JP2000269513A5 - - Google Patents

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Publication number
JP2000269513A5
JP2000269513A5 JP2000005580A JP2000005580A JP2000269513A5 JP 2000269513 A5 JP2000269513 A5 JP 2000269513A5 JP 2000005580 A JP2000005580 A JP 2000005580A JP 2000005580 A JP2000005580 A JP 2000005580A JP 2000269513 A5 JP2000269513 A5 JP 2000269513A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000005580A
Other languages
Japanese (ja)
Other versions
JP4656685B2 (en
JP2000269513A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000005580A priority Critical patent/JP4656685B2/en
Priority claimed from JP2000005580A external-priority patent/JP4656685B2/en
Publication of JP2000269513A publication Critical patent/JP2000269513A/en
Publication of JP2000269513A5 publication Critical patent/JP2000269513A5/ja
Application granted granted Critical
Publication of JP4656685B2 publication Critical patent/JP4656685B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000005580A 1999-01-14 2000-01-14 Semiconductor device Expired - Fee Related JP4656685B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000005580A JP4656685B2 (en) 1999-01-14 2000-01-14 Semiconductor device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-8496 1999-01-14
JP849699 1999-01-14
JP2000005580A JP4656685B2 (en) 1999-01-14 2000-01-14 Semiconductor device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2010215788A Division JP5298094B2 (en) 1999-01-14 2010-09-27 Semiconductor device and manufacturing method thereof
JP2010236657A Division JP5244885B2 (en) 1999-01-14 2010-10-21 Method for manufacturing semiconductor device

Publications (3)

Publication Number Publication Date
JP2000269513A JP2000269513A (en) 2000-09-29
JP2000269513A5 true JP2000269513A5 (en) 2007-03-08
JP4656685B2 JP4656685B2 (en) 2011-03-23

Family

ID=26343017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000005580A Expired - Fee Related JP4656685B2 (en) 1999-01-14 2000-01-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JP4656685B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1871711B (en) * 2003-10-28 2011-12-07 株式会社半导体能源研究所 Display device, method for manufacturing same, and television receiver
JP4698998B2 (en) * 2004-09-30 2011-06-08 株式会社半導体エネルギー研究所 Method for manufacturing liquid crystal display device
JP4700317B2 (en) * 2004-09-30 2011-06-15 株式会社半導体エネルギー研究所 Method for manufacturing display device
EP3614442A3 (en) 2005-09-29 2020-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having oxide semiconductor layer and manufactoring method thereof
US7642114B2 (en) 2006-07-19 2010-01-05 Semiconductor Energy Laboratory Co., Ltd. Micro electro mechanical device and manufacturing method thereof
JP2008147207A (en) * 2006-12-06 2008-06-26 Dainippon Printing Co Ltd Thin-film transistor substrate
KR101882350B1 (en) 2009-10-09 2018-07-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Display device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376482A (en) * 1986-09-19 1988-04-06 Hitachi Ltd Amorphous silicon thin-film transistor
JPH0818053A (en) * 1994-06-28 1996-01-19 Mitsubishi Electric Corp Film transistor and its manufacture
JPH10261801A (en) * 1997-03-19 1998-09-29 Toshiba Electron Eng Corp Thin film transistor device and its manufacture

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