JP2001003168A5 - - Google Patents
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- Publication number
- JP2001003168A5 JP2001003168A5 JP1999173350A JP17335099A JP2001003168A5 JP 2001003168 A5 JP2001003168 A5 JP 2001003168A5 JP 1999173350 A JP1999173350 A JP 1999173350A JP 17335099 A JP17335099 A JP 17335099A JP 2001003168 A5 JP2001003168 A5 JP 2001003168A5
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming source
- film
- deposition
- preventing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000010408 film Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173350A JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173350A JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001003168A JP2001003168A (ja) | 2001-01-09 |
| JP2001003168A5 true JP2001003168A5 (de) | 2006-04-20 |
Family
ID=15958797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11173350A Abandoned JP2001003168A (ja) | 1999-06-18 | 1999-06-18 | 真空成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001003168A (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4421980B2 (ja) * | 2004-09-09 | 2010-02-24 | 株式会社神戸製鋼所 | 連続成膜装置 |
| EP1713110B1 (de) | 2005-04-08 | 2016-03-09 | Applied Materials GmbH & Co. KG | Anlage zum Beschichten eines Substrats und Modul |
| JP4702801B2 (ja) * | 2006-07-26 | 2011-06-15 | 株式会社神戸製鋼所 | 連続成膜装置 |
| JP4573272B2 (ja) * | 2006-07-26 | 2010-11-04 | 株式会社神戸製鋼所 | 連続成膜装置 |
| US20170005297A1 (en) * | 2013-12-10 | 2017-01-05 | Stefan Bangert | Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus with an evaporation source for organic materials, and method for operating an evaporation source for organic material |
| DE102016107983A1 (de) * | 2016-04-29 | 2017-11-02 | Von Ardenne Gmbh | Prozesskammeranordnung und Prozessieranordnung |
| CN110512185A (zh) * | 2019-09-03 | 2019-11-29 | 肇庆宏旺金属实业有限公司 | 一种钢卷开收卷真空工作室 |
-
1999
- 1999-06-18 JP JP11173350A patent/JP2001003168A/ja not_active Abandoned
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