JP2000277796A - Photosensor and its manufacture - Google Patents

Photosensor and its manufacture

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Publication number
JP2000277796A
JP2000277796A JP8061099A JP8061099A JP2000277796A JP 2000277796 A JP2000277796 A JP 2000277796A JP 8061099 A JP8061099 A JP 8061099A JP 8061099 A JP8061099 A JP 8061099A JP 2000277796 A JP2000277796 A JP 2000277796A
Authority
JP
Japan
Prior art keywords
light
shielding wall
emitting element
receiving element
light emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8061099A
Other languages
Japanese (ja)
Inventor
Megumi Horiuchi
恵 堀内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Electronics Co Ltd
Original Assignee
Citizen Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Electronics Co Ltd filed Critical Citizen Electronics Co Ltd
Priority to JP8061099A priority Critical patent/JP2000277796A/en
Publication of JP2000277796A publication Critical patent/JP2000277796A/en
Pending legal-status Critical Current

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  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a photosensor with which the light projected form a light emitting element is not reflected fully on the surface of resin, even if the object is at a very close position. SOLUTION: This photosensor 1 has a light emitting element 4 and a light receiving element 5 in a pair and a screen wall 6 made outside it and is provided with an opening which serves as a light path. In this case, the light emitting element 4 and the light receiving element 5 are coated with transmissive resin, and the interior of the screen wall 6 is made hollow, and this hollow is filled with air. Many pieces of photosensors 1 are formed integrally on an assembling board, and then they are diced and manufactured into individual photosensors 1.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、フォトセンサ及び
その製造方法に関するものであり、特に、並置して設け
られた1対の発光素子及び受光素子を有し、発光素子か
ら投光される光を測定対象物に投射し、測定対象物で反
射した反射光を受光素子で受光して、その光量によって
測定対象物の有無を検知するフォトセンサに関するもの
であり、特に、フォトセンサにごく接近した位置に存在
する測定対象物を検知するに適したフォトセンサ及びそ
の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensor and a method of manufacturing the same, and more particularly, to a photosensor having a pair of light emitting elements and light receiving elements provided side by side, and emitting light from the light emitting elements. The present invention relates to a photo sensor that projects light onto a measurement object, receives light reflected by the measurement object with a light receiving element, and detects the presence or absence of the measurement object based on the amount of light, and particularly, the photo sensor is very close to the photo sensor. The present invention relates to a photosensor suitable for detecting a measurement target existing at a position and a method for manufacturing the same.

【0002】[0002]

【従来の技術】本発明に係わるフォトセンサは、非接触
で測定対象物の有無を検知するものであって、実際に
は、単に測定対象物の有無によって生じる反射光の有無
によって測定対象物の有無を検知するばかりではなく、
測定対象物に反射率の異なる部分を設けて反射光の光量
を変化させ、この反射光の光量の変化によって高い反射
率の部分(又は低い反射率の部分)の有無を検知し、こ
れによって、モータ等の回転体の回転数の検出や、紙や
フィルム等の端部やマーキングされた位置の検出等に使
用されるものである。また、反射部との距離や角度の変
化によるアナログ的光量変化を検知する用途に使用され
ることもある。
2. Description of the Related Art A photosensor according to the present invention detects the presence or absence of an object to be measured in a non-contact manner. In practice, the photosensor simply detects the presence or absence of reflected light caused by the presence or absence of the object to be measured. Not only does it detect presence,
A portion having a different reflectance is provided on the measurement object to change the amount of the reflected light, and the change in the amount of the reflected light detects the presence or absence of a portion having a high reflectance (or a portion having a low reflectance). It is used for detecting the number of revolutions of a rotating body such as a motor, detecting the end of paper or film, or a marked position. Further, it may be used for detecting an analog light amount change due to a change in the distance or angle to the reflection unit.

【0003】ここで、図5に本発明に係わるフォトセン
サの原理的な構成を示す。図に示すフォトセンサ50
は、絶縁基板51上に発光素子52(例えば赤外線LE
D)と受光素子53(例えばフォトトランジスタ)が1
対になって並置されており、その周囲を遮光性の樹脂か
らなる遮蔽壁54で遮蔽した構造となっている。この遮
蔽壁54は、全体のケーシングを構成すると共に外光か
ら発光素子52や受光素子53(特に発光素子52)を
遮蔽する外壁(外部遮蔽壁)54aと、発光素子52と
受光素子53との間を相互に遮蔽する中間壁(中間遮蔽
壁)54bとからなっており、遮蔽壁54の発光素子5
2側の開口部54c及び受光素子53側の開口部54d
が、発光素子52から投射され、測定対象物55で反射
して受光素子53で受光される光の光路として形成され
ている。そして、遮蔽壁54の内部には、光が透過可能
な透光性の保護樹脂56がモールドされて、発光素子5
2及び受光素子53を封入して保護している。
FIG. 5 shows the basic structure of a photosensor according to the present invention. Photo sensor 50 shown in FIG.
Is a light emitting element 52 (for example, an infrared ray LE) on an insulating substrate 51.
D) and the light receiving element 53 (for example, a phototransistor) is 1
They are juxtaposed as a pair, and have a structure in which the periphery is shielded by a shielding wall 54 made of a light-shielding resin. The shielding wall 54 constitutes an entire casing and includes an outer wall (external shielding wall) 54a for shielding the light-emitting element 52 and the light-receiving element 53 (particularly, the light-emitting element 52) from external light, and the light-emitting element 52 and the light-receiving element 53. And an intermediate wall (intermediate shielding wall) 54b that shields the light emitting elements 5 from each other.
The opening 54c on the second side and the opening 54d on the light receiving element 53 side
Is formed as an optical path of light projected from the light emitting element 52, reflected by the measurement object 55, and received by the light receiving element 53. A light-transmitting protective resin 56 capable of transmitting light is molded inside the shielding wall 54, and the light-emitting element 5 is formed.
2 and the light receiving element 53 are sealed and protected.

【0004】このフォトセンサ50は、発光素子52か
ら投光された光が発光素子52側の開口部54cから矢
印のように投射されて測定対象物55で反射し、この反
射光が受光素子53側の開口部54dを経て受光素子5
3に到達して、その光量を受光素子53で検出する。こ
の場合、測定対象物55の有無(測定対象物55の反射
率の変化する部分の有無)によって受光素子53で検出
される光量が増減し、これによって受光素子53からの
出力が増減するので、この受光素子53の出力の増減に
よって測定対象物55の有無(測定対象物55の反射率
の変化する部分の有無)を検知するものである。
In this photosensor 50, light emitted from a light emitting element 52 is projected from an opening 54 c on the light emitting element 52 side as shown by an arrow and reflected by a measurement object 55, and the reflected light is reflected by a light receiving element 53. Light receiving element 5 through the opening 54d on the side
3 and the light amount is detected by the light receiving element 53. In this case, the amount of light detected by the light receiving element 53 increases or decreases depending on the presence or absence of the measurement object 55 (the presence or absence of a portion where the reflectance of the measurement object 55 changes), thereby increasing or decreasing the output from the light receiving element 53. The presence or absence of the measurement object 55 (the presence or absence of a portion where the reflectance of the measurement object 55 changes) is detected by the increase or decrease of the output of the light receiving element 53.

【0005】このようなフォトセンサは、図6にその1
例を示すように、従来は1個ずつ個別に製造されてい
た。即ち、図6に示すフォトセンサ60は、絶縁基板6
1の上に配置されたリード端子62、63に発光素子6
4及び受光素子65をそれぞれボンディングし、これに
エポキシ樹脂等の透光性の樹脂66をモールドして発光
素子64及び受光素子65を封入して保護し、その外側
全体を黒色素を含有するエポキシ樹脂又はポリフェニレ
ンサルファイド樹脂(以下PPS樹脂という)等の遮光
性の樹脂からなるパッケージ67をモールドしてパッケ
ージしたものである。ここでいう透光性の樹脂66は、
発光素子64から投射される光を透過する樹脂を意味
し、いわゆる透明な樹脂の意味ではない。例えば、発光
素子64が赤外線LEDの場合には、赤外線を透過して
可視光線は遮断する不透明な可視光遮断エポキシ樹脂等
を使用することも多い。
FIG. 6 shows such a photosensor.
As shown in the example, heretofore, it was individually manufactured one by one. That is, the photo sensor 60 shown in FIG.
The light emitting element 6 is connected to the lead terminals 62 and 63 disposed on
4 and the light-receiving element 65, respectively, and a light-transmitting resin 66 such as an epoxy resin is molded on the light-receiving element 65 to seal and protect the light-emitting element 64 and the light-receiving element 65. The package 67 is formed by molding a package 67 made of a light-shielding resin such as a resin or a polyphenylene sulfide resin (hereinafter, referred to as a PPS resin). The translucent resin 66 here is
It means a resin that transmits the light projected from the light emitting element 64, not a so-called transparent resin. For example, when the light emitting element 64 is an infrared LED, an opaque visible light blocking epoxy resin that transmits infrared light and blocks visible light is often used.

【0006】しかし、このようなフォトセンサの製造方
法では、フォトセンサを個別に1個ずつ製造していたの
で、製造コストが非常に高くならざるを得なかった。こ
のため、大型の絶縁基板からなる集合基板上に多数個の
フォトセンサを形成した後、ダイシングして個別のフォ
トセンサに分割する集合基板による多数個取りのフォト
センサの製造方法が開発された。この多数個取りのフォ
トセンサの製造方法の例を本発明の実施例である図4に
示す。
However, in such a method of manufacturing a photosensor, since the photosensors are individually manufactured one by one, the manufacturing cost has to be extremely high. For this reason, a manufacturing method of a multi-cavity photosensor using a collective substrate in which a large number of photosensors are formed on a collective substrate formed of a large-sized insulating substrate and then diced and divided into individual photosensors has been developed. An example of a method for manufacturing this multi-cavity photosensor is shown in FIG. 4 which is an embodiment of the present invention.

【0007】この多数個取りのフォトセンサの製造方法
では、図4に示すように、大型の絶縁基板からなる集合
基板11上に、多数個の発光素子4及び受光素子5を配
置してボンディングする導電パターン3a、3bを並列
して設け、この導電パターン3a、3bに接続されたス
ルーホール12a、12bが、集合基板11の下面側に
設けられた図示しない接続端子に接続されている。そし
て、この集合基板11上の所定の位置に発光素子4及び
受光素子5を並置してボンディングする。
In this method of manufacturing a multi-cavity photosensor, as shown in FIG. 4, a large number of light emitting elements 4 and light receiving elements 5 are arranged and bonded on a collective substrate 11 composed of a large insulating substrate. Conductive patterns 3a and 3b are provided in parallel, and through holes 12a and 12b connected to the conductive patterns 3a and 3b are connected to connection terminals (not shown) provided on the lower surface side of the collective substrate 11. Then, the light emitting element 4 and the light receiving element 5 are juxtaposed and bonded at predetermined positions on the collective substrate 11.

【0008】この発光素子4及び受光素子5が並置して
配置され、ボンディングされた大型の絶縁基板からなる
集合基板11は、透光性の樹脂(エポキシ樹脂等)によ
ってモールドされ、発光素子4及び受光素子5を封入し
て保護する。この透光性の樹脂は、ダイシングして個別
に分割されたフォトセンサの図である図7に示すよう
に、発光素子72を封止する樹脂ブロック74aと受光
素子73を封止する樹脂ブロック74bとに分かれてお
り、更に、この樹脂ブロック74a、76bは、上面の
開口部を除いて外側全体を遮光性の樹脂(黒色素を含有
するエポキシ樹脂又はPPS樹脂等)からなるパッケー
ジ(遮蔽壁)75でモールドされて、集合基板11上に
多数個のフォトセンサが一体となって形成される。
The light emitting element 4 and the light receiving element 5 are arranged side by side, and a collective substrate 11 made of a large-sized insulating substrate bonded is molded with a light transmitting resin (epoxy resin or the like). The light receiving element 5 is sealed and protected. As shown in FIG. 7, which is a diagram of a photosensor divided and individually divided, a resin block 74a for sealing the light emitting element 72 and a resin block 74b for sealing the light receiving element 73 In addition, the resin blocks 74a and 76b have a package (shielding wall) made of a light-shielding resin (epoxy resin containing black pigment, PPS resin, or the like) on the entire outside except for the opening on the upper surface. Molded at 75, a large number of photosensors are integrally formed on the collective substrate 11.

【0009】この多数個のフォトセンサをダイシングし
て個別のフォトセンサ70に分割することによって、図
7に示すように、1対の発光素子72及び受光素子73
を相互に遮蔽すると共に外光を遮蔽する遮蔽壁(パッケ
ージ75)を有し、その開口部から投射された光が測定
対象物76で反射して受光素子73で受光されるフォト
センサ70を得ることができる。
By dicing the plurality of photosensors into individual photosensors 70, as shown in FIG. 7, a pair of light emitting elements 72 and light receiving elements 73 are provided.
A light shielding element (package 75) that shields the light from each other and also shields external light, and obtains a photosensor 70 in which light projected from an opening thereof is reflected by a measurement object 76 and received by a light receiving element 73. be able to.

【0010】或いは、発光素子72を封止する樹脂ブロ
ック74aと受光素子73を封止する樹脂ブロック74
bとの上面の開口部を除く外周に、遮光膜77をコーテ
ィングすることによって、図8に示すように、1対の発
光素子72及び受光素子73を相互に遮蔽すると共に外
光を遮蔽する遮蔽壁(遮光膜77)を有し、その開口部
から投射された光が測定対象物76で反射して受光素子
73で受光されるフォトセンサ70を得ることができ
る。ここで、図8(a)は、透光性の樹脂からなる樹脂
ブロック74a、74bの側面の内側を絶縁基板71に
対して垂直に形成した例であり、図8(b)は、樹脂ブ
ロック74a、74bの側面の内側を開口部側が小径と
なる傾斜した面に形成し、この側面の内側で反射した光
も測定対象物76に投射することによって、受光素子7
3で受光する光の光量を増加しようとする例である。
Alternatively, a resin block 74a for sealing the light emitting element 72 and a resin block 74 for sealing the light receiving element 73
By coating a light-shielding film 77 on the outer periphery except for the opening on the upper surface with the light-receiving element b, as shown in FIG. A photosensor 70 having a wall (a light-shielding film 77), in which light projected from an opening thereof is reflected by the measurement object 76 and received by the light-receiving element 73, can be obtained. Here, FIG. 8A shows an example in which the insides of the side surfaces of the resin blocks 74a and 74b made of a translucent resin are formed perpendicular to the insulating substrate 71, and FIG. The inside of the side surfaces of 74a and 74b is formed on an inclined surface having a small diameter on the opening side, and the light reflected on the inside of these side surfaces is also projected on the measurement object 76, so that the light receiving element 7
3 is an example in which the light amount of the light received at 3 is to be increased.

【0011】[0011]

【発明が解決しようとする課題】これらのフォトセンサ
70は、いずれも発光素子72及び受光素子73がエポ
キシ樹脂等の透光性の樹脂74によってモールドされて
いるので、図9(a)に示すように、発光素子から投光
された光が封止樹脂80から外部の空気層に投射される
際に屈折し、この角度θが臨界角θcを超えると図9
(b)に示すように全反射して外部に光が投射されない
ことになる。
In each of these photosensors 70, the light-emitting element 72 and the light-receiving element 73 are molded with a translucent resin 74 such as an epoxy resin. As described above, when the light projected from the light emitting element is refracted when projected from the sealing resin 80 to the outside air layer, and when this angle θ exceeds the critical angle
As shown in (b), the light is totally reflected and no light is projected to the outside.

【0012】そして、測定対象物76がごく接近した位
置にあるときには、図7及び図8から明らかなように、
発光素子72から投射され、測定対象物76で反射して
受光素子73に受光される光の角度が大きくなるので、
臨界角θcを超えて樹脂74内で全反射して外部に光が
投射されないことが生じる。特に、図8(b)に示すよ
うに、透光性の樹脂74の外壁面を傾いた形状にして遮
光膜77をコーティングし、この外壁面の内面で反射し
た光も測定対象物76に投射して光量を増加しようとす
るものでは、測定対象物78を接近させるとたちまち全
反射するようになって、光量の増加に寄与できないこと
になる。また、光の角度θが臨界角θcに近付くと、全
反射には至らないまでも、透過した光が偏光されるよう
になって光の透過率が減少し、測定対象物76で反射し
て受光素子73に受光される光の光量も大幅に減少す
る。
When the measuring object 76 is in a very close position, as is clear from FIGS. 7 and 8,
Since the angle of light projected from the light emitting element 72 and reflected by the measurement object 76 and received by the light receiving element 73 increases,
The light may be totally reflected within the resin 74 beyond the critical angle θc and may not be projected to the outside. In particular, as shown in FIG. 8B, a light-shielding film 77 is coated with an inclined outer wall surface of a translucent resin 74, and the light reflected on the inner surface of the outer wall surface is also projected on the measurement object 76. In the case where the light amount is to be increased by this, when the measurement object 78 is approached, the light is totally reflected immediately and cannot contribute to the increase in the light amount. When the angle θ of the light approaches the critical angle θc, the transmitted light becomes polarized and the transmittance of the light decreases, and the light is reflected by the measurement object 76, even if the light does not reach total reflection. The light amount of the light received by the light receiving element 73 is also greatly reduced.

【0013】[0013]

【課題を解決するための手段】本発明は、上記課題を解
決するために、絶縁基板上に並置された1対の発光素子
及び受光素子と、該1対の発光素子及び受光素子を相互
に遮蔽すると共に外光から遮蔽し、且つ前記発光素子か
ら投光される光を前記受光素子で受光する光路を形成す
る前記発光素子側及び前記受光素子側の開口部を有する
遮蔽壁とを設け、前記発光素子から投光される光を前記
発光素子側の開口部から投射し、測定対象物によって反
射した反射光を前記受光素子側の開口部を経て前記受光
素子で受光し、その光量によって前記測定対象物の有無
を検知するフォトセンサにおいて、前記遮蔽壁が、前記
1対の発光素子及び受光素子の双方を囲み、全体として
中空に形成された外部遮蔽壁と、前記発光素子と前記受
光素子との中間に配置された中間遮蔽壁とからなり、前
記発光素子と前記受光素子との外周に透光性の樹脂によ
るコーティングを施し、前記外部遮蔽壁の内部を中空部
とし、該中空部に空気が充満していることを特徴とする
フォトセンサを提供するものである。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a pair of light emitting element and light receiving element juxtaposed on an insulating substrate, and the pair of light emitting element and light receiving element are mutually connected. Shielding and shielding from external light, and a shielding wall having an opening on the light emitting element side and the light receiving element side forming an optical path for receiving light projected from the light emitting element with the light receiving element, The light emitted from the light emitting element is projected from the opening on the light emitting element side, and the reflected light reflected by the object to be measured is received by the light receiving element through the opening on the light receiving element side, and the light amount is used as the light quantity. In a photosensor for detecting the presence or absence of an object to be measured, the shielding wall surrounds both the pair of the light emitting element and the light receiving element, and an external shielding wall formed as a whole as a hollow, the light emitting element and the light receiving element In between The light-emitting element and the light-receiving element are coated with a translucent resin, and the inside of the external shield wall is formed as a hollow part, and the hollow part is filled with air. The present invention provides a photosensor characterized in that:

【0014】ここで、前記外部遮蔽壁の内部を前記開口
部側が小径となる傾斜面に形成されていることが望まし
い。さらに、前記外部遮蔽壁の内部の少なくとも前記開
口部側が小径となる傾斜面に光の反射膜が形成されてい
ることが望ましい。
Here, it is preferable that the inside of the external shielding wall is formed as an inclined surface having a small diameter on the opening side. Further, it is preferable that a light reflecting film is formed on an inclined surface having a small diameter at least on the opening side inside the external shielding wall.

【0015】また、本発明は、上記課題を解決するため
に、並置して設けられた1対の発光素子及び受光素子
と、該1対の発光素子及び受光素子を相互に遮蔽すると
共に外光から遮蔽し、且つ前記発光素子から投光される
光を前記受光素子で受光する光路を形成する開口部を有
する遮蔽壁とを設け、該遮蔽壁に設けられた前記開口部
を経由し、且つ前記発光素子から投光して測定対象物に
よって反射した反射光を前記受光素子で受光し、その光
量によって前記測定対象物の有無を検知するフォトセン
サからなり、該フォトセンサを大型の絶縁基板からなる
集合基板上に多数個配置して形成した後、ダイシングし
て個別のフォトセンサに分割する集合基板による多数個
取りのフォトセンサの製造方法において、前記集合基板
上の前記発光素子と前記受光素子との外周に透光性の保
護樹脂をコーティングする樹脂コーティング工程と、前
記発光素子及び前記受光素子を1対ずつ囲む中空に形成
された外部遮蔽壁と前記1対の発光素子と受光素子との
中間に配置された中間遮蔽壁とからなる前記遮蔽壁を、
前記集合基板上の前記1対の発光素子及び受光素子の配
置に対応する多数個の遮蔽壁の集合体として成形する遮
蔽壁成形工程と、前記多数個の遮蔽壁の集合体を、前記
1対の発光素子及び受光素子がそれぞれ1対ずつ収納さ
れる所定の位置に接合される遮蔽壁接合工程とを有する
ことを特徴とするフォトセンサの製造方法を提供するも
のである。
According to another aspect of the present invention, there is provided a light emitting element and a light receiving element provided side by side, and a pair of the light emitting element and the light receiving element are shielded from each other and external light is provided. And a shielding wall having an opening that forms an optical path for receiving light emitted from the light emitting element with the light receiving element, through the opening provided in the shielding wall, and The light receiving element receives the reflected light emitted from the light emitting element and reflected by the object to be measured, and includes a photosensor for detecting the presence or absence of the object to be measured based on the amount of light. After arranging and forming a large number of photosensors on a collective substrate, a method for manufacturing a multi-cavity photosensor using a collective substrate that is diced and divided into individual photosensors, the light emitting element on the collective substrate and A resin coating step of coating the outer periphery of the light receiving element with a translucent protective resin; an outer shielding wall formed in a hollow surrounding the light emitting element and the light receiving element in pairs; Said shielding wall consisting of an intermediate shielding wall arranged in the middle of the element,
A shielding wall forming step of forming as an aggregate of a large number of shielding walls corresponding to the arrangement of the pair of light emitting elements and the light receiving elements on the aggregate substrate; And a shielding wall joining step in which the light emitting element and the light receiving element are joined at predetermined positions in which a pair of the light emitting elements and the light receiving elements are respectively accommodated.

【0016】ここで、前記遮蔽壁成形工程で成形された
遮蔽壁の内面に光の反射膜を形成する反射膜形成工程
を、前記遮蔽壁接合工程の前工程として有することが望
ましい。
Here, it is preferable that a reflecting film forming step of forming a light reflecting film on the inner surface of the shielding wall formed in the shielding wall forming step is provided as a step before the shielding wall bonding step.

【0017】[0017]

【発明の実施の形態】以下、本発明を図面に基づいて説
明する。図1は本発明のフォトセンサの1実施例を示す
断面図であり、図2は図1のA−A線断面図、図3は一
部切り欠き斜視図である。図に示すように、本発明のフ
ォトセンサ1は、絶縁基板2上に設けられた導電パター
ン3aおよび3bにLED等の発光素子4とフォトトラ
ンジスタ等の受光素子5が1対となって並置するように
ボンディングされており、その周囲を遮蔽壁6で外光を
遮蔽するように覆っている。この遮蔽壁6は、外光を遮
蔽する外部遮蔽壁6aと発光素子4と受光素子5との間
を相互に遮蔽する板状の中間遮蔽壁6bとからなってお
り、発光素子4から投光される光及び受光素子5に受光
される光の光路となる発光素子4側の開口部6cと受光
素子5側の開口部6dが設けられている。この遮蔽壁6
は、光を透過させないために、前述したように、黒色素
を含有するエポキシ樹脂又はPPS樹脂等の遮光性の樹
脂で製造するか、或いは内面に光の反射膜を形成して開
口部6c、6d以外での光の透過を遮蔽する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing one embodiment of the photosensor of the present invention, FIG. 2 is a sectional view taken along line AA of FIG. 1, and FIG. 3 is a partially cutaway perspective view. As shown in the figure, in the photosensor 1 of the present invention, a light emitting element 4 such as an LED and a light receiving element 5 such as a phototransistor are arranged side by side on conductive patterns 3a and 3b provided on an insulating substrate 2. And the surrounding area is covered by a shielding wall 6 so as to shield external light. The shielding wall 6 includes an external shielding wall 6a for shielding external light, and a plate-shaped intermediate shielding wall 6b for mutually shielding between the light emitting element 4 and the light receiving element 5. An opening 6c on the light emitting element 4 side and an opening 6d on the light receiving element 5 side, which are optical paths of the light to be received and the light received by the light receiving element 5, are provided. This shielding wall 6
Is made of a light-shielding resin such as an epoxy resin or a PPS resin containing a black pigment, as described above, or a light reflection film is formed on the inner surface to prevent light from transmitting therethrough. The transmission of light other than 6d is blocked.

【0018】そして、発光素子4と受光素子5の外周
は、エポキシ樹脂等の透光性の樹脂7及び8で薄膜状に
コーティングされており、発光素子4及び受光素子5を
保護している。ここで、この透光性の樹脂の語は、前述
したように、発光素子4から投射される光を透過する樹
脂の意味であっていわゆる透明な樹脂に限定されない。
例えば、発光素子4が可視光線を投射するLEDの場合
には、いわゆる透明な樹脂が使用されるが、発光素子4
が赤外線LEDの場合には、赤外線を透過して可視光線
は遮断する、一見黒色で不透明な可視光遮断エポキシ樹
脂等を使用することができる。
The outer circumferences of the light emitting element 4 and the light receiving element 5 are coated in a thin film with translucent resins 7 and 8, such as epoxy resin, to protect the light emitting element 4 and the light receiving element 5. Here, as described above, the term “translucent resin” means a resin that transmits light projected from the light emitting element 4 and is not limited to a so-called transparent resin.
For example, when the light emitting element 4 is an LED that projects visible light, a so-called transparent resin is used.
Is an infrared LED, an apparently black and opaque visible light blocking epoxy resin that transmits infrared light and blocks visible light can be used.

【0019】本発明の実施例における遮蔽壁6は、図1
に示すように、側面の内側を開口部が小径となる傾斜し
た面に形成し、前に図8(b)の説明で述べたように、
この側面の内側の傾斜面で反射した光も測定対象物9に
投射することによって、受光素子4で受光する光の光量
を増加するように構成している。また、この遮蔽壁6の
側面の内側の面は、内面を平滑な光沢面とすることによ
って遮蔽壁6の内面で反射する光の光量を増加すること
ができる。更に、遮蔽壁6の内面に金属を薄膜として蒸
着し、或いはメッキすることによって、表面に金属の薄
膜をコーティングして反射膜10を形成し、遮蔽壁6の
側面の内側の面で反射する光の光量を更に増加させるこ
とができる。そして、この遮蔽壁6の外部遮蔽壁6aと
中間遮蔽壁6bで囲まれた内部は中空部となっていて、
この中空部は空気層によって充満されている。
The shielding wall 6 in the embodiment of the present invention is shown in FIG.
As shown in FIG. 8B, the inside of the side surface is formed on an inclined surface where the opening has a small diameter, and as described in the description of FIG.
The light reflected by the inclined surface inside the side surface is also projected on the measurement object 9 to increase the amount of light received by the light receiving element 4. The inner surface of the side surface of the shielding wall 6 can increase the amount of light reflected on the inner surface of the shielding wall 6 by making the inner surface a smooth glossy surface. Further, by depositing or plating metal as a thin film on the inner surface of the shielding wall 6, a metal thin film is coated on the surface to form a reflective film 10, and light reflected on the inner surface of the side surface of the shielding wall 6 is formed. Can be further increased. The inside of the shielding wall 6 surrounded by the outer shielding wall 6a and the intermediate shielding wall 6b is a hollow portion,
This hollow portion is filled with an air space.

【0020】このような本発明のフォトセンサ1は、次
のような工程で製造される。即ち、図4に示すように、
従来技術と同様の集合基板製造工程によって、大型の絶
縁基板からなる集合基板11上に多数個の発光素子4及
び受光素子5を配置してボンディングする導電パターン
3a、3bを並列して設け、この導電パターン3a、3
bと、集合基板11の下面側に設けられた図示しない接
続端子とをスルーホール12a、12bによって接続
し、次に、ボンディング工程によって、前の集合基板製
造工程で製造された集合基板11の所定の位置に発光素
子4及び受光素子5を1対ずつ並置してボンディングす
る。
The photosensor 1 of the present invention is manufactured by the following steps. That is, as shown in FIG.
Conductive patterns 3a and 3b for arranging and bonding a large number of light emitting elements 4 and light receiving elements 5 on a collective substrate 11 composed of a large-sized insulating substrate are provided in parallel by a collective substrate manufacturing process similar to the prior art. Conductive patterns 3a, 3
b and connection terminals (not shown) provided on the lower surface side of the collective substrate 11 by through holes 12a and 12b, and then, by a bonding process, a predetermined portion of the collective substrate 11 manufactured in the previous collective substrate manufacturing process. The light emitting element 4 and the light receiving element 5 are arranged side by side at a position and are bonded.

【0021】そして、このボンディング工程で集合基板
11上に並置してボンディングされた発光素子4及び受
光素子5の外周に、それぞれエポキシ樹脂等の透光性の
保護樹脂7、8を薄膜状にコーティングする樹脂コーテ
ィング工程を行なう。この樹脂コーティング工程でコー
ティングされる透光性の保護樹脂7、8は、発光素子4
や受光素子5を空気中に曝すことによって劣化すること
を防止するためのものであって、前述したように、発光
素子から投射される光を透過する樹脂(いわゆる透明な
樹脂ではない)であって、例えば、可視光線の場合に
は、透明なエポキシ樹脂等が使用され、発光素子4が赤
外線LEDの場合には、赤外線を透過して可視光線は遮
断する不透明な可視光遮断エポキシ樹脂等が使用され
る。
The outer periphery of the light emitting element 4 and the light receiving element 5 bonded side by side on the collective substrate 11 in this bonding step are coated with light-transmitting protective resins 7 and 8 such as epoxy resin in a thin film form, respectively. A resin coating process is performed. The light-transmitting protective resins 7 and 8 coated in this resin coating step are
It is intended to prevent the light-receiving element 5 from being deteriorated by exposing the light-receiving element 5 to the air, and as described above, is a resin that transmits light projected from the light-emitting element (not a transparent resin). For example, in the case of visible light, a transparent epoxy resin or the like is used. In the case where the light emitting element 4 is an infrared LED, an opaque visible light blocking epoxy resin or the like that transmits infrared light and blocks visible light is used. used.

【0022】この樹脂コーティング工程では、透明なエ
ポキシ樹脂や不透明な可視光遮断エポキシ樹脂等の透光
性の保護樹脂のモノマーを溶液で希釈し、この希釈液を
スピンコート法やはけ塗りによって発光素子4及び受光
素子5の外周に塗布し、乾燥して数μm〜数十μmの厚
さにコーティングする。
In this resin coating step, a monomer of a light-transmitting protective resin such as a transparent epoxy resin or an opaque visible light-blocking epoxy resin is diluted with a solution, and the diluted solution is luminescent by spin coating or brushing. It is applied to the periphery of the element 4 and the light receiving element 5, dried, and coated to a thickness of several μm to several tens μm.

【0023】一方、遮蔽壁成形工程で、これら1対の発
光素子4及び受光素子5を相互に遮蔽すると共に外光を
遮蔽し、且つ発光素子4から投光される光を所定の光路
を経て測定対象物9で反射し、この反射光が所定の光路
を経て受光素子5で受光するための開口部6c、6dを
有する遮蔽壁6を多数マトリックス状に配置した遮蔽壁
集合体(図示しない)を製造する。この遮蔽壁集合体
は、発光素子4と受光素子5とを1対ずつ囲む外部遮蔽
壁6aによって形成された中空部が、発光素子4と受光
素子5との中間に配置された板状の中間遮蔽壁6bによ
って分離されて2個の中空部となり、この中空部がそれ
ぞれ開口部6c、6dに連続した形状となっており、こ
の外部遮蔽壁6aが相互に連続して多数のマトリックス
状に配置されているので、2個ずつ並置された中空部
が、発光素子4及び受光素子5と同じピッチでマトリッ
クス状に多数配置した形状となっている。そして、この
遮蔽壁集合体は、単一の樹脂成形工程によって成形され
る。
On the other hand, in the shielding wall forming step, the pair of the light emitting element 4 and the light receiving element 5 are shielded from each other, the external light is shielded, and the light projected from the light emitting element 4 passes through a predetermined optical path. A shielding wall assembly (not shown) in which a large number of shielding walls 6 having openings 6c and 6d for receiving the reflected light by the light receiving element 5 via a predetermined optical path and reflected by the measurement object 9 are arranged in a matrix. To manufacture. This shielding wall assembly has a plate-shaped intermediate portion in which a hollow portion formed by an external shielding wall 6a surrounding a pair of the light emitting element 4 and the light receiving element 5 is disposed between the light emitting element 4 and the light receiving element 5. Two hollow portions are separated by the shielding wall 6b, and these hollow portions have shapes continuous with the openings 6c and 6d, respectively, and the outer shielding walls 6a are arranged in a matrix in a continuous manner with each other. Therefore, a large number of hollow portions arranged two by two are arranged in a matrix at the same pitch as the light emitting element 4 and the light receiving element 5. Then, this shielding wall assembly is molded by a single resin molding process.

【0024】この遮蔽壁6は、前述したように、光を透
過させないために、黒色素を含有するエポキシ樹脂又は
PPS樹脂等の遮光性の樹脂の使用するか、内面に光の
反射膜を形成する。光の反射膜を形成する反射膜形成工
程は、遮蔽壁6の内面に金属を薄膜として蒸着し、或い
はメッキすることによって行なわれ、表面に金属の薄膜
をコーティングして反射膜10を形成する。
As described above, the shielding wall 6 is made of a light-shielding resin such as an epoxy resin or a PPS resin containing a black pigment, or a light reflection film is formed on the inner surface thereof so as not to transmit light. I do. The reflection film forming step of forming the light reflection film is performed by depositing or plating a metal as a thin film on the inner surface of the shielding wall 6, and coating the surface with the metal thin film to form the reflection film 10.

【0025】このようにして製造された遮蔽壁集合体
は、遮蔽壁接合工程によって、集合基板11の所定の位
置に接合される。この接合位置は、1対の発光素子4及
び受光素子5を遮蔽して収納する所定の位置に接合され
ることはいうまでもない。この接合工程は、接着剤や両
面テープによる接着や超音波接着等の任意の接着方法を
採用することができる。
The shield wall assembly manufactured in this manner is joined to a predetermined position on the collective substrate 11 by a shield wall joining step. It goes without saying that this joining position is joined to a predetermined position where the pair of light emitting element 4 and light receiving element 5 are shielded and housed. In this bonding step, any bonding method such as bonding with an adhesive or a double-sided tape or ultrasonic bonding can be adopted.

【0026】このようにして接合されたフォトセンサの
集合体は、遮蔽壁6の内部は中空部となっていて、この
中空部には空気が充満した空気層となっていることは明
らかである。そして、最後に、このフォトセンサの集合
体をダイシングして個別のフォトセンサ1に分割するこ
とによってフォトセンサの製造工程が終了する。ダイシ
ングの方法については、周知となっているのでここでは
詳述しない。
In the photosensor assembly thus joined, the inside of the shielding wall 6 has a hollow portion, and it is clear that the hollow portion has an air layer filled with air. . Finally, the photosensor assembly process is completed by dicing the photosensor assembly into individual photosensors 1. The dicing method is well known and will not be described in detail here.

【0027】[0027]

【発明の効果】本発明のフォトセンサによれば、発光素
子及び受光素子を封止して保護する透光性の樹脂は、薄
膜状にコーティングされているのみで、透光性の樹脂に
よってモールドされていないので、図1に示すように、
発光素子から投光された光は、矢印で示す光の経路のよ
うに投射されて測定対象物で反射するので、発光素子か
ら投光された光が封止樹脂から外部の空気層に投射され
る際に屈折することはなく、まして、臨界角を超えて全
反射して外部に光が投射されないことは決して生じな
い。また、光の角度が臨界角に近付くことによって透過
した光が偏光され、光の透過率が減少することも生じな
い。
According to the photosensor of the present invention, the light-transmitting resin for sealing and protecting the light-emitting element and the light-receiving element is coated only in a thin film, and is molded with the light-transmitting resin. Since it has not been done, as shown in FIG.
Since the light emitted from the light emitting element is projected and reflected by the measurement target as shown by the light path indicated by the arrow, the light emitted from the light emitting element is projected from the sealing resin to an external air layer. In this case, the light is not refracted when the light is transmitted, and it never happens that the light is totally reflected beyond the critical angle and the light is not projected to the outside. Further, the transmitted light is polarized as the light angle approaches the critical angle, and the light transmittance does not decrease.

【0028】このため、並置して設けられた1対の発光
素子及び受光素子を有し、発光素子から投光される光を
測定対象物に投射し、測定対象物で反射した反射光を受
光素子で受光してその光量によって測定対象物の有無を
検知するフォトセンサにおいて、ごく接近した位置に存
在する測定対象物でも確実に検知することができる。ま
た、透光性の樹脂の側面の内側を傾いた形状にして平滑
面にし、或いは反射膜をコーティングして、この側面の
内側で反射した光も測定対象物に投射して光量を増加し
ようとするものでも、臨界角を超えて全反射することは
なく側面の内側で反射した反射光も有効に使用すること
ができる。
For this purpose, a light-emitting element and a light-receiving element are provided side by side, and the light emitted from the light-emitting element is projected onto the object to be measured, and the light reflected by the object is received. In a photosensor that receives light by an element and detects the presence or absence of a measurement target based on the amount of light, it is possible to reliably detect a measurement target even at a very close position. In addition, the inside of the side surface of the light-transmitting resin is inclined to have a smooth surface, or a reflective film is coated. However, the reflected light that is not totally reflected beyond the critical angle and reflected inside the side surface can be used effectively.

【0029】また、本発明のフォトセンサの製造方法に
よれば、ごく接近した位置に存在する測定対象物を検知
することができる本発明のフォトセンサを容易に製造す
ることができる。そして、透光性の樹脂で封止する工程
が不要となり、透光性の樹脂を封止するための金型も不
要になって、従来技術に比較してより安価に製造するこ
とができる。
Further, according to the photosensor manufacturing method of the present invention, it is possible to easily manufacture the photosensor of the present invention, which can detect an object to be measured in a very close position. In addition, a step of sealing with a light-transmitting resin is not required, and a mold for sealing the light-transmitting resin is not required, so that the device can be manufactured at lower cost as compared with the related art.

【0030】更に、本発明のフォトセンサでは、発光素
子及び受光素子を保護するエポキシ樹脂等の保護樹脂
は、薄膜状にコーティングされるのみなので、モールド
する際の冷却時や温度の変化による樹脂応力が発生せ
ず、特に赤外線LEDで生じやすい通電劣化も防止する
ことができる。
Further, in the photosensor of the present invention, since the protective resin such as epoxy resin for protecting the light emitting element and the light receiving element is only coated in a thin film shape, the resin stress due to cooling during molding or a change in temperature is reduced. Does not occur, and it is also possible to prevent current-carrying deterioration particularly likely to occur in infrared LEDs.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明のフォトセンサの1実施例を示す断面
図である。
FIG. 1 is a sectional view showing one embodiment of a photosensor of the present invention.

【図2】 図1のA−A線断面図である。FIG. 2 is a sectional view taken along line AA of FIG.

【図3】 図1の実施例の一部切り欠き斜視図である。FIG. 3 is a partially cutaway perspective view of the embodiment of FIG. 1;

【図4】 多数個取りの製造方法を示す集合基板の斜視
図である。
FIG. 4 is a perspective view of a collective substrate showing a multi-cavity manufacturing method.

【図5】 本発明に係わるフォトセンサの原理的な構成
を示す模式図である。
FIG. 5 is a schematic diagram showing a basic configuration of a photosensor according to the present invention.

【図6】 従来技術のフォトセンサの1例を示す断面図
である。
FIG. 6 is a cross-sectional view showing an example of a conventional photosensor.

【図7】 多数個取りの製造方法で製造された従来技術
のフォトセンサの1例を示す断面図である。
FIG. 7 is a cross-sectional view showing an example of a conventional photosensor manufactured by a multi-cavity manufacturing method.

【図8】 多数個取りの製造方法で製造された従来技術
のフォトセンサの他の例を示す断面図であって、(a)
は遮蔽壁が垂直な例、(B)は傾斜している例である。
8A and 8B are cross-sectional views illustrating another example of a conventional photosensor manufactured by a multi-cavity manufacturing method, wherein FIG.
Is an example in which the shielding wall is vertical, and (B) is an example in which the shielding wall is inclined.

【図9】 透光性の樹脂の表面での光の屈折を示す説明
図であって、(a)は光が屈折して投射されている例、
(b)は全反射している例ある。
FIG. 9 is an explanatory view showing refraction of light on the surface of a translucent resin, where (a) shows an example in which light is refracted and projected;
(B) is an example of total reflection.

【符号の説明】[Explanation of symbols]

1 フォトセンサ1 2 絶縁基板 3a,3b 導電パターン 4 発光素子 5 受光素子 6 遮蔽壁 6a 外部遮蔽壁 6b 中間遮蔽壁 6c 開口部 7,8 透光性の樹脂 9 測定対象物 10 反射膜 11 集合基板 12a、12b スルーホール DESCRIPTION OF SYMBOLS 1 Photosensor 1 2 Insulating substrate 3a, 3b Conductive pattern 4 Light emitting element 5 Light receiving element 6 Shielding wall 6a External shielding wall 6b Intermediate shielding wall 6c Opening 7,8 Translucent resin 9 Object to be measured 10 Reflective film 11 Assembly substrate 12a, 12b Through hole

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】絶縁基板上に並置された1対の発光素子及
び受光素子と、該1対の発光素子及び受光素子を相互に
遮蔽すると共に外光から遮蔽し、且つ前記発光素子から
投光される光を前記受光素子で受光する光路を形成する
前記発光素子側及び前記受光素子側の開口部を有する遮
蔽壁とを設け、前記発光素子から投光される光を前記発
光素子側の開口部から投射し、測定対象物によって反射
した反射光を前記受光素子側の開口部を経て前記受光素
子で受光し、その光量によって前記測定対象物の有無を
検知するフォトセンサにおいて、 前記遮蔽壁が、前記1対の発光素子及び受光素子の双方
を囲み、全体として中空に形成された外部遮蔽壁と、前
記発光素子と前記受光素子との中間に配置された中間遮
蔽壁とからなり、 前記発光素子と前記受光素子との外周に透光性の樹脂に
よるコーティングを施し、 前記外部遮蔽壁の内部を中空部とし、該中空部に空気が
充満していることを特徴とするフォトセンサ。
1. A pair of light-emitting and light-receiving elements juxtaposed on an insulating substrate, mutually shielding the pair of light-emitting and light-receiving elements from external light, and projecting light from the light-emitting element. And a shielding wall having an opening on the light emitting element side and an opening on the light receiving element side for forming an optical path for receiving the light to be received by the light receiving element, and an opening on the light emitting element side for emitting light emitted from the light emitting element. A photosensor that receives light reflected by the measurement object through the opening on the light receiving element side and receives the light reflected by the measurement object, and detects the presence or absence of the measurement object based on the amount of light. An outer shielding wall surrounding the pair of the light emitting element and the light receiving element and formed as a whole as a whole, and an intermediate shielding wall disposed between the light emitting element and the light receiving element. Element and said Photosensor, characterized in that coated by translucent resin on the outer periphery of the optical element, the inside of the outer shield wall and a hollow portion, the air is filled in the hollow portion.
【請求項2】前記外部遮蔽壁の内部を前記開口部側が小
径となる傾斜面に形成したことを特徴とする請求項1記
載のフォトセンサ。
2. The photosensor according to claim 1, wherein the inside of said external shielding wall is formed on an inclined surface having a small diameter on the opening side.
【請求項3】前記外部遮蔽壁の内部の少なくとも前記開
口部側が小径となる傾斜面に光の反射膜が形成されてい
ることを特徴とする請求項1又は2記載のフォトセン
サ。
3. The photosensor according to claim 1, wherein a light reflection film is formed on an inclined surface having a small diameter at least on the opening side inside the external shielding wall.
【請求項4】並置して設けられた1対の発光素子及び受
光素子と、該1対の発光素子及び受光素子を相互に遮蔽
すると共に外光から遮蔽し、且つ前記発光素子から投光
される光を前記受光素子で受光する光路を形成する開口
部を有する遮蔽壁とを設け、該遮蔽壁に設けられた前記
開口部を経由し、且つ前記発光素子から投光して測定対
象物によって反射した反射光を前記受光素子で受光し、
その光量によって前記測定対象物の有無を検知するフォ
トセンサからなり、該フォトセンサを大型の絶縁基板か
らなる集合基板上に多数個配置して形成した後、個別の
フォトセンサに分割する集合基板による多数個取りのフ
ォトセンサの製造方法において、 前記集合基板上の前記発光素子と前記受光素子との外周
に透光性の保護樹脂をコーティングする樹脂コーティン
グ工程と、 前記発光素子及び前記受光素子を1対ずつ囲む中空に形
成された外部遮蔽壁と前記1対の発光素子と受光素子と
の中間に配置された中間遮蔽壁とからなる前記遮蔽壁
を、前記集合基板上の前記1対の発光素子及び受光素子
の配置に対応する多数個の遮蔽壁の集合体として成形す
る遮蔽壁成形工程と、 前記多数個の遮蔽壁の集合体を、前記1対の発光素子及
び受光素子がそれぞれ1対ずつ収納される所定の位置に
接合される遮蔽壁接合工程と、 ダイシングして個別のフォトセンサに分割するダイシン
グ工程とを有することを特徴とする集合基板による多数
個取りのフォトセンサの製造方法。
4. A pair of light emitting element and light receiving element provided side by side, and shielding the pair of light emitting element and light receiving element from each other and from outside light, and projecting light from the light emitting element. And a shielding wall having an opening for forming an optical path for receiving the light with the light receiving element, through the opening provided in the shielding wall, and projecting light from the light emitting element, depending on an object to be measured. The reflected light is received by the light receiving element,
It consists of a photo sensor that detects the presence or absence of the object to be measured by the amount of light, and after forming and arranging a large number of the photo sensors on a collective substrate made of a large insulating substrate, the collective substrate is divided into individual photo sensors. In the method for manufacturing a multi-cavity photosensor, a resin coating step of coating the outer periphery of the light emitting element and the light receiving element on the collective substrate with a transparent protective resin; The above-mentioned shielding wall consisting of an external shielding wall formed in a hollow surrounding each pair and an intermediate shielding wall disposed between the above-mentioned pair of light-emitting elements and the light-receiving element is provided by the above-mentioned pair of light-emitting elements on the collective substrate. A shaping wall forming step of shaping the shading as an aggregate of a large number of shielding walls corresponding to the arrangement of the light receiving elements; A multi-piece photo-printing method using a collective substrate, comprising: a shielding wall joining step in which a pair of chips are respectively housed in predetermined positions in which a pair is accommodated; and a dicing step in which dicing is performed and divided into individual photo sensors. Manufacturing method of sensor.
【請求項5】前記遮蔽壁成形工程で成形された遮蔽壁の
内面に光の反射膜を形成する反射膜形成工程を、前記遮
蔽壁接合工程の前工程として有することを特徴とする請
求項4記載のフォトセンサの製造方法。
5. A shielding film forming step of forming a light reflecting film on an inner surface of the shielding wall formed in the shielding wall forming step, as a pre-process of the shielding wall joining step. A manufacturing method of the photosensor described in the above.
JP8061099A 1999-03-24 1999-03-24 Photosensor and its manufacture Pending JP2000277796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8061099A JP2000277796A (en) 1999-03-24 1999-03-24 Photosensor and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8061099A JP2000277796A (en) 1999-03-24 1999-03-24 Photosensor and its manufacture

Publications (1)

Publication Number Publication Date
JP2000277796A true JP2000277796A (en) 2000-10-06

Family

ID=13723110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8061099A Pending JP2000277796A (en) 1999-03-24 1999-03-24 Photosensor and its manufacture

Country Status (1)

Country Link
JP (1) JP2000277796A (en)

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