JP2000357786A - 固体撮像装置 - Google Patents

固体撮像装置

Info

Publication number
JP2000357786A
JP2000357786A JP2000107029A JP2000107029A JP2000357786A JP 2000357786 A JP2000357786 A JP 2000357786A JP 2000107029 A JP2000107029 A JP 2000107029A JP 2000107029 A JP2000107029 A JP 2000107029A JP 2000357786 A JP2000357786 A JP 2000357786A
Authority
JP
Japan
Prior art keywords
refractive index
lens
thin film
microlens
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000107029A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000357786A5 (enExample
Inventor
Shinji Uchida
真司 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000107029A priority Critical patent/JP2000357786A/ja
Publication of JP2000357786A publication Critical patent/JP2000357786A/ja
Publication of JP2000357786A5 publication Critical patent/JP2000357786A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2000107029A 1999-04-12 2000-04-07 固体撮像装置 Withdrawn JP2000357786A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000107029A JP2000357786A (ja) 1999-04-12 2000-04-07 固体撮像装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10436799 1999-04-12
JP11-104367 1999-04-12
JP2000107029A JP2000357786A (ja) 1999-04-12 2000-04-07 固体撮像装置

Publications (2)

Publication Number Publication Date
JP2000357786A true JP2000357786A (ja) 2000-12-26
JP2000357786A5 JP2000357786A5 (enExample) 2008-10-09

Family

ID=26444865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000107029A Withdrawn JP2000357786A (ja) 1999-04-12 2000-04-07 固体撮像装置

Country Status (1)

Country Link
JP (1) JP2000357786A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363356A (ja) * 2003-06-05 2004-12-24 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
WO2006054376A1 (ja) * 2004-11-16 2006-05-26 Matsushita Electric Industrial Co., Ltd. 受光装置とその製造方法およびカメラ
KR100662501B1 (ko) * 2000-12-29 2007-01-02 매그나칩 반도체 유한회사 이미지 센서 제조방법
WO2007020733A1 (ja) * 2005-08-19 2007-02-22 Matsushita Electric Industrial Co., Ltd. 固体撮像装置及びその製造方法
KR100745595B1 (ko) 2004-11-29 2007-08-02 삼성전자주식회사 이미지 센서의 마이크로 렌즈 및 그 형성 방법
US7425745B2 (en) 2004-02-16 2008-09-16 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
JP2009212285A (ja) * 2008-03-04 2009-09-17 Semiconductor Energy Lab Co Ltd 半導体装置及び半導体装置の作製方法
JP2010021573A (ja) * 2005-07-20 2010-01-28 Panasonic Corp 固体撮像装置及びその製造方法
US7932948B2 (en) 2005-07-20 2011-04-26 Panasonic Corporation Solid-state image sensing device having a layer on microlens and method for fabricating the same
JP2012182433A (ja) * 2011-02-09 2012-09-20 Canon Inc 光電変換素子およびこれを用いた光電変換装置、撮像システム
JP2016036004A (ja) * 2014-07-31 2016-03-17 采▲ぎょく▼科技股▲ふん▼有限公司ＶｉｓＥｒａ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｍｐａｎｙ Ｌｉｍｉｔｅｄ ダブルレンズ構造とその製造方法

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662501B1 (ko) * 2000-12-29 2007-01-02 매그나칩 반도체 유한회사 이미지 센서 제조방법
JP2004363356A (ja) * 2003-06-05 2004-12-24 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
US7425745B2 (en) 2004-02-16 2008-09-16 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
WO2006054376A1 (ja) * 2004-11-16 2006-05-26 Matsushita Electric Industrial Co., Ltd. 受光装置とその製造方法およびカメラ
US7842980B2 (en) 2004-11-29 2010-11-30 Samsung Electronics Co., Ltd. Image sensor microlens structures and methods of forming the same
KR100745595B1 (ko) 2004-11-29 2007-08-02 삼성전자주식회사 이미지 센서의 마이크로 렌즈 및 그 형성 방법
US7524770B2 (en) 2004-11-29 2009-04-28 Samsung Electronics Co., Ltd. Methods of forming image sensor microlens structures
US8223250B2 (en) 2005-07-20 2012-07-17 Panasonic Corporation Solid-state image sensing device
US7932948B2 (en) 2005-07-20 2011-04-26 Panasonic Corporation Solid-state image sensing device having a layer on microlens and method for fabricating the same
JP2010021573A (ja) * 2005-07-20 2010-01-28 Panasonic Corp 固体撮像装置及びその製造方法
JP2007053318A (ja) * 2005-08-19 2007-03-01 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
WO2007020733A1 (ja) * 2005-08-19 2007-02-22 Matsushita Electric Industrial Co., Ltd. 固体撮像装置及びその製造方法
JP2009212285A (ja) * 2008-03-04 2009-09-17 Semiconductor Energy Lab Co Ltd 半導体装置及び半導体装置の作製方法
JP2012182433A (ja) * 2011-02-09 2012-09-20 Canon Inc 光電変換素子およびこれを用いた光電変換装置、撮像システム
US8878115B2 (en) 2011-02-09 2014-11-04 Canon Kabushiki Kaisha Photoelectric conversion element, and photoelectric conversion apparatus and imaging system having a light guide
JP2016036004A (ja) * 2014-07-31 2016-03-17 采▲ぎょく▼科技股▲ふん▼有限公司ＶｉｓＥｒａ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｍｐａｎｙ Ｌｉｍｉｔｅｄ ダブルレンズ構造とその製造方法
US9513411B2 (en) 2014-07-31 2016-12-06 Visera Technologies Company Limited Double-lens structures and fabrication methods thereof
US10054719B2 (en) 2014-07-31 2018-08-21 Visera Technologies Company Limited Methods for farbricating double-lens structures

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