JP2000121192A5 - - Google Patents
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- JP2000121192A5 JP2000121192A5 JP1998299508A JP29950898A JP2000121192A5 JP 2000121192 A5 JP2000121192 A5 JP 2000121192A5 JP 1998299508 A JP1998299508 A JP 1998299508A JP 29950898 A JP29950898 A JP 29950898A JP 2000121192 A5 JP2000121192 A5 JP 2000121192A5
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- refrigerator
- frequency
- cryogenic
- conversion means
- signal
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- 238000006243 chemical reaction Methods 0.000 claims description 25
- 238000005057 refrigeration Methods 0.000 claims 20
- 239000007788 liquid Substances 0.000 claims 10
- 239000003507 refrigerant Substances 0.000 claims 8
- 238000001514 detection method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000003247 decreasing Effects 0.000 claims 1
- 238000002474 experimental method Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 1
Description
請求項１の発明は、上記被冷却装置が超伝導マグネットであり、変換した周波数の信号を上記圧縮機のモータに出力する周波数変換手段と、上記超伝導マグネットの状況に応じて上記周波数変換手段を制御するコントローラとを備えたことを特徴としている。
上記超伝導マグネットは容器内に収容されていてもよい。
According to the first aspect of the present invention, the device to be cooled is a superconducting magnet, and the frequency conversion means for outputting the converted frequency signal to the motor of the compressor and the frequency conversion means according to the situation of the superconducting magnet. It is characterized by having a controller to control the frequency.
The superconducting magnet may be housed in a container.
この構成によれば、被冷却装置の温度変化に応じてきめ細かな運転制御が行なわれる。
温度検出手段に代えて、あるいは、温度検出手段に加えて、容器内の圧力を検出する圧力検出手段を設けてもよい。この場合、上記コントローラは、上記圧力検出手段からの信号に基づき、容器内の圧力が所定圧力よりも高いときには、増加した周波数の信号を上記周波数変換手段が出力するように、上記容器内の圧力が上記所定圧力まで低下した後は、減少した周波数の信号を上記周波数変換手段が出力するように、上記周波数変換手段を制御する。
According to this configuration, fine operation control is performed according to the temperature change of the device to be cooled.
Instead of the temperature detecting means, or in addition to the temperature detecting means, a pressure detecting means for detecting the pressure in the container may be provided. In this case, the controller is based on the signal from the pressure detecting means, and when the pressure in the container is higher than the predetermined pressure, the pressure in the container is output so that the frequency conversion means outputs a signal of an increased frequency. After the pressure drops to the predetermined pressure, the frequency conversion means is controlled so that the frequency conversion means outputs a signal of the reduced frequency.
請求項５の発明によれば、上述の各極低温冷凍装置において、上記コントローラが、温度検出手段からの信号に基づき上記周波数変換手段を制御するので、被冷却装置の温度変化に応じたきめ細かな運転制御を行なうことができる。
温度検出手段の代わりに圧力検出手段を用いても同様の効果がある。
According to the invention of claim 5, in each of the above-mentioned ultra-low temperature refrigerating devices, the controller controls the frequency conversion means based on the signal from the temperature detecting means, so that the frequency conversion means is finely adjusted according to the temperature change of the device to be cooled. Operation control can be performed.
The same effect can be obtained by using a pressure detecting means instead of the temperature detecting means.
Claims (12)
上記被冷却装置は超伝導マグネット（２）であり、
変換した周波数の信号を上記圧縮機（９）のモータに出力する周波数変換手段（１４）と、
上記超伝導マグネット（２）の状況に応じて上記周波数変換手段（１４）を制御するコントローラ（７）とを備えたことを特徴とする極低温冷凍装置。A refrigerator (5) attached directly or indirectly to the apparatus to be cooled (2, 20, 30, 40) and the refrigerator (5) via pipes (11, 12; 11a, 11b, 12a, 12b) A compressor (9) connected to supply the high-pressure refrigerant gas to the refrigerator (5) and return the low-pressure refrigerant gas from the refrigerator (5); In a cryogenic refrigerator that cools 20, 30, 40) to a cryogenic temperature,
The cooled device is a superconducting magnet (2),
Frequency conversion means (14) for outputting a signal of the converted frequency to the motor of the compressor (9);
A cryogenic refrigeration apparatus comprising a controller (7) for controlling the frequency conversion means (14) according to the state of the superconducting magnet (2).
上記被冷却装置は容器（２０）であり、
変換した周波数の信号を上記圧縮機（９）のモータに出力する周波数変換手段（１４）と、
上記容器（２０）の状況に応じて上記周波数変換手段（１４）を制御するコントローラ（７）とを備えたことを特徴とする各種の極低温実験のために使用される極低温冷凍装置。A refrigerator (5) attached directly or indirectly to the apparatus to be cooled (2, 20, 30, 40) and the refrigerator (5) via pipes (11, 12; 11a, 11b, 12a, 12b) A compressor (9) connected to supply the high-pressure refrigerant gas to the refrigerator (5) and return the low-pressure refrigerant gas from the refrigerator (5); In a cryogenic refrigerator that cools 20, 30, 40) to a cryogenic temperature,
The cooled device is a container (20),
Frequency conversion means (14) for outputting a signal of the converted frequency to the motor of the compressor (9);
A cryogenic refrigeration apparatus used for various cryogenic experiments, comprising a controller (7) for controlling the frequency converting means (14) according to the state of the container (20).
上記被冷却装置はチャンバ（３１）内を真空排気するためのポンプ容器（３０）であり、
変換した周波数の信号を上記圧縮機（９）のモータに出力する周波数変換手段（１４）と、
上記ポンプ容器（３０）の状況に応じて上記周波数変換手段（１４）を制御するコントローラ（７）とを備えたことを特徴とするクライオポンプとして使用される極低温冷凍装置。A refrigerator (5) attached directly or indirectly to the apparatus to be cooled (2, 20, 30, 40) and the refrigerator (5) via pipes (11, 12; 11a, 11b, 12a, 12b) A compressor (9) connected to supply the high-pressure refrigerant gas to the refrigerator (5) and return the low-pressure refrigerant gas from the refrigerator (5); In a cryogenic refrigerator that cools 20, 30, 40) to a cryogenic temperature,
The cooled device is a pump container (30) for evacuating the chamber (31),
Frequency conversion means (14) for outputting a signal of the converted frequency to the motor of the compressor (9);
A cryogenic refrigeration apparatus used as a cryopump comprising a controller (7) for controlling the frequency conversion means (14) according to the state of the pump container (30).
上記被冷却装置は液溜容器（４０）であり、
変換した周波数の信号を上記圧縮機（９）のモータに出力する周波数変換手段（１４）と、
上記液溜容器内（４０）部の状況に応じて上記周波数変換手段（１４）を制御するコントローラ（７）とを備えたことを特徴とする簡易液化機として使用される極低温冷凍装置。A refrigerator (5) attached directly or indirectly to the apparatus to be cooled (2, 20, 30, 40) and the refrigerator (5) via pipes (11, 12; 11a, 11b, 12a, 12b) A compressor (9) connected to supply the high-pressure refrigerant gas to the refrigerator (5) and return the low-pressure refrigerant gas from the refrigerator (5); In a cryogenic refrigerator that cools 20, 30, 40) to a cryogenic temperature,
The cooled device is a liquid reservoir (40),
Frequency conversion means (14) for outputting a signal of the converted frequency to the motor of the compressor (9);
A cryogenic refrigeration apparatus used as a simple liquefaction machine, comprising a controller (7) for controlling the frequency conversion means (14) in accordance with the situation in the liquid reservoir container (40).
上記被冷却装置（２,２０,３０,４０）の温度を検出する温度検出手段（６）をさらに備え、
上記コントローラ（７）は、上記温度検出手段（６）からの信号に基づき、上記被冷却装置（２,２０,３０,４０）の温度が所定温度よりも高いときには、増加した周波数の信号を上記周波数変換手段（１４）が出力するように、上記被冷却装置（２,２０,３０,４０）が上記所定温度まで冷却された後は、減少した周波数の信号を上記周波数変換手段（１４）が出力するように、上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。In the cryogenic refrigeration apparatus according to any one of claims 1 to 4,
A temperature detecting means (6) for detecting the temperature of the cooled device (2, 20, 30, 40);
Based on the signal from the temperature detection means (6), the controller (7) outputs an increased frequency signal when the temperature of the cooled device (2, 20, 30, 40) is higher than a predetermined temperature. After the device to be cooled (2, 20, 30, 40) is cooled to the predetermined temperature so that the frequency conversion means (14) outputs, the frequency conversion means (14) outputs a signal of a reduced frequency. The cryogenic refrigeration apparatus, wherein the frequency converting means (14) is controlled so as to output.
上記超伝導マグネットは容器（３）内に収納されていることを特徴とする極低温冷凍装置。 A cryogenic refrigeration apparatus wherein the superconducting magnet is housed in a container (3).
上記容器（３ The above container (3 ,, ２０20 ,, ３０30 ,, ４０）内の圧力を検出する圧力検出手段をさらに備え、40) further comprising pressure detecting means for detecting the pressure in the inside,
上記コントローラ（７）は、上記圧力検出手段からの信号に基づき、上記容器（３ Based on the signal from the pressure detection means, the controller (7) ,, ２０20 ,, ３０30 ,, ４０）内の圧力が所定圧力よりも高いときには、増加した周波数の信号を上記周波数変換手段（１４）が出力するように、上記容器（３40) When the pressure in the container (3) is higher than a predetermined pressure, the container (3 ,, ２０20 ,, ３０30 ,, ４０）内の圧力が上記所定圧力まで低下した後は、減少した周波数の信号を上記周波数変換手段（１４）が出力するように、上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。40) The frequency conversion means (14) is controlled so that the frequency conversion means (14) outputs a signal having a reduced frequency after the pressure in the pressure decreases to the predetermined pressure. Low temperature refrigeration equipment.
上記コントローラ（７）は、装置起動時、増加した周波数の信号を上記周波数変換手段（１４）が出力するように上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。 The cryogenic refrigeration apparatus characterized in that the controller (7) controls the frequency conversion means (14) so that the frequency conversion means (14) outputs an increased frequency signal when the apparatus is activated.
上記コントローラ（７）は、再生プロセス中は、減少した周波数の信号を上記周波数変換手段（１４）が出力するように、上記再生プロセスの終了後には、増加した周波数の信号を上記周波数変換手段（１４）が出力するように、上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。 The controller (7) outputs the increased frequency signal to the frequency conversion means (14) after the completion of the reproduction process so that the frequency conversion means (14) outputs the decreased frequency signal during the reproduction process. The cryogenic refrigeration apparatus is characterized in that the frequency converting means (14) is controlled so as to output the signal 14).
上記コントローラ（７）は、上記チャンバ（３１）の排気時に、増加した周波数の信号を上記周波数変換手段（１４）が出力するように、上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。 The controller (7) controls the frequency conversion means (14) so that the frequency conversion means (14) outputs an increased frequency signal when the chamber (31) is evacuated. Cryogenic refrigeration equipment.
上記液溜容器（４０）内部の液面を検出する液面検出手段（４２ Liquid level detecting means (42) for detecting the liquid level inside the liquid reservoir (40). ,, ４３）を備え、43)
上記コントローラ（７）は、上記液面検出手段（４２ The controller (7) includes the liquid level detecting means (42 ,, ４３）からの信号に基づいて、上記液溜容器（４０）内部の液面が所定の高レベルよりも低いときには、増加した周波数の信号を上記周波数変換手段（１４）が出力するように、上記液溜容器（４０）内部の液面が上記所定の高レベルに達した後には、減少した周波数の信号を上記周波数変換手段（１４）が出力するように、上記周波数変換手段（１４）を制御することを特徴とする極低温冷凍装置。43) When the liquid level inside the liquid reservoir (40) is lower than a predetermined high level based on the signal from 43), the frequency conversion means (14) outputs the signal having the increased frequency. After the liquid level in the liquid reservoir (40) reaches the predetermined high level, the frequency converting means (14) is controlled so that the frequency converting means (14) outputs a signal having a reduced frequency. A cryogenic refrigeration apparatus characterized by:
上記圧縮機（９）は第１の熱交換器と共にハウジング内に収容されて屋外設置型の圧縮機ユニット（２１）を構成しており、この圧縮機ユニット（２１）と上記冷凍機（５）との間に第２の熱交換器を備えた室内設置型の中間ユニット（２３）を介在させていることを特徴とする極低温冷凍装置。 The compressor (9) is housed in a housing together with the first heat exchanger to constitute an outdoor installation type compressor unit (21). The compressor unit (21) and the refrigerator (5) A cryogenic refrigeration apparatus characterized in that an indoor-installed intermediate unit (23) having a second heat exchanger is interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29950898A JP2000121192A (en) | 1998-10-21 | 1998-10-21 | Cryogenic chiller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29950898A JP2000121192A (en) | 1998-10-21 | 1998-10-21 | Cryogenic chiller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000121192A JP2000121192A (en) | 2000-04-28 |
| JP2000121192A5 true JP2000121192A5 (en) | 2005-09-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29950898A Pending JP2000121192A (en) | 1998-10-21 | 1998-10-21 | Cryogenic chiller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000121192A (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002106991A (en) * | 2000-09-29 | 2002-04-10 | Sanyo Electric Co Ltd | Helium compressor unit |
| US7127901B2 (en) | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP2003279185A (en) * | 2002-03-25 | 2003-10-02 | Aisin Seiki Co Ltd | Cryogenic refrigerator |
| DE10393146B4 (en) * | 2002-08-20 | 2015-07-02 | Sumitomo Heavy Industries, Ltd. | Cryogenic cooler |
| JP3976649B2 (en) * | 2002-08-26 | 2007-09-19 | 住友重機械工業株式会社 | Cryogenic refrigerator and operation method thereof |
| JP4146770B2 (en) * | 2003-08-11 | 2008-09-10 | 中部電力株式会社 | Power storage device |
| JP4247099B2 (en) * | 2003-11-28 | 2009-04-02 | 住友重機械工業株式会社 | Power unit, refrigerator using it, and applied equipment |
| US7318327B2 (en) * | 2004-10-26 | 2008-01-15 | Respironics In-X, Inc. | Liquefying and storing a gas |
| US7412835B2 (en) * | 2005-06-27 | 2008-08-19 | Legall Edwin L | Apparatus and method for controlling a cryocooler by adjusting cooler gas flow oscillating frequency |
| KR101175938B1 (en) | 2012-07-23 | 2012-08-22 | 한국항공우주연구원 | Cryocooler with variable compression depending on variations in load |
| JP5978045B2 (en) * | 2012-07-26 | 2016-08-24 | 株式会社アルバック | Decompression system |
| JP6878100B2 (en) * | 2017-04-04 | 2021-05-26 | 株式会社東芝 | How to operate the cryogenic device and the cryogenic device |
| JP6886412B2 (en) * | 2018-01-29 | 2021-06-16 | 住友重機械工業株式会社 | Cryogenic cooling system |
| JP6975077B2 (en) | 2018-03-07 | 2021-12-01 | 住友重機械工業株式会社 | Power supply system for cryogenic freezers and cryogenic freezers |
| KR102033991B1 (en) * | 2019-04-04 | 2019-11-08 | 주식회사 휘온 | power saving device of helium compressor for cryo pump system, and power saving method using the same |
| WO2023189805A1 (en) * | 2022-03-28 | 2023-10-05 | 住友重機械工業株式会社 | Method for operating cryogenic refrigerator |
-
1998
- 1998-10-21 JP JP29950898A patent/JP2000121192A/en active Pending
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