JP2000275059A - Magnetic sensor and magnetic encoder - Google Patents

Magnetic sensor and magnetic encoder

Info

Publication number
JP2000275059A
JP2000275059A JP11083641A JP8364199A JP2000275059A JP 2000275059 A JP2000275059 A JP 2000275059A JP 11083641 A JP11083641 A JP 11083641A JP 8364199 A JP8364199 A JP 8364199A JP 2000275059 A JP2000275059 A JP 2000275059A
Authority
JP
Japan
Prior art keywords
magnetic
magnetic sensor
fpc
gap
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11083641A
Other languages
Japanese (ja)
Other versions
JP2000275059A5 (en
JP4120904B2 (en
Inventor
Koto Sakamoto
琴 坂本
Yukimasa Moronowaki
幸昌 諸野脇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP08364199A priority Critical patent/JP4120904B2/en
Publication of JP2000275059A publication Critical patent/JP2000275059A/en
Publication of JP2000275059A5 publication Critical patent/JP2000275059A5/ja
Application granted granted Critical
Publication of JP4120904B2 publication Critical patent/JP4120904B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

PROBLEM TO BE SOLVED: To simplify gap adjustment, and to obtain a magnetic encoder with high detection accuracy by setting the thickness of the resin part of a flexible printed circuit FPC while the thickness is equal to the gap interval between a magnetic sensor and a magnetic record medium. SOLUTION: For example, in the outer-periphery direction of the surface of a magnetic medium 1, a magnetic pole is polarized so that N and S oppose N and S, respectively, like NSSNNS, and a polarizing pitch λ should be set to approximately 38 μm. The magnetic medium 1 is fixed to a shaft 9 and is rotated with the rotation of the shaft 9. A magnetic sensor 2 is arranged opposite to the magnetic medium 1 so that the thickness of a resin part 15 of an FPC is set to a gap (g). At this time, the resin part 15 of the FPC also adheres to a magnetic sensor element, and the gap (g) is formed by the thickness of the resin part 15 of the FPC. In this manner, an FPC 11 with the resin part 15 of the FPC for covering the surface of a magnetic sensor element 3 is used, thus easily limiting the small gap (g) to approximately 25 μm without changing the thermocompression bonding process of the FPC and the magnetic sensor element.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、磁気ドラムまたは
磁気スケールとを組み合わせて、位置あるいは速度検出
に使用される磁気センサの構成に係わり、特に磁気ドラ
ムや磁気スケールと磁気センサとを接触させて用いる磁
気センサと磁気式エンコーダに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a configuration of a magnetic sensor used for detecting a position or a speed by combining a magnetic drum or a magnetic scale, and in particular, by bringing a magnetic drum or a magnetic scale into contact with a magnetic sensor. The present invention relates to a magnetic sensor and a magnetic encoder used.

【0002】[0002]

【従来の技術】図7に示すように磁気式エンコーダには
ドラムやスケール形状の磁気媒体1と磁気センサ素子
3、フレキシブルプリント回路4からなる磁気センサ2
との間に適当な間隔(以下ギャップgと言う)が必要で
ある。一般的にはギャップgとは磁気抵抗効果素子5と
磁気媒体の間隔を言うが、本発明においては、図7に示
す様に磁気抵抗効果素子5を保護する目的で設けられた
非磁性膜6の面と磁気媒体の間隔を言う。
2. Description of the Related Art As shown in FIG. 7, a magnetic encoder includes a magnetic medium 1 in the form of a drum or scale, a magnetic sensor element 3, and a flexible printed circuit 4.
An appropriate interval (hereinafter, referred to as a gap g) is required. Generally, the gap g refers to the distance between the magnetoresistive element 5 and the magnetic medium, but in the present invention, as shown in FIG. 7, the nonmagnetic film 6 provided for protecting the magnetoresistive element 5 is provided. Means the distance between the surface and the magnetic medium.

【0003】 磁気センサからの出力の大きさ、波形の
歪みの関係から、磁気媒体の着磁ピッチλと最適ギャッ
プg間には、g=0.5〜0.8λの関係がある。図5
に磁気媒体の着磁ピッチλを40μmとし、磁気センサ
と磁気媒体の間隔を変化させた時の、磁気センサの出力
電圧の関係を示す。ギャップgが着磁ピッチλの約1/
2以下では、センサの出力波形は飽和して歪みを生じる
ため、ギャップgを狭くしても磁気センサの出力は大き
くならない。またギャップgを着磁ピッチλとほぼ同じ
値まで大きくすると、磁気センサの磁気抵抗効果素子部
に届く磁界が弱くなるため、磁場を感じる力が弱くなる
ため磁気センサの出力電圧は小さくなる。従って、安定
したセンサ出力を得るためにはギャップgを、g=0.
5〜0.8λの範囲に保ち、センサの出力信号のばらつ
きを少なくする必要がある。
From the relationship between the magnitude of the output from the magnetic sensor and the distortion of the waveform, there is a relationship of g = 0.5 to 0.8λ between the magnetization pitch λ of the magnetic medium and the optimum gap g. FIG.
FIG. 7 shows the relationship between the output voltage of the magnetic sensor when the magnetization pitch λ of the magnetic medium is 40 μm and the distance between the magnetic sensor and the magnetic medium is changed. The gap g is about 1 / of the magnetized pitch λ.
If it is less than 2, the output waveform of the sensor will saturate and cause distortion, so even if the gap g is narrowed, the output of the magnetic sensor will not increase. When the gap g is increased to a value substantially equal to the magnetization pitch λ, the magnetic field reaching the magnetoresistive element of the magnetic sensor is weakened, and the force for sensing the magnetic field is weakened, so that the output voltage of the magnetic sensor is reduced. Therefore, in order to obtain a stable sensor output, the gap g is set to g = 0.
It is necessary to keep the range of 5 to 0.8λ to reduce the variation of the output signal of the sensor.

【0004】磁気式エンコーダは、出力電圧波形の歪み
が小さく出力が大きくなるように、磁気センサの出力を
測定しながらギャップgを調整し、組立を行っている。
[0004] The magnetic encoder is assembled by adjusting the gap g while measuring the output of the magnetic sensor so that the distortion of the output voltage waveform is small and the output is large.

【0005】その他の方法としてはギャップgに相当す
る厚さを持った治具を作製し、磁気媒体と磁気センサ間
に治具を挿入し、磁気媒体と治具、磁気センサを密着さ
せた状態で磁気センサを固定したあと、治具を除去する
方法が多く用いられている。
As another method, a jig having a thickness corresponding to the gap g is prepared, a jig is inserted between the magnetic medium and the magnetic sensor, and the magnetic medium is brought into close contact with the jig and the magnetic sensor. A method of removing a jig after fixing a magnetic sensor by using a method is often used.

【0006】また、図8a)もしくは図8a)に示す方
式がある。図8a)は、四弗化エチレン系樹脂やポリア
ミド系樹脂シート7を磁気媒体1の外周に貼り付ける構
成である。図8b)は磁気センサ素子3にシート7を貼
付け、前記シートを介して磁気媒体1と磁気センサ2を
接触、摺動する方式である。
There is a method shown in FIG. 8A or 8A). FIG. 8A shows a configuration in which a tetrafluoroethylene-based resin or polyamide-based resin sheet 7 is attached to the outer periphery of the magnetic medium 1. FIG. 8B) shows a method in which a sheet 7 is attached to the magnetic sensor element 3 and the magnetic medium 1 and the magnetic sensor 2 are contacted and slid via the sheet.

【0007】磁気センサ2と磁気媒体1を組み合わせた
ドラム型磁気エンコーダを図6に示しながら説明する。
磁気センサは磁気センサ素子3とフレキシブルプリント
回路4(以下FPCと言う)を磁気センサ素子の端子部
半田とFPCの端子部半田を熱圧着した接合部8をもっ
た構造となっている。接合部8は図7に示すように熱圧
着するため半田が端子部よりはみ出した盛り上がった様
な形状となる。
A drum type magnetic encoder in which the magnetic sensor 2 and the magnetic medium 1 are combined will be described with reference to FIG.
The magnetic sensor has a structure in which a magnetic sensor element 3 and a flexible printed circuit 4 (hereinafter, referred to as FPC) have a joint 8 formed by thermocompression bonding of the terminal solder of the magnetic sensor element and the terminal solder of the FPC. As shown in FIG. 7, the bonding portion 8 has a shape in which the solder is protruded from the terminal portion so as to protrude due to thermocompression bonding.

【0008】磁気媒体1と磁気センサ2を組み合わせた
回転式磁気式エンコーダを図6に斜視図と図7に側面図
で示している。磁気媒体表面外周方向には磁極がNSS
NNSの様にNとN、SとSが対向する様に着磁されて
おり,NとSもしくはSとNの間隔を着磁ピッチλで表
している。磁気媒体1は軸9に固定され軸9の回転と共
に回転する。磁気センサ2と磁気媒体1とはギャップg
の間隔を持って対峙するように配置されている。FPC
4は磁気センサ素子3の磁気媒体1側に配置されるのが
多い。FPCの厚みとギャップgとの関係から、磁気媒
体端部よりFPC4が外側に外れる位置に配置されるの
が一般的である。
FIG. 6 is a perspective view and FIG. 7 is a side view of a rotary magnetic encoder in which a magnetic medium 1 and a magnetic sensor 2 are combined. The magnetic pole is NSS in the outer circumferential direction of the magnetic medium surface.
Like NNS, the magnets are magnetized so that N and N and S and S face each other, and the interval between N and S or S and N is represented by a magnetizing pitch λ. The magnetic medium 1 is fixed to the shaft 9 and rotates with the rotation of the shaft 9. The gap g between the magnetic sensor 2 and the magnetic medium 1
Are arranged so as to face each other with an interval of. FPC
4 is often arranged on the magnetic medium 1 side of the magnetic sensor element 3. From the relationship between the thickness of the FPC and the gap g, the FPC 4 is generally arranged at a position where the FPC 4 is outside the end of the magnetic medium.

【0009】出力電圧波形の歪みが小さく出力が大きく
なるように、磁気センサの出力を測定しながらギャップ
を調整し、組立を行う方法は最適のギャップ寸法が得ら
れるため、磁気媒体や磁気センサの特性ばらつきを吸収
し、磁気エンコーダとしての特性ばらつきは小さくする
ことが出来る。しかしながら、磁気エンコーダ毎にギャ
ップを調整する方法は、実際にセンサ出力を見ながら最
適ギャップに調整を行うため、組立工数がかかり原価低
減を進める上で妨げになっている。
The method of adjusting the gap while measuring the output of the magnetic sensor and assembling so that the output voltage waveform distortion is small and the output is large can provide the optimum gap size. The characteristic variation can be absorbed and the characteristic variation as the magnetic encoder can be reduced. However, in the method of adjusting the gap for each magnetic encoder, since the adjustment is performed to the optimum gap while actually checking the sensor output, the number of assembly steps is increased, which hinders the cost reduction.

【0010】ギャップに相当する厚さを持った治具を作
製し、磁気媒体と磁気センサ間に治具を挿入し、磁気媒
体と治具、磁気センサを密着させた状態で磁気センサを
固定したあと、治具を除去する方法を採用するには、ギ
ャップgが大きな値であれば容易であるが、例えば30
〜40μmという極小範囲に調整しなければならない場
合は、治具を除去する際、磁気センサや記録媒体の表面
に傷を付ける危険性があるため、採用が難しい。また、
30〜40μmの厚の治具を作ることも難しいものであ
った。
A jig having a thickness corresponding to the gap was prepared, a jig was inserted between the magnetic medium and the magnetic sensor, and the magnetic sensor was fixed in a state where the magnetic medium, the jig and the magnetic sensor were in close contact with each other. Then, it is easy to adopt a method of removing the jig if the gap g is a large value.
When it is necessary to adjust the distance to a minimum range of about 40 μm, there is a risk of damaging the surface of the magnetic sensor and the recording medium when the jig is removed, so that it is difficult to adopt the jig. Also,
It was also difficult to make a jig having a thickness of 30 to 40 μm.

【0011】図8に、これらの欠点を解消する方法とし
て、四弗化エチレン系樹脂やポリアミド系樹脂シート7
を磁気媒体1もしくは磁気センサ素子3に貼付け、前記
シート7を介して磁気媒体1と磁気センサ2を接触、摺
動する方式を示す。図8a)はシートを磁気媒体側に貼
り付けた構造、図8b)はシート7を磁気センサ側に貼
り付けた構造を示している。四弗化エチレン系樹脂やポ
リアミド系樹脂シート7を貼る工数は増加するが、前述
した方法に比べシート貼りは磁気エンコーダ組立時に行
う必要がなく、別工程で貼り付けできるため製造方法と
しては、採用し易いものである。しかし、シート7の貼
付け樹脂がシートからはみ出した場合の処理等解決すべ
き問題は多い。
FIG. 8 shows a method for overcoming these drawbacks, which is to use a sheet of polytetrafluoroethylene resin or polyamide resin.
Is attached to the magnetic medium 1 or the magnetic sensor element 3, and the magnetic medium 1 and the magnetic sensor 2 are contacted and slid via the sheet 7. FIG. 8A shows a structure in which the sheet is attached to the magnetic medium side, and FIG. 8B) shows a structure in which the sheet 7 is attached to the magnetic sensor side. Although the number of steps for attaching the polytetrafluoroethylene-based resin or polyamide-based resin sheet 7 is increased, it is not necessary to attach the sheet at the time of assembling the magnetic encoder as compared with the above-described method, and the sheet can be attached in a separate process. It is easy to do. However, there are many problems to be solved such as processing when the adhesive resin of the sheet 7 protrudes from the sheet.

【0012】[0012]

【発明が解決しようとする課題】本発明は、磁気センサ
の製造工程を煩雑にせずに、かつ磁気式エンコーダのギ
ャップ調整の工程を簡易化し、検出精度の良好な磁気式
エンコーダを得ることを課題としている。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic encoder having good detection accuracy without complicating the manufacturing process of the magnetic sensor, simplifying the process of adjusting the gap of the magnetic encoder. And

【0013】[0013]

【課題を解決するための手段】本発明の磁気センサは、
一定のピッチλで交互に逆向きに磁化された所定磁気パ
ターンを有する磁気記録媒体に間隔を隔てて対向するよ
うに配設され、前記磁気パターンを電気抵抗変化として
検出する磁気抵抗効果素子を備えた磁気センサであっ
て、FPCの樹脂部がセンサ部の少なくとも一部を覆う
構成である。
The magnetic sensor of the present invention comprises:
A magnetic recording medium having a magnetic recording medium having a predetermined magnetic pattern alternately magnetized in a reverse direction at a constant pitch λ; The resin part of the FPC covers at least a part of the sensor part.

【0014】FPCの樹脂部とは導体用金属配線のない
領域を言い、樹脂フィルムもしくは樹脂フィルムと接着
剤からなる領域を言い、磁気抵抗効果素子を保護する目
的で設けられた非磁性膜の面をFPCの樹脂部で一部又
は全域を覆う事で磁気センサと磁気記録媒体の間隔を確
保する事ができる。
The resin portion of the FPC refers to a region having no metal wiring for a conductor, a region formed of a resin film or a resin film and an adhesive, and a surface of a nonmagnetic film provided for the purpose of protecting the magnetoresistive element. By covering a part or the whole of the area with the resin part of the FPC, the interval between the magnetic sensor and the magnetic recording medium can be secured.

【0015】前記FPCの樹脂部の厚さを磁気センサと
磁気記録媒体との間隔に等し、磁気媒体とFPC樹脂部
を介して磁気センサを押しつけるだけでギャップgが容
易に得られ、工数のかかるギャップ調整が容易になるば
かりではなく、磁気媒体や磁気センサ表面の傷の発生も
防ぐことができる。
The gap g can be easily obtained simply by making the thickness of the resin part of the FPC equal to the distance between the magnetic sensor and the magnetic recording medium and pressing the magnetic sensor through the magnetic medium and the FPC resin part. Not only the gap adjustment becomes easy, but also the generation of scratches on the surface of the magnetic medium and the magnetic sensor can be prevented.

【0016】前記FPCの樹脂部の厚さを着磁ピッチλ
に対して0.2〜1λの値にすることにより、磁気セン
サからの出力波形の歪みを最小限に抑え十分な出力電圧
を得ることができる。
The thickness of the resin portion of the FPC is determined by a magnetization pitch λ.
By setting the value to 0.2 to 1λ, the distortion of the output waveform from the magnetic sensor can be minimized and a sufficient output voltage can be obtained.

【0017】本発明の磁気を感知する素子を保護する目
的で設けられた非磁性膜の面の少なくとも一部を覆うF
PCの樹脂部は、接着剤により固定されておらず、磁気
媒体と磁気センサの押しつける力で磁気センサ側に変形
することにより、ギャップgを得られるもので、接着剤
の厚み分ギャップgを小さくすることが可能となるばか
りでなく、接着剤塗布および固着させる工程を省くこと
が可能となる。
F covering at least a part of the surface of the nonmagnetic film provided for the purpose of protecting the element for sensing magnetism of the present invention.
The resin part of the PC is not fixed by the adhesive, and the gap g can be obtained by deforming to the magnetic sensor side by the pressing force of the magnetic medium and the magnetic sensor, and the gap g is reduced by the thickness of the adhesive. In addition to this, it is possible to omit the steps of applying and fixing the adhesive.

【0018】本発明のFPCの樹脂部は、磁気センサー
幅wのw/10以上磁気センサー端部より出ていること
で、磁気媒体と磁気センサの相対的な動きにおいても、
FPCの樹脂部のスリップスティックによる変形を防止
することができ、磁気媒体と磁気センサの相対的な動き
をスムーズに行うことが可能となる。
Since the resin portion of the FPC of the present invention protrudes from the end of the magnetic sensor by at least w / 10 of the magnetic sensor width w, the relative movement between the magnetic medium and the magnetic sensor can be improved.
Deformation of the resin portion of the FPC by the slip stick can be prevented, and relative movement between the magnetic medium and the magnetic sensor can be performed smoothly.

【0019】磁気媒体とFPC樹脂部の摺動部はシリコ
ンオイル等の潤滑油を塗ることにより摩擦抵抗をより低
下させることもできる。
The sliding resistance between the magnetic medium and the FPC resin portion can be further reduced in frictional resistance by applying a lubricating oil such as silicone oil.

【0020】本発明の磁気センサは、FPC樹脂部の磁
気センサーの端部より出ている部分が、磁気センサー側
に曲面を持って反っていることで、FPC樹脂部の端部
の磁気媒体と磁気センサの対峙部分への巻き込みが防止
される。
In the magnetic sensor according to the present invention, the portion of the FPC resin portion protruding from the end of the magnetic sensor is curved with the curved surface toward the magnetic sensor, so that the magnetic medium at the end of the FPC resin portion is free from the magnetic medium. Entanglement of the magnetic sensor on the facing portion is prevented.

【0021】FPC樹脂部の曲面は、FPC端子部と磁
気センサ端子部に付加された半田面を合わせ、加熱され
た治具で圧力を加えることで熱圧接する工程で同時に行
うことも可能であるし、FPC単体を別工程で曲面形成
を行っても良い。
The curved surface of the FPC resin portion can be formed at the same time in the process of joining the FPC terminal portion and the solder surface added to the magnetic sensor terminal portion and applying heat and pressure by using a heated jig. Alternatively, a curved surface may be formed on a single FPC in a separate step.

【0022】本発明の磁気センサは、磁気センサの電極
とFPCの電極とを半田で接合する際に発生する半田の
オーバーフローを半田接合部の近傍に設けたFPCの切
り欠き部に逃がすことで、オーバーフローした半田がF
PCの磁気媒体対向面側に出ることや、隣接する電極間
の短絡を防ぐことができる。もし、半田がFPCの磁気
媒体対向面側に一部でも飛び出すと、ギャップgが変化
するだけでなく、磁気媒体面に傷を誘発することとな
る。FPCに設けた切り欠き部の形状は、磁気媒体移動
方向と平行に設けることが好ましく、また、多数の電極
端子各々に設けても良いし、複数の電極に対し一つの切
り欠き部を設けても良い物である。切り欠き部の形状
は、凹んだ穴、貫通した孔、切り欠き等の構造を含むも
のである。
According to the magnetic sensor of the present invention, the overflow of the solder generated when the electrode of the magnetic sensor and the electrode of the FPC are joined by solder is escaped to the notch of the FPC provided near the solder joint. The overflowed solder is F
It is possible to prevent the PC from coming out on the side facing the magnetic medium and to prevent a short circuit between adjacent electrodes. If the solder jumps out even to a part of the FPC on the side facing the magnetic medium, not only does the gap g change, but also the surface of the magnetic medium is damaged. The shape of the notch provided in the FPC is preferably provided in parallel with the moving direction of the magnetic medium, and may be provided in each of a large number of electrode terminals, or one notch may be provided for a plurality of electrodes. Is also a good thing. The shape of the notch includes a structure such as a concave hole, a penetrating hole, and a notch.

【0023】本発明の磁気エンコーダは、磁気センサ側
に設けられたFPCの樹脂部の厚みを磁気センサと磁気
媒体間のギャップgとし、FPCの樹脂部を変形させ磁
気記録媒体と密着させたものでギャップを安定にかつ容
易に実現できるものである。
In the magnetic encoder of the present invention, the thickness of the resin portion of the FPC provided on the magnetic sensor side is defined as a gap g between the magnetic sensor and the magnetic medium, and the resin portion of the FPC is deformed and brought into close contact with the magnetic recording medium. Thus, the gap can be stably and easily realized.

【0024】本発明の磁気エンコーダは、磁気媒体に磁
気センサを押し付ける力fを10g以下にすることで磁
気媒体と磁気センサの摺動をスムーズに行うことができ
る。8g以下がより好ましいものである。10g以上の
押し付け力では、FPCの樹脂層の磨耗が大きくなりゴ
ミの発生が多くなるためである。また、15gを越える
とFPC樹脂部と磁気媒体の摩擦により、摺動がスムー
ズに行かずFPCの樹脂部が摺動方向に引っ張られる様
な動き(スリップスティック)を起こし、最後にはFP
Cの樹脂部が破損してしまうためである。
The magnetic encoder of the present invention can smoothly slide the magnetic medium and the magnetic sensor by setting the force f for pressing the magnetic sensor against the magnetic medium to 10 g or less. 8 g or less is more preferable. With a pressing force of 10 g or more, the abrasion of the resin layer of the FPC increases, and the generation of dust increases. On the other hand, if the weight exceeds 15 g, the sliding of the FPC resin portion and the magnetic medium is not smooth, and the FPC resin portion is pulled in the sliding direction (slip stick).
This is because the C resin portion is damaged.

【0025】[0025]

【発明の実施の形態】以下、本発明を実施例により詳細
に説明する。図1は本発明の一実施例の磁気センサであ
り、a)は斜視図、b)は正面図、c)は側面図であ
る。図2は本発明の磁気センサを用いた磁気式エンコー
ダを説明する斜視図であり、図3は側面図である。図4
は本発明の他の実施例に係る磁気センサであり、a)は
FPCの樹脂部の厚いタイプ、b)は磁気センサ素子の
両端にFPCを引き出したタイプである。以下、符号は
判り易いように従来例と同じ部品に付いては同じ符号を
用いた。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to embodiments. FIG. 1 shows a magnetic sensor according to an embodiment of the present invention, in which a) is a perspective view, b) is a front view, and c) is a side view. FIG. 2 is a perspective view illustrating a magnetic encoder using the magnetic sensor of the present invention, and FIG. 3 is a side view. FIG.
Is a magnetic sensor according to another embodiment of the present invention, wherein a) is a type in which the resin portion of the FPC is thick, and b) is a type in which the FPC is drawn out at both ends of the magnetic sensor element. Hereinafter, the same reference numerals are used for the same parts as those in the conventional example for easy understanding.

【0026】(実施例1)図1を用い実施例に係る磁気
センサを説明する。磁気センサ素子3はガラス基板に磁
気抵抗効果素子5や引出し線10を、フォトリソグラフ
ィー技術とスパッタ製膜技術等を用い作製してある。磁
気抵抗効果素子5の上面には非磁性の保護膜6が付加さ
れている。引き出し線10は磁気抵抗効果素子5とFP
C接合部8を電気的に結合するものである。
(Embodiment 1) A magnetic sensor according to an embodiment will be described with reference to FIG. The magnetic sensor element 3 has a magnetoresistive element 5 and a lead wire 10 formed on a glass substrate by using a photolithography technique, a sputtering film forming technique, and the like. A nonmagnetic protective film 6 is added on the upper surface of the magnetoresistive element 5. The lead wire 10 is connected to the magnetoresistive element 5 and the FP
The C joint 8 is electrically connected.

【0027】FPC11は磁気センサ素子3を覆うよう
に配置され、FPCのほぼ中央部でFPC11と磁気セ
ンサ3は接合部8で半田により熱圧着され機械的および
電気的に結合される。FPC11には磁気センサ素子3
と反対の方向に導体部12を介して外部端子13が設け
られている。磁気センサ3とFPC11の接合強度を補
強するため補強樹脂14が塗られている。この、補強樹
脂14にはエポキシ系樹脂を用い120度の温度で30
分間空気中で加熱硬化させた。
The FPC 11 is disposed so as to cover the magnetic sensor element 3. At substantially the center of the FPC, the FPC 11 and the magnetic sensor 3 are thermocompression-bonded at the joint 8 by soldering and mechanically and electrically connected. The FPC 11 has a magnetic sensor element 3
External terminals 13 are provided via conductors 12 in the opposite direction. A reinforcing resin 14 is applied to reinforce the bonding strength between the magnetic sensor 3 and the FPC 11. The reinforcing resin 14 is made of an epoxy resin and has a temperature of 120.degree.
Heat cured in air for minutes.

【0028】FPCは、薄型と呼ばれているものでポリ
イミド系樹脂シート25μm、接合接着層35μm、銅
回路層35μm、接合接着層35μm、ポリイミド系樹
脂シート25μmの5層で合計140μm厚のものを使
用した。。磁気センサ素子3を覆うようにFPCの樹脂
部15が配置されるが、銅回路層35μm、両側の接合
接着層、片側のポリイミド樹脂シートが無いためFPC
の樹脂部15は25μmの厚みである。FPCの樹脂部
15は磁気センサ素子3とは樹脂等で接着されることな
く、銅回路層厚35μmと接合部8の半田厚に約10μ
mの合計約45μmの空隙を磁気センサ素子3との間に
持った状態で保持されている。
The FPC is called a thin type. The FPC is a polyimide resin sheet 25 μm, a bonding adhesive layer 35 μm, a copper circuit layer 35 μm, a bonding adhesive layer 35 μm, and a polyimide resin sheet 25 μm. used. . The resin portion 15 of the FPC is disposed so as to cover the magnetic sensor element 3. However, since there is no copper circuit layer 35 μm, the bonding adhesive layers on both sides, and the polyimide resin sheet on one side, the FPC
Has a thickness of 25 μm. The resin portion 15 of the FPC is not bonded to the magnetic sensor element 3 with a resin or the like, and has a copper circuit layer thickness of 35 μm and a solder thickness of the bonding portion 8 of about 10 μm.
The gap is maintained with a gap of about 45 μm in total with the magnetic sensor element 3.

【0029】FPCの樹脂部15の幅は磁気センサ素子
3の幅wの1/10以上片側がはみ出す寸法となってお
り、端部が磁気センサ側に曲面を持って反った部分17
が付けられている。これは、FPC樹脂部15が磁気媒
体と磁気センサ間に巻き込まれないようにするためであ
る。反った部分17の端部は、磁気センサ素子3の厚み
方向から出ない程度とした。
The width of the resin portion 15 of the FPC is at least one-tenth of the width w of the magnetic sensor element 3 and is protruded on one side.
Is attached. This is to prevent the FPC resin portion 15 from being caught between the magnetic medium and the magnetic sensor. The end of the warped portion 17 was set so as not to protrude from the thickness direction of the magnetic sensor element 3.

【0030】また、FPCの樹脂部15の接合部8近傍
には、ポリイミド系樹脂が切除された切り欠き部18が
設けられている。この切り欠き部18は接合部8の位置
合わせが容易に出来るだけでなく、半田の熱圧着時にし
みだした半田の逃がし部となるものである。本実施例で
は、全ての接合部8を一つの切り欠き部でカバーできる
様な形状とした。切り欠き部18の高さ方向の寸法(F
PCの樹脂部方向の寸法)は、0.4mmとした。
In the vicinity of the joining portion 8 of the resin portion 15 of the FPC, a notch 18 from which the polyimide resin is cut is provided. The notch 18 not only facilitates the alignment of the joint 8 but also serves as a relief for the solder that has exuded during the thermocompression bonding of the solder. In this embodiment, the shape is such that all the joints 8 can be covered by one notch. The height dimension of the notch 18 (F
The dimension of the PC in the resin part direction) was 0.4 mm.

【0031】図2に本発明の磁気センサを磁気媒体と組
み合わせた磁気エンコーダの斜視図を示す。磁気媒体表
面外周方向には磁極がNSSNNSの様にNとN、Sと
Sが対向する様に着磁されており、着磁ピッチλは38
μmである。磁気媒体1は軸9に固定され軸9の回転と
共に回転する。磁気センサ2と磁気媒体1とはFPCの
樹脂部15の厚さがギャップgとなり対峙するように配
置されている。このときFPCの樹脂部15は、磁気セ
ンサ素子にも密着している。
FIG. 2 is a perspective view of a magnetic encoder in which the magnetic sensor of the present invention is combined with a magnetic medium. The magnetic poles are magnetized in the outer circumferential direction of the magnetic medium so that N and N and S and S face each other like NSSNNS, and the magnetization pitch λ is 38.
μm. The magnetic medium 1 is fixed to the shaft 9 and rotates with the rotation of the shaft 9. The magnetic sensor 2 and the magnetic medium 1 are arranged so that the thickness of the resin portion 15 of the FPC becomes a gap g and is opposed to each other. At this time, the resin portion 15 of the FPC is also in close contact with the magnetic sensor element.

【0032】FPCの樹脂部15の密着部分等を、図3
の断面図で詳細に説明する。磁気媒体1に10g以下の
押し付け力fで磁気センサが押された状態で固定されて
いるため、FPCの樹脂部15は切り欠き部18近傍で
曲がり磁気センサ素子3と密着され、FPCの樹脂部1
5の厚みでギャップgが形成される。接合部8で発生し
た半田のしみ出し部19は切り欠き部18の空間にトラ
ップされ、FPC11の磁気媒体側には出ていない。
FIG. 3 shows the close contact portion of the resin portion 15 of the FPC.
This will be described in detail with reference to a sectional view of FIG. Since the magnetic sensor is pressed against the magnetic medium 1 with a pressing force f of 10 g or less, the resin portion 15 of the FPC bends in the vicinity of the notch portion 18 to be in close contact with the magnetic sensor element 3 and the resin portion of the FPC 1
A gap g is formed at a thickness of 5. The exuded portion 19 of the solder generated at the joining portion 8 is trapped in the space of the notch portion 18 and does not protrude to the magnetic medium side of the FPC 11.

【0033】この様に磁気センサ素子3の面を覆うよう
なFPCの樹脂部15を持ったFPC11を用いること
で、FPCと磁気センサ素子の熱圧着工程を何ら変更す
ることなく、本実施例の25μmと小さなギャップgを
容易に規制することができるものである。
By using the FPC 11 having the resin portion 15 of the FPC so as to cover the surface of the magnetic sensor element 3, the thermocompression bonding process between the FPC and the magnetic sensor element can be performed without any change. The gap g as small as 25 μm can be easily regulated.

【0034】(実施例2)図4a)に、ギャップgを大
きくしたものを示す。FPCの樹脂部15はポリイミド
系樹脂シート25μm、接着層35μmをそれぞれ2層
合わせたもので合計120μmとなっている。ポリイミ
ド系樹脂シート、接着層の厚みを変えたFPCを使用す
ることで、容易にギャップgを変えることが可能である
ことは言うまでもない。
(Embodiment 2) FIG. 4a) shows an example in which the gap g is increased. The resin portion 15 of the FPC is obtained by combining two layers of a polyimide resin sheet 25 μm and an adhesive layer 35 μm, and has a total of 120 μm. It goes without saying that the gap g can be easily changed by using a polyimide resin sheet and an FPC in which the thickness of the adhesive layer is changed.

【0035】(実施例3)磁気センサ素子3を小型化す
る方策してと図4b)に示す様に、両端2カ所に端子を
有する磁気センサ素子3と、前記端子に対応する端子と
半田逃げ用きり欠き部を有するフレキシブルケーブル1
2とを合わせて、半田を付けた両者の端子を熱圧着させ
た構造である。磁気センサ素子3の両端に端子を持つよ
うに配線することで、端子部分の幅の広がりを抑え、素
子サイズの小型化を図ることができる。磁気センサ素子
3において、端子の占める領域が大きい場合に特に有効
である。
(Embodiment 3) As shown in FIG. 4b), as a measure for reducing the size of the magnetic sensor element 3, a magnetic sensor element 3 having terminals at two positions on both ends, and a terminal corresponding to the terminal and a solder escape Flexible cable 1 with cutout
2 and the two terminals to which solder has been applied are thermocompression bonded. By wiring so as to have terminals at both ends of the magnetic sensor element 3, the width of the terminal portion can be suppressed from increasing, and the element size can be reduced. This is particularly effective when the area occupied by the terminals in the magnetic sensor element 3 is large.

【0036】本発明の構造を用いると、極小ピッチの磁
気記録媒体に対応した磁気センサを得ることができる。
磁気記録媒体のピッチλが極小の場合は、λの周期で変
化する磁気信号を正確に読みとり検出精度を良好にする
ためには、磁気ドラムと磁気センサ間のギャップをある
程度小さく、かつ一定に保つ必要がある。図5の磁気セ
ンサの出力特性の一例が示すように、本発明の構成の磁
気センサを用いると、センサ出力の大きい極小ギャップ
=10〜20μmの範囲でも安定して使用することがで
きる。従来の磁気センサは、ギャップ自体を小さくする
ことに加えて、ギャップの長さの誤差や組立時のズレに
よる出力変化を抑制することが困難であった。これに比
べて、本発明の構成を用いた磁気センサは、25μm以
下のギャップにも対応可能で、安定したセンサ出力電圧
を得ることができる。
By using the structure of the present invention, a magnetic sensor corresponding to a magnetic recording medium having a very small pitch can be obtained.
When the pitch λ of the magnetic recording medium is extremely small, the gap between the magnetic drum and the magnetic sensor is kept to some extent small and constant in order to accurately read a magnetic signal that changes at a period of λ and improve detection accuracy. There is a need. As shown by an example of the output characteristic of the magnetic sensor in FIG. 5, when the magnetic sensor having the configuration of the present invention is used, the magnetic sensor can be used stably even in the range of a very small gap having a large sensor output = 10 to 20 μm. In the conventional magnetic sensor, in addition to reducing the gap itself, it was difficult to suppress an output change due to a gap length error or a displacement during assembly. On the other hand, the magnetic sensor using the configuration of the present invention can handle a gap of 25 μm or less, and can obtain a stable sensor output voltage.

【0037】[0037]

【発明の効果】上記本発明の構成を用いれば、磁気式エ
ンコーダを組み立てる際に、ギャップ調整を行わずに、
磁気センサを接触させて用いることができる。このよう
な磁気式エンコーダは検出精度が良好であり、組立工程
が単純で大量生産にも向き、かつ安価である。
According to the configuration of the present invention, when assembling the magnetic encoder, the gap can be adjusted without performing the gap adjustment.
A magnetic sensor can be used in contact. Such a magnetic encoder has good detection accuracy, has a simple assembling process, is suitable for mass production, and is inexpensive.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の磁気センサの外観図であ
る。
FIG. 1 is an external view of a magnetic sensor according to an embodiment of the present invention.

【図2】本発明の磁気センサを用いた磁気式エンコーダ
の斜視図である。
FIG. 2 is a perspective view of a magnetic encoder using the magnetic sensor of the present invention.

【図3】本発明の磁気センサを用いた磁気式エンコーダ
の断面図である。
FIG. 3 is a sectional view of a magnetic encoder using the magnetic sensor of the present invention.

【図4】本発明の他の実施例の磁気センサの断面図であ
る。
FIG. 4 is a sectional view of a magnetic sensor according to another embodiment of the present invention.

【図5】ギャップgと磁気センサ出力電圧の関係を説明
する図である。
FIG. 5 is a diagram illustrating a relationship between a gap g and a magnetic sensor output voltage.

【図6】従来の磁気エンコーダの斜視図である。FIG. 6 is a perspective view of a conventional magnetic encoder.

【図7】従来の磁気エンコーダの断面図である。FIG. 7 is a sectional view of a conventional magnetic encoder.

【図8】従来の磁気エンコーダのギャップ調整を示す図
である。
FIG. 8 is a diagram showing gap adjustment of a conventional magnetic encoder.

【符号の説明】[Explanation of symbols]

1 磁気媒体、2 磁気センサ、3 磁気センサ素子、
4,11 FPC、5 磁気抵抗効果素子、6 非磁性
膜、7 樹脂シート、8 熱圧着接合部、9 軸、10
引き出し線、12 導体部、13 外部端子、14
補強樹脂、15 FPCの樹脂部、16 空隙、17
反り部、18 切り欠き部、19 半田しみだし部
1 magnetic medium, 2 magnetic sensors, 3 magnetic sensor elements,
4, 11 FPC, 5 magnetoresistive element, 6 non-magnetic film, 7 resin sheet, 8 thermocompression bonding section, 9 axes, 10
Lead wire, 12 conductor, 13 external terminal, 14
Reinforcement resin, 15 FPC resin part, 16 gap, 17
Warp, 18 Notch, 19 Solder bleed

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 一定のピッチλで交互に逆向きに磁化さ
れた所定磁気パターンを有する磁気記録媒体に間隔を隔
てて対向するように配設され、前記磁気パターンを電気
抵抗変化として検出する磁気抵抗効果素子を備えた磁気
センサであって、フレキシブルプリント回路の樹脂部が
センサ部の少なくとも一部を覆う構成であることを特徴
とする磁気センサ。
1. A magnetic device, which is disposed so as to face a magnetic recording medium having a predetermined magnetic pattern alternately magnetized in a reverse direction at a constant pitch λ with an interval, and detects the magnetic pattern as a change in electric resistance. A magnetic sensor having a resistance effect element, wherein a resin portion of a flexible printed circuit covers at least a part of the sensor portion.
【請求項2】 前記フレキシブルプリント回路の樹脂部
の厚さが磁気センサと磁気記録媒体とのギャップ間隔に
等しいことを特徴とする請求項1に記載の磁気センサ。
2. The magnetic sensor according to claim 1, wherein the thickness of the resin portion of the flexible printed circuit is equal to the gap between the magnetic sensor and the magnetic recording medium.
【請求項3】 前記フレキシブルプリント回路の樹脂部
の厚さが着磁ピッチλに対して0.2〜1λの範囲とす
ることを特徴とする請求項1または請求項2に記載の磁
気センサ。
3. The magnetic sensor according to claim 1, wherein the thickness of the resin portion of the flexible printed circuit is in a range of 0.2 to 1λ with respect to the magnetization pitch λ.
【請求項4】 フレキシブルプリント回路の樹脂部と磁
気センサは固定されていないことを特徴とする請求項1
または請求項2に記載の磁気センサ。
4. The flexible printed circuit according to claim 1, wherein the resin portion and the magnetic sensor are not fixed.
Alternatively, the magnetic sensor according to claim 2.
【請求項5】 フレキシブルプリント回路の樹脂部は、
磁気センサ幅wのw/10以上磁気センサ端部より出て
いることを特徴とする請求項1または請求項2に記載の
磁気センサ。
5. The resin part of the flexible printed circuit,
The magnetic sensor according to claim 1, wherein the magnetic sensor protrudes from an end of the magnetic sensor by at least w / 10 of a width w of the magnetic sensor.
【請求項6】 フレキシブルプリント回路の樹脂部は、
磁気センサの端部より出ている部分が、磁気センサ側に
曲面を持って反っていることを特徴とする請求項1また
は請求項2に記載の磁気センサ。
6. The resin part of the flexible printed circuit,
The magnetic sensor according to claim 1, wherein a portion protruding from an end of the magnetic sensor is curved with a curved surface toward the magnetic sensor.
【請求項7】 磁気センサとフレキシブルプリント回路
とのウェルダ時に発生する半田のオーバーフローをフレ
キシブルプリント回路に設けた切り欠き部に逃がしたこ
とを特徴とする請求項1または請求項2に記載の磁気セ
ンサ。
7. The magnetic sensor according to claim 1, wherein an overflow of solder generated at the time of welding between the magnetic sensor and the flexible printed circuit is escaped to a notch provided in the flexible printed circuit. .
【請求項8】 前記フレキシブルプリント回路の樹脂部
の厚みを磁気センサと磁気媒体間のギャップとし、フレ
キシブルプリント回路の樹脂部を変形させ磁気記録媒体
と密着させ、それらを摺動させるような構成とする請求
項1ないし5のいずれかに記載の磁気センサを用いた磁
気式エンコーダ。
8. A structure in which the thickness of the resin portion of the flexible printed circuit is set as a gap between the magnetic sensor and the magnetic medium, and the resin portion of the flexible printed circuit is deformed and brought into close contact with the magnetic recording medium, so that they are slid. A magnetic encoder using the magnetic sensor according to claim 1.
JP08364199A 1999-03-26 1999-03-26 Magnetic encoder Expired - Lifetime JP4120904B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08364199A JP4120904B2 (en) 1999-03-26 1999-03-26 Magnetic encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08364199A JP4120904B2 (en) 1999-03-26 1999-03-26 Magnetic encoder

Publications (3)

Publication Number Publication Date
JP2000275059A true JP2000275059A (en) 2000-10-06
JP2000275059A5 JP2000275059A5 (en) 2006-01-19
JP4120904B2 JP4120904B2 (en) 2008-07-16

Family

ID=13808089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08364199A Expired - Lifetime JP4120904B2 (en) 1999-03-26 1999-03-26 Magnetic encoder

Country Status (1)

Country Link
JP (1) JP4120904B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1221622A2 (en) * 2001-01-09 2002-07-10 Hitachi Metals, Ltd. Magneto resistive sensor
JP2006126087A (en) * 2004-10-29 2006-05-18 Nidec Sankyo Corp Magnetoresistive element
JP2007232616A (en) * 2006-03-02 2007-09-13 Nidec Sankyo Corp Magnetic sensor
JP2008249343A (en) * 2007-03-29 2008-10-16 Mitsubishi Electric Corp Magnetic sensor unit and magnetic rotary encoder
JP2014102163A (en) * 2012-11-20 2014-06-05 Nidec Sankyo Corp Magnetic sensor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6692847B2 (en) * 1920-02-01 2004-02-17 Hitachi Metals, Ltd. Magneto resistive sensor
EP1221622A2 (en) * 2001-01-09 2002-07-10 Hitachi Metals, Ltd. Magneto resistive sensor
EP1221622A3 (en) * 2001-01-09 2003-12-17 Hitachi Metals, Ltd. Magneto resistive sensor
JP2006126087A (en) * 2004-10-29 2006-05-18 Nidec Sankyo Corp Magnetoresistive element
JP2007232616A (en) * 2006-03-02 2007-09-13 Nidec Sankyo Corp Magnetic sensor
JP2008249343A (en) * 2007-03-29 2008-10-16 Mitsubishi Electric Corp Magnetic sensor unit and magnetic rotary encoder
JP4723527B2 (en) * 2007-03-29 2011-07-13 三菱電機株式会社 Magnetic sensor unit and magnetic rotary encoder
JP2014102163A (en) * 2012-11-20 2014-06-05 Nidec Sankyo Corp Magnetic sensor device

Also Published As

Publication number Publication date
JP4120904B2 (en) 2008-07-16

Similar Documents

Publication Publication Date Title
JP4414545B2 (en) Manufacturing method of current sensor
WO2007102465A1 (en) Magnetic sensor device, magnetic encoder device, and magnetic scale manufacturing method
JP4999498B2 (en) Magnetic encoder device
JP4120904B2 (en) Magnetic encoder
JP4881041B2 (en) Magnetic sensor device
EP1316945A2 (en) Magnetic head supporting mechanism and magnetic head positioning control mechanism
JP5086733B2 (en) Magnetic detection probe and method of manufacturing magnetic detection probe
JPH03214783A (en) Laminated sensor
JP2001004729A (en) Magnetic head
JPS5939625Y2 (en) temperature sensor
JP3439923B2 (en) Mounting structure of magnetic sensor
JPH0886848A (en) Magnetism detector
JPH08189932A (en) Pickup sensor, and speed sensor using it
JPH11101658A (en) Magnetic sensor
JP3365620B2 (en) Magnetic sensor and magnetic encoder
KR0165713B1 (en) Rotation sensor and method for manufacturing the same
JP2963208B2 (en) Manufacturing method of magnetoresistive effect type magnetic sensor
JP4240247B2 (en) Detection device
JPH09148642A (en) Piezoelectric actuator and its strain gauge bonding method
US20240003990A1 (en) Magnetic sensor
JP2002174671A (en) Magnetic detector
JPH0323872B2 (en)
JP2698650B2 (en) Magnetic encoder
JP3417144B2 (en) Method of manufacturing position sensor and position sensor
JP2001074768A (en) Piezoelectric sensor and its manufacture

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051125

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051125

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080121

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080125

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080225

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080404

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080417

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110509

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080225

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110509

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120509

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130509

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130509

Year of fee payment: 5

EXPY Cancellation because of completion of term