JP2000338497A - Electro-optic device, production of electro-optic device and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent decrease in reliability due to volume changes in an adhesive layer by irradiation with light and to prevent deterioration in the display quality. SOLUTION: A first sealing material 52a having a first glass transition temp. and a second sealing material 52b having a second glass transition temp. lower than the first glass transition temp. are disposed in the sealing region 202 for the gap between a thin film transistor(TFT) array substrate 10 and a counter substrate using a microlens array. Thereby, stress generating in the counter substrate, TFT array substrate 10 or the like due to changes in the adhesive resin layer on the counter substrate with time by irradiation with light or the like can be effectively decreased.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of an electro-optical device, a method of manufacturing an electro-optical device, and an electronic apparatus, and particularly to manufacturing of an electro-optical device such as a liquid crystal device having high reliability and display quality. Belongs to the technical field of methods and electronic equipment.

[0002]

2. Description of the Related Art Generally, in an electro-optical device such as a liquid crystal device, a display area is formed by pixels arranged in a matrix array. For example, a thin film transistor (hereinafter, referred to as a thin film transistor)
It is called TFT. ) As a switching element, a liquid crystal layer is sandwiched between a TFT array substrate and a counter substrate.
A sealing material is provided so as to surround a display area in a gap between the array substrate and the counter substrate. The liquid crystal layer is sealed by this sealing material, and the TFT array substrate and the opposing substrate are joined. For example, a TFT array substrate on which an alignment film is formed and a counter substrate on which an alignment film is formed are disposed to face each other with a sealant interposed therebetween. An electro-optical material such as a liquid crystal composition is injected into the gap between the opposing substrate and the liquid crystal layer is sealed in the gap between the substrates by closing the sealing port.

On the surface of the TFT array substrate and on the surface of the counter substrate, an alignment film made of an organic thin film such as a polyimide thin film or the like, which has been subjected to a predetermined alignment treatment such as a rubbing treatment, for holding liquid crystal molecules. Is provided.
On the TFT array substrate, TFTs, pixel electrodes,
Various wirings are formed, and a driving circuit, a driving circuit connection terminal, and the like are formed outside the wiring. In some cases, the driving circuit, the driving circuit connection terminal, and the like are arranged in a region outside the sealing material of the TFT array substrate.

In order to further improve the efficiency of collecting incident light,
The light incident side substrate may use a microlens array in which one microlens or a plurality of microlenses are arranged corresponding to each pixel. In the light incident side substrate, a flat substrate is generally joined to and integrated with the microlens array substrate on the liquid crystal layer side because the unevenness of the lens affects the orientation of the liquid crystal.

[0005]

However, in the electro-optical device having such a configuration, the pretilt of the liquid crystal molecules varies inhomogeneously due to a manufacturing process, a thermal load during actual use, and light irradiation. In this case, there is a problem that color unevenness occurs and the adhesive resin layer between the microlens array and the flat substrate is deteriorated. FIG. 9 is a diagram for explaining a state in which boundary line-shaped unevenness 206 appears in the display area.

The present invention has been made in view of the above-described problems, and has an electro-optical device having high reliability and display quality.
It is an object to provide a method for manufacturing an electro-optical device and an electronic apparatus.

[0007]

Means for Solving the Problems The inventor has studied based on experiments to solve the above-mentioned problems. As a result, the boundary of the display area is likely to occur when a microlens array is used for the light incident side substrate. As the adhesive resin layer used for joining and integrating the flat substrate and the microlens array, a photocurable resin is generally used. The refractive index of the optical characteristics of the adhesive resin layer is adjusted to about 1.4 or less in order to improve the light-collecting rate of the lens. Naturally, since the adhesive resin layer is designed while suppressing the π-electron conjugated system, it is a straight-chain-based material with few double bonds. Such a resin generally has few linear double bonds and hardly undergoes photopolymerization by light irradiation, so that it is difficult to completely terminate the polymerization reaction. For this reason, it was found that the polymerization reaction further progressed with time by irradiating the adhesive layer of the microlens array with light at the time of actual use, thereby causing a change in volume and density in the adhesive layer. Was. It was also found that such a change in volume and a change in density of the adhesive layer occurred unevenly. Since the deterioration of the joint acts on the flat substrate thinned to improve the light collection rate, stress deformation occurs in the substrate holding the liquid crystal layer, and the pretilt angle of the liquid crystal molecules changes, and It has been found that boundary-shaped unevenness appears. The present invention has been made based on the above-described findings obtained by the inventors based on experiments.

That is, the present invention is an electro-optical device in which an electro-optical material is sandwiched between a pair of first and second substrates, and the pair of substrates is fixed by a sealing material. The microlens array disposed on one of the second substrates is bonded to a flat substrate by an adhesive resin layer, and the sealing material is a first sealing region made of a first resin having a first glass transition temperature. And a second sealing region made of a second resin having a second glass transition temperature lower than the first glass transition point.

By adopting such a configuration, in the electro-optical device according to the present invention, the stress generated in the substrate holding the electro-optical material is reduced by the second seal region of the seal member, and the first seal region is used by the first seal region. The substrate and the second substrate can be fixed with sufficient strength. Generally, a resin material having a higher glass transition temperature (Tg) is harder, and a resin material having a lower glass transition temperature (Tg) is softer. By forming the first sealing region and the second sealing region of the sealing material with materials having different physical properties in this manner, for example, the opposing substrate may be changed due to a temporal change due to light irradiation or the like at a joint between the microlens array and the flat substrate. The stress applied to the first substrate and the like can be effectively reduced.

In particular, in the case of a projection type liquid crystal device called a projector, the effect of a change in the volume of the adhesive layer due to photopolymerization is more remarkably observed, so that the application of the present invention is extremely effective. In the case of a larger electro-optical device, the stress applied to the substrate holding the electro-optical material is large, so that the application of the present invention is extremely effective.

An aspect of the electro-optical device according to the present invention is characterized in that a photo-curable resin is used as an adhesive resin layer for joining and integrating the microlens array and the flat substrate. The adhesive resin layer has a low refractive index of 1.4 or less. For example, an acrylic resin material is used. In the electro-optical device of the present invention, even if a volume change occurs in the adhesive resin layer for joining and integrating the microlens array planar substrates, the stress acting on the substrate holding the liquid crystal layer due to the volume change is compounded. Can be released by a simple sealing member. Therefore, for example, even when photopolymerization occurs in the adhesive layer during actual use, display quality can be ensured.

In another aspect of the electro-optical device of the present invention, the first resin constituting the first region of the sealing member has a first glass transition temperature higher than about 120 ° C. By employing such a configuration, the first substrate and the second substrate can be fixed with sufficient strength. In particular, in the manufacture of a liquid crystal device, which is an example of an electro-optical device, there is a case where a step of once heating a liquid crystal layer as an electro-optical material to about 120 ° C. to realign the liquid crystal layer to improve the uniformity of the alignment is performed. Therefore, in the present invention, it is preferable that the first region of the sealing member is formed by selecting a material having a Tg higher than 120 ° C.
It is more preferable to select and configure a material higher than ° C. The first seal region and the second seal region of the seal member may be configured by combining a plurality of materials.

Examples of the first resin include an epoxy resin or a composite of an epoxy resin and an acrylic resin.

According to another aspect of the electro-optical device of the present invention, the second glass transition temperature of the second resin constituting the second sealing region of the sealing member is in a range of about 50 ° C. to about 80 ° C. It is. In order to effectively reduce the stress by the second seal region of the sealing member, it is preferable that the second seal region is softened to some extent. For example, an electro-optical device such as a liquid crystal device used as a light valve of an electronic device such as a projection type liquid crystal device generally has a temperature of about 50 ° C. to about 8 ° C. when used.
It will be about 0 ° C. Therefore, by setting the Tg of the second sealing region of the sealing member to about 50 ° C. to about 80 ° C., the stress acting on the substrate holding the liquid crystal layer can be released by the composite sealing member. Therefore, for example, even when photopolymerization occurs in the adhesive layer during actual use, display quality can be ensured.

An example of the second resin is an epoxy acrylate resin.

The arrangement of the first seal region and the second seal region of the sealing member may be set as needed, but from the viewpoint of more effectively relieving the stress, the liquid crystal layer in the gap between the substrates is preferably used. It is preferable that about 30% to about 70% of the circumference of is sealed by the second sealing region. In general, the display area is rectangular, and a larger stress is applied to the short side of the seal member than to the long side. Therefore, the ratio between the first seal region and the second seal region of the sealing member may be set according to the aspect ratio of the display region.

The first seal region and the second seal region of the sealing member may be formed not only continuously but also separately. For example, the first member may be disposed intermittently between the four corners of the display area and the middle thereof, and the second seal area may be disposed so as to surround the entire display area.

According to another aspect of the electro-optical device of the present invention, a cross section of the liquid crystal layer parallel to the first surface of the first substrate is substantially rectangular, and the first region of the seal member is The liquid crystal layer is disposed so as to fix at least four corners of the substantially rectangular liquid crystal layer. That is, it is necessary that the sealing member not only relieves stress but also fixes the first substrate and the second substrate with sufficient strength. For this reason, it is preferable to provide first regions having higher rigidity or higher Tg in regions corresponding to the four corners of the display region. By doing so, in the electro-optical device of the present invention, not only can the stress acting on the substrate sandwiching the liquid crystal layer be effectively reduced, but also the first
The substrate and the second substrate can be fixed with sufficient strength. Therefore, display quality and reliability of the electro-optical device can be improved.

In the method of manufacturing an electro-optical device according to the present invention, an electro-optical material is sandwiched between a pair of first and second substrates, and the pair of substrates is fixed by a sealant. A method for manufacturing an electro-optical device in which a microlens array disposed on one of substrates is bonded to a flat substrate and an adhesive resin layer, the display region including a first seal region and a second seal surrounding the display region Disposing a first resin having a first glass transition temperature on the first seal region of at least one substrate having a region, and lowering the first resin on the second seal region with a temperature lower than the first glass transition temperature. Disposing a second resin having a second glass transition temperature; and enclosing liquid crystal inside the seal region in a gap between the first substrate and the second substrate. Do

By employing such a configuration, in the method of manufacturing an electro-optical device according to the present invention, the stress generated on the substrate holding the liquid crystal layer is reduced by the second resin.
The first resin makes it possible to fix the first substrate and the second substrate with sufficient strength. By forming the first sealing region and the second sealing region of the sealing material using materials having different physical properties, For example, it is possible to effectively reduce the stress applied to the first substrate, the second substrate, and the like due to a temporal change due to, for example, bonding of the planar substrate and the microlens array, light irradiation of the integrated adhesive resin layer, and the like. .

Further, a method of manufacturing an electro-optical device according to the present invention
An electro-optical device manufacturing method, comprising: an electro-optical substance sandwiched between a pair of first and second substrates; and the pair of substrates being fixed by a sealant having a first seal region and a second seal region. Disposing a first resin having a first glass transition temperature in the first sealing region on one of the first substrate and the second substrate; and Enclosing an electro-optical material inside the first and second seal regions in a gap with a substrate; and a second seal region having a second glass transition temperature lower than the first glass transition temperature. And a step of disposing the second resin.

In this embodiment, the first resin is first provided in the first seal region, the liquid crystal layer is injected into the gap between the substrates, and then the second resin is filled with the second resin around the liquid crystal layer in the gap between the substrates. Is sealed. When the liquid crystal layer is injected, the second resin is not provided, but the liquid crystal layer is held in a predetermined region by surface tension. In this method, it is not necessary to cover the opening for injecting the liquid crystal layer, so that the productivity of the electro-optical device can be improved. In addition, the first resin,
The second resin may be formed by, for example, a dispensing method or screen printing.

An electronic apparatus according to the present invention includes a light source and an electro-optical device manufactured by the above-described electro-optical device or manufacturing method according to the present invention, in which light emitted from the light source is incident and performs modulation corresponding to image information. It comprises a light valve having a device and projection means for projecting light modulated by the light valve. That is, the electronic apparatus of the present invention is manufactured by the electro-optical device or the manufacturing method according to the present invention, wherein the light from the light source is modulated and guided to the optical system between the light source and the optical system that projects the incident light. With a light valve having the electro-optical device provided.

For example, in the case of a projection type liquid crystal device called a projector, the light intensity of the light source is large, so that the effect of the volume change of the adhesive resin layer for joining and integrating the flat substrate and the microlens array by photopolymerization is more remarkable. . For this reason, by employing the electro-optical device of the present invention employing the sealing member having the stress relaxation ability, the display quality and reliability of the electronic apparatus can be greatly improved.

In particular, in the case of a so-called three-plate type projector that modulates R (red), G (green), and B (blue) light, respectively, a light valve for modulating B light (blue light) having a shorter wavelength is configured. The above-mentioned problem is remarkably observed in the electro-optical device. Therefore, the electro-optical device of the present invention may be selectively applied to an electro-optical device constituting a light valve for modulating B light (blue light).

[0026]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment of Liquid Crystal Device) The configuration and operation of a first embodiment of a liquid crystal device as an example of an electro-optical device according to the present invention will be described with reference to FIGS. 1, 2 and 3. FIG. 1 and 2 are diagrams showing a cross-sectional structure of the liquid crystal device according to the present embodiment, and FIG. 3 is a diagram showing a planar structure of the liquid crystal device shown in FIG. FIG. 2 shows an enlarged cross-sectional structure of the liquid crystal device of the present invention. 1 and 2 correspond to the section taken along line HH 'in FIG.

As shown in FIGS. 1 and 2, on the TFT array substrate 10, a light-transmitting opposing substrate 20, which is a transparent substrate having substantially the same contour as the sealing materials 52a and 52b shown in FIG. A liquid crystal as an electro-optical material is sealed in a space between the TFT array substrate 10 and the opposing substrate 20 and surrounded by the first sealing material 52a and the second sealing material 52b to form a liquid crystal layer 50. You. Liquid crystal layer 50
Takes a predetermined alignment state by the alignment films 15 and 16 when no electric field is applied from the pixel electrode 11 and the counter electrode 25. The liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several kinds of nematic liquid crystals are mixed. First sealing material 52
a, the second sealing material 52b is an adhesive made of, for example, a photo-curing resin or a thermosetting resin for bonding the TFT array substrate 10 and the counter substrate 20 around them. In the present invention, the glass transition temperature of the constituent resin of the first sealant 52a is set to be higher than the glass transition temperature of the constituent resin of the second sealant 52b. In this example, the materials are selected such that the glass transition temperature of the constituent resin of the first sealing material 52a is about 130 ° C. and the glass transition temperature of the constituent resin of the second sealing material 52b is about 70 ° C. Used. Therefore, the rigidity of the first sealing material 52a is larger than the rigidity of the second sealing material 52b. In particular, when the liquid crystal device is used, the temperature rises from about 50 ° C. to about 80 ° C. In this state, the second sealant 52b keeps its shape substantially while the TFT array substrate 10 and the opposing substrate 20 remain.
Is softened to the extent that the stress applied to the substrate can be released.

In this embodiment, the first sealing material 52a is T
g is an epoxy resin higher than about 120 ° C., and the second sealant 52b uses an epoxy acrylate resin having a Tg of 50 ° C. to 80 ° C., preferably about 70 ° C. As the first sealing material 52a, for example, a composite material of an epoxy resin and an acrylic resin having a Tg higher than about 120 ° C. may be used. Further, a spacer such as glass fiber or glass beads for setting the distance between the two substrates to a predetermined value may be mixed into the first sealing material 52a and the second sealing material 52b.

Here, the above-mentioned TFT array substrate 10
For example, the counter substrate 20 is made of, for example, a glass substrate or a quartz substrate. In addition, the opposite substrate 20 includes
A counter electrode (common electrode) 25 is provided over the entire surface, and an alignment film 26 on which a predetermined alignment process such as a rubbing process is performed is provided on a surface on the liquid crystal layer side. The counter electrode is made of, for example, a transparent conductive thin film such as an ITO (Indium Tin Oxide) film. The alignment film is made of an organic thin film such as a polyimide thin film.

As shown in FIGS. 1 and 2, the opposing substrate 2
Reference numeral 0 denotes a structure in which the microlens array 21 and the flat substrate 23 are joined and integrated via an adhesive resin layer 22. The adhesive resin layer 22 is made of, for example, an acrylic resin or the like, and preferably has a low refractive index of 1.4 or less. Also, the flat substrate 23
Is preferably as thin as possible.
μm is preferred. The micro lens array 21 is joined and integrated such that individual lenses correspond to the respective pixel electrodes 11. By improving the light collection efficiency of the incident light by the microlens array 21, a bright liquid crystal device can be realized. Furthermore, the TFT of the microlens array 21
On a surface opposite to the surface facing the array substrate 10, a transparent substrate 2 having substantially the same shape as the counter substrate 20 is interposed via a silicon-based adhesive.
A transparent substrate 206 having substantially the same shape as the TFT array substrate 10 is adhered to the surface of the TFT array substrate 10 (the surface opposite to the surface facing the counter substrate 20) via an adhesive made of a silicon-based material or another member. May be affixed.
These transparent substrates 205 and 206 protect the surface of the counter substrate 20 and the surface of the TFT array substrate 10 from scratches and the like, and also, for example, remove dust adhered to the surfaces when the liquid crystal device is used in a liquid crystal projector or the like. It can be shifted as far as possible from the focal point on the road to prevent them from being clearly displayed on the displayed image.

In FIG. 3, a display region 201 and a seal region 202 are provided on the light-transmissive TFT array substrate 10 as the first substrate so as to surround the display region 201. Seal region 2 on this TFT array substrate 10
02 along the first sealing material 52a and the second sealing material 5
2b is provided. As described above, in the present embodiment, the glass transition temperature of the constituent resin of the first sealing material 52a is the second resin.
The material is selected so as to be higher than the glass transition temperature of the constituent resin of the sealing material 52b, and the rigidity of the first sealing material 52a is higher than the rigidity of the second sealing material 52b.

In the periphery of the display area 201, there is a seal area 202 in which a first seal material 52a and a second seal material 52b are formed so as to surround the display area.
a or a liquid crystal injection port 203 provided by opening a part of the second sealing material 52b. This liquid crystal inlet 2
03 is, for example, the first sealing material 52a and the second sealing material 5
It is closed with a sealing material 52c made of the same or different material as 2b.

By adopting such a configuration, in the liquid crystal device of the present embodiment, the stress generated on the substrate sandwiching the liquid crystal layer is reduced by the second seal member 52b, and the TFT array substrate 10 is formed by the first seal member 52a. And the counter substrate 20 can be fixed with sufficient strength. By forming the sealing material in a composite manner using materials having different physical properties as described above, for example, a change over time due to light irradiation on the adhesive resin layer 22 that joins and integrates the planar substrate 23 and the microlens array 21 is caused. Thus, the stress applied to the flat substrate 23 and the like can be effectively reduced. In particular, in the case of a large-sized liquid crystal device, the stress applied to the substrate sandwiching the liquid crystal layer becomes large, so that the present invention is extremely effective.

First sealing material 52a and second sealing material 5
The 2b arrangement may be set as necessary, but from the viewpoint of more effectively relieving the stress, about 30% to about 70% of the circumference of the liquid crystal layer in the gap between the substrates is formed by the second sealing material. It is preferable to seal with 52b. In this example, since the display area is rectangular, a larger stress is applied to the long side direction of the counter substrate 20 than to the short side direction. Therefore, the proportion of the first seal material 52a and the second seal material 52b may be set according to the aspect ratio of the display area.

(Second Embodiment of Liquid Crystal Device) A second embodiment will be described with reference to FIG. The second embodiment has the same shape as the first embodiment, and the same components are denoted by the same reference numerals, and the description thereof will be omitted. Only different points will be described. FIG.
FIG. 4 is a plan view showing a second embodiment of the liquid crystal device of the present invention.

In this example, the first sealing material 52a and the second sealing material 52b are not disposed so as to continuously fix the periphery of the liquid crystal layer 50 in the gap between the substrates, but are formed separately. I have. The first seal member 52a is intermittently disposed between the four corners of the display area 210 and the middle between the four corners.
2b is provided so as to surround the entire display area 201. With such a configuration, the same operation and effect as those of the liquid crystal device of the present invention illustrated in FIGS. 1 and 3 can be obtained.

In the above-described first and second embodiments, the data area and the scanning line are arranged in the display area 201 so as to intersect vertically and horizontally, and each area surrounded by these wirings has a matrix shape. For example, a plurality of formed ITO
A pixel electrode 11 made of a transparent conductive thin film such as a film and a TFT 30 (see FIG. 2) for controlling the pixel electrode are arranged, and a data line to which an image signal is supplied is electrically connected to a source of the TFT 30. The gate electrode of the scanning line to which the scanning signal is supplied crosses the gate of the TFT.
The alignment film 15 is formed on the TFT 30, the electrodes, and the like via an insulating film.

In a region outside the seal region 202, the data line drive circuit 101 and the drive circuit connection terminal 102
The scanning line driving circuit 104 is provided along one side of the T array substrate 10, for example, along two sides adjacent to the one side. A plurality of wirings 105 for connecting between the scanning line driving circuits 104 provided on both sides of the display area 204 are provided on the remaining one side of the TFT array substrate 10. In at least one location, a conductive material 106 for establishing electrical continuity between the TFT array substrate 10 and the opposing substrate 20.
Is provided.

An inspection circuit or the like for inspecting the quality, defects, etc. of the liquid crystal device during manufacture or shipping may be further formed on the TFT array substrate 10 of the liquid crystal device in the above embodiment. . Further, instead of providing the data line driving circuit 101 and the scanning line driving circuit 104 on the TFT array substrate 10, for example, a driving LSI mounted on a TAB (tape automated bonding substrate) is used.
The connection may be made electrically and mechanically via an anisotropic conductive film provided on the periphery of the TFT array substrate 10. For example, a TN (twisted nematic) mode, an STN (super TN) mode, and a D-STN (double-side) are provided on the side of the opposite substrate 20 on which the projected light is incident and on the side of the TFT array substrate 10 on which the emitted light is emitted, respectively. STN) mode, and normally white mode / normally black mode.
A polarizing film, a retardation film, a polarizing means and the like are arranged in a predetermined direction.

The liquid crystal device in the above embodiment is
For example, since the invention is applied to a color liquid crystal projector (projection display device), three liquid crystal devices are used as light valves for RGB, and each panel is separated via a dichroic mirror for RGB color separation. Light of each color is incident as projection light. Therefore, in this embodiment, the opposing substrate 20 is not provided with a color filter. In particular, in the case of a so-called three-plate type projector that modulates RGB light, respectively, a liquid crystal device constituting a light valve for modulating B light (blue light) having a shorter wavelength causes a change in volume of the adhesive layer 22 and a change caused by the change. The problem of remarkable is seen. Therefore, the liquid crystal device of the present embodiment may be selectively applied to an electro-optical device constituting a light valve for modulating B light (blue light).

Further, an RGB color filter may be formed on a counter substrate 20 in a predetermined area together with its protective film. In this way, the liquid crystal device according to each embodiment can be applied to a color liquid crystal device such as a direct-view or reflection type color liquid crystal television other than the liquid crystal projector. Furthermore,
By depositing a number of interference layers having different refractive indices on the counter substrate 20, a dichroic filter that creates RGB colors using light interference may be formed. According to the counter substrate with the dichroic filter, a brighter color liquid crystal device can be realized.

(Manufacturing Process of Liquid Crystal Device) Next, an example of a manufacturing process of the liquid crystal device having the above-described first and second embodiments will be described with reference to FIGS.

As shown in FIG. 5A, a TFT array substrate 10 such as a quartz substrate or hard glass is prepared. Here, various wirings, elements, and the like are already formed on the TFT array substrate 10. On the other hand, the microlens array 23 is bonded to the flat substrate 20 via the adhesive resin layer 22 on the counter substrate 20. The TFT array substrate 10 and the opposing substrate 20 having such a configuration are each coated with a coating liquid of a polyimide-based alignment film as needed, and then rubbed in a predetermined direction so as to have a predetermined pretilt angle. Orienting film 1 by applying
5 are formed.

On the liquid crystal layer side of the TFT array substrate 10, for example, a sealing region 202 is formed by a dispensing method or the like.
The first sealing material 52a made of a hybrid of an epoxy resin and an acrylic resin is disposed at the four corners and at the intermediate portion.

Next, as shown in step (b), the sealing region 202 on one of the liquid crystal layers of the TFT array substrate 10 and the counter substrate 20 is completely covered except for an opening 203 for injecting liquid crystal. As described above, the second sealing material 52b is disposed in a region between the first sealing materials 52a by, for example, a dispense method. Thereby, the first sealing material 52a and the second sealing material 52b except for the opening 203 of the sealing region 202 are formed.
And will be covered with.

Next, as shown in step (c), the TFT array substrate 10 and the opposing substrate 2 are arranged such that the mutual alignment films face each other.
0 and the counter substrate 2 and the TFT array substrate 10
After the first and second sealing materials 52a and 52b are attached to each other, the sealing material is cured by applying ultraviolet light or light. And by vacuum suction etc.
A liquid crystal obtained by mixing, for example, a plurality of types of nematic liquid crystals is injected into a gap between the TFT array substrate 10 and the opposing substrate 20 via a liquid crystal injection port 203 (see FIG. 3).

Then, as shown in step (d), the liquid crystal injection port 203 is closed with a sealing material 52c (see FIG. 3).
A liquid crystal layer 50 having a predetermined thickness is formed between the FT array substrate 10 and the counter substrate 20. Thereafter, the liquid crystal on the surface adhered at the time of liquid crystal injection is removed by washing.

Thereafter, as shown in step (e) of FIG.
A transparent substrate 205 disposed on the surface of the opposite substrate 20 opposite to the liquid crystal layer side via a silicon-based adhesive may be attached. Further, a transparent substrate may be attached to the surface of the TFT array substrate 10 on the side opposite to the liquid crystal layer side via an adhesive made of silicon or another member. By employing such a configuration, in the method of manufacturing a liquid crystal device according to the present invention, the stress generated in the TFT array substrate 10 or the opposing substrate 20 that sandwiches the liquid crystal layer 50 is reduced by the second sealing material 52b and the first sealing material 52b is used. The material allows the TFT array substrate 10 and the counter substrate 20 to be fixed with sufficient strength. Therefore, the opposing substrate 2 is caused by a temporal change in volume due to a photopolymerization reaction occurring in the adhesive resin layer 22 that joins and integrates the flat substrate 23 and the microlens array 21.
0, the stress applied to the TFT array substrate 10 and the like can be effectively reduced. Therefore, the reliability of the liquid crystal device can be improved, and the appearance of boundary line-like unevenness can be prevented, and the display quality can be improved. In the above process, T
Although the first and second seal materials are formed on the FT array substrate 10, the first and second seal materials may be formed on the counter substrate 20 side, and the TFT array substrate 10 and the counter substrate 20 may be bonded to each other. Alternatively, after forming one of the first sealant and the second sealant on the TFT array substrate 10 and the other on the opposing substrate 20, the TFT array substrate 10 and the opposing substrate 20 may be bonded and fixed.

(Another Manufacturing Process of Liquid Crystal Device) Next, another example of a manufacturing process of the liquid crystal device will be described with reference to FIG.

As shown in FIG. 7A, a TFT array substrate 10 such as a quartz substrate or hard glass is prepared. Here, various wirings, elements, and the like are already formed on the TFT array substrate 10, and the microlens array 21 is also bonded to the counter substrate 20 by the adhesive resin layer 22 by the flat substrate 25. In some cases, a coating liquid of a polyimide-based alignment film is applied to the entire surface of the TFT array substrate 10 and the counter substrate 20, and then a rubbing process is performed so as to have a predetermined pretilt angle and in a predetermined direction. 15 will be described as having been formed.

For example, a first sealing material 52a made of a hybrid of an epoxy resin and an acrylic resin is formed on the liquid crystal layer side of the TFT array substrate 1 at the four corners and an intermediate portion of the inner area of the sealing area 202 by a dispensing method or the like.
(See FIG. 4).

Next, as shown in step (b), the TFT array substrate 10 and the opposing substrate 2 are arranged such that the mutual alignment films face each other.
0 and the counter substrate 2 and the TFT array substrate 10
0 is bonded with the first sealing material 52a, and the sealing material is cured by applying ultraviolet light or light and fixed. Then, a liquid crystal obtained by mixing a plurality of types of nematic liquid crystals is injected into the gap between the TFT array substrate 10 and the opposing substrate 20 by vacuum suction or the like.

Then, as shown in step (c), the second sealing material 52b is provided by, for example, a dispense method so that the sealing region 202 on the TFT array substrate 10 is completely covered. Thereafter, the liquid crystal on the surface adhered at the time of liquid crystal injection is removed by washing. That is, the second sealing material 52
b is formed on the entire periphery of the seal region 202, and the first seal material is formed intermittently inside the seal region 202. In this embodiment, the step of sealing the opening for injecting the liquid crystal is not required, so that the productivity of the liquid crystal device can be improved.

Then, as shown in step (d), the transparent substrate 205 disposed on the opposite substrate 20 via a silicon-based adhesive may be attached. Also, the TFT array substrate 1
A transparent substrate may be attached to the surface of the substrate 0 via an adhesive made of silicon or another member. By adopting such a configuration, in the method of manufacturing an electro-optical device according to the present invention, the TFT array substrate 1 holding the liquid crystal layer 50 is sandwiched.
0 or the stress generated in the counter substrate 20 by the second sealing material 52.
b, and the first sealing material makes the TFT
The array substrate 10 and the counter substrate 20 can be fixed with sufficient strength. Therefore, the stress applied to the opposing substrate 20, the TFT array substrate 10, and the like due to a temporal change in volume caused by a photopolymerization reaction generated in the adhesive resin layer 22 that joins and integrates the flat substrate 23 and the microlens array 21 is effectively reduced. Can be effectively reduced. Therefore, the reliability of the liquid crystal device can be improved, and the appearance of boundary line-like unevenness can be prevented, and the display quality can be improved. In the above process, the first sealant was formed on the TFT array substrate 10, but the twelfth sealant was formed on the counter substrate 20 side, and the TF
The T array substrate 10 and the opposing substrate 20 may be bonded.

(Electronic Apparatus) As an example of an electronic apparatus using the above-described liquid crystal device, a configuration of a projection display device will be described with reference to FIG. In FIG. 8, a projection display device 1100 has three liquid crystal devices described above,
FIG. 3 is a schematic configuration diagram of an optical system of a projection type liquid crystal device used as the liquid crystal devices 962R, 962G, and 962B for B.

The optical system of the projection display apparatus of this embodiment employs the above-described light source device 920 and the uniform illumination optical system 923. The projection display apparatus further includes a color separation optical system 924 as a color separation unit that separates the light beam W emitted from the uniform illumination optical system 923 into red (R), green (G), and blue (B). Three light valves 925R, 925G, 9 as modulation means for modulating each color light flux R, G, B
25B, a color synthesizing prism 910 as a color synthesizing means for re-synthesizing the modulated color light flux, and a projection lens unit 906 as a projection means for enlarging and projecting the synthesized light flux onto the surface of the projection surface 100. I have. Further, a light guide system 927 for guiding the blue light flux B to the corresponding light valve 925B.
Is also provided. As described above, in the liquid crystal device constituting the light valve 925B corresponding to the blue light flux B, a problem caused by a volume change due to photopolymerization of the adhesive layer 22 of the microlens array 21 is remarkably observed. Therefore, the present invention may be selectively applied to the liquid crystal device constituting the light valve 925B.

The uniform illumination optical system 923 includes two lens plates 921, 922 and a reflection mirror 931. The two lens plates 921, 922 are arranged so as to be orthogonal to each other with the reflection mirror 931 interposed therebetween. Uniform illumination optical system 923
The two lens plates 921 and 922 each include a plurality of rectangular lenses arranged in a matrix. The light beam emitted from the light source device 920 is transmitted to the first lens plate 92.
The light is split into a plurality of partial light beams by one rectangular lens.
Then, these partial light beams are divided into three light valves 925R and 925R by the rectangular lens of the second lens plate 922.
Superimposed around 5G and 925B. Therefore, by using the uniform illumination optical system 923, even when the light source device 920 has an uneven illuminance distribution in the cross section of the emitted light beam, the three light valves 925R, 925G, and 925B are used.
Can be illuminated with uniform illumination light.

Each color separation optical system 924 includes a blue-green reflecting dichroic mirror 941, a green reflecting dichroic mirror 942, and a reflecting mirror 943. First, in the blue-green reflecting dichroic mirror 941, the blue light beam B and the green light beam G included in the light beam W are reflected at right angles, and head toward the green reflecting dichroic mirror 942. The red light beam R passes through the mirror 941, is reflected at a right angle by the rear reflection mirror 943, and is emitted from the emission unit 944 of the red light beam R to the prism unit 910 side.

Next, the green reflection dichroic mirror 942
Of the blue and green light fluxes B and G reflected by the blue-green reflection dichroic mirror 941,
Only the green light beam G is reflected at a right angle, and is emitted from the emission unit 945 of the green light beam G to the color combining optical system side. The blue light flux B that has passed through the green reflection dichroic mirror 942 is emitted from the emission section 946 of the blue light flux B to the light guide system 927 side. In this example, the emission portions 944 and 94 of the color light beams in the color separation optical system 924 from the emission portion of the light beam W of the uniform illumination optical element.
The distances to 5,946 are set to be substantially equal.

The red and green luminous flux R of the color separation optical system 924
Condensing lenses 951 and 952 are arranged on the emission sides of the G emission sections 944 and 945, respectively. Therefore,
The red and green luminous fluxes R and G emitted from the respective emission sections are incident on these condenser lenses 951 and 952 and are parallelized.

The red and green luminous fluxes R and G thus collimated enter the light valves 925R and 925G and are modulated to add image information corresponding to each color light. That is, the switching of these liquid crystal devices is controlled by driving means (not shown) in accordance with the image information, whereby each color light passing therethrough is modulated. On the other hand, the blue light flux B is guided to the corresponding light valve 925B via the light guide system 927, where it is similarly modulated according to image information. In addition, the light valve 925 of this example
R, 925G, and 925B further include a liquid crystal light further including incident-side polarization units 960R, 960G, and 960B, emission-side polarization units 961R, 961G, and 961B, and liquid crystal devices 962R, 962G, and 962B disposed therebetween. It is a valve.

The light guide system 927 is a light emitting section 94 for the blue light beam B.
No. 6, a condenser lens 954 disposed on the exit side, an incident-side reflection mirror 971, an exit-side reflection mirror 972, an intermediate lens 973 disposed between these reflection mirrors, and a front side of the light valve 925B. And a condenser lens 953. The blue light flux B emitted from the condenser lens 946 is transmitted through the light guide system 927 to the liquid crystal device 962B.
And modulated. The optical path length of each color beam, that is,
Each liquid crystal device 962R, 962G, 9
The distance to 62B is the longest for the blue luminous flux B, and therefore the loss of light quantity of the blue luminous flux is the largest. However, by interposing the light guide system 927, the loss of light amount can be suppressed.

Each light valve 925R, 925G, 92
The color light fluxes R, G, and B modulated through 5B are incident on a color combining prism 910, where they are combined. The light combined by the color combining prism 910 is enlarged and projected on the surface of the projection surface 100 at a predetermined position via the projection lens unit 906.

In the liquid crystal projector having such a configuration, each light valve has the configuration of the present invention, thereby preventing deterioration in reliability and display quality due to a volume change in the adhesive layer 22 due to light irradiation. Can be.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an example of a cross-sectional structure of a TFT array substrate of a liquid crystal device according to an embodiment of the present invention.

FIG. 2 is an enlarged view showing an example of a cross-sectional structure of a TFT array substrate of a liquid crystal device according to an embodiment of the present invention.

FIG. 3 is a plan view of a TFT array substrate of a liquid crystal device according to an embodiment of the present invention, together with components formed thereon, viewed from a counter substrate side.

FIG. 4 shows a TFT of a liquid crystal device according to a second embodiment of the present invention.
FIG. 3 is a plan view of an array substrate together with components formed thereon viewed from a counter substrate side.

FIG. 5 is a process diagram (part 1) for sequentially illustrating the manufacturing process of the liquid crystal device according to the embodiment;

FIG. 6 is a process diagram (part 2) for sequentially illustrating the manufacturing process of the liquid crystal device according to the embodiment;

FIG. 7 is a process diagram (part 1) for sequentially illustrating the manufacturing process of another embodiment of the liquid crystal device.

FIG. 8 is a diagram illustrating a configuration of a projection display device which is an example of an electronic apparatus using the liquid crystal device of the present invention.

FIG. 9 is a reference diagram for explaining effects of the present invention.

[Explanation of symbols]

 Reference Signs List 10 TFT array substrate 11 Pixel electrode 15 Alignment film 16 Alignment film 20 Counter substrate 21 Microlens array 22 Adhesive resin layer 23 Planar glass 24 Shield film 25 Counter electrode 30 Thin film transistor (TFT) 50 ... Liquid layer 52a ... First sealant 52b ... Second sealant 52c ... Third sealant 201 ... Display area 202 ... Seal area 205 ... Transparent substrate (cover glass)

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H04N 5/74 H04N 5/74 K 5C094 9/31 9/31 B F term (Reference) 2H089 LA15 LA24 LA42 MA01Y MA07Y NA25 NA42 NA44 NA53 QA04 QA14 RA05 RA10 TA04 TA09 TA12 TA14 TA15 TA16 UA05 2H090 JA09 JA13 JB02 JC17 JC19 JD14 KA05 KA08 LA02 LA04 LA06 LA09 LA12 LA15 LA16 MB01 2H091 FA02Y FA08X FA08GA11 GA11 GA07 GA11 MA07 5C058 AA08 AB06 BA06 BA35 EA26 5C060 AA08 BA04 BB13 BC05 BD02 BE05 BE10 DA04 DB12 EA01 GA02 GB06 HC10 HC21 JA25 JB06 5C094 AA03 BA03 BA43 CA19 DA07 EC02 ED01 FB01 GB01 JA08 JA13 JA20

Claims (14)

[Claims] 1. An electro-optical device comprising an electro-optical material sandwiched between a pair of first and second substrates, wherein the pair of substrates are fixed by a sealant, wherein the first and second substrates are provided. A microlens array disposed on one of the substrates is bonded to a flat substrate and an adhesive resin layer, wherein the sealing material is a first sealing region made of a first resin having a first glass transition temperature; An electro-optical device, comprising: a second sealing region made of a second resin having a second glass transition temperature lower than the first glass transition point. 2. The electro-optical device according to claim 1, wherein the adhesive resin layer is made of a photocurable resin. 3. The electro-optical device according to claim 1, wherein a refractive index of the adhesive resin layer is 1.4 or less. 4. A flat substrate having a thickness of 20 μm to 200 μm.
The electro-optical device according to any one of claims 1 to 3, wherein m is m. 5. The electro-optical device according to claim 1, wherein a first glass transition temperature of the first resin is higher than about 120 ° C. 6. The electric power according to claim 1, wherein the second glass transition temperature of the second resin ranges from about 50 ° C. to about 80 ° C. Optical device. 7. The electro-optical device according to claim 1, wherein the first resin includes an epoxy-based resin. 8. The electro-optical device according to claim 1, wherein the first resin contains an epoxy resin and an acrylic resin. 9. The electro-optical device according to claim 1, wherein the second resin includes an epoxy acrylate-based resin. 10. The electro-optical material has a substantially rectangular cross-sectional shape parallel to the plane of the first substrate, and the first sealing region of the sealing material is fixed to at least four corners of the substantially rectangular electro-optical material. The electro-optical device according to any one of claims 1 to 9, wherein the electro-optical device is arranged so as to perform the following. 11. An electro-optical material is sandwiched between a pair of first and second substrates, the pair of substrates is fixed by a sealant, and is disposed on one of the first and second substrates. A microlens array is an electro-optical device that is bonded to a flat substrate and an adhesive resin layer, wherein the sealing material is disposed so as to partially surround a periphery of the electro-optical material. The first with
A first sealing region made of a resin having a second glass transition temperature having a second glass transition temperature lower than the first glass transition point and disposed around the electro-optical material. An electro-optical device comprising: a second sealing region made of a second resin. 12. An electro-optical material is sandwiched between a pair of first and second substrates, the pair of substrates is fixed by a sealant, and is disposed on one of the first and second substrates. A microlens array is a method for manufacturing an electro-optical device, wherein the microlens array is bonded to a flat substrate with an adhesive resin layer, wherein the microlens array includes a display region and at least one substrate having a first seal region and a second seal region surrounding the display region. Disposing a first resin having a first glass transition temperature in a first seal region; and providing a second resin having a second glass transition temperature lower than the first glass transition temperature in the second seal region. 2. A method of manufacturing an electro-optical device, comprising: disposing a second resin; and sealing liquid crystal inside the seal region in a gap between the first substrate and the second substrate. 13. An electro-optical device in which an electro-optical material is sandwiched between a pair of first and second substrates, and the pair of substrates is fixed by a sealing material having a first seal region and a second seal region. Providing a first resin having a first glass transition temperature in the first sealing region on one of the first substrate and the second substrate; and Encapsulating an electro-optical material inside the first and second sealing regions in a gap between a substrate and the second substrate; and a second glass having a temperature lower than the first glass transition temperature in the second sealing region. Disposing a second resin having a transition temperature; and a method for manufacturing an electro-optical device. 14. A light source, an optical system for projecting incident light, and an optical system interposed between the light source and the optical system, for modulating light from the light source to guide the light to the optical system. A light valve having the electro-optical device according to any one of claims 11 or the electro-optical device manufactured by the manufacturing method according to any one of claims 12 to 13. And electronic equipment.