CN220678405U - Coating workbench and slit coating device - Google Patents

Abstract

The application discloses a coating workbench and a slit coating device; the coating workbench comprises a carrying platform and a lifting support column; the carrying platform comprises a horizontal coating area, and the horizontal coating area sequentially comprises a precoating area, a uniform coating area and a ending area along the coating direction; the even coating area is separated from the precoating area and the ending area respectively; the lifting support column is arranged at one side of the uniform coating area; the lifting support column comprises a bearing surface, the bearing surface is used for bearing a piece to be coated, and the lifting support column drives the piece to be coated to vertically lift in the uniform coating area. The coating workbench is used for coating, the coating operation starts in the precoating area, and the coating operation ends in the ending area, so that the thickness of the film layer on the surface of the piece to be coated is not influenced by the liquid amount of the starting knife and the falling knife, and the uniformity of the thickness of the coated film layer is obviously improved.

Description

Coating workbench and slit coating device

Technical Field

The application relates to the technical field of processing, in particular to a coating workbench and a slit coating device.

Background

Slit coating is one coating method commonly used to form thin films. In the process of forming the film by adopting the slit coating process, the thickness of the film layer formed at the knife-lifting position and the knife-retracting position is inconsistent with the thickness of the film layer in the central area.

Disclosure of Invention

The application provides a coating workbench and a slit coating device to improve the homogeneity of coating film layer thickness.

In order to solve the technical problem, the first technical scheme provided by the application is as follows: providing a coating workbench, comprising a carrying platform and a lifting support column; the carrying platform comprises a horizontal coating area, wherein the horizontal coating area sequentially comprises a precoating area, a uniform coating area and a ending area along the coating direction; the even coating area is separated from the precoating area and the ending area; the lifting support column is arranged on one side of the uniform coating area and comprises a bearing surface, the bearing surface is used for bearing a piece to be coated, and the lifting support column drives the piece to be coated to vertically lift in the uniform coating area.

In one embodiment, the leveling zone is provided with a containing groove; the lifting support column is arranged on the bottom wall of the accommodating groove and vertically lifts along the depth direction of the accommodating groove; preferably, the notch surface of the accommodating groove is the leveling zone, and the width of the leveling zone in the coating direction is more than 50% of the total width of the horizontal coating zone; preferably, the width of the leveling coating area in the coating direction accounts for more than 60% of the total width of the horizontal coating area; preferably, the width of the leveling coating area in the coating direction accounts for more than 70% of the total width of the horizontal coating area; preferably, the width of the leveling zone in the coating direction is 80% of the total width of the horizontal coating zone.

In one embodiment, the ratio of the area of the notch surface of the accommodating groove to the area of the horizontal coating area is greater than or equal to 80%; preferably, the width of the pre-coating zone in the coating direction is 10mm-15mm and/or the width of the ending zone in the coating direction is 5mm-20mm.

In one embodiment, the device further comprises a base; the carrying platform is detachably arranged on the base; preferably, a mounting groove is formed in the surface of one side, close to the carrying platform, of the base; the carrying platform also comprises a mounting surface which is arranged opposite to the horizontal coating area, and the mounting surface is provided with an avoidance groove; the side wall of the mounting groove is arranged in the avoidance groove.

In order to solve the technical problem, the second technical scheme provided by the application is as follows: provided is a slit coating apparatus including: a coating station and slot assembly as claimed in any one of the preceding claims; the slit assembly is configured to be slidable relative to a horizontal coating region of the coating station, the slit assembly being for coating a coating surface of a workpiece to be coated disposed on a bearing surface of the coating station.

In one embodiment, the cleaning device further comprises a cleaning assembly; the cleaning component comprises a suction nozzle, wherein the suction nozzle is used for sucking residual liquid on the horizontal coating area after the coating operation of the slit component; the suction nozzle is configured to be relatively slidable with respect to the coating table; preferably, the cleaning assembly further comprises a sump, the suction nozzle being in communication with the sump.

In an embodiment, the cleaning assembly further comprises an absorbent member configured to be slidable relative to the coating station; the suction piece is used for wiping the horizontal coating area after the suction nozzle sucks residual liquid on the horizontal coating area.

In one embodiment, the device further comprises a leveling component, wherein the leveling component is mounted on the base and/or the carrier; the leveling component is used for confirming whether the coating surface of the piece to be coated is flush with the horizontal coating area; preferably, the leveling assembly comprises a laser transmitter for transmitting laser light.

In one embodiment, the device further comprises a heating assembly for baking and annealing the piece to be coated which is coated by the slit assembly.

In one embodiment, the slit component is used for coating a perovskite film or a hole transmission film or an electron transmission film on the surface of the piece to be coated, which is placed on the bearing surface of the coating workbench.

The beneficial effects of this application: different from the prior art, the application discloses a coating workbench and a slit coating device; the coating workbench comprises a carrying platform and a lifting support column; the carrying platform comprises a horizontal coating area, wherein the horizontal coating area sequentially comprises a precoating area, a uniform coating area and a ending area along the coating direction, and the uniform coating area is separated from the precoating area and the ending area respectively; the lifting support column is arranged on one side of the uniform coating area and comprises a bearing surface, the bearing surface is used for bearing a piece to be coated, and the lifting support column drives the piece to be coated to vertically lift in the uniform coating area. The coating workbench is used for coating, the coating operation starts in the precoating area, and the coating operation ends in the ending area, so that the thickness of the film layer on the surface of the piece to be coated is not influenced by the liquid amount of the starting knife and the falling knife, and the uniformity of the thickness of the coated film layer is obviously improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a first embodiment of a coating station provided herein;

FIG. 2 is a schematic top view of the coating station of FIG. 1;

FIG. 3 is a schematic view of the coating station of FIG. 1 with a part to be coated;

FIG. 4 is a schematic view of a second embodiment of a coating station provided herein;

fig. 5 is a schematic structural diagram of a slot coating apparatus according to an embodiment of the present application.

Detailed Description

The following description of the technical solutions in the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, interfaces, techniques, etc., in order to provide a thorough understanding of the present application.

The terms "first," "second," "third," and the like in this application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", and "a third" may include at least one such feature, either explicitly or implicitly. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. All directional indications (such as up, down, left, right, front, back … …) in the embodiments of the present application are merely used to explain the relative positional relationship, movement conditions, etc. between the components under a certain specific posture (as shown in the drawings), and if the specific posture is changed, the directional indication is correspondingly changed. The terms "comprising" and "having" and any variations thereof in the embodiments of the present application are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may alternatively include other steps or elements not listed or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

The present application is described in detail below with reference to the accompanying drawings and examples.

Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of a first embodiment of a coating station provided in the present application, fig. 2 is a schematic structural diagram of a top view of the coating station shown in fig. 1, and fig. 3 is a schematic structural diagram of the coating station shown in fig. 1 with a workpiece to be coated.

The coating station 1 includes a stage 11 and a lifting support column 12. The stage 11 includes a horizontal coating zone 111. The horizontal coating section 111 includes a precoat section 11a, a leveling section 11b, and a finishing section 11c in this order along the coating direction X. The leveling zone 11b is separated from the pre-coating zone 11a and the finishing zone 11c, respectively. The lifting support column 12 is arranged at one side of the leveling zone 11 b; the lifting support column 12 comprises a bearing surface 121, the bearing surface 121 is used for bearing the piece 2 to be coated, and the lifting support column 12 drives the piece 2 to be coated to vertically lift in the uniform coating area 11b.

When the slit component works, in order to ensure that the coating head is not influenced by blockage and air drying, the slit component can automatically debug the pre-spitting liquid before the operation, the coating operation is carried out after the debugging is finished, the pre-spitting liquid can remain part in the coating head, and the thickness of a film layer at the position of a knife is thicker after the pre-spitting liquid contacts with a piece to be coated when the knife is lifted. When coating is finished, the slit component can adjust the back suction amount, the thickness of the film layer at the position of the cutter is thicker when the back suction is smaller, and the film layer at the position of the cutter is missing or thinner when the back suction is overlarge, so that the debugging difficulty is higher.

When the coating workbench 1 provided by the embodiment of the application is adopted for operation, firstly, the piece 2 to be coated is placed on the bearing surface 121, lifting is carried out through the lifting support column 12, and the coating surface of the piece 2 to be coated is controlled to be flush with the horizontal coating area 111 on the same horizontal plane. That is, the member to be coated 2 is placed in the leveling zone 11b. The pre-spraying liquid is debugged in the pre-coating area 11a, the coating operation starts in the pre-coating area 11a, and the thickness of the film layer is thicker at the position of the start knife due to the fact that the residual part of the pre-spraying liquid is in the coating head, and the thicker film layer is positioned in the pre-coating area 11a; the coating operation is carried out in the ending region 11c, the debugging requirement on the back suction amount is low, the film layer at the position of the ending region is missing or the film layer is thinner, and the thickness of the film layer on the coating surface of the piece 2 to be coated is not influenced. The coating surface of the piece to be coated 2 avoids the knife lifting position and the knife collecting position, the thickness of the film layer of the coating surface of the piece to be coated 2 is not influenced by the liquid amount of the knife lifting and the liquid amount of the knife falling, the requirements on the control of the liquid amount of the knife lifting and the liquid amount of the knife falling are reduced, the whole coating surface of the piece to be coated 2 is in the optimal uniformity range of the coating head, and the uniformity of the thickness of the coating film layer is obviously improved. The coating uniformity and the film thickness improvement effect on the low-viscosity solution are obvious.

In one embodiment, the stage 11 is an integrally formed structure.

In one embodiment, the horizontal coating area 111 is a plane, so that the coating surface of the workpiece 2 to be coated and the horizontal coating area 111 can be on the same horizontal plane by controlling the lifting support column 12 to lift, thereby ensuring that the workpiece 2 to be coated is placed in the leveling coating area 11b.

In an embodiment, the stage 11 is a flat plate structure, which is divided into a pre-coating area 11a, a leveling area 11b and a finishing area 11c along the coating direction X, the leveling area 11b is provided with a through hole, and the lifting support column 12 is vertically lifted along the axis direction of the through hole, so that the coating surface of the workpiece 2 to be coated can be flush with the horizontal coating area 111, and the workpiece 2 to be coated is placed in the leveling area 11b. At this time, the coating table 1 further includes a fixing unit for fixing the stage 11 and the lifting support column 12. Optionally, the port surface of the through hole is a leveling zone 11b, so that the leveling zone 11b is separated from the precoating zone 11a and the ending zone 11c.

In one embodiment, the leveling zone 11b is provided with a receiving groove 112. The lifting support column 12 is disposed on the bottom wall of the accommodating groove 112, and is vertically lifted along the depth direction of the accommodating groove 112, so that the coating surface of the to-be-coated piece 2 can be flush with the horizontal coating area 111, and the to-be-coated piece 2 is disposed in the uniform coating area 11b.

The following describes the structure of the coating station 1 in detail, taking an embodiment in which the leveling zone 11b is provided with the accommodating groove 112 as an example.

In an embodiment, the notch surface of the accommodating groove 112 is a leveling zone 11b, so that the leveling zone 11b is separated from the precoating zone 11a and the ending zone 11c. Alternatively, the width of the leveling zone 11b in the coating direction X accounts for 50% or more of the total width of the horizontal coating zone 111. Optionally, the width of the leveling zone 11b in the coating direction X is more than 60% of the total width of the horizontal coating zone 111. Optionally, the width of the leveling zone 11b in the coating direction X is 70% or more of the total width of the horizontal coating zone 111. Alternatively, the width of the leveling zone 11b in the coating direction X accounts for 80% of the total width of the horizontal coating zone 111.

In an embodiment, the ratio of the area of the notch surface of the accommodating groove 112 to the area of the horizontal coating area 111 is 80% or more, a sufficiently large leveling area 11b is provided, and a sufficiently large pre-coating area 11a and a sufficiently large ending area 11c are provided at the same time, so that a part of the film layer with a thicker thickness at the knife-starting position is completely located in the pre-coating area 11a, and a part of the film layer with a missing or thinner thickness at the knife-ending position is completely located in the ending area 11c, thereby improving the uniformity of the film thickness. Optionally, the width L1 of the pre-coating zone 11a in the coating direction X (in other words, L1 is the dimension of one side wall of the accommodating groove 112 in the coating direction X) is 10mm to 15mm, and/or the width L2 of the ending zone 11c in the coating direction X (in other words, L2 is the dimension of the other side wall of the accommodating groove 112 in the coating direction X) is 5mm to 20mm. The width L1 of the pre-coating area 11a along the coating direction X is designed to be 10mm-15mm, so that a part of the thick film layer at the knife-lifting position is completely positioned in the pre-coating area 11a, and meanwhile, the area of the pre-coating area 11a is relatively smaller, thereby being beneficial to reducing the volume of the coating workbench 1. By designing the width L2 of the ending region 11c in the coating direction X to be 5mm to 20mm, a part of the film layer where the film layer is missing or thinner at the ending position is completely located in the ending region 11c, and at the same time, the area of the ending region 11c is relatively smaller, thereby being beneficial to reducing the volume of the coating workbench 1. Illustratively, the width L1 is 10mm. Illustratively, the width L1 is 15mm. Illustratively, the width L1 is 12mm. Illustratively, the width L1 is 14mm. Illustratively, the width L2 is 5mm. Illustratively, the width L2 is 10mm. Illustratively, the width L2 is 20mm. Illustratively, the width L2 is 15mm.

In an embodiment, the accommodating groove 112 includes a first region and a second region along a direction in which a notch surface of the accommodating groove 112 is directed toward a bottom wall of the accommodating groove 112. When the coating workbench 1 is used for coating, the to-be-coated piece 2 is accommodated in the first area of the accommodating groove 112 so as to realize that the coating surface of the to-be-coated piece 2 and the horizontal coating area 111 are on the same horizontal plane; the shape and size of the first region of the receiving groove 112 are cooperatively arranged with the shape and size of the member to be coated 2 so that the member to be coated 2 can be received in the receiving groove 112. The second region of the accommodating groove 112 can accommodate the lifting support column 12 without affecting the lifting of the lifting support column 12, and the specific shape and size are designed according to the requirement.

In an embodiment, the cross-sectional shape and the size of the accommodating groove 112 are consistent along the direction that the notch surface of the accommodating groove 112 points to the bottom wall of the accommodating groove 112, so as to reduce the processing difficulty. Wherein the cross section refers to a section perpendicular to a direction in which the notch surface of the accommodating groove 112 points to the bottom wall of the accommodating groove 112. The shape and the size of the cross section of the accommodating groove 112 are matched with those of the piece 2 to be coated, so that the piece 2 to be coated can be accommodated in the accommodating groove 112, and the coating surface of the piece 2 to be coated and the horizontal coating area 111 are on the same horizontal plane.

In an embodiment, when the coating surface of the to-be-coated member 2 and the horizontal coating area 111 are on the same horizontal plane, the side wall of the accommodating groove 112 and the to-be-coated member 2 are disposed at intervals, that is, the size of the notch surface of the accommodating groove 112 is slightly larger than the size of the to-be-coated member 2, so as to avoid damage to the side surface of the to-be-coated member 2 in the process that the to-be-coated member 2 moves up and down under the driving of the lifting support column 12. The distance between the side wall of the accommodating groove 112 and the member to be coated 2 is designed to avoid damage to the side surface of the member to be coated 2.

In one embodiment, the end surface of the lifting support column 12 is a bearing surface 121.

In one embodiment, the coating station 1 includes a plurality of lifting support columns 12 to provide a relatively stable support force for the workpiece 2 to be coated. Optionally, any two adjacent lifting support columns 12 are arranged at equal intervals, so that the supporting force applied to each part of the piece 2 to be coated is consistent.

In one embodiment, the coating station 1 further includes a driving assembly, and the driving assembly is used for driving the lifting support column 12 to lift. The driving assembly may be disposed in the accommodating groove 112, or may be disposed on a sidewall of the accommodating groove 112.

In one embodiment, the lifting support column 12 is a cylinder.

Referring to fig. 4, fig. 4 is a schematic structural diagram of a second embodiment of the coating station provided in the present application.

The second embodiment of the coating station 1 differs from the first embodiment of the coating station 1 in that: the coating station 1 further comprises a base 13. The same parts will not be described again.

The carrying platform 11 is detachably arranged on the base 13, so that the carrying platform 11 can be cleaned conveniently, and the cleanliness of the carrying platform 11 can be kept to the greatest extent. When the liquid used for coating is corrosive, the stage 11 may be corroded, and the flatness of the stage 11 is affected; the carrying platform 11 is detachably arranged on the base 13, so that the carrying platform 11 is convenient to clean, the liquid used for coating is reduced to corrode the carrying platform 11 while the cleanliness of the carrying platform 11 is maintained, and the flatness of the carrying platform 11 is maintained to the greatest extent.

In one embodiment, the base 13 is provided with a mounting groove 131 on a side near the stage 11. The stage 11 further includes a mounting surface 113 provided opposite to the horizontal coating region 111, and the mounting surface 113 is provided with a recess 1131. The side wall of the mounting groove 131 is arranged in the avoiding groove 1131, so that the carrying platform 11 and the base 13 can be detached. Optionally, a relief groove 1131 is disposed around the receiving groove 112.

Referring to fig. 5, fig. 5 is a schematic structural diagram of a slot coating apparatus according to an embodiment of the present disclosure.

The slit coating apparatus includes the coating table 1 and the slit assembly 3 described in any of the above embodiments, the slit assembly 3 being configured to be slidable with respect to the horizontal coating region 111 of the coating table 1, the slit assembly 3 being for coating the coating surface of the member to be coated 2 placed on the carrying surface 121 of the coating table 1. In the present embodiment, the coating station 1 is the structure provided in the second embodiment of the coating station 1 described above.

In one embodiment, the slot coating apparatus further comprises a leveling assembly (not shown) mounted to the base 13 and/or the stage 11. The leveling component is used for confirming whether the coating surface of the member to be coated 2 is flush with the horizontal coating area 111, i.e. confirming whether the coating surface of the member to be coated 2 and the horizontal coating area 111 are located at the same horizontal plane. Optionally, the leveling assembly comprises a laser emitter for emitting laser light, that is, by means of laser leveling confirmation, with high accuracy without worrying about uneven coating surface of the piece 2 to be coated and the horizontal coating area 111 of the stage 11.

In one embodiment, the slot coating apparatus further includes a heating assembly (not shown) for baking and annealing the member to be coated 2 coated through the slot assembly 3 to form a dry film. Optionally, the heating assembly is configured to be slidable relative to the coating station 1 to effect a bake anneal of the piece 2 to be coated. Alternatively, the heating component is independent of the coating workbench 1, and baking and annealing of the piece 2 to be coated can be achieved.

In one embodiment, the slot coating apparatus further comprises a cleaning assembly 4. The cleaning assembly 4 includes a suction nozzle 41 for sucking out the residual liquid on the horizontal coating area 111 after the coating operation of the slit assembly 3. The suction nozzle 41 is configured to be relatively slidable with respect to the coating table 1.

Optionally, after the workpiece 2 to be coated is coated and removed, the cleaning component 4 sucks the liquid remaining on the carrier 11 through the suction nozzle 41 in a negative pressure adsorption manner, so that the cleanliness and flatness of the carrier 11 are maintained.

Optionally, the cleaning assembly 4 further includes a sump, the suction nozzle 41 is communicated with the sump, and the liquid sucked by the suction nozzle 41 flows into the sump, so that the liquid can be recycled and also can be intensively treated. The liquid collecting tank is not limited in setting position and can collect liquid.

Optionally, the cleaning assembly 4 further comprises an absorbing member configured to be able to slide relative to the coating table 1, the absorbing member being used for wiping the horizontal coating area 111 after the suction nozzle 41 absorbs the residual liquid on the horizontal coating area 111, the absorbing member being able to absorb the liquid, and to remove the residual liquid on the horizontal coating area 111 for a second time, further maintaining the cleanliness and flatness of the carrier 11.

It should be noted that the cleaning assembly 4 is an optional structure, and may also be used to manually clean the residual liquid on the horizontal coating area 111 after the slit assembly 3 is coated.

In one embodiment, the slit coating apparatus further comprises a controller connected with the leveling component, the driving component for driving the lifting support column 12 to lift, the slit component 3 and the cleaning component 4. Before the coating operation, the controller is used for controlling the lifting of the lifting support column 12 according to the information fed back by the leveling component so that the coating surface of the piece 2 to be coated is positioned on the same horizontal plane as the horizontal coating area 111. The controller is also used for controlling the slit assembly 3 to perform precoating adjustment and knife starting in a precoating area 11a of the carrier 11 and controlling the slit assembly 3 to perform knife closing in a closing area 11c of the carrier 11. The controller is also used for controlling the cleaning assembly 4 to clean the carrier 11 after coating is completed.

In one embodiment, the slit component 3 is used for coating a perovskite film or a hole transport film or an electron transport film on the coating surface of the piece 2 to be coated placed on the bearing surface 121 of the coating workbench 1, so as to form a perovskite layer, a hole transport layer and an electron transport layer correspondingly. That is, the slit coating apparatus provided in the embodiments of the present application may be used to coat a film layer structure forming a perovskite battery.

In the process of coating by using the slit coating device, firstly, the piece 2 to be coated is placed on the carrying surface 121 of the carrying platform 11 by a mechanical arm, and the coating surface of the piece 2 to be coated and the horizontal coating area 111 of the carrying platform 11 are controlled to be on the same horizontal plane by lifting the lifting support column 12. After confirming that the coating surface of the workpiece 2 to be coated and the horizontal coating area 111 of the carrying table 11 are positioned on the same horizontal plane through the leveling assembly, the lifting support column 12 is locked, and the position of the workpiece 2 to be coated is fixed. After the position of the coating piece 2 is fixed, the slit assembly 3 performs pre-spitting adjustment in a pre-coating area 11a of the carrying platform 11, starts normal coating in the pre-coating area 11a, and finishes the coating to a finishing area 11c. After coating is completed, the to-be-coated piece 2 is lifted by lifting the support column 12, and the coated to-be-coated piece 2 is conveyed to a heating assembly by a mechanical arm to be baked and annealed to form a dry film. After the completion of the coating, the liquid remaining on the horizontal coating area 111 of the stage 11 is cleaned by the cleaning member 4.

The foregoing is only the embodiments of the present application, and not the patent scope of the present application is limited by the foregoing description, but all equivalent structures or equivalent processes using the contents of the present application and the accompanying drawings, or directly or indirectly applied to other related technical fields, which are included in the patent protection scope of the present application.

Claims (18)

1. A coating station, comprising:

the carrying platform comprises a horizontal coating area, wherein the horizontal coating area sequentially comprises a precoating area, a uniform coating area and a ending area along the coating direction; the even coating area is separated from the precoating area and the ending area;

the lifting support column is arranged on one side of the uniform coating area and comprises a bearing surface, the bearing surface is used for bearing a piece to be coated, and the lifting support column drives the piece to be coated to vertically lift in the uniform coating area.

2. The coating station of claim 1, wherein the leveling zone is provided with a receiving slot; the lifting support column is arranged on the bottom wall of the accommodating groove and vertically lifts along the depth direction of the accommodating groove.

3. The coating station of claim 2, wherein the slot face of the receiving slot is the leveling zone, and the leveling zone has a width in the coating direction that is 50% or more of the total width of the horizontal coating zone.

4. The coating station of claim 2, wherein the width of the leveling zone in the coating direction is greater than 60% of the total width of the horizontal coating zone.

5. The coating station of claim 2, wherein the width of the leveling zone in the coating direction is greater than 70% of the total width of the horizontal coating zone.

6. The coating station of claim 2, wherein the width of the leveling zone in the coating direction is 80% of the total width of the horizontal coating zone.

7. The coating station of claim 2, wherein a ratio of a slot face area of the receiving slot to the horizontal coating zone area is 80% or more.

8. Coating station according to claim 7, characterized in that the width of the pre-coating zone in the coating direction is 10-15 mm and/or the width of the finishing zone in the coating direction is 5-20 mm.

9. The coating station of claim 1, further comprising a base; the carrying platform is detachably arranged on the base.

10. The coating station of claim 9, wherein a mounting groove is formed in a surface of the base adjacent to the carrier; the carrying platform also comprises a mounting surface which is arranged opposite to the horizontal coating area, and the mounting surface is provided with an avoidance groove; the side wall of the mounting groove is arranged in the avoidance groove.

11. A slot coating apparatus, comprising:

a coating station according to any one of claims 1 to 10;

a slit assembly configured to be slidable relative to a horizontal coating region of the coating station, the slit assembly for coating a coating surface of a workpiece to be coated placed on a bearing surface of the coating station.

12. The slot coating apparatus of claim 11, further comprising a cleaning assembly; the cleaning component comprises a suction nozzle, wherein the suction nozzle is used for sucking residual liquid on the horizontal coating area after the coating operation of the slit component; the suction nozzle is configured to be relatively slidable with respect to the coating table.

13. The slot coating apparatus of claim 12, wherein the cleaning assembly further comprises a sump, the suction nozzle being in communication with the sump.

14. The slot coating apparatus of claim 12, wherein the cleaning assembly further comprises an absorbent member configured to be slidable relative to the coating station; the suction piece is used for wiping the horizontal coating area after the suction nozzle sucks residual liquid on the horizontal coating area.

15. The slot coating apparatus of claim 11, further comprising a leveling assembly; the coating workbench comprises a base; the leveling component is mounted on the base and/or the carrying platform; the leveling component is used for confirming whether the coating surface of the piece to be coated is flush with the horizontal coating area.

16. The slot coating apparatus of claim 15, wherein the leveling assembly comprises a laser emitter for emitting laser light.

17. The slot coating apparatus of claim 11, further comprising a heating assembly for bake annealing a piece to be coated that is coated through the slot assembly.

18. The slot coating apparatus of claim 11, wherein the slot assembly is configured to coat a perovskite film or a hole transporting film or an electron transporting film on a surface of a piece to be coated placed on a carrying surface of the coating stage.