JP2000141670A - マイクロインジェクティングデバイスの厚膜層形成方法 - Google Patents
マイクロインジェクティングデバイスの厚膜層形成方法Info
- Publication number
- JP2000141670A JP2000141670A JP11314410A JP31441099A JP2000141670A JP 2000141670 A JP2000141670 A JP 2000141670A JP 11314410 A JP11314410 A JP 11314410A JP 31441099 A JP31441099 A JP 31441099A JP 2000141670 A JP2000141670 A JP 2000141670A
- Authority
- JP
- Japan
- Prior art keywords
- film layer
- layer
- organic solution
- thick film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 238000010438 heat treatment Methods 0.000 claims abstract description 37
- 238000001035 drying Methods 0.000 claims abstract description 15
- 239000000243 solution Substances 0.000 claims description 139
- 238000000520 microinjection Methods 0.000 claims description 31
- 239000004642 Polyimide Substances 0.000 claims description 14
- 229920001721 polyimide Polymers 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 116
- 239000010409 thin film Substances 0.000 abstract description 35
- 239000011368 organic material Substances 0.000 abstract description 15
- 238000000926 separation method Methods 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 206
- 238000010586 diagram Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 239000012224 working solution Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 235000006732 Torreya nucifera Nutrition 0.000 description 1
- 244000111306 Torreya nucifera Species 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU98119888 | 1998-11-03 | ||
| RU98119888A RU2144472C1 (ru) | 1998-11-03 | 1998-11-03 | Способ образования толстопленочного слоя в микроинжекционном устройстве |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000141670A true JP2000141670A (ja) | 2000-05-23 |
Family
ID=20211920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11314410A Pending JP2000141670A (ja) | 1998-11-03 | 1999-11-04 | マイクロインジェクティングデバイスの厚膜層形成方法 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0999057A3 (zh) |
| JP (1) | JP2000141670A (zh) |
| KR (1) | KR20000034821A (zh) |
| CN (1) | CN1253042A (zh) |
| RU (1) | RU2144472C1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009283593A (ja) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | 半導体装置の製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6964975B2 (ja) * | 2016-01-08 | 2021-11-10 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
| RU2692373C1 (ru) * | 2018-08-03 | 2019-06-24 | Акционерное общество "Российская корпорация ракетно-космического приборостроения и информационных систем" (АО "Российские космические системы") | Способ получения диэлектрического слоя на основе полимерного покрытия в изделиях микроэлектроники |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6053675B2 (ja) * | 1978-09-20 | 1985-11-27 | 富士写真フイルム株式会社 | スピンコ−テイング方法 |
| US4490728A (en) | 1981-08-14 | 1984-12-25 | Hewlett-Packard Company | Thermal ink jet printer |
| US4809428A (en) | 1987-12-10 | 1989-03-07 | Hewlett-Packard Company | Thin film device for an ink jet printhead and process for the manufacturing same |
| US5682187A (en) * | 1988-10-31 | 1997-10-28 | Canon Kabushiki Kaisha | Method for manufacturing an ink jet head having a treated surface, ink jet head made thereby, and ink jet apparatus having such head |
| US5140345A (en) | 1989-03-01 | 1992-08-18 | Canon Kabushiki Kaisha | Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method |
| US5420627A (en) | 1992-04-02 | 1995-05-30 | Hewlett-Packard Company | Inkjet printhead |
| US5274400A (en) | 1992-04-28 | 1993-12-28 | Hewlett-Packard Company | Ink path geometry for high temperature operation of ink-jet printheads |
| US5450108A (en) * | 1993-09-27 | 1995-09-12 | Xerox Corporation | Ink jet printhead which avoids effects of unwanted formations developed during fabrication |
-
1998
- 1998-11-03 RU RU98119888A patent/RU2144472C1/ru active
-
1999
- 1999-03-05 KR KR1019990007326A patent/KR20000034821A/ko not_active Application Discontinuation
- 1999-11-03 CN CN99126009A patent/CN1253042A/zh active Pending
- 1999-11-03 EP EP99308721A patent/EP0999057A3/en not_active Withdrawn
- 1999-11-04 JP JP11314410A patent/JP2000141670A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009283593A (ja) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1253042A (zh) | 2000-05-17 |
| EP0999057A2 (en) | 2000-05-10 |
| EP0999057A3 (en) | 2000-11-29 |
| RU2144472C1 (ru) | 2000-01-20 |
| KR20000034821A (ko) | 2000-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20010807 |