EP0751374A3 - Vibrating gyroscope - Google Patents

Vibrating gyroscope Download PDF

Info

Publication number
EP0751374A3
EP0751374A3 EP96110002A EP96110002A EP0751374A3 EP 0751374 A3 EP0751374 A3 EP 0751374A3 EP 96110002 A EP96110002 A EP 96110002A EP 96110002 A EP96110002 A EP 96110002A EP 0751374 A3 EP0751374 A3 EP 0751374A3
Authority
EP
European Patent Office
Prior art keywords
piezoelectric substrate
divided electrodes
vibrating gyroscope
main surface
common electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96110002A
Other languages
German (de)
French (fr)
Other versions
EP0751374A2 (en
EP0751374B1 (en
Inventor
Katsumi Murata Manufacturing Co. Ltd. Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP0751374A2 publication Critical patent/EP0751374A2/en
Publication of EP0751374A3 publication Critical patent/EP0751374A3/en
Application granted granted Critical
Publication of EP0751374B1 publication Critical patent/EP0751374B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

A vibrating gyroscope (10) includes: a piezoelectric substrate (14) polarized oppositely in the thickness direction; two divided electrodes (16) provided at one main surface of said piezoelectric substrate (14); a common electrode (18) provided at the other main surface of said piezoelectric substrate (14); drive means (30) for applying a drive signal between said two divided electrodes (16) and said common electrode (18) to vibrate said single piezoelectric substrate (14) under a bending mode; and detection means (36) for detecting a signal generated between said two divided electrodes (16).
EP96110002A 1995-06-27 1996-06-20 Vibrating gyroscope Expired - Lifetime EP0751374B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP16109695 1995-06-27
JP161096/95 1995-06-27
JP7161096A JP3000891B2 (en) 1995-06-27 1995-06-27 Vibrating gyro

Publications (3)

Publication Number Publication Date
EP0751374A2 EP0751374A2 (en) 1997-01-02
EP0751374A3 true EP0751374A3 (en) 1998-04-15
EP0751374B1 EP0751374B1 (en) 2002-02-20

Family

ID=15728536

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96110002A Expired - Lifetime EP0751374B1 (en) 1995-06-27 1996-06-20 Vibrating gyroscope

Country Status (5)

Country Link
US (1) US5837895A (en)
EP (1) EP0751374B1 (en)
JP (1) JP3000891B2 (en)
KR (1) KR100224123B1 (en)
DE (1) DE69619307T2 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3386320B2 (en) * 1996-10-01 2003-03-17 株式会社村田製作所 Temperature characteristics adjustment method of vibrating gyroscope
CA2241929A1 (en) * 1996-10-29 1998-05-07 Mitsui Chemicals, Incorporated Vibration gyroscope
JPH10232132A (en) * 1997-02-20 1998-09-02 Murata Mfg Co Ltd Vibration gyro
US6777857B1 (en) 1999-03-18 2004-08-17 Board Of Regents Of The University Of Nebraska Piezoelectric gyroscope system, and method of use
US6457358B1 (en) 1999-03-18 2002-10-01 Board Of Regents Of The University Of Nebraska Tubular coriolis force driven piezoelectric gyroscope system, and method of use
JP3494096B2 (en) * 1999-11-05 2004-02-03 株式会社村田製作所 Vibrating gyro
JP3613117B2 (en) * 2000-02-23 2005-01-26 株式会社村田製作所 Vibrator, vibratory gyro using the vibrator, and electronic device using the vibrator
JP4678093B2 (en) * 2001-02-23 2011-04-27 株式会社村田製作所 Manufacturing method of vibrating gyroscope
JP3767540B2 (en) * 2002-10-28 2006-04-19 株式会社村田製作所 Vibration gyro and angular velocity sensor
CA2498178A1 (en) * 2004-03-03 2005-09-03 Northrop Grumman Corporation Support of vibrating beam near nodal point
US7322238B2 (en) 2004-03-03 2008-01-29 Northrop Grumman Corporation Support of vibrating beam near nodal point
US8664951B2 (en) * 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US20140026658A1 (en) * 2012-07-27 2014-01-30 Biao Zhang Mems device and a method of using the same
CN103345148A (en) * 2013-06-19 2013-10-09 河海大学常州校区 Micro gyroscope robust self-adaptive control method
CN103345155B (en) * 2013-06-19 2015-12-09 河海大学常州校区 The self-adaptation back stepping control system and method for gyroscope
CN104281056B (en) * 2014-09-18 2017-07-21 河海大学常州校区 The gyroscope Robust Adaptive Control method learnt based on the neutral net upper bound
CN104614993B (en) * 2015-01-15 2017-05-10 河海大学常州校区 Adaptive sliding mode preset performance control method for micro-gyroscope

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2659829A (en) * 1948-12-28 1953-11-17 Clevite Corp Transducer device electromechanically sensitive to flexure
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
JPS61247915A (en) * 1985-04-26 1986-11-05 Tokyo Koku Keiki Kk Vibration gyro
JPS63288077A (en) * 1987-05-20 1988-11-25 Murata Mfg Co Ltd Electrostrictive ceramic material and polarization operation thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3258617A (en) * 1963-02-07 1966-06-28 Avco Corp Piezoelectric device
US3520195A (en) * 1965-10-11 1970-07-14 Gen Electric Solid state angular velocity sensing device
US5349857A (en) * 1988-08-12 1994-09-27 Murata Manufacturing Co., Ltd. Vibratory gyroscope
DE69210679T2 (en) * 1991-06-07 1996-09-26 Akai Electric Vibration control device
JP3016986B2 (en) * 1993-02-17 2000-03-06 三菱電機株式会社 Vibrating gyroscope detection circuit
US5430342A (en) * 1993-04-27 1995-07-04 Watson Industries, Inc. Single bar type vibrating element angular rate sensor system
JPH0735554A (en) * 1993-07-22 1995-02-07 Murata Mfg Co Ltd Detector
US5495760A (en) * 1994-07-05 1996-03-05 Rockwell International Corporation Beermug gyroscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2659829A (en) * 1948-12-28 1953-11-17 Clevite Corp Transducer device electromechanically sensitive to flexure
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
JPS61247915A (en) * 1985-04-26 1986-11-05 Tokyo Koku Keiki Kk Vibration gyro
JPS63288077A (en) * 1987-05-20 1988-11-25 Murata Mfg Co Ltd Electrostrictive ceramic material and polarization operation thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 097 (P - 560) 26 March 1987 (1987-03-26) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 117 (E - 731) 22 March 1989 (1989-03-22) *

Also Published As

Publication number Publication date
KR970002319A (en) 1997-01-24
DE69619307T2 (en) 2002-08-14
EP0751374A2 (en) 1997-01-02
US5837895A (en) 1998-11-17
JP3000891B2 (en) 2000-01-17
DE69619307D1 (en) 2002-03-28
JPH0914968A (en) 1997-01-17
EP0751374B1 (en) 2002-02-20
KR100224123B1 (en) 1999-10-15

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