JP2000508083A - 光回折格子 - Google Patents
光回折格子Info
- Publication number
- JP2000508083A JP2000508083A JP9534136A JP53413697A JP2000508083A JP 2000508083 A JP2000508083 A JP 2000508083A JP 9534136 A JP9534136 A JP 9534136A JP 53413697 A JP53413697 A JP 53413697A JP 2000508083 A JP2000508083 A JP 2000508083A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- optical crystal
- crystal material
- light
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 91
- 239000013078 crystal Substances 0.000 claims abstract description 64
- 239000000463 material Substances 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000003989 dielectric material Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 20
- 230000010287 polarization Effects 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 10
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 description 12
- 239000011295 pitch Substances 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 239000000835 fiber Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.a)光学結晶材料の領域と; b)該光学結晶材料に入力ビームを結合する手段と; c)該光学結晶材料から、グレーズ状態で放出される出力ビームを結合するた めの手段とから成る光回折格子。 2.前記光学結晶材料は概ね平面状である請求項1記載の回折格子。 3.前記光学結晶材料は誘電体材料内に形成された散乱中心の概ね規則正しい アレイで成る請求項1又は2記載の回折格子。 4.前記散乱中心のアレイは10列を超えない深さの僅かなアレイであり、好 ましいのは1,2,もしくは3列だけの深さである請求項3記載の回折格子。 5.前記アレイが2または3列を含み、かつ列間の間隔が、所定の動作波長で は、1つの列から散乱されたグレーズ状態で放出されたビームがその列もしくは 他の列から散乱されたグレーズ状態で放出されたビームと建設的に相互作用する ようなものである請求項4記載の回折格子。 6.前記入力及び出力ビームを結合するための手段は、光学結晶材料で共通基 板上に形成された導波路を含む請求項1ないし5のいずれか1項記載の回折格子 。 7.前記導波路は、平面状表面に垂直な方向に光を閉じ込めるようにされたプ レーナ構造で成る請求項6記載の回折格子。 8.少くとも1つの導波路がリッジ導波路であり、平面状表面に平行な方向に もまた光を閉じ込めるようにされている請求項6記載の回折格子。 9.入力ビームを結合する手段と出力ビームを結合する手段を光学結晶材料の いずれかの側に置いて、前記回折格子が透過形で動作するように構成されている 請求項1ないし8のいずれか1項記載の回折格子。 10.前記誘電体材料がIII−V族材料である請求項1ないし9のいずれか1項 記載の回折格子。 11.前記誘電体材料がインジウムフォスファイド(InP)である請求項10 記載の回折格子。 12.前記散乱中心が誘電体基板内に形成された孔で成る請求項3,4又は5の いずれか1項記載の回折格子。 13.前記孔が誘電体材料で充填されている請求項12記載の回折格子。 14.入力ビームを結合するための前記手段は前記光学結晶材料の領域に入射す るビームをコリメートするための手段を含む請求項1ないし13のいずれか1項 記載の回折格子。 15.出力ビームを結合するための前記手段はグレーズ状態で放出される出力ビ ームをフォーカスするための手段を含む請求項1ないし14のいずれか1項記載 の回折格子。 16.少くとも1つの前記コリメートするための手段と、フォーカスするための 手段とが前記光学結晶材料の領域を備えた共通基板内に一体的に形成された凹状 反射面で成る請求項14又は15記載の回折格子。 17.光学結晶材料の領域を形成し、 前記領域に隣接して入力ビームを結合するための手段とグレーズ状で放出され るビームを結合するための手段とを形成することを特徴とする光回折格子を製造 する方法。 18.前記結合するための手段と光学結晶材料の領域とを誘電体材料の共通基板 上に形成することを含む請求項17記載の方法。 19.前記光学結晶材料の領域を形成する段階が誘電体材料内に概ね規則正しい 孔のアレイをエッチングすることを含む請求項17又は18記載の方法。 20.前記孔にその後誘電体材料を充填する段階を含む請求項19記載の方法。 21.請求項1ないし16のいずれか1項記載の回折格子を含む波長マルチプレ クサまたはデマルチプレクサ。 22.a)光入力と; b)該光入力からの入射光ビームを受けるようにされた光学結晶材料の領域と ; c)前記光学結晶の領域からの光ビームを受けるようにされた光出力とから成 る光回折格子。 23.a)光入力と; b)該光入力からの入射光ビームを受けるようにされ、かつ誘電体材料内に形 成された散乱中心のアレイで成る光学結晶材料の領域と; c)該光学結晶材料の領域からの光ビームを受けるようにされた光出力とから 成る光回折格子。 24.請求項1ないし16,22,及び23のうちのいずれか1項記載の光回折 格子を組み込んだ偏光選択性フィルタ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96302115 | 1996-03-27 | ||
EP96302115.9 | 1996-03-27 | ||
PCT/GB1997/000817 WO1997036198A1 (en) | 1996-03-27 | 1997-03-24 | Optical diffraction grating |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000508083A true JP2000508083A (ja) | 2000-06-27 |
Family
ID=8224863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9534136A Pending JP2000508083A (ja) | 1996-03-27 | 1997-03-24 | 光回折格子 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6052213A (ja) |
EP (1) | EP0970397B1 (ja) |
JP (1) | JP2000508083A (ja) |
AU (1) | AU2038897A (ja) |
CA (1) | CA2248042C (ja) |
DE (1) | DE69733670T2 (ja) |
WO (1) | WO1997036198A1 (ja) |
Cited By (2)
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---|---|---|---|---|
US6937781B2 (en) | 2001-04-04 | 2005-08-30 | Nec Corporation | Optical switch having photonic crystal structure |
JP2015536471A (ja) * | 2012-12-04 | 2015-12-21 | エフ.ホフマン−ラ ロッシュ アーゲー | 結合親和性の検出に用いる装置 |
Families Citing this family (59)
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DE19745324C2 (de) * | 1997-10-14 | 1999-09-16 | Deutsche Telekom Ag | Verfahren und Vorrichtung zur wellenlängenselektiven Mischung und/oder Verteilung von polychromatischem Licht |
US6134369A (en) * | 1999-03-31 | 2000-10-17 | Matsushita Electric Industrial Co. | Compact optical waveguide |
JP2001075040A (ja) * | 1999-09-02 | 2001-03-23 | Ricoh Co Ltd | レーザ走査システム |
US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
US8111401B2 (en) * | 1999-11-05 | 2012-02-07 | Robert Magnusson | Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats |
JP2001141946A (ja) * | 1999-11-16 | 2001-05-25 | Oki Electric Ind Co Ltd | 合分波素子 |
JP2001272557A (ja) * | 2000-03-27 | 2001-10-05 | Minolta Co Ltd | 光機能素子及びその製造方法 |
US6654533B1 (en) | 2000-06-16 | 2003-11-25 | Metrophotonics Inc. | Polarization independent waveguide structure |
US6813064B2 (en) * | 2000-07-24 | 2004-11-02 | Sajeev John | Electro-actively tunable photonic bandgap materials |
US20020027655A1 (en) * | 2000-09-04 | 2002-03-07 | Shigeo Kittaka | Optical device and spectroscopic and polarization separating apparatus using the same |
US7142296B2 (en) * | 2000-10-30 | 2006-11-28 | Sru Biosystems, Inc. | Method and apparatus for detecting biomolecular interactions |
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US6466709B1 (en) * | 2001-05-02 | 2002-10-15 | California Institute Of Technology | Photonic crystal microcavities for strong coupling between an atom and the cavity field and method of fabricating the same |
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US6721476B2 (en) | 2001-12-03 | 2004-04-13 | Honeywell International Inc. | Optical demultiplexer based on three-dimensionally periodic photonic crystals |
US20030123827A1 (en) * | 2001-12-28 | 2003-07-03 | Xtalight, Inc. | Systems and methods of manufacturing integrated photonic circuit devices |
US6991847B2 (en) | 2002-02-07 | 2006-01-31 | Honeywell International Inc. | Light emitting photonic crystals |
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US6649990B2 (en) * | 2002-03-29 | 2003-11-18 | Intel Corporation | Method and apparatus for incorporating a low contrast interface and a high contrast interface into an optical device |
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US7927822B2 (en) | 2002-09-09 | 2011-04-19 | Sru Biosystems, Inc. | Methods for screening cells and antibodies |
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KR101602418B1 (ko) * | 2012-04-06 | 2016-03-10 | 코닝정밀소재 주식회사 | 광추출 효율이 향상된 유기 발광소자용 기판, 그 제조방법 및 이를 구비하는 유기 발광소자 |
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-
1997
- 1997-03-24 EP EP97908417A patent/EP0970397B1/en not_active Expired - Lifetime
- 1997-03-24 JP JP9534136A patent/JP2000508083A/ja active Pending
- 1997-03-24 DE DE69733670T patent/DE69733670T2/de not_active Expired - Fee Related
- 1997-03-24 US US09/051,537 patent/US6052213A/en not_active Expired - Lifetime
- 1997-03-24 CA CA002248042A patent/CA2248042C/en not_active Expired - Fee Related
- 1997-03-24 WO PCT/GB1997/000817 patent/WO1997036198A1/en active IP Right Grant
- 1997-03-24 AU AU20388/97A patent/AU2038897A/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6937781B2 (en) | 2001-04-04 | 2005-08-30 | Nec Corporation | Optical switch having photonic crystal structure |
US7263251B2 (en) | 2001-04-04 | 2007-08-28 | Nec Corporation | Optical switch having photonic crystal structure |
JP2015536471A (ja) * | 2012-12-04 | 2015-12-21 | エフ.ホフマン−ラ ロッシュ アーゲー | 結合親和性の検出に用いる装置 |
US10156524B2 (en) | 2012-12-04 | 2018-12-18 | Hoffmann-La-Roche Inc. | Device for use in the detection of binding affinities |
Also Published As
Publication number | Publication date |
---|---|
CA2248042A1 (en) | 1997-10-02 |
EP0970397A1 (en) | 2000-01-12 |
US6052213A (en) | 2000-04-18 |
DE69733670D1 (de) | 2005-08-04 |
CA2248042C (en) | 2002-04-23 |
WO1997036198A1 (en) | 1997-10-02 |
DE69733670T2 (de) | 2006-04-20 |
AU2038897A (en) | 1997-10-17 |
EP0970397B1 (en) | 2005-06-29 |
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