JP2001102437A - Substrate cassette - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate cassette which is improved in liquid draining and drying, so structured as not to be impregnated with chemicals, made slim so as to be reduced in thermal capacity to an irreducible minimum to lessen a chemical treatment process in calorie, improved in mechanical strength, and lessened in manufacturing cost. SOLUTION: A latticed frame 1 comprises rows and columns of members which form lattices, and the rows of members are formed of resin pillars 1X with metal cores M, and the columns of members are formed of resin pillars 1Y. All the one side of a cassette or the latticed frame 1 is formed by injection molding resin R arranging the metal cores M in parallel at prescribed intervals as inserts, by which molding resins are formed by covering the metal cores M and bridging adjacent metal cores M.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a substrate cassette for separating and supporting substrates such as glass substrates so as not to contact each other.

[0002]

2. Description of the Related Art <Structure of substrate cassette> In the manufacturing process of various substrates such as a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a glass substrate for a thermal head, and a ceramic substrate for a hybrid IC, the substrate is processed. In order to process, wash, transport, and store, it is necessary to put each substrate in and out of a cassette without contacting each other.

[0003] As a substrate cassette for this purpose, a cassette assembled from a frame and side plates with ribs (with grooves) is used. This cassette has one
The pair of side surfaces are formed by a frame, the other pair of side surfaces are formed by ribbed side plates, the bottom surface or the bottom surface is configured to receive a substrate, and the ceiling surface is an open surface for entering and exiting the substrate. ing. There are various shapes and designs of the ribbed side plates, but each basically has a shape in which a number of rib-shaped shelves project from at least the inner surface side of the cassette from the back. . The space between the adjacent rib-shaped shelf pieces becomes a groove, and the substrate enters and exits and is housed therein.

[0004] The substrate cassette is usually used with the open surface facing sideways when the substrate is moved in and out, and is usually used with the open surface facing upward when transporting the substrate.
It is possible to arbitrarily select which posture is the reference posture, but in this specification, the case where the open surface faces upward and the side plates with ribs are arranged on the left and right will be defined as the reference posture.

<Processing of Substrate> Next, the processing of the substrate will be described by taking as an example the case where a cassette for a glass substrate used in the liquid crystal panel manufacturing field is used.

In a cassette for a glass substrate, a side plate having ribs having about 10 to 40 grooves is used as a side plate with ribs, and is usually set in a processing apparatus with all the ribs being filled with a glass substrate. There are two types of glass substrates that are set, one by one, loaded one by one by a processing device, and a single-wafer process, and two types: batch loaded with a cassette. The batch process related to this case will be described. .

FIGS. 19A and 19B are schematic views of a batch type chemical solution processing apparatus usually used in the field of semiconductor manufacturing. FIG. 19A is a front view and FIG. 19B is a plan view. When the cassette filled with glass substrates is set on the loader (5), the transfer robot (6) chucks the projection (4) of the cassette and transports the cassette to the chemical solution tank (7) where it is inserted. The substrate is immersed and the substrate is processed in the chemical solution tank (7). After chemical treatment, the transfer robot (6) removes the cassette from the chemical tank (7), transports it to the next primary rinsing tank (8), immerses it therein, and performs rinsing in the primary rinsing tank (8). Will be In the same manner, the washing process is performed again in the next final washing tank (9).
Dry at 0). As a drying method, a method of replacing attached water with vapor of isopropanol (IPA) for drying, a method of drying with hot air, and the like are employed. After drying, the cassette is set on the unloader (11), whereby the chemical treatment and the washing are completed.

[0008] However, when the above-mentioned conventional cassette is used for processing in a batch type chemical solution processing apparatus,
When the cassette moves from the chemical solution tank (7) to the primary washing tank (8), the liquid of the chemical solution is not easily drained, and it is unavoidable that a large amount of the chemical solution remains in the cassette and is brought into the primary washing tank (8). Also, when moving from the primary washing tank (8) to the final washing tank (9), washing water is brought into the final washing tank (9),
Furthermore, when moving from the final washing tank (9) to the dryer (10), the dryer (10) remains with a large amount of pure water attached to the cassette.
Be brought to This leads to a decrease in cleaning efficiency and drying efficiency.

In order to solve such a problem, the present applicant has proposed a substrate cassette devised as follows. (A) Japanese Patent No. 2526151 (Japanese Unexamined Patent Application Publication No. 3-26834)
No. 3) Each of the column portions of the frame is formed in a round shape having no squareness in a cross-sectional view perpendicular to the center line direction, and both side edges of the ribbed (grooved) side plate are also squared. A substrate cassette formed in a round shape. (B) Patent No. 2526152 (Japanese Unexamined Patent Application Publication No. 3-26834)
No. 4) A V-shaped or inverted V-shaped window is provided in a region excluding both right and left edges of a ribbed (grooved) side plate, and a beam portion divided by the window has a V-shape corresponding to the shape of the window. Or reverse V
A substrate cassette formed in the shape of a letter. (C) Japanese Unexamined Patent Publication No. 3-133153 A substrate cassette in which a frame and a ribbed (grooved) side plate are fixed by heat fusion.

[0010]

By taking the above measures (a) and (b), many of the conventional problems in the treatment of chemical solutions can be solved, but the demands of the current market are becoming more severe.・ In the chemical solution treatment and cleaning process, reduce the penetration of the chemical solution into the cassette and improve the liquid drainage property to increase the substrate cleaning efficiency. ・ In the drying process after cleaning, water adhering to the substrate IPA
(Isopropanol) Even when replacing with vapor, increase the drying efficiency by evenly contacting the vapor. ・ Slim the entire cassette to minimize the heat capacity. ・ Strength of the cassette regardless of its slimness. It has become necessary to comprehensively solve such issues as securing the cost of cassettes and reducing the manufacturing cost of cassettes.

Under such a background, the present invention has a structure that prevents the penetration of a chemical solution into a cassette, in addition to improving the liquid drainage property in the chemical solution treatment and cleaning steps and the drying efficiency in the drying step. In addition, by reducing the heat capacity to the utmost by making the entire cassette slim, the calories during chemical treatment are reduced, and the strength of the cassette is improved despite the slimness, and the manufacturing cost of the cassette is further reduced. It is an object of the present invention to provide a substrate cassette as described above.

[0012]

SUMMARY OF THE INVENTION A substrate cassette according to the present invention comprises a pair of opposing side surfaces in a lattice-like frame (1), (1).
The other pair of opposing sides has ribbed side plates
(2), (2), the bottom surface or the bottom surface is configured to receive the substrate (B), and the ceiling surface is an open surface for entering and exiting the substrate (B). Side plate with rib
(2) In a cassette capable of accommodating and accommodating the substrate (B) between corresponding ribs of (2), the lattice-shaped frame
Of the row and column members forming the grid of (1), one column member is a resin column (1X) containing a metal core (M), and the other column member is a resin column (1Y). And the entire lattice-shaped frame (1) composed of the resin column (1X) and the resin column (1Y) containing the metal core (M) per side of the cassette. However, the resin (R) is injection-molded with the metal cores (M) arranged in parallel at predetermined intervals as inserts, so that the resin body covers the metal cores (M) and the adjacent metal cores. Characterized by being formed so as to extend between the members (M).

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.

<Overall Structure of Cassette> As in the conventional cassette, the substrate cassette of the present invention comprises a pair of opposing side faces formed of lattice frames (1) and (1). The other pair of side faces is constituted by ribbed side plates (2), (2).

The bottom surface or the bottom surface is configured to be able to receive the substrate (B) by installing stopper means (3) such as receiving rods and rods. An example of a preferred embodiment when the stopper means (3) is constituted by a receiving rod is one in which a resin is coated by injection molding a resin with a metal core material as an insert, and simultaneously with this resin coating, overhangs the inner surface of the cassette. It is also possible to form resin ribs having a predetermined pitch. The resin for forming the stopper means (3) may be a lattice-shaped frame (1) to be described later or a side plate with ribs (2).
Resins of the same type as the forming resin are suitable.

The ceiling surface is an open surface for entering and exiting the substrate (B), and the substrate (B) is provided with the opposed ribbed side plates (2) and (2).
Between the corresponding ribs.

In addition, the cassette is provided with a projection (4) for chucking by the transfer robot. This projection (4) is, for example, a ribbed side plate (2)
Are provided near the upper ends of the left and right column portions (2X). (When the ribbed side plate (2) is injection-molded, the projection (4) is usually formed together).

<Lattice Frame (1)> The first feature of the cassette of the present invention resides in the lattice frame (1). That is, of the horizontal and vertical members forming the lattice of the lattice-shaped frame (1), one of the members is composed of a resin column (1X) containing a metal core (M), and the other is composed of a resin column (1X). The members in the row are composed of resin pillars (1Y).

Either of these members may be a row or a column member. However, when a reference posture is taken with the open surface of the cassette facing upward, the row members forming the lattice are made of a metal core material (M). In many cases, the resin column (1X) and the column members are formed of the resin column (1Y). In this case, the resin pillars (1X) containing the metal core material (M) as the row members are usually provided in parallel with each other in the horizontal direction, but the resin pillars (1Y) as the column members are provided. In addition to the aspect that is provided in parallel with each other in the vertical direction, it is provided in a staggered shape like vertical joints when brickworking, or provided diagonally like a letter “C” or inverted “C” Some variations are also possible, such as

The number of horizontal and vertical members forming the lattice of the lattice-shaped frame (1) is not particularly limited as long as it is a plurality of members, and the size of the cassette (the size of the substrate (B) is not limited). Are usually considered as three rows.
In many cases, the number of columns is 6 and the number of columns is 3 to 6.

In the present invention, the metal core material
(M) A metal frame in which the entire frame-like frame (1) composed of a resin-made pillar (1X) and a resin-made pillar (1Y) per side of a cassette is arranged in parallel at a predetermined interval. By injection molding the resin (R) using the core material (M) as an insert, the resin body covers the metal core material (M) and the adjacent metal core material (M)
It is formed so as to be erected between them. The former metal core
The (M) -filled resin pillar (1X) is formed by integral molding in which a plurality of spaced metal cores (M) are used as inserts and resin (R) is injected into them. The column (1Y) is formed by the runner at the time of injection molding.

The main part of the resin column (1Y) of the lattice-shaped frame (1) (the lower end portion or the resin column (1) containing the metal core (M)).
It is desirable to form a thin portion having a thickness of about 3 to 8 mm (especially 3.5 to 6.5 mm) as shown in FIG. 3 described later so as to reduce the heat capacity.

In the above description, the material of the metal core (M) is usually stainless steel or aluminum.

The material of the resin (R) is required strength, heat resistance,
An injection-moldable resin having solvent resistance, acid resistance, alkali resistance and the like is selected. Representative examples are polyetheretherketone, but polyimide, polyetherimide, polyamideimide, polyphenylene sulfide, perfluoroalkoxy-substituted polytetrafluoroethylene, polyarylate, polysulfone, polyallyl sulfone, polyether sulfone, modified polyphenylene oxide, poly Ether amide, polypropylene and the like can also be used. In addition, a fiber-reinforced thermoplastic resin in which a glass fiber, a carbon fiber, an aramid fiber, a ceramic fiber, a metal fiber, or the like is mixed with these resins can also be used. In melt molding, a filler, a conductive substance, a stabilizer, a lubricant, and other additives can be blended.

<Side plate with ribs (2)> Side plate with ribs (2)
It is particularly desirable that the entirety per side of the cassette is integrally formed of resin.

The ribbed side plate (2) at this time is laterally suspended between the left and right vertical column portions (2X) and (2X) and the left and right column portions (2X) and (2X). Multiple erection body parts (2Y)
It is particularly preferable that a hook-shaped rib (r) is formed on each bridge portion (2Y) so as to protrude like a saw blade on the inner surface side of the cassette. It is particularly preferable that the thickness of the protruding portion of the claw-shaped rib (r) is as thin as about 2 to 5 mm (particularly, 2 to 4 mm).

In addition, the left and right pillar portions (2X) of the ribbed side plate (2) are provided on both sides of a portion which is a horizontal base portion of the plurality of erection body portions (2Y) and an intermediate portion between the portions. A concave that becomes a meat
It is particularly preferred that (g) and (g) be formed.
The transition from the bottom surface to the periphery of the concave portion (g) at this time is made a smooth inclined surface so that the liquid can be smoothly drained at the time of chemical treatment and washing with water. In addition, the concave part which becomes meat
The thickness of the column portion (21) where (g) and (g) are formed should be as thin as possible (for example, about 3 to 8 mm (especially 3.5 to 6.5 mm) as long as it has the necessary strength. ,
Care is taken to reduce the heat capacity.

As described above, each erection body portion (2Y)
The claw-shaped ribs (r) are formed so as to protrude toward the inner surface of the cassette in a saw blade shape, but since the claw-shaped ribs (r) are triangular in a saw blade shape, the liquid drainage property is preferable. Become.

As the material of the resin for forming the ribbed side plate (2), since the edge of the substrate (B) comes into contact with the claw-shaped rib (r), it is possible to use polyetheretherketone, polyetherimide, or the like. It is preferable to use a resin (dust-preventing resin) which does not easily generate sticky dust.

<Assembly into Cassette> In a preferred embodiment, the fixing of the ribbed side plate (2) to the lattice-shaped frame (1) is performed by using a metal core material (M) constituting a row of the lattice of the frame (1). ) containing resin column body (both ends of the 1X) (F ₁ portion of Fig. 1)
And the left and right vertical pillars (2X) of the ribbed side plate (2),
Corresponding portion of the (2X) and (F ₂ parts of FIG. 12), it is preferable to carried out by bringing directly heat-sealed. This way,
Because there is no gap in the fixing portion between the two, there is no possibility that the chemical solution or the cleaning water remains, and the liquid is completely drained.
In addition, the stopper means (3) is fixed to the lattice-shaped frame (1) by fixing the stopper means (3) in a recess provided at the lower end of the resin column (1Y) constituting a column of the lattice of the frame (1). It is preferable to insert the end of 3) and weld it, and the welding is performed while melting with a hot gun using the resin column (1Y) and the resin rod used in the stopper means (3) as a welding rod. Is usually the case.

<Substrate (B)> The substrate (B) to be accommodated in the cassette having the above structure includes glass substrates such as a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a glass substrate for a thermal head, and a ceramic substrate. , Metal core substrate,
Examples include a composite substrate and a silicon substrate.

[0032]

Next, the present invention will be described in more detail with reference to examples.

<Overall Structure of Cassette> FIG. 16 is a plan view showing an example of the substrate cassette of the present invention. FIG. 17 is an ABCD sectional view of FIG. FIG. 18 is a side view of the cassette of FIG.

This cassette has a frame (1), (1) in which a pair of opposing side surfaces (front and back in the figure) have a lattice shape.
The other pair of opposite side surfaces (both side surfaces in the figure) are constituted by ribbed side plates (2) and (2). A stopper means (3) made of a receiving rod is arranged on the bottom side. These lattice frames (1), ribbed side plates (2)
The stopper means (3) and the protrusion (4) for chucking will be described later in detail.

<Grating Frame (1)> FIG. 1 is a front view showing an example of a lattice frame (1) constituting a substrate cassette of the present invention, FIG. 2 is a plan view thereof, and FIG. It is a side view. FIG. 4 is an enlarged view of a portion A in FIG. FIG. 5 is FIG.
It is BB 'sectional drawing of. FIG. 6 is a sectional view taken along the line CC ′ of FIG. FIG. 7 is a detailed view of a portion E in FIG. FIG. 8 shows FIG.
It is DD 'sectional drawing of. FIG. 9 is a sectional view taken along the line FF ′ of FIG.

In this embodiment, the horizontal members forming the lattice of the lattice-shaped frame (1) are resin columns (1X) containing four metal cores (M), and the column members are also four columns. Resin column
(1Y).

SUS3 arranged in parallel at a predetermined interval
After setting the metal core material (M) made of 04 as an insert in a mold (not shown), polyetheretherketone as an example of the resin (R) is injection-molded from the central mark in FIG. As shown in FIG. 1, a resin body was formed so as to cover the metal core material (M) and to extend between adjacent metal core materials (M). As a result, the entire frame-like frame (1) composed of the resin pillar (1X) containing the metal core material (M) and the resin pillar (1Y) was formed at once at one side of the cassette. The resin pillar (1Y) is formed just like a runner during the injection molding. In addition, the runner part displayed in the vertical direction by the two-dot chain line in FIG. 1 is removed after injection molding. The portion A in FIG. 1, that is, the portion shown by the frame shown in FIG. 4, is a hole that is detected by a sensor for positioning.

As shown in the figures, the metal core material (M)
The length (height) of the resin-made pillar (1X) is 667 mm and the width is 3
It is 0 mm. The thickness of the resin portion other than the portion where the metal core material (M) is embedded is made as thin as 5 mm as shown in FIG.

<Ribbed Side Plate (2)> FIG. 10 is a front view showing an example of a ribbed side plate (2) constituting the substrate cassette of the present invention (the side surface when assembled into a cassette), and FIG. FIG. 12 is a plan view of the ribbed side plate (2) of FIG. 10, and FIG. 12 is a side view of the ribbed side plate (2) of FIG. FIG.
3 is a sectional view taken along line AA of FIG. FIG. 14 shows B in FIG.
It is a detailed view of a part.

In this embodiment, left and right vertical column portions are used.
Side plate with ribs consisting of (2X), (2X), and four erection body parts (2Y) laid between the left and right pillar parts (2X), (2X)
(2) is formed by injection molding of polyetheretherketone (the whole per side of the cassette is formed at once). Note that the runner portion indicated by the two-dot chain line in the center lateral direction in FIG. 10 is removed after the injection molding.

The right and left pillar portions (2X) of the side plate with ribs (2) are provided with four bridge portions (2X) as shown in FIGS.
Y) on both sides of the part which becomes the base of the horizontal
Depressed portions (g) and (g) that form scum are formed. And recess
The transition from the bottom to the periphery of (g) is a smooth slope. The thickness of the column portion (2X) where the concave portions (g) and (g) to be formed into a thin layer are formed is as thin as 5 mm.

11 and FIG. 1
As shown in FIG. 4, a substantially triangular claw-shaped rib (r) is formed so as to protrude toward the inner surface of the cassette like a saw blade. The protruding portion of the claw-shaped rib (r) is as thin as 3 mm.

The ribbed plate (2), the vertical direction of the column body portion of the left and right (2X), the lattice of the respective four locations (2X) (F ₂ parts of FIG. 12), the grid-like frame (1) metal core material constituting the rows (M) containing a resin pillar ends of (1X) (F ₁ portion of Fig. 1)
And directly heat welded.

<Protrusion (4) for Chucking> FIG.
2, the projection (4) shown in FIGS. 13 and 17 is a member for chucking by the transfer robot, and is provided near the upper end of the left and right column portions (2X) of the ribbed side plate (2). is there. The protrusions (4) for chucking are formed together when the ribbed side plate (2) is injection-molded.

<Stopper Means (3)> FIG. 15 is a partial view showing an example of the stopper means (3) also seen in FIG. In this embodiment, the stopper means (3)
The resin coating (3R) is formed by injection-molding polyetheretherketone using the metal core material (3M) made of S304 as an insert, and at the same time, the ribs (3r) projecting together with the resin to the inner surface side of the cassette are formed. It is. The stopper means (3) is welded by inserting the end of the stopper means (3) into a recess provided at the lower end of the resin column (1Y) forming a column of the lattice of the lattice frame (1). (See FIGS. 7 and 8). At this time, a welding operation was performed while using a welding rod made of polyetheretherketone and melting it with a hot gun.

<Substrate (B)> A glass substrate as an example of the substrate (B) enters and exits between corresponding ribs of opposed ribbed side plates (2) and (2) of the assembled cassette. .
FIG. 16 shows only one substrate (B).

<Chemical solution processing operation> The chemical solution processing operation using the above-mentioned cassette is described in FIG.
A description will be given of a case where the chemical solution treatment device of (a) or (b) is used.

When the substrate (B) is inserted between the corresponding ribs of the ribbed side plates (2) and (2) of the cassette having the above structure and set on the loader (5) of the chemical solution processing apparatus, the transfer robot
(6) chucks the projection (4) of the cassette, transports the cassette to the chemical solution tank (7), immerses it therein, and
At (7), the substrate is processed.

After the chemical treatment, the transfer robot (6) removes the cassette from the chemical tank (7), transports it to the next primary washing tank (8), immerses it therein, and rinses it in the primary washing tank (8). Processing is performed. At this time, the individual column portions of the cassette frames (1) and (1) are formed in a round shape without squareness, and both side edges of the grooved side plates (2) and (2) are rounded without squareness. It is easy to drain the chemical when transferring the cassette to the primary rinsing tank (8).
The washing efficiency of the substrate (B) in (8) is improved, and QDR (usually, in the first washing, all pure water mixed with chemicals is drained, new pure water is poured and washed, and after washing for a certain period of time, the drain is drained again. , Add new pure water) to, for example, two (usually three to four times).

When the primary washing is completed, the washing is performed again in the next final washing tank (9) in the same manner, but the drainage in this case is also excellent.

Subsequently, the substrate (B) and the cassette are dried by the dryer (10). As a drying method, various methods such as a method of drying by replacing with isopropanol vapor and a method of drying with hot air are adopted.However, when the substitution method is adopted for vapor, the vapor hits uniformly. Even when the drying efficiency increases and the hot air drying method is adopted,
Since the amount of pure water attached to the cassette from the final washing tank (9) is small, the drying time is shortened accordingly, which is advantageous in terms of productivity and thermal energy.

After drying, the cassette is set on the unloader (11), whereby the chemical treatment and cleaning are completed.

[0053]

According to the present invention, a frame-like frame (1) composed of a resin column (1X) containing a metal core material (M) and a resin column (1Y) per side of a cassette is provided. However, the resin (R) is injection-molded with the metal cores (M) arranged in parallel at predetermined intervals as inserts, so that the resin body covers the metal cores (M) and the adjacent metal cores. It is formed so as to be installed between the members (M). In addition, preferably, the main part of the resin column (1Y) of the lattice-shaped frame (1) is formed in a thin portion, and the left and right vertical column portions (2X) of the ribbed side plate (2) are formed. Is formed into a thin part by forming concave parts (g) and (g) that become thin and a triangular thin claw-like rib (r) is formed on the bridge body part (2Y) as a saw blade on the inner side of the cassette. Side plate with ribs on the grid-like frame (1)
(2) is fixed by heat fusion, and a grid-like frame (1)
It is possible to take measures such as fixing the stopper means (3) to the welding by welding.

Therefore, by reducing the heat capacity to the utmost by making the entire cassette slim, the calories at the time of chemical treatment are reduced, and the strength of the cassette is ensured despite the slimness, and the manufacturing cost of the cassette is also reduced. .

In the chemical solution processing step for the substrate (B) such as a glass substrate, the substrate (B) is stored in a cassette, and a series of steps such as chemical solution processing → primary washing → final washing → drying are performed. However, in the present invention, in addition to having a structure in which the infiltration of the chemical solution into the cassette is prevented, the liquid drainage property in the chemical solution treatment and water washing process,
The drying efficiency in the drying step is improved.

Therefore, the substrate cassette of the present invention
This is extremely useful as a cassette capable of performing the chemical treatment of (B).

[Brief description of the drawings]

FIG. 1 is a front view showing an example of a lattice-like frame (1) constituting a substrate cassette of the present invention.

FIG. 2 is a plan view of the lattice-shaped frame (1) of FIG.

FIG. 3 is a side view of the lattice-shaped frame (1) of FIG.

FIG. 4 is an enlarged view of a portion A in FIG. 1;

FIG. 5 is a sectional view taken along line B-B 'of FIG.

FIG. 6 is a sectional view taken along line C-C 'of FIG.

FIG. 7 is a detailed view of a portion E in FIG. 1;

8 is a sectional view taken along line D-D 'of FIG.

FIG. 9 is a sectional view taken along the line F-F 'of FIG.

FIG. 10 is a front view showing an example of a ribbed side plate (2) constituting the substrate cassette of the present invention.

FIG. 11 is a plan view of the ribbed side plate (2) of FIG. 10;

FIG. 12 is a side view of the ribbed side plate (2) of FIG. 10;

FIG. 13 is a sectional view taken along the line AA of FIG. 10;

FIG. 14 is a detailed view of a portion B in FIG. 11;

FIG. 15 is a partial view showing an example of a stopper means (3).

FIG. 16 is a plan view showing an example of the substrate cassette of the present invention.

17 is a cross-sectional view of the ABCD of FIG.

FIG. 18 is a side view of the cassette of FIG.

FIG. 19 is a schematic view of a batch-type chemical liquid processing apparatus usually used in the semiconductor manufacturing field, (a) is a front view,
(B) is a plan view.

[Explanation of symbols]

(B) ... substrate, (1) ... latticed frame, (1X) ... metal core material
(M) Filled resin column, F ₁ … heat fusion scheduled part, (1Y) ... resin column, (M)… metal core material, (R)… resin, (2)… rib side plate, ( 2X) ... column body portion, F ₂ ... heat fusion scheduled portion, (2Y) ... erection moiety, (r) ... claw-shaped ribs, (g) ... recess (3) ... stopper means, (3M) ... (3R) ... resin coating, (3r) ... rib, (4) ... projection for chucking, (5) ... loader, (6) ... transport robot, (7) ... chemical tank, ( 8)… Primary rinsing tank, (9)… Final rinsing tank, (10)… Dryer, (11)… Unloader

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Atsushi Saeki 22-22, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka Inside Sharp Corporation (72) Inventor Shoji Mitamura 22-22, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka F-term (reference) in CAP Co., Ltd. 5F031 CA05 DA03 EA01 EA02 EA06 FA02 FA03 FA12 FA18 GA19 GA48 GA49 HA45 HA48 HA72 HA74 JA02 JA22 KA15 MA23 MA24 PA26

Claims (5)

[Claims] 1. A frame in which a pair of opposing side surfaces is in a lattice shape.
(1), (1), the other pair of opposing sides is composed of ribbed side plates (2), (2), and the bottom surface or the bottom surface is the substrate
(B), the ceiling surface is an open surface for entering and exiting the substrate (B), and the substrate is located between the corresponding ribs of the opposed ribbed side plates (2) and (2). (B), wherein one of members in a row and a column forming a lattice of the lattice-shaped frame (1) is a resin containing a metal core material (M). The columnar body (1X), the members in the other row are composed of resinous columns (1Y), and the resinous column (1X) and the resinous columns containing the metal core material (M)
The entire frame of the lattice-shaped frame (1) composed of (1Y) per side of the cassette is injection-molded with resin (R) using a metal core material (M) arranged in parallel at a predetermined interval as an insert. The substrate cassette, wherein the resin body is formed so as to cover the metal core material (M) and extend between the adjacent metal core materials (M). 2. The substrate cassette according to claim 1, wherein the entire side of the side plate with ribs per side of the cassette is integrally formed of resin. 3. A side plate with ribs (2) is provided with a plurality of left and right vertical column portions (2X) and (2X) and a plurality of lateral plates between the left and right column portions (2X) and (2X). 2. An installation body part (2Y) of a book, wherein each installation body part (2Y) is formed with a claw-like rib (r) so as to protrude like a saw blade on the inner surface side of the cassette. Or the cassette for substrates according to 2. 4. Both sides of a portion which is a horizontal base portion of a plurality of erection body portions (2Y) in left and right column portions (2X) of a ribbed side plate (2), and a middle portion between the portions, Concave part (g),
4. The substrate cassette according to claim 3, wherein (g) is formed. 5. The recesses (g), (g) which are the main part of the resin column (1Y) of the lattice frame (1) and the main part of the column part (2X) of the ribbed side plate (2). Each part is 3-8mm thick
5. The substrate cassette according to claim 1, wherein the substrate cassette is formed in a thin portion of the substrate.