JP2001021359A - Piezoelectric angle of oscillation speed sensor and manufacture of oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric angle of oscillation speed sensor whose characteristics are made stable by simplifying a structure and a manufacturing process, reducing manufacturing costs, and increasing working precision, and a method for manufacturing the oscillator. SOLUTION: An oscillator 30 of a piezoelectric angle of oscillation speed sensor is constituted of a piezoelectric body 35 shaped like a square pole, and a first divided electrode 33a and a second divided electrode 33b are formed on a first die face 33, and a third divided electrode 34a and a fourth divided electrode 34b are formed on a second side face 34. This piezoelectric body 35 is supported by the node of oscillation, and an AC voltage is impressed to the electrode for exciting driving (the first divided electrode) 33a, and the both edges related with the axial direction are allowed to resonate and oscillate as free edges, and a voltage difference generated due to the generation of a Coriolis force when an angle of rotation speed is added is detected from two electrodes for detection (the first divided electrode 33a and the second divided electrode 33b).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibration angular velocity sensor mounted on, for example, a camera-integrated video tape recorder for detecting camera shake and a method of manufacturing the vibrator.

[0002]

2. Description of the Related Art Conventionally, an angular velocity sensor has been used for detecting an angular velocity in an inertial coordinate system and determining a traveling direction like an aircraft. However, recently, an angular velocity sensor has been used as an auxiliary function for car navigation and a camera. It is also applied to the camera shake prevention function of a built-in video tape recorder, and its demand is rapidly expanding.

FIG. 32 shows a vibrator 1 of a piezoelectric vibration angular velocity sensor as a first conventional example. The vibrator 1 is formed by bonding piezoelectric bodies 4 a, 4 b, and 4 c having electrodes formed on both sides to respective side surfaces of a nickel alloy 2 having a triangular prism shape. Although only the piezoelectric body 4a is visible in the figure, the piezoelectric body 4b is attached to the bottom surface of the nickel alloy 2 and the piezoelectric body 4c is attached to the other surface. The vibrator 1 includes, for example, two support members 3 fixed in a housing of a camera-integrated video tape recorder,
It is welded at two points on the side 2a (indicated by reference numeral 5) and supported so as to be suspended.

The oscillator 1 configured as described above is connected to a circuit shown in FIG.
Resonant vibration is performed in the y direction with the support points 5 and 5 as nodes. At this time, if a rotational force 24 caused by camera shake of the camera-integrated video tape recorder is generated around the center C of the vibrator, a Coriolis force is generated in the x direction perpendicular to the resonating y direction. The Coriolis force is represented by 2 m [v × ω], where m is the mass of the vibrator 1, v is the velocity vector of the vibration in the y direction, and ω is the angular velocity vector of the rotational force 24. By detecting the Coriolis force, the rotational force 24 is detected, and the actuator that drives the imaging unit including the optical system of the camera-integrated video tape recorder in the horizontal and vertical directions is controlled, so that a captured image with little image blur can be obtained. I'm trying to get.

Next, a circuit to which the vibrator 1 is connected will be described with reference to FIG.

FIG. 33 shows a conventional processing circuit for an angular velocity sensor using a triangular columnar nickel alloy oscillator shown in FIG. This processing circuit includes an amplifier 18 having an input terminal connected to the electrode surface of the lower surface piezoelectric element 4b of the triangular prism vibrator 2, and a phase shifter 1 connected to the output terminal of the amplifier 18.
9 and the piezoelectric element 4 for both driving and detection of the triangular prism vibrator 2
a, 4c, the differential amplifier 20 connected to the electrode surfaces 4a, 4c, the synchronous detector 22 connected to the output terminal of the differential amplifier 20, and the synchronous detector 22 connected to the output terminal of the synchronous detector 22. And a low-pass filter 23, and the phase shifter 1
9 is connected to the dividing resistor R and the synchronous detector 22.

The operation principle of the piezoelectric vibration angular velocity sensor configured as described above will be described. When the DC power supply to the amplifier 18 is turned on, the amplifier 18 is activated and the phase shifter 1
9 through the drive / detection piezoelectric elements 4a and 4c.
When a driving voltage of kHz is applied, the vibrator 1 has the support point 5 shown in FIG. 32 as a node and both ends of the vibrator 1 as free ends.
Self-excited vibration in its direction at its own stable mechanical resonance frequency. Although the phase shifter 19 adjusts the phase of the output of the amplifier 18, the vibrator 1 can self-oscillate by this phase adjustment. Now, when the rotation 24 is not applied to the vibrator 1, the distortion of the piezoelectric elements 4a and 4c occurs in exactly the same manner, so that the outputs from both the piezoelectric elements 4a and 4c are the same in both amplitude and phase, and therefore the differential amplifier The output of 20 is zero.

When the rotation 24 is applied while the vibrator 2 is mechanically vibrating in the y direction as described above, a Coriolis force is generated at right angles (x direction) to the rotation center axis C and the y axis, The combined force of the force in the y direction by the excitation and the force in the x direction by the Coriolis force distorts the vibrator 2. Since this distortion occurs in the x direction, voltages having opposite signs, that is, voltages having opposite phases are generated on the electrode surfaces of the piezoelectric elements 4a and 4c. Hereinafter, a signal generated by this Coriolis force will be referred to as a Coriolis signal.

Due to the combined force, the piezoelectric elements 4a and 4c detect the respective excitation signals and Coriolis signals as superposed AC signals. The detection signals are respectively inverted and non-inverted input to the differential amplifier 20, and the excitation signals having the same phase are mutually canceled in the output after the differential operation.
Only Coriolis signals of opposite phase are detected. The detected Coriolis signal is input to the synchronous detector 22 and synchronously detected at the output of the phase shifter 19. Since the high frequency component of the excitation signal is mixed in the signal obtained by the synchronous detection, the high frequency component is removed by the low-pass filter 23, and a signal having an amplitude proportional to the rotational angular velocity ω is obtained.

Next, FIG. 34 shows a vibrator 6 of a piezoelectric vibration angular velocity sensor as a second conventional example, and FIG.
FIG. The vibrator 6 has a cylindrical piezoelectric ceramic 7 and six electrodes 9, 1 on its peripheral surface.
0, 11, 12, 13, and 14 are formed by, for example, screen printing. In FIG. 35, the electrodes 9 are illustrated as extending in the axial direction for easy understanding of the connection of the circuit. However, as shown in FIG. 34, in practice, the electrodes 9 extend in the circumferential direction of the columnar piezoelectric ceramics 7. It is formed along. The electrodes 11, 12, 14 are connected,
It is grounded via an electrical connection line 15. Electrodes 9, 1
Reference numerals 0 and 13 are electrically independent from each other, and are connected to respective components of a circuit to be described later via electrical connection lines 17, 25 and 16, respectively.

The vibrator 6 is supported by two rubber support members 8 and 8, and the vibrator 6 is resonated and vibrated in the y-direction with the support points as nodes, as in the first conventional example.
At this time, when the rotational force 24 is generated around the center C of the vibrator, a Coriolis force is generated in the x direction perpendicular to the resonating y direction. Then, the rotational force 24 is detected by detecting the Coriolis force.

FIG. 35 shows a processing circuit of the angular velocity sensor 6 using the columnar piezoelectric vibrator 7 shown in FIG. This processing circuit includes an amplifier 18 having an output terminal connected to the driving electrode 9 of the cylindrical piezoelectric vibrator 7, a differential amplifier 20 connected to the detecting electrodes 10 and 13 of the cylindrical piezoelectric vibrator 7, and an adder. , A synchronous detector 22 connected to the output terminal of the differential amplifier 20, a low-pass filter 23 connected to the output terminal of the synchronous detector 22, an output terminal of the adder 21, and an input terminal of the amplifier 18. And a phase shifter 19 connected between the electrodes and the electrodes 11, 12, and 14 are grounded. In FIG. 35, components corresponding to the components in the circuit shown in FIG. 33 are denoted by the same reference numerals.

The operation principle of the piezoelectric vibration angular velocity sensor configured as described above will be described. When the DC power is supplied to the amplifier 18, the amplifier 18 is activated, and the electrode 1 is turned on.
The outputs of 0 and 13 are added by an adder 21, the phase of which is adjusted by a phase shifter 19, and added to an amplifier 18. The amplified output is input to the electrode 9, and the vibrator 7 has the position of the support point member 8 shown in FIG. 34 as a node and both ends of the vibrator 7 as free ends.
Self-excited vibration at about 25 kHz in the direction. When the rotation 24 is not applied to the vibrator 6, the same signals are obtained in the detection electrodes 10 and 13 in both amplitude and phase as in the case of FIG. 33, and the output of the differential amplifier 20 is 0.

When the rotation 24 is applied while the vibrator 6 is excited in the y direction, the Coriolis force acts in the x direction and the vibrator 7 is distorted as in the case of FIG.
0 and 13 generate Coriolis signals having phases opposite to each other.
Then, a signal in which the excitation signal and the Coriolis signal from the detection electrodes 10 and 13 are superimposed is input to the differential amplifier 20 and the adder 21. In the adder 21, Coriolis signals having phases opposite to each other are canceled out, and only an excitation signal having the same phase is output and added to the phase shifter 19. Phase shifter 19 adjusts the phase, the output of which is applied to amplifier 18 and applied to electrode 9.
On the other hand, the Coriolis signal output of the differential amplifier 20 is input to the synchronous detector 22, and synchronously detected by the output of the adder 21. From the signal obtained by the synchronous detection, a signal proportional to the rotational angular velocity ω is obtained by the low-pass filter 23.

[0015]

The triangular prism-shaped vibrator 1 of the first conventional example described above has the highest detection sensitivity and is currently the mainstream. However, the piezoelectric body 4
Since the structure and the manufacturing process are complicated, such as bonding of a, 4b, and 4c and welding at the support points 5, 5, it is difficult to improve the mass production effect. This tendency becomes remarkable as the size is further reduced.

In the second conventional example in which the columnar piezoelectric body 7 itself is used as the vibrator, there is no problem associated with the bonding of the piezoelectric bodies. However, because it is difficult to ensure the processing accuracy to a cylindrical shape, and because the electrodes are printed one by one on a curved surface,
After all, the structure is not expected to produce mass production effects. Furthermore, as the size is reduced, it becomes more difficult to secure the accuracy of processing a cylinder and the accuracy of printing electrodes on a curved surface.

As described above, conventionally, there have been problems that the structure is complicated, the management of assembly accuracy is difficult, the adjustment of the resonance frequency is also difficult, and the angular velocity detection characteristics vary. In particular, when the size is reduced, stricter accuracy is required, and it has been difficult to reduce the cost and the size.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a piezoelectric vibration angular velocity sensor having a simplified structure and a manufacturing process, reduced manufacturing costs, high processing accuracy, and stable characteristics, and a method of manufacturing the same. The task is to

[0019]

In order to solve the above-mentioned problems, according to the present invention, the vibrator of the piezoelectric vibration angular velocity sensor is a quadrangular prism-shaped piezoelectric body, and the side surface thereof is formed on a side opposed in parallel. At least two or more pairs of electrodes are formed, and this piezoelectric body is supported at the node of vibration, and applies an AC voltage to the excitation drive electrode to cause resonance vibration with both ends in the axial direction as free ends, When the rotational angular velocity is applied, a voltage difference caused by the generation of Coriolis force is detected from the two detection electrodes.

Alternatively, electrodes are formed by plating or printing on the entire surface of both sides in the thickness direction of the plate-shaped piezoelectric body, polarized in this thickness direction, and this plate is cut into a number of square pole pieces. Further, a vibrator of a piezoelectric vibration angular velocity sensor made of a quadrangular prism-shaped piezoelectric material having an electrode forming surface is obtained.

Alternatively, the first electrode and the second electrode are plated or printed on the entire surface of both sides of the plate-shaped piezoelectric body in the thickness direction.
And cut this flat plate into a number of square pole pieces,
After forming a third electrode and a fourth electrode by plating or printing on each of two surfaces perpendicular to both surfaces of the square pillar piece on which the first and second electrodes are formed, a polarization process is performed, and each side surface is formed. A piezoelectric vibrating angular velocity sensor vibrator made of a quadrangular prism-shaped piezoelectric body having electrodes formed thereon is obtained.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a vibrator 30 of a piezoelectric vibration angular velocity sensor according to a first embodiment of the present invention. The vibrator 30 is formed by forming electrodes on the upper and lower surfaces of a quadrangular prism-shaped piezoelectric body 35 by plating. FIG. 2 shows an enlarged cross-sectional view of the vibrator 30. An upper surface 33 as a first side surface includes
The first divided into two by a groove 31 extending along the axial direction.
The divided electrode 33a and the second divided electrode 33b are formed by plating. The lower surface 34 as a second side surface has a groove 3
A groove 32 extending along the axial direction is formed at a position symmetrical to 1, and a third divided electrode 34a and a fourth divided electrode 34b are formed by plating. Arrow P indicates the direction of polarization.

Next, a method of manufacturing the vibrator 30 will be described with reference to FIG. FIG. 3A shows a thin plate 36 having a thickness of 1 mm made of, for example, PZT (PbZrTiO ₃ ) -based piezoelectric ceramics. The entire surface of each of the upper and lower surfaces is plated with nickel as a base and gold thereon. Thereafter, a high DC voltage is applied to the upper and lower plating surfaces to polarize the plate 36 in the thickness direction. Next, as shown in FIG. 3B, the thin plate 36 is cut along a cutting line 37, and is 1 mm wide and 12 mm long.
Are cut out to obtain the vibrator 30.
At this time, along the cutting line 39, the electrode dividing grooves 31, 32 of the vibrator 30 of FIGS.
The groove to be formed is continuously formed with the cutting by grinding using the same grindstone as the cutting into the square pole piece. The dimensions of the cut square prism piece 35 are determined according to the setting of the resonance frequency when the square prism piece 35 resonates as a vibrator.

Next, the support of the vibrator will be described with reference to FIG. As shown in FIG. 4A, the cut-out vibrator 30 has the eight supporting portions 40a of the four supporting frames 40 and the plating surfaces (first to fourth divided electrodes) joined by soldering. You. The material of the support frame 40 is
For example, phosphor bronze, stainless steel, etc., and the thickness is 100 μm.
m. Then, as shown in FIG. 4B, the support block 41 is sandwiched between the vertically opposed support frames 40 and fixed. The support block 41 is a non-magnetic block body and is made of a material having a certain degree of rigidity. For example, ceramics (CaTiO ₃ ) and resin-based materials. The support block 41 is fixed to the housing of the camera-integrated VTR, and the vibrator 30 is fixed to and supported by the support portion 40 of the support frame 40 in a suspended state. Although the vibrator 30 is connected to the circuit shown in FIG. 5, the vibrator 30 is connected to the circuit using the support portion 40 of the support frame 40 as an electrode. Further, the support portion 40 serves as a node (node point) of the vibration of the vibrator 30 resonated by this circuit, and the vibrator 30 is resonated with both ends in the axial direction being free ends.

Next, a circuit to which the vibrator 30 is connected will be described with reference to FIG.

FIG. 5 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 30 shown in FIG. The processing circuit includes a phase shifter 19 connected to the drive / detection electrode 33a of the piezoelectric vibrator 30, an amplifier 18 connected to an output terminal of the phase shifter 19, and an output of the drive / detection electrode 33a. The output terminal of the detection electrode 33b is directly connected to the differential amplifier 20, the synchronous detector 22 connected to the output terminal of the differential amplifier 20, and the synchronous detector 2.
The output of the amplifier 18 is applied to the drive / detection electrode 33a via the phase shifter 19, and the vibrator electrode 34a is grounded.

The operation principle of the piezoelectric vibration angular velocity sensor configured as described above will be described. When the DC power supply to the amplifier 18 is turned on, the amplifier 18 is activated, the amplified output is input to the drive / detection electrode 33a through the phase shifter 19, and the vibrator 30 is connected to the support 40a shown in FIG. Then, the vibrator 30 is self-excited at its mechanical resonance frequency of about 25 kHz in the y direction with both ends of the vibrator 30 as free ends. The applied voltage and the voltage generated by the excitation are added to the electrode 33a and output. Therefore, when the rotation 24 is not applied to the vibrator 30, the subtracter 25 subtracts the voltage applied to the electrode 33a in order to prevent a voltage difference from appearing at the output of the differential amplifier 20. Right lower electrode 34 of vibrator 30
“b” is not necessary for the circuit configuration, but is for ensuring the vibration balance with respect to the electrode 33b.

When a rotational force 24 is applied to the vibrator 30, Coriolis force acts on the vibrator 30 in the x direction, and the combined force of the vibrator 30 and the force in the y direction due to the excitation distorts the vibrator 30, and the electrodes 33a, 33
In b, Coriolis signal voltages having phases opposite to each other are generated. This is input to the differential amplifier 20 to cancel the excitation signal and detect the Coriolis signal. The detected Coriolis signal is synchronously detected by a synchronous detector 22, and a low-pass filter 23 outputs a signal proportional to the rotational angular velocity ω.

Next, a second embodiment of the present invention will be described. The same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 6 shows a vibrator 60 of the piezoelectric vibration angular velocity sensor according to the second embodiment. Vibrator 60
The electrodes are formed by plating or printing on each surface of the piezoelectric body 66 having a rectangular column shape. FIG. 7 shows an enlarged cross-sectional view of the vibrator 60. An upper surface 61 as a first side surface includes
The first divided into two by a groove 65 extending along the axial direction.
The divided electrode 61a and the second divided electrode 61b are formed by plating. A third electrode 62a is formed by plating on a lower surface 62 as a second side surface. The third electrode 63 is formed on the third side surface 63 by, for example, screen printing.
a is formed. Similarly, a fifth electrode 64a is formed on the fourth side surface 64 by printing. Arrow P indicates the direction of polarization.

Next, a method of manufacturing the vibrator 60 will be described with reference to FIG. As in the case of the first embodiment, first, nickel plating is plated on the base and gold is plated on the nickel plating on the entire upper and lower surfaces of the thin plate 36 made of piezoelectric ceramics and having a thickness of 1 mm. Next, as shown in FIG. 8B, the thin plate 36 is cut along the cutting line 37, and a width 1
mm, cut out a large number of square pole pieces 66 with a length of 12 mm,
The vibrator 60 is obtained. At this time, the cutting line 39
Along the upper surface, a groove serving as the electrode dividing groove 65 of the vibrator 60 is formed continuously with the cutting by grinding using the same grindstone as the cutting into the square pole piece. The dimensions of the cut square pole piece 66 are determined according to the setting of the resonance frequency when the square pole piece 66 resonates as a vibrator. After being cut out, the fourth electrode 63a and the fifth electrode 6 are printed on both side surfaces of the square pole piece 66 by printing as shown in FIG.
4a, the first divided electrode 61a and the fourth electrode 63
a, and a high DC voltage is applied between the second divided electrode 61b and the fifth electrode 64a to polarize in the direction of arrow P.

Next, the support of the vibrator will be described with reference to FIG. As in the first embodiment, as shown in FIG. 9A, the cut-out vibrator 60 includes eight support portions 40a of four support frames 40 and plating-formed surfaces (first and second divided electrodes). 61a, 61b and third electrode 62a)
Are joined by soldering. Then, as shown in FIG. 9B, the support block 41 is sandwiched between the vertically opposed support frames 40 and fixed. Support block 41
Is fixed to the housing of the camera-integrated VTR, and the vibrator 60 is suspended in the air.
Fixed to 0 and supported. After assembling the vibrator 60, the resonance frequency of the vibration in the vertical and horizontal directions of the vibrator 60 was adjusted, and the vertical resonance frequency was shifted to about 60 Hz higher than the horizontal resonance frequency. Although the vibrator 60 is connected to the circuit shown in FIG. 10, the vibrator 60 is connected to the circuit using the support portion 40 of the support frame 40 as an electrode. The fourth electrode 63a and the fifth electrode 64a formed on the side surface are connected to a circuit by a lead wire. Further, the support portion 40 becomes a node (node point) of the vibration of the vibrator 60 resonated by this circuit,
The vibrator 60 is resonated with both ends in the axial direction being free ends.

Next, a circuit to which the vibrator 60 is connected will be described with reference to FIG.

FIG. 10 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 60 shown in FIG. In FIG. 10, components corresponding to the components in the circuit shown in FIG. 5 are denoted by the same reference numerals.

The processing circuit shown in FIG. 10 includes an adder 2 connected to the drive / detection electrodes 61a and 61b of the piezoelectric vibrator 60.
1 and the amplifier 18 connected to the output terminal of the adder 21.
And a phase shifter 19 connected to the output terminal of the amplifier 18.
, A differential amplifier 20 connected to the drive / detection electrodes 61a and 61b, a synchronous detector 22 connected to an output terminal of the differential amplifier 20, and an output terminal of the synchronous detector 22. The output of the adder 21 is input to the synchronous detector 22, and both side electrodes 63a and 64a of the vibrator 60 are grounded. In addition,
The lower electrode 62a is for ensuring the vibration balance of the vibrator 60.

The operation principle of the piezoelectric vibration angular velocity sensor configured as described above will be described. As in the case of FIG. 5, when the DC power supply to the amplifier 18 is turned on, the amplifier 18 enters an operating state. The amplified output is input to the drive / detection electrodes 61a and 61b through the phase shifter 19, and the vibrator 60 is activated. y
Self-excited vibration at its own mechanical resonance frequency of about 25 kHz. The output of the differential amplifier 20 is 0 before the rotation 24 is applied to the vibrator 60. When the rotation 24 is applied, signals from the electrodes 61a and 61b due to the Coriolis force are detected by the differential amplifier 20, while the adder 21 cancels out Coriolis signals of opposite phases and outputs only an excitation signal of the same phase. Is done. The output of the differential amplifier 20 is synchronously detected by the output of the adder 21 by the synchronous detector 22, and a signal proportional to the rotational angular velocity ω is obtained by the low-pass filter 23.

Next, a third embodiment of the present invention will be described. The same parts as those in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 11 shows a vibrator 70 of a piezoelectric vibration angular velocity sensor according to the third embodiment. Vibrator 70
The electrode is formed by plating or printing on each surface of the piezoelectric body 75 having a rectangular column shape. FIG. 12 shows an enlarged cross-sectional view of the vibrator 70. A first electrode 71a is formed by plating on an upper surface 71 as a first side surface.
A second electrode 72a is formed by plating on a lower surface 72 as a second side surface. The third electrode 73a is formed on the third side surface 73 by, for example, screen printing. Similarly, a fourth electrode 74a is formed on the fourth side surface 74 by printing. Arrow P indicates the direction of polarization.

Next, a method of manufacturing the vibrator 70 will be described with reference to FIG. As in the above embodiment, first, a thin plate 3 made of piezoelectric ceramics and having a thickness of 1 mm.
6 is nickel-plated on the underlayer and gold is plated thereon. Next, the thin plate 36 is cut along the cutting line 37, and is 1 mm wide and 12 mm long.
A large number of square pole pieces 75 of mm are cut out to obtain the vibrator 70. The dimensions of the cut square prism piece 75 are determined in accordance with the setting of the resonance frequency when the square prism piece 75 resonates as a vibrator. After being cut out, square pole piece 75
As shown in FIG. 12, the third side of the
And the fourth electrode 74a are formed between the first electrode 71a and the third electrode 73a and the second electrode 72a.
A high voltage of direct current is applied between a and the third electrode 73a to polarize in the direction of arrow P.

Next, the support of the vibrator will be described with reference to FIG. As in the above embodiment, as shown in FIG. 14A, the cut-out vibrator 60 is provided with eight support portions 40a of four support frames 40 and plating-formed surfaces (first and second electrodes 71a). , 71b) are joined by soldering. Then, as shown in FIG. 14B, the support block 41 is sandwiched between the vertically opposed support frames 40 and fixed. The support block 41 is fixed to the housing of the camera-integrated VTR, and the vibrator 70 is fixed to and supported by the support portion 40 of the support frame 40 in a suspended state. After assembling the vibrator 70, the resonance frequency of the vibration in the vertical and horizontal directions of the vibrator 70 was adjusted, and the vertical resonance frequency was set to be shifted by about 60 Hz higher than the resonance frequency in the horizontal direction. Although the vibrator 70 is connected to the circuit shown in FIG. 15, the vibrator 70 is connected to the circuit using the support portion 40 of the support frame 40 as an electrode. The third electrode 73a and the fourth electrode 74a formed on the side surface are connected to a circuit by a lead wire. Further, the support portion 40 serves as a node (node point) of the vibration of the vibrator 70 resonated by this circuit, and the vibrator 70 is resonated with both ends in the axial direction being free ends.

Next, a circuit to which the vibrator 70 is connected will be described with reference to FIG.

FIG. 15 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 70 shown in FIG. This circuit is the same as that of FIG. 10 except that the drive / detection electrodes 71a and 72a are provided on the entire upper and lower surfaces of the piezoelectric vibrator 70, and the side electrode 74a is not grounded. . In FIG. 15, components corresponding to those in the circuit shown in FIG. 10 are denoted by the same reference numerals.

The operation principle shown in FIG. 15 is that the vibrator 70 is self-excited in the x direction and the voltage difference between the electrodes 71a and 72a caused by the vibration in the y direction due to the Coriolis force is detected. Same as in the case. The side electrode 74a is not necessary in the circuit configuration, but is for ensuring the vibration balance with respect to the side electrode 4.

Next, a fourth embodiment of the present invention will be described. The same parts as those in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 16 shows a vibrator 80 of the piezoelectric vibration angular velocity sensor according to the fourth embodiment. Vibrator 80
The electrode is formed by plating or printing on each surface of the piezoelectric body 87 having a rectangular column shape. FIG. 17 shows an enlarged cross-sectional view of the vibrator 80. An upper surface 81 as a first side surface is divided into two by a groove 85 extending along the axial direction.
The first divided electrode 81a and the second divided electrode 81b are formed by plating. On the lower surface 82 as the second side surface,
The third divided electrode 82a and the fourth divided electrode 82a are divided into two by a groove 86 formed in a position symmetrical to the groove 85 and extending along the axial direction.
The split electrode 82b is formed by plating. The fifth electrode 83a is formed on the third side surface 83 by, for example, screen printing. Similarly, a sixth electrode 84a is formed on the fourth side surface 84 by printing. Arrow P
Indicates the direction of polarization.

Next, a method of manufacturing the vibrator 80 will be described. The vibrator 80 is obtained by cutting out a square pole piece 87 from the thin plate 36 in the same manner as in the first embodiment shown in FIG. . After being cut out, the fifth electrode 8 is printed on both sides of the square pole piece 87 by printing as shown in FIG.
3a and the sixth electrode 84a are formed, and the first divided electrode 81 is formed.
a and the fifth electrode 83a, between the second divided electrode 81b and the sixth electrode 84a, between the third divided electrode 82a and the fifth electrode 83a, between the fourth divided electrode 82b and the sixth electrode 83a. Electrode 84
A high voltage of direct current is applied between the light emitting device a and the light emitting device a to polarize in the direction of arrow P.

Next, the support of the vibrator will be described with reference to FIG. The cut-out vibrator 80 is provided with eight support portions 4 of four support frames 40.
0a by soldering. Then, the support block 41 is sandwiched and fixed between the vertically opposed support frames 40, and the vibrator 80 is supported in a suspended state. In addition, the same can be said for the connection with the circuit, the adjustment of the resonance node, and the adjustment of the resonance frequency as in the above embodiment.

Next, a circuit to which the vibrator 80 is connected will be described with reference to FIG.

FIG. 19 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 80 shown in FIG. In FIG. 19, components corresponding to the components in the circuit shown in FIG. 10 are denoted by the same reference numerals.

19 includes an adder 21 connected to the driving electrodes 81a and 81b of the piezoelectric vibrator 80, an amplifier 18 connected to an output terminal of the adder 21, and an output of the amplifier 18. A phase shifter 19 connected to one end, a differential amplifier 20 connected to the detection electrodes 82a and 82b of the piezoelectric vibrator 80, a synchronous detector 22 connected to an output end of the differential amplifier 20, A low-pass filter 23 connected to the output terminal of the synchronous detector 22;
The output 1 is input to the synchronous detector 22, and both side electrodes 83a and 84a of the vibrator 80 are grounded. In FIG. 19, components corresponding to the components in the circuit shown in FIG. 10 are denoted by the same reference numerals.

The operating principle of the piezoelectric vibration angular velocity sensor configured as described above is based on the fact that the driving electrodes 81a and 81b have 25
A drive voltage of kHz is applied to cause self-excited vibration in the y direction, and a detection electrode 82 generated by vibration in the x direction due to Coriolis force
a, 82b are detected by the differential amplifier 20;
Synchronous detection is performed by the synchronous detector 22 using the excitation signal output from the adder 21, and a signal proportional to the rotational angular velocity ω is obtained by the low-pass filter 23.

FIG. 20 shows a vibrator 90 of the piezoelectric vibration angular velocity sensor according to the fifth embodiment. Vibrator 90
The electrodes are formed by plating or printing on each surface of a quadrangular prism-shaped piezoelectric body 96. FIG. 21 shows an enlarged cross-sectional view of the vibrator 90. An upper surface 91 as a first side surface is divided into two by a groove 95 extending along the axial direction.
The first divided electrode 91a and the second divided electrode 91b are formed by plating. A third electrode 92a is formed on the lower surface 92 serving as the second side surface by plating. A fourth electrode 93a is formed on the third side surface 93 by, for example, screen printing. Similarly, a fifth electrode 94a is formed on the fourth side surface 94 by printing. Arrow P
Indicates the direction of polarization.

Next, a method of manufacturing the vibrator 90 will be described. A thin plate which is plated on the upper and lower surfaces and polarized in the thickness direction by the same method as that of the second embodiment shown in FIG. A square pole piece 96 is cut out from 36 to obtain a vibrator 90. After being cut out, both sides of the square pole piece 96 are
As shown by 1, a fourth electrode 93a and a fifth electrode 94a are formed by printing.

Next, FIG. 22 shows the support of the vibrator 90. Since the vibrator 90 is similar to that of the above-described embodiment, the vibrator 90 cut out will be briefly described.
It is joined to the eight support portions 40a by soldering. Then, the support block 41 is sandwiched and fixed between the vertically opposed support frames 40, and the vibrator 90 is supported in a suspended state. In addition, the same can be said for the connection with the circuit, the adjustment of the resonance node, and the adjustment of the resonance frequency as in the above embodiment.

FIG. 23 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 90 shown in FIG. 20. The circuit configuration and operation are the same as those in FIG. 10, and corresponding components are denoted by the same reference numerals.

Next, a sixth embodiment of the present invention will be described. The same parts as those in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 24 shows a vibrator 100 of the piezoelectric vibration angular velocity sensor according to the sixth embodiment. Vibrator 1
Reference numeral 00 denotes an electrode formed by plating or printing on each surface of the quadrangular prism-shaped piezoelectric body 107. FIG. 25 shows an enlarged cross-sectional view of the vibrator 100. The first divided electrode 101a and the second divided electrode 101 are divided into two parts by a groove 105 extending along the axial direction on an upper surface 101 as a first side surface. 101
b is formed by plating. The lower surface 102 as a second side surface is divided into two parts by a groove 106 formed in a position symmetrical to the groove 105 and extending along the axial direction.
The divided electrode 102a and the fourth divided electrode 102b are formed by plating. The fifth electrode 103a is formed on the third side surface 103 by, for example, screen printing. Similarly, a sixth electrode 104a is formed on the fourth side surface 104 by printing. Arrow P indicates the direction of polarization.

Next, a method of manufacturing the vibrator 100 will be described. In the same manner as in the first embodiment shown in FIG. 3, a thin plate plated on the upper and lower surfaces and polarized in the thickness direction is used. 36, a rectangular prism piece 107 is cut out, and the vibrator 1
00 is obtained. After being cut out, the fifth electrode 1 is printed on both side surfaces of the square pole piece 107 by printing as shown in FIG.
03a and a sixth electrode 104a are formed.

Next, FIG. 26 shows the support of the vibrator 100. Since the vibrator 100 is the same as that of the above-described embodiment, the vibrator 100 will be described briefly. The support part 40a is joined by soldering. Then, the support block 41 is sandwiched and fixed between the vertically opposed support frames 40, and the vibrator 100 is supported in a suspended state. In addition, the same can be said for the connection with the circuit, the adjustment of the resonance node, and the adjustment of the resonance frequency as in the above embodiment.

Next, a circuit to which the vibrator 100 is connected will be described with reference to FIG.

FIG. 27 shows a circuit of an angular velocity sensor using a piezoelectric vibrator shown in FIG. 24. FIG. 27 differs from FIG. 19 except that the input terminal of the adder 21 and the input terminal of the differential amplifier 20 are connected. Is the same. That is, in FIG. 27, the upper and lower electrodes 2a and 3a on the left are connected, and the upper and lower electrodes 2b and 3b on the right are connected.
Are connected.

The principle of operation of the piezoelectric vibration angular velocity sensor configured as described above is as follows. A driving voltage of 25 kHz is applied to the driving electrodes 101a and 101b to cause self-excited vibration in the y direction, and vibration in the x direction due to Coriolis force. The resulting Coriolis signals of the detection electrodes 102a and 102b are detected by the differential amplifier 20, and synchronously detected by the synchronous detector 22 with the excitation signal output from the adder 21, and a signal proportional to the rotational angular velocity ω is output by the low-pass filter 23. can get.

Next, a seventh embodiment of the present invention will be described. The same parts as those in the above embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 28 shows a vibrator 110 of the piezoelectric vibration angular velocity sensor according to the seventh embodiment. Vibrator 1
Reference numeral 10 denotes a structure in which electrodes are formed on each surface of a quadrangular prism-shaped piezoelectric body 115 by plating or printing. FIG. 29 shows the vibrator 1
FIG. 10 shows an enlarged sectional view of an upper surface 1 as a first side surface.
11, a first electrode 111b is formed by plating. A second electrode 112a is formed by plating on a lower surface 112 as a second side surface. Third side 1
13, the third electrode 11 by screen printing, for example.
3a are formed. Similarly, a fourth electrode 114a is also formed on the fourth side surface 114 by printing. Arrow P indicates the direction of polarization.

Next, a method of manufacturing the vibrator 110 will be described. In the same manner as in the third embodiment shown in FIG. 13, a thin plate plated on the upper and lower surfaces and polarized in the thickness direction is used. A square pole piece 115 is cut out from 36 to obtain a vibrator 110. After being cut out, the third electrode 113a and the fourth electrode 114a are formed on both sides of the square pole piece 115 by printing as shown in FIG.

Next, FIG. 30 shows the support of the vibrator 110. Since the vibrator 110 is similar to that of the above embodiment, the vibrator 110 thus cut out will be briefly described. The support part 40a is joined by soldering. Then, the support block 41 is sandwiched and fixed between the vertically opposed support frames 40, and the vibrator 110 is supported in a suspended state in the air. In addition, the same can be said for the connection with the circuit, the adjustment of the resonance node, and the adjustment of the resonance frequency as in the above embodiment.

Next, a circuit to which the vibrator 110 is connected will be described with reference to FIG.

FIG. 31 shows a processing circuit of an angular velocity sensor using the piezoelectric vibrator 110 shown in FIG.
The differential amplifier 20 is connected to the side electrodes 113a and 114a for both driving and detection, the lower electrode 112a is grounded, and the upper electrode 111a is for ensuring a vibration balance. The rest of the circuit configuration is the same as in FIG. The principle of operation is that when a driving voltage is applied to the electrodes 113a and 114a, the vibrator 110 vibrates in the y direction and the Coriolis force acts in the x direction due to the rotation 24.
Signals are detected at a and 114b. This signal processing is also shown in FIG.
Is the same as

As described above, the vibrator according to each of the above-described embodiments has a simple structure manufactured by a process that does not require a process in which work accuracy such as bonding and welding is difficult to control, thereby reducing manufacturing costs. be able to. In addition, high-precision assembling (manufacturing) is facilitated, and the problem of reduced assembling accuracy due to downsizing can be overcome. In other words, the integrated piezoelectric body has a simple quadrangular prism structure, and can be obtained by a simple process of cutting out a flat plate with a grindstone, and since the electrodes are formed flat, it can be easily and accurately formed, and has excellent detection characteristics. High-precision vibrators can be manufactured. Also, after forming the electrodes on the upper and lower surfaces of the plate-shaped piezoelectric body in a lump by plating, the grooves are provided and the electrodes are divided at the same time as the cutting process to the quadrangular prism-shaped vibrator, so the independent electrodes are formed. Can be easily done. Also, since the vibrator is made of piezoelectric ceramics, the cost of the product is reduced and the sensitivity of detection due to the magnetic field from the motor is lower than in the first conventional example in which an expensive magnetic material containing Ni is used as the material of the vibrator. There is also the effect that there is no. Also,
Polarization treatment, before cutting out the vibrator, after forming electrodes by plating on both sides of the flat plate, it is better to perform in the thickness direction once, after printing out the side electrodes on each vibrator after cutting out, It is simpler and easier than performing polarization processing for each. Further, a slight difference occurs in the direction of expansion and contraction of the piezoelectric body due to the difference in polarization direction, but there is no essential difference in operation as a vibrator.

Although the embodiments of the present invention have been described above, the present invention is, of course, not limited to these embodiments.
Various modifications are possible based on the technical idea of the present invention.

In each of the above embodiments, the vibrator is self-excited and resonated, but may be separately excited. In this case, it is difficult to vibrate completely at the resonance frequency, and the vibration has a value close to the resonance frequency.

Further, in each of the above embodiments, the description has been made assuming that the rotational angular velocity occurs around the center C of the vibrator. However, the angular velocity around the point on the straight line passing through the center C which is equidistant from the two detection electrodes is described. Can be detected if a rotational angular velocity is generated.

In each of the above embodiments, the electrodes are formed by plating on the upper and lower surfaces of the plate-shaped piezoelectric body, and the electrodes are formed by printing on the side surfaces after the vibrator is cut out. Both may be formed by plating or printing. The upper and lower surfaces may be formed by printing, and the side surfaces may be formed by plating.

[0075]

As described above, according to the piezoelectric vibration angular velocity sensor according to the first aspect of the present invention, the structure of the vibrator can be simplified, the manufacturing cost can be reduced, and the processing accuracy can be increased. The size of the vibrator can be reduced while ensuring the stability of the vibrator.

According to a ninth or thirteenth aspect of the present invention, there is provided a method of manufacturing a vibrator for a piezoelectric vibration angular velocity sensor.
The vibrator can be manufactured in a simple process, the manufacturing cost can be reduced, and the processing accuracy can be increased. Therefore, a vibrator having no variation in characteristics can be manufactured and the size can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view of a vibrator according to a first embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view of the vibrator of FIG.

3A and 3B are diagrams showing a method of manufacturing the same vibrator, wherein A is a perspective view of a flat piezoelectric element showing a processing line, and B is a partially enlarged perspective view of the flat piezoelectric element shown in A.

4A and 4B are views showing a method of manufacturing the same vibrator, in which A is a perspective view showing a state of connection between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 5 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 6 is a perspective view of a vibrator according to a second embodiment of the present invention.

FIG. 7 is an enlarged cross-sectional view of the vibrator of FIG.

8A and 8B are views showing a method of manufacturing the same vibrator, in which A is a perspective view of a flat piezoelectric element showing a processing line, and B is a partially enlarged perspective view of the flat piezoelectric element shown in A.

9A and 9B are diagrams showing a method of manufacturing the same vibrator, wherein A is a perspective view showing a state of connection between the vibrator and a support frame, and B is a perspective view further attaching a frame fixing block.

FIG. 10 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 11 is a perspective view of a vibrator according to a third embodiment of the present invention.

FIG. 12 is an enlarged cross-sectional view of the vibrator of FIG.

13A and 13B are diagrams showing a method of manufacturing the same vibrator, in which A is a perspective view of a flat piezoelectric element showing a processing line, and B is a partially enlarged perspective view of the flat piezoelectric element shown in A.

14A and 14B are views showing a method of manufacturing the same vibrator, in which A is a perspective view showing a state of connection between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 15 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 16 is a perspective view of a vibrator according to a fourth embodiment of the present invention.

17 is an enlarged cross-sectional view of the vibrator of FIG.

18A and 18B are views showing a method of manufacturing the same vibrator, in which A is a perspective view showing a state of connection between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 19 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 20 is a perspective view of a vibrator according to a fifth embodiment of the present invention.

21 is an enlarged cross-sectional view of the vibrator of FIG.

22A and 22B are diagrams illustrating a method of manufacturing the vibrator, in which A is a perspective view illustrating a state of connection between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 23 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 24 is a perspective view of a vibrator according to a sixth embodiment of the present invention.

FIG. 25 is an enlarged cross-sectional view of the vibrator of FIG. 24.

26A and 26B are diagrams illustrating a method of manufacturing the same vibrator, in which A is a perspective view showing a coupling state between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 27 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 28 is a perspective view of a vibrator according to a seventh embodiment of the present invention.

FIG. 29 is an enlarged cross-sectional view of the vibrator of FIG. 28.

30A and 30B are diagrams showing a method of manufacturing the vibrator, wherein A is a perspective view showing a state of connection between the vibrator and a support frame, and B is a perspective view in which a frame fixing block is further attached.

FIG. 31 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 32 is a perspective view of a triangular prism vibrator according to a first conventional example.

FIG. 33 is a processing circuit of an angular velocity sensor using the same vibrator.

FIG. 34 is a perspective view of a columnar vibrator according to a second conventional example.

FIG. 35 is a processing circuit of an angular velocity sensor using the same vibrator.

[Explanation of symbols]

18 amplifier 19 phase shifter 20 differential amplifier 21 adder 22 synchronous detector 23 low-pass filter 24 rotation 25 subtracter 3
0: vibrator, 33a: first divided electrode, 33b: second divided electrode, 34a: third divided electrode, 34b: fourth
Divided electrode, 40: Support frame, 41: Support block, 60: Vibrator, 61a: First divided electrode, 61b
... Second divided electrode 62a Third electrode 63a
Fourth electrode, 64a Fifth electrode, 70 Vibrator,
71a ... first electrode, 72a ... second electrode, 73a
... Third electrode 74a Fourth electrode 80 Vibrator 81a First divided electrode 81b Second divided electrode 82a Third divided electrode 82b Fourth Split electrode, 83a... Fifth electrode, 84a... Sixth electrode, 9
0: vibrator, 91a: first divided electrode, 91b: second divided electrode, 92a: third electrode, 93a: fourth electrode, 94a: fifth electrode, 100: vibration Child, 10
1a: first divided electrode, 101b: second divided electrode, 1
02a... Third divided electrode, 102b... Fourth divided electrode,
103a ... fifth electrode, 104a ... sixth electrode, 1
10 vibrator, 111a first electrode, 112a
... 2nd electrode, 113a ... 3rd electrode, 114a ...
Fourth electrode, P... Polarization, ω... Angular velocity vector

Claims (17)

[Claims] 1. A piezoelectric vibration angular velocity sensor for detecting the angular velocity by detecting a Coriolis force generated when a rotational angular velocity is applied to a vibrator that is resonantly vibrating. A columnar piezoelectric body, at least two pairs of electrodes formed on the side face parallel to each other are formed on the side face, and the piezoelectric body is supported at a node of vibration; An AC voltage is applied to the excitation drive electrode of the first and second electrodes to cause resonance oscillation with both ends in the axial direction as free ends, and a voltage difference caused by the generation of the Coriolis force when the rotational angular velocity is applied is detected between two of the electrodes. A piezoelectric vibration angular velocity sensor characterized in that it is detected from an electrode for use. 2. A first divided electrode and a second divided electrode, which are divided into two along the axial direction, are formed on a first side surface of the quadrangular prism. The second side face opposite to the side face is also divided into two along the axial direction.
A split electrode and a fourth split electrode are formed, and are polarized from the third and fourth split electrodes in the directions of the first and second split electrodes, and the first split electrode is used for the excitation drive and the detection. The voltage difference generated by the generation of the Coriolis force is detected from the first divided electrode and the second divided electrode by using the electrode and the second divided electrode as the detection electrodes. The piezoelectric vibration angular velocity sensor according to 1. 3. A first divided electrode and a second divided electrode that are divided into two along an axial direction on a first side surface of the quadrangular prism, and a first divided electrode facing the first side surface is formed. A third electrode is formed on the second side surface, and a third side surface perpendicular to the first and second side surfaces and a fourth side surface facing the third side surface are formed with fourth and fifth electrodes, respectively. Electrodes are formed,
The first divided electrode and the second divided electrode are polarized in the directions of the fourth electrode and the fifth electrode, respectively, so that the first divided electrode and the second divided electrode are used for the excitation drive and the detection. 2. The piezoelectric vibration angular velocity sensor according to claim 1, wherein a voltage difference caused by the generation of the Coriolis force is detected from the first divided electrode and the second divided electrode as an electrode for use. 3. 4. A first electrode is formed on a first side surface of the quadrangular prism, and a second electrode is formed on a second side surface opposite to the first side surface. Third and fourth electrodes are formed on a third side surface perpendicular to the second side surface and a fourth side surface opposite to the third side surface, respectively, and the first electrode and the second electrode are formed. The third from the electrode
Of the first electrode or the fourth electrode,
And the second electrode are used as the excitation drive and detection electrode, and a voltage difference generated by the generation of the Coriolis force is detected from the first electrode and the second electrode. The piezoelectric vibration angular velocity sensor according to claim 1, wherein: 5. A first divided electrode and a second divided electrode which are divided into two along an axial direction on a first side surface of the quadrangular prism, and symmetrically with the first divided electrode and the second divided electrode. The third side divided along the axial direction is also provided on the second side opposite to the side of the third side.
A divided electrode and a fourth divided electrode are formed, and
And the first divided electrode and the third
A fifth electrode is formed on a third side surface on the side of the divided electrode, and a sixth electrode is formed on a fourth side surface opposite to the third side surface. The direction of the fifth electrode, the direction of the sixth electrode from the second divided electrode, the direction of the fifth electrode from the third divided electrode, and the direction of the sixth electrode from the fourth divided electrode. Polarized in the direction
The first divided electrode and the second divided electrode are used as the excitation driving electrodes, and the third divided electrode and the fourth divided electrode are used as the detection electrodes. The piezoelectric vibration angular velocity sensor according to claim 1, wherein the detection is performed from the divided electrode and the fourth divided electrode. 6. A first divided electrode and a second divided electrode which are divided into two in the axial direction on a first side surface of the quadrangular prism, and are opposed to the first side surface. A third electrode is formed on the second side surface, and a third side surface perpendicular to the first and second side surfaces and a fourth side surface facing the third side surface are provided with fourth and fourth electrodes, respectively. 5 electrodes are formed and polarized in the direction from the first and second divided electrodes to the third electrode, and the first divided electrode and the second divided electrode are used for the self-excited drive and detection. 2. The piezoelectric vibration angular velocity sensor according to claim 1, wherein a voltage difference caused by the generation of the Coriolis force is detected from the first divided electrode and the second divided electrode as an electrode for use. 3. 7. A first divided electrode and a second divided electrode, which are divided into two along the axial direction, are formed on a first side surface of the quadrangular prism, and symmetrically with the first divided electrode and the second divided electrode. A third divided electrode and a fourth divided electrode, which are divided into two along the axial direction, are also formed on a second side surface facing the side surface of the first side surface, and the first and second side surfaces are perpendicular to the first and second side surfaces. A fifth electrode is formed on the third side of the divided electrode and the third side of the divided electrode, and a sixth electrode is formed on a fourth side opposite to the third side. The third divided electrode is polarized in a direction from the first and second divided electrodes to the third and fourth divided electrodes, and the first divided electrode and the second divided electrode are used as the excitation drive and detection electrodes. The electrode and the fourth divided electrode are used as the detection electrodes, and the voltage difference caused by the generation of the Coriolis force is determined by the third divided electrode. The piezoelectric vibration angular velocity sensor according to claim 1, wherein the detection is performed from a pole and the fourth divided electrode. 8. A first electrode is formed on a first side surface of the quadrangular prism, and a second electrode is formed on a second side surface opposite to the first side surface. A third and a fourth electrode are formed on a third side surface perpendicular to the second side surface and a fourth side surface opposite to the third side surface, respectively. The third electrode and the fourth electrode are polarized in the direction of the electrodes, and the third electrode and the fourth electrode are used as the excitation drive and detection electrodes, and the voltage difference generated by the generation of the Coriolis force is applied to the third electrode and the fourth electrode. The piezoelectric vibration angular velocity sensor according to claim 1, wherein the detection is performed from an electrode. 9. A method of manufacturing a vibrator for a piezoelectric vibration angular velocity sensor for detecting the angular velocity by detecting a Coriolis force generated when a rotational angular velocity is applied to a vibrator that is vibrating resonantly, An electrode is formed by plating or printing on the entire surface in both directions in the thickness direction, polarized in the thickness direction, and this flat plate is cut into a number of square pillar pieces, thereby forming a square pillar-shaped piezoelectric having an electrode formation surface. A method for manufacturing a vibrator for a piezoelectric vibration angular velocity sensor, wherein a vibrator made of a body is obtained. 10. The piezoelectric device according to claim 9, wherein a groove extending in the axial direction is formed on both surfaces or one of the surfaces of the square pole piece on which the electrodes are formed, and the electrodes are divided into two parts. A method for manufacturing a vibrator for a vibration angular velocity sensor. 11. The vibrator for a piezoelectric vibration angular velocity sensor according to claim 10, wherein the cutting into the quadrangular prism pieces and the formation of the grooves are continuously performed using the same grindstone. Manufacturing method. 12. An electrode is formed by plating or printing on two surfaces of a rectangular prism piece cut from the flat plate and perpendicular to both surfaces on which the electrodes are formed.
A method for manufacturing a vibrator for a piezoelectric vibration angular velocity sensor according to claim 11. 13. A method of manufacturing a vibrator of a piezoelectric vibration angular velocity sensor for detecting the angular velocity by detecting a Coriolis force generated when a rotational angular velocity is applied to a vibrator that is vibrating resonantly. A first electrode and a second electrode are formed by plating or printing, respectively, on both surfaces in the thickness direction, and the flat plate is cut into a number of square pole pieces, and the first and second electrodes of the square pole pieces are cut. After forming a third electrode and a fourth electrode by plating or printing on each of two surfaces perpendicular to both surfaces on which the electrodes are formed, a polarization process is performed, and a quadrangular prism-shaped piezoelectric member having electrodes formed on each side surface. A method for manufacturing a vibrator for a piezoelectric vibration angular velocity sensor, wherein a vibrator made of a body is obtained. 14. The piezoelectric device according to claim 13, wherein the direction of the polarization is a direction from the first and second electrodes to the third electrode or the fourth electrode. A method for manufacturing a vibrator for a vibration angular velocity sensor. 15. A groove extending in the axial direction is formed on a surface of the quadrangular prism piece on which the first electrode is formed, and the first electrode is formed as a first split electrode on the third electrode side. The second divided electrode on the fourth electrode side is divided into two, polarized in the direction from the first divided electrode to the third electrode, and polarized in the direction from the second divided electrode to the fourth electrode. The method for manufacturing a vibrator for a piezoelectric vibration angular velocity sensor according to claim 13, wherein: 16. A groove extending in the axial direction is formed on a surface of the quadrangular prism piece on which the first electrode is formed, and the first electrode is provided with a first split electrode on the third electrode side, The second divided electrode on the fourth electrode side is divided into two, and symmetrically with the second divided electrode, a groove extending in the axial direction is also formed on the surface on which the second electrode is formed, and the second electrode is Dividing the electrode into a third divided electrode on the third electrode side and a fourth divided electrode on the fourth electrode side;
Polarized in the direction from the first divided electrode to the third electrode, polarized in the direction from the second divided electrode to the fourth electrode, and polarized in the direction from the third divided electrode to the third electrode. 14. The method of manufacturing a vibrator for a piezoelectric vibration angular velocity sensor according to claim 13, wherein the polarization is performed in a direction from the fourth divided electrode to the fourth electrode. 17. The piezoelectric vibration angular velocity according to claim 15, wherein the cutting into the quadrangular prism pieces and the formation of the grooves are continuously performed using the same grindstone. Manufacturing method of the transducer of the sensor.