JP2000356653A - Inspection device for probe card - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make easily obtainable a necessary parallelism between members and to make reducible the deflection of a probe card caused by the reaction force to needle pressure by comprising a pressing plate vertically movably mounted on a frame at the upper part of a connecting device, and a pressing body supported on the frame for pressing the pressing plate to the connecting device. SOLUTION: This inspection device 10 comprises a pressing plate 44 vertically movably mounted on a frame in a connecting device mounted on a probe card 12 located on a card holder 14, and a pressing body supported on the frame for pressing the pressing plate 44 to the connecting device. The probe card 12 is mounted on a receiving part of the card holder 114 in a state that a needle point of the probe is projected to a contact plate 52 side from an opening of the card holder, and the pressing plate 44 is pressed to the connecting device by the pressing body in this condition, to be pressed to the receiving part of the card holder 114. On this occasion, the probe card 12 and the connecting device, and the connecting device and the pressing plate 44 come into contact with each other over the wide range.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for inspecting a probe card used for a conduction test of an object to be inspected such as an integrated circuit.

[0002]

2. Description of the Related Art Generally, a probe card is inspected during manufacture, after manufacture, during use, and the like, for variations in the height position of the probe tip and for the quality of contact with electrodes.

In this type of conventional inspection apparatus, a base plate having an opening is provided in parallel with the contact plate above a contact plate with which a needle tip contacts, and a test board is provided with a plurality of hook-shaped so as to close the opening of the base frame. The probe card is mounted on the base frame in parallel with the base frame by the board holder, and the probe card is mounted on the lower side of the test board via an electrical connection device.

[0004] The test board is mounted on the base frame at a plurality of locations on the outer peripheral portion by board holding.
At the time of inspection, the probe card and the contact plate are relatively pressed, and the probe tip of the probe contacts the contact plate. At this time, the reaction force acting on the probe card (that is, the reaction force against the stylus pressure) is transmitted to the base frame via the electrical connection device, the test board, and the board holder.

[0005]

However, in the above inspection apparatus, since the probe card is assembled to the base frame via the electrical connection device, the test board and the board holder, the parallelism between these members is compensated. And it is difficult to adjust the parallelism, so that the parts are not interchangeable.

In the above inspection apparatus, since the test board is mounted on the base frame only at a plurality of locations on the outer peripheral portion, the test board bends due to the reaction force against the needle pressure, and the probe card itself warps. No.
As a result, the parallelism between the members is deviated, and an accurate inspection cannot be performed.

Therefore, in the probe card inspection apparatus, it is important to easily obtain the necessary parallelism between the members and to reduce the deflection of the probe card due to the reaction force against the needle pressure.

[0008]

A probe card inspection apparatus according to the present invention comprises a contact plate with which a probe card tip is brought into contact, and a frame forming a space above the contact plate, wherein the space is formed so that the space extends upward. An openable / closable frame, a card holder arranged in the space, having an opening at a location corresponding to the contact plate, and a card holder having a receiving portion for receiving the probe card around the opening; A connection device disposed on a probe card disposed on a holder, the connection device being connected to a probe of the probe card; and a connection device disposed above the connection device and movable vertically in the frame. A pressing plate supported by the frame and pressing the pressing plate against the connection device.

The probe card is arranged on the receiving portion of the card holder with the probe tip of the probe protruding from the opening of the card holder toward the contact plate, and in this state, the pressing plate is pressed against the connecting device by the pressing body. As a result, it is pressed against the receiving portion of the card holder. At this time, the probe card and the connecting device, and the connecting device and the pressing plate are in contact with each other over a wide range.

[0010] When replacing the probe card, the arrangement space for the card holder, the connecting device and the like is opened upward, and the connecting device is removed from the probe card. Then
A new probe card is placed in the receiving portion of the card holder, and then the connecting device is placed in a predetermined position,
The arrangement space for the card holder, the connection device and the like is closed. The reaction force acting on the probe card when the needle tip is brought into contact with the contact plate is received by the pressing plate via the connection device.

According to the present invention, since the probe card and the connecting device, and the connecting device and the pressing plate are in wide contact with each other, the probe card is received by the receiving portion of the card holder. The required degree of parallelism is easily obtained, and the deflection of the probe card, the connecting device, and the pressing plate due to the reaction force against the needle pressure is extremely small.

[0012] The connection device is a plate-shaped connection device disposed above the probe card, the connection device having a plurality of first conductors connected to the probes of the probe card; A plurality of second conductors connected to the first conductor, a repeater disposed on the frame, the connector, and the And a coupling mechanism for releasably coupling the repeater. With this configuration, the engagement between the pressing plate and the repeater is released, and the repeater and the connector can be separated. In addition, the same testing device is used for testing a plurality of types of probe cards by using a repeater in common for various probe cards and replacing the connector with a connector corresponding to a new probe card when replacing the probe card. be able to.

The relay and the pressing plate are respectively
It can be assembled to the pressing plate and the pressing body.
With this configuration, the relay can be separated from the connector by raising the pressing body.

[0014] The repeater may include a plurality of connectors each having a plurality of connection portions connected to the second conductor. By doing so, the probe card can be replaced with the connector and the cable connecting the connector to the tester connected, that is, without removing the cable from the connector.

The coupling mechanism includes a rotating ring supported by the pressing plate or the repeater so as to be rotatable around the connecting device at an angle, the rotating ring receiving the connecting device so as to be relatively movable. The connector can be releasably locked to the rotating ring with the angular rotation of the rotating ring. With this configuration, the connector can be attached to and detached from the repeater and the pressing plate by rotating the rotating ring.

[0016] The connecting device and the repeater may have a first positioning portion for performing relative positioning between the two. With this configuration, the connector and the repeater can be accurately positioned.

The card holder includes one or more second positioning portions for positioning the probe card with respect to the card holder, and one or more third positioning portions for positioning the connection device with respect to the card holder. Can be prepared. With this configuration, the connection device and the probe card can be accurately positioned on the card holder.

[0018] The inspection apparatus may further include a stage on which the contact plate is arranged, the stage moving the contact plate at least in a vertical direction.

The inspection device may further include a second base located above the contact plate, the base being removably receiving the card holder and corresponding to the contact plate.
A lower frame disposed on the base and spaced apart in the left-right direction, and an upper portion disposed on the lower frame to form the space in cooperation with the lower frame. An upper frame that supports the pressing body and opens the space upward.

The inspection apparatus may further include a stage disposed below the probe card, a plurality of contact plates on which the probe tips of the probes are pressed, and a plurality of contact plates disposed on the stage. A stylus pressure sensor that is in contact with the tip of the probe and senses stylus pressure acting on the probe. With this configuration, the needle pressure can be detected, and there is no need to provide a space for arranging the needle pressure sensor in the frame.

At least one of the contact plates is a transparent plate, and the inspection apparatus further includes a television camera positioned below the transparent plate for photographing the probe tip, and an auxiliary device provided with the television camera. An auxiliary stage for moving the television camera at least in a horizontal plane. With this configuration, the coordinate position of the probe can be measured for each probe by moving the television camera at least two-dimensionally on the auxiliary stage so that the probes are sequentially photographed by the television camera.

The inspection apparatus may further include a cable connected at one end to each of the connectors.

Alternatively, the inspection device may further include a plurality of connection portions, which are a measurement board disposed on the connection device, and are electrically connected to the probe card via the connection device. The probe card may include one or more measurement substrates on which one or more measurement circuit elements for transmitting and receiving electric signals to and from the probe card via the connection portion are arranged. By doing so, the signal line for each probe becomes shorter than when a cable is used, and the possibility that noise is mixed into the measurement signal is significantly reduced, and the signal attenuation is significantly reduced.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a horizontal direction in which a slide tray described later is taken in and out is referred to as a front-back direction (Y direction), and a horizontal direction perpendicular to the front-back direction is referred to as a left-right direction (X direction).

Referring to FIGS. 1 to 4, a probe card inspection apparatus 10 is used for inspecting a probe card 12. As shown in FIG. 4, the probe card 12 has a plurality of needle-type probes 14 made of conductive thin metal wires mounted on a wiring board 16 with their needle tips protruding downward. The probe tip of each probe 14 is pressed against the electrode portion of the device under test during a power-on test of the device under test such as an integrated circuit. The probe card 12 includes a probe 14
A plurality of tester lands 18 (see FIG. 10) for connecting to a tester (not shown) are provided on the outer peripheral edge of the wiring board 16.

The inspection apparatus 10 uses a rectangular parallelepiped casing 20 as a carriage, and uses its upper plate as a plate-like base, that is, a base plate 22. The housing 20 is two-dimensionally movable by a plurality of casters 24. An operation panel 26 for inputting various information and commands is provided on the base 22.
And a monitor 28 for displaying an inspection state, and a frame 30 for forming an arrangement space for various devices described later.

The base 22 has a circular opening 32 at the center. The frame 30 includes a pair of lower frames 34 spaced apart in the front-rear direction (the left-right direction in FIG. 4) and a U-shaped upper frame 36 that opens downward. Both lower frames 34 are arranged on the base 22 such that the space above the opening 32 enters between them. The upper frame 36 is provided with a shaft 3 above the lower frame 34.
8 for pivotal connection.

The upper frame 36 always has the frame 30
The shaft 38 is rotated by a motor 40 when the inner space is opened and closed. While closing the inner space, the upper frame 36 is prevented from opening the inner space by a hook 42 provided on the lower frame 34. Hook 42
The hook 42 is moved by a suitable driving mechanism 43 such as an air cylinder to a position where the hook 42 prevents the upper frame 36 from opening the inner space and a position where the opening is permitted.

The upper frame 36 has a rectangular pressing plate 4
4 are arranged. The pressing plate 44 is connected to the upper frame 36.
Is moved in the up-down direction (Z direction) by a driving mechanism 46 such as an air cylinder provided in the camera. The pressing plate 44 includes a plurality of guide rails 4 provided inside the upper frame 36.
The upper frame 36 has a plurality of openings 50 around the drive mechanism 46.

As shown in FIGS. 5 and 6, a contact plate 52 made of a conductive material is assembled on a stage 54 arranged in the housing 20. The stage 54 is a plate-like stage base 5 provided in the housing 20.
6.

The stage 54 has an X stage 60 movable along a plurality of X guide rails 58 extending in the left and right direction (the left and right direction in FIG. 5), and the X stage 60 moves in the front and rear direction (the left and right direction in FIG. 6). Y arranged as possible
The stage includes a stage 62, a Z stage 64 that is moved up and down by the movement of the Y stage 62, and a moving mechanism 66 that moves the Y stage 62 in the Y direction.

The X stage 60 is in the form of a box that is open upward, and has a plurality of guide rails 68 extending vertically. The Z stage 64 has its guide portion 64a slidably fitted on the guide rail 68.

As shown in FIG. 4 to FIG.
Also includes a disc-shaped connector 70 that is electrically connected to the probe 14 of the probe card 12 and a disc-shaped repeater 72 that connects the connector 70 to a tester (not shown). The connecting device 70 and the repeater 72 are combined with each other to form a connecting device.

The connector 70 arranges a plurality of elongated first conductors 74 individually connected to the probes 14 of the probe card 12 on a disc-shaped connection plate 76 made of an electrically insulating material. A disk-shaped connection board 78 for connecting the body 74 to the repeater 72 is assembled on the connection plate 76 by a plurality of screw members.

The repeater 72 includes a plurality of elongated second conductors 80 individually connected to the probe 14 by the connector 70.
Are arranged on a disc-shaped relay plate 82 made of an electrically insulating material,
A disc-shaped relay board 84 for connecting the second conductor 80 to the tester is assembled on the relay board 82 with a plurality of screw members, and a plurality of connectors 86 are assembled on the relay board 84. The repeater 72 is attached to the lower side of the pressing plate 44 by a plurality of screw members.

The first conductor 74 is connected to the corresponding probe 1
4 is arranged on the connection plate 76 so as to face the tester land 18 and penetrates the connection plate 76 in the thickness direction and slightly protrudes up and down. The connection board 78 is a wiring board having a plurality of wiring sections for connecting the first and second conductors 74 and 80 to each other.

The second conductor 80 is arranged on the relay plate 82 so as to face the corresponding wiring portion of the connection board 78, and penetrates the relay plate 82 in the thickness direction to slightly project upward and downward. ing. The relay board 84 is a wiring board having a plurality of wiring portions for interconnecting the second conductor 80 and the connector 86.

As the first and second conductors 74 and 80, so-called pogo pins in which a coil spring and a pin are arranged in a cylindrical member can be used. However, the first and second conductors 74 and 80 may be other members such as conductive metal wires.

As shown in FIGS. 7 and 8, the connector 70 and the relay 72 are connected to each other by receiving a plurality of positioning pins 88 provided on the relay plate 82 into holes 90 provided on the connection board 78. Are positioned relative to each other. Connector 7
0 and the repeater 72 are releasably coupled by the coupling mechanism as described above to form a connection device.

Such a coupling mechanism, as shown in FIGS. 7 to 9, comprises a coupling ring 92 which can be rotated angularly around the connection device.

The rotating ring, or coupling ring 92,
A plurality of support rollers 94 that receive the ring 92 and a plurality of side rollers 96 that are in contact with the outer peripheral surface of the ring 92 are supported by the pressing plate 44 and have their rotational positions regulated. Support roller 94 and side roller 96
Is mounted on the lower side of the pressing plate 44.

The coupling ring 92 is also rotated angularly about an axis extending in the vertical direction by a plurality of link arms 98 and a driving mechanism 100 such as an air cylinder for swinging each link arm 98. .

The link arm 98 is mounted on the lower surface of the pressing plate 44 so as to be angularly rotatable about an axis extending in the vertical direction. The pin 93 provided on the coupling ring 92 and the pin 93 slide. It is engaged with the coupling ring 92 by an elongated hole 95 formed in the link arm 98 so that it can be engaged.

The drive mechanism 100 is mounted on the lower surface of the pressing plate 44 so as to rotate the link arm 98 at an angle. The connector 70 has a plurality of engaging pieces 102 provided at an outer peripheral portion thereof at an angular interval, and includes a coupling ring 92.
Is connected to the repeater 72 by being received by the connecting roller 104 provided at

The coupling roller 104 is assembled to the coupling ring 92 by a bracket 108. One or more of the coupling ring 92, the support roller 94, the side roller 96, the link arm 98, and the drive mechanism 100 may be assembled to the repeater 72. Further, the engagement piece 102 and the coupling roller 104 may be disposed on the coupling ring 92 and the connector 70, respectively.

FIG. 8 shows a state in which the connector 70 and the repeater 72 are connected by a solid line, and a state in which such connection is released by a dotted line. Therefore, the connecting device 70 and the repeater 72 are coupled by moving the coupling ring 92 to one side, and the coupling is released by moving to the other.

As shown in FIG. 7, each connector 86 has:
The ends of the cable 110 connected to the tester are joined. The cable 110 is connected to the opening 1 formed in the pressing plate 44.
12 and an opening 50 formed in the upper frame 36.

As shown in FIGS. 9 to 13, the probe card 12 is received in a circular card holder 114, and the card holder 114 is a short cylindrical lifting tray 1.
16, and the lifting tray 116 is disposed on a drawer-like slide tray 120 via a rotating ring 118 disposed therearound.
Reference numeral 20 is supported by a pair of slide rails 122 so as to be able to be taken in and out of the lower frame 34.

The card holder 114 holds the contact plate 52
The probe card 1 has an opening 124 at a location corresponding to
2 has a receiving portion 126 around the opening 124.
The receiving portion 126 is a step lower than the surrounding portion.
The outer periphery of the card holder 114 is received by an inward flange 128 provided at the lower end of the lifting tray 116.

The positioning and maintenance of the probe card 12 and the connector 70 with respect to the card holder 114 are performed by using a plurality of pins 13 provided on the card holder 114, respectively.
This is done by fitting 0 and 132 into holes 134 and 136 formed in probe card 12 and connector 70.

Card holder 1 for lifting tray 116
Positioning and maintenance of 14 are performed by fitting a plurality of pins 138 provided on lifting tray 116 into holes 140 formed in card holder 114.

Rotating ring, ie, elevating ring 118
Includes a plurality of under rollers 142 for receiving the ring 118.
And a plurality of side rollers 144 that are in contact with the outer peripheral surface of the ring 144, are assembled to the slide tray 120 and the rotation position is regulated. The rollers 142 and 144 are attached to the slide tray 120.

The elevating ring 118 is mounted on the slide tray 1.
A rotating grip 146 extending forwardly of 20 allows rotation about the axis of the lifting ring 118 within a predetermined angular range.

The elevating tray 116 has an elevating groove 148 on its outer peripheral surface, and the elevating ring 118 moves the Z-up roller 15 which moves in the groove 148 in accordance with its angular rotation.
Has zero. The elevating groove 148 is, as shown in FIG.
It is inclined at the center so that one end is low and the other end is high.

The elevating tray 116 includes an elevating ring 118.
Is rotated from one position to a higher position by being rotated in one direction, and is lowered from a higher position to a lower position by rotating the elevating ring 118 in the other direction. Thereby, the card holder 114 is also raised and lowered.

The elevating tray 116 is moved up and down by the bracket 1
A plurality of guide rails 154 are attached to the slide tray 120 so as to extend in the vertical direction by 52, and guides 156 slidably fitted to the respective guide rails 154. The guide 156 is connected to the lifting tray 116.
It is provided in.

The slide tray 120 has an access handle 158 that projects forward from the inner space formed by the frame 30. For this reason, the slide tray 12
0 can be moved in and out of the inner space using the handle 158.

In the inspection apparatus 10, as shown in FIG. 7, the connector 70 and the repeater 72 are pre-assembled and connected to each other, and the repeater 72 is screwed to the pressing plate 44. I have.

As shown in FIG. 5, the slide tray 120 holds the probe card 12 in the card holder 114 while the probe card 12 is in contact with the contact plate 5.
2 has been moved to a position above
6 is lowered to a state of being received in the opening 32 of the base 22. For this reason, the probe 14 has its needle tip projected below the base 22.

In the above state, when the upper frame 36 is displaced to a position for closing the internal space and the pressing plate 44 is lowered, the connecting device combining the connector 70 and the relay 72 is placed on the probe card 12. They are overlaid and pressed against the probe card 12 by the pressing plate 44 (see FIGS. 5 and 6). In this state, the card holder 114 has its receiving portion 126 positioned at the opening 32 of the base 22,
The probe 14 has its needle point approached to the contact plate.

As a result, the first conductor 7 of the connector 70
4 is pressed against the tester land 18 of the probe card 12. The lowermost position of the pressing plate 44 is restricted by the pressing plate 44 abutting on a plurality of stoppers 160 provided on the slide tray 120. This prevents the connection device and the pressing plate from being excessively pressed against each other and against the card holder 114.

In the above state, the probe 14 is inspected for variations in the height position of the tip thereof and the quality of contact with the electrodes. At the time of inspection, the contact plate 52 is lifted by the stage 54, pressed against the tip of the probe card 12, and receives a predetermined electric signal from the tester.

The reaction force to the needle pressure at the time of inspection is transmitted from the probe card 12 to the pressing plate 44 via the connection device. However, the probe card 12 and the connection device, and
Since the connection device and the pressing plate 44 are in wide contact, the necessary parallelism between the members can be easily obtained in combination with the fact that the probe card 12 is received by the receiving portion 126 of the card holder 114. Moreover, the deflection of the probe card 12, the connecting device, and the pressing plate 44 due to the reaction force against the needle pressure is extremely small.

When the inspection is completed, the inspected probe card is taken out of the inspection device 10 to inspect the next probe card, and a new probe card is placed in the inspection device 10 instead.

The replacement of the same type of probe card is performed as follows.

First, the pressing plate 44 is displaced by the driving mechanism 46 to the position shown by the dotted line in FIG. Thereby, the connector 70 and the repeater 72 are moved from the position shown in FIG. 14A to the position shown in FIG. That is, the connector 70 and the repeater 72 are removed from the card holder 114 and are moved to a position where the slide tray 120 is not obstructed.

Next, the elevating ring 118 is
Rotated by 46. As a result, the lifting tray 116
Is the probe 1 as shown in FIG. 13 and FIG.
4 is raised to a position where the slide tray 120 is not obstructed.

Next, the slide tray 120 is pulled out as shown in FIG. In this state, replacement of the probe card is performed. The position of the slide tray 120 shown in FIG. 15 can be a position where at least the probe card 12 is outside the internal space formed by the frame 30, and is preferably a position where the card holder 114 is outside the internal space. .

In a state where the slide tray 120 is pulled out as shown in FIG. 15, the probe card 12 which has been inspected is taken out of the card holder 114, and another probe card of the same kind is placed in the card holder 114 instead. .

It is not necessary to remove the cable 110 from the connector 86 when attaching or detaching the probe card or when replacing the probe card. Further, since the probe card attaching / detaching operation can be performed without being hindered by the frame 30, the pressing plate 44, and the connecting device, the workability of exchanging the probe card is good, the exchanging operation is safe, and the exchanging operation is performed quickly. Can be performed without skill.

The exchange of probe cards of different types is performed as follows.

First, in the state shown in FIG.
The coupling ring 92 is angularly rotated, and the coupling between the connector 70 and the repeater 72 is released by the coupling mechanism.

Next, the pressing plate 44 is displaced by the driving mechanism 46 to the position shown by the dotted line in FIG. As a result, the connector 70 is connected to the card holder 114 together with the probe card 12.
However, the repeater 72 is moved from the position shown in FIG. 16A to the position shown in FIG. That is, the repeater 72 is removed from the card holder 114 and moved to a position where it does not hinder the insertion and removal of the slide tray 120.

Next, the elevating ring 118 is
Rotated by 46. As a result, the lifting tray 116
Is the probe 1 as shown in FIG. 13 and FIG.
4 is raised to a position where the slide tray 120 is not obstructed.

Next, the slide tray 120 is pulled out as shown in FIG. In this state, replacement of the probe card is performed. The position of the slide tray 120 shown in FIG. 17 can be a position where at least the probe card 12 and the connector 70 are outside the internal space by the frame 30, and preferably a position where the card holder 114 is outside the internal space. can do.

Next, the used probe card 12 and the connector 70 are removed from the card holder 114, and another probe card of the same type and a corresponding connector are placed in the card holder 114 instead.

As described above, when the probe card is replaced with a different type of probe card, the connector is also replaced. This is because the arrangement position of the tester lands of the probe card differs depending on the type of the probe card, and the same connector cannot be used in common for different probe cards. Accordingly, the new connector is capable of connecting the tester land 18 of the new probe card to the second conductor 80 of the repeater 72.

It is not necessary to disconnect the cable 110 from the connector 86 even when exchanging different types of probe cards. Further, since the connecting and detaching work of the connector and the probe card can be performed without being hindered by the frame 30, the pressing plate 44 and the repeater 72, the work of replacing the connector and the probe card is good, and the replacing work is safe. In addition, the replacement work can be performed quickly, and no skill is required.

In the above embodiment, the card holder 114
May be integral with the lifting tray 116. Also, the connector 70 and the relay 72 need not be formed from the two members 76 and 78 and 82 and 84, respectively, which are screwed.

FIG. 18 shows the connection device 170 and the repeater 172.
Are examples formed by wiring boards. The probe card 12 to be inspected using the connector 170 and the repeater 172 has a plurality of connectors 17 each connected to a plurality of probes 14 instead of a tester land.
4 is provided on the upper surface of the wiring board 16.

The connector 170 has on its lower surface a plurality of connectors 176 connected to the connectors 174 of the probe card 12, and has on its upper surface a plurality of connectors 178 connected to the connectors 176 by a wiring pattern. Repeater 172 has a plurality of connectors 180 connected to connector 178 of connector 170 on a lower surface, and has a plurality of connectors 86 connected to connector 180 by a wiring pattern on an upper surface. A cable 110 is connected to each connector 86.

The connectors 174 and 176 and the connectors 178 and 180 are so-called contactless connectors that require little force to connect and disconnect them. One example of such a connector is, for example, Utility Model Registration No. 2576233.
No. However, a general connector may be used instead of such a connector.

In the embodiment shown in FIG. 18, the probe card 12 is inserted into the card holder 114 as shown in FIG.
, The connector 170 and the repeater 172 are overlapped, and the repeater 172 is assembled on the lower surface of the pressing plate 44 with a plurality of screw members, thereby enabling inspection. When connecting the connector 170 and the repeater 172, the connectors 174 and 176 are connected.
178 and 180 are respectively coupled and electrically connected.

The replacement of the probe card 12 may be performed in the same manner as in the above-described embodiment with the connector 170 and the relay 172 raised by the pressing plate 44. When exchanging the probe and the connection plate 170, use the connector 17
In a state where 0 is separated from the repeater 172, the operation may be performed in the same manner as in the above-described embodiment.

In the above embodiment, the connecting device is formed by the connecting device and the repeater, and the repeating device is commonly used for various probe cards. However, the connecting device is prepared for each type of the probe card. Is also good. In this case, the connection device is provided with the functions of the connection device and the repeater.

Referring to FIGS. 20 to 26, instead of connecting the probe 14 to the measurement circuit using the cable 110 shown in FIG. 7, the probe card inspection device 200 includes a plurality of measurement substrates 202 and their measurement. A motherboard 204 for electrically connecting the substrate 202 is arranged on a connection device (in the illustrated example, the repeater 72).

Each measurement board 202 has a probe card 1
One or more measuring circuit elements for transmitting and receiving electric signals to and from the probe card 12 (in particular, the probe 14) via the connector 206 are arranged, and the contact resistance of the probe card 12, particularly, the probe 14 by the measuring circuit elements. A measurement circuit that contributes to the measurement of various characteristics such as described above is formed.

The circuit formed on each measurement board 204 is electrically connected to the probe 14 of the probe card 12 via the connection device by one or more connectors (that is, connection portions) 206. Bazaar board 2 including a plurality of connectors (that is, connection portions) 208
04 is electrically connected.

When a structure for measuring the characteristics of the probe card 12, particularly the probe 14, using one or more measurement boards as described above, the signal line for each probe 14 becomes shorter than when the cable 110 is used. The possibility that noise is mixed into the measurement signal is significantly reduced, and the signal attenuation is significantly reduced.

In the inspection apparatus 200, the function of the drive mechanism 46 is assigned to a plurality of drive mechanisms 210 arranged in the upper frame 36. Each drive mechanism 210 is a cylinder mechanism smaller than the drive mechanism 46. These drive mechanisms 210 are pressing the coupling ring 92, thereby pressing the pressing plate 44. As described above, when a plurality of small driving mechanisms 210 are used, they can be arranged in the upper frame 36, so that the height of the inspection apparatus is reduced.

The inspection apparatus 200 further includes a second Y stage 212 for moving the contact plate 52 in the Y direction. The second Y stage 212 has a pair of Y stages arranged on the X stage 60 so as to extend in parallel in the Y direction.
The guide rail 214 is arranged so as to be movable in the Y direction.

The above-described Y stage 62 and the moving mechanism 66 for moving the Z stage 64 in the vertical direction are disposed on the second Y stage 212, and the guide rail 68 for regulating the vertical movement of the Z stage 64 is also provided. The second Y stage 212 is disposed. When such a stage is used, the contact plate 52 can be moved also in the Y direction.

Referring to FIG. 27, in the inspection apparatus 200, one of the plurality of contact plates 52 is a transparent plate, and one is a conductive metal plate for testing the probe 14,
The other is a polishing plate such as sandpaper. The stage 54 is located below the transparent contact plate 52 in the space 2.
16. The space 216 is open upward.

In the space 216, a needle pressure sensor 218 for detecting the needle pressure acting on the probe 14 for each probe 14,
A box 220 that opens upward is arranged. The stylus pressure sensor 218 is a piezoelectric element 2 mounted on the stage 52.
22 and an inverted L-shaped contact pin 224 coupled to the piezoelectric element 222. Contact pin 224
Has one end face upward, and one end face, that is, the upper face thereof is pressed against the tip of the probe 14, that is, the needle tip.

A television camera 226 such as a CCD camera for photographing the needle point is installed upward on an auxiliary stage 228 arranged in the box 220. The auxiliary stage 228 controls the television camera 226 by X, Y and Z
X, Y, and Z stages 230, 232, and 234 that move in the (up and down) directions are provided.

When detecting the stylus pressure, first, the transparent contact plate 5
The Z stage 64 is moved from the reference position by the stage 54 so that 2 is below the tip of the probe 14.
The amount of movement at this time is stored in a memory provided on the measurement substrate 202.

Next, the television camera 226 is moved from the reference position by the auxiliary stage 228 so that the tip of the probe 14 to be detected is located at a predetermined position in the field of view of the television camera 226. The amount of movement at this time is also stored in a memory provided on the measurement substrate 202.

Next, the Z stage 64 is moved by the stage 54 so that the tip of the probe 14 to be inspected is located above the contact pin 224. The movement amount at this time is performed based on the movement amount stored in the memory so as to correct an error in the coordinate position of the probe 14 to be inspected.

Next, the tip of the probe 14 to be inspected and the upper surface of the contact pin 224 are pressed relatively.
At this time, the tip of the probe 14 and the contact pin 224
Is transmitted to the piezoelectric element 222 via the contact pin 224, and an electric signal corresponding to the needle pressure is generated in the piezoelectric element. This electrical signal value is
The needle pressure is stored in the memory of the measurement substrate 202.

The above-described measurement of the stylus pressure is performed for each probe 14. As described above, the stylus pressure sensor 218 is
In this case, there is no need to provide an arrangement space for the needle pressure sensor 218 in the frame. When the television camera 226 for photographing the tip of the probe 14 is mounted on the auxiliary stage 228 arranged on the stage 54, the television camera 2
26 is moved at least two-dimensionally by the auxiliary stage 228 so that the coordinate position of the probe is
It can be measured every time.

The present invention is not limited to the above embodiment. For example, the present invention can be applied to a probe card inspection apparatus using a probe other than the needle type, for example, a probe of another type such as a blade type or a pin type. Therefore, the present invention can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe card inspection device according to the present invention.

FIG. 2 is a front view of the inspection apparatus shown in FIG.

FIG. 3 is a right side view of the inspection apparatus shown in FIG.

FIG. 4 is a cross-sectional view showing a state where an upper frame of the inspection device is opened.

5 is a longitudinal sectional view of a main part of the inspection device shown in FIG.

FIG. 6 is a sectional view taken along line 6-6 in FIG.

FIG. 7 is an enlarged cross-sectional view near the connection device.

FIG. 8 is a bottom view of FIG. 7;

FIG. 9 is an enlarged sectional view of the connection device and the end of the tray.

FIG. 10 is a plan view of a tray portion in a state where a connecting device is removed.

11 is a sectional view taken along line 11-11 in FIG.

FIG. 12 is a plan view showing the relationship between a lifting tray, a lifting ring, and a slide tray.

FIG. 13 shows a lifting tray with the lifting tray raised.
Diagram showing the relationship between the lifting ring and the slide tray

FIG. 14 is a schematic diagram for explaining a replacement operation of a probe card.

FIG. 15 is a schematic diagram showing a state where a slide tray is pulled out from the state shown in FIG. 14;

FIG. 16 is a schematic diagram for explaining an exchange operation of a probe card and a connector.

FIG. 17 is a schematic diagram showing a state where the slide tray is pulled out from the state shown in FIG. 16;

FIG. 18 is an exploded perspective view showing another embodiment of the connection device used in the present invention.

FIG. 19 is a schematic view showing a state where the connection device of FIG. 18 is arranged in a card holder together with a probe card.

FIG. 20 is a plan view showing another embodiment of the probe card inspection device according to the present invention.

FIG. 21 is a front view of the inspection device shown in FIG. 20;

FIG. 22 is a right side view of the inspection device shown in FIG.

FIG. 23 is a sectional view showing a state in which an upper frame of the inspection device shown in FIG. 20 is opened.

24 is a longitudinal sectional view of the inspection device shown in FIG.

FIG. 25 is an enlarged longitudinal sectional view of a main part of the inspection device shown in FIG. 20;

26 is an exploded longitudinal sectional view of a main part of the inspection device shown in FIG.

FIG. 27 is a longitudinal sectional view showing one embodiment of a stage used in the inspection apparatus shown in FIG. 20;

[Explanation of symbols]

 10, 200 Probe inspection apparatus 12 Probe 14 Probe 20 Case 22 Base 30 Frame 32 Base opening 34 Lower frame 36 Upper frame 38 Shaft 40 Upper frame drive mechanism 44 Press plate 46, 210 Drive mechanism for press plate 52 Contact plate 54 Stage 70, 170 Connector 72, 172 Repeater 74, 80 First and second conductors 76 Connection plate 78 Connection board 82 Relay board 84 Relay board 86 Connector 92 Coupling ring (rotating ring) 94 Support roller 96 Side roller 114 Card holder 130, 132, 138 Positioning pin 134, 136, 140 Positioning hole 202 Measurement board 204 Motherboard 206, 208 Connector (connection part) 218 Needle pressure sensor 226 TV camera 228 Auxiliary station Di

Claims (13)

[Claims] 1. A contact plate with which a probe tip of a probe card contacts, a frame forming a space above the contact plate, the frame being capable of opening and closing the space upward, and a card arranged in the space. A card holder having an opening at a position corresponding to the contact plate and having a receiving portion for receiving the probe card around the opening; and a card holder arranged on the probe card arranged in the card holder. A connection device connected to a probe of the probe card, a pressing plate above the connection device and movably disposed in the frame in a vertical direction, the pressing device being supported by the frame; An inspection device for a probe card, comprising: a pressing body that presses a plate against the connection device. 2. The connection device, wherein the connection device is a plate-shaped connection device disposed above the probe card, the connection device having a plurality of first conductors connected to a probe of the probe card; A plate-like repeater disposed above the connector, comprising a plurality of second conductors connected to the first conductor, the repeater disposed on the frame, and the connector The inspection apparatus according to claim 1, further comprising: a coupling mechanism that releasably couples the repeater. 3. The repeater and the pressing plate are assembled to the pressing plate and the pressing body, respectively.
The inspection device according to claim 1. 4. The inspection device according to claim 2, wherein the repeater includes a plurality of connectors each having a plurality of connection portions connected to the second conductor, on an upper side. 5. The rotating mechanism according to claim 1, wherein the coupling mechanism is a rotating ring supported on the pressing plate or the repeater so as to be rotatable around the connecting device at an angle, and the rotating ring receives the connecting device so as to be relatively movable. The inspection device according to claim 2, further comprising: a connector, wherein the connector is releasably locked to the rotating ring with angular rotation of the rotating ring. 6. The inspection apparatus according to claim 2, wherein the connection device and the relay device have a first positioning portion that positions the two relative to each other. 7. The card holder includes one or more second positioning portions for positioning the probe card with respect to the card holder, and one or more third positioning portions for positioning the connection device with respect to the card holder. The inspection device according to any one of claims 1 to 6, further comprising: 8. The inspection apparatus according to claim 1, further comprising a stage on which the contact plate is arranged, wherein the stage moves the contact plate at least in a vertical direction. 9. A base positioned above the contact plate, the base removably receiving the card holder and having a second opening at a position corresponding to the contact plate, wherein the frame comprises: A lower frame disposed on the base and spaced apart in the left-right direction, and an upper frame disposed on the lower frame to form the space in cooperation with the lower frame, the upper frame supporting the pressing body, and The inspection device according to any one of claims 1 to 8, further comprising an upper frame that opens a space upward. 10. A stage disposed below the probe card, a plurality of contact plates against which the probe tips are pressed, the plurality of contact plates disposed on the stage, The inspection apparatus according to any one of claims 1 to 9, further comprising: a needle pressure sensor which is in contact with a needle tip and senses a needle pressure acting on the probe. 11. The at least one contact plate is a transparent plate, and the inspection apparatus further includes a television camera positioned below the transparent plate for photographing a probe tip of the probe, and the television camera. The inspection apparatus according to claim 10, further comprising an auxiliary stage that moves the television camera at least in a horizontal plane. 12. The inspection apparatus according to claim 4, further comprising a cable coupled to each of the connectors at one end. 13. A plurality of connecting portions electrically connected to the probe card via the connecting device, the plurality of connecting portions being a measurement substrate disposed on the connecting device, and the connecting portion for the probe card. The method according to any one of claims 1, 2, 3, 5, 5, 6, 7, 8, and 9, further comprising one or more measurement substrates on which one or more measurement circuit elements for transmitting and receiving an electric signal are provided. Inspection device as described.