JP2001091847A - 共焦点レーザ走査型光学顕微鏡 - Google Patents

共焦点レーザ走査型光学顕微鏡

Info

Publication number
JP2001091847A
JP2001091847A JP27222199A JP27222199A JP2001091847A JP 2001091847 A JP2001091847 A JP 2001091847A JP 27222199 A JP27222199 A JP 27222199A JP 27222199 A JP27222199 A JP 27222199A JP 2001091847 A JP2001091847 A JP 2001091847A
Authority
JP
Japan
Prior art keywords
objective lens
laser light
light
annular
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27222199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001091847A5 (enExample
Inventor
Nobuhiro Kita
信浩 北
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP27222199A priority Critical patent/JP2001091847A/ja
Publication of JP2001091847A publication Critical patent/JP2001091847A/ja
Publication of JP2001091847A5 publication Critical patent/JP2001091847A5/ja
Pending legal-status Critical Current

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  • Microscoopes, Condenser (AREA)
JP27222199A 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡 Pending JP2001091847A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27222199A JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27222199A JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Publications (2)

Publication Number Publication Date
JP2001091847A true JP2001091847A (ja) 2001-04-06
JP2001091847A5 JP2001091847A5 (enExample) 2005-06-02

Family

ID=17510812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27222199A Pending JP2001091847A (ja) 1999-09-27 1999-09-27 共焦点レーザ走査型光学顕微鏡

Country Status (1)

Country Link
JP (1) JP2001091847A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009063446A (ja) * 2007-09-06 2009-03-26 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の高さ位置検出装置
JP2012007897A (ja) * 2010-06-22 2012-01-12 Pulstec Industrial Co Ltd ３次元形状測定装置
US9297990B2 (en) 2013-09-25 2016-03-29 Canon Kabushiki Kaisha Confocal microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009063446A (ja) * 2007-09-06 2009-03-26 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の高さ位置検出装置
JP2012007897A (ja) * 2010-06-22 2012-01-12 Pulstec Industrial Co Ltd ３次元形状測定装置
US9297990B2 (en) 2013-09-25 2016-03-29 Canon Kabushiki Kaisha Confocal microscope

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