JP2001040979A5 -

Download PDF

Info

Application number

JP1999213424A

Other languages

Other versions

Filing date

1999-07-28

Publication date

2006-09-14

1999-07-28 Application filed filed Critical

1999-07-28 Priority to JP21342499A priority Critical patent/JP4362171B2/ja

1999-07-28 Priority claimed from JP21342499A external-priority patent/JP4362171B2/ja

2001-02-13 Publication of JP2001040979A publication Critical patent/JP2001040979A/ja

2006-09-14 Publication of JP2001040979A5 publication Critical patent/JP2001040979A5/ja

2009-11-11 Application granted granted Critical

2009-11-11 Publication of JP4362171B2 publication Critical patent/JP4362171B2/ja

2019-07-28 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

JP21342499A 1999-07-28 1999-07-28 プラズマ破壊装置およびこれを用いた破壊方法 Expired - Fee Related JP4362171B2 (ja)