JP2000123435A - Photo-magnetic-optical head, its manufacturing method and recording and reproducing device provided with the head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a photo-magneto-optical head which is small in size and capable of performing high density recording and to provide a recording and reproducing device in which the head is provided, the power consumption is low and the access time is high. SOLUTION: This magnetic head is provided with a first through-hole 12 which passes from the floating surface of a floating type slider 10 whose surface opposing a recording medium floats, toward the opposing surface, a solid immersion lens 13 which constitutes an optical head section buried in the through-hole 12 and a portion of the magneto-optical head and an energizing coil 14 which constitutes a portion of the magneto-optical head section formed on the bottom surface of the lens 13. A mesa section 13a is integrally formed with the lens 13. The section 13a is projected to the surface side which opposes the recording medium and the cross section has an approximate trapezoidal shape. The section 13a is formed so that its center axis coincides with an optical axis.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention irradiates a recording medium with light emitted from a laser light emitter, and performs recording by reversing the magnetization of the recording medium according to the partial heat generation of the focused light and the direction of magnetic flux. In addition, the present invention relates to a recording / reproducing apparatus which detects a change in the optical property of light reflected by a recording medium and reproduces a signal recorded on the recording medium. The present invention relates to a head, a method of manufacturing the same, and a recording / reproducing apparatus including the magneto-optical head.

[0002]

2. Description of the Related Art In recent years, a recording / reproducing apparatus capable of recording a large amount of data at a high density and rapidly reproducing the data in response to multimedia has been receiving attention. For example, recording information on a magneto-optical recording medium that can be overwritten is performed by irradiating the magneto-optical recording medium with laser light and applying a magnetic field corresponding to input information to the irradiation position of the laser light. On the other hand, to reproduce information recorded on a magneto-optical recording medium, a laser beam that is weaker than at the time of recording is irradiated onto the magneto-optical recording medium, and a polarization angle (Kerr angle) that depends on the recording magnetization direction of the reflected light of the laser beam ) Is detected.

A recording / reproducing apparatus that records information on such a magneto-optical recording medium or reproduces information recorded on the magneto-optical recording medium usually includes a combination of a lens, a light emitting element, a light receiving element, a coil, and the like. It is made. For this reason, the magneto-optical head used in such a recording / reproducing apparatus is entirely large and has a large mass. In some cases, a light emitting section, a light receiving section, a coil, and the like are also integrated. It takes time to seek on the magnetic recording medium,
The response is slow and the lens and magneto-optical recording medium
(Hereinafter simply referred to as a recording medium), the spot diameter of the light increases, and there is a limit to high recording density.

[0004] Therefore, a slider and a head are arranged and fixed at the tip of a fan-shaped swingable arm of a swing arm member, and the head is provided with a lens so that a light beam flows along the arm from the rotation shaft fulcrum of the swing arm member. The recording / reproducing apparatus described above has been proposed in Japanese Patent Application Laid-Open No. 10-112036. This Japanese Patent Laid-Open No. 10-112
The head attached to the swing arm of the recording / reproducing apparatus proposed in Japanese Patent No. 036 has a function of generating negative pressure and positive pressure of the convection air with the rotation of the recording medium, and floating the head body. A slider having a portion for transmitting a light beam spot light, an objective lens driving device,
It is composed of a laser light reflecting mirror.

[0005] The portion of the slider that transmits the light beam spot light has an optical element for condensing the recording light on the recording medium made of a material having a refractive index greater than 1, and has a solid immersion lens. In order to reduce the size of the slider, a magnetic coil is built in the slider, and the magnetic coil is arranged on the outer periphery of the optical element to reduce the distance between the recording medium and the magnetic coil, thereby applying a magnetic field. The current flowing through the magnetic coil is reduced so as not to block the optical path of the laser light to be irradiated, so that the recording medium is efficiently irradiated with the laser light.

Further, by arranging the magnetic coil at a position closer to the recording medium than the light emitting surface of the optical element, the power consumption of the recording / reproducing apparatus using the magneto-optical head configured as described above can be suppressed. In addition, the distance between the recording medium and the magnetic coil is reduced by forming the magnetic coil with a film-shaped coil, and the laser irradiated to the recording medium is formed by using a magnetic material that transmits light to the magnetic core. The laser light is efficiently irradiated onto the recording medium so that the optical path of the light is not blocked.

If at least a part of the optical element is made of a magnetic material that transmits laser light, the number of parts used in the magneto-optical head can be reduced, and the size of the magneto-optical head can be reduced. By arranging a magnetic material that transmits light only in the vicinity of the center orthogonal to the laser light emission surface of the optical element, the positioning accuracy of the external magnetic field can be improved.

[0008]

However, in the recording / reproducing apparatus proposed in Japanese Patent Application Laid-Open No. H10-112036, the magnetic coil is arranged on the outer periphery of the solid immersion lens. It is necessary to increase a magnetic flux density by flowing a large current, and there is a problem that power consumption is increased. In addition, when the number of turns of the coil is increased, the inductance increases, and the writing frequency cannot be increased. Therefore, there is a problem that high-speed writing cannot be performed. Further, in order to increase the magnetic flux density, it is necessary to provide a magnetic core. However, if the magnetic core is provided, the structure becomes complicated, and this type of magneto-optical head cannot be downsized. In addition, there is a problem that the inductance further increases. On the other hand, when the magnetic coil is incorporated below the solid immersion lens, the distance between the light emitting surface of the solid immersion lens and the recording medium is increased by the thickness of the magnetic coil, so that the diameter of the light beam spot irradiated on the recording medium is reduced. As a result, the recording density cannot be improved, which causes a problem.

[0009]

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a small-sized magneto-optical head capable of high recording density. It is an object of the present invention to provide a recording / reproducing apparatus which includes the magneto-optical head and has low power consumption and high access time. For this reason, the magneto-optical head of the present invention
A first through hole penetrating from the air bearing surface to the facing surface of a flying type slider whose surface facing the recording medium floats, an optical head portion and a magneto-optical head portion embedded in the first through hole; And a magnetizing coil formed on the lower surface of the solid immersion lens, and protrudes above the lower surface of the solid immersion lens toward the surface facing the recording medium from the lens. A mesa (flat top) having a substantially trapezoidal cross section is formed integrally with the lens, and the center axis of the mesa is formed to coincide with the optical axis.

A solid immersion lens is embedded in a flying type slider. The solid immersion lens is provided with a mesa portion having a substantially trapezoidal cross section which is integrally formed so as to protrude from a surface of the solid immersion lens which faces the recording medium. If the axis is formed so as to coincide with the optical axis, the mesa portion of the solid immersion lens projects from the solid immersion lens in the direction of the recording medium and faces the recording medium. As a result,
Since it is possible to arrange a small coil around the mesa portion while reducing the distance between the solid immersion lens and the recording medium, it is possible to reduce the diameter of the light beam spot and achieve a high recording density.

Further, since the exciting coil is formed on the lower surface of the solid immersion lens, the exciting coil can be wound closer to the center of the mesa, so that the generated magnetic field can be increased. Therefore, since a strong magnetic field can be generated even with an air-core coil, it is not necessary to provide a magnetic core (core), and the structure is simplified, so that this type of magneto-optical head can be downsized. And its manufacture is simpler and easier. Further, since the recording medium can be easily excited even with a small current, a reduction in power consumption can be achieved.

If the exciting coil is formed as a planar coil around the mesa, the planar coil can be made smaller, so that writing with a high magnetic flux density can be performed even at a low current. Further, since the planar coil is made of one or more layers of thin-film coils, the inductance of the planar coil can be reduced, so that high-speed writing can be performed. The end of the planar coil is connected to a lead made of a conductive material in a second through-hole penetrating the flying slider in the thickness direction thereof, and the end of the lead is opposed to the flying surface of the flying slider. If it is made to be conductively connected to the lead wire above, the connection between the planar coil and the lead wire is easy,
This facilitates the manufacture of this type of magneto-optical head.

Further, since the flying surface of the flying type slider is provided with a positive or negative pressure rail pattern capable of flying by an air bearing function, the spacing between the slider and the recording medium is maintained at a minute interval of 0.2 μm or less. By maintaining the distance between the mesa portion of the solid immersion lens and the recording medium, the light beam spot diameter can be minimized, and a high recording density can be achieved. In addition, the flying type slider can be formed from a ceramic, glass, metal or metal oxide having rigidity of the slider, so that a slider having rigidity and small mass can be formed. Improve the speed of random access.

The solid immersion lens can be made of a material which is optically transparent and has a refractive index of at least one, thereby realizing near-field light (near-field light). The spot diameter can be greatly reduced. The material of the solid immersion lens that is optically transparent and has a refractive index of 1 or more is glass,
Zirconium oxide (ZrO ₂ ), titanium oxide (Ti
O ₂ ) and lithium tantalate (LiTaO ₃ ).

The method of manufacturing a magneto-optical head according to the present invention also includes a burying step of burying a part of a spherical lens member in a first through hole formed in a hard ceramic substrate serving as a slider; A polishing process for smooth polishing of the surface of the ceramic substrate in which a part of the lens member is embedded, and forming a rail pattern on the surface of the ceramic substrate smoothly polished in the polishing process, and a smooth polishing in the polishing process. A pattern forming step of forming a mesa pattern having a substantially trapezoidal cross section on the surface of the formed lens member, and a coil pattern forming step of forming a coil pattern by a thin film around the mesa pattern are provided.

As described above, the spherical lens member, a part of which is embedded in the first through-hole, is polished smoothly together with the ceramic substrate, so that the lens member forms part of the optical head and the magneto-optical head. The resulting solid immersion lens. Further, the coil pattern becomes an exciting coil constituting a part of the magneto-optical head. If a mesa pattern having a substantially trapezoidal cross section is formed on the solid immersion lens thus formed, the distance between the solid immersion lens and the recording medium can be reduced. The spot diameter can be reduced, and a high recording density can be achieved.

Further, when a coil pattern is formed by a thin film around the mesa pattern, the coil pattern can be made smaller, so that writing can be performed even with a low inductance coil. As a result, there is no need to provide a magnetic core (i.e., the exciting coil is an air-core coil), and the structure is simplified, so that this type of magneto-optical head can be miniaturized. And its manufacture is simple and easy. Further, since the recording medium can be easily excited even with a small current, a reduction in power consumption can be achieved.

When a lead made of a conductive material is buried in the second through-hole formed in the ceramic substrate, the end of the lead is formed on the opposing surface of the flying surface of the flying slider. If the connection is made to the terminals, the connection between the coil pattern and the lead terminals is simple and easy, so that this type of magneto-optical head is easily manufactured. Further, when one or more layers of the coil pattern are formed by a thin film, the inductance of the coil pattern can be reduced, so that high-speed writing can be performed.

Further, the recording / reproducing apparatus of the present invention comprises a suspension rotatably mounted on a rotating shaft disposed on an outer peripheral portion of a recording medium, a gimbal mounted on a tip of the suspension, and a recording medium. The recording medium is attached to the lower surface of the gimbal so as to face, and the recording medium is rotated. The opposing surface of the light-magneto-magnetic head as described above as a floating slider that floats when the recording medium is rotated, and emitted from the laser light irradiation device. And an objective lens for condensing the collected light on a solid immersion lens of the magneto-optical head.

When the above-described magneto-optical head is mounted on the lower surface of the gimbal mounted on the tip of the suspension, the distance between the slider and the recording medium is reduced to 0.2 μm by the air bearing function. It is possible to levitate while maintaining the following minute intervals. When the light emitted from the laser light irradiation device is focused on the solid immersion lens through the objective lens, it becomes near-field light (near-field light), and the spot diameter of the light beam is narrowed and applied to the recording medium. As a result, a high recording density can be realized.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a magneto-optical head according to the present invention and a recording / reproducing apparatus using this magneto-optical head will be described below with reference to FIGS. FIG. 1 shows the state of the light attached to the suspension.
9 is a diagram schematically showing a cross section of the magneto-optical head, FIGS. 2 to 8 are perspective views schematically showing a series of manufacturing steps for manufacturing the magneto-optical head of FIG. 1, and FIG. FIG. 2 is a perspective view schematically showing a main part of a recording / reproducing apparatus using the magneto-optical head.

The magneto-optical head according to the present invention includes a flying slider 10, and a flying surface (air bearing surface (ABS)) which floats with respect to the magneto-optical recording medium when the magneto-optical recording medium rotates. (Air Bearing Surface)))
Is provided on the lower surface thereof. A first through hole 12 penetrating from the flying surface to the facing surface is provided inside the flying slider 10, and a solid immersion lens 13 is embedded in the through hole 12.

Here, the solid immersion lens 13 is selected from a material having a refractive index larger than 1, for example, glass, zirconium oxide (ZrO ₂ ), titanium oxide (TiO ₂ ), and lithium tantalate (LiTaO ₃ ). A lens in which a part is cut into a hemisphere or a ３ sphere, and the cut surface is arranged parallel to the recording medium, that is, the solid immersion lens 13 is arranged so that the exit surface is perpendicular to the optical axis. It is possible to reduce the diffraction limit by increasing the NA of the optical system.

The solid immersion lens 13 has a mesa portion (flat top hill) 13a having a substantially trapezoidal cross section protruding toward the air bearing surface on the air bearing surface side (the surface facing the recording medium). The mesa portion 13a is formed such that the central axis thereof coincides with the optical axis. An exciting coil 14 is provided around the mesa 13a. Excitation coil 1
4 is formed of one or more layers (for example, two layers) of thin films.
The lead 16 is connected to a lead 16 made of a conductive material filled in a second through-hole 15 provided in the coil terminal 17. The lead 16 is connected to a coil terminal 17.

The flying type slider 10 formed as described above is attached to the lower surface of a gimbal 41 connected to the tip of the suspension 40, and is provided with a connecting line extending along the suspension 40. 42 is connected to the coil terminal 17. On the other hand, an objective lens 43 is provided above the solid immersion lens 13 of the slider 10, and a reflection mirror 44 is provided above the objective lens 43.
Are arranged.

As a result, the laser light reflected by the reflection mirror 44 is condensed by the objective lens 43, enters the solid immersion lens 13, and irradiates the recording medium with spot light from the exit surface. When the exciting coil 14 provided around the mesa portion 13a on the lower surface of the solid immersion lens 13 is energized, the heat generated in the spot light-irradiated portion of the recording medium and the direction of the magnetic flux are used. Is recorded with its magnetization reversed.

Next, a method of manufacturing a flying type slider 10 having this type of magneto-optical head will be described with reference to FIGS. First, as shown in FIG. 2A, a hard ceramic substrate (thickness: about 100 μm) 20 serving as a slider is prepared, and the substrate 20 is irradiated with a laser beam, as shown in FIG. The first through hole 20a and the second through hole 20b are provided in the substrate 20. Then, as shown in FIG. 2 (c), spherical lens members (parts of which are cut later to form solid immersion lenses) 30 and leads 31, 31 made of a conductive material are prepared, and these lenses are prepared. Member 30 and leads 31 and 3
1 is a first through hole 20a and a second through hole 20b, 20b.
Respectively.

The lens member 30 is made of a material having a refractive index greater than 1 such as glass, zirconium oxide (Zr
O ₂ ), titanium oxide (TiO ₂ ), and lithium tantalate (LiTaO ₃ ) are used, and only a hemisphere or 3/4 sphere is embedded in the first through hole 20a. Thereafter, as shown in FIG. 3D, the lens member 30 is sealed in the first through hole 20a with a glass sealing agent, and the leads 31, 31 are sealed in the second through holes 20b, 20b, respectively. I do. Next, the surface of the recording medium on the facing surface side is shown in FIG.
After smooth polishing as shown in (e), a photosensitive resist is applied or a dry film 21 is laminated on the smooth polished surface as shown in FIG. 3 (f). In this polishing, the lens member 30 becomes a hemisphere or a 3/4 sphere.

Next, as shown in FIG. 4 (g), the rail pattern 21a having a predetermined shape and the mesa pattern 21b on the lens surface are exposed and developed, and as shown in FIG. The milling masks 22a and 22b for the rail pattern 21a and the mesa pattern 21b are formed thereon. Then, argon ions (Ar ⁺ )
Irradiation is performed to perform ion etching to form a convex portion 23a of the rail and a convex portion 23b of the mesa of the lens as shown in FIG.

Next, as shown in FIG. 5 (j), a first plating base film (for example, a metal film such as copper) 2 is formed on the entire surface.
After applying 4a by sputtering or the like, a photosensitive resist for forming a coil pattern or a dry film 24 is applied or laminated. Next, after exposing to a coil pattern having a predetermined shape, development is performed to form a first coil pattern plated portion 25 as shown in FIG.

Next, as shown in FIG. 5 (l), the first coil pattern plating portion 25 is plated with a metal film such as copper, and the first coil pattern plating portion 25 is formed on the first plating base film 24a. A plating film 25a is formed. Thereafter, by removing the remaining resist or dry film 24, the first coil plating film 25a formed on the plating base film 24a appears as shown in FIG. 6 (m). Next, ion etching is performed by irradiating the entire surface with argon ions (Ar ⁺ ), and as shown in FIG. 6 (n), a portion of the plating base film 24a that is not covered by the first coil plating film 25a. Is removed.

Thereafter, as shown in FIG. 6 (o), an insulating layer 26 is formed on the first coil plating film 25a. Then, as shown in FIG. 7 (p), after a second plating base film (for example, a metal film of copper or the like similar to the first base film) 27 is deposited on the entire surface by sputtering or the like, A photosensitive resist or a dry film for forming a coil pattern is applied or laminated. Next, after exposing to a coil pattern having a predetermined shape, development is performed to form a second coil pattern plated portion 28 made of a metal film such as copper as shown in FIG. 7 (q).

Next, as shown in FIG. 7 (r), plating is applied to the second coil pattern plating portion 28, and a second coil plating film 28a is formed on the second plating base film 27. Thereafter, by removing the remaining resist or dry film, a second coil plating film 28a formed on the second plating base film 27 appears as shown in FIG. 8 (s). Then, the entire surface is irradiated with argon ions (Ar ⁺ ) to perform ion etching, and as shown in FIG. 8 (t), the second plating base film 27 is removed. Thereafter, as shown in FIG. 8 (u), the second insulating layer 2 is formed on the second coil plating film 28a.
9 to form a flying type slider 10 having a magneto-optical head.

FIG. 9 is a diagram schematically showing a schematic configuration of a recording / reproducing apparatus using such a magneto-optical head.
FIG. 9A is a perspective view showing a part of the entire configuration, and FIG. 9B is a perspective view showing a main part of FIG. 9A. FIG. 1 is a cross-sectional view when FIG. 9B is cut in the AA direction. The recording / reproducing apparatus of the present invention includes a driving device (not shown) for rotatingly driving the recording medium M, a laser light emitting device 50 for irradiating a laser beam, and a Kerr angle detector for detecting the Kerr angle of the light reflected by the recording medium M 51, a half mirror 52 that transmits the laser light emitted from the laser light emitter 50 and reflects a part of the laser light, the suspension 40 driven by a driving device (not shown), and the flying slider 10 described above. A magneto-optical head.

The laser emitter 50 and the Kerr angle detector 51 are installed near the outer periphery of the recording medium M, and the half mirror 52 is installed near a rotation axis (not shown) inserted into the rotation axis hole 40a of the suspension 40. Have been. The optical system composed of the half mirror 52 and the reflection mirror 44 is fixed to an appropriate part of the recording / reproducing apparatus.

The suspension 40 has a rotating shaft driven by a driving device (not shown) installed near the outer periphery of the recording medium M, and moves around the recording area in the radial recording area of the recording medium M to access the entire recording area. It has been made like that. Then, as described above, the suspension 40
The gimbal 41 is fixed to the tip of the gimbal 41, and the floating slider 10 is attached to the lower surface of the gimbal 41. Further, an objective lens 43 is provided above the solid immersion lens 13 of the slider 10, and a reflection mirror 44 is provided above the objective lens 43.

As a result, the laser light emitted from the laser emitter 50 passes through the half mirror 52, and the laser light reflected by the reflection mirror 44 is condensed by the objective lens 43 and enters the solid immersion lens 13. The recording medium M is irradiated with a spot light from the exit surface. And
By energizing the excitation coil 14 provided around the mesa portion 13a on the lower surface of the solid immersion lens 13 to apply a magnetic field corresponding to input information, the recording medium M
The magnetization of the recording medium M is reversed by the heat and the direction of the magnetic flux of the portion irradiated with the spot light to record.

On the other hand, when a laser beam that is weaker than during recording is emitted from the laser emitter 50, this laser beam passes through the half mirror 52, is reflected by the reflection mirror 44, is condensed by the objective lens 43, and is condensed by the solid-state immersion lens. The light is incident on the recording medium M from the exit surface. The spot light is reflected on the recording medium M, passes through the objective lens 43, is reflected by the reflection mirror 44 and the half mirror 52, is incident on the Kerr angle detector 51, and the Kerr angle detector 37 outputs the reflected light. The information recorded on the recording medium M is reproduced by detecting the polarization angle (Kerr angle) of the reflected light depending on the recording magnetization direction of the recording medium M.

As described above, the solid immersion lens 13 is embedded in the flying type slider 10, and the mesa portion 13a having a substantially trapezoidal cross section protruding toward the surface of the solid immersion lens 13 facing the recording medium is integrally formed. The mesa portion 13a is formed so that the central axis of the mesa portion 13a coincides with the optical axis, so that the mesa portion 13a protrudes in the direction of the recording medium and faces the recording medium. As a result, the distance between the solid immersion lens 13 and the recording medium can be reduced, so that the light beam spot diameter can be reduced, and a high recording density can be achieved.

Further, since the exciting coil 14 can be wound closer to the center of the mesa 13a,
The generated magnetic field can be increased. Therefore, a strong magnetic field can be generated even with an air-core coil, and there is no need to provide a magnetic core (core), and the structure is simplified, so that this type of magneto-optical head can be miniaturized. And its manufacture is simpler and easier.
Further, since the recording medium can be easily excited even with a small current, a reduction in power consumption can be achieved.

Since the exciting coil 14 is formed of one or more thin-film coils, its inductance can be reduced, and high-speed writing can be performed. Further, the exciting coil 14 is connected to a conductive lead 16 provided in the second through hole 15, and the end of the conductive lead 16 is connected to a lead terminal 17 formed on the opposing surface of the floating surface. Since the conductive connection is made, the connection between the exciting coil 14 and the lead wire is simple and easy, and the manufacture of this type of magneto-optical head is facilitated.

As described above, in the present invention, the solid immersion lens 13 is embedded in the flying slider 10, and the flying slider 10 floats on the recording medium at a very small interval, so that the near-field is brought close to the recording medium. Light (near-field light) can be realized. Further, since the flying slider 10, the solid immersion lens 13 and the exciting coil 14 are integrated, and the exciting coil 14 is formed of a thin film near the center of the flying slider 10, this kind of flying The mold slider 10 can be reduced in size. Specifically, 1.2 mm (width) × 2.
5mm (length) x 0.3mm (height)-2mm (width) x
The flying slider 10 having a size of 4 mm (length) × 0.5 mm (height) can be obtained.

Further, since the exciting coil 14 is formed of a plurality of thin layers near the center of the spot of near-field light (near-field light), that is, around the mesa 13a, the inductance of the coil is reduced. It is possible to do. As a result, the change in the write magnetic field due to the high frequency can be sharpened, and the high-frequency response speed can be increased. The specific inductance value of the exciting coil 14 is such that the center diameter of the exciting coil 14 is 54 μm × 78 μm.
m, and in the case of 23 turns with two layers, it was 76 nH.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a state in which a flying slider having a magneto-optical head according to the present invention is mounted on a suspension.

FIG. 2 is a perspective view showing a part of a manufacturing process of a flying type slider provided with the magneto-optical head of the present invention.

FIG. 3 is a perspective view showing a part of a manufacturing process of a flying slider provided with the magneto-optical head according to the present invention.

FIG. 4 is a perspective view showing a part of a manufacturing process of a flying type slider provided with the magneto-optical head according to the present invention.

FIG. 5 is a perspective view showing a part of a manufacturing process of a flying type slider provided with the magneto-optical head according to the present invention.

FIG. 6 is a perspective view showing a part of a manufacturing process of a flying slider provided with the magneto-optical head according to the present invention.

FIG. 7 is a perspective view showing a part of a manufacturing process of a flying slider provided with the magneto-optical head according to the present invention.

FIG. 8 is a perspective view showing a part of a manufacturing process of a flying slider provided with the magneto-optical head according to the present invention.

FIG. 9 is a diagram schematically showing a schematic configuration of an overwritable recording / reproducing apparatus including a magneto-optical head according to the present invention, and FIG. 7A is a perspective view showing a part of the entire configuration. FIG. 7B is a perspective view showing a main part of FIG. 7A.

[Explanation of symbols]

10: flying slider, 11: rail pattern, 12:
1st through hole, 13 ... solid immersion lens, 13a
... Mesa part, 14 ... Exciting coil, 15 ... Second through hole,
Reference numeral 16: conductive substance, 17: lead terminal, 20: ceramic substrate, 21: 20a: first through hole, 20b: second
Through holes, 21 ... photosensitive resist (dry film),
21a: rail pattern, 21b: mesa pattern, 22
a, 22b: milling mask, 23a: rail projection, 23b: mesa projection, 24: photosensitive resist (dry film), 25: first coil pattern plating section,
25a: first coil plating film, 26: insulating film, 28 ...
Second coil pattern plating portion, 28a second coil plating film, 30 lens member, 31 lead (conductive material), 40 suspension, 41 gimbal, 42
Connection line, 43: objective lens, 44: reflection mirror, 50:
Laser emitter, 51: Kerr angle detector, 52: Half mirror, M: Recording medium

Claims (16)

[Claims] 1. An optical head for detecting a change in optical properties of light applied to a recording medium and reproducing a signal recorded on the recording medium, and focusing the light applied to the recording medium. A magneto-optical head for reversing the magnetization of the recording medium according to the partial heat generation of the light and the direction of the magnetic flux, for recording. A first through-hole penetrating from the air bearing surface of the mold slider toward the opposing surface thereof; and a solid immersion forming a part of the optical head and the magneto-optical head embedded in the first through-hole. A lens, and an exciting coil that forms a part of the magneto-optical head formed on the lower surface of the solid immersion lens, and faces the recording medium from the lens on the lower surface of the solid immersion lens. A mesa portion having a substantially trapezoidal cross section protruding to the side is formed integrally with the lens, and the center axis of the mesa portion is formed so as to coincide with the optical axis. A magneto-optical head. 2. The magneto-optical head according to claim 1, wherein the exciting coil is a planar coil and is formed around the mesa. 3. The magneto-optical head according to claim 2, wherein said planar coil is one or more thin-film coils. 4. An end of the planar coil is connected to a lead made of a conductive material in a second through-hole penetrating the flying slider in the thickness direction thereof, and the end of the lead is connected to the flying slider. 4. The magneto-optical head according to claim 2, wherein the magneto-optical head is conductively connected to a lead terminal formed on a surface facing the air bearing surface. 5. The light according to claim 1, wherein the flying surface of the flying type slider is provided with a positive pressure or negative pressure rail pattern for floating by an air bearing action. A magneto-optical head. 6. The flying slider according to claim 1, wherein the flying slider is formed of any one selected from ceramics, glass, metal and metal oxide having slider rigidity. A magneto-optical head according to claim 1. 7. The light-light according to claim 1, wherein the solid immersion lens is optically transparent and is formed of a material having a refractive index of 1 or more. Magnetic head. 8. The optically transparent material having a refractive index of 1 or more is glass, zirconium oxide (ZrO ₂ ), titanium oxide (TiO ₂ ), lithium tantalate (LiTa).
Light according to claim 7, characterized in that it is selected from O ₃₎ - magneto-optical head. 9. The solid immersion lens according to claim 1, wherein
9. The magneto-optical head according to claim 1, wherein the through hole is sealed with a glass sealing material. 10. An optical head for detecting a change in optical properties of light applied to a recording medium and reproducing a signal recorded on the recording medium, and focusing the light applied to the recording medium. A method for manufacturing a magneto-optical head, comprising: a magneto-optical head for recording by reversing the magnetization of the recording medium according to a partial heat generation of light and a direction of a magnetic flux, wherein the hard ceramic is a floating type slider. An embedding step of embedding a part of a spherical lens member in a first through hole formed in a substrate; and a polishing step of smoothly polishing a surface of the ceramic substrate in which a part of the spherical lens member is embedded. A rail pattern is formed on the surface of the ceramic substrate polished smoothly in the polishing step, and a substantially trapezoidal cross section is formed on the surface of the lens member polished smoothly in the polishing step. A pattern forming step of forming the sa pattern so that the center axis of the mesa pattern coincides with the optical axis; and a coil pattern forming step of forming a coil pattern by a thin film around the mesa pattern. By polishing the partially buried spherical lens member, the lens member is formed into a solid immersion lens that constitutes a part of the optical head unit and the magneto-optical head unit. A method for manufacturing a magneto-optical head, wherein the formed coil pattern is an exciting coil constituting a part of the magneto-optical head. 11. The semiconductor device according to claim 1, wherein a lead made of a conductive material is embedded in a second through hole formed in the ceramic substrate in the embedding step.
0. A method for manufacturing a magneto-optical head according to 0 12. The coil pattern forming step, wherein one or more layers of the coil pattern made of the thin film are formed.
2. The method for manufacturing a magneto-optical head according to item 1. 13. The magneto-optical head according to claim 10, wherein said lens member is selected from a material which is optically transparent and has a refractive index of 1 or more. Production method. 14. The optically transparent material having a refractive index of 1
The above materials are glass, zirconium oxide (ZrO ₂ ),
Titanium oxide (TiO ₂ ), lithium tantalate (LiT
Light according to claim 13, characterized in that it is selected from _aO-3) - method of manufacturing a magneto-optical head. 15. The light beam according to claim 10, wherein said lens member is sealed in said first through hole with a glass sealing material.
A method for manufacturing a magneto-optical head. 16. A recording medium is irradiated with light emitted from a laser light emitter to reverse the magnetization of the recording medium according to the partial heat generation and the direction of magnetic flux of the converged light, and perform recording. What is claimed is: 1. A recording / reproducing apparatus for detecting a change in an optical property of reflected light to reproduce a signal recorded on the recording medium, wherein the recording / reproducing apparatus is rotatable about a rotation axis arranged on an outer peripheral portion of the recording medium. An attached suspension; a gimbal attached to the tip of the suspension; and a lower surface of the gimbal attached to the recording medium so as to face the recording medium. The magneto-optical head according to any one of claims 1 to 9, further comprising a flying slider, wherein the light emitted from the laser light emitter emits light from the magneto-optical head. Recording and reproducing apparatus characterized by comprising an objective lens for focusing the body immersion lens.