JP2001105326A - 化学機械的ポリシングマット修整ディスク及びその製法 - Google Patents

化学機械的ポリシングマット修整ディスク及びその製法

Info

Publication number
JP2001105326A
JP2001105326A JP2000026534A JP2000026534A JP2001105326A JP 2001105326 A JP2001105326 A JP 2001105326A JP 2000026534 A JP2000026534 A JP 2000026534A JP 2000026534 A JP2000026534 A JP 2000026534A JP 2001105326 A JP2001105326 A JP 2001105326A
Authority
JP
Japan
Prior art keywords
disk
abrasive particles
diamond
modified
modified disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000026534A
Other languages
English (en)
Japanese (ja)
Inventor
Shinsei Rin
心正 林
Kenmin So
健民 宋
Yoryo Haku
陽亮 白
Shuyu Kan
秋雄 官
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHUGOKU SARIN KIGYO KOFUN YUGE
CHUGOKU SARIN KIGYO KOFUN YUGENKOSHI
Original Assignee
CHUGOKU SARIN KIGYO KOFUN YUGE
CHUGOKU SARIN KIGYO KOFUN YUGENKOSHI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHUGOKU SARIN KIGYO KOFUN YUGE, CHUGOKU SARIN KIGYO KOFUN YUGENKOSHI filed Critical CHUGOKU SARIN KIGYO KOFUN YUGE
Publication of JP2001105326A publication Critical patent/JP2001105326A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2000026534A 1999-09-29 2000-02-03 化学機械的ポリシングマット修整ディスク及びその製法 Pending JP2001105326A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW088116681A TW412461B (en) 1999-09-29 1999-09-29 Diamond disk for trimming wafer polishing pad and method for making the same
TW88116681 1999-09-29

Publications (1)

Publication Number Publication Date
JP2001105326A true JP2001105326A (ja) 2001-04-17

Family

ID=21642430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000026534A Pending JP2001105326A (ja) 1999-09-29 2000-02-03 化学機械的ポリシングマット修整ディスク及びその製法

Country Status (2)

Country Link
JP (1) JP2001105326A (zh)
TW (1) TW412461B (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030006793A (ko) * 2001-07-16 2003-01-23 프리시젼다이아몬드 주식회사 다이아몬드계 치(齒)공구의 제조방법 및 이에 의해 제조된치(齒)공구
JP2005288685A (ja) * 2004-03-10 2005-10-20 Read Co Ltd 研磨布用ドレッサー及びその製造方法
JP2007044863A (ja) * 2005-08-09 2007-02-22 Princo Corp ウェハ研磨パッドのコンディショナ及びその製造方法
JP2009090382A (ja) * 2007-10-04 2009-04-30 Nihon Micro Coating Co Ltd クリーニングテープ及びその製造方法
WO2009104224A1 (ja) * 2008-02-20 2009-08-27 新日鉄マテリアルズ株式会社 研磨布用ドレッサー
US8092560B2 (en) 2005-11-09 2012-01-10 Hitachi, Ltd. Lapping tool and method for manufacturing the same
CN111230758A (zh) * 2020-03-05 2020-06-05 华侨大学 一种大粒径金刚石磨具的磨粒表面微去除方法及该大粒径金刚石磨具的制造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100491077C (zh) * 2003-05-13 2009-05-27 中国砂轮企业股份有限公司 在制造中能个别调整磨粒的修整盘及其制造方法
TWI289093B (en) 2006-07-26 2007-11-01 Kinik Co Method of manufacturing diamond disk
CN101879706B (zh) * 2009-05-08 2012-01-11 中国砂轮企业股份有限公司 钻石研磨碟及其制造方法
CN114770781B (zh) * 2022-06-22 2022-10-14 成都泰美克晶体技术有限公司 一种sc晶片改弦定位装置及其使用方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030006793A (ko) * 2001-07-16 2003-01-23 프리시젼다이아몬드 주식회사 다이아몬드계 치(齒)공구의 제조방법 및 이에 의해 제조된치(齒)공구
JP2005288685A (ja) * 2004-03-10 2005-10-20 Read Co Ltd 研磨布用ドレッサー及びその製造方法
JP2007044863A (ja) * 2005-08-09 2007-02-22 Princo Corp ウェハ研磨パッドのコンディショナ及びその製造方法
US8092560B2 (en) 2005-11-09 2012-01-10 Hitachi, Ltd. Lapping tool and method for manufacturing the same
JP2009090382A (ja) * 2007-10-04 2009-04-30 Nihon Micro Coating Co Ltd クリーニングテープ及びその製造方法
WO2009104224A1 (ja) * 2008-02-20 2009-08-27 新日鉄マテリアルズ株式会社 研磨布用ドレッサー
JP2009196025A (ja) * 2008-02-20 2009-09-03 Nippon Steel Materials Co Ltd 研磨布用ドレッサー
TWI455794B (zh) * 2008-02-20 2014-10-11 Nippon Steel Materials Co Ltd 研磨布用修整輪
CN111230758A (zh) * 2020-03-05 2020-06-05 华侨大学 一种大粒径金刚石磨具的磨粒表面微去除方法及该大粒径金刚石磨具的制造方法
CN111230758B (zh) * 2020-03-05 2021-09-21 华侨大学 大粒径金刚石磨具的磨粒表面微去除方法及其制造方法

Also Published As

Publication number Publication date
TW412461B (en) 2000-11-21

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