JP3747335B2 - Gyro device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a gyro device, and more particularly to a novel improvement for detecting an input angular velocity as a change in capacitance using a plurality of capacitance type capacitance change detection units arranged on a plate.
[0002]
[Prior art]
A gyro apparatus of this type that has been used heretofore is not shown here. For example, the mechanical structure disclosed in Japanese Utility Model Laid-Open No. 1-61611 and the structure of Japanese Patent Laid-Open No. 5-322579 are disclosed. Can be mentioned.
[0003]
[Problems to be solved by the invention]
Since the conventional gyro apparatus is configured as described above, the following problems exist.
That is, in the case of a mechanical configuration, since a motor, a torquer coil, and a large base are used, the overall shape of the apparatus is increased in size and weight.
Further, in the case of the configuration disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 5-322579, the angular velocity input in the Y direction is input under the condition that the vibrator is vibrated in the X direction using only an external piezoelectric vibrator or an AC power source. Since it is a configuration that detects the change in capacitance, it is difficult to increase vibration in the X direction, it is difficult to improve sensitivity, and it is difficult to increase the number of axes.
[0004]
The present invention has been made to solve the above-described problems, and in particular, the input angular velocity input using a plurality of capacitance-type capacitance change detection units arranged on a plate is used to change the capacitance. An object of the present invention is to provide a gyro device that detects the above.
[0005]
[Means for Solving the Problems]
Gyro device according to the present invention includes a plurality of capacitive capacitance change detection unit arranged along the X and Y directions is provided on the plate to reciprocally rotated by electromagnetic actuators, each capacitive First and second plate members provided opposite to each other and superposed on the capacitance change detection unit , a bore portion formed on the inner surface of the second plate member to be thin, and an inner surface of the first plate member A first electrode formed; and a second electrode formed on the counterbored portion of the second plate body; and the longitudinal direction of each capacitance-type capacitance change detecting portion is along the X direction and the Y direction. The actuator is configured to detect an input angular velocity by a change in capacitance between the electrodes, and the actuator includes a plurality of protrusions provided on the plate along a rotation direction of the plate. The actuator is configured to reciprocate, and the actuator Consists single motor, a reciprocating drive is to configure the motor.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
A preferred embodiment of a gyro apparatus according to the present invention will be described below with reference to the drawings.
A reference numeral 1 in FIG. 1 denotes a flat disk-like plate that is rotatably provided. A plurality of capacitance-type capacitance change detection units 2 are arranged on the plate 1 in the X direction. They are arranged in a state of aligning the longitudinal direction (L) along the Y direction. Therefore, the above-described plate 1 and each capacitance type capacitance change detecting unit 2 constitute a gyro device 20.
[0007]
On the peripheral surface 1a of the plate 1, four projections 3 are provided every 90 degrees for biaxial detection , and four well-known actuators 5 are provided on the fixed side 4 that rotatably supports the plate 1. Is provided. Each actuator 5 is composed of, for example, a linear actuator so as to reciprocate linearly in an electromagnetic manner, and the reciprocating operation of each actuator 5 causes the plate 1 to reciprocate with a predetermined stroke in the direction of arrow A. It is configured. Note that the number of actuators 5 is not limited to a plurality, and for example, reciprocal rotation by one motor is also possible.
[0008]
The capacitance-type capacitance change detecting unit 2 is configured as shown in FIG. 2 by a known micromachining technique using etching or the like, and has a pair of longitudinal shapes along the longitudinal direction (L) . The second plate bodies 10 and 11 are superposed so as to face each other, and the second plate body 11 is formed with a counterbored portion 11a for making it thin. The gouge portion second electrode 12 formed on 11a is formed so as to face the first electrode 13 formed on the inner surface of the first plate member 10.
[0009]
When the plate bodies 10 and 11 are made of silicon, the plate bodies 10 and 11 are insulated from each other via an insulating plate (not shown). Without being used, the equivalent circuit has the configuration shown in FIG. 3 by the first and second electrodes 13 and 12 and the first and second plates 10 and 11. Therefore, when a displacement is added to the plates 10 and 11 by some external force and the distance between the first and second electrodes 13 and 12 changes, the capacitance C between the first and second electrodes 13 and 12 changes. It is configured as follows.
[0010]
Next, the operation will be described. First, when the plate 3 is reciprocally rotated along the excitation direction along the arrow A by the actuator 3 and the input angular velocity ω is input from the outside under this state, the Coriolis force based on the well-known Coriolis law is changed to the arrow. It acts on the capacitance type capacitance change detecting unit 2 along B, and the capacitance C is changed by this action, and the input angular velocity ω can be detected.
[0011]
Since a plurality of capacitance type capacitance change detectors 2 are provided on the same plane of the plate 1, two axes can be detected, and multi-axis can be achieved by increasing the number. In addition, the acceleration sensitivity due to the change in capacitance due to acceleration can be reduced by taking the output difference between the two capacitance type capacitance change detection units , and the input angular velocity input with little influence of acceleration can be detected. .
[0012]
【The invention's effect】
Since the gyro device according to the present invention is configured as described above, the following effects can be obtained.
In other words, since a plurality of capacitance-type capacitance change detectors are arranged on the plate, the vibration can be increased to improve the sensitivity compared to the prior art, enabling multi-axis detection and reducing the acceleration sensitivity. Can be obtained.
[Brief description of the drawings]
FIG. 1 is a plan view showing a gyro device according to the present invention.
2 is a perspective view showing a capacitance type capacitance change detecting unit in FIG. 1; FIG.
FIG. 3 is an equivalent circuit diagram.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 board 2 electrostatic capacitance type capacitance change detection part 10,11 1st, 2nd board
11a
13, 12 First and second electrodes
L Longitudinal direction
ω Input angular velocity
C capacitance

Claims (3)

Electromagnetic actuator (5) by reciprocating rotation to the plate (1) a plurality of capacitive capacitance change detection unit arranged along the X and Y directions is provided on the (2), wherein each of the electrostatic In order to reduce the thickness of the first and second plate bodies (10, 11) provided on the capacitive type capacitance change detecting portion (2) and facing each other, and on the inner surface of the second plate body (11). A bore portion (11a) , a first electrode (13) formed on the inner surface of the first plate body (10), and a first portion formed on the bore portion (11a) of the second plate body (11) . Two electrodes (12), and the longitudinal direction (L) of each capacitance type capacitance change detecting section (2 ) is disposed along the X direction and the Y direction, and the electrodes (13, 12) A gyro apparatus characterized in that the input angular velocity (ω) is detected by a change in capacitance (C) between the two.   The gyro according to claim 1, wherein the actuator (5) is configured to reciprocally drive a plurality of projections (3) provided on the plate (1) along a rotation direction of the plate (1). apparatus.   3. The gyro apparatus according to claim 2, wherein the actuator (5) comprises a single motor and reciprocates the motor.

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