JP2001044261A - Stocker carrying system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the range of a class 1 clean environment and to shorten the carrying time of an automatic traveling carrier for reducing the production cost, and the manufacturing period. SOLUTION: A stocker carrying system is provided with cassettes 800 for housing wafers, a stocker 100, which can house these cassettes 800 and is provided with a plurality of shelves 700 in its interior, and robots 200 for carrying the above products between treating stations EQ and the stocker 100. The stocker 100 is provided with cranes 400, provided in its interior, cassette loading/ unloading carrier ports 600 and a plurality of input/output ports 500. The cassette 800 are carried between the stocker 100 and the outside via the ports 600. These products housed in the cassettes 800 are carried between the stocker 100 and the stations EQ via the ports 500.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a stocker transport system, and more particularly, to a stocker transport system employed in a production line of semiconductor devices or photoelectric devices, for example, a liquid crystal display.

[0002]

BACKGROUND OF THE INVENTION Semiconductor wafers (hereinafter referred to as wafers) and LCD glass (hereinafter referred to as glass substrates)
Are substrate materials used for manufacturing VLSI chips and LCD devices, respectively. These materials are generally stored in carriers or cassettes (hereinafter simply referred to as cassettes), and even fine particles render these materials unusable for further processing. Therefore, these materials can be processed and transported only in a very clean environment. Therefore, V is reduced by a low-cost and high-yield method.
In order to manufacture LSI chips and LCD devices, it is very important to suppress particulate contamination.

[0003] The main sources of particulate contamination are humans, equipment, facilities (including clean rooms) and chemical products. Particles emitted from humans and clean room facilities tend to be ionized and are likely to cause defects on the surface of the wafer or glass substrate, making them the largest source of contamination. In order to thoroughly control particulate contamination, the conventional method employs a clean room and a recirculation system with a more precise HEPA (High Efficiency Particulate Air) filter. Currently, a filter efficiency of 99.99999% or more is required to obtain sufficient clean room cleanliness. In fact, humans of different cleanliness in a clean room,
Due to the presence of materials or equipment (including filters and fans), the cost of maintaining a clean room in a desirable low dust environment, eg, a Class 1 environment, is very high.

[0004]

2. Description of the Related Art Conventionally, stockers have been introduced as various improved storage stations under the concept of a clean room in order to improve yield by reducing particulate contamination of wafers in a low-cost manner, and to store wafers and glass substrates. And transport are being performed. FIG. 1 shows a conventional design utilizing this concept. As shown in the figure, the system basically includes four parts.

(1) First, at least one processing station (EQ) is used to manufacture a semiconductor device or an optoelectronic device. The processing station (EQ) is, for example, a mask exposure apparatus, a resist stripping apparatus, an evaporative concentration apparatus, or an etching apparatus. The above processing station (E
Q) faces a clean passage (61) having a desired cleanliness, for example a class 1 cleanliness. Meanwhile, processing station
Since the interior of the (EQ) is maintained and cleaned separately, each processing station (EQ) is generally located in a relatively low cleanliness, eg, a class 1000 area (62).

(2) A cassette for storing an article such as a wafer or a glass substrate carries the article from the processing station (EQ), to the processing station (EQ), or to a different processing station (EQ. Used to carry between EQ).

(3) As shown in FIG. 2, a stocker (51) is provided in the utility area as a storage station for storing the cassette (58) during a period when the wafer is not processed. The / output port (55) is completely surrounded by the clean passage (61). Inside the stocker (51),
Generally, the cassette stored in the stocker (51) is moved by the crane (54).

(4) As shown in FIG. 3, a transport system (53) for moving the cassette between the processing station (EQ) and the stocker (51) is provided. The transport system (53) includes an automatic transport and processing system, which is generally a wireless floor control system.
This is a robot carrier (52) called an autonomous carrier (AGV) controlled by (FCS).

[0009]

However, a self-propelled carrier is required.
(52) requires a clean area (61) having a degree of cleanliness equivalent to or higher than Class 1 and the production cycle is considerably long due to the transport time of the self-propelled transport vehicle (52). Therefore, using a self-propelled carrier under the concept of a clean room is not the most economically advantageous method.

The present invention solves the above problems and eliminates the need for a self-propelled transport vehicle, thereby reducing the range of a Class 1 clean environment, shortening the transport time of the self-propelled transport vehicle, and reducing production costs. It is another object of the present invention to provide a stocker transport system used in a production line for manufacturing a semiconductor device or an LCD device, which can reduce a manufacturing cycle.

[0011]

In order to solve the above-mentioned problems, the present invention will be described with reference to FIGS. 4 to 6 showing an embodiment of the present invention. It was done. That is, one or more,
At least two processing stations arranged in two rows in parallel
(EQ), a production line (1) having a processing zone (150)
0), a cassette (800) for storing one or more items to be conveyed, a stocker (100) internally provided with a plurality of shelves (700) capable of storing the cassette (800), A robot (200) provided between the station (EQ) and the stocker (100), for transporting articles stored in the cassette (800) between the processing station (EQ) and the stocker (100); And a plurality of cranes (400) provided inside the stocker (100) and moving the cassette (800), and one or more cassette loading / unloading units. It has a wholesale port (600) and a plurality of input / output ports (500),
Connect the cassette (800) to the cassette loading / unloading port
(600) to the stocker (100) or the stocker (1
00), and the goods stored in the cassette (800)
The stocker (100) through the input / output port (500)
And transporting between the processing station (EQ).

At least one of the processing stations is used for manufacturing a device, and includes, for example, a mask exposure apparatus, a resist stripping apparatus, an evaporative concentration apparatus, and an etching apparatus. The processing station faces a clean passage having a desired cleanliness, eg, a Class 1 cleanliness. On the other hand, because the interior of the processing station is separately maintained and cleaned, the processing station is typically located in a relatively low cleanliness, eg, class 1000 area.

The above-mentioned cassette for storing articles such as wafers and glass substrates is used for carrying the articles out of the processing station, loading them into the processing station, or transporting them between different processing stations.

Further, the cassette is stored in the stocker during a period in which no wafer is processed, and the stocker is surrounded by a clean passage. A crane and a shelf are provided inside the stocker, and are used for moving and storing the cassette, respectively.

[0015] The robot provided between the processing station and the stocker is located in the range of the clean passage, and conveys an article such as a wafer between the processing station and the stocker through the cassette input / output port. I do.

An overhead transport system may be provided to move the cassette between the processing sections and between the stockers, and the overhead transport system is provided above the robot.

According to the present invention, since a self-propelled carrier system is not used and a class 1 environment of a small area is used, a drawback of the conventional stocker system used in a semiconductor device or LCD device production line is eliminated. Can be prevented. Therefore, the production cost and the production cycle can be significantly reduced.

[0018]

Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 4 shows a part of dedicated equipment in the small production line (10). Among them, three basic components of the stocker system, a stocker, a robot, and an overhead transportation system are shown. That is, FIG. 4 shows one stocker (100), five robots (200), and one overhead transportation system (300). Articles such as wafers and glass substrates stored in the carrier (800) are transported to and from each processing station (EQ) of the small production line (10). The stocker (100)
Three cranes (400), five input / output ports (500) connected to each robot (200), and for transferring cassettes (800) between the stocker (100) and the overhead transport system (300) Cassette loading / unloading port (600) and a plurality of shelves (700) inside the stocker body. The stocker (100) is surrounded by a clean passage (120) having a desired degree of cleanliness, for example, class 1 cleanliness, while each processing station (EQ) faces the clean passage (120). But relatively low cleanliness, e.g. class 1000 areas (1
30).

As shown in FIG. 4, in the preferred embodiment of stocker transport system of the present invention, C _i-th cassette R _i-th shelf items such wafer in stocker (100) (700) (800) It is stored in. C _i- th cassette (8
00) utilizing an N _j th crane (400) near the C _i th cassette (800) before being processed at a particular processing station (EQ), eg, a thin film evaporative concentrator (901). Then, the C _i- th cassette (800) is transferred from the R _i- th shelf (700) to P
Transport to the _901st input / output port (500). And
C The items in the _i- th cassette (800) are taken out and
Thin-film evaporation apparatus by _901-th robot (200) (901)
Transported to

[0020] After the processing in the thin-film evaporation apparatus (901) is completed, the goods are stored in the C _i th cassette (800) on the _901-th input / output port P (500). And N
This C _i- th cassette by the _j- th crane (400)
(800) is sent to the _{Oj / j +} 1th area (160). This area
(160) is the N _j th crane (400) and the N _{j + 1} th crane
This is the portion where the movement path overlaps with (400). Thereafter, the C _i- th cassette (800) is transferred to the R _{i + m-} th shelf (700) by the N _{j + 1-} th crane (400).

In this embodiment, the cassette is moved to the adjacent processing zone by using the area (160) where the moving route of the crane (400) overlaps. However, in the present invention, a shuttle is provided in the stocker, and the cassette is moved by the shuttle. You may comprise so that it may convey between adjacent cranes.

The C _i- th cassette (800) is sent to the next processing station (EQ), for example, a photomechanical apparatus (902), where N _{j + 1} is applied before resist coating and mask alignment are performed. The th crane (400) takes out the C _i- th cassette (800) from the R _{i + m-} th shelf (700) and sends it to the P _902- th input / output port (500). Then, the goods from the C _i th cassette (800) is extracted, is conveyed to the photographic plate making apparatus (902) by the goods ₉₀₂ th T of the robot (200).

FIG. 5 shows a fictitious transport system for transporting cassettes within a small production line and between each small production line. That is, when a cassette is transported in the small production line (10) by the overhead transport system (300), the cassette is transported between two non-adjacent processing sections (150). On the other hand, when a cassette is transported between two small production lines (10, 10) by this overhead transport system, it is used to balance throughput or when an important processing station (EQ) is stopped.

As shown in FIG. 6, the above-mentioned overhead transportation system
The (300) is mounted on the ceiling, and its moving path surrounds each stocker (100) or runs along one side of each stocker (100). And it is above each robot (200) between the stocker (100) and the processing station (EQ). As shown in FIG. 5, the moving path of the overhead transportation system (300) is provided in the area (120) of cleanliness class 1 and basically surrounds each stocker (100).

[0025]

The production line of the stocker transport system according to the present invention has the following advantages since it is constructed and operates as described above.

1. Since a self-propelled transport vehicle is not required in the transport area, the required space can be greatly reduced.

2. Since a self-propelled carrier is not required, the range of the class 1 environment can be reduced, and the cost of a clean passage having a class 1 or higher cleanliness can be reduced. And,
Since there is no need for a floor control system (FCS), the cost of building a clean room can be reduced.

3. Since the step of transporting the wafer (or glass substrate) by the self-propelled transport vehicle is not required, the transport time can be reduced. Therefore, the processing cost of the wafer (or glass substrate) can be greatly reduced.

[Brief description of the drawings]

FIG. 1 shows a prior art and is a layout of a production line using a stocker and a self-propelled carrier under the concept of a clean room.

FIG. 2 is a front view of a stocker showing a conventional technique.

FIG. 3 is a partially cutaway plan view of a stocker provided with a self-propelled carrier, showing a conventional technique.

FIG. 4 is a schematic configuration diagram of a stocker transport system used in a small-sized production line, showing an embodiment of the present invention.

FIG. 5 is a schematic configuration diagram of an overhead transport system for transporting a cassette in a small production line and between each small production line, showing an embodiment of the present invention.

FIG. 6 is a schematic side view showing an arrangement of a stocker, an overhead transportation system, a robot, and a processing station according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Small production line 100 ... Stocker 150 ... Processing area 160 ... Area where the moving paths of cranes overlap 200 ... Robot 300 ... Overhead transport system 400 ... Crane 500 ... Input / output port 600 ... Cassette loading / unloading port 700 ... Shelf 800 ... Cassette EQ ... Processing station

[Procedure amendment]

[Submission date] June 13, 2000 (2006.1.
3)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction contents]

[0011]

In order to solve the above-mentioned problems, the present invention will be described with reference to FIGS. 4 to 6 showing an embodiment of the present invention. It was done. That is, one or more,
At least two processing stations arranged in two rows in parallel
(EQ), a production line (1) having a processing zone (150)
0), a cassette (800) for storing one or more items to be conveyed, a stocker (100) internally provided with a plurality of shelves (700) capable of storing the cassette (800), A robot (200) provided between the station (EQ) and the stocker (100), for transporting articles stored in the cassette (800) between the processing station (EQ) and the stocker (100); And a plurality of cranes (400) provided inside the stocker (100) and moving the cassette (800), and one or more cassette loading / unloading units. One or more wholesale ports (600), multiple input / output ports (500)
The cassette (800) through the cassette loading / unloading port (600).
(100) or unloading from the stocker (100) and storing the articles stored in the cassette (800) in the input / output port (500)
Through the stocker (100) and the processing station (E
Q) and the moving diameter of the plurality of cranes (400).
The path is in the one or more treatment zones (150) and
The tor put the cassette (800) next to the crane (40
0) transported between each other .

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction contents]

Further, the cassette is stored in the stocker during a period in which no wafer is processed, and the stocker is surrounded by a clean passage. A crane and a shelf are provided inside the stocker, and are used for moving and storing the cassette, respectively. Of this crane
The moving path is located in the one or more processing zones, and
The shut is between the cranes adjacent to each other.
Each crane
Move between adjacent treatment zones.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction contents]

In the above description, the cassette is moved to the adjacent processing section using the area (160) where the moving paths of the crane (400) overlap, but in the present invention, a shuttle ( not shown) is installed in the stocker. Since it is provided , use the above area (160)
Instead of moving, the shuttle can transport cassettes between adjacent cranes.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] Explanation of sign

[Correction method] Change

[Correction contents]

[Description of Signs] 10 ... Small production line 100 ... Stocker 150 ... Processing zone 160 ... Area where the moving routes of the crane overlap 200 ... Robot 300 ... Aerial transfer system 400 ... Crane 500 ... Input / output port 600 ... Cassette loading / unloading Port 700 ... Shelf 800 ... Cassette EQ ... Processing station

Claims (5)

[Claims] 1. A processing zone comprising one or more at least two processing stations (EQ) arranged in two rows in parallel.
A cassette (800) used in the production line (10) having the (150) and for storing one or more items to be conveyed.
A stocker (100) internally provided with a plurality of shelves (700) capable of storing the cassette (800); provided between the processing station (EQ) and the stocker (100); ),
A robot (200) for transporting between the processing station (EQ) and the stocker (100), wherein the stocker (100) is provided inside the stocker (100) and Cassette (80
0), a plurality of cranes (400), one or more cassette loading / unloading ports (600), and a plurality of input / output ports (500). Cassette loading / unloading port
(600) to the stocker (100) or the stocker (1
00), and conveys the articles stored in the cassette (800) between the stocker (100) and the processing station (EQ) via the input / output port (500). Stocker transport system. 2. Mounted on a ceiling, the path of movement of which is above the robot (200), moves along at least one side of the stocker (100), and connects the cassette loading / unloading port (600). The cassette (800) through the stocker
2. The stocker transport system according to claim 1, further comprising an overhead transport system (300) for carrying in or out of the stocker (100). 3. The moving path of the plurality of cranes (400) is within the one or more processing sections (150), and the cassette
(800) between adjacent cranes (400), the traveling route of the cranes (400) is
3. The method according to claim 1 or 2, wherein the overlapping is performed at (0).
2. The stocker transport system according to 1. 4. One or a plurality of shuttles are provided in the stocker (100), a moving path of the plurality of cranes (400) is in the one or more processing sections (150), and the shuttle is a cassette. The stocker transport system according to claim 1 or 2, wherein the (800) is transported between cranes (400) adjacent to each other. 5. There are at least two stockers (100), and the overhead transport system (300) is connected to the cassette (80) through the one or more cassette loading / unloading ports (600).
The stocker transport system according to claim 2, characterized in that 0) is transported between the at least two stockers (100).