JP2001004329A - Measuring device and confocal microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring device and a confocal microscope for obtaining picture information obtained by an inside synchronous image pickup device in the minimum time, and for quickening the measuring time. SOLUTION: When a state capable of fetching image data can be obtained, a CPU calculates a time ΔTA from an image pickup data fetch enabling timing t2 to an end point of time t3 of a vertical scanning period T1. When the calculated time ΔTA is longer than an exposing time ΔTE, an image pickup signal VA1 to be obtained by exposure in the vertical scanning period T1, and to be outputted in the next vertical scanning period T2 is validated, and image pickup data VD1 outputted from an A/D converter for a camera are fetched in a memory for a camera signal. When the calculated time ΔTA is shorter than the exposing time ΔTE, an image pickup signal to be obtained by exposure in the next vertical scanning period T2, and to be outputted in the further next vertical scanning time T3 is validated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a measuring instrument and a confocal microscope using an internal synchronous imaging device.

[0002]

2. Description of the Related Art A measuring instrument such as a confocal microscope using an internal synchronous CCD (charge coupled device) camera is provided with a system control circuit for controlling the entire measuring instrument in addition to a CCD camera and a measurement control circuit. Have been. When the system control circuit is ready to capture image information, the CCD
After taking in image information of one vertical scanning period of the camera and performing predetermined processing, the processing result is displayed on the display device.

[0003]

The operation of the CCD camera is completely asynchronous with the operation of the system control circuit because the vertical synchronization signal of the internal synchronization type CCD camera is generated inside the CCD camera. Therefore, the system control circuit is ready to capture image information at an arbitrary timing during the vertical scanning period of the CCD camera. Therefore, in order for the system control circuit to obtain image information from the CCD camera, the CCD needs to be synchronized with the CCD camera.
One vertical scanning period of the camera is wasted.

On the other hand, in the case of a CCD camera with an external trigger, the operation of the CCD camera can be synchronized with the operation of the system control circuit by the external trigger.
No wasted time for synchronization. However, since a CCD camera with an external trigger is expensive, it is difficult to reduce the cost of the measuring instrument.

An object of the present invention is to provide a measuring instrument capable of acquiring image information obtained by an internal synchronous imaging device in a minimum time and shortening a measuring time.

Another object of the present invention is to provide a confocal microscope capable of acquiring image information obtained by an internal synchronous image pickup device in a minimum time and shortening the measurement time. is there.

[0007]

Means for Solving the Problems and Effects of the Invention The measuring instrument according to the first invention operates in synchronization with a synchronizing signal generated at a constant period, and outputs the synchronizing signal according to a preset exposure time. An internal synchronous imaging apparatus that performs an exposure operation from a predetermined timing after the start of a cycle to the end of the cycle, and outputs image information obtained by the exposure operation in a next cycle,
A processing unit that captures and processes the image information output from the internal synchronous imaging device, and calculates a time from the timing at which the processing unit can capture the image information to the end of the cycle of the internal synchronous imaging device. If the time is equal to or longer than the exposure time, the control unit supplies image information obtained by the exposure operation of the internal synchronous imaging apparatus in the cycle and output in the next cycle to the processing unit.

In the measuring instrument according to the present invention, the exposure operation is performed by the internal synchronous imaging device from a predetermined timing after the start of the cycle of the synchronization signal to the end of the cycle according to a preset exposure time. Will be Image information obtained by the exposure operation is output in the next cycle. The control unit calculates the time from the timing at which the processing unit can capture the image information to the end of the cycle of the internal synchronous imaging apparatus. If the calculated time is equal to or longer than the exposure time, the image information obtained by the exposure operation of the internal synchronous imaging apparatus in the cycle is not affected by the timing before the image information can be captured. The image information obtained and output in the next cycle is provided to the processing unit by the control unit. Therefore, the processing unit can acquire the image information from the internal synchronous imaging device in a minimum time, and the measurement time is shortened.

According to a second aspect of the present invention, in the configuration of the first aspect of the present invention, when the calculated time is shorter than the exposure time, the control unit may be connected to the internal synchronous imaging device. The image information obtained by the exposure operation in the cycle of and the output in the next cycle is given to the processing section.

If the time from the timing at which the image information can be fetched by the processing unit to the end of the cycle of the internal synchronous imaging apparatus is shorter than the exposure time, the image information obtained by the exposure operation in the cycle is processed by the processing unit. Before the image information can be captured. Therefore, image information obtained by the exposure operation in the next cycle of the internal synchronous imaging apparatus and output in the next cycle is provided to the processing unit.

According to a third aspect of the present invention, in the configuration of the measuring instrument according to the first or second aspect, the internal synchronous imaging device is a CCD camera, and the synchronous signal is a vertical synchronous signal. And

In this case, the CCD camera operates in synchronization with the vertical synchronizing signal. When the time from the timing at which the processing unit can capture image information to the end of the vertical scanning period of the CCD camera is equal to or longer than the exposure time,
The image information obtained by the exposure operation of the D camera in the vertical scanning period and output in the next cycle is provided to the processing unit. Therefore, the processing section can acquire image information from the CCD camera in a minimum time.

A confocal microscope according to a fourth aspect of the present invention comprises a laser light source for emitting laser light, a light receiving element for outputting a light receiving signal corresponding to the amount of received light, and a confocal optical system together with the laser light source and the light receiving element. A first optical system that irradiates laser light emitted from a laser light source to an object and guides reflected light or transmitted light from the object to a light receiving element; a white light source that generates white light; Operates in synchronization with the synchronization signal to be performed, performs an exposure operation from a predetermined timing after the start of the cycle of the synchronization signal to the end of the cycle according to a preset exposure time, and obtains an image obtained by the exposure operation. An internal synchronous imaging device that outputs information in the next cycle, and a second device that irradiates a target with white light generated from a white light source and guides reflected light or transmitted light from the target to the internal synchronous imaging device. An optical system, a processing unit that captures and processes a light receiving signal output from a light receiving element and image information output from the internal synchronous imaging device, and a timing of the internal synchronous imaging device based on the timing at which the processing unit can capture the image information. The time until the end of the cycle is calculated, and when the calculated time is equal to or longer than the exposure time, the image information obtained by the exposure operation in the cycle of the internal synchronous imaging apparatus and output in the next cycle is calculated. And a control unit provided to the processing unit.

In the confocal microscope according to the present invention, the object is irradiated with the laser light emitted from the laser light source by the first optical system, and the reflected light or the transmitted light from the object is transmitted to the first optical system. The light is guided to the light receiving element by the system. A light receiving signal corresponding to the amount of received light is output by the light receiving element and provided to the processing unit. Thereby, luminance information with excellent resolution can be obtained.

[0015] In addition, the white light generated from the white light source is irradiated on the object by the second optical system, and the reflected light or the transmitted light from the object is transmitted to the internal synchronous imaging device by the second optical system. Be guided. Image information is obtained by the exposure operation of the internal synchronous imaging device, and is provided to the processing unit. Thereby, color imaging information is obtained.

The processing section processes the light receiving signal from the light receiving element and the image information from the internal synchronous type image pickup device, so that a color video signal with high resolution can be obtained.

In particular, the exposure operation is performed by the internal synchronous imaging device from a predetermined timing after the start of the cycle of the synchronization signal to the end of the cycle according to the preset exposure time. Image information obtained by the exposure operation is output in the next cycle. The control unit calculates the time from the timing at which the processing unit can capture the image information to the end of the cycle of the internal synchronous imaging apparatus. If the calculated time is equal to or longer than the exposure time, the image information obtained by the exposure operation of the internal synchronous imaging apparatus in the cycle is not affected by the timing before the image information can be captured. The image information obtained and output in the next cycle is provided to the processing unit by the control unit.
Therefore, the processing unit can acquire the image information from the internal synchronous imaging device in a minimum time, and the measurement time is shortened.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a confocal microscope will be described as an example of a measuring instrument according to the present invention.

FIG. 1 is a side view of a confocal microscope according to an embodiment of the present invention. As shown in FIG. 1, the confocal microscope 100 includes a pedestal 70 and an optical unit 80. The optical section 80 is detachably attached to the base 70. The pedestal 70 includes a front part 70a and a rear part 70b. On the upper surface of the front part 70a, a manual handle 31 for moving the support base 30 for supporting the object up and down is provided. Further, on both side surfaces of the front portion 70a, manual handles 32 for moving the support base 30 back and forth and left and right are provided. Further, the front and rear portions 7 of the front portion 70a
Handles 71a and 71b are provided on the back of Ob, respectively.

The optical section 80 comprises an optical system mounting section 50 and an indirect mounting section 60. A revolver 53 to which the objective lenses 17a, 17b, 17c, 17d are attached is provided on the lower surface of the optical system mounting section 50. Revolver 5
By rotating 3, an objective lens used for observation can be selected.

A male connector 52a and a female connector 52b for transmitting an electric signal to and from an external device are provided on a side surface of the optical system mounting section 50. Female connectors are connected to both ends of the cable for the male connector 52a. A male connector is connected to both ends of the cable for the female connector 52b.

The indirect mounting portion 60 includes a back plate portion 60a, a bottom plate portion 60b, and a pair of side plate portions 60c. A plurality of screw holes 65 are provided on side end surfaces of the back plate portion 60a and the bottom plate portion 60b, and a plurality of screw holes 6 are provided on side surfaces of the side plate portion 60c.
8. A pair of screw holes 67 are provided on the front end face of the bottom plate portion 60b. A plurality of screw holes (not shown) are provided on the back surface of the back plate portion 60a.

FIG. 2 is a perspective view showing an assembly structure of the optical system mounting section 50, the indirect mounting section 60, and the pedestal 70 of the confocal microscope 100 of FIG.

As shown in FIG. 2, a plurality of screw holes 51 are provided on the bottom surface of the optical system mounting section 50. A plurality of through holes 61 are provided in the bottom plate portion 60b of the indirect mounting portion 60 so as to correspond to the plurality of screw holes 51. Through hole 6
A counterbore for accommodating the head of the mounting bolt is provided on the bottom side of 1.

The bottom plate portion 60b of the indirect mounting portion 60 includes
A recess 160 is provided to facilitate alignment between the through hole 61 and the screw hole 51. After the optical system mounting unit 50 is placed on the recess 160, the bolt 81 is screwed into the screw hole 51 through the through hole 61, so that the optical system mounting unit 50 and the indirect mounting unit 60 are integrated.

The bottom plate portion 60b of the indirect mounting portion 60
Are provided with a plurality of screw holes 62 and 63. A plurality of through holes 72 are formed in the pedestal 70 so as to correspond to the plurality of screw holes 62. The through holes 72 are located in grooves 83 extending from both side surfaces of the pedestal 70. Further, a concave portion 69 is formed in the back plate portion 60a of the indirect mounting portion 60. The back plate portion 60a is provided with a plurality of through holes 64 vertically penetrating from the inside of the concave portion 69 to the bottom surface. The pedestal 70 is provided with a plurality of objective lens mounting holes 74 so as to correspond to the plurality of through holes 64.

In the pedestal 70, alignment of the screw hole 62 of the indirect mounting portion 60 with the through hole 72 of the pedestal 70 and alignment of the through hole 64 of the indirect mounting portion 60 with the objective lens mounting hole 74 of the pedestal 70 are performed. A recess 170 is provided for ease. After placing the indirect mounting portion 60 integrated with the optical system mounting portion 50 on the concave portion 170, the bolt 82 is screwed into the screw hole 62 through the through hole 72, and the bolt 84 is inserted into the objective lens mounting hole through the through hole 64. 74. Thereby, the indirect mounting part 60 and the optical system mounting part 50 are fixed to the pedestal 70.

FIG. 3 is a schematic configuration diagram showing an example of an optical system mounted on the optical system mounting section 50 of the confocal microscope 100 of FIG.

As shown in FIG. 3, the optical system mounting section 50
A laser optical system 1 and a white light optical system 2 are provided.

The laser optical system 1 is a confocal optical system,
A semiconductor laser 10 that emits, for example, red laser light L1 is provided as a light source. The semiconductor laser 10 is driven by a laser drive circuit 44 and emits a laser beam L1. After the laser beam L1 has passed through the first collimating lens 11,
Reflected by the polarizing beam splitter 12, the quarter-wave plate 13, the horizontal deflection device 14a, and the vertical deflection device 1
4b, first relay lens 15, second half mirror 2
3. The light is guided to the objective lens 17 through the second relay lens 16 and the first half mirror 22. Objective lens 1
In the vicinity of the focus position 7, a support table 30 is provided. The laser light L1 is focused on the surface of the object W by the objective lens 17. The objective lens 17 in FIG. 3 corresponds to any one of the objective lenses 17a, 17b, 17c, and 17d in FIG.

Each of the horizontal deflecting device 14a and the vertical deflecting device 14b is composed of, for example, one galvano scanner, and deflects the laser beam L1 in the horizontal and vertical directions indicated by arrows X and Y, respectively. The laser beam L1 is two-dimensionally scanned on the surface of W.

The support table 30 can be moved in the vertical direction indicated by the arrow Z by the manual handle 31, and can be moved in the directions of the arrows X and Y by the manual handle 32.

The laser beam L1 reflected by the object W passes through the objective lens 17, the first half mirror 22, the second relay lens 16, the second half mirror 23, and the first relay lens 15, and again. １ ／ wavelength plate 13 via vertical deflecting device 14b and horizontal deflecting device 14a
Then, the light passes through the polarization beam splitter 12 and travels toward the imaging lens 18. The laser light L1 is condensed by the imaging lens 18, passes through the optical aperture 19a having a pinhole, and enters the light receiving element 19b.

The light receiving element 19b is composed of, for example, a photomultiplier or a photodiode. The light receiving element 19b photoelectrically converts the incident laser light L1 and converts the laser light L1 into an analog light quantity signal via an A / D converter (analog / digital converter) via a first amplifier circuit 19d. Digital converter) 41. Brightness information is output from the A / D converter 41.

Next, the luminance information obtained by the laser optical system 1 will be described. The light stop 19 a is provided at the focal position of the imaging lens 18. The pinhole of the optical diaphragm 19a is extremely small. Therefore, the laser light L
When 1 is focused on the object W, most of the laser light L1 passes through the pinhole of the optical aperture 19a.
The amount of light received by the light receiving element 19b is significantly increased. Conversely, if the laser beam L1 is not focused on the target object W, most of the laser beam L1 does not pass through the pinhole of the optical diaphragm 19a, so that the amount of light received by the light receiving element 19b is significantly reduced. Therefore, a bright image is obtained in a focused portion of the scanning region by the laser optical system 1, and a dark image is obtained in other portions. Since the laser optical system 1 is a confocal optical system using the monochromatic laser light L1, luminance information with excellent resolution can be obtained.

Next, the white light optical system 2 will be described.
The white light optical system 2 has a white light source 20 that emits white light L2, which is illumination light for color information, as a light source. The white light L2 emitted from the white light source 20 passes through the second collimating lens 21, is reflected by the first half mirror 22, and is condensed by the objective lens 17 at the same position as the scanning area of the laser light L1. Is done.

The white light L2 reflected by the object W passes through the objective lens 17, the first half mirror 22, and the second relay lens 16, and further passes through the second half mirror 2
3 and forms an image on the surface of the color CCD of the CCD camera 150. That is, the color CCD of the CCD camera 150 is disposed at a position conjugate to or close to the conjugate with the optical diaphragm 19a.

The CCD camera 150 is controlled by a system control circuit 160. The output signal of the CCD camera 150 is a camera A / D
The signal is output to the converter (analog-digital converter) 42 and the system control circuit 160. Color imaging data is output from the camera A / D converter 42.

By performing predetermined processing on the luminance information from the A / D converter 41 and the color image data from the camera A / D converter 42, a color video signal is obtained, and a color enlarged image is displayed on a display device. It is.

In the confocal microscope according to the present embodiment, the semiconductor laser 10 is turned on to obtain the luminance information by the laser optical system 1, and then the white light source 20 is turned on and the white light optical system 2 is turned on.
To obtain color imaging data. In this case, the CCD after the semiconductor laser 10 is turned off so that the color image data obtained by the white light optical system 2 is not affected by the laser light.
It is necessary to acquire a color imaging signal obtained by the camera 150 as color imaging data.

FIG. 4 is a block diagram mainly showing the configuration of the CCD camera 150 and the system control circuit 160 shown in FIG.

As shown in FIG. 4, the CCD camera 150
Includes a color CCD 151, a CCD control circuit 152, an oscillator 153, and an amplification circuit 154. Oscillator 153
Generates a reference clock of a vertical synchronization signal of, for example, 60 Hz. The color CCD 151 operates in synchronization with the reference clock of the vertical synchronization signal generated by the oscillator 153. The CCD control circuit 152 sets an exposure time in the color CCD 151 in response to a shutter speed signal SH given from a system control circuit 160 described later. The output signal of the color CCD 151 is supplied to an amplification circuit 154.
Is output as an image pickup signal VA via.

The system control circuit 160 includes a vertical sync separation circuit 161, a CPU (Central Processing Unit) 162, and an interface circuit 163. The imaging signal VA output from the amplification circuit 154 is supplied to the vertical synchronization separation circuit 161 and the camera A / D converter 42. The vertical synchronization separation circuit 161 separates the vertical synchronization signal VS from the image signal and supplies the signal to the CPU 162. The CPU 162 supplies a shutter speed signal SH indicating a preset shutter speed to the CCD control circuit 152. Also, CPU
162 controls the operation of the measurement control circuit 200 via the interface circuit 163 and controls the write operation and the read operation of the camera signal memory 43.

The measurement control circuit 200 includes the semiconductor laser 10, the horizontal deflecting device 14a, the vertical deflecting device 14b, the light receiving element 19b, the amplifying circuit 19d, the A / D
It includes a converter 41 and a laser drive circuit 44.

The camera A / D converter 42 converts the image signal VA supplied from the amplifier circuit 154 from analog to digital, and converts the image data VD into a camera signal memory 43.
Output to The camera signal memory 43 includes a CPU 16
Under the control of 2, the imaging data VD output from the camera A / D converter 42 is written. CPU1
Under the control of 62, the imaging data VD is read from the camera signal memory 43 and displayed on the display device 170.

Next, operations of the CCD camera 150 and the system control circuit 160 shown in FIG. 4 will be described with reference to timing charts shown in FIGS.

5 and 6, the vertical synchronizing signal V
S has a period of, for example, 60 Hz. FIG. 5 shows a case where the shutter speed is 1/100 second, and FIG. 6 shows a case where the shutter speed is 1/60 second. That is, in the example of FIG. 5, the exposure time ΔTE is substantially a half cycle of the vertical synchronization signal VS, and in the example of FIG. 6, the exposure time ΔTE is one cycle of the vertical synchronization signal VS. The exposure period is set to a period from a predetermined time after the start of each vertical scanning period to the end of the vertical scanning period according to the shutter speed.

Here, the starting point t of the vertical scanning period T1
It is assumed that the semiconductor laser 10 of the laser optical system 1 in FIG. 3 is turned on from time 1 to time t2. Therefore, the system control circuit 160 becomes ready to capture image data at the time point t2 of the vertical scanning period T1. Hereinafter, at time t2
Is referred to as image data capture timing.

The image pickup signal obtained by the exposure in the vertical scanning period T1 in the CCD camera 150 is the same as that in the next vertical scanning period T1.
The signal is output from the CCD camera 150 at 2. Also, CCD
An imaging signal obtained by exposure in the vertical scanning period T2 in the camera 150 is output from the CCD camera 150 in the next vertical scanning period T3.

When the semiconductor laser 10 is turned off during the vertical scanning period T1 and becomes ready to capture image data, the CPU 162 calculates the time ΔTA from the timing t2 at which image data can be captured to the end point t3 of the vertical scanning period T1. I do.

As shown in FIG. 5, the calculated time ΔTA
Is longer than the exposure time ΔTE, the vertical scanning period T
The imaging signal VA1 obtained by the exposure in No. 1 is not affected by the laser light when the semiconductor laser 10 is turned on. Therefore, the imaging signal VA1 obtained by exposure in the vertical scanning period T1 and output in the next vertical scanning period T2 becomes effective. In this case, the CPU 162 loads the imaging data VD1 output from the camera A / D converter 42 into the camera signal memory 43 in the vertical scanning period T2.

As shown in FIG. 6, the calculated time ΔTA
Is shorter than the exposure time ΔTE, the imaging signal VA1 obtained by the exposure in the vertical scanning period T1 is affected by the laser light when the semiconductor laser 10 is turned on. Therefore, the imaging signal VA2 obtained by exposure in the next vertical scanning period T2 and output in the next vertical scanning period T3 becomes effective. In this case, the CPU 162 loads the imaging data VD2 output from the camera A / D converter 42 into the camera signal memory 43 in the vertical scanning period T3.

As described above, in the confocal microscope of the present embodiment, the image data obtained by the CCD camera 150 and the camera A / D converter 42 is acquired in a minimum time in accordance with the shutter speed of the CCD camera 150. be able to. Therefore, the measurement time can be reduced.

In this embodiment, the CCD camera 150 corresponds to an internal synchronous image pickup device, the camera signal memory 43 corresponds to a processing unit, and the system control circuit 160 corresponds to a control unit.

The present invention is not limited to the confocal microscope,
The present invention can be applied to various measuring instruments provided with an internal synchronous imaging device such as an internal synchronous CCD camera.

[Brief description of the drawings]

FIG. 1 is a side view of a confocal microscope according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an assembling structure of an optical system mounting unit, an indirect mounting unit, and a pedestal of the confocal microscope of FIG. 1;

FIG. 3 is a schematic configuration diagram illustrating an example of an optical system mounted on an optical system mounting section of the confocal microscope in FIG.

FIG. 4 is a block diagram mainly showing a configuration of a CCD camera and a system control circuit shown in FIG. 3;

FIG. 5 is a timing chart showing operations of the CCD camera and the system control circuit of FIG. 4;

FIG. 6 is a timing chart showing operations of the CCD camera and the system control circuit of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laser optical system 2 White light optical system 10 Semiconductor laser 42 A / D converter for camera 43 Camera signal memory 150 CCD camera 151 Color CCD 152 CCD control circuit 153 Oscillator 154 Amplification circuit 160 System control circuit 161 Vertical synchronization separation circuit 162 CPU 200 Measurement control circuit

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Claims (4)

[Claims] 1. An exposure operation which operates in synchronization with a synchronization signal generated at a fixed period and from a predetermined timing after the start of the period of the synchronization signal to the end of the period according to a preset exposure time. And an internal synchronous imaging device that outputs image information obtained by the exposure operation in the next cycle; a processing unit that captures and processes the image information output from the internal synchronous imaging device; Calculate the time from the timing at which the image information can be captured by the internal synchronization type imaging device to the end of the cycle of the internal synchronization type imaging device, and when the calculated time is equal to or longer than the exposure time, A control unit for providing the processing unit with image information obtained by an exposure operation in a cycle and output in the next cycle. 2. The control section, when the calculated time is shorter than the exposure time, is obtained by an exposure operation in a next cycle of the internal synchronous imaging apparatus and is output in a next cycle. The measuring device according to claim 1, wherein the image information is supplied to the processing unit. 3. The measuring device according to claim 1, wherein the internal synchronous imaging device is a CCD camera, and the synchronization signal is a vertical synchronization signal. 4. A laser light source for emitting a laser beam, a light receiving element for outputting a light receiving signal corresponding to the amount of received light, and a confocal optical system together with the laser light source and the light receiving element. A first optical system that irradiates the object with the laser light and guides reflected light or transmitted light from the object to the light receiving element, a white light source that generates white light, and a synchronization signal that is generated at a constant period. And performs an exposure operation from a predetermined timing after the start of the cycle of the synchronization signal to the end of the cycle in accordance with a preset exposure time, and stores the image information obtained by the exposure operation as An internal synchronous imaging device that outputs light at a period of, and irradiates the object with white light generated from the white light source and guides reflected light or transmitted light from the object to the internal synchronous imaging device. A second optical system, a processing unit that captures and processes a light reception signal output from the light receiving element and image information output from the internal synchronous imaging device, and a processing unit that captures image information by the processing unit. The time until the end of the cycle of the internal synchronous imaging apparatus is calculated, and when the calculated time is equal to or longer than the exposure time, the time is obtained by the exposure operation of the internal synchronous imaging apparatus in the cycle and the next And a control unit for providing the processing unit with image information output in a cycle of (c).