JP2001110868A - Stocking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a stocking device which safely stocks mask plates and film substrates used in a liquid crystal manufacturing line while improving efficiency in the work. SOLUTION: In a stocking device 1 mask plates 70 are manually placed parallel on a plurality of first placing sections 30 provided in a main body 2 which is placed on a pedestal 11, through an opening for worker. In this case the body 2 is positioned by the first positioning section 10 by a parallelism maintaining section 20, and the mask plates 70 are positioned on the sections 30 by the second positioning section 40. In addition, the second placing section 50 is placed on the third placing section 60. The mask plates 70 on the first placing sections 30 are carried out by means of a robot transfer hand 90 through an opening for robot on the opposite side to the opening for worker, and inserted into another first device, film substrates 80 are carried out from the placing section of another second device by means of the transfer hand 90 and placed on the second placing section 50, and carried out to another third device from the second placing section 50. Accordingly a loss of the film substrates 80 is not generated and the productive efficiency and safety of a liquid crystal manufacturing line are improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a storage device,
Specifically, the present invention relates to a storage device for a mask plate and a film substrate in a liquid crystal manufacturing line.

[0002]

2. Description of the Related Art Conventionally, in a production line for semiconductors, liquid crystals, etc., storage devices are, for example, a gap agent dispersing device and a second other device as a first other device, mainly a transfer robot. A gap baking furnace and a gap agent counting device, which is a third other device, are arranged so as to surround them, and the processing is performed in the following step sequence. That is, first, a plurality of mask plates placed manually in the storage device are put into the gap agent spraying device, which is the first other device, by the transfer robot,
Perform positioning and spray a gap agent over a certain area on the film. This mask plate is used a certain number of times. Next, the film substrate sprayed by the gap agent spraying device is placed in a gap baking furnace, which is a second other device, by a transfer robot, and baked for a predetermined time. Further, the film substrate baked in the gap baking furnace is put into a gap agent counting device, which is a third other device, by a transfer robot, the gap agent within a certain area is measured, and a pass / fail judgment is made. It is transferred to the next process device by the robot hand.

[0003] In the storage device, only a plurality of mask plates used in the gap agent spraying device, which is the first other device, are mounted.

[0004]

However, in such a conventional technique, when a trouble occurs in a downstream process or when different kinds of films are produced on the same line, the second other apparatus is used. There is a problem that the baking time of a certain gap baking furnace is shortened, and the tact with the downstream equipment may not be compatible.In addition, it is necessary to insert the mask plate manually into the storage device from the robot side. There is a problem in that the performance of the transfer hand and the robot is affected when the mask plate is dropped because of poor performance.

[0005] Therefore, the invention according to claim 1 provides an apparatus main body which is positioned on the gantry by the first positioning means and is placed in a state where the parallelism is maintained by the parallel maintaining means.
A mask plate is placed on a plurality of first placing means provided manually from the opening for the operator, and the positioning of the mask plate placed on the first placing means is performed by the second positioning means. Second
The placing means is placed on the third placing means, and is manually placed on the first placing means from the robot opening formed on the surface of the apparatus main body which is different from the worker opening. The mask plate is unloaded by the robot transfer hand and inserted into the first other device, and the film substrate is inserted into the mask plate and positioned from the previous process of the first other device, and the film substrate is transferred by the robot transfer hand. The film substrate is carried out and inserted into the second other device, and the film substrate is carried out from the second other device by the robot transfer hand and placed on the second placing means, or directly from the second other device. 3
The film substrate is placed on another device, and the film substrate is further carried out from the second placing means to the third other device, so that when a downstream process device is stopped or a different type of film is placed on the same line. In the production of substrates, the tact time is appropriately adjusted, the production efficiency is improved by eliminating the failure of the film substrate, and the mask plate is formed on a surface different from the robot opening. It is an object of the present invention to provide a storage device that can be inserted through a user opening to improve work efficiency and safety.

According to a second aspect of the present invention, the same number of the second placing means and the third placing means as the placing means of the second other apparatus are provided, so that the damage to the film substrate is further reduced. Accordingly, it is an object of the present invention to provide a storage device capable of appropriately positioning a peripheral device and improving the production efficiency.

According to a third aspect of the present invention, the first positioning means is provided with a positioning pin provided on the gantry, and a guide hole provided on the apparatus main body and engaging with the positioning pin of the gantry, and is maintained in parallel. Means is provided with a plurality of screw holes provided in the apparatus main body, and a plurality of adjustment screws which are screwed into the screw holes and maintain and adjust the parallelism of the apparatus main body between the frame and the base. , It is easy to maintain and adjust the positioning and parallelism of the device body, and to properly and easily perform the positional relationship with the robot transfer hand while positioning it with other devices that are kept parallel. It is an object of the present invention to provide a storage device that can perform the storage.

According to a fourth aspect of the present invention, when a mask and a film substrate are transferred by the robot transfer hand, a plurality of windows for facilitating position adjustment of the robot transfer hand are provided in the storage device. It is an object of the present invention to provide a storage device that can easily and quickly set the positioning of a film substrate or a mask plate with a mounting hand, and can further improve work efficiency and safety.

According to a fifth aspect of the present invention, the first mounting means comprises:
An object of the present invention is to provide a storage device that can be formed of a resin material to reduce a coefficient of friction when a mask plate is inserted, improve cleanliness, and improve a working environment.

According to a sixth aspect of the present invention, the second positioning means holds the first mounting means so as to be able to move up and down in the vertical direction to position the mask plate. When raised, insert the mask plate from the worker side,
It is an object of the present invention to provide a storage device capable of positioning the mask plate when the first mounting means is lowered, and more reliably positioning the robot transfer hand and the mask plate.

According to a seventh aspect of the present invention, the second mounting means includes:
A pair of pins penetrating into a pair of holes formed at opposing positions of the film substrate is formed, and a positioning plate having positioning holes formed at the opposing positions is provided. By providing a pair of positioning pins that penetrate the positioning holes formed in the positioning plate, the robot transfer hand can position the film substrate with other devices, and the positioning plate can be moved. It is an object of the present invention to provide a storage device that can be easily taken out and easily cleaned to further improve the cleanliness.

According to an eighth aspect of the present invention, the positioning plate is formed with a plurality of holes for venting air, thereby preventing the positioning plate from being lifted when the film substrate is sucked by the robot transfer hand. It is another object of the present invention to provide a storage device capable of further improving work performance.

[0013]

According to a first aspect of the present invention, there is provided a storage device, comprising: first positioning means for positioning an apparatus main body mounted on a gantry on the gantry; and the apparatus on the gantry. Parallel maintaining means for maintaining and adjusting the parallelism of the main body; and a plurality of first means provided in the apparatus main body for mounting a mask plate.
Mounting means, second positioning means for positioning the mask plate mounted on the first mounting means, second mounting means for positioning and mounting a film substrate, and the second mounting Third mounting means for mounting the means, an opening for an operator enabling manual mounting of the mask plate on the first mounting means, and the mask on the first mounting means The unloading of the substrate, the insertion of the film substrate placed on the second placement means on the third placement means, and the placement of the film substrate on the second placement means from above the third placement means An opening for a robot formed on a surface different from the opening for the operator of the apparatus body for carrying out the film substrate;
The mask plate manually placed on the placing means is unloaded by a robot transfer hand and inserted into a first other device, and the film substrate is transferred from the first other device by the robot transfer hand. The robot substrate is carried out and inserted into a second other device, and the film substrate is carried out from the second other device by the robot transfer hand and placed on the second placing means.
The above object is achieved by unloading the film substrate from the mounting means to a third other device.

[0014] According to the above configuration, the apparatus is manually placed through the opening for the operator in the apparatus main body which is positioned on the gantry by the first positioning means and is maintained in parallel with the parallel maintaining means. A mask plate is placed on a plurality of first placing means, and the mask plate placed on the first placing means is positioned by a second positioning means, and is positioned on the second placing means. The film substrate placed on the first mounting means is placed on the third mounting means, and is manually placed on the first mounting means from an opening for the robot formed on a surface different from the opening for the operator of the apparatus body. The mask plate placed in the step is carried out by the robot transfer hand and inserted into the first other device, and the film substrate is carried out from the first other device by the robot transfer hand and inserted into the second other device. Then, the film substrate is unloaded from the second other device by the robot transfer hand and Placed on placing means, further second
Since the film substrate is carried out to the third other device from the mounting means, even when the downstream processing device is stopped or when different types of film substrates are produced on the same line, the tact time is appropriately adjusted, In addition, it is possible to improve the production efficiency by eliminating the failure of the film substrate,
The mask plate can be inserted from an operator opening formed on a surface different from the robot opening to improve work efficiency and safety.

In this case, for example, the second mounting means and the third mounting means are provided by the same number as the mounting means of the second other device. Is also good.

According to the above arrangement, the second mounting means and the third mounting means
Since the mounting means is provided by the same number as the mounting means of the second other device, the damage to the film substrate is further reduced,
Positioning with peripheral devices can be appropriately performed, and production efficiency can be further improved.

Further, for example, as set forth in claim 3, the first positioning means includes a positioning pin provided on the gantry, and a guide hole provided on the apparatus main body and engaged with the positioning pin of the gantry. The parallel maintaining means comprises: a plurality of screw holes provided in the apparatus main body; and a plurality of adjustment screws screwed into the screw holes to maintain and adjust the parallelism of the apparatus main body between the mount and the mount. And may be provided.

According to the above arrangement, the first positioning means is
It is provided with a positioning pin provided on the gantry, and a guide hole provided on the apparatus main body and engaging with the positioning pin of the gantry. The parallel maintaining means is provided with a plurality of screw holes provided on the apparatus main body, And a plurality of adjustment screws that are screwed into the holes to maintain and adjust the parallelism of the device body with the gantry, so that the positioning and parallelism of the device body can be easily maintained and adjusted, The positional relationship with the robot transfer hand can be appropriately and easily performed while locating the position with another device kept parallel.

Further, for example, as described in claim 4, the storage device can easily adjust the position of the robot transfer hand when transferring the mask and the film substrate with the robot transfer hand. A plurality of windows may be provided.

According to the above arrangement, when the mask and the film substrate are transferred by the robot transfer hand, a plurality of windows are provided in the storage device to facilitate the position adjustment of the robot transfer hand. The setting of the positioning of the film substrate or the mask plate can be performed easily and in a short time with a hand, and the working efficiency and safety can be further improved.

Also, for example, the first mounting means may be formed of a resin material.

According to the above configuration, since the first mounting means is formed of a resin material, the coefficient of friction when inserting the mask plate can be reduced, the cleanness can be improved, and the working environment can be improved. Can be improved.

Further, for example, as set forth in claim 6, the second positioning means positions the mask plate by holding the first mounting means so as to be able to move up and down in a vertical direction. Is also good.

According to the above arrangement, the second positioning means is
Since the positioning of the mask plate is performed by holding the first mounting means so as to be able to move up and down in the vertical direction, the mask plate is inserted from the operator side when the first mounting means is raised, and The mask plate can be positioned when the placing means is lowered, so that the robot transfer hand and the mask plate can be positioned more reliably.

Further, for example, as set forth in claim 7, the second mounting means is formed with a pair of pins which penetrate into a pair of holes formed at opposing positions of the film substrate. And a positioning plate having positioning holes formed at opposing positions, wherein the third mounting means is provided with a pair of positioning pins penetrating into the positioning holes formed in the positioning plate. It may be something.

According to the above construction, the second mounting means is provided with a pair of pins which penetrate into a pair of holes formed at opposing positions of the film substrate, and is provided with a positioning means at the opposing positions. Since the positioning plate is formed with a hole and the third mounting means is provided with a pair of positioning pins that penetrate into the positioning holes formed in the positioning plate, the robot mounting hand can be used to move the other of the film substrate. Positioning with the device can be performed,
The positioning plate can be easily taken out and easily cleaned, so that the degree of cleanliness can be further improved.

Further, for example, as described in claim 8, the positioning plate may have a plurality of holes for venting air.

According to the above configuration, the positioning plate is
Since it is assumed that multiple holes for air release are formed,
It is possible to prevent the positioning plate from being lifted when the film substrate is sucked by the robot transfer hand, so that the work performance can be further improved.

[0029]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. It should be noted that the embodiments described below are preferred embodiments of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention is not limited to the following description. The embodiments are not limited to these embodiments unless otherwise specified.

1 to 5 are views showing an embodiment of the storage device of the present invention. FIG. 1 is a front view of a storage device 1 to which the embodiment of the storage device of the present invention is applied. FIG. 2 is a side view of the storage device 1.

The storage device 1 includes a first positioning section (first positioning section) 10, a parallel maintaining section (parallel maintaining section) 20, a first placing section (first placing section) 30, and a second positioning section (first placing section). 2
Positioning means) 40, second placement section (second placement means) 5
0, a third mounting part (third mounting means) 60, which is used to store the mask plate 70 (see FIG. 3) and the film substrate 80 (see FIG. 4) in the liquid crystal production line. In FIG. 1, the storage device 1 has a front side and a rear side opposite to the front side. The one side is an opening for an operator, and the other side is an opening for a robot. Used as

The storage device 1 discharges the mask plate 70 on the first mounting portion 10 which has been manually mounted from the worker opening by the robot transfer hand 90 and the first other device (not shown). Ejecting / inserting the mask plate 70 to be inserted into the device, ejecting the film substrate 80 by the robot transfer hand 90, inserting the film substrate 80 from the second other device (not shown), and placing the second mounting portion 5
The mask plate 70 and the film substrate 80 are stored in order to mount the film substrate 80 on the second mounting portion 50 and discharge the film substrate 80 from the second mounting portion 50 to the third other device. .

The mask plate 70 stored in the storage device 1
As shown in FIG. 3, is a jig used for a gap dispersing device which is a first other device, and is used for dispersing a gap agent in a designated area of the film substrate 80 shown in FIG.

The mask plate 70 has a ring-shaped square mask 72 attached to a substrate 71, and the substrate 71 has a positioning portion 71 used for positioning with the storage device 1.
a, Robot transfer hand 9 formed on positioning section 71a
A positioning hole 71b used for positioning with the No. 0 positioning pin 91a (see FIG. 1) is formed. Mask 72
Are fixed to the substrate 71 by screws 72a, and formed with positioning holes 72b used for fixing to a gap agent spraying device which is a first other device. When the gap agent is dropped between the designated range 72c and the designated range 72d of the ring-shaped square mask 72, the mask plate 70 adheres the gap agent onto the film substrate 80 shown in FIG.

A plurality of (five in this embodiment) mask plates 70 are placed on each step of the groove of the resin shelf plate 33 of the storage device 1 shown in FIG. It is positioned by the protrusion 42a.

The film substrate 80 is, as shown in FIG.
Two positioning holes 81a and 81b are formed, and when baked in a gap material baking furnace, which is a second other apparatus, is temporarily placed on a positioning plate 100 shown in FIG. You.

The positioning plate 100 includes a pair of positioning pins 101a that enter into the positioning holes 81a and 81b formed in the film substrate 80, a positioning hole 101b into which the positioning pins 52a (see FIG. 1) formed in the storage device 1 enter, 101c, a plurality of air holes 101d formed side by side on both sides of the positioning pin 101a, and bent portions 101e formed on opposing surfaces of the two cutout portions 102 are formed. Positioning pin 101a
Performs the positioning of the film substrate 80 and the positioning hole 1
01b is used for positioning during storage in the storage device 1. The air hole 101d is provided at a position corresponding to the position of the suction pad 92 of the robot transfer hand 90, and prevents the film substrate 80 from being sucked and lifted. Further, the four bends 101e are formed in order to improve the rigidity of the flatness of the positioning plate 100.

Referring again to FIG. 1, the first positioning part 10 of the storage device 1 includes a gantry 11, two locating pins 11a fixed to the gantry 11, and two guide holes provided on the bottom plate 12. 12a, and the positioning of the gantry 11 and the storage device 1 is performed by inserting the guide holes 12a of the bottom plate 12 into the positioning pins 11a of the gantry 11,
The positional relationship with the robot transfer hand 90 is established.

The parallel maintaining unit 20 includes four screw holes (not shown) provided in the gantry 11 and the bottom plate 12, an adjusting screw 21 whose tip is flat and can be freely tilted, and a fixing screw 22, By appropriately adjusting the adjusting screw 21, the robot transfer hand 90 is maintained in parallel with the robot transfer hand 90, and the suction pad 92 of the robot transfer hand 90, the suction pad 92 of the robot transfer hand 90, and the film substrate 80 are connected to each other. Maintain parallelism.

The first mounting portion 30 includes a bottom plate 12 and a reinforcing plate 31.
a, left side plate 32a and right side plate 32b fixed to 31b
A resin shelf plate 33 having a plurality of (15 in the present embodiment) recessed groove-shaped steps fixed to the inside of the storage device 1 of the left side plate 32a and the right side plate 32b, respectively;
And the mask plate 7 is provided on the groove-shaped step of the shelf plate 33.
0 is manually inserted from the worker opening on the worker side shown in FIG.

As shown in FIG. 2, the second positioning portion 40 includes a long hole 41 provided in the left side plate 32a and the right side plate 32b, and a positioning plate 42 inserted in the long hole 41.
And a holding screw 44 that is inserted into the elongated hole 43 and fixes the positioning plate 42, moves up and down along the elongated hole 43, and positions the mask plate 70.

The positioning of the mask plate 70 is such that the screw portion of the holding screw 44 is moved up and down by the elongated hole 43 of the positioning plate 42, and the positioning of the mask plate 70 is performed in a state where the positioning plate 42 is lowered by its own weight. Positioning is performed with the positioning portions 71a at both ends in contact with the projections 42a of the positioning plate 42.

When the mask plate 70 is taken out manually, the positioning plate 42 is raised and fixed with the holding screw 44, so that the mask plate 70 can be taken out easily and safely.

The second mounting portion 50 includes a positioning parallel pin 51 provided on the left side plate 32a and the right side plate 32b, and an angle-shaped plate 52 fastened to the parallel pin 51 with a screw.
And a fastening plate 53 to which the plate 52 is fixed by screws.
Positioning and mounting via.

The fastening plates 53 are respectively provided on the left and right side plates 32.
a, 32b so that even if the angled plate 52 is disassembled, it will remain at the same position.
2a and screw holes formed in the right side plate 32b are fixed with screws.

The angled plate 52 has a positioning pin 52a, an air vent hole 52b, and a teaching round hole 52c which enter the positioning holes 101b, 101c of the positioning plate 100, and a left side plate 32a and a right side plate 32b. Each is provided at the same position.

The third mounting section 60 is for mounting the second mounting section 50, and is disposed in the same number of shelves as, for example, 4 shelves of a gap baking furnace as a second other apparatus. , The second placement unit 50 is placed. The third mounting part 60 is provided at the angle 6
1, a top plate 62, a rear plate 63 and the like. The angle 61 fixes and reinforces the left side plate 32a, the right side plate 32b, and the top plate 62, respectively, and the rear plate 63 is as shown in FIG. The left side plate 32a and the right side plate 32b are fixed and reinforced.

Next, the operation of the present embodiment will be described. In the storage device 1, the device main body 2 is positioned on the gantry plate 11 by the first positioning portion 10. The first positioning portion 10 inserts the guide holes 12 a of the bottom plate 12 into the positioning pins 11 a of the gantry 11. To position the gantry 11 and the apparatus main body 2 to establish a positional relationship with the robot transfer hand 90. The main unit 2 includes a parallel maintaining unit 20.
By appropriately adjusting the adjusting screw 21 that can be freely tilted and inserted into four screw holes (not shown) provided on the gantry 11 and the bottom plate 12, and fixing the adjusting screw 21 with the fixing screw 22,
The robot transfer hand 90, the mask plate 70, and the robot transfer hand 9 are maintained in parallel with the robot transfer hand 90.
The zero suction pad 92 and the film substrate 80 are kept parallel.

In the storage device 1 thus positioned and maintained in parallel, the mask plate 70 is provided on each side of the groove shape formed on the shelf plate 33 of the first mounting portion 30 on the side opposite to the robot opening. The mask plate 70 is manually inserted through an opening for an operator formed in the positioning plate 42 by using the screw portion of the holding screw 44 of the second positioning portion 40.
3, the positioning plate 42 is lowered by its own weight, and the positioning portions 71a at both ends of the mask plate 70 are positioned in contact with the projections 42a of the positioning plate 42. When the mask plate 70 inserted into each stage of the shelf plate 33 is taken out manually, the positioning plate 42 is raised and fixed by the holding screw 44.
It can be easily and safely taken out.

Then, the storage device 1 places the film substrate 80 via the positioning plate 100 on the second placement portion 50 placed on the third placement portion 60.

The storage device 1 includes a second mounting portion 50 on which the film substrate 80 is mounted and a third mounting portion 50 on which the second mounting portion 50 is mounted.
The same number of mounting sections 60 as the number of mounting sections of the gap baking furnace as the second other apparatus are provided.

Then, in the storage device 1, the mask plate 70 on the first mounting portion 30 is discharged from the opening for the robot by the robot transfer hand 90, and the mask is transferred to the first other device, the gap dispersing device. The plate 90 is inserted. Further, the film substrate 80 is discharged from the gap material spraying device, which is the first other device, by the robot transfer hand 90, and the film substrate 80 is placed on the mounting portion of the gap baking furnace, which is the second other device. And the film substrate 80 is discharged by a robot transfer hand from a gap baking furnace, which is a second other apparatus,
The film substrate 80 is placed on the second placement unit 50, or is discharged directly from the second other device to the gap agent counting device, which is the third other device. Further, the film substrate 80 is discharged from the second mounting portion 50 to a gap agent counting device which is a third other device.

In such a working operation, the storage device 1 according to the present embodiment is placed on the gantry 11 with the first positioning portion 10 and the parallel maintaining portion 20 maintaining the parallelism. In the apparatus main body 2, a plurality of mask plates 70 are placed on a plurality of first placing portions 10 provided manually through openings for workers, and the mask plates 70 placed on the first placing portions 10 are provided. Is performed by the second positioning unit 40, and the second
Film substrate 8 positioned and mounted on mounting section 50
0 is placed on the third placement unit 60, and is manually placed on the first placement unit 30 from the robot opening formed on the surface of the apparatus main body 2 that is different from the worker opening. Mask plate 7
0 is carried out by the robot transfer hand 90 and inserted into the first other device, and the film substrate 80 is discharged from the mounting portion of the second other device by the robot transfer hand 90, and the second mounting portion 50 And the film substrate 80 is carried out to the third other device from above the second mounting portion 50.

Therefore, even when the downstream process equipment is stopped or when different types of film substrates 80 are produced on the same line, the tact time is appropriately adjusted, and
It is possible to improve the production efficiency by eliminating the failure of the film substrate 80, and insert the mask plate 70 from the operator opening formed on the surface different from the robot opening, thereby improving work efficiency and safety. Can be improved.

If any trouble occurs in the downstream device, as described above, the storage device 1 mounts the second mounting portion 50 on which the film substrate 80 is mounted and the second mounting portion 50. The number of the third mounting portions 60 is equal to the number of mounting portions (mounting means) of the gap baking furnace, which is the second other device, so that the film substrate 80 is mounted on the storage device 1. Thus, it is possible to eliminate damage to the film substrate 80.

The storage device 1 has positioning pins 11a on the gantry 11 side and guide holes 12a on the bottom plate 12 on the device main body 2 side to position the main device 2,
A screw hole is provided in the bottom plate 12 on the side of the apparatus main body 2 and a plurality of adjustment screws 21 whose tips are flat and can be freely tilted are provided, and the adjustment screws 21 are appropriately adjusted to maintain the parallelism and transfer the robot. Positioning and parallelism with the hand 90 are maintained.

Therefore, the positioning with respect to another device can be established simply and accurately, and the occurrence of transfer failure can be prevented.

Furthermore, the storage device 1 is a window for teaching, which is a window for facilitating position adjustment of the robot transfer hand 90 when the mask transfer plate 90 and the film substrate 80 are transferred by the robot transfer hand 90. A plurality of holes 52c are provided in the plate 52 of the storage device 1.

Therefore, the positioning of the film substrate 80 and the mask plate 70 can be set easily and in a short time by the robot transfer hand 90, and the working efficiency and safety can be further improved.

Further, the storage device 1 includes the first mounting portion 30
Since it is formed of a resin material, the coefficient of friction when the mask plate 70 is inserted can be reduced, the cleanliness can be improved, and the working environment can be improved.

Further, the storage device 1 includes the second positioning portion 4
Numeral 0 is used to position the mask plate 70 by holding the first mounting portion 30 so as to be able to move up and down in the vertical direction.

Therefore, when the first mounting portion 30 is raised, the mask plate 70 is inserted from the operator side, and the first mounting portion 3
When 0 is lowered, the mask plate 70 can be positioned, and the robot transfer hand 90 and the mask plate 70 can be positioned more reliably.

In the storage device 1, the second mounting portion 50 is
A positioning plate in which a pair of positioning pins 101a penetrating into a pair of positioning holes 81a, 81b formed at opposing positions of the film substrate 80 and positioning holes 101b, 101c are formed at opposing positions. 100, and the third mounting portion 60 is provided with positioning holes 101b, 101c formed in the positioning plate 100.
Is provided with a pair of positioning pins 52a that penetrate into the.

Therefore, the position of the film substrate 80 relative to other devices can be determined by the robot transfer hand 90, and the positioning plate 100 can be easily taken out and easily cleaned, thereby further improving the cleanliness. Can be.

Further, in the storage device 1 of the present embodiment, the positioning plate 100 is
Are formed.

Accordingly, when the robot transfer hand 90 sucks the film substrate 80, the positioning plate 100
Can be prevented from being lifted, and the work performance can be further improved.

Although the invention made by the inventor has been specifically described based on the preferred embodiments, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the invention. It goes without saying that it is possible.

[0068]

According to the storage device of the first aspect of the present invention, the apparatus main body which is positioned on the gantry by the first positioning means and placed in a state where the parallelism is maintained by the parallel maintenance means, A mask plate is placed on a plurality of first placing means provided manually from the opening for the operator, and the positioning of the mask plate placed on the first placing means is performed by the second positioning means. The film substrate positioned and placed on the second placement means is placed on the third placement means, and a robot opening formed on a surface different from the worker opening of the apparatus main body. The mask plate manually placed on the first placing means is unloaded by the robot transfer hand and inserted into the first other device, and the film substrate is unloaded from the first other device by the robot transfer hand. Into the second other device and transfer the film substrate from the second other device to the robot. Since the film substrate is unloaded by hand and placed on the second mounting means, and the film substrate is further unloaded to the third other device from the second mounting means, when the downstream processing apparatus is stopped or when the same processing is performed on the same line. Even when producing different types of film substrates, adjust the tact time appropriately, and
It is possible to improve the production efficiency by eliminating the damage of the film substrate, and improve the work efficiency and safety by inserting the mask plate from the operator opening formed on the different surface from the robot opening. Can be done.

According to the storage device of the second aspect of the present invention,
Since the second mounting means and the third mounting means are provided in the same number as the mounting means of the second other device, the damage of the film substrate is further reduced, and the positioning with the peripheral device is appropriately performed. The production efficiency can be further improved.

According to the storage device of the third aspect of the present invention,
The first positioning means is provided with a positioning pin provided on the gantry, and a guide hole provided on the apparatus main body and engaging with the positioning pin of the gantry, and the parallel maintaining means is provided on a plurality of devices provided on the apparatus main body. Since it is provided with a screw hole and a plurality of adjusting screws which are screwed into the screw hole and maintain and adjust the parallelism of the device main body between the mount and the frame, the positioning and parallelism of the device main body can be easily maintained. It can be adjusted, and the positional relationship with the robot transfer hand can be appropriately and easily performed while positioning with another device which is kept parallel.

According to the storage device of the fourth aspect of the present invention,
When the mask and film substrate are transferred by the robot transfer hand, a plurality of windows are provided in the storage device to facilitate the position adjustment of the robot transfer hand, so that the robot transfer hand positions the film substrate and the mask plate. Can be set easily and in a short time, and the working efficiency and safety can be further improved.

According to the storage device of the invention described in claim 5,
Since the first mounting means is formed of a resin material, the coefficient of friction when the mask plate is inserted can be reduced, the cleanliness can be improved, and the working environment can be improved.

According to the storage device of the invention described in claim 6,
Since the second positioning means holds the first mounting means so as to be able to move up and down in the vertical direction to position the mask plate, when the first mounting means is raised, the mask plate is moved from the operator side. When inserting and lowering the first mounting means, the mask plate can be positioned, and the robot transfer hand and the mask plate can be positioned more reliably.

According to the storage device of the invention described in claim 7,
The second mounting means is a positioning plate having a pair of pins formed in a pair of holes formed at opposing positions of the film substrate, and a positioning hole formed at the opposing positions. Since the third mounting means is provided with a pair of positioning pins penetrating into the positioning holes formed in the positioning plate, it is possible to position the film substrate with other devices by the robot transfer hand. In addition, the positioning plate can be easily taken out and easily cleaned, so that the degree of cleanliness can be further improved.

According to the storage device of the invention described in claim 8,
Since the positioning plate is formed with a plurality of holes for venting air, it is possible to prevent the positioning plate from being lifted when the film substrate is sucked by the robot transfer hand, thereby further improving work performance. be able to.

[Brief description of the drawings]

FIG. 1 is a front view of a storage device to which an embodiment of a storage device according to the present invention is applied.

FIG. 2 is a side view of the storage device of FIG. 1;

FIG. 3 is a perspective view of a mask plate placed and stored in the storage device of FIG. 1;

FIG. 4 is a perspective view of a film substrate stored in the storage device of FIG. 1;

FIG. 5 is a perspective view of a positioning plate on which the film substrate of FIG. 4 is temporarily placed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Storage device 2 Device main body 10 1st positioning part 11 Stand 11a Positioning pin 12 Bottom plate 12a Guide hole 20 Parallel maintenance part 21 Adjusting screw 22 Fixing screw 30 1st mounting part 31a, 31b Reinforcement plate 32a Left side plate 32b Right side plate 33 shelf Plate 40 Second positioning portion 41 Long hole 42 Positioning plate 42a Projecting portion 43 Long hole 44 Holding screw 50 Second mounting portion 51 Parallel pin 52 Plate 52a Positioning pin 52b Air vent hole 52c Round hole 53 Fastening plate 60 Third mounting portion 61 Angle 62 Top plate 63 Rear plate 70 Mask 71 Substrate 71a Positioning portion 71b Positioning hole 72 Mask 72a Screw 72b Positioning hole 72c, 72d Designated range 80 Film substrate 81a, 81b Positioning hole 90 Robot transfer hand 91a Positioning pin 92 Suction pad 00 positioning plate 101a positioning pins 101b, 101c positioning hole 101d air holes 101e bent portion 102 notched portion

Claims (8)

[Claims] A first positioning means for positioning the apparatus main body mounted on the gantry on the gantry; a parallel maintaining means for maintaining and adjusting the parallelism of the apparatus main body on the gantry;
A plurality of first mounting means provided in the apparatus main body for mounting a mask plate, second positioning means for positioning the mask plate mounted on the first mounting means, and positioning a film substrate A second placing means for placing and placing the mask plate on the first placing means; and a third placing means for placing the second placing means on the first placing means. An opening for an operator, unloading of the mask substrate on the first placement means, insertion of the film substrate placed on the second placement means onto the third placement means, A robot opening formed on a surface different from the worker opening of the apparatus main body for carrying out the film substrate mounted on the second mounting means from above the mounting means. The mask plate manually placed on the first placement means is moved by a robot transfer hand. Unloading and inserting into the first other device, the film substrate is unloaded from the first other device by the robot transfer hand and inserted into the second other device, and the film substrate is transferred from the second other device. Wherein the robot substrate is carried out by the robot transfer hand and placed on the second placing means, and the film substrate is carried out from the second placing means to a third other device. apparatus. 2. The storage device according to claim 1, wherein the second mounting means and the third mounting means are provided by the same number as the mounting means of the second other device. . 3. The first positioning means includes a positioning pin provided on the gantry, and a guide hole provided on the apparatus main body and engaging with the locating pin of the gantry. A plurality of screw holes provided in the device main body, and a plurality of adjustment screws screwed into the screw holes to maintain and adjust the parallelism of the device main body between the mount and the frame. The storage device according to claim 1 or 2. 4. The storage device has a plurality of windows for facilitating position adjustment of the robot transfer hand when the mask and the film substrate are transferred by the robot transfer hand. The storage device according to any one of claims 1 to 3, wherein 5. The storage device according to claim 1, wherein said first mounting means is formed of a resin material. 6. The apparatus according to claim 1, wherein said first mounting means positions said mask plate by holding said second positioning means so as to be able to move up and down in a vertical direction. Storage device as described. 7. The second mounting means has a pair of pins which penetrate a pair of holes formed at opposing positions of the film substrate, and a positioning hole at an opposing position. The positioning plate formed, wherein the third mounting means is provided with a pair of positioning pins which enter the positioning holes formed in the positioning plate. 7. The storage device according to any one of 6. 8. The storage device according to claim 7, wherein the positioning plate has a plurality of holes for venting air.