JP2001004515A - Method and apparatus for measuring hardness - Google Patents

Method and apparatus for measuring hardness

Info

Publication number
JP2001004515A
JP2001004515A JP11174927A JP17492799A JP2001004515A JP 2001004515 A JP2001004515 A JP 2001004515A JP 11174927 A JP11174927 A JP 11174927A JP 17492799 A JP17492799 A JP 17492799A JP 2001004515 A JP2001004515 A JP 2001004515A
Authority
JP
Japan
Prior art keywords
hardness
measuring device
hardness measuring
moving
normal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11174927A
Other languages
Japanese (ja)
Other versions
JP3512681B2 (en
Inventor
Masaaki Hirota
正明 廣田
Hajime Watanabe
肇 渡邉
Katsuhiko Matsuda
勝彦 松田
Toshimi Kobayashi
十思美 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Electric Power Co Inc
Nippon Steel Corp
Original Assignee
Kyushu Electric Power Co Inc
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Electric Power Co Inc, Sumitomo Metal Industries Ltd filed Critical Kyushu Electric Power Co Inc
Priority to JP17492799A priority Critical patent/JP3512681B2/en
Publication of JP2001004515A publication Critical patent/JP2001004515A/en
Application granted granted Critical
Publication of JP3512681B2 publication Critical patent/JP3512681B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To accurately measure the hardness of a structure. SOLUTION: A method wherein the surface of an object to be measured is irradiated with light and the normal line direction of the surface of the object to be measured is confirmed on the basis of the optical axis of the reflected light and that of the irradiation light and the hardness of the object to be measured is measured is disclosed and a hardness measuring apparatus equipped with a mechanism capable of being moved and rotated in three up-and-down, before-and-behind and left-and-right directions is also disclosed. In this case, the mechanism capable of being moved and rotated in three directions is constituted by connecting a three-direction regulating mechanism M1 assembled by stacking a left and right moving mechanism 5, an up and down moving mechanism 6 and a before and behind moving mechanism 7 on a substrate 4 and an angle regulating mechanism M2 assembled by stacking a left and right oscillating mechanism 8, a before and behind oscillating mechanism 9 and an up and down fine adjustment mechanism 10 by a connection lever 11 and the support mechanism 12 fitted to the up and down fine adjustment mechanism 10 comprises a hardness measuring apparatus having a through-hole 12-1 in which a normal line confirming device V and a hardness measuring instrument H can be inserted alternately.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、構造物などの材料
の表面硬さを現地で非破壊的に測定するための硬さ測定
方法およびそれに使用する硬さ測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hardness measuring method for non-destructively measuring the surface hardness of a material such as a structure on site and a hardness measuring device used for the method.

【0002】[0002]

【従来の技術】近年、構造物(たとえば、発電用ボイ
ラ)の使用寿命を予測するため材料の劣化度の診断を行
うことが多く、その手段として材料の硬さを測定してい
る。
2. Description of the Related Art In recent years, the degree of deterioration of a material is often diagnosed in order to predict the service life of a structure (for example, a boiler for power generation), and the hardness of the material is measured as a means thereof.

【0003】材料の硬さ測定器は、ロックウエル硬さ
計、ビッカース硬さ計などの据付け型硬さ計、またはシ
ョア硬さ計のように携帯型のものがある。例えば、ロツ
クウェル硬さ計による硬さ測定試験片は、測定圧子軸が
測定面に垂直に作用するように測定面とその裏面とを平
行に機械加工する。そのため、構造物を構成する材料の
硬さを測定するためには、構造物から試験片を切り出す
必要がある。しかし、たとえば発電用ボイラの鋼管など
では、試験片の切り出しがほとんど不可能であり、切り
出せたとしても代替材料を溶接などで挿入しなければな
らず、頻繁に行うことができない。
[0003] As a material hardness measuring instrument, there is a portable type such as an installation type hardness meter such as a Rockwell hardness meter or a Vickers hardness meter, or a Shore hardness meter. For example, in a hardness measurement test piece by a Rockwell hardness tester, a measurement surface and a back surface thereof are machined in parallel so that a measurement indenter axis acts perpendicularly to the measurement surface. Therefore, in order to measure the hardness of the material constituting the structure, it is necessary to cut out a test piece from the structure. However, for example, in the case of a steel pipe of a power generation boiler, it is almost impossible to cut out a test piece, and even if cut out, a substitute material must be inserted by welding or the like, and thus cannot be frequently performed.

【0004】構造物の硬さを現地で測定できるショア硬
さ計は、測定面に対して下向きに重錘を落下させるもの
であり、垂直方向にのみ測定できる。構造物での硬さ測
定面は管、軸のように曲面が多く、また測定方向はタン
クのようにあらゆる角度の方向から測定しなければなら
ない。これを解消したのが、超音波硬さ計である。
A Shore hardness tester that can measure the hardness of a structure on site drops a weight downward on a measurement surface, and can measure only in a vertical direction. The hardness measurement surface of a structure has many curved surfaces such as a pipe and an axis, and the measurement direction must be measured from all angles such as a tank. The ultrasonic hardness tester has solved this problem.

【0005】図1は、超音波硬さ計を示す概念図であ
り、(a)は外観を示す側面図、(b)は縦断面図、(c)は下
から見た図である。
FIGS. 1A and 1B are conceptual views showing an ultrasonic hardness tester, wherein FIG. 1A is a side view showing an external appearance, FIG. 1B is a longitudinal sectional view, and FIG. 1C is a view seen from below.

【0006】超音波硬さ計Hは、振動棒1と振動棒1を発
射するばね機構2とが筒状のケーシング3の中に納められ
た構造である。
The ultrasonic hardness tester H has a structure in which a vibrating bar 1 and a spring mechanism 2 for firing the vibrating bar 1 are housed in a cylindrical casing 3.

【0007】振動棒1は、その一端にダイヤモンド圧子1
-1、中間部に振動コンバータ1-2および振動検出部1-3が
設けられている。振動コンバータ1-2は、ダイヤモンド
圧子1-1を備えた端部が振幅の最大点となるように振動
棒1を共振させ、振動棒1とともにケーシング3の中を軸
方向に移動する。
The vibrating rod 1 has a diamond indenter 1 at one end.
1, a vibration converter 1-2 and a vibration detection unit 1-3 are provided in an intermediate part. The vibrating converter 1-2 resonates the vibrating rod 1 so that the end having the diamond indenter 1-1 has the maximum amplitude, and moves in the casing 3 along with the vibrating rod 1 in the axial direction.

【0008】ケーシング3は、一端に振動棒1を発射する
ばね機構2を内蔵し、他端および中間の内部に振動棒1を
軸方向に移動できるように支持する支持部材3-1,3-2を
有し、胴部にフランジ3-3を設けるのが望ましい。支持
部材3-1,3-2が振動棒を支持する貫通孔3-4,3-4は、ケー
シング3の軸心と同心に、またフランジ3-3の下面3-5
は、ケーシングの軸心と垂直に構成されている。
The casing 3 has a built-in spring mechanism 2 for firing the vibrating rod 1 at one end, and support members 3-1 and 3- for supporting the vibrating rod 1 axially movable at the other end and an intermediate portion inside. It is desirable to have a flange 3-3 on the body. The through-holes 3-4, 3-4 where the support members 3-1 and 3-2 support the vibrating rod are concentric with the axis of the casing 3 and the lower surface 3-5 of the flange 3-3.
Are formed perpendicular to the axis of the casing.

【0009】超音波硬さ計は、先端にダイヤモンド圧子
が取り付けられた超音波発振子を共振させながら一定の
力で被測定物に打ち込み、その振動数の変化を測定して
材料の硬さを測定できる計器である。圧子の圧痕は小さ
いが、測定結果の再現性が高い。しかし、超音波硬さ計
を測定位置に定め取り付ける作業は手作業であり、超音
波硬さ計の軸心を測定位置の法線方向に一致させること
は難しい。このための超音波硬さ計を支持する治具もあ
るが、取り付け状態によっては治具の剛性が不足するこ
ともあり、正確な測定値が得られないという欠点があ
る。
An ultrasonic hardness tester uses an ultrasonic vibrator having a diamond indenter attached to the tip of the ultrasonic vibrator to strike a test object with a constant force while resonating, and measure the change in the frequency to measure the hardness of the material. It is an instrument that can be measured. Although the indentation of the indenter is small, the reproducibility of the measurement result is high. However, the work of determining and mounting the ultrasonic hardness tester at the measurement position is a manual operation, and it is difficult to match the axis of the ultrasonic hardness tester with the normal direction of the measurement position. Some jigs support an ultrasonic hardness tester for this purpose, but depending on the state of attachment, the jig may have insufficient rigidity, so that there is a drawback that accurate measurement values cannot be obtained.

【0010】[0010]

【発明が解決しようとする課題】本発明の目的は、硬さ
測定器を被測定物の任意の位置に、しかも測定面の法線
方向または垂線方向に正しく取り付け、構造物の表面硬
さを正確に測定する方法と、それを実現させるための硬
さ測定装置を提供するにある。以下、「法線」と記載す
れば、測定面の垂線を含むものとする。
SUMMARY OF THE INVENTION It is an object of the present invention to mount a hardness measuring device at an arbitrary position on an object to be measured, and in a normal direction or a perpendicular direction of a measuring surface, and to improve the surface hardness of a structure. An object of the present invention is to provide an accurate measuring method and a hardness measuring device for realizing the method. Hereinafter, when it is described as “normal line”, it includes a perpendicular line of the measurement surface.

【0011】[0011]

【課題を解決するための手段】発明者らは、被測定物の
任意の位置に任意の方向から硬さを測定する方法とし
て、硬さ測定器を既存の各種移動機構を組み合わせて位
置調節機構を構成することにより、軽量で高い剛性を有
する硬さ測定装置が得られることを見いだし、本発明を
完成した。本発明の要旨は、下記に示す硬さ測定方法
ならびに図2、図8および図9に示す下記およびに
示すの硬さ測定装置にある。
As a method for measuring hardness at an arbitrary position on an object to be measured from an arbitrary direction, a inventors of the present invention has proposed a position adjusting mechanism by combining a hardness measuring instrument with various existing moving mechanisms. The present inventors have found that a lightweight and high-hardness hardness measuring device can be obtained by configuring the present invention, and have completed the present invention. The gist of the present invention resides in a hardness measuring method shown below and a hardness measuring device shown below and shown in FIGS. 2, 8 and 9.

【0012】被測定物の表面に光線を照射し、反射す
る光線の光軸と前記照射した光線の光軸とによって被測
定物表面の法線方向を確認した後、法線方向から硬さを
測定する方法。
A surface of the object is irradiated with a light beam, and the direction of the normal to the surface of the object is confirmed based on the optical axis of the reflected light beam and the optical axis of the irradiated light beam. How to measure.

【0013】上下、前後および左右の三方向に移動な
らびに回転できる機構を備えた硬さ測定装置であって、
三方向に移動および回転できる機構は、基板4の上に左
右移動機構5、上下移動機構6および前後移動機構7を積
み重ねて組み立てられた三方向調節機構M1と、左右揺動
機構8、前後揺動機構9および上下微動機構10を積み重ね
て組み立てられた角度調節機構M2とが連結桿11によって
連結されて構成され、前記上下微動機構10に設けられた
支持機構12は法線確認器Vと硬さ測定器Hとを取り替えて
挿入できる貫通孔12-1を備えた硬さ測定装置(図2、参
照)。
A hardness measuring device having a mechanism capable of moving and rotating in three directions of up, down, front and rear, and left and right,
The mechanism that can move and rotate in three directions includes a three-way adjustment mechanism M1 assembled by stacking a left-right movement mechanism 5, a vertical movement mechanism 6, and a front-back movement mechanism 7 on a substrate 4, a left-right swing mechanism 8, The moving mechanism 9 and the angle adjusting mechanism M2 assembled by stacking the vertical fine moving mechanism 10 are connected by a connecting rod 11, and the supporting mechanism 12 provided in the vertical fine moving mechanism 10 includes A hardness measuring device provided with a through hole 12-1 that can be inserted by replacing the measuring device H (see FIG. 2).

【0014】上下、前後および左右の三方向に移動な
らびに回転できる機構を備えた硬さ測定装置であって、
三方向に移動および回転できる機構は、基板4の上に左
右移動機構5、上下移動機構6および前後移動機構7を積
み重ねて組み立てられた三方向調節機構M1と、左右揺動
機構8、前後揺動機構9および上下微動機構10を積み重ね
て組み立てられた角度調節機構M2とが連結桿11によって
連結されて構成され、前記上下微動機構10に設けられた
支持機構24は法線確認器Vおよび硬さ測定器Hが取り付け
られる複数個の貫通孔を備える硬さ測定装置(図8およ
び9、参照)。
A hardness measuring device having a mechanism capable of moving and rotating in three directions of up, down, front and rear, and left and right,
The mechanism that can move and rotate in three directions includes a three-way adjustment mechanism M1 assembled by stacking a left-right movement mechanism 5, a vertical movement mechanism 6, and a front-back movement mechanism 7 on a substrate 4, a left-right swing mechanism 8, The moving mechanism 9 and the angle adjusting mechanism M2 assembled by stacking the vertical fine moving mechanism 10 are connected by a connecting rod 11, and the supporting mechanism 24 provided on the vertical fine moving mechanism 10 includes a normal A hardness measuring device having a plurality of through holes to which a height measuring instrument H is attached (see FIGS. 8 and 9).

【0015】上記支持機構24(図8、参照)は、2つの
貫通孔24-1,24-2を有し、それぞれの貫通孔の中心軸24-
7,24-8が同一平面24-5内で平行である移動部材24-3と、
その移動部材を2つの貫通孔の中心軸24-7,24-8を結ぶ
方向に移動可能に支持するスライド部材24-4とから構成
されているのが望ましい。
The support mechanism 24 (see FIG. 8) has two through holes 24-1 and 24-2.
A moving member 24-3 in which 7,24-8 are parallel within the same plane 24-5,
It is desirable that the moving member is constituted by a slide member 24-4 which movably supports the moving member in a direction connecting the central axes 24-7, 24-8 of the two through holes.

【0016】上記支持機構25(図9、参照)は、2つの
貫通孔26-1,26-2を有する回転部材26と、その回転部材
を同心に支持するブラケット27とからなり、2つの貫通
孔の中心軸26-8,26-9が回転部材の中心軸26-3を中心と
する同一円周面26-4内にあり、かつ平行に構成されてい
るのが望ましい。
The support mechanism 25 (see FIG. 9) comprises a rotating member 26 having two through holes 26-1, 26-2 and a bracket 27 for supporting the rotating member concentrically. The central axes 26-8 and 26-9 of the holes are desirably in the same circumferential surface 26-4 centered on the central axis 26-3 of the rotating member and are preferably configured in parallel.

【0017】上記支持機構28(図12、参照)は、中央に
硬さ測定器(図では超音波硬さ計H)を、一方の端に照
射装置30を、そして他の端に受光装置31を備え、それら
の中心軸Ha,30-1および31-1が同一平面29内にあり、か
つ照射装置および受光装置の中心軸と硬さ測定器の中心
軸との挟角αが等しく、それぞれの軸を硬さ測定器の中
心軸Ha上で交差させ、照射装置および受光装置で法線確
認器を構成させるのが望ましい。
The support mechanism 28 (see FIG. 12) has a hardness measuring device (ultrasonic hardness meter H in the figure) at the center, an irradiation device 30 at one end, and a light receiving device 31 at the other end. And their central axes Ha, 30-1 and 31-1 are in the same plane 29, and the included angles α between the central axes of the irradiation device and the light receiving device and the central axis of the hardness measuring device are equal, respectively. It is desirable that the axes of the two intersect on the central axis Ha of the hardness measuring device, and that the irradiation device and the light receiving device constitute a normal line checking device.

【0018】上記支持機構32(図13、参照)は、中央に
硬さ測定器(図では超音波硬さ計H)を、一方の端に照
射装置30を、そして他の端に受光装置31を備え、それら
の中心軸が同一平面29内にあり、かつ照射装置および受
光装置の中心軸30-1,31-1と硬さ測定器の中心軸Haとの
挟角が等しく、それぞれの軸を硬さ測定器の中心軸上で
交差させ、硬さ測定器Hの下位置にプリズム33が設けら
れ、照射装置、受光装置およびプリズムで法線確認器を
構成させるのが望ましい。
The support mechanism 32 (see FIG. 13) has a hardness measuring device (ultrasonic hardness meter H in the figure) at the center, an irradiation device 30 at one end, and a light receiving device 31 at the other end. And their central axes are in the same plane 29, and the included angles of the central axes 30-1, 31-1 of the irradiation device and the light receiving device and the central axis Ha of the hardness measuring device are equal, and each axis is Are crossed on the central axis of the hardness measuring device, a prism 33 is provided below the hardness measuring device H, and the irradiation device, the light receiving device, and the prism preferably constitute a normal line checker.

【0019】本発明の硬さ測定装置は、上下、前後およ
び左右の三方向に移動ならびに回転できる機構(以下、
これを単に「位置調節機構」と記載する)に設けた支持
機構に法線確認器を取り付け、位置調節機構を調節する
ことによって法線確認器の中心軸を任意の位置および任
意の方向に設定することができる。その後、法線確認器
と硬さ測定器とを取り替えるか、または法線確認器の位
置に硬さ測定器を移動させれば、硬さ測定器の中心軸は
設定された法線確認器の中心軸の位置および方向と一致
する。これにより、法線確認器の中心軸を被測定物の表
面の法線方向に設定しておけば、被測定物の表面の法線
方向から硬さを測定することができる。
The hardness measuring apparatus according to the present invention has a mechanism (hereinafter, referred to as a mechanism) capable of moving and rotating in three directions of up and down, front and rear, and left and right.
This is simply referred to as a "position adjustment mechanism"). A normal checker is attached to the support mechanism provided in the support mechanism, and the center axis of the normal checker is set to an arbitrary position and an arbitrary direction by adjusting the position adjustment mechanism. can do. After that, if the normal checker is replaced with a hardness checker or the hardness checker is moved to the position of the normal checker, the center axis of the hardness checker will be set to that of the set normal checker. Match the position and direction of the central axis. Thus, if the center axis of the normal checker is set in the direction of the normal to the surface of the object, the hardness can be measured from the direction of the normal to the surface of the object.

【0020】上下微動機構は、法線確認器と硬さ測定器
とを取り替えたとき、被測定物の測定面と硬さ測定器の
圧子先端との間隔を所定の距離に調節するための装置で
ある。
The vertical fine movement mechanism is a device for adjusting the distance between the measurement surface of the object to be measured and the tip of the indenter of the hardness measuring device to a predetermined distance when the normal checking device and the hardness measuring device are replaced. It is.

【0021】[0021]

【発明の実施の形態】本発明の硬さ測定方法は、被測定
物の任意の位置で、任意の方向から測定できる方法であ
る。まず、被測定物の表面に光線(レーザービーム)を
照射し、その反射する光軸と照射した光軸とを一致させ
ることによって照射光線の光軸が被測定物表面の法線方
向にあることを確認する。その後、照射光線の光軸方向
に硬さ測定器を取り付け、被測定物表面の硬さを測定す
る。
BEST MODE FOR CARRYING OUT THE INVENTION The hardness measuring method of the present invention is a method capable of measuring at an arbitrary position on an object to be measured from an arbitrary direction. First, a light beam (laser beam) is irradiated onto the surface of the device under test, and the optical axis of the irradiated beam is in the direction normal to the surface of the device under test by matching the reflected optical axis with the irradiated optical axis. Check. Thereafter, a hardness measuring device is attached in the optical axis direction of the irradiation light beam, and the hardness of the surface of the object to be measured is measured.

【0022】本発明の硬さ測定装置は、上記硬さ測定方
法を実現させるための装置であり、光線を被測定物に照
射し、それを受光して被測定物表面の法線方向を確認す
る法線確認器と圧子打ち込み式の硬さ測定器とが位置調
節機構に設けられた装置である。
The hardness measuring apparatus of the present invention is an apparatus for realizing the above-described hardness measuring method, and irradiates an object with a light beam, receives the light beam, and checks the normal direction of the surface of the object. This is a device provided with a normal checker and an indenter driving type hardness measuring device provided in a position adjusting mechanism.

【0023】図2は、硬さ測定装置の一例を示す概念図
であり、(a)は平面図、(b)は一部断面正面図、(c)は一
部断面側面図および(d)は背面図である。
FIGS. 2A and 2B are conceptual views showing an example of the hardness measuring device, wherein FIG. 2A is a plan view, FIG. 2B is a partial sectional front view, FIG. 2C is a partial sectional side view, and FIG. Is a rear view.

【0024】図に示す本発明の硬さ測定装置HAは、図2
(b)および(c)に示すように、被測定物表面の任意の位置
に取り付け可能な位置調節機構Mの取付機構12の貫通孔1
2-1に硬さ測定器(図2(b)では超音波硬さ計H)と法線確
認器V(図2(c)、参照)とを取り替え挿入できる構造と
した装置である。
The hardness measuring apparatus HA of the present invention shown in FIG.
As shown in (b) and (c), the through hole 1 of the mounting mechanism 12 of the position adjusting mechanism M that can be mounted at an arbitrary position on the surface of the DUT.
2-1 shows an apparatus that can be inserted by replacing a hardness measuring device (ultrasonic hardness meter H in FIG. 2 (b)) and a normal checker V (see FIG. 2 (c)).

【0025】この硬さ測定装置は、図2(c)に示すように
位置調節機構Mの支持機構12に法線確認器Vを取り付け、
位置調節機構を調節することによって法線確認器Vの中
心軸Vaを任意の測定位置および任意の測定方向に設定す
ることができる。その後、図2(b)に示すように法線確認
器Vと超音波硬さ計Hとを取り替えると、超音波硬さ計H
の中心軸Haは設定された法線確認器Vの中心軸Vaの位置
および方向と一致する。これにより、法線確認器の中心
軸を被測定物の表面の法線方向に設定すれば、被測定物
の表面の法線方向に硬さを測定することができる。
In this hardness measuring device, as shown in FIG. 2 (c), a normal checking device V is attached to the support mechanism 12 of the position adjusting mechanism M,
By adjusting the position adjustment mechanism, the center axis Va of the normal line checker V can be set at an arbitrary measurement position and an arbitrary measurement direction. Thereafter, as shown in FIG. 2 (b), when the normal checker V and the ultrasonic hardness meter H are replaced, the ultrasonic hardness meter H
Of the center axis Ha of the normal line coincides with the set position and direction of the center axis Va of the normal checker V. Thus, if the center axis of the normal checker is set in the direction of the normal to the surface of the object, the hardness can be measured in the direction of the normal to the surface of the object.

【0026】次に、本発明の硬さ測定装置の位置調節機
構Mについて詳しく説明する。
Next, the position adjusting mechanism M of the hardness measuring apparatus of the present invention will be described in detail.

【0027】図3は、位置調節機構の一例を示す概念図
であり、(a)は平面図、(b)は正面図、(c)は一部断面側
面図および(d)は背面図である。
FIGS. 3A and 3B are conceptual diagrams showing an example of the position adjusting mechanism. FIG. 3A is a plan view, FIG. 3B is a front view, FIG. 3C is a partial cross-sectional side view, and FIG. is there.

【0028】位置調節機構Mは、図3(b)および(c)に示す
ように、基板4の上に左右移動機構5、上下移動機構6お
よび前後移動機構7が積み重ねて組み立てられて三方向
に移動できる三方向調節機構M1と、この三方向調節機構
M1と離れた位置に上から左右揺動機構8、前後揺動機構9
および上下微動機構10が組み立てられた角度調整機構M
2とが、連結桿11によって結合されている。さらに、
上下微動機構10には、硬さ測定器または法線確認器を取
り替え把持する支持機構12がブラケット13を介して取り
付けられている。
As shown in FIGS. 3B and 3C, the position adjusting mechanism M is constructed by stacking a left-right moving mechanism 5, a vertical moving mechanism 6, and a front-rear moving mechanism 7 on a substrate 4 and assembling them in three directions. Three-way adjustment mechanism M1 that can move
Left and right rocking mechanism 8 and front and back rocking mechanism 9 from a distance away from M1
Angle adjusting mechanism M in which the vertical fine movement mechanism 10 is assembled
2 are connected by a connecting rod 11. further,
A support mechanism 12 for replacing and holding a hardness measuring device or a normal line checking device is attached to the vertical fine movement mechanism 10 via a bracket 13.

【0029】基板4は、図3(d)に示すように上面に左右
移動機構5が取り付けられ、両端には磁石14を取り付け
たブラケット4-2がピン4-1を介して揺動可能に取り付け
られている。磁石14は、被測定物の任意の位置に取り付
けることができるように、吸着をオン・オフできるのが
望ましい。また、基板およびブラケットは、軽量化のた
めアルミニウム合金から製作するのが望ましい。
As shown in FIG. 3 (d), the board 4 has a left-right moving mechanism 5 mounted on the upper surface, and a bracket 4-2 to which magnets 14 are mounted at both ends can swing via pins 4-1. Installed. It is desirable that the magnet 14 can be turned on and off so that it can be attached to an arbitrary position of the device under test. Further, it is desirable that the substrate and the bracket be manufactured from an aluminum alloy for weight reduction.

【0030】左右移動機構5は、図3(c)に示すように基
板4に固定される基台5-1と左右摺動部材5-2とから構成
されている。基台5-1にはラック(図示せず)が組み込
まれ、左右摺動部材5-2にはピニオン(図示せず、符号5
-3はピニオンを回すつまみ)が組み込まれており、つま
み5-3を回すことによって左右摺動部材5-2を左右方向
(紙面に直角方向)に移動させる。左右摺動部材5-2の
上面には、上下移動機構6が取り付けられている。
As shown in FIG. 3C, the left-right moving mechanism 5 includes a base 5-1 fixed to the substrate 4 and a left-right sliding member 5-2. A rack (not shown) is incorporated in the base 5-1 and a pinion (not shown, reference numeral 5) is provided in the left and right sliding members 5-2.
A knob -3 is provided for turning a pinion, and the left-right sliding member 5-2 is moved in the left-right direction (perpendicular to the paper) by turning the knob 5-3. A vertical moving mechanism 6 is mounted on the upper surface of the left and right sliding member 5-2.

【0031】上下移動機構6は、図3(c)に示すように支
柱6-1とΓ字状の上下摺動部材6-2とから構成されてい
る。支柱6-1は、底部を前記左右移動機構5の左右摺動部
材5-2に固定され、ピニオン(図示せず、符号6-5はピニ
オンを回すつまみ)が組み込まれている。上下摺動部材
6-2は、垂直部材6-3と水平部材6-4とから構成されてい
る。垂直部材6-3には、ラック6-3-1が組み込まれてお
り、ピニオンのつまみ6-5を回すことによって支柱6-1に
沿って上下に移動する。水平部材6-4は、一端が垂直部
材6-3に連結されており、前後摺動部材7を摺動させるた
めのピニオン(図示せず、符号6-6はピニオンを回すつ
まみ)が組み込まれている。
As shown in FIG. 3 (c), the vertical moving mechanism 6 is composed of a column 6-1 and a vertical sliding member 6-2 having a Γ shape. The support 6-1 has a bottom fixed to the left-right sliding member 5-2 of the left-right moving mechanism 5, and incorporates a pinion (not shown, reference numeral 6-5 is a knob for turning the pinion). Vertical sliding member
6-2 includes a vertical member 6-3 and a horizontal member 6-4. A rack 6-3-1 is incorporated in the vertical member 6-3, and is moved up and down along the column 6-1 by turning a pinion knob 6-5. One end of the horizontal member 6-4 is connected to the vertical member 6-3, and a pinion (not shown, reference numeral 6-6 is a knob for rotating the pinion) for sliding the front-rear sliding member 7 is incorporated. ing.

【0032】前後摺動機構7は、図3(c)に示すように上
部が連結桿11に連結され、内部にラックが設けられてい
る。このため、前後摺動機構7はピニオンのつまみ6-6を
回すことによって前記上下摺動部材6-2の水平部材6-4に
沿って前後に摺動する。
As shown in FIG. 3 (c), the front-rear sliding mechanism 7 has an upper portion connected to a connecting rod 11, and a rack provided therein. For this reason, the front-back sliding mechanism 7 slides back and forth along the horizontal member 6-4 of the vertical sliding member 6-2 by turning the pinion knob 6-6.

【0033】左右揺動機構8は、図3(b)に示すように基
台8-1と左右揺動部材8-2とから構成されている。基台8-
1は、内部にウオームギヤの一部を備え、底面には前後
揺動機構9が連結されている。左右揺動部材8-2は、上部
が連結桿11の下面に固定され、内部に前記ウオームギヤ
に噛み合うピニオン(図示せず、符号8-3はピニオンを
回すつまみ)が設けられている。左右揺動部材8-2は、
ピニオンのつまみ8-3を回すことによって基台8-1の円周
に沿って揺動する。
As shown in FIG. 3 (b), the left / right swing mechanism 8 includes a base 8-1 and a left / right swing member 8-2. Base 8-
1 has a part of a worm gear inside, and a front-rear swing mechanism 9 is connected to the bottom surface. The left and right rocking member 8-2 has an upper portion fixed to the lower surface of the connecting rod 11, and a pinion (not shown, reference numeral 8-3 is a knob for turning the pinion) that meshes with the worm gear is provided inside. Left and right swing member 8-2,
By turning the pinion knob 8-3, it swings along the circumference of the base 8-1.

【0034】前後揺動機構9は、前記左右揺動機構8と同
じ構造である。図3(c)に示すように前後揺動部材9-2の
上部には、前記左右揺動機構8の基台8-1の下面に固定さ
れ、基台9-1の底部には、上下微動機構10を取り付ける
ブラケット13が取り付けられている。
The front and rear swing mechanism 9 has the same structure as the left and right swing mechanism 8. As shown in FIG. 3 (c), the upper part of the front-rear swinging member 9-2 is fixed to the lower surface of the base 8-1 of the left and right swing mechanism 8, and the bottom of the base 9-1 is A bracket 13 for attaching the fine movement mechanism 10 is attached.

【0035】上下微動機構10は、その構造を前記上下移
動機構6と同じとする。上下微動機構の基台10-1は、そ
の側面がブラケット13の垂直部材13-1に連結桿11と直交
するように固定され、上下摺動部材10-2の側面には、硬
さ測定器または法線確認器を把持する支持機構12が取り
付けられている。上下摺動部材10-2には内部にラックが
設けられ、ピニオンのつまみ10-3を回すことによって基
台10-1に沿って上下に摺動する。
The vertical movement mechanism 10 has the same structure as the vertical movement mechanism 6. The base 10-1 of the vertical fine movement mechanism is fixed to the vertical member 13-1 of the bracket 13 so that the side surface is orthogonal to the connecting rod 11, and a hardness measuring device is provided on the side surface of the vertical sliding member 10-2. Alternatively, a support mechanism 12 for holding the normal line checker is attached. A rack is provided inside the up-down sliding member 10-2, and slides up and down along the base 10-1 by turning a pinion knob 10-3.

【0036】連結桿11は、一端を前後摺動機構7に、他
の一端を左右揺動機構8に連結して三方向調節機構M1と
角度調節機構M2とを一体化する。連結桿11は、剛性を高
め、軽量化するためU字状に、アルミニウム合金から製
作するのが望ましい。
The connecting rod 11 has one end connected to the front-rear sliding mechanism 7 and the other end connected to the left-right swinging mechanism 8, thereby integrating the three-way adjusting mechanism M1 and the angle adjusting mechanism M2. The connecting rod 11 is desirably made of an aluminum alloy in a U-shape to increase rigidity and reduce weight.

【0037】図4は、硬さ測定装置の位置調節機構にお
ける支持機構を上下微動機構に取り付けた状態を示す図
であり、(a)は一部断面正面図、(b)は図(a)のA-A断面
図、(c)は図(a)のB-B断面図である。
FIGS. 4A and 4B are views showing a state in which a support mechanism in a position adjusting mechanism of the hardness measuring device is attached to a vertical fine movement mechanism, wherein FIG. 4A is a partially sectional front view, and FIG. 3A is a sectional view taken along line AA, and FIG. 3C is a sectional view taken along line BB in FIG.

【0038】支持機構12は、図4(b)に示すように上下微
動機構10の上下摺動部10-2にアルミニウム合金製の保持
板10-4を介して、それぞれボルトで取り付けられてい
る。支持機構12は、硬さ測定器または法線確認器を挿入
するための貫通孔12-1が設けられ、その側壁部には超音
波硬さ計または法線確認器を固定する2本のボルト12-2
が設けられている。この支持機構は、1つの貫通孔12-1
に超音波硬さ計または法線確認器を挿入するので、貫通
孔12-1の中心軸12-3と支持機構の上面12-4とは直角に仕
上げることが望ましい。
As shown in FIG. 4 (b), the support mechanism 12 is attached to the vertical sliding portion 10-2 of the vertical fine movement mechanism 10 by bolts via a holding plate 10-4 made of aluminum alloy. . The support mechanism 12 is provided with a through hole 12-1 for inserting a hardness measuring device or a normal checking device, and two bolts for fixing the ultrasonic hardness meter or the normal checking device are provided on the side wall thereof. 12-2
Is provided. This support mechanism has one through hole 12-1.
Since an ultrasonic hardness tester or a normal line checker is inserted into the hole, it is desirable that the central axis 12-3 of the through hole 12-1 and the upper surface 12-4 of the support mechanism be finished at a right angle.

【0039】本発明の位置調節機構は、既存の移動機構
および揺動機構を有機的に組み合わせた装置である。位
置調節機構の支持機構の貫通孔に法線確認器を挿入し、
法線確認器から光線を被測定面に照射して位置調節機構
を調節することにより、法線確認器の中心軸を任意の方
向および位置に調節固定することができる。中心軸を調
節された法線確認器から超音波硬さ計に取り替えるの
で、任意の方向からまたは任意の位置で硬さを測定する
ことができる。また、連結桿およびブラケットなどをア
ルミニウム合金を用いて製作することにより、軽量化と
高剛性化することができる。
The position adjusting mechanism of the present invention is an apparatus in which an existing moving mechanism and swing mechanism are organically combined. Insert the normal checker into the through hole of the support mechanism of the position adjustment mechanism,
By irradiating the surface to be measured with a light beam from the normal checker and adjusting the position adjusting mechanism, the central axis of the normal checker can be adjusted and fixed in an arbitrary direction and position. The hardness can be measured from any direction or at any position since the center axis is replaced with the ultrasonic hardness tester from the adjusted normal checker. Further, by manufacturing the connecting rod, the bracket, and the like using an aluminum alloy, it is possible to reduce the weight and increase the rigidity.

【0040】次に、被測定物の硬さ測定位置の法線を確
認する法線確認器について説明する。
Next, a description will be given of a normal line checker for checking the normal line of the hardness measurement position of the workpiece.

【0041】図5は、本発明で使用する法線確認器の一
例を示す概念図であり、(a)は外観を示す一部断面図、
(b)は縦断面図、(c)は図(b)のA-A断面図である。
FIG. 5 is a conceptual diagram showing an example of a normal line checker used in the present invention. FIG.
(b) is a longitudinal sectional view, and (c) is an AA sectional view of FIG. (b).

【0042】法線確認器Vは、片方(図では下部)が開
放された筒状のケーシング15に電池16を内蔵した照射装
置17が組み込まれて構成され、硬さ測定位置Sに光を照
射する。
The normal checker V is constructed by incorporating an irradiating device 17 containing a battery 16 in a cylindrical casing 15 having one side (the lower part in the figure) opened, and irradiating light to a hardness measuring position S. I do.

【0043】ケーシング15は、その軸心15-1が照射装置
17の照射光Lの光軸と一致し、フランジ15-2の下面15-3
が光軸と垂直である。このため、硬さ測定位置Sからの
反射光L1が照射光軸に一致すれば、法線確認器Vは硬さ
測定位置の法線に立てられていることになる。
The casing 15 has an axis 15-1 at an irradiation device.
The optical axis of the irradiation light L of 17 coincides with the lower surface 15-3 of the flange 15-2.
Is perpendicular to the optical axis. For this reason, if the reflected light L1 from the hardness measurement position S coincides with the irradiation optical axis, it means that the normal checker V stands at the normal of the hardness measurement position.

【0044】ケーシング15の開放側には覗き窓15-4が設
けられ、照射光Lの照射位置Sと反射光(破線)L1の反射
位置S1を肉眼で観察することができる。照射装置17の先
端部の周りには受光板17-1を設けているので、反射光の
位置S1を観察しやすい。また、照射位置Sがケーシング1
5で覆われているので、暗い(明るい?)場所でも照射
位置Sおよび反射位置S1を確認することができる。
A viewing window 15-4 is provided on the open side of the casing 15, so that the irradiation position S of the irradiation light L and the reflection position S1 of the reflected light (broken line) L1 can be visually observed. Since the light receiving plate 17-1 is provided around the tip of the irradiation device 17, it is easy to observe the position S1 of the reflected light. The irradiation position S is the casing 1
Since it is covered with 5, the irradiation position S and the reflection position S1 can be confirmed even in a dark (bright?) Place.

【0045】照射する光は、細束平行の可視光線(レー
ザービーム)が望ましい。可視光線でない(紫外線)場
合は、硬さ測定位置に蛍光塗料などを塗布すればよい。
なお、受光板17-1に替えて1つまたは複数個の受光素子
を設けてもよい。
The light to be irradiated is desirably a narrow bundle of visible light (laser beam). If it is not visible light (ultraviolet light), a fluorescent paint or the like may be applied to the hardness measurement position.
Note that one or more light receiving elements may be provided instead of the light receiving plate 17-1.

【0046】図6は、本発明で使用する法線確認器の他
の例を示す概念図であり、(a)は縦断面図、(b)は図(a)
のA-A断面図である。
FIGS. 6A and 6B are conceptual views showing another example of the normal line checker used in the present invention. FIG. 6A is a longitudinal sectional view, and FIG.
It is AA sectional drawing of.

【0047】法線確認器V1は、両端が開放された筒状の
ケーシング18の側面に照射装置17を組み込み、ケーシン
グ18の内部に鏡19が照射装置17の軸と45°交差させて取
り付けられている。鏡19は、枠19-1に納められ、枠を保
持具20-1、20-2、20-3および20-4に取り付けてケーシン
グに固定されている。
The normal checker V1 incorporates an irradiation device 17 on the side surface of a cylindrical casing 18 having both ends opened, and a mirror 19 is mounted inside the casing 18 so as to intersect the axis of the irradiation device 45 at 45 °. ing. The mirror 19 is housed in a frame 19-1, and is fixed to a casing by attaching the frame to holders 20-1, 20-2, 20-3 and 20-4.

【0048】ケーシング18の開放側には覗き窓18-1が設
けられ、照射光Lの照射位置Sと反射光(破線)L1の反射
位置S1を肉眼で観察することができる。照射装置17の先
端部の周りには、反射光の位置S1を観察しやすくするた
め受光板17-1を設けるのが望ましい。また、照射位置S
がケーシング18で覆われているので、明るい場所でも照
射位置Sおよび反射位置S1を確認することができる。
A viewing window 18-1 is provided on the open side of the casing 18, so that the irradiation position S of the irradiation light L and the reflection position S1 of the reflected light (broken line) L1 can be visually observed. It is desirable to provide a light receiving plate 17-1 around the tip of the irradiation device 17 to make it easier to observe the position S1 of the reflected light. The irradiation position S
Is covered with the casing 18, so that the irradiation position S and the reflection position S1 can be confirmed even in a bright place.

【0049】図7は、本発明で使用する法線確認器の他
の例を示す概念図であり、(a)は縦断面図、(b)は図(a)
のA-A断面図である。
FIGS. 7A and 7B are conceptual diagrams showing another example of the normal line checker used in the present invention, wherein FIG. 7A is a longitudinal sectional view, and FIG.
It is AA sectional drawing of.

【0050】法線確認器V2は、片方が開放された筒状の
ケーシング21の側面に照射装置17を、上部に受光装置22
を組み込み、ケーシング21の内部にハーフミラー23が照
射装置17の軸と45°交差させて取り付けられている。ハ
ーフミラー23は、枠23-1に納められ、その枠を保持具20
-1、20-2、20-3および20-4に取り付けてケーシングに固
定されている。
The normal checker V2 has an irradiation device 17 on the side surface of a cylindrical casing 21 having one open side, and a light receiving device 22 on the upper portion.
And a half mirror 23 is mounted inside the casing 21 so as to cross the axis of the irradiation device 17 at 45 °. The half mirror 23 is housed in the frame 23-1, and the frame is
-1, 20-2, 20-3 and 20-4 are fixed to the casing.

【0051】照射装置17からの照射光Lは、ハーフミラ
ー23によって垂直に曲げられ、照射位置Sに照射され
る。その反射光(破線)L1は、ハーフミラー23を透過し
て受光装置22によって捉えられる。受光装置22は、顕微
鏡の接眼筒のように照射位置Sを肉眼で観察することが
できるものであればよい。照射位置Sがケーシング21で
覆われているので、明るい場所でも照射位置Sおよび反
射位置S1を確認することができる。
The irradiation light L from the irradiation device 17 is vertically bent by the half mirror 23 and is irradiated to the irradiation position S. The reflected light (broken line) L1 passes through the half mirror 23 and is captured by the light receiving device 22. The light receiving device 22 may be any device that can observe the irradiation position S with the naked eye like an eyepiece of a microscope. Since the irradiation position S is covered with the casing 21, the irradiation position S and the reflection position S1 can be confirmed even in a bright place.

【0052】次に、別態様の硬さ測定装置について説明
する。
Next, another embodiment of the hardness measuring apparatus will be described.

【0053】図8は、別態様の硬さ測定装置を示す一部
断面図であり、(a)は位置調節機構を示す平面図、(b)は
超音波硬さ計および法線確認器を備えた硬さ測定装置を
示す正面図、(c)は位置調節機構を示す側面図である。
FIGS. 8A and 8B are partial cross-sectional views showing another embodiment of a hardness measuring apparatus, wherein FIG. 8A is a plan view showing a position adjusting mechanism, and FIG. 8B is an ultrasonic hardness meter and a normal line checker. FIG. 2 is a front view showing a hardness measuring device provided, and FIG. 2C is a side view showing a position adjusting mechanism.

【0054】支持機構24は、図8(a)に示すように超音波
硬さ計および法線確認器を把持する2つの貫通孔24-1お
よび24-2を備えた移動部材24-3とスライド部材24-4とか
ら構成されている。貫通孔24-1,24-2の中心軸24-7およ
び24-8が同一平面24-5内で平行であり、かつその平面24
-5が移動部材24-3の摺動部材24-6および上下微動機構10
の摺動部材10-2の側面10-5と平行に固定されている。こ
の支持機構24には、図8に示すように法線確認器および
超音波硬さ計を移動させる機構として、前記前後移動機
構と同様の構造としたが、スライドボールを内蔵した摺
動機構を用いることができる。
As shown in FIG. 8A, the support mechanism 24 includes a moving member 24-3 having two through holes 24-1 and 24-2 for holding an ultrasonic hardness meter and a normal checker. And a slide member 24-4. The central axes 24-7 and 24-8 of the through holes 24-1 and 24-2 are parallel in the same plane 24-5, and the plane 24
-5 is the sliding member 24-6 of the moving member 24-3 and the vertical fine movement mechanism 10.
Is fixed in parallel with the side surface 10-5 of the sliding member 10-2. As shown in FIG. 8, the support mechanism 24 has the same structure as the front-back movement mechanism as a mechanism for moving the normal checker and the ultrasonic hardness meter, but has a slide mechanism with a built-in slide ball. Can be used.

【0055】硬さの測定は、図8(b)に示すように超音波
硬さ計Hおよび法線確認器Vを支持機構24の貫通孔24-1お
よび24-2に挿入・把持して行う。まず、法線確認器Vを
被測定物の測定位置の上部に立つように位置調節機構M
の磁石14を被測定物に固定し、位置調節機構Mの各種移
動機構(符号5〜9)を調整して法線確認器Vの軸Vaを測
定位置の法線方向に一致させる。その後、支持機構24の
ピニオンのつまみ24-6を回して移動部材24-3を前後方向
に摺動させ、超音波硬さ計Hを上記測定位置に移動させ
る。超音波硬さ計Hの中心軸Haと法線確認器Vの中心軸Va
との間隔は既知であるため、その量だけ移動部材24-3を
移動させれば、超音波硬さ計Hを法線確認器Vの位置に移
動させることができる。硬さの測定方法は、前記した方
法と同様である。
The hardness is measured by inserting and holding an ultrasonic hardness meter H and a normal checker V into the through holes 24-1 and 24-2 of the support mechanism 24 as shown in FIG. Do. First, the position adjustment mechanism M is set so that the normal checker V stands above the measurement position of the DUT.
Is fixed to the object to be measured, and the various moving mechanisms (reference numerals 5 to 9) of the position adjusting mechanism M are adjusted so that the axis Va of the normal line checker V coincides with the normal direction of the measurement position. Thereafter, the moving member 24-3 is slid in the front-rear direction by turning the pinion knob 24-6 of the support mechanism 24, and the ultrasonic hardness meter H is moved to the measurement position. The center axis Ha of the ultrasonic hardness tester H and the center axis Va of the normal checker V
Is known, so that by moving the moving member 24-3 by that amount, the ultrasonic hardness meter H can be moved to the position of the normal checker V. The method for measuring the hardness is the same as the method described above.

【0056】図9は、他の態様の硬さ測定装置を示す一
部断面図であり、(a)は位置調節機構を示す平面図、(b)
は超音波硬さ計および法線確認器を備える硬さ測定装置
を示す正面図、(c)は位置調節機構を示す側面図であ
る。
FIG. 9 is a partial cross-sectional view showing a hardness measuring apparatus according to another embodiment, in which (a) is a plan view showing a position adjusting mechanism, and (b).
FIG. 3 is a front view showing a hardness measuring device provided with an ultrasonic hardness meter and a normal checker, and FIG. 3C is a side view showing a position adjusting mechanism.

【0057】支持機構25は、図9(a)に示すように回転部
材26と回転部材26を支持するブラケット27とから構成さ
れ、図9(b)に示すように上下微動機構10に固定されてい
る。
The support mechanism 25 comprises a rotating member 26 and a bracket 27 for supporting the rotating member 26 as shown in FIG. 9A, and is fixed to the vertical fine movement mechanism 10 as shown in FIG. 9B. ing.

【0058】図10は、回転部材を示す図であり、(a)は
平面図、(b)は断面図である。
FIGS. 10A and 10B are views showing a rotating member, wherein FIG. 10A is a plan view and FIG. 10B is a sectional view.

【0059】回転部材26は、その中心軸26-3を対称軸と
する2つの貫通孔26-1,26-2を有する円筒である。回転
部材の中心軸26-3、貫通孔26-1の中心軸26-8および貫通
孔26-2の中心軸26-9は、同一平面26-4内で平行であり、
回転部材の上面26-5と下面26-6とは平行で、かつ平面26
-4と直角である。貫通孔26-1および26-2は、超音波硬さ
計および法線確認器を挿入、把持する。
The rotating member 26 is a cylinder having two through holes 26-1, 26-2 whose central axis 26-3 is a symmetric axis. The central axis 26-3 of the rotating member, the central axis 26-8 of the through hole 26-1 and the central axis 26-9 of the through hole 26-2 are parallel within the same plane 26-4,
The upper surface 26-5 and the lower surface 26-6 of the rotating member are parallel and flat
It is perpendicular to -4. Through holes 26-1 and 26-2 insert and hold an ultrasonic hardness meter and a normal line checker.

【0060】図11は、ブラケットを示す図であり、(a)
は平面図、(b)は正面の断面図、(c)は側面の断面図であ
る。ブラケット27は、テーブル27-1と垂直部材27-2とか
ら構成されている。
FIG. 11 is a view showing a bracket, and FIG.
Is a plan view, (b) is a front sectional view, and (c) is a side sectional view. The bracket 27 includes a table 27-1 and a vertical member 27-2.

【0061】テーブル27-1は、貫通孔27-3を有する円筒
であり、下部には開口する底部27-4を有する。底部27-4
または側壁27-5には、回転ボール(図示せず)などを備
え、前記回転部材の外周部(図10の符号26-7、参照)お
よび外周部の底部(図10の符号26-6、参照)を支えて回
転させる。垂直部27-2は、上下微動機構(図9(b)の符号
10、参照)の側面に固定されるので、テーブル27-1と一
体に作られるのが望ましい。
The table 27-1 is a cylinder having a through hole 27-3, and has a bottom 27-4 that is open at the bottom. Bottom 27-4
Alternatively, a rotating ball (not shown) or the like is provided on the side wall 27-5, and an outer peripheral portion (reference numeral 26-7 in FIG. 10) and a bottom portion of the outer peripheral portion (reference numeral 26-6 in FIG. Support) and rotate. The vertical portion 27-2 is a vertical fine movement mechanism (reference numeral in FIG. 9B).
10), it is desirable to be made integrally with the table 27-1.

【0062】図9に示すように、テーブル27-1の貫通孔
27-3の中心軸27-6と回転部材の中心軸(図10の符号26-
3、参照)とが一致しているので、超音波硬さ計および
法線確認器を把持した回転部材を180°回転させること
によって、両者を硬さ測定位置の同じ位置に移動させる
ことができる。また、貫通孔26-2を破線の位置に設けれ
ば、180°よりも小さな角度回転させることによって、
法線確認器と超音波硬さ計との位置を移動させることが
できる。硬さの測定方法は、図2および図8に示す方法
と同様である。
As shown in FIG. 9, the through holes of the table 27-1
The central axis 27-6 of 27-3 and the central axis of the rotating member (reference numeral 26-
3), it is possible to move both members to the same hardness measurement position by rotating the rotating member holding the ultrasonic hardness meter and the normal checker by 180 °. . Also, if the through-hole 26-2 is provided at the position of the broken line, by rotating the angle smaller than 180 °,
The positions of the normal checker and the ultrasonic hardness meter can be moved. The method of measuring the hardness is the same as the method shown in FIGS.

【0063】次に、照射装置と受光装置を別の位置に設
けた法線確認器を備える硬さ測定装置について説明す
る。
Next, a description will be given of a hardness measuring apparatus provided with a normal line checker in which an irradiation device and a light receiving device are provided at different positions.

【0064】図12は、光線照射装置と受光装置および硬
さ測定器を把持する支持機構を示す図であり、(a)は上
面図、(b)は断面正面図、(c)は断面側面図である。
FIGS. 12A and 12B are diagrams showing a light irradiation device, a light receiving device, and a support mechanism for gripping the hardness measuring device. FIG. 12A is a top view, FIG. 12B is a sectional front view, and FIG. FIG.

【0065】この支持機構28は、中央部に支持部材28-1
と、その両端に延長したアーム28-2およびアーム28-3と
で構造とされており、支持部材28-1の側面で位置調節機
構の上下微動機構(図3の符号10、参照)に固定されて
いる。
The support mechanism 28 has a support member 28-1 at the center.
And an arm 28-2 and an arm 28-3 extending to both ends thereof, and fixed to a vertical fine movement mechanism (see reference numeral 10 in FIG. 3) of a position adjustment mechanism on a side surface of the support member 28-1. Have been.

【0066】支持機構28の支持部材28-1、アーム28-2お
よびアーム28-3は、それぞれの上面が角度αの傾斜をも
って交わり、それぞれの面と直角に貫通孔28-4、28-5お
よび28-6が設けられている。貫通孔28-4、28-5および28
-6の中心軸は、それぞれ同一平面29内にある。
The upper surface of the support member 28-1, the arm 28-2, and the arm 28-3 of the support mechanism 28 intersect with an inclination of an angle α, and the through holes 28-4, 28-5 are perpendicular to the respective surfaces. And 28-6 are provided. Through holes 28-4, 28-5 and 28
The central axes of -6 are in the same plane 29, respectively.

【0067】支持機構28は、支持部材28-1の貫通孔28-4
に超音波硬さ計Hを、アーム28-2の貫通孔28-5に光線照
射装置30およびアーム28-3の貫通孔28-6に受光装置31を
それぞれ挿入・把持する。
The support mechanism 28 includes a through hole 28-4 of the support member 28-1.
The ultrasonic hardness tester H is inserted into the through hole 28-5 of the arm 28-2, and the light receiving device 31 is inserted into the through hole 28-6 of the arm 28-3.

【0068】光線照射装置30の軸心30-1および受光装置
31の軸心31-1は、同一平面29内にあり、かつ光線照射装
置30の軸心30-1は超音波硬さ計Hの軸心26-8と角度αを
もって交わっているので、光線照射装置30から照射され
た光線L2は被測定面Sで反射し、反射光L3となって受光
装置31に入射する。反射光L3が受光装置31の中央に入射
すると、超音波硬さ計Hの軸心Haは、測定位置Sの法線と
一致することになる。反射光L3が受光装置31の中央に入
射させるには、前記したように位置調節機構(図3の
M、参照)の移動機構を調節して行う。
The axis 30-1 of the light irradiation device 30 and the light receiving device
Since the axis 31-1 of 31 is in the same plane 29, and the axis 30-1 of the beam irradiation device 30 intersects the axis 26-8 of the ultrasonic hardness meter H at an angle α, The light beam L2 emitted from the irradiation device 30 is reflected by the surface S to be measured, becomes reflected light L3, and enters the light receiving device 31. When the reflected light L3 enters the center of the light receiving device 31, the axis Ha of the ultrasonic hardness meter H coincides with the normal to the measurement position S. In order for the reflected light L3 to enter the center of the light receiving device 31, as described above, the position adjusting mechanism (FIG. 3)
M, see) to adjust the movement mechanism.

【0069】図13は、光線照射装置と受光装置および硬
さ測定器を把持する他の一例の支持機構を示す図であ
り、(a)は上面図、(b)は断面正面図、(c)は断面側面図
である。
FIGS. 13A and 13B are views showing another example of a support mechanism for holding the light beam irradiation device, the light receiving device, and the hardness measuring device. FIG. 13A is a top view, FIG. 13B is a sectional front view, and FIG. () Is a sectional side view.

【0070】この支持機構32は、その基本的な構造を図
11に示す支持機構28と同様とするが、超音波硬さ計Hが
挿入・把持される貫通孔32-1の下位置にプリズム33が設
けられている。
The support mechanism 32 has a basic structure.
This is the same as the support mechanism 28 shown in FIG. 11, except that a prism 33 is provided below the through hole 32-1 into which the ultrasonic hardness meter H is inserted and gripped.

【0071】プリズム33は、ホルダー34のフォーク34-
1,34-2,34-3によって各稜線を支えられて保持されてい
る。ホルダー34の上面には、ブラケット35に固定された
前後移動機構36が取り付けられ、プリズム33を前後方向
に移動させる。これは、光線照射装置30、受光装置31お
よびプリズム33によって被測定面Sとの位置決めを行っ
た後、プリズム33を移動させて超音波硬さ計Hを挿入・
把持するためである。プリズム33を設けることによっ
て、照射光および反射光の光線の長さを長くして位置決
め精度を高めることができる。
The prism 33 is a fork 34-
Each ridgeline is supported and held by 1,34-2,34-3. A front-rear movement mechanism 36 fixed to a bracket 35 is attached to the upper surface of the holder 34, and moves the prism 33 in the front-rear direction. This is because after positioning with the surface to be measured S by the light beam irradiation device 30, the light receiving device 31, and the prism 33, the prism 33 is moved and the ultrasonic hardness meter H is inserted.
This is for grasping. By providing the prism 33, it is possible to increase the length of the light beam of the irradiation light and the reflected light, thereby improving the positioning accuracy.

【0072】次に、図1に示す超音波硬さ計、図3に示
す硬さ測定器位置調節機構および図5に示す法線確認器
を用いた硬さ測定装置によって鋼管表面の硬さを測定す
る方法について説明する。
Next, the hardness of the surface of the steel pipe was measured by a hardness measuring device using an ultrasonic hardness meter shown in FIG. 1, a position measuring mechanism of a hardness measuring device shown in FIG. 3, and a normal line verifier shown in FIG. A method for measuring will be described.

【0073】図14は、本発明の硬さ測定装置を用いて鋼
管表面の硬さを測定する方法を説明するための図であ
り、(a)は位置調節機構に法線確認器を取り付けた一部
断面正面図、(b)は超音波硬さ計を取り付けた一部断面
側面図である。
FIG. 14 is a view for explaining a method of measuring the hardness of the surface of a steel pipe using the hardness measuring device of the present invention. FIG. 14 (a) shows a position adjusting mechanism with a normal line checker attached. FIG. 2B is a partial cross-sectional front view, and FIG. 2B is a partial cross-sectional side view with an ultrasonic hardness meter attached.

【0074】まず、位置調節機構Mの各移動機構(符号5
〜7および10)および揺動機構(符号8および9)を中央
の位置に戻した後、図14(a)に示すように支持機構12に
法線確認器Vを取り付ける。この状態で法線確認器Vの中
心軸(図では光軸(Va))が鋼管の表面にほぼ垂直になる
ように載置し、2つの磁石14,14で固定する。法線確認
器Vは2つの磁石14,14の中央から離れた位置に取り付け
られているので、片方の磁石(図では左側)が鋼管の頂
部から下がった位置に取り付けられることになる。
First, each moving mechanism of the position adjusting mechanism M (reference numeral 5)
After returning the swing mechanism (reference numerals 8 and 9) to the center position, the normal checker V is attached to the support mechanism 12 as shown in FIG. In this state, the normal line detector V is placed so that the center axis (optical axis (Va) in the figure) is substantially perpendicular to the surface of the steel pipe, and is fixed by the two magnets 14. Since the normal checker V is mounted at a position distant from the center of the two magnets 14, 14, one magnet (the left side in the figure) is mounted at a position lowered from the top of the steel pipe.

【0075】その後、光線を照射して、鋼管表面の光ス
ポットおよび法線確認器Vの受光板(図5の符号17-1、
参照)の反射光(図5の符号L1、参照)のスポットを観
察しながら、位置調節機構Mの各移動機構5,6,7および揺
動機構8,9を調節する。これらの調節により、光スポッ
トが鋼管表面の硬さ測定位置を小さく鮮明にとらえ、か
つ受光板の反射光のスポットが観察できなくなったと
き、法線確認器Vの中心軸が鋼管の硬さ測定位置に立て
られた法線方向に一致する。
Thereafter, a light beam is irradiated to the light spot on the surface of the steel pipe and the light receiving plate of the normal line checker V (reference numeral 17-1 in FIG. 5;
While observing the spot of the reflected light (see reference numeral L1 in FIG. 5), the moving mechanisms 5, 6, 7 and the swing mechanisms 8, 9 of the position adjusting mechanism M are adjusted. With these adjustments, when the light spot captures the hardness measurement position on the surface of the steel pipe in a small and sharp place, and when the reflected light spot on the light receiving plate cannot be observed, the center axis of the normal checker V is used to measure the hardness of the steel pipe. It matches the normal direction set at the position.

【0076】法線確認器Vが鋼管の硬さ測定位置の法線
方向に一致して立てられると、各移動機構5,6,7および
揺動機構8,9をロック(ロック機構は図示せず)した
後、ねじ(図3(a)の符号12-2を参照)をはずして法線確
認器Vを取り出す。その後、図14(b)に示すように、超音
波硬さ計Hを取り付け、振動棒1の圧子1-1の先端と鋼管
の表面との間を所定の間隔に上下微動機構10によって調
節して、ロックする。この状態で、振動棒1を鋼管表面
に発射し、振動数の変化を計測して鋼管の硬さを測定す
る。
When the normal checker V is set up so as to coincide with the normal direction of the hardness measurement position of the steel pipe, the moving mechanisms 5, 6, 7 and the rocking mechanisms 8, 9 are locked (the locking mechanism is not shown). After that, the screw (see reference numeral 12-2 in FIG. 3A) is removed, and the normal checker V is taken out. Thereafter, as shown in FIG. 14 (b), an ultrasonic hardness meter H is attached, and the vertical fine movement mechanism 10 adjusts a predetermined interval between the tip of the indenter 1-1 of the vibrating rod 1 and the surface of the steel pipe. And lock. In this state, the vibrating rod 1 is fired on the surface of the steel pipe, and the change in frequency is measured to measure the hardness of the steel pipe.

【0077】法線確認器Vおよび超音波硬さ計Hは、それ
ぞれの軸心が位置調節機構Mの支持機構12の貫通孔12-1
の軸心と等しいので、これらを取り替えても軸心がずれ
ることはない。上記の説明は、超音波硬さ計Hを鋼管に
対して時計の12時の位置に立てる例について説明した
が、3時の位置または6時の位置に立てて測定すること
もできる。
The normal checker V and the ultrasonic hardness tester H have their respective axes centered through holes 12-1 of the support mechanism 12 of the position adjusting mechanism M.
, The axes do not deviate even if they are replaced. In the above description, an example in which the ultrasonic hardness meter H is set at the 12 o'clock position of the timepiece with respect to the steel pipe is described, but the measurement can also be performed at the 3 o'clock position or the 6 o'clock position.

【0078】[0078]

【発明の効果】本発明の硬さ測定方法は、予め法線確認
器で被測定物表面の法線方向を確認した後、硬さ測定器
を取り付けて測定するので、被測定物の任意の位置また
は任意の方向から被測定物の表面に直角に硬さを測定す
ることができる。また、本発明の硬さ測定装置は、各種
移動機構を組み合わせた三方向調節機構と角度調節機構
からなる位置調節機構を備えているので、硬さ測定器を
任意の位置に任意の方向に取り付けることができる。位
置調節機構は、硬さ測定器または法線確認器を取り替
え、ないしは位置を移動できる構造となっているので、
硬さ測定器を測定面の法線方向または垂直方向に取り付
けられ、構造物の表面硬さを正確に測定することができ
る。
According to the hardness measuring method of the present invention, after confirming the normal direction of the surface of the object to be measured in advance with a normal line verifier, the hardness is measured by attaching the hardness measuring device. The hardness can be measured at right angles to the surface of the measured object from a position or an arbitrary direction. In addition, since the hardness measuring device of the present invention includes a position adjusting mechanism including a three-way adjusting mechanism and an angle adjusting mechanism in which various moving mechanisms are combined, the hardness measuring device is mounted at an arbitrary position in an arbitrary direction. be able to. Since the position adjustment mechanism has a structure that can replace the hardness measurement device or the normal checker, or move the position,
A hardness measuring device is mounted in the normal direction or vertical direction of the measurement surface, and can accurately measure the surface hardness of the structure.

【図面の簡単な説明】[Brief description of the drawings]

【図1】超音波硬さ計を示す概念図であり、(a)は外観
を示す側面図、(b)は縦断面図、(c)は下から見た図であ
る。
FIG. 1 is a conceptual diagram showing an ultrasonic hardness tester, in which (a) is a side view showing an external appearance, (b) is a longitudinal sectional view, and (c) is a view seen from below.

【図2】硬さ測定装置の一例を示す概念図であり、(a)
は平面図、(b)は一部断面正面図、(c)は一部断面側面図
および(d)は背面図である。
FIG. 2 is a conceptual diagram showing an example of a hardness measuring device, and FIG.
Is a plan view, (b) is a partial cross-sectional front view, (c) is a partial cross-sectional side view, and (d) is a rear view.

【図3】位置調節機構の一例を示す概念図であり、(a)
は平面図、(b)は正面図、(c)は一部断面側面図および
(d)は背面図である。
FIG. 3 is a conceptual diagram showing an example of a position adjusting mechanism, and FIG.
Is a plan view, (b) is a front view, (c) is a partial cross-sectional side view and
(d) is a rear view.

【図4】硬さ測定装置の位置調節機構における支持機構
を上下微動機構に取り付けた状態を示す図であり、(a)
は一部断面正面図、(b)は図(a)のA-A断面図、(c)は図
(a)のB-B断面図である。
FIG. 4 is a view showing a state in which a support mechanism in a position adjusting mechanism of the hardness measuring device is attached to a vertical fine movement mechanism, and FIG.
Is a partial cross-sectional front view, (b) is an AA cross-sectional view of FIG. (A), and (c) is a view.
FIG. 3 (a) is a sectional view taken along line BB.

【図5】本発明で使用する法線確認器の一例を示す概念
図であり、(a)は外観を示す一部断面図、(b)は縦断面
図、(c)は図(b)のA-A断面図である。
5A and 5B are conceptual diagrams showing an example of a normal line checker used in the present invention, wherein FIG. 5A is a partial cross-sectional view showing the appearance, FIG. 5B is a vertical cross-sectional view, and FIG. It is AA sectional drawing of.

【図6】本発明で使用する法線確認器の他の例を示す概
念図であり、(a)は縦断面図、(b)は図(a)のA-A断面図で
ある。
6A and 6B are conceptual diagrams showing another example of the normal line checker used in the present invention, wherein FIG. 6A is a longitudinal sectional view, and FIG. 6B is a sectional view taken along line AA of FIG.

【図7】本発明で使用する法線確認器の他の例を示す概
念図であり、(a)は縦断面図、(b)は図(a)のA-A断面図で
ある。
FIGS. 7A and 7B are conceptual diagrams showing another example of the normal line checker used in the present invention, wherein FIG. 7A is a longitudinal sectional view, and FIG. 7B is a sectional view taken along the line AA of FIG.

【図8】別態様の硬さ測定装置を示す一部断面図であ
り、(a)は位置調節機構を示す平面図、(b)は超音波硬さ
計および法線確認器を備えた硬さ測定装置を示す正面
図、(c)は位置調節機構を示す側面図である。
FIG. 8 is a partial cross-sectional view showing a hardness measuring device of another embodiment, (a) is a plan view showing a position adjusting mechanism, and (b) is a hard disk provided with an ultrasonic hardness meter and a normal line checker. FIG. 2 is a front view showing a height measuring device, and FIG. 2C is a side view showing a position adjusting mechanism.

【図9】他の態様の硬さ測定装置を示す一部断面図であ
り、(a)は位置調節機構を示す平面図、(b)は超音波硬さ
計および法線確認器を備える硬さ測定装置を示す正面
図、(c)は位置調節機構を示す側面図である。
FIG. 9 is a partial cross-sectional view showing a hardness measuring apparatus according to another embodiment, wherein (a) is a plan view showing a position adjusting mechanism, and (b) is a hard disk provided with an ultrasonic hardness meter and a normal checker. FIG. 2 is a front view showing a height measuring device, and FIG. 2C is a side view showing a position adjusting mechanism.

【図10】回転部材を示す図であり、(a)は平面図、(b)
は断面図である。
10A and 10B are diagrams illustrating a rotating member, wherein FIG. 10A is a plan view and FIG.
Is a sectional view.

【図11】ブラケットを示す図であり、(a)は平面図、
(b)は正面の断面図、(c)は側面の断面図である。ブラケ
ット27は、テーブル27-1と垂直部27-2とから構成されて
いる。
FIG. 11 is a view showing a bracket, (a) is a plan view,
(b) is a front sectional view, and (c) is a side sectional view. The bracket 27 includes a table 27-1 and a vertical portion 27-2.

【図12】光線照射装置と受光装置および硬さ測定器を
把持する支持機構を示す図であり、(a)は上面図、(b)は
断面正面図、(c)は断面側面図である。
12A and 12B are diagrams illustrating a light irradiation device, a light receiving device, and a support mechanism that grips a hardness measuring device, wherein FIG. 12A is a top view, FIG. 12B is a cross-sectional front view, and FIG. 12C is a cross-sectional side view. .

【図13】光線照射装置と受光装置および硬さ測定器を
把持する他の一例の支持機構を示す図であり、(a)は上
面図、(b)は断面正面図、(c)は断面側面図である。
13A and 13B are diagrams illustrating another example of a support mechanism that holds a light irradiation device, a light receiving device, and a hardness measuring device, wherein FIG. 13A is a top view, FIG. 13B is a cross-sectional front view, and FIG. It is a side view.

【図14】本発明の硬さ測定装置を用いて鋼管表面の硬
さを測定する方法を説明するための図であり、(a)は位
置調節機構に法線確認器を取り付けた一部断面正面図、
(b)は超音波硬さ計を取り付けた一部断面側面図であ
る。
14A and 14B are diagrams for explaining a method of measuring the hardness of the surface of a steel pipe using the hardness measuring device of the present invention, and FIG. 14A is a partial cross section in which a normal checker is attached to a position adjusting mechanism. Front view,
(b) is a partial cross-sectional side view to which an ultrasonic hardness meter is attached.

【符号の説明】[Explanation of symbols]

HA.硬さ測定装置 H.超音波硬さ計(硬さ測定器) V.法線確認器 M.位置調節機構 M1.三方向調節機構 M2.角度調節機構 1.振動棒 2.ばね機構 3.ケーシング 4.基板 5.左右移動機構 6.上下移動機構 7.前後摺動機構 8.左右揺動機構 9.前後揺動機構 10.上下微動機構 11.連結桿 12.支持機構 13.ブラケット 14.磁石 15.ケーシング 16.電池 17.照射装置 18.ケーシング 19.鏡 20.保持具 21.ケーシング 22.受光装置 23.ハーフミラー 24,25.支持機構 26.回転部材 27.ブラケット 28.支持機構 29.平面 30.照射装置 31.受光装置 32.支持機構 33.プリズム 34.ホルダー 35.ブラケット HA. Hardness measuring device H. Ultrasonic hardness tester (hardness measuring device) Normal line checker M. Position adjustment mechanism M1. Three-way adjustment mechanism M2. Angle adjustment mechanism 1. Vibrating rod 2. Spring mechanism 3. Casing 4. Substrate 5. Left and right moving mechanism 6. 6. Vertical movement mechanism 7. Front and rear sliding mechanism Left and right swing mechanism 9. Back and forth swing mechanism 10. Vertical fine movement mechanism 11. Connecting rod 12. Support mechanism 13. Bracket 14. Magnet 15. Casing 16. Battery 17. Irradiation equipment 18. Casing 19. Mirror 20. Holder 21. Casing 22. Light receiving device 23. Half mirror 24,25. Support mechanism 26. Rotating member 27. Bracket 28. Support mechanism 29. Plane 30. Irradiation equipment 31. Light receiving device 32. Support mechanism 33. Prism 34. Holder 35. bracket

───────────────────────────────────────────────────── フロントページの続き (72)発明者 廣田 正明 福岡県福岡市中央区渡辺通二丁目1番82号 九州電力株式会社内 (72)発明者 渡邉 肇 福岡県福岡市中央区渡辺通二丁目1番82号 九州電力株式会社内 (72)発明者 松田 勝彦 兵庫県尼崎市東向島西之町1番地住友金属 工業株式会社関西製造所特殊管事業所内 (72)発明者 小林 十思美 兵庫県尼崎市東向島西之町1番地住友金属 テクノロジー株式会社関西事業部内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masaaki Hirota 2-82 Watanabe-dori, Chuo-ku, Fukuoka City, Fukuoka Prefecture Inside Kyushu Electric Power Company (72) Inventor Hajime Watanabe 2-Chome, Watanabe, Chuo-ku, Fukuoka City, Fukuoka Prefecture No. 1 82 Kyushu Electric Power Co., Inc. (72) Katsuhiko Matsuda Inventor, Katsuhiko Matsubayashi 1 Higashi-Mukojima Nishinocho, Amagasaki City, Hyogo Prefecture Sumitomo Metal Industries, Ltd.Kansai Factory Special Pipe Works (72) Inventor Joshimi Kobayashi Amagasaki Hyogo No. 1 Nishinocho, Higashi-Mukojima, Sumitomo Metal Technology Co., Ltd. Kansai Division

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】被測定物の表面に光線を照射し、反射する
光線の光軸と前記照射した光線の光軸とによって被測定
物表面の法線方向を確認した後、法線方向から硬さを測
定することを特徴とする硬さ測定方法。
1. A surface of an object to be measured is irradiated with a light beam, and the normal direction of the surface of the object to be measured is confirmed by the optical axis of the reflected light beam and the optical axis of the irradiated light beam. A hardness measurement method characterized by measuring hardness.
【請求項2】上下、前後および左右の三方向に移動なら
びに回転できる機構を備えた硬さ測定装置であって、三
方向に移動および回転できる機構は、基板の上に左右移
動機構、上下移動機構および前後移動機構を積み重ねて
組み立てられた三方向調節機構と、左右揺動機構、前後
揺動機構および上下微動機構を積み重ねて組み立てられ
た角度調節機構とが連結桿によって連結されて構成さ
れ、前記上下微動機構に設けられた支持機構は法線確認
器と硬さ測定器とを取り替えて挿入できる貫通孔を備え
ることを特徴とする硬さ測定装置。
2. A hardness measuring apparatus having a mechanism capable of moving and rotating in three directions of up, down, front and rear and left and right, wherein the mechanism capable of moving and rotating in three directions is a left and right moving mechanism, a vertical moving mechanism on a substrate. A three-way adjustment mechanism assembled by stacking a mechanism and a front-back movement mechanism, and an angle adjustment mechanism assembled by stacking a left-right swing mechanism, a front-rear swing mechanism and a vertical fine movement mechanism are connected by a connecting rod, A hardness measuring device, wherein the support mechanism provided in the vertical fine movement mechanism includes a through hole into which a normal line checker and a hardness measuring device can be replaced and inserted.
【請求項3】上下、前後および左右の三方向に移動なら
びに回転できる機構を備えた硬さ測定装置であって、三
方向に移動および回転できる機構は、基板の上に左右移
動機構、上下移動機構および前後移動機構を積み重ねて
組み立てられた三方向調節機構と、左右揺動機構、前後
揺動機構および上下微動機構を積み重ねて組み立てられ
た角度調節機構とが連結桿によって連結されて構成さ
れ、前記上下微動機構に設けられた支持機構は法線確認
器および硬さ測定器が取り付けられる複数個の貫通孔を
備えることを特徴とする硬さ測定装置。
3. A hardness measuring apparatus having a mechanism capable of moving and rotating in three directions of up, down, front and rear, and left and right, wherein the mechanism capable of moving and rotating in three directions is a left and right moving mechanism, a vertical moving mechanism on a substrate. A three-way adjustment mechanism assembled by stacking a mechanism and a front-back movement mechanism, and an angle adjustment mechanism assembled by stacking a left-right swing mechanism, a front-rear swing mechanism and a vertical fine movement mechanism are connected by a connecting rod, A hardness measuring device, wherein the supporting mechanism provided in the vertical fine movement mechanism includes a plurality of through holes to which a normal line checker and a hardness measuring device are attached.
【請求項4】上記法線確認器および硬さ測定器が取り付
けられる支持機構は、2つの貫通孔を有し、それぞれの
貫通孔の中心軸が同一平面内で平行である移動部材と、
その移動部材を2つの貫通孔の中心軸を結ぶ方向に移動
可能に支持するスライド部材とから構成されていること
を特徴とする請求項3に記載の硬さ測定装置。
4. A supporting member to which the normal checking device and the hardness measuring device are attached has a moving member having two through holes, and a central axis of each through hole is parallel in the same plane;
The hardness measuring device according to claim 3, further comprising a slide member that supports the moving member in a direction connecting the central axes of the two through holes.
【請求項5】上記法線確認器および硬さ測定器が取り付
けられる支持機構は、2つの貫通孔を有する回転部材
と、その回転部材を同心に支持するブラケットとからな
り、2つの貫通孔の中心軸が回転部材を中心軸とする同
一円周面内にあり、かつ平行であることを特徴とする請
求項3に記載の硬さ測定装置。
5. A supporting mechanism to which said normal line checker and hardness measuring device are attached comprises a rotating member having two through holes and a bracket for supporting the rotating member concentrically. The hardness measuring device according to claim 3, wherein the central axis is in the same circumferential plane with the rotating member as the central axis and is parallel.
【請求項6】上記支持機構は、中央に硬さ測定器を、一
方の端に照射装置を、そして他の端に受光装置を備え、
それらの中心軸が同一平面内にあり、かつ照射装置およ
び受光装置の中心軸と硬さ測定器の中心軸との挟角が等
しく、それぞれが硬さ測定器の中心軸上で交差し、照射
装置および受光装置で法線確認器を構成することを特徴
とする請求項3に記載の硬さ測定装置。
6. The support mechanism includes a hardness measuring device in the center, an irradiation device at one end, and a light receiving device at the other end.
Their central axes are in the same plane, and the angles between the central axes of the irradiation device and the light receiving device and the central axis of the hardness measuring device are equal. The hardness measuring device according to claim 3, wherein the device and the light receiving device constitute a normal line checker.
【請求項7】上記支持機構は、中央に硬さ測定器を、一
方の端に照射装置を、そして他の端に受光装置を備え、
それらの中心軸が同一平面内にあり、かつ照射装置およ
び受光装置の中心軸と硬さ測定器の中心軸との挟角が等
しく、それぞれが硬さ測定器の中心軸上で交差し、硬さ
測定器の下位置にプリズムが設けられ、照射装置、受光
装置およびプリズムで法線確認器を構成することを特徴
とする請求項3に記載の硬さ測定装置。
7. The support mechanism includes a hardness measuring device in the center, an irradiation device at one end, and a light receiving device at the other end.
Their central axes are in the same plane, and the included angles of the central axes of the irradiation device and the light receiving device and the central axis of the hardness measuring device are equal, each intersect on the central axis of the hardness measuring device, The hardness measuring device according to claim 3, wherein a prism is provided at a position below the measuring device, and the irradiation device, the light receiving device, and the prism constitute a normal line checker.
JP17492799A 1999-06-22 1999-06-22 Hardness measuring device Expired - Lifetime JP3512681B2 (en)

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CN112666029A (en) * 2020-11-17 2021-04-16 万久科技发展(无锡)有限公司 Battery performance online detection system and detection method
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Publication number Priority date Publication date Assignee Title
CN106323780A (en) * 2016-11-04 2017-01-11 上海奥龙星迪检测设备有限公司 Machine head moving type Vickers hardness meter
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CN113640160A (en) * 2021-08-10 2021-11-12 池州市九华明坤铝业有限公司 Wheel disc type multi-aluminum alloy pipe hardness automatic measuring device and using method thereof
CN114778352A (en) * 2022-06-20 2022-07-22 常州技研电子科技有限公司 Working of plastics hardness-detecting device
CN114778352B (en) * 2022-06-20 2022-09-06 常州技研电子科技有限公司 Working of plastics hardness testing device
CN115219364A (en) * 2022-09-20 2022-10-21 常州凯得新材料科技有限公司 Plastic hardness testing equipment
CN115219364B (en) * 2022-09-20 2022-12-13 常州凯得新材料科技有限公司 Plastic hardness testing equipment

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