JP2000288341A - Removing of ammonia in ammonia-containing exhaust gas - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a facility and method of removing ammonia in an ammonia-containing exhaust gas capable of preventing the outflow of ammonia even at a time of the stop of the ammonia-removing operation. SOLUTION: The facility is equipped with a packed cylinder 1 for removing a harmful component other than ammonia in exhaust gas, an oxygen introducing part 2 for adding oxygen-containing gas to the exhaust gas led out of the packed cylinder 1, an ammonia decomposing cylinder 3 reacting ammonia with oxygen to decompose the same and the bypass route 7 connecting the upstream part of the inlet portion of the packed cylinder and the downstream part of the outlet portion thereof through a bypass valve 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and method for removing ammonia-containing exhaust gas, and more particularly, to an ammonia-containing exhaust gas discharged from a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, and the like, and particularly to a method for removing ammonia at a relatively high concentration. The present invention relates to an apparatus and a method for performing detoxification treatment of exhaust gas containing a trace amount of a silicon compound such as monosilane or dichlorosilane or an organic metal compound such as trimethylgallium as other harmful components.

[0002]

2. Description of the Related Art As an apparatus for performing an abatement treatment of an ammonia-containing exhaust gas discharged from a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, or the like, a remover for removing harmful components other than ammonia in the exhaust gas. And an oxygen introduction unit for adding an oxygen-containing gas to exhaust gas derived from the filling cylinder, and an oxidation catalyst for reacting the added oxygen and ammonia to decompose ammonia into nitrogen and water. An apparatus provided with an ammonia decomposition tube is known. It is preferable for safety reasons that such an abatement apparatus is kept in a purged state with nitrogen gas when the abatement operation is stopped, that is, when the abatement processing of the exhaust gas is not performed.

[0003] However, if a large amount of ammonia is physically adsorbed to the removing agent in the filling cylinder, the ammonia desorbed from the removing agent accompanies the nitrogen gas during the nitrogen purge during the stop of the detoxification operation. Spilled from

[0004] For this reason, the ammonia decomposing cylinder is operated even when the detoxification operation is stopped. However, energy for maintaining the ammonia decomposing cylinder at a predetermined temperature is required. This will accelerate the deterioration of

On the other hand, such an abatement apparatus is provided with an emergency abatement means in case an abnormality occurs in the filling cylinder or the ammonia decomposition cylinder. Can be used to prevent the outflow of ammonia, but it is not preferable from the viewpoint of security because the abatement agent for emergency use may be exhausted and cannot be used in an emergency.

Accordingly, an object of the present invention is to provide an apparatus and method for removing ammonia-containing exhaust gas that can prevent the outflow of ammonia even when the removal operation is stopped.

[0007]

Means for Solving the Problems In order to achieve the above object, the present invention provides an abatement system for an exhaust gas containing ammonia, which is for performing an abatement treatment of an exhaust gas containing at least ammonia as a harmful component. A filling cylinder filled with a remover for removing harmful components other than ammonia in the exhaust gas, an oxygen introducing section for adding an oxygen-containing gas to the exhaust gas derived from the filling cylinder, and reacting the added oxygen with the ammonia. An ammonia decomposition cylinder filled with an oxidation catalyst that decomposes ammonia into nitrogen and water, and a bypass path connecting an inlet upstream and an outlet downstream of the charging cylinder via a bypass valve is provided. It is characterized by.

Furthermore, the ammonia-containing exhaust gas abatement apparatus of the present invention is characterized in that an auxiliary filling cylinder filled with a remover for removing harmful components in the exhaust gas is provided in the bypass path.

Further, the method for abating an ammonia-containing exhaust gas of the present invention is characterized in that a plurality of filled cylinders filled with a remover for removing harmful components other than ammonia in the exhaust gas are provided in parallel in a switchable manner, A detoxification device equipped with an oxygen introduction unit that adds an oxygen-containing gas to exhaust gas derived from the reactor, and an ammonia decomposition tube filled with an oxidation catalyst that reacts the added oxygen with ammonia to decompose ammonia into nitrogen and water A method for removing ammonia-containing exhaust gas by removing the route of exhaust gas to be introduced into the filling cylinder from an operating filling cylinder to an unused filling cylinder when the operation of the ammonia decomposition cylinder is stopped. And

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a system diagram showing a first embodiment of an ammonia-containing exhaust gas abatement apparatus of the present invention. This abatement apparatus comprises a filling cylinder 1 filled with a removing agent for removing harmful components other than ammonia in exhaust gas, and an oxygen introducing section 2 for adding an oxygen-containing gas to exhaust gas derived from the filling cylinder 1.
And an ammonia decomposing cylinder 3 filled with an oxidation catalyst for reacting the added oxygen with ammonia to decompose ammonia into nitrogen and water, and an emergency abatement cylinder 4 used when an abnormality occurs in the charging cylinder 1. An emergency ammonia abatement cylinder 5 used when an abnormality occurs in the ammonia decomposition cylinder 3, an upstream of an inlet valve 1a provided at an inlet of the filling cylinder 1, and a downstream of an outlet valve 1b provided at an outlet. And a bypass path 7 for connecting the same via a bypass valve 6.

Although not shown, the ammonia decomposition cylinder 3, the emergency abatement cylinder 4, and the emergency ammonia abatement cylinder 5
Are provided with an inlet valve and an outlet valve, respectively, and are switched between a normal operation and an emergency. The oxygen introduction section 2 is also provided with an introduction valve.
Is provided with a heating means for maintaining the oxidation catalyst at a predetermined temperature. Further, as each valve, either an automatic valve or a manual valve can be used.

The normal abatement operation is performed by the inlet valve 1a of the filling cylinder 1.
The operation is performed with the outlet valve 1b opened and the bypass valve 6 closed. That is, the ammonia-containing exhaust gas flowing from the inlet path 8 is introduced into the filling cylinder 1 through the inlet valve 1a, and harmful components other than ammonia are removed from the exhaust gas by the removing agent filled in the filling cylinder 1. . The exhaust gas flowing out of the filling cylinder 1 through the outlet valve 1b is mixed with an oxygen-containing gas introduced from the oxygen introducing section 2, introduced into the ammonia decomposition cylinder 3, and oxidized in the ammonia decomposition cylinder 3. Oxygen and ammonia react with the catalyst and are decomposed into harmless nitrogen and water to remove ammonia. As a result, gas from which harmful components in the exhaust gas have been removed flows out of the ammonia decomposition column 3 to the outlet passage 9.

The removing agent to be filled in the filling cylinder 1 is a substance which removes harmful components other than ammonia by adsorption, or a harmless component which is harmless by a chemical reaction.
Any substance that can be converted into a substance that does not adversely affect the ammonia decomposition reaction by the oxidation catalyst in the ammonia decomposition cylinder 3 can be appropriately selected according to the harmful components contained in the exhaust gas. Those containing calcium, sodium hydroxide, iron oxide, manganese oxide or the like as a main component of reaction can be used.

The oxygen-containing gas introduced from the oxygen introducing section 2 may be any gas that can supply oxygen necessary and sufficient for the decomposition reaction of ammonia, and a gas having an arbitrary composition may be used according to the ammonia content in the exhaust gas. Can be pure oxygen or air. Furthermore, the ammonia decomposition cylinder 3
Any suitable oxidation catalyst can be used as the oxidation catalyst. For example, a metal oxide or complex oxide such as copper oxide, chromium oxide, manganese oxide, or iron oxide, or a simple substance such as palladium or platinum can be used. Those having a main component can be used.

When the operation of the abatement apparatus is stopped by stopping the operation of the semiconductor manufacturing apparatus or the like, the exhaust gas in the pipe from the semiconductor manufacturing apparatus or the like to the inlet path 8 is purged by the introduction of the purge gas to remove harmful components in the exhaust gas. After the harm treatment is completed, the inlet valve 1a and the outlet valve 1b of the filling tube 1 are closed and the bypass valve 6 is opened, and the gas (purge gas) flowing from the inlet passage 8 is passed through the bypass passage 7 without passing through the filling tube 1. This is performed by flowing the ammonia into the ammonia decomposition tube 3.

As described above, since the purge gas flowing through the abatement apparatus is passed through the bypass path 7 without passing through the filling cylinder 1, the ammonia physically adsorbed to the removing agent in the filling cylinder 1 is removed. Even if desorbed from the remover, the inlet valve 1a
And between the outlet valve 1b and
Ammonia is no longer entrained in the gas flowing out of the outlet path 9. In addition, the ammonia in the filling cylinder 1 desorbed from the removing agent during the stop is sent to the ammonia decomposition cylinder 3 and decomposed during the detoxification operation.

FIG. 2 is a system diagram showing a second embodiment of the apparatus for removing ammonia-containing exhaust gas of the present invention. In the following description, the same components as those of the first embodiment will be denoted by the same reference numerals, and detailed description will be omitted.

In the abatement apparatus shown in this embodiment, an auxiliary filling cylinder 10 smaller than the filling cylinder 1 is provided in the bypass path 7. The auxiliary filling cylinder 10 is filled with the same removing agent as the removing agent filled in the filling cylinder 1 or a removing agent capable of adsorbing or decomposing the entire harmful component including ammonia. , Auxiliary filling cylinder 10
Are provided with a bypass inlet valve 6a and a bypass outlet valve 6b, respectively.

As described above, by providing the auxiliary filling cylinder 10 in the bypass passage 7, the outflow of ammonia from the filling cylinder 1 can be prevented, and even if harmful components remaining in the piping flow through the bypass passage 7, Since it can be removed by the removing agent filled in the auxiliary filling cylinder 10,
It is possible to more reliably prevent the harmful component from flowing out.

Since the gas flows into the auxiliary filling cylinder 10 after the purge gas is introduced after the operation of the semiconductor manufacturing apparatus or the like is stopped, the inflow of the harmful component is small, and the filling amount of the removing agent is small. Even if the amount is small, a sufficient effect can be obtained. Further, in the first embodiment, it is necessary to completely switch the bypass path 7 after purging the exhaust gas in the pipe. However, in the present embodiment, the switching can be performed when a certain amount of the exhaust gas is purged. In addition, the time required for terminating the abatement operation can be reduced.

FIG. 3 is a system diagram showing one example of an apparatus to which the method for removing ammonia-containing exhaust gas of the present invention is applied. This abatement apparatus is provided with two filling cylinders 1 and 11 filled with a removing agent for removing harmful components other than ammonia in exhaust gas in parallel so as to be switchable, and has inlet valves 1a and 1
One of the filling cylinders 1 and 11 is formed so as to perform an operation of removing harmful components by switching between the opening and closing of the outlet valves 1a and the outlet valves 1b and 11b.

As described above, in the abatement apparatus provided with a plurality of filling cylinders, when one of the filling cylinders reaches the limit, the operation of removing the harmful component by the other filling cylinder is started, and the filling cylinder which has reached the limit is started. Is immediately replaced, so that one of the filling cylinders is in an unused state in a normal operation state. That is, when one filling cylinder 1 is in use, the other filling cylinder 11 is in an unused state, and during operation of the abatement apparatus, the inlet valve 1a and the outlet valve 1b are open, and the inlet valve 11a and the outlet The valve 11b is closed.

Therefore, when the operation of the abatement apparatus is terminated, the inlet valve 1a and the outlet valve 1b are closed, and the inlet valve 11a and the outlet valve 11b are opened, so that the purge gas is discharged from the unused filling cylinder 11. As a result, the used filling cylinder 1 is sealed between the inlet valve 1a and the outlet valve 1b, so that the ammonia desorbed from the removing agent in the filling cylinder 1 does not flow out. .

In this case, too, the amount of the harmful component flowing into the unused filling cylinder 11 is extremely small, so that the removing agent in the filling cylinder 11 hardly deteriorates, and the switching of the normal removal operation is not performed. It can be done without any problems.

[0025]

EXAMPLE 1 A stainless steel column having an inner diameter of 43 mm and a length of 690 mm was filled with a removing agent containing iron oxide and manganese oxide as a main component at a filling height of 100 mm. At a filling height of 200 mm. This was used as a filling cylinder for removing silicon compounds such as monosilane and dichlorosilane and organic metal compounds. In a stainless steel column having an inner diameter of 43 mm and a length of 790 mm, a catalyst N-150 manufactured by Nissan Gardler Catalyst Co., Ltd. was placed.
(Main component: iron 40% by weight, manganese 22% by weight) was filled to a filling height of 300 mm to form an ammonia decomposition tube. An electric annular furnace is installed around the ammonia decomposition tube, a thermocouple is inserted into the center of the catalyst, and the filling tube and the ammonia decomposition tube are connected by a pipe with an air supply branch pipe that serves as an oxygen introduction section. did. Further, as shown in FIG. 1, an inlet valve and an outlet valve were provided on both sides of the column, and an upstream side of the inlet valve and a downstream side of the outlet valve were connected by a bypass path having a bypass valve.

The electric annular furnace is operated to reduce the temperature of the catalyst to 20.
While maintaining the temperature at 0 ° C. and supplying air at 86.0 liters per minute from the air supply branch pipe, with the bypass valve closed and the inlet and outlet valves open, ammonia 10.0 %, 0.1% of a silicon compound such as monosilane or dichlorosilane, and 0.01% of trimethylgallium were introduced into the filling cylinder at a rate of 871 ml / min. At this time, the linear velocity of the empty cylinder is 1.0 cm / sec in the first filling cylinder and about 1 cm / sec in the second ammonia decomposition cylinder.
0 cm. The concentration of ammonia in the gas flowing into the ammonia decomposition column is about 100
It is 0 ppm.

The gas derived from the ammonia decomposition cylinder at the subsequent stage is sampled every 20 minutes, and the ammonia is detected by an ammonia gas detection alarm (manufactured by Bionics Instruments Co., Ltd .: TG-
2400 BA, detection limit 7.5 ppm) and monosilane gas chromatograph with a potentiostatic electrolytic detector (manufactured by Gastech Co., Ltd .: GGC-01, detection limit 0.01 ppm).
Dichlorosilane gas detector alarm (manufactured by Bionics Instruments: TG-3400TA, detection limit 1.5pp
m), the nitrogen oxide (NO + NO ₂ ) was converted to a nitrogen oxide detector tube (manufactured by Gastech Co., Ltd .: 11 L, detection limit: 0.04 p)
Nitrogen dioxide was measured with a nitrogen dioxide detector tube (manufactured by Gastech Co., Ltd .: 9 L, detection limit: 0.5 ppm). As a result, all were below the allowable concentration.
In addition, the outlet gas of the ammonia decomposition column is bubbled with a 5% nitric acid aqueous solution, and gallium in the aqueous solution is analyzed by an ICP analyzer (manufactured by Nippon Jarrell Ash Co., Ltd .: ICAP-5).
75II, detection limit 0.04 mg / liter). This measurement was performed every 60 minutes, and no gallium was detected in any case.

After 8 hours, the introduction of the test gas was stopped, and nitrogen gas was introduced to purge the system while the operation of the electric annular furnace and the introduction of air from the air supply branch pipe were continued. Thirty minutes later, the electric annular furnace was turned off, the introduction of air was stopped, the inlet and outlet valves of the filling cylinder were closed, the bypass valve was closed, and nitrogen gas (purge gas) was allowed to flow through the bypass path. . During this time, the measurement of ammonia was continuously performed, but was below the detection limit.

Example 2 As shown in FIG. 2, an auxiliary filling cylinder was provided in a bypass path. This auxiliary filling cylinder has an inner diameter of 28.4 mm and a length of 690.
mm of stainless steel, and the inside thereof was filled with a removing agent mainly composed of cupric hydroxide at a filling height of 400 mm. Except for this, the operation from the detoxification operation to the operation stop was performed in the same manner as in Example 1. During this period, the outflow amount of harmful components such as ammonia was less than the allowable concentration.

Example 3 As shown in FIG. 3, the same operation as in Example 1 was performed in the same apparatus as in Example 1 except that two packed cylinders were provided so as to be capable of switching operation. The power of the electric annular furnace was turned off, the introduction of air was stopped, and the gas path was switched to the other (unused) filling cylinder side. During this time, the outflow of harmful components such as ammonia was less than the allowable concentration.

COMPARATIVE EXAMPLE In Example 1, 30 minutes after the start of the nitrogen purge, the electric annular furnace of the ammonia decomposition cylinder was turned off while the gas was passed through the filling cylinder without switching the gas path to the bypass path. Stopped air introduction. as a result,
75 ppm or more of ammonia was measured in the gas flowing out of the ammonia decomposition column.

[0032]

As described above, according to the present invention,
Even if the inside of the abatement system is purged with nitrogen gas when the operation of the abatement system is stopped, the ammonia desorbed from the removing agent in the filling cylinder does not flow out to the outside, and it is used as an emergency abatement means. Has no effect.

[Brief description of the drawings]

FIG. 1 is a system diagram showing a first embodiment of an apparatus for removing ammonia-containing exhaust gas of the present invention.

FIG. 2 is a system diagram showing a second embodiment.

FIG. 3 is a system diagram showing an example of an abatement apparatus to which the method of the present invention is applied.

[Explanation of symbols]

1,11 ... filling cylinder, 1a, 11a ... inlet valve, 1b, 11
b ... Outlet valve, 2 ... Oxygen introduction part, 3 ... Ammonia decomposition tube,
4 ... emergency abatement cylinder, 5 ... emergency ammonia abatement cylinder, 6 ...
Bypass valve, 6a: bypass inlet valve, 6b: bypass outlet valve, 7: bypass path, 8: inlet path, 9: outlet path, 10: auxiliary filling cylinder, 11: filling cylinder

[Procedure amendment]

[Submission date] February 7, 2000 (2000.2.7)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claim 1

[Correction method] Change

[Correction contents]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

[0007]

Means for Solving the Problems In order to achieve the above object, the present invention provides an abatement system for an exhaust gas containing ammonia, which is for performing an abatement treatment of an exhaust gas containing at least ammonia as a harmful component. A filling cylinder filled with a remover for removing harmful components other than ammonia in the exhaust gas, an oxygen introducing section for adding an oxygen-containing gas to the exhaust gas derived from the filling cylinder, and reacting the added oxygen with the ammonia. An ammonia decomposition cylinder filled with an oxidation catalyst for decomposing ammonia into nitrogen and water, and a bypass through which a purge gas connects an upstream of an inlet valve and a downstream of an outlet valve of the cylinder via a bypass valve. It is characterized by providing a route.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a system diagram showing a first embodiment of an ammonia-containing exhaust gas abatement apparatus of the present invention. This abatement apparatus comprises a filling cylinder 1 filled with a removing agent for removing harmful components other than ammonia in exhaust gas, and an oxygen introducing section 2 for adding an oxygen-containing gas to exhaust gas derived from the filling cylinder 1.
And an ammonia decomposing cylinder 3 filled with an oxidation catalyst for reacting the added oxygen with ammonia to decompose ammonia into nitrogen and water, and an emergency abatement cylinder 4 used when an abnormality occurs in the charging cylinder 1. An emergency ammonia abatement cylinder 5 used when an abnormality occurs in the ammonia decomposition cylinder 3, an upstream of an inlet valve 1a provided at an inlet of the filling cylinder 1, and a downstream of an outlet valve 1b provided at an outlet. Are connected via a bypass valve 6.
A bypass path 7 for passing a purge gas . ────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission Date] July 17, 2000 (2007.1)
7)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Name of invention

[Correction method] Change

[Correction contents]

Abatement how the ammonia-containing exhaust gas [Title of the Invention]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0001

[Correction method] Change

[Correction contents]

[0001]

The present invention relates to relates abatement how the ammonia-containing exhaust gas, particularly, a semiconductor manufacturing device or L
Ammonia-containing exhaust gas discharged from CD manufacturing equipment, etc.
In particular, with relatively comprise a high concentration of ammonia, silicon compound monosilane or dichlorosilane such as other harmful components and, how to perform the detoxifying process of the exhaust gas of the organic metal compound such as trimethyl gallium containing a small amount About.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction contents]

[0006] The present invention aims at providing a detoxifying how the ammonia-containing exhaust gas which can prevent the outflow of ammonia even in the abatement shutdown.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

[0007]

Means for Solving the Problems To achieve the above object, a first aspect of the present invention is to provide a harmful component other than ammonia in exhaust gas.
And a filling cylinder filled with a removing agent for removing the components.
The upstream of the inlet valve and the downstream of the outlet valve are connected via a bypass valve.
With a bypass path for passing the purging gas
The oxygen-containing gas is added to the exhaust gas
The added oxygen introduction part reacts with the added oxygen and ammonia.
Oxidation catalyst to decompose ammonia into nitrogen and water
Abatement system equipped with a filled ammonia decomposition cylinder
A method for detoxifying ammonia-containing exhaust gas, the method comprising:
When the operation of the ammonia decomposition cylinder is stopped, the inlet valve of the filling cylinder is
And closing the outlet valve and opening the bypass valve,
Purge gas does not pass through the filling cylinder and the bypass path
Through the ammonia decomposition tube .

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

[0008] The second method is characterized in that an auxiliary filling cylinder filled with a removing agent for removing harmful components in exhaust gas is provided in the bypass path in the first method .

[Procedure amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

In a third method, a plurality of packed cylinders filled with a removing agent for removing harmful components other than ammonia in the exhaust gas are provided in parallel in a switchable manner, and the exhaust gas discharged from the filled cylinder is provided with oxygen. The removal of ammonia-containing exhaust gas is carried out by an abatement system comprising an oxygen introducing section for adding the contained gas, and an ammonia decomposition column filled with an oxidation catalyst for reacting the added oxygen with ammonia to decompose ammonia into nitrogen and water. A method of causing harm, characterized in that when the operation of the ammonia decomposition tube is stopped, the path of the exhaust gas to be introduced into the filling tube is switched from an operating filling tube to an unused filling tube.

[Procedure amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

[0010]

Figure 1 DETAILED DESCRIPTION OF THE INVENTION, ammonia-containing of the present invention
It is a system diagram showing the 1st example of a form to which the abatement method of exhaust gas is applied . This abatement apparatus includes a filling cylinder 1 filled with a removing agent for removing harmful components other than ammonia in exhaust gas, an oxygen introducing section 2 for adding an oxygen-containing gas to exhaust gas derived from the filling cylinder 1, and An ammonia decomposing cylinder 3 filled with an oxidation catalyst for reacting oxygen and ammonia to decompose ammonia into nitrogen and water; an emergency abatement cylinder 4 used when an abnormality occurs in the charging cylinder 1; Emergency ammonia abatement cylinder 5 used when an abnormality occurs in cylinder 3
And a bypass path 7 for passing a purge gas that connects an upstream of an inlet valve 1 a provided at an inlet of the filling cylinder 1 and a downstream of an outlet valve 1 b provided at an outlet via a bypass valve 6.

[Procedure amendment 9]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction contents]

FIG. 2 shows the ammonia-containing exhaust gas of the present invention.
It is a system diagram showing the 2nd example of a form to which the abatement method is applied . In the following description, the same components as those of the first embodiment will be denoted by the same reference numerals, and detailed description will be omitted.

[Procedure amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction contents]

FIG. 3 shows the ammonia-containing exhaust gas of the present invention.
It is a systematic diagram which shows the 3rd form example to which the abatement method was applied . This abatement apparatus is provided with two filling cylinders 1 and 11 filled with a removing agent for removing harmful components other than ammonia in exhaust gas in parallel so as to be switchable, and has inlet valves 1a and 1
One of the filling cylinders 1 and 11 is formed so as to perform an operation of removing harmful components by switching between the opening and closing of the outlet valves 1a and the outlet valves 1b and 11b.

[Procedure amendment 11]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1 shows the method for removing ammonia-containing exhaust gas of the present invention.
System diagram showing a first embodiment applied

FIG. 2 is a system diagram showing a second embodiment.

FIG. 3 is a system diagram showing a third embodiment .

[Description of Signs] 1,11: Filling cylinder, 1a, 11a: Inlet valve, 1b, 11
b ... Outlet valve, 2 ... Oxygen introduction part, 3 ... Ammonia decomposition tube,
4 ... emergency abatement cylinder, 5 ... emergency ammonia abatement cylinder, 6 ...
Bypass valve, 6a: bypass inlet valve, 6b: bypass outlet valve, 7: bypass path, 8: inlet path, 9: outlet path, 10: auxiliary filling cylinder, 11: filling cylinder

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shuichi Koseki 1-16-7 Nishi-Shimbashi, Minato-ku, Tokyo Inside Nippon Sanso Corporation (72) Inventor Fumihisa Endo 1-16-7, Nishi-Shimbashi, Minato-ku, Tokyo F-term in Nippon Sanso Corporation (reference) 4D002 AA13 AA26 AA40 BA04 CA07 DA02 DA05 DA11 DA12 DA22 DA23 DA24 DA70 EA02 EA05 GA03 GB20 HA01 HA02

Claims (3)

[Claims] 1. An abatement apparatus for performing abatement treatment of exhaust gas containing at least ammonia as a harmful component, comprising: a filling cylinder filled with a remover for removing harmful components other than ammonia in the exhaust gas; An oxygen introducing section for adding an oxygen-containing gas to the exhaust gas derived from the filling cylinder, and an ammonia decomposition cylinder filled with an oxidation catalyst for reacting the added oxygen with ammonia to decompose ammonia into nitrogen and water. An ammonia-containing exhaust gas abatement apparatus, further comprising a bypass path that connects an inlet upstream and an outlet downstream of the filling cylinder via a bypass valve. 2. The ammonia-containing exhaust gas abatement apparatus according to claim 1, wherein an auxiliary filling cylinder filled with a remover for removing harmful components in the exhaust gas is provided in the bypass path. 3. A plurality of filling cylinders filled with a remover for removing harmful components other than ammonia in exhaust gas are provided in parallel so as to be switchable, and an oxygen-containing gas is added to exhaust gas derived from the filling cylinder. A method of removing ammonia-containing exhaust gas by an abatement apparatus comprising an introduction section and an ammonia decomposition column filled with an oxidation catalyst for reacting added oxygen with ammonia to decompose ammonia into nitrogen and water. When the operation of the ammonia decomposition column is stopped,
A method for abating an ammonia-containing exhaust gas, wherein a path of an exhaust gas to be introduced into the charging cylinder is switched from an operating charging cylinder to an unused charging cylinder.