JP2000258442A5 - - Google Patents
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- Publication number
- JP2000258442A5 JP2000258442A5 JP1999059535A JP5953599A JP2000258442A5 JP 2000258442 A5 JP2000258442 A5 JP 2000258442A5 JP 1999059535 A JP1999059535 A JP 1999059535A JP 5953599 A JP5953599 A JP 5953599A JP 2000258442 A5 JP2000258442 A5 JP 2000258442A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- emitting device
- elastic body
- light
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 21
- 230000003287 optical effect Effects 0.000 description 15
- 239000010409 thin film Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 238000009429 electrical wiring Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05953599A JP4387485B2 (ja) | 1999-03-08 | 1999-03-08 | エバネッセント光を出射する光源装置 |
| US09/519,672 US6852968B1 (en) | 1999-03-08 | 2000-03-06 | Surface-type optical apparatus |
| US10/995,363 US6974712B2 (en) | 1999-03-08 | 2004-11-24 | Method of fabricating a surface-type optical apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05953599A JP4387485B2 (ja) | 1999-03-08 | 1999-03-08 | エバネッセント光を出射する光源装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000258442A JP2000258442A (ja) | 2000-09-22 |
| JP2000258442A5 true JP2000258442A5 (enrdf_load_stackoverflow) | 2006-04-27 |
| JP4387485B2 JP4387485B2 (ja) | 2009-12-16 |
Family
ID=13116065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05953599A Expired - Lifetime JP4387485B2 (ja) | 1999-03-08 | 1999-03-08 | エバネッセント光を出射する光源装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4387485B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4586350B2 (ja) * | 2003-10-24 | 2010-11-24 | セイコーエプソン株式会社 | 薄膜デバイス及び電子機器 |
| RU2330262C1 (ru) * | 2004-03-30 | 2008-07-27 | Джапан Сайенс Энд Текнолоджи Эйдженси | Использующие матрицу с нанометрическими зазорами способ и устройство для захвата, обнаружения и индентификации вещества |
| JP4935090B2 (ja) * | 2006-01-31 | 2012-05-23 | ソニー株式会社 | 半導体発光装置 |
-
1999
- 1999-03-08 JP JP05953599A patent/JP4387485B2/ja not_active Expired - Lifetime
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