JP2001005168A5 - - Google Patents
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- Publication number
- JP2001005168A5 JP2001005168A5 JP1999175631A JP17563199A JP2001005168A5 JP 2001005168 A5 JP2001005168 A5 JP 2001005168A5 JP 1999175631 A JP1999175631 A JP 1999175631A JP 17563199 A JP17563199 A JP 17563199A JP 2001005168 A5 JP2001005168 A5 JP 2001005168A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17563199A JP2001005168A (ja) | 1999-06-22 | 1999-06-22 | 近接場光露光用マスクおよびその作製方法 |
| US09/598,452 US6338924B1 (en) | 1999-06-22 | 2000-06-22 | Photomask for near-field exposure having opening filled with transparent material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17563199A JP2001005168A (ja) | 1999-06-22 | 1999-06-22 | 近接場光露光用マスクおよびその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001005168A JP2001005168A (ja) | 2001-01-12 |
| JP2001005168A5 true JP2001005168A5 (enExample) | 2005-06-09 |
Family
ID=15999470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17563199A Pending JP2001005168A (ja) | 1999-06-22 | 1999-06-22 | 近接場光露光用マスクおよびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001005168A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3715973B2 (ja) | 2002-05-07 | 2005-11-16 | キヤノン株式会社 | 近接場光露光用のフォトマスク、該フォトマスクを用いたパターン作製方法およびパターン作製装置 |
| JP4522068B2 (ja) * | 2003-09-12 | 2010-08-11 | キヤノン株式会社 | 近接場光を発生させる構造体、近接場光の発生方法、及び、近接場露光装置 |
| JP5774536B2 (ja) * | 2012-03-30 | 2015-09-09 | 株式会社東芝 | 近接場露光用マスクおよびパターン形成方法 |
| JP2016018139A (ja) * | 2014-07-10 | 2016-02-01 | 株式会社ディスコ | 露光マスクの製造方法 |
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1999
- 1999-06-22 JP JP17563199A patent/JP2001005168A/ja active Pending