceramic powder having an average particle size of 153 nm is 16
It was 2 nm. Sample numbers 221 to 227 are the cases where the pressing temperature (50 ° C.) and the pressing pressure (linear pressure) were changed. Sample No. 221 (Reference Example) is press pressure (linear pressure)
Was lower than the range of the present invention, that is, 20 kgf / cm. Since the pressing pressure was less than 50 kgf / cm, a sufficient Ra reduction effect was not recognized. Sample number 222-2
In No. 26, the press pressure (linear pressure) was within the condition range of the present invention, and the effect of reducing Ra was recognized. In particular, sample number 22
It was found that the samples of Nos. 3 to 225 had the pressing pressure (linear pressure) in the more preferable condition range, and the surface roughness could be reduced to Ra 100 nm or less. In addition, sample number 227
In Reference Example, the pressing temperature was 50 ° C., which was in a good range, but the pressing pressure (linear pressure) exceeded 1000 kgf / cm, and the ceramic green sheet was peeled off from the carrier film, causing breakage. Sample number 228-232
Shows the case where the press pressure (linear pressure) was set to 300 kgf / cm and the press temperature was changed. Sample No. 228-231
In the test, the press temperature was within the condition range of the present invention, and the effect of reducing Ra was recognized. In particular, Sample Nos. 229 and 230 exhibited a better Ra reduction effect. Sample number 2
32 (reference example) has a pressing pressure (linear pressure) of 300 kgf / c.
m is in a desirable range, but since the temperature is higher than 150 ° C., peeling of the sheet occurred.

(C) When a ceramic powder having a particle diameter of 98 nm is used (see Table 7) Sample numbers 233 to 236 are cases where the average particle diameter of the ceramic powder is 98 nm. The Ra of the ceramic green sheet (not smoothed) of Comparative Example 3 (Table 1) using a ceramic powder having an average particle diameter of 98 nm is 120 nm.
Met. Sample numbers 233 to 236 have a pressing temperature of 7
This is the case where the pressing pressure (linear pressure) was changed at 0 ° C.
In sample numbers 233 to 235, both the press temperature and the press pressure (linear pressure) were within the desired ranges, and the effect of reducing the Ra of the ceramic green sheet was observed. Further, sample numbers 233 and 234 showed even better results. However, in sample number 236 (reference example), the sheet was peeled because the pressing pressure (linear pressure) exceeded 1000 kgf / cm.

From the above results, as the conditions (press conditions) for the smoothing treatment by the calender roll machine, when the nip roll surface temperature is 0 to 150 ° C. and the press pressure (linear pressure) is 50 to 1000 kgf / cm. In addition, it was found that the Ra reduction effect of the ceramic green sheet was obtained. When the nip roll surface temperature is 20 to 100 ° C. and the pressing pressure (linear pressure) is 100 to 600 kgf / cm,
It was found that a greater Ra reduction effect was obtained.

In the above embodiment, the case where a barium titanate-based ceramic powder is used as the ceramic powder constituting the ceramic green sheet has been described as an example. However, in the present invention, the ceramic powder is not limited to this. Instead, when forming ceramic green sheets from various ceramic powders containing strontium titanate, calcium titanate, etc. as main components,
The present invention can be widely applied. Also, the case where an organic slurry is used as the ceramic slurry containing the ceramic powder has been described as an example, but the same effect can be obtained when an aqueous slurry is used. Further, as the ceramic slurry, it is possible to use those containing various binders, plasticizers, etc., according to the target ceramic green sheet,
The type and amount can be appropriately selected and used.

In other respects, the present invention is not limited to the above embodiments and examples, and various applications and modifications can be made within the scope of the invention.

[0072]

As described above, the method for producing a ceramic green sheet according to the present invention (claim 1) is a method of forming a ceramic green sheet into a sheet on a carrier film and drying the sheet to obtain a dried sheet (smoothing treatment). The ceramic green sheet not subjected to the above is pressed using a flat plate pressing machine to obtain a press plate surface temperature of 0 to 150 ° C. and a press pressure of 5
The flat pressing of the carrier film together with the carrier film is performed under the condition of 00 to 10000 kgf / cm ² , so that the smoothness of the surface of the ceramic green sheet can be improved without depending on the particle size and dispersibility of the ceramic. Thus, a ceramic green sheet suitable for use in a multilayer ceramic capacitor or the like can be reliably manufactured. In addition, since the density of the ceramic green sheet is increased by the smoothing process, when an internal defect such as a pore is generated or when the electrode paste is printed on the ceramic green sheet, the solvent component of the electrode paste permeates the sheet and the sheet is soaked. It is possible to suppress the occurrence of a sheet attack phenomenon in which the binder is dissolved. Therefore, by manufacturing a multilayer ceramic electronic component such as a multilayer ceramic capacitor using the ceramic green sheet manufactured by the method of the present invention, it is possible to manufacture a multilayer ceramic electronic component having a long average life and broken reliability. Will be possible. Further, in the present invention, since the ceramic green sheet is subjected to a smoothing process, the ceramic green sheet surface is smoothed by the high dispersibility of the ceramic particles. When dispersing the rally, it is not necessary to apply excessive shearing force to the ceramic particles, suppressing and preventing the ceramic particles from being crushed, and by the cohesion variation of the ceramic particle lot, etc.
It is possible to efficiently prevent the characteristics of the multilayer ceramic electronic component from deviating from a target range or obtaining only a characteristic value lower than the target characteristic value. Specifically, for example, in the case of a multilayer ceramic capacitor, it is necessary to efficiently suppress the occurrence of a situation in which a design temperature characteristic is out of a target range or a capacitance value less than a design capacitance is obtained. Becomes possible. Further, the present invention is particularly significant when manufacturing a ceramic green sheet for a multilayer ceramic electronic component having a ceramic layer thickness (element thickness) of 3 μm or less, for example, a thin-film multilayer small-sized large-capacity multilayer ceramic capacitor. When it is applied to manufacture a multilayer ceramic capacitor having excellent electrical characteristics and high reliability, it becomes possible to efficiently manufacture the multilayer ceramic capacitor.

The ceramic ceramic according to claim 2 of the present invention.
Press sheet surface temperature as in the method of manufacturing lean sheet:
20-100 ° C, press pressure: 1000-6000kgf
/cm ²In the case of flat plate press processing under the conditions of
More reliable surface smoothness of ceramic green sheets
Can be improved.

Further, according to the method for producing a ceramic green sheet of the present invention (claim 3), a dried sheet (not subjected to a smoothing treatment) obtained by forming a ceramic slurry into a sheet on a carrier film and drying it. The ceramic green sheet) was pressed using an isostatic press at a press temperature of 0 to 150 ° C. and a press pressure of 500 to 10,000.
The same effect as in the case of the invention of claim 1 wherein the carrier film is subjected to isostatic pressing under the condition of kgf / cm ² , but also in this case, the smoothing is performed by the flat plate pressing method. Can be obtained.

Further, as in the method for manufacturing a ceramic green sheet according to claim 4, the pressing temperature is 20 to 100 ° C.
Pressing pressure: under conditions of 1000-6000 kgf / cm ² ,
By performing the isostatic pressing, it is possible to more reliably improve the smoothness of the surface of the ceramic green sheet.

In the method for producing a ceramic green sheet according to the present invention (claim 5), a dried sheet (not subjected to a smoothing treatment) obtained by forming a ceramic slurry into a sheet on a carrier film and drying it. The ceramic green sheet) is calender-rolled together with the carrier film using a calender roll machine under the conditions of nip roll surface temperature: 0 to 150 ° C., press pressure (linear pressure): 50 to 1000 kgf / cm.
It is possible to improve the smoothness of the surface of ceramic green sheets without depending on the particle size and dispersibility of ceramic, and to reliably produce ceramic green sheets suitable for use in multilayer ceramic capacitors etc. Becomes possible. Further, the calender roll method is suitable for continuous processing, and makes it possible to manufacture ceramic green sheets more efficiently by making the manufacturing process of ceramic green sheets continuous.

Further, as in the method for manufacturing a ceramic green sheet according to the sixth aspect, the nip roll surface temperature: 20 to
100 ° C, press pressure (linear pressure): 100 to 600 kgf / c
If calendar roll processing is performed under the condition of m,
It is possible to further reliably improve the smoothness of the surface of the ceramic green sheet.

In a multilayer ceramic electronic component in which the thickness (element thickness) of the ceramic layer interposed between the internal electrodes is 3 μm or less, the surface roughness (Ra value) of the ceramic green sheet used in the production thereof is reduced. , 100nm
, The life tends to be sharply reduced. In such a case, by applying the present invention (Claim 7), even when the thickness is small, the surface roughness (Ra) of the ceramic green sheet can be reduced. Value) can be set to 100 nm or less, and the durability of the multilayer ceramic electronic component manufactured using the same can be improved.

Further, as in the method for producing a ceramic green sheet according to claim 8, the present invention produces a ceramic green sheet for a multilayer ceramic electronic component which is required to be thin and excellent in surface smoothness. This is particularly significant when applied to the case where the ceramic green sheet is held in a carrier film in the forming step of forming the ceramic slurry into a sheet or the smoothing step of smoothing the surface, and the lamination is performed. In the process,
By being used after being peeled off from the carrier film, it becomes possible to efficiently manufacture, for example, a thin multilayer ceramic electronic component having a thin ceramic layer interposed between the internal electrodes.

[Brief description of the drawings]

FIG. 1 is an electron micrograph showing a surface state of a ceramic green sheet of a comparative example.

FIG. 2 is an electron micrograph showing a surface state of a ceramic green sheet manufactured by a method according to an embodiment of the present invention.

FIG. 3 is a sectional view showing the structure of the multilayer ceramic capacitor.

FIG. 4 is a view showing a conventional method for manufacturing a ceramic green sheet.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ceramic layer 2a, 2b Internal electrode 3 Ceramic element 4a, 4b External electrode

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4G030 AA67 BA09 CA08 GA19 5E001 AB03 AE02 AE03 AH05 AJ02 5E082 AA01 AB03 EE04 EE23 EE35 FF05 FG06 FG26 FG54 GG10 JJ23 KK01 LL01 MM22 MM24 PP04 PP06 PP07

Claims (8)

[Claims] 1. A forming step in which a ceramic slurry in which ceramic powder is dispersed in a dispersion medium is applied on a carrier film and formed into a sheet, and the ceramic slurry formed into a sheet on the carrier film is dried. A drying step, drying the ceramic slurry by drying the dried sheet formed on the carrier film, using a flat plate press equipped with at least a pair of press plates, press plate surface temperature: 0 to 150 ° C., press pressure: 500-10000
a flattening process of flattening the surface by carrying out a flat plate pressing process on the carrier film under the condition of kgf / cm ² . ^2. The method for producing a ceramic green sheet according to claim 1, wherein the flat plate pressing is performed under the conditions of a press plate surface temperature: 20 to 100 ° C. and a press pressure: 1000 to 6000 kgf / cm ² . 3. A forming step of applying a ceramic slurry in which ceramic powder is dispersed in a dispersion medium to a carrier film and forming it into a sheet, and drying the ceramic slurry formed into a sheet on the carrier film. A drying step, and drying the ceramic slurry by drying the dried sheet formed on the carrier film using an isostatic press at a press temperature of 0 to 150 ° C. and a press pressure of 50.
A method for producing a ceramic green sheet, comprising: performing a hydrostatic pressing process on the carrier film together with the carrier film under the condition of 0 to 10,000 kgf / cm ² to smooth the surface. 4. The method for producing a ceramic green sheet according to claim 3, wherein the hydrostatic pressing is performed under the conditions of a press temperature: 20 to 100 ° C. and a press pressure: 1000 to 6000 kgf / cm ² . 5. A forming step of applying a ceramic slurry in which ceramic powder is dispersed in a dispersion medium to a carrier film and forming the same into a sheet, and drying the ceramic slurry formed into a sheet on the carrier film. A drying step; drying the ceramic slurry by drying the ceramic slurry, using a calender roll machine having at least a pair of nip rolls, the nip roll surface temperature: 0 to 150 ° C., press pressure (linear pressure) ): A method for producing a ceramic green sheet, comprising: a calender roll treatment under a condition of 50 to 1000 kgf / cm to smooth the surface. 6. A nip roll surface temperature: 20 to 100 ° C.
The method for producing a ceramic green sheet according to claim 5, wherein calender roll treatment is performed under a condition of a pressing pressure (linear pressure): 100 to 600 kgf / cm. 7. The ceramic green sheet according to claim 1, wherein the smoothing treatment is performed so that the surface roughness (Ra value) of the ceramic green sheet becomes 100 nm or less. Production method. 8. The method according to claim 8, wherein the ceramic green sheet is peeled off from the carrier film and laminated to be used for manufacturing a laminated ceramic electronic component.
The method for producing a ceramic green sheet according to claim 1, wherein the ceramic green sheet is held releasably on the carrier film.