JP2001013425A5 - - Google Patents

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Publication number
JP2001013425A5
JP2001013425A5 JP1999184021A JP18402199A JP2001013425A5 JP 2001013425 A5 JP2001013425 A5 JP 2001013425A5 JP 1999184021 A JP1999184021 A JP 1999184021A JP 18402199 A JP18402199 A JP 18402199A JP 2001013425 A5 JP2001013425 A5 JP 2001013425A5
Authority
JP
Japan
Prior art keywords
modulation device
piezoelectric element
mirror
light modulation
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999184021A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001013425A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11184021A priority Critical patent/JP2001013425A/ja
Priority claimed from JP11184021A external-priority patent/JP2001013425A/ja
Publication of JP2001013425A publication Critical patent/JP2001013425A/ja
Publication of JP2001013425A5 publication Critical patent/JP2001013425A5/ja
Pending legal-status Critical Current

Links

JP11184021A 1999-06-29 1999-06-29 光変調デバイス及び表示装置 Pending JP2001013425A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11184021A JP2001013425A (ja) 1999-06-29 1999-06-29 光変調デバイス及び表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11184021A JP2001013425A (ja) 1999-06-29 1999-06-29 光変調デバイス及び表示装置

Publications (2)

Publication Number Publication Date
JP2001013425A JP2001013425A (ja) 2001-01-19
JP2001013425A5 true JP2001013425A5 (enExample) 2004-08-26

Family

ID=16145965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11184021A Pending JP2001013425A (ja) 1999-06-29 1999-06-29 光変調デバイス及び表示装置

Country Status (1)

Country Link
JP (1) JP2001013425A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4569161B2 (ja) * 2004-04-30 2010-10-27 株式会社ニコン マイクロアクチュエータアレー、光学装置及び光スイッチアレー
JP6365156B2 (ja) * 2014-09-11 2018-08-01 株式会社デンソー ３次元形状作成装置

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