JP2001091265A5 - - Google Patents

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Publication number
JP2001091265A5
JP2001091265A5 JP2000220922A JP2000220922A JP2001091265A5 JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5 JP 2000220922 A JP2000220922 A JP 2000220922A JP 2000220922 A JP2000220922 A JP 2000220922A JP 2001091265 A5 JP2001091265 A5 JP 2001091265A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000220922A
Other languages
Japanese (ja)
Other versions
JP4427876B2 (ja
JP2001091265A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000220922A priority Critical patent/JP4427876B2/ja
Priority claimed from JP2000220922A external-priority patent/JP4427876B2/ja
Publication of JP2001091265A publication Critical patent/JP2001091265A/ja
Publication of JP2001091265A5 publication Critical patent/JP2001091265A5/ja
Application granted granted Critical
Publication of JP4427876B2 publication Critical patent/JP4427876B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000220922A 1999-07-22 2000-07-21 半導体角速度センサ Expired - Fee Related JP4427876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-207715 1999-07-22
JP20771599 1999-07-22
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Publications (3)

Publication Number Publication Date
JP2001091265A JP2001091265A (ja) 2001-04-06
JP2001091265A5 true JP2001091265A5 (US06573293-20030603-C00009.png) 2008-09-04
JP4427876B2 JP4427876B2 (ja) 2010-03-10

Family

ID=26516424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000220922A Expired - Fee Related JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Country Status (1)

Country Link
JP (1) JP4427876B2 (US06573293-20030603-C00009.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7302847B2 (en) * 2004-08-17 2007-12-04 Nippon Soken, Inc. Physical quantity sensor having movable portion
JP4528720B2 (ja) * 2005-12-28 2010-08-18 株式会社東芝 赤外線検出素子およびその製造方法と赤外線カメラ
JP2007218608A (ja) * 2006-02-14 2007-08-30 Denso Corp 半導体力学量センサ
JP5206709B2 (ja) 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
JP4905574B2 (ja) 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
JP7135291B2 (ja) * 2017-10-24 2022-09-13 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体

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