JP2001021359A5 - - Google Patents
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- JP2001021359A5 JP2001021359A5 JP1999192929A JP19292999A JP2001021359A5 JP 2001021359 A5 JP2001021359 A5 JP 2001021359A5 JP 1999192929 A JP1999192929 A JP 1999192929A JP 19292999 A JP19292999 A JP 19292999A JP 2001021359 A5 JP2001021359 A5 JP 2001021359A5
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Description
【００１９】
【課題を解決するための手段】
以上の課題を解決するため、本発明は、振動子に回転角速度が加えられることにより発生するコリオリ力を検出することにより前記回転角速度を検出する圧電振動角速度センサーにおいて、四角柱状に形成された圧電体を有し、前記圧電体の第１の側面に、長手方向に沿って第１及び第２の電極が互いに平行に形成され、前記圧電体は、前記第１の側面に対向する第２の側面から前記第１の面に向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、前記第１及び第２の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極との間の電圧差を検出するようにしたものである。
本発明において、前記圧電体の前記第１及び第２の電極が形成された第１の側面には、前記第１の電極と前記第２の電極との間に位置して、前記圧電体の長手方向に沿って溝が形成され、前記圧電体の第２の側面には、接地される少なくとも一の電極を形成するようにしてもよい。
0019
[Means for solving problems]
In order to solve the above problems, the present invention presents a piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the colioli force generated by applying the rotational angular velocity to the vibrator. It has a body, and first and second electrodes are formed on the first side surface of the piezoelectric body in parallel with each other along the longitudinal direction, and the piezoelectric body has a second side surface facing the first side surface. It is provided with an oscillator that is polarized from the side surface toward the first surface and is supported by vibration nodes, and one of the first and second electrodes is an AC for excitation drive. The first and second electrodes generated by the collior force generated by applying a current, vibrating the vibrator with both ends in the longitudinal direction of the piezoelectric body as free ends, and applying a rotation angular velocity to the vibrator. It is designed to detect the voltage difference between.
In the present invention, the first side surface of the piezoelectric body on which the first and second electrodes are formed is located between the first electrode and the second electrode of the piezoelectric body. A groove may be formed along the longitudinal direction, and at least one electrode to be grounded may be formed on the second side surface of the piezoelectric body.
また、本発明は、振動子に回転角速度が加えられることにより発生するコリオリ力を検出することにより前記回転角速度を検出する圧電振動角速度センサーの振動子の製造方法において、平板状の圧電体の厚さ方向の両面全面に電極を形成し、次いで、前記圧電体の厚さ方向に分極処理を施し、その後、前記平板状の圧電体を多数の四角柱片に切断することにより、電極形成面を有する四角柱形状の圧電体を有する振動子を得るようにしたものである。 Further, the present invention relates to a method for manufacturing a piezoelectric vibration angular velocity sensor oscillator that detects the rotational angular velocity by detecting the colliorative force generated by applying the rotational angular velocity to the oscillator, wherein the thickness of the flat piezoelectric body is increased. The electrode-forming surface is formed by forming electrodes on the entire surfaces of both sides in the vertical direction, then performing a polarization treatment in the thickness direction of the piezoelectric body, and then cutting the flat-plate-shaped piezoelectric body into a large number of square pillar pieces. It is intended to obtain an oscillator having a square column-shaped piezoelectric body.
本発明に係る圧電振動角速度センサーの振動子の製造方法において、前記四角柱片の前記電極が形成された両面又はいずれか一方の面に、前記四角柱片の長手方向に延長する溝を形成し、前記電極が前記四角柱片の長手方向に沿って２分割される。 In the method for manufacturing a transducer of a piezoelectric vibration angular velocity sensor according to the present invention, a groove extending in the longitudinal direction of the square prism piece is formed on both sides or one of the surfaces on which the electrode of the square pillar piece is formed. , The electrode is divided into two along the longitudinal direction of the square prism piece.
Claims (24)
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面に、長手方向に沿って第１及び第２の電極が互いに平行に形成され、前記圧電体は、前記第１の側面に対向する第２の側面から前記第１の面に向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、
前記第１及び第２の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body formed in a quadrangular prism shape; first and second electrodes are formed in parallel to each other along a longitudinal direction on a first side surface of the piezoelectric body; A polarization process is performed from the second side surface facing the side surface toward the first surface, and the vibrator is supported at a vibration node,
Applying an alternating current for excitation drive to one of the first and second electrodes, causing the vibrator to vibrate with both ends in the longitudinal direction of the piezoelectric body as free ends,
A piezoelectric vibration angular velocity sensor that detects a voltage difference between the first and second electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１及び第２の電極が互いに平行に形成されるとともに、前記第１の側面に対向する第２の側面には、長手方向に沿って一の電極が形成され、前記第１の側面及び第２の側面に対し垂直な第３の側面及び第４の側面には、長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の電極から前記第３の側面に形成した一の電極と、前記第２の電極から前記第４の側面に形成した一の電極とに向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、
前記第１及び第２の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body formed in a quadrangular prism shape, and first and second electrodes are formed in parallel to each other along a longitudinal direction on the first side surface of the piezoelectric body, and on the first side surface; One electrode is formed along the longitudinal direction on the opposing second side surface, and the third side surface and the fourth side surface perpendicular to the first side surface and the second side surface are disposed in the longitudinal direction. One electrode is formed along each of the electrodes, and the piezoelectric body includes one electrode formed on the third side surface from the first electrode and one electrode formed on the fourth side surface from the second electrode. A polarization treatment is performed toward the electrode, and a vibrator is supported at a vibration node,
Applying an alternating current for excitation drive to one of the first and second electrodes, causing the vibrator to vibrate with both ends in the longitudinal direction of the piezoelectric body as free ends,
A piezoelectric vibration angular velocity sensor that detects a voltage difference between the first and second electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１の電極が形成されるとともに、前記第１の側面に対向する第２の側面には、長手方向に沿って第２の電極が形成され、前記第１の側面及び第２の側面に対し垂直な第３及び第４の側面には、前記圧電体の長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の側面に形成した第１の電極から前記第３の側面に形成した一の電極の方向と、さらに前記第２の側面に形成した第２の電極から前記第３の側面に形成した一の電極の方向とに向かって分極されて、振動の節点で支持されてなる振動子を備え、
前記圧電体に形成した第１及び第２の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body formed in a quadrangular prism shape; a first side surface of the piezoelectric body having a first electrode formed along a longitudinal direction; and a second side surface facing the first side surface The second electrode is formed along the longitudinal direction, and the third and fourth side surfaces perpendicular to the first side surface and the second side surface are respectively disposed along the longitudinal direction of the piezoelectric body. One electrode is formed, and the piezoelectric body is formed from the first electrode formed on the first side surface to the direction of the one electrode formed on the third side surface and further formed on the second side surface. Comprising a vibrator that is polarized from the two electrodes toward the direction of the one electrode formed on the third side surface and supported at a vibration node;
An alternating current for excitation drive is applied to one of the first and second electrodes formed on the piezoelectric body, the vibrator is vibrated with both ends in the longitudinal direction of the piezoelectric body as free ends,
A piezoelectric vibration angular velocity sensor that detects a voltage difference between the first and second electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１及び第２の電極が互いに平行に形成され、前記第１の側面に対向する第２の側面には、長手方向に沿って第３及び第４の電極が互いに平行に形成され、前記第１の側面及び第２の側面に対し垂直な第３及び第４の側面には、前記圧電体の長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の側面に形成した第１の電極から前記第３の側面に形成した一の電極の方向と、前記第１の側面に形成した第２の電極から前記第３の側面に形成した一の電極の方向と、前記第２の側面に形成した第３の電極から前記第３の側面に形成した一の電極の方向と、前記第２の側面に形成した第４の電極から前記第４の側面に形成した一の電極の方向とに向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、
前記圧電体に形成した第１及び第２の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極と前記第３電極及び第４の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor for detecting the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body having a quadrangular prism shape is provided, and first and second electrodes are formed in parallel to each other along the longitudinal direction on the first side surface of the piezoelectric body, and face the first side surface. On the second side surface, third and fourth electrodes are formed in parallel to each other along the longitudinal direction, and on the third and fourth side surfaces perpendicular to the first side surface and the second side surface, One electrode is formed along the longitudinal direction of the piezoelectric body, and the piezoelectric body has a direction from the first electrode formed on the first side surface to the one electrode formed on the third side surface; The direction of one electrode formed on the third side surface from the second electrode formed on the first side surface, and the one formed on the third side surface from the third electrode formed on the second side surface Direction of the electrode and one electrode formed on the fourth side surface from the fourth electrode formed on the second side surface Polarization treatment is subjected towards the bets, comprises a vibrator comprising supported at the nodes of vibration,
Applying an alternating current for excitation drive to the first and second electrodes formed on the piezoelectric body, causing the vibrator to vibrate with both ends in the longitudinal direction of the piezoelectric body as free ends,
Detecting a voltage difference between the first and second electrodes and the third and fourth electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator. Characteristic piezoelectric vibration angular velocity sensor.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１及び第２の電極が互いに平行に形成されるとともに、前記第１の側面に対向する第２の側面には、長手方向に沿って一の電極が形成され、前記第１の側面及び第２の側面に対し垂直な第３の側面及び第４の側面には、長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の側面から第２の側面に向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、
前記第１及び第２の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body formed in a quadrangular prism shape, and first and second electrodes are formed in parallel to each other along a longitudinal direction on the first side surface of the piezoelectric body, and on the first side surface; One electrode is formed along the longitudinal direction on the opposing second side surface, and the third side surface and the fourth side surface perpendicular to the first side surface and the second side surface are disposed in the longitudinal direction. One electrode is formed along the piezoelectric body, and the piezoelectric body includes a vibrator that is polarized from the first side surface toward the second side surface and supported at a vibration node,
Applying an alternating current for excitation drive to one of the first and second electrodes, causing the vibrator to vibrate with both ends in the longitudinal direction of the piezoelectric body as free ends,
A piezoelectric vibration angular velocity sensor that detects a voltage difference between the first and second electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１及び第２の電極が互いに平行に形成され、前記第１の側面に対向する第２の側面には、長手方向に沿って第３及び第４の電極が互いに平行に形成され、前記第１の側面及び第２の側面に対し垂直な第３及び第４の側面には、前記圧電体の長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の側面から第２の側面に向かって分極処理が施されて、振動の節点で支持されてなる振動子を備え、
前記圧電体に形成した第１及び第２の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第１及び第２の電極と前記第３電極及び第４の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body having a quadrangular prism shape is provided, and first and second electrodes are formed in parallel to each other along the longitudinal direction on the first side surface of the piezoelectric body, and face the first side surface. On the second side surface, third and fourth electrodes are formed in parallel to each other along the longitudinal direction, and on the third and fourth side surfaces perpendicular to the first side surface and the second side surface, One electrode is formed along the longitudinal direction of the piezoelectric body, and the piezoelectric body is polarized from the first side surface to the second side surface and supported at a vibration node. Equipped with a vibrator,
Applying alternating current for excitation drive to the first and second electrodes formed on the piezoelectric body, causing the vibrator to vibrate with both ends in the longitudinal direction of the piezoelectric body as free ends,
Detecting a voltage difference between the first and second electrodes and the third and fourth electrodes caused by the Coriolis force generated when a rotational angular velocity is applied to the vibrator. Characteristic piezoelectric vibration angular velocity sensor.
四角柱状に形成された圧電体を有し、前記圧電体の第１の側面には、長手方向に沿って第１の電極が形成されるとともに、前記第１の側面に対向する第２の側面には、長手方向に沿って第２の電極が形成され、前記第１の側面及び第２の側面に対し垂直な第３及び第４の側面には、前記圧電体の長手方向に沿ってそれぞれ一の電極が形成され、前記圧電体は、前記第１の側面から第２の側面に向かって分極されて、振動の節点で支持されてなる振動子を備え、
前記圧電体の前記第３の側面に形成した一の電極と前記第４の側面に形成した一の電極のいずれか一方の電極に励振駆動用の交流電流を印加し、前記圧電体の長手方向の両端を自由端として前記振動子を振動させ、
前記振動子に回転角速度が加えられることにより発生する前記コリオリ力により生ずる前記第３の側面に形成した一の電極と前記第４の側面に形成した一の電極との間の電圧差を検出するようにしたことを特徴とする圧電振動角速度センサー。In the piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting the Coriolis force generated by applying the rotational angular velocity to the vibrator,
A piezoelectric body formed in a quadrangular prism shape; a first side surface of the piezoelectric body having a first electrode formed along a longitudinal direction; and a second side surface facing the first side surface The second electrode is formed along the longitudinal direction, and the third and fourth side surfaces perpendicular to the first side surface and the second side surface are respectively disposed along the longitudinal direction of the piezoelectric body. One electrode is formed, and the piezoelectric body includes a vibrator that is polarized from the first side surface toward the second side surface and supported by a vibration node,
An alternating current for excitation drive is applied to one of the one electrode formed on the third side surface of the piezoelectric body and the one electrode formed on the fourth side surface, and the longitudinal direction of the piezoelectric body The vibrator is vibrated with both ends of
A voltage difference between the one electrode formed on the third side surface and the one electrode formed on the fourth side surface, which is generated by the Coriolis force generated by applying a rotational angular velocity to the vibrator, is detected. A piezoelectric vibration angular velocity sensor characterized by the above.
平板状の圧電体の厚さ方向の両面全面に電極を形成し、
次いで、前記圧電体の厚さ方向に分極処理を施し、
その後、前記平板状の圧電体を多数の四角柱片に切断することにより、電極形成面を有する四角柱形状の圧電体を有する振動子を得るようにした
ことを特徴とする圧電振動角速度センサーの振動子の製造方法。In a method of manufacturing a vibrator of a piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting a Coriolis force generated by applying a rotational angular velocity to the vibrator,
Form electrodes on both sides of the thickness direction of the plate-shaped piezoelectric body,
Next, a polarization treatment is performed in the thickness direction of the piezoelectric body,
Thereafter, a piezoelectric vibration angular velocity sensor characterized by obtaining a vibrator having a quadrangular prism-shaped piezoelectric body having an electrode forming surface by cutting the plate-shaped piezoelectric body into a large number of quadrangular prism pieces. A method for manufacturing a vibrator.
平板状の圧電体の厚さ方向の両面全面に、それぞれ電極を形成し、
前記平板状の圧電体を多数の四角柱片に切断し、
次いで、前記切断された四角柱片の前記電極が形成された両面に垂直な２つの面にそれぞれ電極を形成し、
その後、前記四角柱片に分極処理を施し、各側面に電極が形成された四角柱形状の圧電体を有する振動子を得るようにしたことを特徴とする圧電振動角速度センサーの振動子の製造方法。In a method of manufacturing a vibrator of a piezoelectric vibration angular velocity sensor that detects the rotational angular velocity by detecting a Coriolis force generated by applying a rotational angular velocity to the vibrator,
Electrodes are formed on both surfaces in the thickness direction of the plate-shaped piezoelectric body,
Cutting the plate-like piezoelectric body into a number of square pillar pieces,
Next, an electrode is formed on each of two surfaces perpendicular to the both surfaces on which the electrode of the cut rectangular column piece is formed, and
After that, the method for manufacturing a vibrator of a piezoelectric vibration angular velocity sensor is characterized by obtaining a vibrator having a quadrangular prism-shaped piezoelectric body in which electrodes are formed on each side surface by performing polarization treatment on the square pillar piece. .
次いで、前記２分割された一方の電極から前記第３の側面に形成した電極に向かって分極処理を施し、前記２分割された他方の電極から前記第４の側面に形成した電極に向かって分極処理を施したことを特徴とする請求項１９記載の圧電振動角速度センサーの振動子の製造方法。Forming a groove extending in the longitudinal direction of the square column piece on the first side surface of the square column piece, and dividing the electrode formed on the first side surface into two along the longitudinal direction of the square column piece;
Next, a polarization treatment is performed from the one of the two divided electrodes toward the electrode formed on the third side surface, and the polarization is performed from the other two divided electrodes toward the electrode formed on the fourth side surface. 20. The method for manufacturing a vibrator of a piezoelectric vibration angular velocity sensor according to claim 19, wherein the treatment is performed.
前記四角柱片の第２の側面に前記四角柱片の長手方向に延長する溝を形成し、前記第２の側面に形成した電極を前記四角柱片の長手方向に沿って２分割し、
前記第１の側面に２分割されて形成された一方の電極から前記第３の側面に形成した電極に向かって分極処理を施し、前記第１の側面に２分割されて形成された他方の電極から前記第４の側面に形成した電極に向かって分極処理を施したことを特徴とする請求項１９記載の圧電振動角速度センサーの振動子の製造方法。Forming a groove extending in the longitudinal direction of the square column piece on the first side surface of the square column piece, and dividing the electrode formed on the first side surface into two along the longitudinal direction of the square column piece;
Forming a groove extending in the longitudinal direction of the square column piece on the second side surface of the square column piece, and dividing the electrode formed on the second side surface into two along the longitudinal direction of the square column piece;
Polarization treatment is performed from one electrode formed by dividing the first side surface into two to the electrode formed on the third side surface, and the other electrode formed by dividing the first side surface into two 20. The method for manufacturing a vibrator of a piezoelectric vibration angular velocity sensor according to claim 19, wherein a polarization process is performed from the electrode toward the electrode formed on the fourth side surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19292999A JP4172100B2 (en) | 1999-07-07 | 1999-07-07 | Piezoelectric vibration angular velocity sensor and method for manufacturing the vibrator |
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| Application Number | Priority Date | Filing Date | Title |
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| JP19292999A JP4172100B2 (en) | 1999-07-07 | 1999-07-07 | Piezoelectric vibration angular velocity sensor and method for manufacturing the vibrator |
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| Publication Number | Publication Date |
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| JP2001021359A JP2001021359A (en) | 2001-01-26 |
| JP2001021359A5 true JP2001021359A5 (en) | 2005-07-21 |
| JP4172100B2 JP4172100B2 (en) | 2008-10-29 |
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| WO2007058343A1 (en) | 2005-11-21 | 2007-05-24 | Murata Manufacturing Co., Ltd. | Oscillator and method for manufacturing the same |
| JP6253261B2 (en) * | 2013-05-30 | 2017-12-27 | キヤノン株式会社 | Vibration actuator and optical equipment |
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