JP2000313960A5 - - Google Patents

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Publication number
JP2000313960A5
JP2000313960A5 JP1999120523A JP12052399A JP2000313960A5 JP 2000313960 A5 JP2000313960 A5 JP 2000313960A5 JP 1999120523 A JP1999120523 A JP 1999120523A JP 12052399 A JP12052399 A JP 12052399A JP 2000313960 A5 JP2000313960 A5 JP 2000313960A5
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JP
Japan
Prior art keywords
oxide film
forming
tin oxide
raw material
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999120523A
Other languages
English (en)
Japanese (ja)
Other versions
JP4292623B2 (ja
JP2000313960A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP12052399A priority Critical patent/JP4292623B2/ja
Priority claimed from JP12052399A external-priority patent/JP4292623B2/ja
Publication of JP2000313960A publication Critical patent/JP2000313960A/ja
Publication of JP2000313960A5 publication Critical patent/JP2000313960A5/ja
Application granted granted Critical
Publication of JP4292623B2 publication Critical patent/JP4292623B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP12052399A 1999-04-27 1999-04-27 酸化スズ膜の成膜方法 Expired - Fee Related JP4292623B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12052399A JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12052399A JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

Publications (3)

Publication Number Publication Date
JP2000313960A JP2000313960A (ja) 2000-11-14
JP2000313960A5 true JP2000313960A5 (enExample) 2005-05-19
JP4292623B2 JP4292623B2 (ja) 2009-07-08

Family

ID=14788373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12052399A Expired - Fee Related JP4292623B2 (ja) 1999-04-27 1999-04-27 酸化スズ膜の成膜方法

Country Status (1)

Country Link
JP (1) JP4292623B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2856057B1 (fr) * 2003-06-13 2007-03-30 Saint Gobain Traitement par projection de panneaux poses sur un support barriere
US8557328B2 (en) * 2009-10-02 2013-10-15 Ppg Industries Ohio, Inc. Non-orthogonal coater geometry for improved coatings on a substrate
KR101541155B1 (ko) 2012-12-13 2015-08-06 엘아이지인베니아 주식회사 원자층 증착장치

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