JP2000516332A5 - - Google Patents
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- Publication number
- JP2000516332A5 JP2000516332A5 JP1998529393A JP52939398A JP2000516332A5 JP 2000516332 A5 JP2000516332 A5 JP 2000516332A5 JP 1998529393 A JP1998529393 A JP 1998529393A JP 52939398 A JP52939398 A JP 52939398A JP 2000516332 A5 JP2000516332 A5 JP 2000516332A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Description
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97201661.2 | 1997-06-03 | ||
| EP97201661 | 1997-06-03 | ||
| PCT/IB1998/000533 WO1998055779A1 (en) | 1997-06-03 | 1998-04-09 | Motion damper with electrical amplifier, and lithographic device with such a motion damper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000516332A JP2000516332A (ja) | 2000-12-05 |
| JP2000516332A5 true JP2000516332A5 (ja) | 2005-11-24 |
Family
ID=8228394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10529393A Ceased JP2000516332A (ja) | 1997-06-03 | 1998-04-09 | 電気的増幅器を備えた動きダンパ及びこのような動きダンパを備えたリソグラフィック装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6008881A (ja) |
| EP (1) | EP0916038B1 (ja) |
| JP (1) | JP2000516332A (ja) |
| DE (1) | DE69816941T2 (ja) |
| TW (1) | TW406292B (ja) |
| WO (1) | WO1998055779A1 (ja) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6791098B2 (en) | 1994-01-27 | 2004-09-14 | Cymer, Inc. | Multi-input, multi-output motion control for lithography system |
| US6959484B1 (en) * | 1994-01-27 | 2005-11-01 | Cymer, Inc. | System for vibration control |
| DE102008011024B4 (de) | 2008-02-25 | 2010-01-28 | Gottfried Wilhelm Leibniz Universität Hannover | Schneidverfahren zum Vermindern eines Schnittschlags und Schneidmaschine mit einem Kurbelantrieb zur Durchführung dieses Verfahrens |
| WO2011023172A1 (de) | 2009-08-25 | 2011-03-03 | Gottfried Wilhelm Leibniz Universität Hannover | Schneidverfahren zum vermindern eines schnittschlags |
| US8327983B1 (en) | 2009-09-14 | 2012-12-11 | Exelis, Inc. | Enhanced damping using motion amplification |
| US20110127128A1 (en) * | 2009-11-30 | 2011-06-02 | Itt Manufacturing Enterprises, Inc. | Frequency tunable magnetic damping apparatus |
| US20110147146A1 (en) | 2009-12-17 | 2011-06-23 | Itt Manufacturing Enterprises, Inc. | Enhanced damping using cryogenic cooling |
| US20110148236A1 (en) * | 2009-12-22 | 2011-06-23 | Itt Manufacturing Enterprises, Inc. | Temperature compensation tunable magnetic damping |
| DE102010004642B4 (de) * | 2010-01-13 | 2012-09-27 | Integrated Dynamics Engineering Gmbh | Magnetaktor sowie Verfahren zu dessen Montage |
| CN102720786B (zh) * | 2012-07-09 | 2014-06-25 | 哈尔滨工业大学 | 多自由度电磁阻尼器 |
| JP2014143253A (ja) * | 2013-01-22 | 2014-08-07 | Canon Inc | 検出装置、計測装置、リソグラフィ装置、および物品の製造方法 |
| DE102015201249A1 (de) * | 2015-01-26 | 2016-07-28 | Carl Zeiss Smt Gmbh | Beweglich gelagertes Bauteil einer Projektionsbelichtungsanlage sowie Vorrichtung und Verfahren zur Bewegungsbegrenzung hierfür |
| EP3093965B1 (de) | 2015-05-12 | 2017-11-22 | Etel S. A.. | Kurzhubiger linearmotor |
| CN106292193B (zh) * | 2015-05-24 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | 吸振装置及吸振方法、光刻机系统 |
| DE102016214785A1 (de) * | 2016-08-09 | 2018-02-15 | Carl Zeiss Smt Gmbh | Optisches Modul mit einer Antikollisionseinrichtung für Modulkomponenten |
| DE102017200300B4 (de) * | 2017-01-10 | 2019-06-19 | Audi Ag | Aktive Dämpfungsvorrichtung zum Verringern einer Körperschwingung eines Bauteils sowie Kraftfahrzeug |
| US11073758B2 (en) * | 2018-10-31 | 2021-07-27 | Canon Kabushiki Kaisha | Imprint apparatus control, control method and manufacturing method |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4731579A (en) * | 1982-10-12 | 1988-03-15 | Polaroid Corporation | Magnetic position indicator and actuator using same |
| NL8601547A (nl) * | 1986-06-16 | 1988-01-18 | Philips Nv | Optisch litografische inrichting met verplaatsbaar lenzenstelsel en werkwijze voor het regelen van de afbeeldingseigenschappen van een lenzenstelsel in een dergelijke inrichting. |
| DE3738455A1 (de) * | 1986-11-25 | 1988-06-01 | Landis & Gyr Ag | Anordnung zum messen eines flussarmen magnetfeldes |
| US4841184A (en) * | 1987-06-23 | 1989-06-20 | Mechanical Technology Incorporated | Velocity and imbalance observer control circuit for active magnetic bearing or damper |
| US5133527A (en) * | 1989-08-10 | 1992-07-28 | Mechanical Technology Incorporated | Active mounts |
| JPH07111215B2 (ja) * | 1992-08-26 | 1995-11-29 | 鹿島建設株式会社 | 除振装置 |
| EP0611900B1 (en) * | 1993-02-18 | 1997-09-03 | Kabushiki Kaisha Toshiba | Dynamic vibration absorber |
| US5493216A (en) * | 1993-09-08 | 1996-02-20 | Asa Electronic Industry Co., Ltd. | Magnetic position detector |
| DE19506104A1 (de) * | 1994-03-25 | 1995-09-28 | Heidenhain Gmbh Dr Johannes | Magnetisches Meßsystem |
| US5508518A (en) * | 1995-05-03 | 1996-04-16 | International Business Machines Corporation | Lithography tool with vibration isolation |
| US5812420A (en) * | 1995-09-05 | 1998-09-22 | Nikon Corporation | Vibration-preventive apparatus and exposure apparatus |
-
1997
- 1997-11-22 TW TW086117495A patent/TW406292B/zh active
- 1997-11-24 US US08/976,644 patent/US6008881A/en not_active Expired - Fee Related
-
1998
- 1998-04-09 WO PCT/IB1998/000533 patent/WO1998055779A1/en active IP Right Grant
- 1998-04-09 DE DE69816941T patent/DE69816941T2/de not_active Expired - Fee Related
- 1998-04-09 EP EP98910920A patent/EP0916038B1/en not_active Expired - Lifetime
- 1998-04-09 JP JP10529393A patent/JP2000516332A/ja not_active Ceased