JP3976649B2 - Cryogenic refrigerator and operation method thereof - Google Patents

Cryogenic refrigerator and operation method thereof Download PDF

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JP3976649B2
JP3976649B2 JP2002245498A JP2002245498A JP3976649B2 JP 3976649 B2 JP3976649 B2 JP 3976649B2 JP 2002245498 A JP2002245498 A JP 2002245498A JP 2002245498 A JP2002245498 A JP 2002245498A JP 3976649 B2 JP3976649 B2 JP 3976649B2
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pressure
control
compressor
pressure side
differential pressure
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JP2004085048A (en
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正道 安東
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Sumitomo Heavy Industries Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、極低温冷凍装置、及び、その運転方法に係り、特に、圧縮機から複数の冷凍機へ供給される差圧をインバータにより制御するようにした極低温冷凍装置、及び、その運転方法に関する。
【０００２】
【従来の技術】
動作ガスの圧力変化と体積変化との位相差を利用して極低温を発生するギフォード・マクマホン（ＧＭ）式やパルス管式の冷凍機が知られている。このような冷凍機を、半導体製造装置のスパッタリング装置等のような大型の装置の複数箇所に設置する場合、各冷凍機毎に、該冷凍機に高圧及び低圧を供給する圧縮機を設けるのではなく、コスト低減及び省エネルギーを目的として、図１に示す如く、１台の圧縮機１０で圧縮され、高圧ライン１２及び低圧ライン１４を介して供給されるガス（例えばヘリウムガス）を、多数の冷凍機２１−２５に供給することが考えられている。
【０００３】
この際、圧縮機１０をインバータにより供給差圧ΔＰが一定になるよう制御することが考えられており、そのような圧縮機をインバータ圧縮機と称する。
【０００４】
【発明が解決しようとする課題】
しかしながら、インバータ圧縮機には、機械的共振や焼付き防止のため、運転周波数に下限値がある。そこで、圧縮機の容量や運転周波数を、冷凍機の最大同時運転台数に合わせて設定すると、少数台運転の場合、圧縮機の運転周波数が下限値となり、差圧制御ができなくなる。すると、供給差圧ΔＰの上昇を招き、冷凍装置の適正運転ができない恐れがある。そのため、最低運転台数を設ける必要が生じ、任意の台数による運転ができないという問題点を有していた。
【０００５】
本発明は、前記従来の問題点を解決するべくなされたもので、インバータ圧縮機を用いた場合でも、冷凍機の少数台運転を可能とすることを課題とする。
【０００６】
【課題を解決するための手段】
本発明は、インバータにより供給差圧が一定になるよう制御される圧縮機と、該圧縮機から圧力が供給される複数の冷凍機とを備えた極低温冷凍装置であって、前記圧縮機と冷凍機の間に設けられた、高圧側と低圧側を連通し、バイパス量を制御して供給差圧を一定に制御可能なバイパス弁と、高圧側の圧力を監視する高圧側圧力計と低圧側の圧力を監視する低圧側圧力計、あるいは、高圧側と低圧側との間に設けた差圧計と、該高圧側圧力計から得られた圧力と低圧側圧力計から得られた圧力との差圧、あるいは、該差圧計から得られた差圧が設定値以上に上昇した時は、圧縮機の運転周波数を下限値で固定して、前記バイパス弁による制御に切換え、該差圧が設定値以下に下降した時は、前記バイパス弁による制御を停止して、前記インバータによる制御に切換える手段と、を備え、該バイパス弁と該インバータによる制御により、該供給差圧を設定範囲内に制御することにより、前記課題を解決したものである。
【０００７】
又、前記の極低温冷凍装置を備えたことを特徴とするクライオポンプ、超伝導マグネット、核磁気共鳴イメージング（ＭＲＩ）装置、計測装置を提供するものである。
【０００８】
本発明は、又、圧縮機から複数の冷凍機へ供給される差圧をインバータにより制御するようにした極低温冷凍装置の運転方法であって、高圧側圧力計から得られた圧力と低圧側圧力計から得られた圧力との差圧、あるいは、差圧計から得られた差圧が設定値以上に上昇した時は、圧縮機の運転周波数を下限値で固定して、圧縮機と冷凍機の間に設けた、高圧側と低圧側を連通し、バイパス量を制御して供給差圧を一定に制御可能なバイパス弁による制御に切換え、該差圧が設定値以下に下降した時は、前記バイパス弁による制御を停止して、前記インバータによる制御に切換えて、該バイパス弁と該インバータによる制御により、該供給差圧を設定範囲内に制御するようにして、前記課題を解決したものである。
【０００９】
【発明の実施の形態】
以下図面を参照して、本発明の実施形態を詳細に説明する。
【００１０】
本実施形態は、図１に示したような極低温冷凍装置において、図２に示す如く、圧縮機１０と冷凍機２１〜２５の間に、高圧ライン１２と低圧ライン１４とを連通するバイパス弁３０と、高圧ライン１２の圧力Ｐ１を監視する高圧側圧力計３２と、低圧ライン１４の圧力Ｐ２を監視する低圧側圧力計３４とを設けたものである。
【００１２】
又、前記バイパス弁３０として、前記高圧側圧力計３２と低圧側圧力計３４の出力Ｐ１、Ｐ２に応じて圧力を調整する圧力調整弁を用いることもできる。この場合には、コストはかかるが、制御は確実である。なお、高圧側圧力計３２と低圧側圧力計３４を独立して設けるのではなく、差圧ΔＰを直接測定可能な差圧計を設けて、圧力計の数を減らしても良い。
【００１３】
このようにして、高圧ライン１２と低圧ライン１４の供給差圧ΔＰを監視し、圧縮機１０の運転周波数が下限値となり、差圧がある一定値Ｂ以上に上昇した場合は、圧縮機１０の運転周波数を下限値で固定とし、バイパス弁３０による差圧制御（バイパス制御と称する）に切換える。又、圧縮機１０が固定周波数に切換えられていた場合、冷凍機の運転台数が増えると差圧ΔＰが減少することがあるが、差圧がある一定値Ｃ以下となった場合は、バイパス弁３０を閉じ、再びインバータ圧縮機１０による差圧制御（インバータ（ＩＮＶ）制御と称する）に切換える。
【００１４】
図３に運転状態の例を示す。時刻ｔ０〜ｔ１間は、運転台数が従来の最低運転台数（例えば２台）以上なので、従来と同様にインバータ圧縮機１０により差圧ΔＰを目標値Ａとする差圧制御（ＩＮＶ制御）を行う。時刻ｔ１で最低運転台数未満の１台となると、差圧ΔＰが上昇してくるので、設定値Ｂになった時刻ｔ２で、圧縮機の運転周波数を最低回転数に固定して、バイパス弁３０による差圧制御（バイパス制御）に切換える。時刻ｔ２で運転台数が増えて最低運転台数以上になると、差圧ΔＰが低下してくるので、設定値Ｃになった時刻ｔ４で、バイパス弁３０を閉じて、ＩＮＶ制御を再開する。
【００１５】
このようにして、インバータ圧縮機１０の運転周波数が下限値となった場合においても、バイパス弁３０で差圧を一定に制御できるので、極低温冷凍装置が少数台運転の場合でも、極低温冷凍装置から安定した性能を得ることができる。
【００１６】
なお、前記バイパス弁３０の種類はインラインリリーフバルブや圧力調整弁に限定されず、図４に示す如く、オリフィス４０（４１）と開閉弁４２（４３）の組合せを用いてもよい。この際、図４に示したように、口径の異なるオリフィス４０、４１を、それぞれ開閉弁４２、４３で開閉することによって、バイパス量を変えることもできる。
【００１７】
本発明の適用対象は、クライオポンプを用いたスパッタリング装置に限定されず、超伝導マグネット（例えばＭＣＺ等）、ＭＲＩ装置、計測装置（例えばＸ線回折測定装置、光透過測定装置、フォトルミネッセンス測定装置、超伝導体測定装置、ホール効果測定装置）等にも適用できることは明らかである。
【００１８】
【発明の効果】
本発明によれば、インバータ差圧制御とバイパスによる差圧制御を切換えることによって、極低温冷凍装置の少数台運転時に安定した性能を得ることが可能となる。
【図面の簡単な説明】
【図１】１台のインバータ圧縮機で複数の冷凍機を運転するようにした冷凍装置の構成を示すブロック線図
【図２】本発明の実施形態の構成を示すブロック線図
【図３】前記実施形態の作用を説明するためのタイムチャート
【図４】前記実施形態の変形例で用いられるバイパス弁を示す構成図
【符号の説明】
１０…インバータ圧縮機
１２…高圧ライン
１４…低圧ライン
２１〜２５…冷凍機
３０…バイパス弁
３２…高圧側圧力計
３４…低圧側圧力計
４０、４１…オリフィス
４２、４３…開閉弁[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cryogenic refrigeration apparatus and an operation method thereof, and in particular, a cryogenic refrigeration apparatus in which a differential pressure supplied from a compressor to a plurality of refrigerators is controlled by an inverter, and an operation method thereof. About.
[0002]
[Prior art]
There are known Gifford McMahon (GM) type and pulse tube type refrigerators that generate a cryogenic temperature using a phase difference between a pressure change and a volume change of an operating gas. When installing such a refrigerator in a plurality of locations of a large apparatus such as a sputtering apparatus of a semiconductor manufacturing apparatus, a compressor that supplies high pressure and low pressure to the refrigerator is provided for each refrigerator. For the purpose of cost reduction and energy saving, as shown in FIG. 1, a gas (for example, helium gas) compressed by a single compressor 10 and supplied through a high pressure line 12 and a low pressure line 14 is supplied to a number of refrigeration units. It is considered to supply the machine 21-25.
[0003]
At this time, it is considered that the compressor 10 is controlled by the inverter so that the supply differential pressure ΔP becomes constant, and such a compressor is referred to as an inverter compressor.
[0004]
[Problems to be solved by the invention]
However, the inverter compressor has a lower limit for the operating frequency in order to prevent mechanical resonance and seizure. Therefore, if the capacity and operating frequency of the compressor are set in accordance with the maximum number of simultaneously operated refrigerators, the operating frequency of the compressor becomes a lower limit value in the case of operation with a small number of units, and differential pressure control cannot be performed. Then, the supply differential pressure ΔP is increased, and there is a possibility that proper operation of the refrigeration apparatus cannot be performed. For this reason, it is necessary to provide a minimum number of units to be operated, and there is a problem that it is impossible to operate with an arbitrary number of units.
[0005]
The present invention has been made to solve the above-described conventional problems, and an object of the present invention is to enable operation of a small number of refrigerators even when an inverter compressor is used.
[0006]
[Means for Solving the Problems]
The present invention is a cryogenic refrigeration apparatus comprising a compressor controlled to have a constant supply differential pressure by an inverter, and a plurality of refrigerators to which pressure is supplied from the compressor, the compressor A bypass valve that is connected between the high-pressure side and communicates the high-pressure side and the low-pressure side, and can control the amount of bypass to keep the supply differential pressure constant, a high-pressure side pressure gauge that monitors the high-pressure side pressure, and the low- pressure side A low pressure side pressure gauge for monitoring the pressure on the side, or a differential pressure gauge provided between the high pressure side and the low pressure side, and a pressure obtained from the high pressure side pressure gauge and a pressure obtained from the low pressure side pressure gauge . differential pressure, or when the differential pressure obtained from the difference pressure gauge rises above the set value, the operation frequency of the compressor by fixing lower limit value, switching to control by the bypass valve, the differential pressure setting When the value falls below the value, control by the bypass valve is stopped and the And means for switching the control by over data, and by control of the bypass valve and the inverter, the Rukoto be controlled within a set range of the feed pressure difference is obtained by solving the above problems.
[0007]
Further, the present invention provides a cryopump, a superconducting magnet, a nuclear magnetic resonance imaging (MRI) apparatus, and a measuring apparatus characterized by including the cryogenic refrigeration apparatus.
[0008]
The present invention is also a method for operating a cryogenic refrigeration apparatus in which a differential pressure supplied from a compressor to a plurality of refrigerators is controlled by an inverter, the pressure obtained from a high-pressure side pressure gauge and a low-pressure side. When the pressure difference from the pressure gauge or the pressure difference obtained from the pressure gauge rises above the set value, the compressor operating frequency is fixed at the lower limit, and the compressor and refrigerator provided between communicates the high pressure side and low pressure side to control the bypass quantity of the supply pressure difference switched to control by the controllable bypass valve in constant, when said differential pressure is lowered below a set value, which stops the control of the bypass valve is switched to the control by the inverter, the control of the bypass valve and the inverter, in the so that to control within a set range the supply differential pressure, it has solved the problems It is.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0010]
In this embodiment, in the cryogenic refrigeration apparatus as shown in FIG. 1, as shown in FIG. 2, a bypass valve that connects the high pressure line 12 and the low pressure line 14 between the compressor 10 and the refrigerators 21-25. 30, a high pressure side pressure gauge 32 that monitors the pressure P <b> 1 of the high pressure line 12, and a low pressure side pressure gauge 34 that monitors the pressure P <b> 2 of the low pressure line 14.
[0012]
The bypass valve 30 may be a pressure adjusting valve that adjusts the pressure according to the outputs P1 and P2 of the high-pressure side pressure gauge 32 and the low-pressure side pressure gauge 34. In this case, the cost is high, but the control is reliable. Instead of providing the high-pressure side pressure gauge 32 and the low-pressure side pressure gauge 34 independently, a differential pressure gauge that can directly measure the differential pressure ΔP may be provided to reduce the number of pressure gauges.
[0013]
In this way, the supply differential pressure ΔP of the high pressure line 12 and the low pressure line 14 is monitored, and when the operating frequency of the compressor 10 becomes the lower limit value and the differential pressure rises above a certain value B, the compressor 10 The operating frequency is fixed at the lower limit value, and the control is switched to differential pressure control (referred to as bypass control) by the bypass valve 30. Further, when the compressor 10 is switched to a fixed frequency, the differential pressure ΔP may decrease as the number of operating refrigerators increases, but when the differential pressure becomes a certain value C or less, the bypass valve 30 is closed and the control is again switched to the differential pressure control (referred to as inverter (INV) control) by the inverter compressor 10.
[0014]
FIG. 3 shows an example of the operating state. Between times t0 and t1, the number of operating units is equal to or more than the conventional minimum operating number (for example, 2 units), so that the differential pressure control (INV control) with the differential pressure ΔP as the target value A is performed by the inverter compressor 10 as in the conventional case. . When the number becomes less than the minimum number of operating units at time t1, the differential pressure ΔP increases. At time t2 when the set value B is reached, the operating frequency of the compressor is fixed at the minimum number of revolutions, and the bypass valve 30 Switch to differential pressure control (bypass control). When the number of operating units increases at time t2 and exceeds the minimum number of operating units, the differential pressure ΔP decreases. Therefore, at time t4 when the set value C is reached, the bypass valve 30 is closed and INV control is resumed.
[0015]
Thus, even when the operating frequency of the inverter compressor 10 reaches the lower limit value, the differential pressure can be controlled to be constant by the bypass valve 30. Therefore, even when the cryogenic refrigeration apparatus is operated in a few units, the cryogenic refrigeration is performed. Stable performance can be obtained from the apparatus.
[0016]
The type of the bypass valve 30 is not limited to an inline relief valve or a pressure regulating valve, and a combination of an orifice 40 (41) and an on-off valve 42 (43) may be used as shown in FIG. At this time, as shown in FIG. 4, the bypass amount can be changed by opening and closing the orifices 40 and 41 having different diameters by the opening and closing valves 42 and 43, respectively.
[0017]
The application target of the present invention is not limited to a sputtering apparatus using a cryopump, but is a superconducting magnet (for example, MCZ), an MRI apparatus, a measuring apparatus (for example, an X-ray diffraction measuring apparatus, a light transmission measuring apparatus, a photoluminescence measuring apparatus). It is obvious that the present invention can also be applied to a superconductor measuring device, a Hall effect measuring device, and the like.
[0018]
【The invention's effect】
According to the present invention, by switching between the inverter differential pressure control and the differential pressure control by bypass, it is possible to obtain stable performance during operation of a few cryogenic refrigeration apparatuses.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a configuration of a refrigeration apparatus in which a plurality of refrigerators are operated by one inverter compressor. FIG. 2 is a block diagram showing a configuration of an embodiment of the present invention. FIG. 4 is a time chart for explaining the operation of the embodiment. FIG. 4 is a block diagram showing a bypass valve used in a modification of the embodiment.
DESCRIPTION OF SYMBOLS 10 ... Inverter compressor 12 ... High pressure line 14 ... Low pressure line 21-25 ... Refrigerator 30 ... Bypass valve 32 ... High pressure side pressure gauge 34 ... Low pressure side pressure gauge 40, 41 ... Orifice 42, 43 ... On-off valve

Claims (6)

インバータにより供給差圧が一定になるよう制御される圧縮機と、
該圧縮機から圧力が供給される複数の冷凍機とを備えた極低温冷凍装置であって、
前記圧縮機と冷凍機の間に設けられた、高圧側と低圧側を連通し、バイパス量を制御して供給差圧を一定に制御可能なバイパス弁と、
高圧側の圧力を監視する高圧側圧力計と低圧側の圧力を監視する低圧側圧力計、あるいは、高圧側と低圧側との間に設けた差圧計と、
該高圧側圧力計から得られた圧力と低圧側圧力計から得られた圧力との差圧、あるいは、該差圧計から得られた差圧が設定値以上に上昇した時は、圧縮機の運転周波数を下限値で固定して、前記バイパス弁による制御に切換え、該差圧が設定値以下に下降した時は、前記バイパス弁による制御を停止して、前記インバータによる制御に切換える手段と、
を備え、
該バイパス弁と該インバータによる制御により、該供給差圧を設定範囲内に制御することを特徴とする極低温冷凍装置。A compressor controlled by an inverter so that the supply differential pressure becomes constant;
A cryogenic refrigeration apparatus comprising a plurality of refrigerators to which pressure is supplied from the compressor,
A bypass valve that is provided between the compressor and the refrigerator, communicates the high pressure side and the low pressure side, and can control the amount of bypass to control the supply differential pressure constant ;
A high pressure side pressure gauge for monitoring the pressure on the high pressure side and a low pressure side pressure gauge for monitoring the pressure on the low pressure side, or a differential pressure gauge provided between the high pressure side and the low pressure side;
When the differential pressure between the pressure obtained from the high-pressure side pressure gauge and the pressure obtained from the low-pressure side pressure gauge , or when the differential pressure obtained from the differential pressure gauge rises above a set value, the compressor is operated. fixing the frequency at the lower limit value, switching to control by the bypass valve, when said differential pressure is lowered below a set value, and stops the control of the bypass valve, and means for switching the control by the inverter,
Equipped with a,
The control of the bypass valve and the inverter, the cryogenic refrigeration system, characterized that you control within a set range the supply pressure difference. 請求項１に記載の極低温冷凍装置を備えたことを特徴とするクライオポンプ。  A cryopump comprising the cryogenic refrigeration apparatus according to claim 1. 請求項１に記載の極低温冷凍装置を備えたことを特徴とする超伝導マグネット。  A superconducting magnet comprising the cryogenic refrigeration apparatus according to claim 1. 請求項１に記載の極低温冷凍装置を備えたことを特徴とする核磁気共鳴イメージング装置。  A nuclear magnetic resonance imaging apparatus comprising the cryogenic refrigeration apparatus according to claim 1. 請求項１に記載の極低温冷凍装置を備えたことを特徴とする計測装置。  A measuring apparatus comprising the cryogenic refrigeration apparatus according to claim 1. 圧縮機から複数の冷凍機へ供給される差圧をインバータにより制御するようにした極低温冷凍装置の運転方法であって、
高圧側圧力計から得られた圧力と低圧側圧力計から得られた圧力との差圧、あるいは、差圧計から得られた差圧が設定値以上に上昇した時は、圧縮機の運転周波数を下限値で固定して、圧縮機と冷凍機の間に設けた、高圧側と低圧側を連通し、バイパス量を制御して供給差圧を一定に制御可能なバイパス弁による制御に切換え、
該差圧が設定値以下に下降した時は、前記バイパス弁による制御を停止して、前記インバータによる制御に切換えて、
該バイパス弁と該インバータによる制御により、該供給差圧を設定範囲内に制御することを特徴とする極低温冷凍装置の運転方法。An operation method of a cryogenic refrigeration apparatus in which a differential pressure supplied from a compressor to a plurality of refrigerators is controlled by an inverter,
When the differential pressure between the pressure obtained from the high-pressure side pressure gauge and the pressure obtained from the low-pressure side pressure gauge , or when the differential pressure obtained from the differential pressure gauge rises above the set value, the operating frequency of the compressor is Fixed at the lower limit, communicated between the high pressure side and the low pressure side provided between the compressor and the refrigerator, and switched to control by a bypass valve that can control the supply pressure differential by controlling the bypass amount.
When the pressure difference is lowered below a set value, and stops the control of the bypass valve is switched to the control by the inverter,
The control of the bypass valve and the inverter, operating method of the cryogenic refrigeration system, characterized that you control within a set range The supply differential pressure.
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