JP2003006803A - Optical magnetic head and magneto-optical disk device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical magnetic head and a magneto-optical disk device that are high in the utilization efficiency of a laser beam, suitable for high recording density, small in size and high in reliability. SOLUTION: This optical magnetic head 1 is integrated with a magneto- resistive sensor 3 and a thin film magnetic recording head 4 on a back end surface 2a of a flying slider 2 and is constituted so as to locate an optical waveguide 5 in a magnetic gap 43 of the thin film magnetic recording head 4. The distance between the position of near field light 7a output from an outgoing radiation edge 5c of optical waveguides 5 and magnetic field 44 formed by an air gaps 43 becomes shortest. Heating by near field light 7a, since recording is carried out simultaneously or just after it, allows the effect of thermal diffusion to be ignored and the utilization efficiency of a laser beam to be enhanced. Since a heating area is not spread by the thermal diffusion, a recorded area can be narrowed and high recording density can be achieved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical head and a magneto-optical disk device suitable for optically assisted magnetic recording, and more particularly to high utilization efficiency of laser light, suitable for high recording density, small size and reliability. The present invention relates to a magneto-optical head and a magneto-optical disk device having high properties.

[0002]

2. Description of the Related Art In recent years, the recording density of hard magnetic recording devices (HDD) has been increasing at an annual rate of 100%, and has exceeded 60 Gbpsi in the experimental stage. However, due to the superparamagnetic effect and the difficulty of narrowing the gap width of the magnetic head, the limit of the recording density of the conventional HDD is about to be seen, and it is said that the limit is 100 to 300 Gbpsi.

Optically assisted magnetic recording is expected to exceed the limit. What is the superparamagnetic effect?
This is a phenomenon in which the magnetization of the target magnetic domain is disturbed by the demagnetizing field formed by the adjacent magnetic domains and the recorded information is lost. One way to prevent this is to use a magnetic medium having a large magnetization, but recording cannot be performed with a normal magnetic head. Optically assisted magnetic recording has been proposed as a means for solving the problem. This is a method in which the recording medium is heated to near the Curie temperature by irradiation with laser light and the magnetization thereof is lowered to perform recording.

In the optically assisted magnetic recording, only a portion heated by the laser light is recorded. Therefore, by making the spot diameter of the laser light small, it is possible to record a width narrower than the width of the magnetic gap. It is suitable for high recording density. In order to achieve a recording density of 100 Gbpsi or more, the track width needs to be 0.1 μm or less. In order to obtain a light spot of this size, it is essential to use near field light. As a conventional optically-assisted magnetic recording / reproducing head using this method, for example, a magnetic head in which an optical waveguide is integrated is known.

FIG. 9 shows the conventional magneto-optical head.
The magneto-optical head 1 includes a flying slider 2 having a rear end surface 2a.
The optical waveguide 5, the GMR sensor 3 ', and the thin-film magnetic recording head 4 are laminated in this order. An optical waveguide lens is formed in the optical waveguide 5 to make the light spot at the waveguide emission end 5c fine. We are aiming for higher densities.
In this method, after the magnetic recording layer 6a of the magnetic disk 6 is heated by the near-field light 7a emitted from the emission end 5c of the optical waveguide 5, recording is performed by the leakage magnetic field of the thin film magnetic recording head 4.

[0006]

However, according to the conventional magneto-optical head, since the GMR sensor 3'is arranged between the optical waveguide 5 and the thin film magnetic recording head 4, the near-field light 7a and the thin film are formed. Since the position of the magnetic gap of the magnetic recording head 4 is distant, recording is performed by the magnetic gap after the irradiation of the laser light is delayed, so that the heating portion is cooled by heat diffusion during that time, and the utilization efficiency of the laser light is deteriorated.
In addition, since the thermal gradient is gentle, the recording portion is easy to expand. Further, the GMR sensor 3'is likely to be heated by the laser light, the sensitivity of the GMR sensor 3'is affected by thermal fluctuations, and the reproduction output becomes unstable, or the GMR sensor 3'relative to heat is deteriorated. There are drawbacks. Further, in this magneto-optical head, there is no proposal as to how to introduce the laser light into the optical waveguide. Usually, the coupling efficiency between the laser and the optical waveguide is low, and a large size optical element is required to increase the coupling efficiency, so special measures are required. As the head height increases, the overall volume recording density decreases. In non-commutative disks such as HDDs, volume recording density is an important measure, and its reduction is fatal.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a magneto-optical head and a magneto-optical disk device which have high utilization efficiency of laser light and are suitable for high recording density. Another object of the present invention is to provide a compact and highly reliable magneto-optical head and magneto-optical disk device.

[0008]

In order to achieve the above object, the present invention provides a flying slider that floats by the rotation of a disk, a thin film magnetic transducer provided on the flying slider and having a magnetic gap, and the magnetic gap. Provided is a magneto-optical head, which is provided inside and has an emission end of a light guide path for guiding laser light.
With this configuration, the distance between the position of the near-field light output from the exit end of the light guide path and the magnetic field formed by the magnetic gap becomes the shortest. Therefore, when it is overheated by the near-field light, it is recorded at the same time or immediately after it, so that the influence of thermal diffusion can be ignored and the utilization efficiency of laser light can be improved. In addition, since the heating portion does not spread due to thermal diffusion, the recording portion can be narrowed and high recording density can be achieved.

In order to achieve the above object, the present invention provides a flying slider that floats when a disk rotates, a thin film magnetic transducer provided on the flying slider and having a magnetic gap, and a laser provided inside the magnetic gap. A magneto-optical head provided with an emission end of a light guide path for guiding light and a magnetoresistive sensor provided on the flying slider for detecting a recording signal of the disk. With this configuration, the distance between the position of the near-field light output from the exit end of the light guide path and the magnetic field formed by the magnetic gap becomes the shortest. Therefore, since it is recorded at the same time as or immediately after being overheated by the near-field light, the effect of thermal diffusion can be ignored, and the heating of the magnetoresistive sensor can be reduced, so the sensitivity of the magnetoresistive sensor is not affected by heat,
Recording with high reliability and long life is possible.

In order to achieve the above object, the present invention provides a flying slider that floats when a disk rotates, a thin film magnetic transducer provided on the flying slider and having a magnetic gap, and the flying slider.
A magneto-optical head provided with a semiconductor laser that emits laser light and an emission end of a light guide path that is provided in the magnetic gap and that guides the laser light.
With this configuration, by mounting the semiconductor laser on the flying slider, the light guide path can be shortened and the size can be reduced.

In order to achieve the above object, the present invention provides a magneto-optical disk device for recording information by scanning a rotating disk with a magneto-optical head on a rotating disk.
The magneto-optical head is a flying slider that floats by the rotation of the disk, a thin-film magnetic transducer provided on the flying slider and having a magnetic gap, and a light guide path that is provided in the magnetic gap and guides laser light. Provided is a magneto-optical disk device having an edge. With this configuration, it is possible to use a compact and lightweight magneto-optical head that can form a minute light spot.
The volume recording density can be improved.

[0012]

1 (a) to 1 (e) show a magneto-optical head according to a first embodiment of the present invention. As shown in FIG. 1A, the magneto-optical head 1 has a magnetoresistive sensor 3 and a thin film magnetic recording head 4 as a thin film magnetic transducer integrated on a rear end surface 2a of a flying slider 2 for thin film magnetic recording. An optical waveguide 5 is provided on a head 4, and an air bearing surface 2b having a recess 2c of a flying slider 2 floats on a magnetic recording layer 6a formed on a substrate 6b of a magnetic disk 6 to perform magnetic recording. Information is recorded / reproduced on / from the layer 6a. In the present specification, a portion closer to the flying slider 2 in the longitudinal direction of the flying slider 2 is referred to as a lower portion, and a portion farther from the flying slider 2 is referred to as an upper portion.

The magnetoresistive sensor 3 is a normal GM here.
R (Giant Magnetic Sensor) is used, and as shown in FIG.
0, the pair of left and right electrodes 31a and 31b connected to the spin valve film 30, the spin valve film 30 and the electrode 31.
Insulating films 32a and 32 formed so as to sandwich a and 31b
b, a lower magnetic shield film 33 and an upper magnetic shield film 34 formed so as to sandwich the insulating films 32a and 32b, and the magnetic recording layer 6 intersects with the spin valve film 30.
The strength of the magnetic field from a is detected as the resistance change of the spin valve film 30. Upper magnetic shield film 34
Also serves as the lower yoke of the thin film magnetic recording head 4,
It has a lower magnetic pole 34a and a lower yoke joint 34b (see FIG. 3D).

As shown in FIG. 1B, the thin film magnetic recording head 4 includes an upper yoke 40 composed of an upper magnetic pole 40a, a yoke portion 40b and an upper yoke joint 40c, and a lower yoke joint 34b and an upper yoke joint. A magnetic circuit 41 including the upper magnetic shield film 34 and the upper yoke 40 is formed by joining the portion 40c, and the thin film coil 42 is wound so as to intersect with the magnetic circuit 41, and the lower magnetic pole 34 is formed.
A magnetic gap 43 is formed between a and the upper magnetic pole 40a. Further, the thin-film magnetic recording head 4 has the optical waveguide 5 arranged in the magnetic circuit 41. In order to avoid this, the upper yoke joint 40c and the lower yoke joint 40c are located at a position deviated from the center line of the magnetic gap 43. The magnetic circuit 41 is formed by joining the magnetic circuit 41 with 34b. In addition, FIG.
In (e), 45a and 45b are insulating films.

At both ends of the thin-film coil 42, as shown in FIG. 2C, a lead-out portion 42a and a pad 4 are respectively provided.
2b is formed, the magnetic gap 43 is proportional to the current flowing through the thin film coil 42 supplied from the pad 42b.
And a magnetic field 44 is generated in the magnetic recording layer 6
Record in a. When a ferrimagnetic material made of a transition metal and a rare earth metal is used as the recording medium, the intensity of read magnetization can be increased by heating, and in that case, the effect of heating by irradiation during reproduction is used. Therefore, the magnetoresistive sensor 3 may be formed on the rear side of the magneto-optical head 1. As a result, the signal can be reproduced only from the heated portion of the recording layer 6a, so that not only the recording sensitivity can be increased but also the crosstalk from the adjacent track during reproduction can be reduced.

The optical waveguide 5 is a dielectric film 5 made of SiN.
0, and metal thin films 51a and 51b made of Ag disposed above and below the dielectric film 50.

2A and 2B show the details of the optical waveguide 5. The dielectric film 50 of the optical waveguide 5 is formed in parallel with a width of several microns from the incident end 5a to a position overlapping the magnetic pole 40a of the upper yoke 40, and has a taper portion 5b having a tapered shape from the vicinity of the magnetic gap 43. And metal thin film 5
1a and 51b also have the same shape as the dielectric film 50 and have a width of 30 nm at the tip. Dielectric film 50 and metal thin film 51
The thicknesses of a and 51b are 50 nm and 30 nm, respectively. With this configuration, the laser light incident from the incident end 5a of the optical waveguide 5 propagates in the optical waveguide 5 and emits the near-field light 7a from the emitting end 5c provided in the magnetic gap 43.
At this time, in the optical waveguide 5, as shown in FIG.
At the boundary between the metal thin films 51a and 51b and the dielectric film 50, the surface plasmon mode (H having the maximum strength at the interface)
E mode) 7b is excited. This mode has no cutoff with respect to the cross-sectional size of the optical waveguide 5, and can propagate efficiently in the optical waveguide 5 even if the width and thickness of the optical waveguide 5 are narrowed to the wavelength or less. Further, the width of the metal thin films 51a and 51b of the taper portion 5b is set to the magnetic poles 34a and 40.
Since the width is smaller than the width of a, the heating region of the magnetic recording layer 6a by the laser light can be narrower than the width of the magnetic gap 43. The optical waveguide 5 may be made of photonic crystal.

According to the first embodiment, the near-field light emitted into the magnetic gap 43, which is narrower than the width of the magnetic gap 43, can heat a minute portion of the magnetic recording layer 6a, and the heating thereof can be performed. As a result, only the portion where the coercive force is reduced can be recorded by the leakage magnetic field from the magnetic poles 34a and 40a, high-density optically assisted magnetic recording is possible, and signal reproduction by the magnetoresistive sensor 3 is possible. In addition, as a general feature of optically assisted magnetic recording, it is possible to record on a magnetic recording film with high coercive force and reduce the effect of demagnetization due to the superparamagnetic effect, thus providing a head suitable for high density magnetic recording. can do.

The shapes of the metal thin films 51a and 51b may be asymmetrical. As a result, a mode with maximum intensity at the center of the optical waveguide and a cutoff (HE11 mode)
Excitation can be suppressed, and efficiency can be further improved. As the material of the metal thin films 51a and 51b,
A material having high conductivity such as Ag or Al is preferable because of high plasmon excitation efficiency, but not limited to this, and a magnetic pole material such as permalloy is also possible. In this case, only the metal film for the magnetic circuit can be used, and the metal film for the optical waveguide can be omitted. Furthermore, at the near-field light 7a emission position in the magnetic gap 43,
The near-field light 7a is provided by providing a minute metal body having a minute aperture or slit smaller than the size of the near-field light 7a, a metal scatterer, a gap formed of a plurality of metal scatterers, or the like.
It is also possible to further reduce the size of the.

3A to 3C show modified examples of the optical waveguide 5.

The optical waveguide 5 shown in FIG. 3 (a) has a metal thin film 51b for the optical waveguide formed only on one side of the magnetic pole 40a. In this case, the near-field light 7a is the upper magnetic pole 40a.
It is preferable that the maximum strength be obtained on the side.

In the optical waveguide 5 shown in FIG. 3B, the dielectric film 50 is L-shaped, and the plane mirrors 53 are formed at the corners so that the laser light incident from the incident end 5a is 90 degrees by the plane mirror 53. It was designed to bend. As a result, laser light can be incident from the side surface of the head 1, and the height of the head 1 can be reduced accordingly. Further, as a result, the yoke can be formed on the center line of the magnetic gap 43 without being bent, as in the conventional manufacturing, to form the magnetic circuit 41, and the magnetic circuit manufacturing process can be simplified.

The optical waveguide 5 shown in FIG.
Instead of the plane mirror 53 shown in (b), an aspherical mirror 54 having a condensing property is adhered and formed. The parallel beam 7c from a semiconductor laser (not shown) is reflected by the aspherical mirror 54, and near-field light 7a is output from the converging point. As a result, the light can be condensed without the tapered portion 5b, and the light utilization efficiency can be improved.

FIG. 4 shows a magneto-optical head according to the second embodiment of the present invention. In the magneto-optical head 1 according to the first embodiment, a semiconductor laser (not shown) is arranged on the flying slider 2, and an optical fiber 9 and a reflecting film are formed on the converging surface 8a as a light introducing system to the optical waveguide 5. 8b is used in combination with the aspherical surface mirror 8 made of glass. That is, when the parallel beam 7c from the semiconductor laser (not shown) is incident on the core 9a of the optical fiber 9, the output light 7d of the optical fiber 9 is converted into the condensing surface 8a of the aspherical mirror 8.
Thus, the light is focused on the incident end 5a of the optical waveguide 5. As a result, when the single mode optical fiber 9 is used, the diameter including the cladding 9b is 100 μm, and the aspherical mirror 8 can be processed to the same size as that, whereby the flying slider 2 The height can be suppressed to about 30% more than the height of about 300 μm. A semiconductor laser (not shown), which is a light source for making laser light incident on the optical fiber 9, is arranged on the flying slider 2. As a result, the size of the entire head 1 can be reduced. The semiconductor laser may be mounted on a swing arm or suspension for supporting and scanning the magneto-optical head 1. Thereby, the influence of the heat generated by the semiconductor laser on the magnetoresistive sensor 3 and the like can be avoided, high reliability can be maintained, and
The weight of the head can be reduced and high speed scanning becomes possible.

FIGS. 5A and 5B show a magneto-optical head according to the third embodiment of the present invention. This magneto-optical head 1 has a structure shown in FIG.
0 is directly connected to the incident end 5a of the optical waveguide 5. The size of the active layer 10a of the semiconductor laser 10 is 2 × 0.1.
Although it is about μm, the size of the oscillation mode inside the semiconductor laser 10 is widened to a diameter of about 2 to 3 μm. on the other hand,
Since the size of the optical waveguide 5 is 3 × 0.11 μm,
The metal film 11 having the opening 11a is arranged at the output position of the semiconductor laser 10 so as to match it. Metal film 1
By adjusting the position of the metal film 11 so that the phase of the reflected light to the inside of the semiconductor laser 10 and the phase of the oscillation mode inside the laser become the same by 1, the opening 11a does not give a loss to the semiconductor laser 10. Further, by making the size of the opening 10a equal to the size of the optical waveguide 5 (3 × 0.11 μm), it becomes possible to minimize the optical loss and make the laser light enter the optical waveguide 5.

6A and 6B show a magneto-optical head according to the fourth embodiment of the present invention. This magneto-optical head 1 has a structure shown in FIG. 4, in which a semiconductor laser 10 is directly connected to an incident surface 8c of an aspherical mirror 8. The laser light emitted from the active layer 10 a of the semiconductor laser 10 is reflected by the aspherical mirror 8 and guided to the optical waveguide 5. As a result, the manufacturing is easy and the size can be reduced.

FIG. 7A shows the magnetic gap peripheral portion of the magneto-optical head according to the fifth embodiment of the present invention. This magneto-optical head is intended for recording on a perpendicular magnetic recording medium. In the perpendicular magnetic recording medium, an in-plane magnetized layer 6b 'is laid as a base of the perpendicular magnetic recording layer 6a', and a magnetic circuit is formed by these, the upper yoke 40, the upper magnetic shield film 34, etc., and recording is performed. Since the length of the mark is determined by the vertical magnetic field in the vicinity of the upper magnetic pole 40a, the head for perpendicular magnetic recording has a lower magnetic pole 34a and an upper magnetic pole 40a.
Since the distance between and can be relatively large as 0.1 μm or more,
As shown in FIG. 7A, the optical waveguide 5 can be arranged in the magnetic gap 43 with a relatively large margin. In this case, the optical waveguide 5 is arranged on the side of the upper magnetic pole 40a. According to the fifth embodiment, the magnetic field 44 and the emitted light 7a can be made as close as possible.

7 (b) to 7 (f) show a modification of the fifth embodiment shown in FIG. 7 (a).

In the modification shown in FIG. 7B, the metal thin film 51b of the optical waveguide 5 is provided on only one side.

The modified example shown in FIG. 7 (c) uses an optical waveguide 5 in which claddings 51a 'and 51b' made of SiO ₂ are formed above and below a core 50 'made of SiN. Thereby, the degree of freedom of the process can be significantly increased. It is also possible to form a thin film lens in the middle of the optical waveguide to miniaturize the size of emitted light.

In the modification shown in FIG. 7D, the shield films 34, 34 are arranged above and below the upper magnetic pole 40a which is a single magnetic pole.

In the modification shown in FIG. 7 (e), the rectangular opening 11a formed of the metal film 11 is formed into the emitting end 5c of the optical waveguide 5.
The size of the emitted light is miniaturized by arranging the same. In this case, the rectangular opening 11 is formed like the polarization direction 12 of the laser light.
Since the emitted light can be increased by vertically incident on the short side of a, the size of the emitted light can be significantly reduced,
It is possible to increase the recording density. It should be noted that the metal film 11 having the opening 11a can be formed as shown in FIG.
It can be used in any of the optical waveguides 5 of (a) to (d), and the same effect can be obtained.

In the modification shown in FIG. 7 (f), two trapezoidal metal films 11 and 11 are arranged so as to oppose each other at the emitting end 5c of the optical waveguide 5. The vibration of the electrons induced by the laser light irradiation on the metal films 11 and 11 forms a dipole antenna, and the output can be further increased.
The shape of the metal film 11 is not limited to the trapezoid, but may be any other shape, and the elliptical shape can improve the efficiency of electronic vibration.

FIG. 8 shows a magneto-optical disk device according to the sixth embodiment of the present invention. This magneto-optical disk device 6
Reference numeral 0 indicates a magnetic disk 61 having a perpendicular magnetic recording layer 61a such as Pt / Cr, a motor 62 for rotating the magnetic disk 61, and levitating running on the recording layer 61a for recording / reproducing on the recording layer 61a. Magneto-optical head 70 for performing, swing arm 63 supporting this magneto-optical head 70, and voice coil motor 64 for scanning swing arm 63.
A signal processing circuit 6 that processes a recording signal during recording, modulates the laser light of the magneto-optical head 70, and reproduces recorded information using a light intensity signal from the magneto-optical head 70 during reproduction.
5 and a control circuit 66 for controlling the motor 62 and the voice coil motor 64 at the time of recording / reproducing. As the magneto-optical head 70, for example, that of the fifth embodiment can be used.

In this structure, at the time of recording, the laser beam whose intensity is modulated based on the signal input is emitted from the semiconductor laser, emitted from the emission end 5c of the optical waveguide 5, and is disposed immediately below the perpendicular magnetic recording layer 61a. Information is recorded by the magnetic field 44 flowing between the magnetic poles 40a and 34a. Also, during playback,
The strength of the magnetic field from the magnetic recording layer 6a is detected by the magnetoresistive sensor 3. Also, at the time of recording / playback, the head 70
It is necessary to move the light emitted from the recording medium onto a specific recording track (not shown) on the recording layer 61a and perform tracking. This is performed by position control by driving the voice coil motor 64. That is, the address information of the magnetic disk 61 is read, and the voice coil motor 64 is driven by the drive signal formed based on the information to move the head 70 near a predetermined track, and then the voice coil motor 64 and the beam spot. By driving the scanning semiconductor laser, a predetermined track is made to follow finely.

According to the eighth embodiment, the small and lightweight magneto-optical head 70 can be used for recording / reproducing of a magnetic disk, and high speed recording / reproducing, high density recording, especially high volume recording density recording can be achieved. It is possible to provide a disk device capable of optically assisted magnetic recording / reproduction. The head 70
Since the head 70 itself is small and lightweight, the entire head 70 may be driven by a piezoelectric element (not shown) for fine tracking.

[0037]

As described above, according to the present invention,
Since the distance between the position of the near-field light output from the exit end of the light guide and the magnetic field formed by the magnetic gap is the shortest, it is recorded at the same time as or immediately after being overheated by the near-field light. Can be ignored and the efficiency of laser light utilization can be improved. In addition, since the heating portion does not spread due to thermal diffusion, the recording portion can be narrowed and high recording density can be achieved.

[Brief description of drawings]

1A and 1B show a magneto-optical head according to a first embodiment of the present invention, FIG. 1A is a front view, FIG. 1B is an enlarged view of part A of FIG. 1A, and FIG. () Is a cross-sectional view of the direction (b) in the B direction, and (e) is a bottom view.

FIG. 2 shows the optical waveguide according to the first embodiment,
(A) is a side view and (b) is a front view.

FIG. 3A to FIG. 3C are diagrams showing modified examples of the optical waveguide.

FIG. 4 is a front view showing a magneto-optical head according to a second embodiment of the invention.

5A is a front view showing a magneto-optical head according to a third embodiment of the present invention, and FIG. 5B is a view showing an emission surface of a semiconductor laser.

FIG. 6A is a front view showing a magneto-optical head according to a fourth embodiment of the present invention, and FIG. 6B is a detailed view of essential parts.

7A is a front view showing a main part of a magneto-optical head according to a fifth embodiment of the present invention, and FIGS. 7B to 7F are detailed views of a main part showing a modification thereof.

FIG. 8 is a configuration diagram of a magneto-optical disk device according to a sixth embodiment of the present invention.

FIG. 9 is a front view showing a conventional magneto-optical head.

[Explanation of symbols]

1 Magneto-optical head 2 Flying slider 2a rear end face 2b Air bearing surface 2c recess 3 Magnetoresistive sensor 3'GMR sensor 4 Thin film magnetic recording head 5 Optical waveguide 5a entrance end 5b taper part 5c exit end 6 magnetic disk 6a Magnetic recording layer 6a 'Perpendicular magnetic recording layer 6b substrate 6b 'in-plane magnetized layer 7a Near-field light 7a outgoing light 7d output light 7c parallel beam 8 Aspherical mirror 8a Light collecting surface 8b reflective film 8c Incident surface 9 optical fiber 9a core 9b clad 10 Semiconductor laser 10a Active layer 11 Metal film 11a opening 30 Spin valve film 31a, 31b electrodes 32a, 32b insulating film 33 Lower magnetic shield film 34 Upper magnetic shield film 34a lower magnetic pole 34b Lower yoke joint 40 Upper yoke 40a upper magnetic pole 40b yoke part 40c Upper yoke joint 41 Magnetic circuit 42 thin film coil 42a Drawer 42b pad 43 Magnetic gap 44 magnetic field 45a, 45b insulating film 50 'core 50 Dielectric film 51a, 51b Metal thin film 51a ', 51b' clad 53 plane mirror 54 Aspherical mirror 60 disk unit 61 magnetic disk 61a Perpendicular magnetic recording layer 62 voice coil motor 63 swing arm 64 voice coil motor 65 Signal processing circuit 66 control circuit 70 Magneto-optical head

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takashi Ozawa             430 Green, Sakai, Nakai-cho, Ashigaragami-gun, Kanagawa Prefecture             Inside of Fuji Xerox Co., Ltd. F-term (reference) 5D034 AA05 BA02 BB09 BB12                 5D075 AA03 CF03                 5D091 AA08 CC24 DD03 HH20

Claims (21)

[Claims] 1. A flying slider that floats when a disk rotates, a thin-film magnetic transducer provided on the flying slider and having a magnetic gap, and an emission end of a light guide path provided in the magnetic gap for guiding laser light. A magneto-optical head characterized by comprising: 2. The light guide path is an optical waveguide including a plate-shaped core for transmitting the laser light and a metal thin film formed on at least one surface of the core. 1. The magneto-optical head as described in 1. 3. The magneto-optical head according to claim 2, wherein the metal thin films are a pair of metal thin films formed on both surfaces of the core, and the pair of metal thin films have an asymmetric shape. . 4. The magneto-optical head according to claim 2, wherein the metal thin film has high conductivity such as Ag and Al. 5. The magneto-optical head according to claim 2, wherein the metal thin film is narrower than the width of the magnetic gap. 6. The magneto-optical head according to claim 2, wherein the metal thin film constitutes a part of a magnetic circuit of the thin film magnetic transducer. 7. The light guide path has a shape bent at a predetermined angle, and is provided at the bent portion, and a mirror is provided to reflect the incident laser light and emit the laser light from the emission end. The magneto-optical head according to claim 1. 8. The magneto-optical head according to claim 7, wherein the mirror has a condensing characteristic. 9. The magneto-optical head according to claim 1, wherein the emitting end of the light guide path is provided with a minute metal body having a minute opening. 10. The magneto-optical head according to claim 1, wherein the emitting end of the light guide path is provided with a metal scatterer. 11. The magneto-optical head according to claim 1, wherein the magnetic gap is formed of a plurality of minute metal bodies. 12. The thin film magnetic transducer comprises a pair of yokes forming the magnetic gap at a tip thereof, and the optical waveguide is eccentrically arranged on one yoke of the pair of yokes. The magneto-optical head according to claim 2. 13. A flying slider that floats when a disk rotates, a thin-film magnetic transducer provided in the flying slider and having a magnetic gap, and an emission end of a light guide path provided in the magnetic gap for guiding laser light. And a magnetoresistive sensor provided on the flying slider for detecting a recording signal of the disk. 14. The magneto-optical head according to claim 13, wherein the magnetoresistive sensor includes a magnetic shield, and the thin-film magnetic transducer doubles as the yoke forming a magnetic circuit. 15. A flying slider that floats when a disk rotates, a thin-film magnetic transducer provided on the flying slider and having a magnetic gap, a semiconductor laser that is provided on the flying slider, and emits a laser beam; A magneto-optical head provided in a gap and having an emission end of a light guide path for guiding the laser light. 16. The semiconductor laser is provided on an upper surface of the flying slider so as to emit laser light parallel to the disk, and the light guide path reflects the laser light from the semiconductor laser to emit the laser light. The magneto-optical head according to claim 15, further comprising a mirror that emits light from an end. 17. The semiconductor laser is provided on the upper surface of the flying slider so as to emit laser light parallel to the disk, and the light guide path guides the laser light from the semiconductor laser. A light guide path, and the first end having the emission end.
A second light guide path arranged so as to intersect with the light guide path of
A mirror provided at an intersection of the first light guide path and the second light guide path and configured to reflect the laser light guided by the first light guide path and emit the laser light from the emission end. The magneto-optical head according to claim 15, wherein 18. The magneto-optical head according to claim 17, wherein the first light guide path is an optical fiber, and the second light guide path is an optical waveguide. 19. The semiconductor laser comprises a fine metal body having a fine aperture on the emitting surface.
5. The magneto-optical head as described in 5. 20. A magneto-optical disk device for recording information by scanning a magneto-optical head on a rotating disk with a scanning arm, wherein the magneto-optical head comprises a flying slider that floats as the disk rotates, and the floating slider. A magneto-optical disk device comprising: a thin film magnetic transducer provided on a slider and having a magnetic gap; and an emission end of a light guide path provided in the magnetic gap for guiding a laser beam. 21. The optical recording disk device according to claim 20, wherein the semiconductor laser is arranged on the scanning arm, and the light guide path includes an optical fiber optically connected to the semiconductor laser. .