JP2000510176A - 研磨用製品の目詰まり防止成分 - Google Patents
研磨用製品の目詰まり防止成分Info
- Publication number
- JP2000510176A JP2000510176A JP09539904A JP53990497A JP2000510176A JP 2000510176 A JP2000510176 A JP 2000510176A JP 09539904 A JP09539904 A JP 09539904A JP 53990497 A JP53990497 A JP 53990497A JP 2000510176 A JP2000510176 A JP 2000510176A
- Authority
- JP
- Japan
- Prior art keywords
- alkyl group
- group
- abrasive
- aliphatic
- aromatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000005498 polishing Methods 0.000 title claims description 62
- 239000002245 particle Substances 0.000 claims abstract description 128
- 238000000576 coating method Methods 0.000 claims abstract description 111
- 239000011248 coating agent Substances 0.000 claims abstract description 107
- 239000011230 binding agent Substances 0.000 claims abstract description 102
- 230000002093 peripheral effect Effects 0.000 claims abstract description 65
- 125000000217 alkyl group Chemical group 0.000 claims description 66
- 239000002243 precursor Substances 0.000 claims description 61
- 239000000203 mixture Substances 0.000 claims description 54
- 150000002430 hydrocarbons Chemical class 0.000 claims description 51
- 229930195733 hydrocarbon Natural products 0.000 claims description 50
- 239000004215 Carbon black (E152) Substances 0.000 claims description 48
- 125000001931 aliphatic group Chemical group 0.000 claims description 43
- 125000003118 aryl group Chemical group 0.000 claims description 43
- 238000004519 manufacturing process Methods 0.000 claims description 33
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 30
- 229910052760 oxygen Inorganic materials 0.000 claims description 24
- 239000003082 abrasive agent Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 22
- 229910052717 sulfur Inorganic materials 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims description 20
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 125000001424 substituent group Chemical group 0.000 claims description 19
- 125000004429 atom Chemical group 0.000 claims description 18
- 239000002131 composite material Substances 0.000 claims description 18
- 125000005647 linker group Chemical group 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 14
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 14
- 229910052698 phosphorus Inorganic materials 0.000 claims description 14
- 239000011574 phosphorus Substances 0.000 claims description 14
- 239000011593 sulfur Substances 0.000 claims description 14
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 13
- 150000001450 anions Chemical class 0.000 claims description 7
- 150000001721 carbon Chemical group 0.000 claims description 5
- GCRUEGMXZBHSGT-UHFFFAOYSA-N [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCCCC[NH+](C)C.CCCCCCCCCCCCCCCCCC[NH+](C)C.CCCCCCCCCCCCCCCCCC[NH+](C)C Chemical compound [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCCCC[NH+](C)C.CCCCCCCCCCCCCCCCCC[NH+](C)C.CCCCCCCCCCCCCCCCCC[NH+](C)C GCRUEGMXZBHSGT-UHFFFAOYSA-N 0.000 claims description 4
- LNTZHXQMPUKVNX-UHFFFAOYSA-N docosyl dihydrogen phosphate Chemical compound CCCCCCCCCCCCCCCCCCCCCCOP(O)(O)=O LNTZHXQMPUKVNX-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- UHGIMQLJWRAPLT-UHFFFAOYSA-N octadecyl dihydrogen phosphate Chemical group CCCCCCCCCCCCCCCCCCOP(O)(O)=O UHGIMQLJWRAPLT-UHFFFAOYSA-N 0.000 claims description 4
- BVQJQTMSTANITJ-UHFFFAOYSA-N tetradecylphosphonic acid Chemical compound CCCCCCCCCCCCCCP(O)(O)=O BVQJQTMSTANITJ-UHFFFAOYSA-N 0.000 claims description 4
- SAEWLPKKTXACAG-UHFFFAOYSA-N CCCCCCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCCCCCN.OP(O)O Chemical compound CCCCCCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCCCCCN.CCCCCCCCCCCCCCCCCCCCCCN.OP(O)O SAEWLPKKTXACAG-UHFFFAOYSA-N 0.000 claims description 3
- SYEXWEANYPSTKU-UHFFFAOYSA-N CCCCCCCCCCCCCCCCCCN(C)C.CCCCCCCCCCCCCCCCCCN(C)C.CCCCCCCCCCCCCCCCCCN(C)C.OP(O)O Chemical compound CCCCCCCCCCCCCCCCCCN(C)C.CCCCCCCCCCCCCCCCCCN(C)C.CCCCCCCCCCCCCCCCCCN(C)C.OP(O)O SYEXWEANYPSTKU-UHFFFAOYSA-N 0.000 claims description 3
- ZUVCYFMOHFTGDM-UHFFFAOYSA-N hexadecyl dihydrogen phosphate Chemical compound CCCCCCCCCCCCCCCCOP(O)(O)=O ZUVCYFMOHFTGDM-UHFFFAOYSA-N 0.000 claims description 3
- JDPSFRXPDJVJMV-UHFFFAOYSA-N hexadecylphosphonic acid Chemical compound CCCCCCCCCCCCCCCCP(O)(O)=O JDPSFRXPDJVJMV-UHFFFAOYSA-N 0.000 claims description 3
- FTMKAMVLFVRZQX-UHFFFAOYSA-N octadecylphosphonic acid Chemical compound CCCCCCCCCCCCCCCCCCP(O)(O)=O FTMKAMVLFVRZQX-UHFFFAOYSA-N 0.000 claims description 3
- LDHKWQLYKFRNPH-UHFFFAOYSA-N hexadecylazanium phosphate Chemical compound [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCC[NH3+] LDHKWQLYKFRNPH-UHFFFAOYSA-N 0.000 claims 4
- VDKBIFPJULZUPU-UHFFFAOYSA-N N-[1-[2-(4-isothiocyanatophenyl)ethyl]-4-piperidinyl]-N-phenylpropanamide Chemical compound C=1C=CC=CC=1N(C(=O)CC)C(CC1)CCN1CCC1=CC=C(N=C=S)C=C1 VDKBIFPJULZUPU-UHFFFAOYSA-N 0.000 claims 2
- JDRJCBXXDRYVJC-UHFFFAOYSA-N OP(O)O.N.N.N Chemical compound OP(O)O.N.N.N JDRJCBXXDRYVJC-UHFFFAOYSA-N 0.000 claims 2
- RUDGPXWZNRRJLU-UHFFFAOYSA-N [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCCCCC[NH3+] Chemical compound [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCCCCCC[NH3+] RUDGPXWZNRRJLU-UHFFFAOYSA-N 0.000 claims 2
- DNQXZHGDJABHGT-UHFFFAOYSA-N octadecylazanium phosphate Chemical compound [O-]P([O-])([O-])=O.CCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCC[NH3+].CCCCCCCCCCCCCCCCCC[NH3+] DNQXZHGDJABHGT-UHFFFAOYSA-N 0.000 claims 2
- 239000000047 product Substances 0.000 description 115
- 239000000463 material Substances 0.000 description 29
- 239000010408 film Substances 0.000 description 25
- 229920005989 resin Polymers 0.000 description 25
- 239000011347 resin Substances 0.000 description 25
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- -1 or for example Substances 0.000 description 18
- 239000000654 additive Substances 0.000 description 13
- 150000001875 compounds Chemical class 0.000 description 13
- 239000012943 hotmelt Substances 0.000 description 13
- 239000007788 liquid Substances 0.000 description 13
- 239000003973 paint Substances 0.000 description 13
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 12
- 239000010410 layer Substances 0.000 description 12
- 239000004744 fabric Substances 0.000 description 11
- 239000000945 filler Substances 0.000 description 11
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 10
- 238000000227 grinding Methods 0.000 description 10
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- 229920000728 polyester Polymers 0.000 description 10
- 239000002002 slurry Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000001723 curing Methods 0.000 description 9
- 239000003822 epoxy resin Substances 0.000 description 9
- 239000000835 fiber Substances 0.000 description 9
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 8
- 239000011247 coating layer Substances 0.000 description 8
- 239000000123 paper Substances 0.000 description 8
- 239000005011 phenolic resin Substances 0.000 description 8
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 7
- 239000007822 coupling agent Substances 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 6
- 239000002585 base Substances 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 6
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
- 239000004615 ingredient Substances 0.000 description 6
- 229920001568 phenolic resin Polymers 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 5
- 239000004593 Epoxy Substances 0.000 description 5
- 239000002841 Lewis acid Substances 0.000 description 5
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 239000003925 fat Substances 0.000 description 5
- 239000010954 inorganic particle Substances 0.000 description 5
- 239000013067 intermediate product Substances 0.000 description 5
- 150000007517 lewis acids Chemical class 0.000 description 5
- 238000005065 mining Methods 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 239000000344 soap Substances 0.000 description 5
- 229920001187 thermosetting polymer Polymers 0.000 description 5
- 239000002023 wood Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 229920003180 amino resin Polymers 0.000 description 4
- 239000002216 antistatic agent Substances 0.000 description 4
- 239000004202 carbamide Substances 0.000 description 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000003085 diluting agent Substances 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 239000003999 initiator Substances 0.000 description 4
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229920001807 Urea-formaldehyde Polymers 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910000019 calcium carbonate Inorganic materials 0.000 description 3
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 3
- 238000007865 diluting Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 3
- 239000004816 latex Substances 0.000 description 3
- 229920000126 latex Polymers 0.000 description 3
- HGPXWXLYXNVULB-UHFFFAOYSA-M lithium stearate Chemical compound [Li+].CCCCCCCCCCCCCCCCCC([O-])=O HGPXWXLYXNVULB-UHFFFAOYSA-M 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 235000011007 phosphoric acid Nutrition 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- MYWOJODOMFBVCB-UHFFFAOYSA-N 1,2,6-trimethylphenanthrene Chemical compound CC1=CC=C2C3=CC(C)=CC=C3C=CC2=C1C MYWOJODOMFBVCB-UHFFFAOYSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229920013701 VORANOL™ Polymers 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001299 aldehydes Chemical class 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 235000012241 calcium silicate Nutrition 0.000 description 2
- 229910052918 calcium silicate Inorganic materials 0.000 description 2
- CJZGTCYPCWQAJB-UHFFFAOYSA-L calcium stearate Chemical compound [Ca+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O CJZGTCYPCWQAJB-UHFFFAOYSA-L 0.000 description 2
- 235000013539 calcium stearate Nutrition 0.000 description 2
- 239000008116 calcium stearate Substances 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 150000005690 diesters Chemical class 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 125000004185 ester group Chemical group 0.000 description 2
- 125000001033 ether group Chemical group 0.000 description 2
- 239000011152 fibreglass Substances 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- HYBBIBNJHNGZAN-UHFFFAOYSA-N furfural Chemical compound O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 238000010409 ironing Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- RCHKEJKUUXXBSM-UHFFFAOYSA-N n-benzyl-2-(3-formylindol-1-yl)acetamide Chemical compound C12=CC=CC=C2C(C=O)=CN1CC(=O)NCC1=CC=CC=C1 RCHKEJKUUXXBSM-UHFFFAOYSA-N 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 239000011146 organic particle Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 125000000466 oxiranyl group Chemical group 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 150000003077 polyols Chemical class 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 125000001453 quaternary ammonium group Chemical group 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- 229920003987 resole Polymers 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
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- 239000005061 synthetic rubber Substances 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000003232 water-soluble binding agent Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 239000010456 wollastonite Substances 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/646,667 | 1996-05-08 | ||
| US08/646,667 US5667542A (en) | 1996-05-08 | 1996-05-08 | Antiloading components for abrasive articles |
| PCT/US1997/004036 WO1997042006A1 (en) | 1996-05-08 | 1997-03-14 | Antiloading components for abrasive articles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000510176A true JP2000510176A (ja) | 2000-08-08 |
| JP2000510176A5 JP2000510176A5 (enExample) | 2004-10-14 |
Family
ID=24593978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09539904A Ceased JP2000510176A (ja) | 1996-05-08 | 1997-03-14 | 研磨用製品の目詰まり防止成分 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5667542A (enExample) |
| EP (1) | EP0900133A1 (enExample) |
| JP (1) | JP2000510176A (enExample) |
| KR (1) | KR20000010853A (enExample) |
| CN (1) | CN1066996C (enExample) |
| AU (1) | AU2325797A (enExample) |
| CA (1) | CA2253577A1 (enExample) |
| WO (1) | WO1997042006A1 (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005503026A (ja) * | 2001-09-06 | 2005-01-27 | スリーエム イノベイティブ プロパティズ カンパニー | 有機薄膜トランジスタ用の表面改質層 |
| JP2007015103A (ja) * | 2001-06-21 | 2007-01-25 | Saint-Gobain Abrasives Inc | 改良された設計研磨材 |
| JP2010513693A (ja) * | 2006-12-20 | 2010-04-30 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 無機、非金属ワークピースを機械加工するための方法 |
| CN104139346A (zh) * | 2014-07-23 | 2014-11-12 | 上虞市自远磨具有限公司 | 一种防堵研磨磨具及其制造方法 |
| JP2017148906A (ja) * | 2016-02-25 | 2017-08-31 | 合資会社亀井鉄工所 | 砥材 |
| WO2024024413A1 (ja) * | 2022-07-26 | 2024-02-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
Families Citing this family (76)
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|---|---|---|---|---|
| US6228133B1 (en) * | 1998-05-01 | 2001-05-08 | 3M Innovative Properties Company | Abrasive articles having abrasive layer bond system derived from solid, dry-coated binder precursor particles having a fusible, radiation curable component |
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| KR20000072386A (ko) * | 2000-08-31 | 2000-12-05 | 이승열 | 안티-로딩제의 제조방법. |
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| US7141296B2 (en) * | 2002-11-14 | 2006-11-28 | Irwin Frank | Cast polymer and method of making the same |
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| US7278904B2 (en) * | 2003-11-26 | 2007-10-09 | 3M Innovative Properties Company | Method of abrading a workpiece |
| US20060003121A1 (en) * | 2004-06-30 | 2006-01-05 | Scheller Joseph A | Abrasive article packaging and method of making same |
| US7364500B2 (en) * | 2005-03-01 | 2008-04-29 | Brown John E | Sanding apparatus and method of manufacture |
| US7661247B2 (en) * | 2005-06-30 | 2010-02-16 | 3M Innovative Properties Company | Abrasive article packaging and method of making same |
| US8133948B2 (en) * | 2006-06-27 | 2012-03-13 | Zeon Corporation | Nitrile rubber composition, cross-linkable nitrile rubber composition and cross-linked rubber |
| BRPI0814774A2 (pt) | 2007-08-03 | 2015-03-03 | Saint Gobain Abrasives Inc | Artigo abrasivo com camada promotora de aderência |
| US8123828B2 (en) * | 2007-12-27 | 2012-02-28 | 3M Innovative Properties Company | Method of making abrasive shards, shaped abrasive particles with an opening, or dish-shaped abrasive particles |
| WO2009085841A2 (en) * | 2007-12-27 | 2009-07-09 | 3M Innovative Properties Company | Shaped, fractured abrasive particle, abrasive article using same and method of making |
| KR100973566B1 (ko) * | 2008-03-14 | 2010-08-02 | 주식회사 화영 | 비철금속용 호닝툴 및 그 제조 방법 |
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| CA3118239A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| KR102422875B1 (ko) | 2016-05-10 | 2022-07-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
| CN109415615A (zh) | 2016-05-10 | 2019-03-01 | 圣戈本陶瓷及塑料股份有限公司 | 磨料颗粒及其形成方法 |
| EP3475375B1 (en) * | 2016-06-22 | 2023-11-15 | CMC Materials, Inc. | Polishing composition comprising an amine-containing surfactant |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CN110719946B (zh) | 2017-06-21 | 2022-07-15 | 圣戈本陶瓷及塑料股份有限公司 | 颗粒材料及其形成方法 |
| CN107825307A (zh) * | 2017-11-11 | 2018-03-23 | 淄博理研泰山涂附磨具有限公司 | 一种防堵环保砂纸的制备方法 |
| USD849066S1 (en) * | 2017-12-12 | 2019-05-21 | 3M Innovative Properties Company | Coated abrasive disc |
| USD849067S1 (en) * | 2017-12-12 | 2019-05-21 | 3M Innovative Properties Company | Coated abrasive disc |
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| USD870782S1 (en) * | 2017-12-12 | 2019-12-24 | 3M Innovative Properties Company | Coated abrasive disc |
| USD879164S1 (en) * | 2017-12-12 | 2020-03-24 | 3M Innovative Properties Company | Coated abrasive disc |
| WO2019123335A1 (en) | 2017-12-20 | 2019-06-27 | 3M Innovative Properties Company | Abrasive articles including an anti-loading size layer |
| CN108356719B (zh) * | 2018-03-20 | 2024-04-19 | 常州市金牛研磨有限公司 | 一种陶瓷刚玉磨削砂带 |
| US11660726B2 (en) | 2019-09-05 | 2023-05-30 | Saint-Gobain Abrasives, Inc. | Coated abrasives having an improved supersize coating |
| WO2021133876A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| KR102719159B1 (ko) | 2019-12-27 | 2024-10-21 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| US11926019B2 (en) | 2019-12-27 | 2024-03-12 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| US20230211468A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| CN115319648B (zh) * | 2022-03-02 | 2024-05-10 | 淄博三共泰山涂附磨具有限公司 | 一种长寿命砂布及其制备方法 |
| WO2025179403A1 (en) * | 2024-03-01 | 2025-09-04 | Walter Surface Technologies Inc. | Composite abradable bodies and methods of manufacturing thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2768886A (en) * | 1954-06-29 | 1956-10-30 | Norton Co | Sandpaper |
| US2893854A (en) * | 1956-12-31 | 1959-07-07 | Armour & Co | Coated abrasive article and method of manufacture |
| US3619150A (en) * | 1969-09-22 | 1971-11-09 | Borden Co | Abrasive article and nonloading coating therefor |
| JPS5645975A (en) * | 1979-09-20 | 1981-04-25 | Akira Suzuki | Additive for abrasive material |
| CA1192050A (en) * | 1981-08-10 | 1985-08-20 | Norton Company | Loading resistant coated abrasive |
| US4396403A (en) * | 1981-08-10 | 1983-08-02 | Norton Company | Loading resistant coated abrasive |
| JPS60127518A (ja) * | 1983-12-13 | 1985-07-08 | Matsushita Electric Ind Co Ltd | 磁気記録媒体 |
| US4609380A (en) * | 1985-02-11 | 1986-09-02 | Minnesota Mining And Manufacturing Company | Abrasive wheels |
| SU1384605A1 (ru) * | 1986-10-29 | 1988-03-30 | Научно-Производственное Объединение "Спецтехоснастка" | Антифрикционна смазка дл абразивной обработки металлов |
| ES2016583B3 (es) * | 1987-03-06 | 1990-11-16 | Carborundum Schleifmittelwerke Gmbh | Procedimiento para el mejoramiento de la potencia afiladora de los cuerpos afiladores y rectificadores. |
| US4988554A (en) * | 1989-06-23 | 1991-01-29 | Minnesota Mining And Manufacturing Company | Abrasive article coated with a lithium salt of a fatty acid |
| US4973338A (en) * | 1989-06-29 | 1990-11-27 | Carborundum Abrasives Company | Anti-static and loading abrasive coating |
| GB8927983D0 (en) * | 1989-12-11 | 1990-02-14 | Minnesota Mining & Mfg | Abrasive elements |
| RU1787755C (ru) * | 1990-10-22 | 1993-01-15 | Волжский Филиал Всесоюзного Научно-Исследовательского Института Абразивов И Шлифования | Состав дл пропитки полировального инструмента |
| US5578097A (en) * | 1995-08-28 | 1996-11-26 | Norton Company | Washable coated abrasives |
-
1996
- 1996-05-08 US US08/646,667 patent/US5667542A/en not_active Expired - Lifetime
-
1997
- 1997-03-14 JP JP09539904A patent/JP2000510176A/ja not_active Ceased
- 1997-03-14 CN CN97195511A patent/CN1066996C/zh not_active Expired - Fee Related
- 1997-03-14 WO PCT/US1997/004036 patent/WO1997042006A1/en not_active Ceased
- 1997-03-14 AU AU23257/97A patent/AU2325797A/en not_active Abandoned
- 1997-03-14 KR KR1019980708996A patent/KR20000010853A/ko not_active Withdrawn
- 1997-03-14 CA CA002253577A patent/CA2253577A1/en not_active Abandoned
- 1997-03-14 EP EP97915964A patent/EP0900133A1/en not_active Ceased
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007015103A (ja) * | 2001-06-21 | 2007-01-25 | Saint-Gobain Abrasives Inc | 改良された設計研磨材 |
| JP2005503026A (ja) * | 2001-09-06 | 2005-01-27 | スリーエム イノベイティブ プロパティズ カンパニー | 有機薄膜トランジスタ用の表面改質層 |
| JP2010513693A (ja) * | 2006-12-20 | 2010-04-30 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 無機、非金属ワークピースを機械加工するための方法 |
| CN104139346A (zh) * | 2014-07-23 | 2014-11-12 | 上虞市自远磨具有限公司 | 一种防堵研磨磨具及其制造方法 |
| JP2017148906A (ja) * | 2016-02-25 | 2017-08-31 | 合資会社亀井鉄工所 | 砥材 |
| WO2024024413A1 (ja) * | 2022-07-26 | 2024-02-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20000010853A (ko) | 2000-02-25 |
| CN1066996C (zh) | 2001-06-13 |
| US5667542A (en) | 1997-09-16 |
| EP0900133A1 (en) | 1999-03-10 |
| WO1997042006A1 (en) | 1997-11-13 |
| CN1222108A (zh) | 1999-07-07 |
| CA2253577A1 (en) | 1997-11-13 |
| AU2325797A (en) | 1997-11-26 |
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